JP4615411B2 - Magnetic disk substrate processing equipment - Google Patents

Description

  The present invention relates to a magnetic disk substrate processing apparatus.

The substrate for a magnetic disk is formed by punching a metal (aluminum alloy) strip into a donut shape with a press die equipped with a die, a punch and a stripper. Processing (grinding of inner and outer edges, surface grinding) ⇒ plating processing ⇒ Finished by finishing process. (For example, patent document 1 mentioned later).
As shown in FIG. 17, on the outer edge of the circular substrate 1 (blank material) punched out of the metal strip,
A sag (end face sag) 11 is formed on the shear surface side (lower surface side in the figure) cut by the die blade during punching, while a fracture surface side (upper surface side in the figure) broken by the punch blade is broken. As a result, burrs 10 and fine irregularities are formed. The sagging 11 and the burr 10 are similarly formed on the inner edge of the circular substrate 1 by the inner edge of the punch and the outer edge of the hole punch.

The burr 10 is removed from the circular substrate 1 by polishing at the time of substrate processing. At a time earlier than that, the outer edge portion of the burr 10 is a stacking portion (stacked portion) in the process of laminating the substrate 1 or the like. The other burrs 10 and fine irregularities on the outer edge part drop off, and chips (hereinafter referred to as “burr waste”) are generated.
Note that this burr scraps are particularly generated at the outer edge portion of the substrate 1, but are also generated at the inner edge portion. More debris at the inner edge is generated more particularly in the stacking portion where the substrate is supported using the inner edge (the inner edge of the substrate contacts the stacked guide pins).

A part of the burr debris remains attached on the substrate (substrate surface), and the burr debris is sandwiched between the substrates when the substrates are stacked, and then the substrate is pressed. When annealing or shrink wrapping, or during transportation after shrink wrapping, a surface pressure is applied, resulting in a state embedded in the substrate surface. The burrs that are embedded in the substrate surface fall off from the substrate surface by surface grinding during subsequent substrate processing, but if the amount of embedded burrs on the substrate surface is greater than the grinding allowance for the substrate Then, after the surface grinding, the recessed portion of the embedded portion becomes a bit, and the quality of the disc is deteriorated.
JP 05-314474 A

  The problem to be solved by the present invention is to provide a magnetic disk substrate processing apparatus that eliminates the influence on products such as debris that falls off the substrate in the process after punching.

The substrate processing device for a magnetic disk according to the present invention, in order to solve the above problems, a pickup unit 3 for holding a circular substrate 1 donut shape first, of the circular substrate 1 held by the pick-up means 3 deburring guide 41 edge is rolling bordered, or is a deburring unit 4 including the deburring guide 41 bordered rolling the inner edge of the circular substrate 1 held by the pick-up unit 3, the burr The take-up guide 41 has a groove-like portion 41a through which the corresponding edge portion of the circular substrate 1 is guided, is divided with the center of the groove-like portion 41a as a boundary, and is a part that is cantilevered and supported rotatably on a shaft 44. The biasing member 40b is formed of a coil spring configured to press at least one part 42 against the other part 43, and the biasing member 4 is provided at the tip of the shaft 44. In that a flange-like spring receiver for receiving the 0b is a feature.

Secondly, the deburring means 4 further includes a deburring guide 40 that is brought into rolling contact with the outer edge of the circular substrate 1 held by the pickup means 3.

Third, the circular substrate 1 is rotated when the corresponding deburring guide 41 contacts the circular substrate 1 held by the pickup means 3.

Fourthly, a biasing member 41b that presses the deburring guide 41 in the direction of the circular substrate 1 is provided.

Fifthly, the deburring guide 41 has a groove-like portion 41a through which a corresponding edge portion of the circular substrate 1 is guided.

Sixth, the pick-up means 4 is arranged so as to be dispersed on the outer periphery of the circular substrate 1 and then reduces the mutual interval until it is pressed against the outer edge of the circular substrate 1 to chuck the outer edge of the circular substrate 1 It is characterized by being constituted by three or more outer edge chucks 35 in a state of being performed.

According to the machining apparatus of the magnetic disk substrate according to the present invention, a pickup means for holding a circular substrate, deburring means including a deburring guide the inner edge of the circular substrate held by the pick-up means is rolling bordered is provided with the bets can be removed burrs and fine irregularities or the like of the inner edge efficiently in a short time.

First Embodiment FIG. 1 is a flowchart of a conveyance line in which a magnetic disk substrate processing apparatus according to a first embodiment of the present invention is installed, and a conveyance line such as a belt conveyor that conveys a circular substrate 1 after punching. In the middle of 2, a pick-up unit 3 a that picks up and holds the circular substrate 1 being transported, and a deburring unit 4 a that deburrs the outer edge and the outer edge of the held circular substrate 1. They are installed in order.
The pickup unit 3 a includes a pickup unit 3, and the deburring unit 4 a includes a deburring unit 4. When a plurality of pickup means 3 are installed, it is preferable to install a plurality of deburring means 4 so as to correspond thereto.
The circular substrate 1 from which the burrs on the outer and inner edges have been removed by the deburring means 4 of the deburring section 4a is supplied to the stacking section 5 while being held by the pickup means 3, and sequentially stacked. Once returned to the transfer line 2, it is transferred to the stacking unit 5 as it is or after being washed and sequentially stacked.

The pickup means 3 is composed of, for example, a single suction pad 30 as shown in FIG. 2 or a plurality of suction pads 30 as shown in FIGS. 3 and 4, and these suction pads 30 are not shown through a suction pipe 31. Connected to.
As shown in FIGS. 3 and 4, in the pickup means 3 having a plurality of suction pads 30, each suction pad 30 is connected to one suction pipe 31 via a branch pipe 32 and a connecting tool 33.

The other pickup means 3 is constituted by a plurality of inner edge chucks 34 that chuck the inner edge of the circular substrate 1 as shown in FIGS. 5 and 6, for example. Each inner edge chuck 34 is guided (FIG. 5) into the hole of the substrate 1 in a state where it does not interfere with the inner edge of the circular substrate 1 being conveyed (in a state where it is in contact with or close to the inner edge) (FIG. 5), and then the hook- shaped portion 34a at the tip portion. The circular substrate 1 is configured to chuck the circular substrate 1 by expanding the mutual distance until the inside is pressed against the inner edge of the circular substrate 1.
As described above, each inner edge chuck 34, hook-shaped portion 34a as the inner edge of the circular substrate 1 to the tip portion to ensure the chucking circular substrate 1 is guided is formed.

Still another pickup means 3 is constituted by three or more outer edge chucks 35 that chuck the outer edge of the circular substrate 1 as shown in FIG. 7, for example. Each of the outer edge chucks 35 is formed in substantially the same shape as the inner edge chuck 34, and is arranged so as to be dispersed on the outer periphery of the substrate 1 without interfering with the outer edge of the circular substrate 1 being conveyed. The circular substrate 1 is configured to chuck the circular substrate 1 by reducing the mutual interval until the inside of the bowl- shaped portion (not shown) is pressed against the outer edge of the circular substrate 1. That is, the circular substrate 1 is picked up while being sandwiched between the outer edge chucks 35.
The pick-up means 3 holds the circular substrate 1 and then supplies the circular substrate 1 to the deburring unit 4a shown in FIG.

FIG. 8 is a cross-sectional view showing a state where deburring is performed on the outer edge and inner edge of the circular substrate 1 sucked and held by the suction pad 30, and FIG. 9 is a pickup means including the suction pad 30 of FIG. 3 is a schematic plan view in which 3 is omitted.
As shown in the figure, each deburring means 4 has a plurality of (four in this embodiment, four at 90 degree intervals) burrs that the outer edge of the circular substrate 1 sucked and held by the suction pad 30 is in rolling contact (rolling contact). A deburring guide 40 and a deburring guide 41 with which the inner edge of the circular substrate comes into rolling contact are provided. Each of the deburring guides 40 and 41 may be fixed, but when they are in the form of a roller as shown in the drawing, it is preferable that they are installed in a state of freely rotating (spinning).
Groove-shaped portions 40a and 41a for guiding the outer edge portion and the inner edge portion of the circular substrate 1 are formed on the outer peripheral portions of the deburring guides 40 and 41, respectively.
The deburring guides 40 and 41 are preferably made of a material harder than that of the circular substrate 1, and for example, alloy tool steel (SKD), high-speed tool steel (SKH), and tool steel (SK) are preferably used. Each of these deburring guides 40 and 41 is preferably subjected to nitriding treatment, hard Cr plating, or the like at the contact portion with the circular substrate 1 in order to extend the life of the deburring guides 40 or 41 and improve the sharpness when removing the deburring. .

When the suction pad 30 constituting the pickup means 3 is supplied to the deburring means 4 while holding the circular substrate 1, the inner edge portion of the circular substrate 1 is brought into contact with the deburring guide 41 of the stationary inner edge portion. Operates on. In this state, the deburring guide 40 at each outer edge advances from the retracted position as indicated by a two-dot chain line in FIG. 9 toward the circular substrate 1 and contacts the outer edge of the circular substrate 1.
When the deburring guide 40 at each outer edge contacts the outer edge of the circular substrate 1, the suction pad 30 rotates the circular substrate 1 by one turn clockwise as indicated by the arrows in FIGS. And deburring the inner edge.
For example, in a processing apparatus in which the inner edge deburring guide 41 is not installed, when the circular substrate 1 is rotated by ¼ in the state shown in FIG. 9, deburring is performed on the outer edge of the substrate 1.
After the deburring process, the deburring guide 40 at each outer edge is retracted to the retracted position indicated by the two-dot chain line in FIG. 9, and then the suction pad 30 causes the circular substrate 1 to be detached from the deburring guide 41 at the inner edge. 1 is supplied to the stacking unit 5 in FIG. 1 or returned to the transport line 2 and returned to the pickup unit 3a in FIG. When the suction pad 30 returns or returns to the pickup unit 3a, it is preferable to rotate the suction pad 30 in the reverse direction by the same amount as the amount of rotation so that the suction pad 30 is completely returned to its original state.

Reference numerals 40b and 41b in FIG. 8 are urging members made of, for example, coil springs. The urging member 40b presses the deburring guide 40 on the outer edge against the outer edge of the substrate 1, and the other urging members 41b are on the inner edge. By pressing the deburring guide 41 against the inner edge of the substrate 1, deburring from the outer edge and the inner edge of the substrate 1 is promoted. Even when the thickness of the circular substrate 1 varies, the biasing members 40b and 41b can absorb the variation.
In the processing apparatus of the embodiment, the groove portions 40a and 41a of the deburring guide 40 at each outer edge portion and the deburring guide 41 at the inner edge portion may have, for example, a circular arc shape in cross section, but as shown enlarged in FIG. The cross section is preferably triangular, and the angle θ at which the groove portions 40a and 41a contact the outer and inner edge portions of the circular substrate 1 is preferably 45 ° or more. When the contact angle θ is 45 ° or more, it is suitable not only for deburring the fracture surface of the outer edge and the inner edge of the substrate 1 but also for removing fine irregularities other than the burr at the same time.
1 is preferably provided on the side of the transport line 2 so that the debris removed from the circular substrate 1 does not fall on the transport line 2.

According to the processing apparatus of the first embodiment, since the deburring process is performed in a state where the circular substrate 1 is picked up and held, burrs including fine irregularities on the outer edge portion and the inner edge portion of the circular substrate 1 are illustrated. As shown by 16, it is removed from the substrate 1, and adverse effects on the substrate 1 due to burrs and the like can be prevented in a later process.
Further, since the deburring process is performed with the circular substrate 1 picked up and held, not only the deburring process of the outer edge part but also the deburring process of the inner edge part can be easily performed.

Second Embodiment FIG. 11 is a schematic plan view partially showing a processing apparatus according to a second embodiment in which the arrangement of the deburring guide 40 at the outer edge portion and the deburring guide 41 at the inner edge portion is changed. Is omitted.
The outer edge deburring guides 40 are arranged at intervals of 180 °, and the inner edge deburring guides 41 are also arranged at similar angular intervals.
In the initial state where the circular substrate 1 held by the pick-up means is supplied to the position of the deburring means 4, the deburring guides 40, 40 on the outer edge are retracted to a position where they do not interfere with the outer edge of the circular substrate 1, The inner edge deburring guides 41, 41 are close to each other and retracted to a position where they do not interfere with the inner edge of the circular substrate 1.
In this state, the circular substrate 1 held by the pickup means is lowered to the level position of each of the deburring guides 40 and 41, and then the deburring guides 40 and 40 at the outer edge portion are advanced from the retracted position and the outer edge portion of the circular substrate 1 is moved. The deburring guides 40 and 41 are operated so that the deburring guides 41 and 41 at the inner edge advance from the retracted positions close to each other and come into contact with the inner edge of the circular substrate 1 respectively.
In this state, the circular substrate 1 is rotated at least 180 ° in one direction by the pickup means 3 to deburr the outer edge portion and the inner edge portion of the circular substrate 1.
Subsequent operations of the pickup means and other configurations and operations and effects of the apparatus are substantially the same as those of the processing apparatus according to the first embodiment, and a description thereof will be omitted.

Third Embodiment FIG. 12 is a cross-sectional view partially showing a processing apparatus according to a third embodiment in which the deburring means is different.
The deburring means 4 has a circular ring-shaped (or circular tray-shaped) outer edge deburring guide 40 whose required inner diameter is larger than the outer diameter of the circular substrate 1 and a required outer diameter than the inner diameter of the circular substrate 1. The deburring guide 41 of the small inner edge part is provided, This deburring guide 41 is comprised similarly to the same guide 41 of 1st Embodiment.
The circular ring-shaped deburring guide 40 is formed with a groove-shaped portion 40a that is guided so that the outer edge portion of the circular substrate 1 is in contact with the inner wall of the outer edge portion.
The circular substrate 1 supplied above the deburring means 4 while being held by the suction pad 30 is a groove of the deburring guide 40 in which the outer edge portion of the circular substrate 1 is the outer edge portion from the position indicated by the two-dot chain line in the figure. After being lowered by the suction pad 30 until reaching the level of the dent 40a, a part of the outer edge comes into contact with the groove 40a of the deburring guide 40 and a part of the inner edge is a groove of the deburring guide 41 of the inner edge. It moves horizontally until it comes into contact with the shaped part 41a. In this state, the circular substrate 1 is rotated once by the suction pad 30 to deburr the outer edge portion and the inner edge portion of the circular substrate 1, and then the suction pad 30 holds the circular substrate 1 as shown in FIG. Return to the position of the two-dot chain line.
Subsequent operations and other configurations, functions, and effects are substantially the same as those of the processing apparatus of the first embodiment, and thus description thereof is omitted.

Fourth Embodiment FIG. 13 is a partially enlarged cross-sectional view of a processing apparatus according to a fourth embodiment in which the deburring means 4 is in another form.
The roller-shaped deburring guide 40 in the outer edge portion is composed of parts 42 and 43 that are divided into two from the center of the groove-shaped portion 40a, and both the parts 42 and 43 are rotatably attached to the same shaft 44. The one part 42 is pressed against the other part 43 by a biasing member 40b such as a coil spring. Therefore, in a state where the outer edge portion of the circular substrate 1 is guided and brought into contact with the groove-like portion 40a between them, the parts 42 and 43 are sandwiched by the inclined portions of the groove-like portion 40a formed by both the parts 42 and 43. As a result, the deburring guide 40 is pressed against the outer edge of the circular substrate 1.
The processing apparatus according to the fourth embodiment has an advantage that the configuration of pressing by the urging member 40b is simplified, and the removal of burrs and fine irregularities is more efficiently performed.
The inner edge deburring guide 41 can also have the same configuration as the outer edge deburring guide 40.

Fifth Embodiment FIG. 14 is a cross-sectional view of a processing apparatus according to a fifth embodiment in which the deburring means 4 is further different.
The deburring guide 40 for deburring the outer edge is a mortar-shaped or dish-shaped member having an inverted conical surface 40c on the inner side of the outer edge, and the deburring guide on the inner edge side having a conical surface 41c at the tip in the center. 41 is attached.
The circular substrate 1 held by the suction pad 30 and other pickup means 3 has its outer edge portion on its fracture surface side (upper surface side in FIG. 17) contacted with the inverted conical surface 40c of the deburring guide 40, and its inner edge portion is deburred. The guide 41 is brought into contact with the conical surface 41c. Since the substrate 1 in this state is pressed against the deburring guides 40 and 41 by the biasing member 40b provided in the pickup means 3, it is necessary to rotate the substrate 1 or the deburring guides 40 and 41 by a predetermined angle (360 °). No) Burr on the inner and outer edges of the substrate 1 is removed when rotated in one direction.
In the processing apparatus of this embodiment, since the deburring guides 40 and 41 are integrally formed, the operation of the deburring means 4 and the operation of the circular substrate 1 are simpler, and each of the deburring guides 40 and 41 is provided. The reverse conical surface 40c and the conical surface 41c exhibit the same function as the groove-shaped portions 40a and 41a.
Since other operations and effects of the processing apparatus of the fifth embodiment are the same as those of the processing apparatus of the above-described embodiments, description thereof will be omitted.

Sixth Embodiment FIG. 15 is a cross-sectional view of a processing apparatus according to a sixth embodiment in which the deburring means 4 is further different.
In the apparatus of this embodiment, the deburring guide 41 on the inner edge side having the same form as that of FIG. 14 is installed separately from the deburring guide 40 on the outer edge side. Since it is the same as that of FIG.
14 and 15, the deburring guides 40 and 41 can be configured to be pressed against the outer and inner edge portions of the circular substrate 1 by the urging member.

Other Embodiments In the above-described embodiment (FIG. 1), the circular substrate 1 immediately after the metal (aluminum alloy) strip is punched into a donut shape is transported by the transport line 2, and the pickup means 3 is placed in the middle of the transport line 2. And deburring means 4 are sequentially installed. From the viewpoint of eliminating the influence of burrs on the circular substrate 1 as much as possible in the subsequent process, the circular substrate 1 is preferably configured as in the above embodiment, but after the circular substrate 1 after punching is subjected to pressure annealing, the circular substrate 1 Even if 1 is supplied to the transport line 2 and the pickup means 3 and the deburring means 4 are sequentially installed in the middle of the transport line 2 as in FIG.

The step of performing the deburring process on the outer edge portion of the circular substrate 1 and the step of performing the deburring process on the inner edge portion are preferably performed in parallel as in each of the above embodiments. It can be carried out even if any one of the deburring of the part is preceded. When the inner edge chuck 34 and the outer edge chuck 35 are used as the pickup means 3 and deburring processing is performed on the inner and outer edge portions of the circular substrate 1, any deburring process is preceded.
In each of the above embodiments, the state in which the circular substrate 1 is held horizontally and the deburring process is performed is illustrated. However, the posture of holding the circular substrate 1 in the deburring process may be performed in a state other than the horizontal state. Can do. In particular, when the inner edge chuck 34 or the outer edge chuck 35 is used as the pickup means 3, it is suitable for holding the circular substrate 1 in a posture other than horizontal.

In the processing apparatus and the processing method using the processing apparatus according to the first to fourth embodiments, the deburring guides 40 and 41 are rotated while the circular substrate 1 is fixed when the deburring process is performed. In addition, it is also possible to implement a configuration in which an urging member is installed on the circular substrate 1 and the circular substrate 1 is pressed against the deburring guides 40 and 41.
The deburring process is preferably performed on the outer edge part and the inner edge part of the circular substrate 1, but it is sufficient to perform the deburring process only on the outer edge part because the influence is largely on the outer edge burr. Is effective. Further, in order to remove even small irregularities, deburring is preferably performed on the outer edge and / or the upper and lower (both) surfaces of the outer edge, but the burr is on the fracture surface side of the substrate 1. Since it is formed (on the upper surface side in FIG. 17), a sufficient effect can be obtained even if deburring is performed only on the outer edge and / or the inner edge of the fracture surface (upper surface side in FIG. 17) of the substrate 1.

  A disk in which a processing device of each example (Table 1) using only the outer edge deburring guide and a deburring guide on the outer and inner edge portions and a processing device of a comparative example were prototyped, and a circular substrate was processed by these processing devices. For each (40 sheets each), the presence or absence of pits on the processed substrate was examined, and the results are shown in Table 1 together with the material of each deburring guide.

Substrate An aluminum alloy substrate (blank material) for a 3.5 inch magnetic disk having an outer diameter of 96.2 mm and a thickness of 1.84 mm is used.
Example:
The arrangement of the deburring guide on the outer edge of the circular substrate or on the outer / inner edge is the same as in the second embodiment (FIG. 11), and the groove-shaped portion of the deburring guide in contact with the substrate is shown in FIG. A substrate having a triangular cross section and a circular arc shape were used, and in each case, the substrate was rotated 180 °. As the pickup means, the suction pad shown in FIG. 2 and the inner edge chuck shown in FIGS.
Comparative Example 1:
As shown in FIG. 18, 20 substrates 1 after punching were stacked on the rotating cradle 7, the brush 6 was pressed against the outer edge portion in a fixed state, and the substrate 1 was rotated at 100 rpm for 10 minutes.
Comparative Example 2:
Unprocessed substrate after punching Evaluation of pit defects Samples were investigated in the process before substrate processing (shrink pack), ◎ if there is no pit, shallow even if there are pits in the subsequent process (substrate processing) The case where the level is removable is indicated by ◯, and the case where there is a deep pit which cannot be removed even in a later process is indicated by ×.

Table 1

  As shown in Table 1, in the samples of Examples 1 to 16 according to the present invention, no pit defect occurred, and in the sample of Example 17 in which only the outer edge portion was deburred after pressure annealing, the occurrence of pits was Recognized, but remained at a level that could be removed during substrate processing. On the other hand, in Comparative Example 1 using a device using a nylon brush and Comparative Example 2 which is a non-processed substrate after punching, pit defects occurred in both cases.

In each of the above embodiments, the case where an aluminum alloy substrate for a magnetic disk is a processing target has been described. However, the present invention is another circular substrate that should prevent the generation of pits on the product surface of the substrate, This includes the case where a substrate (blank material) from which a strip is punched is used as a processing target.

It is a flowchart of the conveyance line which installed the processing apparatus of the board | substrate for magnetic discs of 1st Embodiment which concerns on this invention. It is a perspective view which shows one form of the pick-up means in the processing apparatus of FIG. It is a perspective view which illustrates other forms of pick-up means. It is a perspective view which illustrates further another form of a pick-up means. It is a fragmentary top view which illustrates further another form of a pickup means. It is sectional drawing of the pick-up means of FIG. It is a fragmentary top view which illustrates further another form of a pickup means. It is sectional drawing which shows the deburring process means in the processing apparatus of FIG. It is a schematic plan view of the deburring means of FIG. It is a partial expanded sectional view of the contact part of the deburring guide of the deburring means of FIG. 8, and the outer edge part of a circular board | substrate. It is a partial schematic plan view of the processing apparatus of 2nd Embodiment containing the other form of a deburring process means. It is a fragmentary sectional view of the processing apparatus of 3rd Embodiment containing the further another form of a deburring means. It is a partial expanded sectional view of the processing apparatus of 4th Embodiment containing the further another form of a deburring means. It is sectional drawing of the processing apparatus of 5th Embodiment containing the further another form of a deburring means. It is sectional drawing of the processing apparatus of 6th Embodiment containing the further another form of a deburring means. It is a partial expanded sectional view of the circular board | substrate after the deburring process by the processing apparatus which concerns on this invention. It is a partial expanded sectional view of an unprocessed circular substrate. It is the perspective view which illustrated the processing apparatus of the comparative example.

DESCRIPTION OF SYMBOLS 1 Circular substrate 10 Burr 11 End surface sag 2 Conveyance line 3 Pick-up means 3a Pick-up part 30 Suction pad 31 Suction pipe 32 Branch pipe 33 Connecting tool 34 Inner edge chuck 34a Hook 35 Outer chuck 4 Deburring means 4a Deburring part 40 Burr Removal guide (outer edge side)
41 Deburring guide (inner edge side)
40a, 41a Groove portions 40b, 41b Energizing member 40c Reverse conical surface 41c Conical surface 42, 43 Parts 44 Shaft 5 Stacking portion 6 Nylon brush 7 Rotating base

Claims (6)

Pickup means for holding a donut-shaped circular board (1) (3), deburring guide the inner edge of the circular substrate (1) which is held by the pick-up means (3) is rolling bordered (41), or deburring means including deburring guide (41) which is rolling bordered to the inner edge of the circular substrate held by said pickup means (3) (1) (4) and a said deburring guide (41) Has a groove-like portion (41a) through which the corresponding edge of the circular substrate (1) is guided, is divided with the center of the groove-like portion (41a) as a boundary, and is rotatable about the shaft (44). An urging member (40b) comprising a coil spring configured to hold and support at least one part (42) against the other part (43) is provided, and includes the shaft (44). ) An apparatus for processing a magnetic disk substrate, comprising a flange-shaped spring receiver for receiving the member (40b) . Before SL deburring means (4) is characterized in that before Symbol further comprising a deburring guide (40) which is rolling bordered to the outside edge of the pick-up means circular substrate held by (3) (1), The apparatus for processing a magnetic disk substrate according to claim 1. 2. The rotary substrate (1) according to claim 1 , wherein when the corresponding deburring guide (41) contacts the circular substrate (1) held by the pickup means (3) , the circular substrate (1) is rotated. 3. A processing apparatus for a magnetic disk substrate according to 2. The magnetic disk substrate processing according to any one of claims 1 to 3 , further comprising an urging member (41b) for pressing the deburring guide (41) in the direction of the circular substrate (1). apparatus. Said deburring guide (41), the corresponding edge of the circular substrate (1) is characterized by having a groove portion (41a) to be guided, the magnetic disk according to any one of claims 1-4 Substrate processing equipment. It said pickup means (4) is an outer edge of the said circular substrate by reducing the mutual spacing until pressed against the outer edge of the circular substrate (1) after being placed so as to disperse to the outer periphery of the circular substrate (1) The apparatus for processing a magnetic disk substrate according to claim 1, comprising three or more outer edge chucks (35) in a state of chucking the magnetic disk.

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