WO2011030505A1 - Inner circumference edge blade dressing method - Google Patents

Inner circumference edge blade dressing method Download PDF

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Publication number
WO2011030505A1
WO2011030505A1 PCT/JP2010/005034 JP2010005034W WO2011030505A1 WO 2011030505 A1 WO2011030505 A1 WO 2011030505A1 JP 2010005034 W JP2010005034 W JP 2010005034W WO 2011030505 A1 WO2011030505 A1 WO 2011030505A1
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Prior art keywords
dressing
blade
inner peripheral
peripheral blade
edge
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PCT/JP2010/005034
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French (fr)
Japanese (ja)
Inventor
和也 中川
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信越半導体株式会社
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Publication of WO2011030505A1 publication Critical patent/WO2011030505A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/06—Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D63/00—Dressing the tools of sawing machines or sawing devices for use in cutting any kind of material, e.g. in the manufacture of sawing tools

Definitions

  • the present invention relates to a dressing method for an inner peripheral blade, and more particularly to a dressing method for an inner peripheral blade of an inner peripheral slicer that blocks an ingot such as a silicon single crystal, which is a material of a semiconductor element, or cuts it into a wafer.
  • An ingot made of silicon single crystal or the like manufactured by the CZ method or the like has a cone-shaped end portion (top portion and tail portion) in a cylindrical body portion.
  • the cone-shaped end portions are cut off to form only a cylindrical body portion, and the body portion is cut into a plurality of blocks as necessary.
  • processing for making the block into a wafer is performed.
  • an inner peripheral blade slicer, an outer peripheral blade slicer, and the like have been often used. With the recent increase in wafer diameter, many band saws have been used.
  • FIG. 7 is an explanatory view showing a state in which an ingot is cut into a wafer using an inner peripheral blade slicer.
  • the inner peripheral blade 101 of the inner peripheral slicer 110 has a blade edge 103 formed by electrodepositing diamond abrasive grains on the inner peripheral portion of a donut-shaped thin plate 104.
  • the ingot 113 is pressed and held by a clamper (not shown) or the like.
  • the end face of the ingot 113 on the side to be cut by the wafer is vacuum sucked by the suction means 111.
  • the inner peripheral blade 101 is driven to rotate, and the ingot 113 is cut into wafers by feeding the inner peripheral blade 101 relatively downward from above in this state. If the cutting is repeated in this way, the surface diamond abrasive grains are buried due to accumulation of sludge (cutting powder) on the cutting edge 103 of the inner peripheral blade 101, or the abrasive grains are worn or dropped by the cutting. The cutting ability will be reduced. If cutting is performed in such a state, as shown in FIG. 8A, the inner peripheral blade 101 is displaced in a direction in which the cutting edge is easily cut in either the + direction or the ⁇ direction in the axial direction of the ingot 113. .
  • the quality may cause a cut in the cut surface, chipping, a wafer with a large warp, or a wafer with a large processing distortion on the cut surface. This may cause a reduction in life due to damage to the thin plate 104 of the peripheral blade 101 and equipment damage due to blade breakage.
  • FIG. 8B when the inner peripheral blade 101 is displaced in the negative direction (on the suction means side), a force acts in the direction of pressing the wafer being cut against the suction means 111, resulting in a result. The wafer is broken during the cutting, and the wafer is detached from the suction means 111 by the rotation of the inner peripheral blade 101. For this reason, it is necessary to perform dressing when the displacement of the inner peripheral blade 101 during cutting reaches a predetermined size, and there are table dressing and hand dressing.
  • This table dressing is a method of cutting dress material with an inner peripheral blade.
  • a slicing machine that performs dressing by feeding a dressing material in a cutting direction of a rotating inner peripheral blade blade and moving the dressing material in a direction perpendicular to the cutting direction of the inner peripheral blade blade in the cut state ( Patent Document 1).
  • a dressing device of a slicing machine is disclosed in which dressing is performed by horizontally cutting the dressing material into the cutting edge of the inner peripheral blade, and then pulling the inner peripheral blade obliquely downward or diagonally upward (Patent Document 2). reference).
  • the displacement of the inner peripheral blade that is caused by the unevenness of the sharpness of the inner peripheral blade cannot be corrected. That is, in any of the conventional methods as described above, when the inner peripheral blade is first cut into the dressing material, dressing is performed up to a sharp part, so unevenness of sharpness is eliminated with one dressing. The displacement of the inner peripheral blade cannot be corrected. By repeating this dressing many times, the correction of the blade displacement could be improved to some extent, but the wear of the abrasive grains was promoted and the life of the inner peripheral blade was shortened, and the effect was not sufficient.
  • the present invention has been made in view of the above-described problems, and effectively performs local dressing of the edge of the inner peripheral blade blade in a short time without performing hand dressing work by an operator. It is an object to provide a dressing method for an inner peripheral blade that can effectively correct the displacement of the inner peripheral blade and can improve the life of the inner peripheral blade.
  • an inner peripheral blade in which abrasive grains are fixed to an inner peripheral portion of a doughnut-shaped thin plate to form a cutting edge, is cut into a dressing material to dress the cutting edge.
  • a method of dressing an inner peripheral blade the step of preparing the dressing material in which a reference groove is formed in advance, the step of selecting whether to dress the left or right side of the cutting edge, and the opening of the reference groove
  • the inner peripheral blade and dressing material are arranged so that the corner side of the reference groove matches the foremost position of the cutting edge so that the portion side is opposite to the selected side when dressing Selecting the dressing by simultaneously moving the blade edge in the depth direction of the dressing material and the direction of the edge selected when the blade edge is dressed. Cutting the portion of the cutting edge opposite to the dressed material into the dressing material without contacting the dressing material, and locally dressing only the portion on the selected side of the cutting edge.
  • the step of preparing the dressing material in which the reference groove is formed in advance, the step of selecting whether to dress the left or right part of the cutting edge, and the opening side of the reference groove is selected to be dressed.
  • a step of relatively moving the inner peripheral blade and the dressing material so that the position of the corner of the opening of the reference groove and the foremost position of the cutting edge coincide with each other so as to be opposite to the side The blade tip is relatively sent simultaneously in the depth direction of the dressing material and in the direction of the selected side when dressing the dressing material, so that the portion of the cutting edge opposite to the side selected when dressing is placed on the dressing material.
  • the width of the reference groove is larger than 1 ⁇ 2 of the width of the cutting edge.
  • the width of the reference groove is larger than 1 ⁇ 2 of the width of the cutting edge, the portion of the cutting edge opposite to the side selected when dressing is not more reliably brought into contact with the dressing material. Can be dressed.
  • the feed amount when feeding the blade edge relatively in the depth direction of the dressing material is the same as the height of the blade edge, and the feed amount when feeding the blade edge in the selected direction when dressing is performed. It is preferable to make it equal to 1/2 of the width of the blade edge. In this way, the feed amount when feeding the blade edge relatively in the depth direction of the dressing material is the same as the height of the blade edge, and the feed amount when feeding the blade edge in the direction of the selected side when dressing is performed. If the width is made equal to 1/2 of the width of the blade edge, dressing only on the selected side can be performed more reliably and sufficiently.
  • the step of relatively moving the inner peripheral blade and the dressing material and the step of locally dressing only the portion on the selected side of the blade edge it is preferable to repeatedly perform the step of relatively moving the inner peripheral blade and the dressing material and the step of locally dressing only the portion on the selected side of the blade edge. In this way, if the step of relatively moving the inner peripheral blade and the dressing material and the step of locally dressing only the portion on the selected side of the blade tip are repeated, only the selected side is dressed. The displacement of the inner peripheral blade can be more reliably corrected by performing dressing more sufficiently.
  • a step of preparing a dressing material in which a reference groove is formed in advance, a step of selecting whether the left or right part of the blade edge is dressed, and the opening of the reference groove The inner peripheral blade and dressing material are arranged so that the corner side of the reference groove matches the foremost position of the cutting edge so that the portion side is opposite to the selected side when dressing
  • a step of moving relatively, and simultaneously sending the cutting edge relatively in the depth direction of the dressing material and the direction of the side selected when dressing the cutting edge, so that the side opposite to the side selected when dressing is performed Cutting a portion of the blade edge into the dressing material without contacting the dressing material, and locally dressing only a portion on the selected side of the blade edge.
  • table dressing and hand dressing are known as dressing methods for the inner peripheral blade.
  • the inner peripheral blade is first cut into the dressing material to dress the entire cutting edge of the inner peripheral blade. It was difficult to correct the blade blade displacement.
  • the present inventor has intensively studied to solve such problems.
  • the table dressing in order to correct the displacement of the inner peripheral blade, it is only necessary to perform dressing only on the side of the inner peripheral blade where the cutting edge is not sharp. If dressing is performed with the blade edge aligned to the corner and the side where the blade edge is not dressed is the opening side of the groove, it is possible to effectively dress only the side with the sharp edge of the blade of the inner peripheral blade, and the number of dressings
  • the present invention was completed by conceiving that it can be reduced.
  • FIG. 1 is a flowchart for explaining the steps of the dressing method for an inner peripheral blade of the present invention.
  • a dress material in which a reference groove as shown in FIG. 2A is formed in advance is prepared (see A in FIG. 1). That the height h d of the reference groove 5,
  • the dressing material 2 is effective as long as the dressing material 2 is formed so as not to be broken below the reference groove 5 during dressing without completely separating the dressing material 2. It is preferable because it can be used.
  • the width W d of the reference groove 5 is not particularly limited, but is, for example, larger than 1 ⁇ 2 of the width of the cutting edge 3 of the inner peripheral blade 1 to be dressed, and particularly the same as the width of the cutting edge 3. If it is formed like this, it is possible to more reliably prevent the non-dressing side of the blade edge 3 from coming into contact with the dressing material 2 and minimize the consumption of the dressing material 2 due to the formation of the reference groove 5 Can be limited.
  • the reference groove 5 can be formed by cutting into the dress material 2 using an inner peripheral blade 1 as shown in FIG. At this time, it is more preferable to previously form the reference groove with an inner peripheral blade having a small displacement. Of course, it can also be formed using another blade or the like. This step may be performed after a step (see B in FIG. 1) for selecting whether to dress the left or right side of the cutting edge, which will be described next.
  • the displacement direction of the inner peripheral blade 1 is caused by the fact that the balance of the sharpness of the curve aa′-c and the curve bb′-c is lost when considering the cross section of the blade edge 3, for example, FIG.
  • the curve aa′-c is sharper.
  • the displacement in order to make the balance of the sharpness of the curve aa′-c and the curve bb′-c uniform, only the one with the worse sharpness, that is, the curve bb′-c is dressed. It is important to. On the contrary, in the case of displacement in the direction of arrow R, the displacement can be corrected by dressing only the curve a-a'-c.
  • FIG. 3A is a diagram illustrating a state after the inner peripheral blade 1 and the dressing material 2 are moved when the side selected for dressing is the right side, for example, and FIG. It is the figure which expanded the part enclosed with the dotted line of (). As shown in FIG.
  • the opening side of the reference groove 5 is opposite to the side selected when dressing, and the position of the corner R 1 of the opening of the reference groove 5 and the foremost position of the cutting edge 3 Are coincident with each other (this position is hereinafter referred to as a reference position).
  • the inner peripheral blade 1 and the dress material 2 can be moved by using a moving mechanism as shown in FIG. 6, for example. That is, a holder 6 for fixing the dressing material 2, means 7 for moving the holder 6 in the horizontal direction relative to the inner peripheral blade 1, and an inner peripheral blade 1 relatively perpendicular to the holder 6.
  • the moving means 8 in the direction the moving means 7 in the horizontal direction and the moving means 8 in the vertical direction are moved while being controlled simultaneously.
  • the movement accuracy can be controlled at least 0.01 mm or less.
  • a mechanism including a ball screw, a linear guide, a servo motor, and the like can be used.
  • FIG. 3 (C) the cutting edge 3 is relatively sent in the depth direction of the dressing material 2 and the direction of the selected side when dressing the cutting edge 3 at the same time, thereby selecting the side selected for dressing. Cuts into the dressing material 2 without contacting the opposite side of the cutting edge 3 with the dressing material 2 and locally dresses only the selected side of the cutting edge 3 (see D in FIG. 1).
  • FIG. 3C is a diagram showing an example in which the side selected for dressing is the right side.
  • the feed speeds of the blade edge 3 and the dressing material 2 are not particularly limited and can be determined as appropriate according to the material and size of the inner peripheral blade 1 and the dressing material 2.
  • the feeding speed in the direction of the selected side can be set to 10 to 30 mm / min, and the feeding speed in the depth direction of the dressing material 2 can be set to 30 to 50 mm / min.
  • the blade edge 3 and the dressing material 2 can be fed using a moving mechanism as shown in FIG.
  • the cutting edge 3 relatively dress material
  • the dressing may be performed by simultaneously feeding in the depth direction 2 and the left side of the blade edge 3.
  • the dressing side of the blade edge 3 can be easily switched.
  • the feed amount when the blade edge 3 is relatively fed in the depth direction of the dressing material 2 is set to be equal to or less than the height h b of the blade edge 3.
  • the feed amount when feeding in the selected direction is equal to or less than 1 ⁇ 2 of the width W b of the blade edge 3.
  • a step of relatively moving the inner peripheral blade 1 and the dressing material 2 (FIG. 1C) and a step of locally dressing only the portion on the selected side of the blade tip 3 (FIG. 1D). ) Can be repeated (see E in FIG. 1).
  • the dressing of only the selected side can be performed more sufficiently when dressing, and the displacement of the inner peripheral blade 1 can be more reliably corrected.
  • the reference position in the process of relatively moving the inner peripheral blade 1 and the dressing material 2 to be repeatedly performed is as shown in FIG. It may be the angle R 2 of the opening of the reference groove 5 of the lower dress material 2 portions that cut in.
  • dressing is performed as described above from the reference position. More when repeating these processes, as shown in FIG. 4, it is possible to the corner R 3 of the opening portion of the reference groove 5 dress material 2 after the cut due to the dressing as a reference position.
  • the dressing 2 may be repeatedly cut in the lateral direction of the dressing material 2 instead of repeatedly dressing the portion cut by the dressing in the previous process.
  • the width of the reference groove 5 gradually increases, and the same dressing material 2 reaches the limit of use depending on its length. In this case, the dress material 2 needs to be replaced.
  • Example 2 According to the dressing method of the inner peripheral blade of the present invention as shown in FIG. 1, the inner peripheral blade was dressed, and the silicon single crystal ingot was cut into a wafer using the inner peripheral blade after dressing.
  • the displacement amount of the inner peripheral blade at the time of cutting was measured with a displacement sensor, and the number of cutting until the measured value exceeded the range of ⁇ 30 to 120 ⁇ m and the life of the inner peripheral blade were measured.
  • a silicon single crystal ingot was cut by an inner peripheral blade slicer equipped with an inner peripheral blade, and the displacement amount of the inner peripheral blade exceeded 120 ⁇ m, that is, a + direction (left) as shown in FIG.
  • the one which is displaced in the direction) is dressed on one side (right direction) side of the blade edge as shown in FIGS.
  • As the inner peripheral blade a blade having a blade width of 0.5 mm and a blade height of 0.5 mm was used.
  • the reference groove provided in the dress material had a width of 0.5 mm and a depth of 3 mm.
  • the dress material is fed in the depth direction at a feed rate of 40 mm / min, the feed amount is 0.5 mm which is the same as the height of the blade edge, and when the blade edge 3 is dressed, the feed in the selected direction is fed.
  • Dressing was performed at a speed of 20 mm / min and a feed amount of 0.25 mm, which is half the width of the blade edge. Then, Steps C and D shown in FIG. 1 were repeated 12 times. The above was performed on 100 different inner peripheral blades.
  • the dressing method of the inner peripheral blade of the present invention can effectively correct the displacement of the inner peripheral blade without performing the hand dressing operation by the operator, and also improves the life of the inner peripheral blade. I was able to confirm that
  • the curve aa′-cb′-b portion considering the case of displacement in the direction of the arrow L, when the inner peripheral blade is cut into the dress material, the curve aa′-cb′-b portion However, the aa′-c portion should not be dressed.
  • the dressing material is moved in the horizontal direction with respect to the inner peripheral blade to dress only the curve bb ′ portion.
  • This curve bb ′ portion is subjected to dressing twice in total. . That is, the curve bb′-c should be dressed, but dressing a portion where aa′-c is not necessary, and dressing bb ′ twice, the effect of dressing is low. This is thought to be the cause of worsening blade displacement and reducing blade life.
  • the curve aa′-cb′-b is dressed.
  • the curve aa′-c portion should not be dressed.
  • the inner peripheral blade is pulled out while the dressing material is moved in the horizontal direction with respect to the inner peripheral blade, and the curved db-e portion is dressed, but the curved db portion is dressed twice in total. Therefore, dressing that does not require the be part is performed. That is, the curve bb′-c should be dressed, but dressing the unnecessary curve aa′-c, and dressing the curve db twice are less effective in dressing. Is considered to be the cause of worsening blade displacement and reducing blade life.
  • the present invention is not limited to the above embodiment.
  • the above-described embodiment is an exemplification, and the present invention has any configuration that has substantially the same configuration as the technical idea described in the claims of the present invention and that exhibits the same effects. Are included in the technical scope.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

Provided is an inner circumference edge blade dressing method comprising a process wherein there is prepared a dressing block where a reference groove is formed in advance; a process wherein a selection is made as to which side (left or right ) of a blade tip is to be dressed; a process wherein the opening portion of the reference groove is positioned opposite the blade tip side that is selected to be dressed, and wherein the inner circumference edge blade and the dressing block are moved relative to each other so that the position of the corner of the opening of the reference groove coincides with the position of the foremost end of the blade tip; and a process wherein the blade tip is sent in the depth direction of the dressing block and simultaneously in the direction of the blade tip side that is selected to be dressed, this sending movement being relative between the blade tip and the dressing block, wherein thereby the blade tip is made to cut into the dressing block in such a way that the blade tip portion opposite the blade tip side that is selected to be dressed does not come into contact with the dressing block, and wherein as a result, only that side of the blade tip which is selected is locally dressed. According to the inner circumference edge blade dressing method provided above, the inner circumference edge blade tip is locally dressed in an effective manner in a short time, and thereby the displacement of the inner circumference edge blade can be effectively corrected, with the result that the life of the inner circumference edge blade can be improved.

Description

内周刃ブレードのドレッシング方法Dressing method of inner peripheral blade
　本発明は、内周刃ブレードのドレッシング方法に関し、特に半導体素子の素材となる例えばシリコン単結晶等のインゴットをブロック、或いはウェーハに切断する内周刃スライサーの内周刃ブレードのドレッシング方法に関する。
　 The present invention relates to a dressing method for an inner peripheral blade, and more particularly to a dressing method for an inner peripheral blade of an inner peripheral slicer that blocks an ingot such as a silicon single crystal, which is a material of a semiconductor element, or cuts it into a wafer.
　ＣＺ法等によって製造されたシリコン単結晶等のインゴットは円柱状の胴体部にコーン状の端部（トップ部およびテイル部）を有している。このようなインゴットの加工においては、これらコーン状の端部を切り離し円柱状の胴体部のみとし、その胴体部を必要に応じて複数のブロックに切断する。次いでそのブロックをウェーハとするための加工を行う。
　このようなコーン状の端部の切断加工や胴体部を複数のブロックに切断加工する場合には、内周刃スライサー、外周刃スライサーなどが多く用いられてきた。近年のウェーハの大口径化に伴ってバンドソーも多く使用されるようになってきた。 An ingot made of silicon single crystal or the like manufactured by the CZ method or the like has a cone-shaped end portion (top portion and tail portion) in a cylindrical body portion. In the processing of such an ingot, the cone-shaped end portions are cut off to form only a cylindrical body portion, and the body portion is cut into a plurality of blocks as necessary. Next, processing for making the block into a wafer is performed.
When cutting such a cone-shaped end portion or cutting the body portion into a plurality of blocks, an inner peripheral blade slicer, an outer peripheral blade slicer, and the like have been often used. With the recent increase in wafer diameter, many band saws have been used.
　図７は、内周刃スライサーを用いてインゴットをウェーハに切断する様子を示した説明図である。
　図７に示すように、内周刃スライサー１１０の内周刃ブレード１０１は、ドーナツ状薄板１０４の内周部にダイヤモンド砥粒が電着されて刃先１０３が形成されている。インゴット１１３はクランパ（不図示）等によって押圧されて保持されている。そして、インゴット１１３のウェーハに切断される側の端面は吸着手段１１１によって真空吸着されている。 FIG. 7 is an explanatory view showing a state in which an ingot is cut into a wafer using an inner peripheral blade slicer.
As shown in FIG. 7, the inner peripheral blade 101 of the inner peripheral slicer 110 has a blade edge 103 formed by electrodepositing diamond abrasive grains on the inner peripheral portion of a donut-shaped thin plate 104. The ingot 113 is pressed and held by a clamper (not shown) or the like. The end face of the ingot 113 on the side to be cut by the wafer is vacuum sucked by the suction means 111.
　そして、内周刃ブレード１０１が回転駆動され、この状態で内周刃ブレード１０１を相対的に上方から下方に送り出すことによってインゴット１１３をウェーハに切断していく。
　このようにして切断を重ねていくと、内周刃ブレード１０１の刃先１０３にスラッジ（切断粉末）が堆積するなどして表面のダイヤモンド砥粒が埋もれたり、切断によって砥粒が摩耗、或いは脱落したりしてその切断能力が低下してしまう。このような状態で切断を行うと、図８（Ａ）に示すように、インゴット１１３の軸方向で＋方向又は－方向のどちらか刃先の切れ易い方向へ内周刃ブレード１０１が変位してしまう。 Then, the inner peripheral blade 101 is driven to rotate, and the ingot 113 is cut into wafers by feeding the inner peripheral blade 101 relatively downward from above in this state.
If the cutting is repeated in this way, the surface diamond abrasive grains are buried due to accumulation of sludge (cutting powder) on the cutting edge 103 of the inner peripheral blade 101, or the abrasive grains are worn or dropped by the cutting. The cutting ability will be reduced. If cutting is performed in such a state, as shown in FIG. 8A, the inner peripheral blade 101 is displaced in a direction in which the cutting edge is easily cut in either the + direction or the − direction in the axial direction of the ingot 113. .
　そして、この内周刃ブレード１０１の変位の大きさによっては品質面では切断面の段差、チッピング（カケ）、反りの大きいウェーハ、切断面の加工歪みが大きいウェーハを生じる原因となり、設備面では内周刃ブレード１０１の薄板１０４の損傷による寿命低下、ブレード破断による設備損害の原因となり得る。
　例えば、図８（Ｂ）に示すように、内周刃ブレード１０１が－方向（吸着手段側）に変位した場合、切断中のウェーハを吸着手段１１１に押しつける方向で力が作用する為に結果として切断中にウェーハが割れてしまい、内周刃ブレード１０１の回転によりウェーハが吸着手段１１１から外れ飛ばされてしまう。
　このため切断中の内周刃ブレード１０１の変位が所定の大きさに達した時にドレッシングを行う必要があり、その方法としてテーブルドレッシングとハンドドレッシングがある。 Depending on the magnitude of the displacement of the inner peripheral blade 101, the quality may cause a cut in the cut surface, chipping, a wafer with a large warp, or a wafer with a large processing distortion on the cut surface. This may cause a reduction in life due to damage to the thin plate 104 of the peripheral blade 101 and equipment damage due to blade breakage.
For example, as shown in FIG. 8B, when the inner peripheral blade 101 is displaced in the negative direction (on the suction means side), a force acts in the direction of pressing the wafer being cut against the suction means 111, resulting in a result. The wafer is broken during the cutting, and the wafer is detached from the suction means 111 by the rotation of the inner peripheral blade 101.
For this reason, it is necessary to perform dressing when the displacement of the inner peripheral blade 101 during cutting reaches a predetermined size, and there are table dressing and hand dressing.
　このテーブルドレッシングは、内周刃ブレードでドレス材を切り込む方法である。例えば、ドレス材を回転する内周刃ブレードの切断方向に送り込み、切り込んだ状態でドレス材を内周刃ブレードの切断方向と直交する方向に移動させてドレッシングを行うスライシングマシンが開示されている（特許文献１参照）。また、ドレス材を内周刃ブレードの刃先に水平に切り込ませた後、内周刃ブレードを斜め下方又は斜め上方に引き抜いてドレッシングを行うスライシングマシンのドレッシング装置が開示されている（特許文献２参照）。 This table dressing is a method of cutting dress material with an inner peripheral blade. For example, there is disclosed a slicing machine that performs dressing by feeding a dressing material in a cutting direction of a rotating inner peripheral blade blade and moving the dressing material in a direction perpendicular to the cutting direction of the inner peripheral blade blade in the cut state ( Patent Document 1). Further, a dressing device of a slicing machine is disclosed in which dressing is performed by horizontally cutting the dressing material into the cutting edge of the inner peripheral blade, and then pulling the inner peripheral blade obliquely downward or diagonally upward (Patent Document 2). reference).
　さらに、内周刃ブレードの刃先をドレス材に対して斜め上方に切り込み、その状態から内周刃ブレードをドレス材から水平に引き抜くことにより、刃先の後端上側部分を切り込み溝の谷部に当接させてドレッシングを行うドレッシング方法が開示されている（特許文献３参照）。
　 In addition, the blade edge of the inner peripheral blade is cut obliquely upward with respect to the dressing material, and the inner peripheral blade is pulled out of the dressing material horizontally from this state, so that the upper part of the rear end of the blade edge contacts the valley of the cutting groove. A dressing method in which dressing is performed in contact is disclosed (see Patent Document 3).
特開平８－３１８５２５号公報JP-A-8-318525 特開平１１－４８１４１号公報JP 11-48141 A 特開平９－１３１７２５号公報JP-A-9-131725
　しかし、上記のような従来の方法でドレッシングを行っても内周刃ブレードの切れ味の不均一によって発生する内周刃ブレードの変位を修正することができなかった。すなわち、上記したような従来の方法はいずれも最初に内周刃ブレードをドレス材に切り込ませる際に切れ味の良い部分までドレッシングしてしまうため、１度のドレッシングで切れ味の不均一が解消されず内周刃ブレードの変位を修正することができない。このドレッシングを何度も繰り返すことでブレード変位の修正を多少改善することはできたが、砥粒の摩耗を進め内周刃ブレードの寿命低下に繋がってしまうし、その効果も十分ではなかった。 However, even if dressing is performed by the conventional method as described above, the displacement of the inner peripheral blade that is caused by the unevenness of the sharpness of the inner peripheral blade cannot be corrected. That is, in any of the conventional methods as described above, when the inner peripheral blade is first cut into the dressing material, dressing is performed up to a sharp part, so unevenness of sharpness is eliminated with one dressing. The displacement of the inner peripheral blade cannot be corrected. By repeating this dressing many times, the correction of the blade displacement could be improved to some extent, but the wear of the abrasive grains was promoted and the life of the inner peripheral blade was shortened, and the effect was not sufficient.
　そこで、従来では作業者がドレス材を直接手で持ち、回転するブレードの刃先の切れにくい面にドレス材を押し当て局部的にドレッシングするハンドドレッシングを行っていた。しかし、このようなハンドドレッシングは危険性が極めて高い作業であり、非常に時間がかかる上、作業者個人のスキルに大きく依存するため、ドレッシング精度にバラツキが発生して安定したドレッシング効果を奏すことができず、内周刃ブレードの変位の修正を安定して行うことができなかった。 Therefore, in the past, the operator directly held the dressing material by hand, and performed hand dressing by locally pressing the dressing material against the hard-to-cut surface of the rotating blade. However, such hand dressing is extremely dangerous work, takes a lot of time, and greatly depends on the skill of the individual worker, so that the dressing accuracy varies and a stable dressing effect is achieved. The displacement of the inner peripheral blade could not be corrected stably.
　本発明は前述のような問題に鑑みてなされたもので、作業者によるハンドドレッシング作業を行うことなく、短時間で効果的に内周刃ブレードの刃先を局所的にドレッシングして内周刃ブレードの変位を効果的に修正でき、また、内周刃ブレードのライフを向上することができる内周刃ブレードのドレッシング方法を提供することを目的とする。 The present invention has been made in view of the above-described problems, and effectively performs local dressing of the edge of the inner peripheral blade blade in a short time without performing hand dressing work by an operator. It is an object to provide a dressing method for an inner peripheral blade that can effectively correct the displacement of the inner peripheral blade and can improve the life of the inner peripheral blade.
　上記目的を達成するために、本発明によれば、ドーナツ状薄板の内周部に砥粒が固着されて刃先が形成された内周刃ブレードをドレス材に切り込ませて前記刃先をドレッシングする内周刃ブレードのドレッシング方法であって、予め基準溝が形成された前記ドレス材を準備する工程と、前記刃先の左右どちら側の部分をドレッシングするかを選択する工程と、前記基準溝の開口部側が前記ドレッシングすると選択した側とは反対側になるようにして、前記基準溝の開口部の角の位置と前記刃先の最先端位置とが一致するように前記内周刃ブレード及びドレス材を相対的に移動する工程と、前記刃先を相対的に前記ドレス材の深さ方向及び前記刃先のドレッシングすると選択した側の方向に同時に送ることによって、該ドレッシングすると選択した側とは反対側の前記刃先の部分を前記ドレス材と接触させずに、前記ドレス材に切り込ませて、前記刃先の選択した側の部分のみを局所的にドレッシングする工程とを有することを特徴とする内周刃ブレードのドレッシング方法が提供される。 In order to achieve the above object, according to the present invention, an inner peripheral blade, in which abrasive grains are fixed to an inner peripheral portion of a doughnut-shaped thin plate to form a cutting edge, is cut into a dressing material to dress the cutting edge. A method of dressing an inner peripheral blade, the step of preparing the dressing material in which a reference groove is formed in advance, the step of selecting whether to dress the left or right side of the cutting edge, and the opening of the reference groove The inner peripheral blade and dressing material are arranged so that the corner side of the reference groove matches the foremost position of the cutting edge so that the portion side is opposite to the selected side when dressing Selecting the dressing by simultaneously moving the blade edge in the depth direction of the dressing material and the direction of the edge selected when the blade edge is dressed. Cutting the portion of the cutting edge opposite to the dressed material into the dressing material without contacting the dressing material, and locally dressing only the portion on the selected side of the cutting edge. An inner peripheral blade dressing method is provided.
　このように、予め基準溝が形成された前記ドレス材を準備する工程と、前記刃先の左右どちら側の部分をドレッシングするかを選択する工程と、前記基準溝の開口部側が前記ドレッシングすると選択した側とは反対側になるようにして、前記基準溝の開口部の角の位置と前記刃先の最先端位置とが一致するように前記内周刃ブレード及びドレス材を相対的に移動する工程と、前記刃先を相対的に前記ドレス材の深さ方向及び前記刃先のドレッシングすると選択した側の方向に同時に送ることによって、該ドレッシングすると選択した側とは反対側の前記刃先の部分を前記ドレス材と接触させずに、前記ドレス材に切り込ませて、前記刃先の選択した側の部分のみを局所的にドレッシングする工程とを有するドレッシング方法であれば、作業者によるハンドドレッシング作業を行うことなく、短時間で効果的に内周刃ブレードの刃先の切れ味の悪い側のみドレッシングを行うことができるので、切断中の内周刃ブレードの変位を効果的に修正できる。その結果、次のドレッシングまでに可能な切断回数が増え、ドレッシング回数の増加を抑制して内周刃ブレードのライフを向上することができる。 In this way, the step of preparing the dressing material in which the reference groove is formed in advance, the step of selecting whether to dress the left or right part of the cutting edge, and the opening side of the reference groove is selected to be dressed. A step of relatively moving the inner peripheral blade and the dressing material so that the position of the corner of the opening of the reference groove and the foremost position of the cutting edge coincide with each other so as to be opposite to the side The blade tip is relatively sent simultaneously in the depth direction of the dressing material and in the direction of the selected side when dressing the dressing material, so that the portion of the cutting edge opposite to the side selected when dressing is placed on the dressing material. If it is a dressing method having a step of cutting into the dressing material without bringing it into contact with and locally dressing only the portion on the selected side of the cutting edge, Since the dressing can be performed only in the short side of the cutting edge of the inner peripheral blade blade effectively in a short time without performing the hand dressing work by, the displacement of the inner peripheral blade blade during cutting can be effectively corrected. . As a result, the number of possible cuttings before the next dressing increases, and the life of the inner peripheral blade can be improved by suppressing the increase in the number of dressings.
　このとき、前記基準溝を、該基準溝の幅が前記刃先の幅の１／２より大きいことが好ましい。
　このように、前記基準溝を、該基準溝の幅が前記刃先の幅の１／２より大きければ、ドレッシングすると選択した側とは反対側の刃先の部分をより確実にドレス材と接触させずにドレッシングすることができる。 At this time, it is preferable that the width of the reference groove is larger than ½ of the width of the cutting edge.
Thus, if the width of the reference groove is larger than ½ of the width of the cutting edge, the portion of the cutting edge opposite to the side selected when dressing is not more reliably brought into contact with the dressing material. Can be dressed.
　またこのとき、前記刃先を相対的に前記ドレス材の深さ方向に送る際の送り量を前記刃先の高さと同じにし、前記刃先のドレッシングすると選択した側の方向に送る際の送り量を前記刃先の幅の１／２と同じにすることが好ましい。
　このように、前記刃先を相対的に前記ドレス材の深さ方向に送る際の送り量を前記刃先の高さと同じにし、前記刃先のドレッシングすると選択した側の方向に送る際の送り量を前記刃先の幅の１／２と同じにすれば、ドレッシングすると選択した側のみのドレッシングをより確実に十分に行うことができる。 Also, at this time, the feed amount when feeding the blade edge relatively in the depth direction of the dressing material is the same as the height of the blade edge, and the feed amount when feeding the blade edge in the selected direction when dressing is performed. It is preferable to make it equal to 1/2 of the width of the blade edge.
In this way, the feed amount when feeding the blade edge relatively in the depth direction of the dressing material is the same as the height of the blade edge, and the feed amount when feeding the blade edge in the direction of the selected side when dressing is performed. If the width is made equal to 1/2 of the width of the blade edge, dressing only on the selected side can be performed more reliably and sufficiently.
　またこのとき、前記内周刃ブレード及びドレス材を相対的に移動する工程と、前記刃先の選択した側の部分のみを局所的にドレッシングする工程とを繰返し行うことが好ましい。
　このように、前記内周刃ブレード及びドレス材を相対的に移動する工程と、前記刃先の選択した側の部分のみを局所的にドレッシングする工程とを繰返し行えば、ドレッシングすると選択した側のみのドレッシングをさらに十分に行って、内周刃ブレードの変位をより確実に修正できる。 Further, at this time, it is preferable to repeatedly perform the step of relatively moving the inner peripheral blade and the dressing material and the step of locally dressing only the portion on the selected side of the blade edge.
In this way, if the step of relatively moving the inner peripheral blade and the dressing material and the step of locally dressing only the portion on the selected side of the blade tip are repeated, only the selected side is dressed. The displacement of the inner peripheral blade can be more reliably corrected by performing dressing more sufficiently.
　本発明では、内周刃ブレードのドレッシング方法において、予め基準溝が形成されたドレス材を準備する工程と、刃先の左右どちら側の部分をドレッシングするかを選択する工程と、前記基準溝の開口部側が前記ドレッシングすると選択した側とは反対側になるようにして、前記基準溝の開口部の角の位置と前記刃先の最先端位置とが一致するように前記内周刃ブレード及びドレス材を相対的に移動する工程と、前記刃先を相対的に前記ドレス材の深さ方向及び前記刃先のドレッシングすると選択した側の方向に同時に送ることによって、該ドレッシングすると選択した側とは反対側の前記刃先の部分を前記ドレス材と接触させずに、前記ドレス材に切り込ませて、前記刃先の選択した側の部分のみを局所的にドレッシングする工程とを有するので、作業者によるハンドドレッシング作業を行うことなく、短時間で効果的に内周刃ブレードの刃先の切れ味の悪い側のみドレッシングを行うことができるので、切断中の内周刃ブレードの変位を効果的に修正できる。その結果、次のドレッシングまでに可能な切断回数が増え、ドレッシング回数の増加を抑制して内周刃ブレードのライフを向上することができる。
　 In the present invention, in the dressing method of the inner peripheral blade, a step of preparing a dressing material in which a reference groove is formed in advance, a step of selecting whether the left or right part of the blade edge is dressed, and the opening of the reference groove The inner peripheral blade and dressing material are arranged so that the corner side of the reference groove matches the foremost position of the cutting edge so that the portion side is opposite to the selected side when dressing A step of moving relatively, and simultaneously sending the cutting edge relatively in the depth direction of the dressing material and the direction of the side selected when dressing the cutting edge, so that the side opposite to the side selected when dressing is performed Cutting a portion of the blade edge into the dressing material without contacting the dressing material, and locally dressing only a portion on the selected side of the blade edge. Therefore, it is possible to perform dressing only on the sharp side of the cutting edge of the inner peripheral blade blade in a short time without performing hand dressing work by the operator, so the displacement of the inner peripheral blade blade during cutting is effective. Can be fixed. As a result, the number of possible cuttings before the next dressing increases, and the life of the inner peripheral blade can be improved by suppressing the increase in the number of dressings.
本発明の内周刃ブレードのドレッシング方法のフロー図である。It is a flowchart of the dressing method of the internal peripheral blade of this invention. ドレス材に形成する基準溝を示す説明図である。（Ａ）基準溝の幅、高さを示す説明図。（Ｂ）基準溝の形成方法の一例を示す説明図。It is explanatory drawing which shows the reference | standard groove | channel formed in a dress material. (A) Explanatory drawing which shows the width | variety and height of a reference | standard groove | channel. (B) Explanatory drawing which shows an example of the formation method of a reference | standard groove | channel. 本発明の内周刃ブレードのドレッシング方法の一部工程を説明する説明図である。（Ａ）刃先の最先端が基準位置に一致するように内周刃ブレード及びドレス材を相対的に移動した状態。（Ｂ）（Ａ）の点線で囲まれた部分を拡大した図。（Ｃ）選択した側の部分のみを局所的にドレッシングする様子。It is explanatory drawing explaining the one part process of the dressing method of the internal peripheral blade of this invention. (A) A state in which the inner peripheral blade and the dressing material are relatively moved so that the cutting edge of the cutting edge coincides with the reference position. (B) The figure which expanded the part enclosed by the dotted line of (A). (C) A state in which only the selected side portion is locally dressed. 本発明の内周刃ブレードのドレッシング方法の一部工程を繰返し行うことによってドレッシングを行う様子を示す説明図である。It is explanatory drawing which shows a mode that dressing is performed by performing repeatedly the one part process of the dressing method of the internal peripheral blade of this invention. 内周刃ブレードの刃先のドレッシングされる部分を説明する説明図である。（Ａ）本発明の内周刃ブレードのドレッシング方法における説明図。（Ｂ）従来の一般的なドレッシング方法における説明図。It is explanatory drawing explaining the part to which the blade edge | tip of an internal peripheral blade is dressed. (A) Explanatory drawing in the dressing method of the internal peripheral blade of this invention. (B) Explanatory drawing in the conventional general dressing method. 本発明の内周刃ブレードのドレッシング方法で用いることができるドレス材及び内周刃ブレードの移動機構の一例を示す概略図である。It is the schematic which shows an example of the dressing material which can be used with the dressing method of the internal peripheral blade of this invention, and the moving mechanism of an internal peripheral blade blade. 一般的な内周刃スライサーを用いてインゴットをウェーハに切断する様子を示す説明図である。It is explanatory drawing which shows a mode that an ingot is cut | disconnected to a wafer using a general inner peripheral blade slicer. 一般的な内周刃スライサーを用いてインゴットをウェーハに切断する際に内周刃ブレードが変位する様子を示す説明図である。（Ａ）内周刃ブレードが変位する様子。（Ｂ）内周刃ブレードが変位した際のウェーハに割れが発生する様子。It is explanatory drawing which shows a mode that an internal peripheral blade is displaced when cut | disconnecting an ingot to a wafer using a general internal peripheral blade slicer. (A) A state in which the inner peripheral blade is displaced. (B) A state in which the wafer is cracked when the inner peripheral blade is displaced.
　以下、本発明について実施の形態を説明するが、本発明はこれに限定されるものではない。
　一般的に内周刃ブレードのドレッシング方法として、テーブルドレッシングとハンドドレッシングが知られている。
　しかし、従来の方法によるテーブルドレッシングでは、最初に内周刃ブレードをドレス材に切り込ませて内周刃ブレードの刃先全体をドレッシングするため、内周刃ブレードの切れ味の不均一によって発生する内周刃ブレードの変位を修正することが困難であった。 Hereinafter, although an embodiment is described about the present invention, the present invention is not limited to this.
Generally, table dressing and hand dressing are known as dressing methods for the inner peripheral blade.
However, in the table dressing by the conventional method, the inner peripheral blade is first cut into the dressing material to dress the entire cutting edge of the inner peripheral blade. It was difficult to correct the blade blade displacement.
　このブレードの変位を修正するために、従来ではハンドドレッシングを行っていた。しかし、このハンドドレッシングは作業者による危険性が極めて高い作業であり、非常に時間がかかる上、作業者個人のスキルに大きく依存するため、ドレッシング精度にバラツキが発生して安定したドレッシング効果を奏すことができず、ブレードの変位の修正を安定して行うことができなかった。また、ドレッシング回数が増えることから内周刃ブレードのライフの低下の原因となっていた。 In the past, hand dressing was performed to correct the displacement of this blade. However, this hand dressing is an extremely risky work by the operator, takes a lot of time, and greatly depends on the skill of the individual worker, so there is a variation in dressing accuracy and a stable dressing effect is achieved. The blade displacement could not be corrected stably. Moreover, since the frequency | count of dressing increases, it became the cause of the fall of the life of an internal peripheral blade.
　そこで、本発明者はこのような問題を解決すべく鋭意検討を重ねた。その結果、テーブルドレッシングにおいて、内周刃ブレードの変位を修正するためには内周刃ブレードの刃先の切れ味の悪い側のみドレッシングを行うようにすれば良く、ドレス材に溝を設け、開口部の角に刃先を合わせて刃先のドレッシングを行わない側がその溝の開口部側になるようにしてドレッシングを行えば内周刃ブレードの刃先の切れ味の悪い側のみ効果的にドレッシングでき、ドレッシングの回数も削減できることに想到し、本発明を完成させた。 Therefore, the present inventor has intensively studied to solve such problems. As a result, in the table dressing, in order to correct the displacement of the inner peripheral blade, it is only necessary to perform dressing only on the side of the inner peripheral blade where the cutting edge is not sharp. If dressing is performed with the blade edge aligned to the corner and the side where the blade edge is not dressed is the opening side of the groove, it is possible to effectively dress only the side with the sharp edge of the blade of the inner peripheral blade, and the number of dressings The present invention was completed by conceiving that it can be reduced.
　図１は本発明の内周刃ブレードのドレッシング方法の工程を説明するフロー図である。
　まず、予め図２（Ａ）に示すような基準溝が形成されたドレス材を準備する（図１のＡ参照）。この基準溝５の高さｈｄは、特に限定されることはないが、例えば図２（Ｂ）に示すように、ドレッシングする内周刃ブレード１の刃先３の高さｈｂ以上であることが望ましく、ドレス材２を完全に切り離してしまうことなく、ドレッシング時にドレス材２が基準溝５の下方で破損してしまわない程度の高さに形成されているものであればドレス材２を有効利用できるので好ましい。 FIG. 1 is a flowchart for explaining the steps of the dressing method for an inner peripheral blade of the present invention.
First, a dress material in which a reference groove as shown in FIG. 2A is formed in advance is prepared (see A in FIG. 1). That the height h d of the reference groove 5, There is no particular limitation, for example, as shown in FIG. 2 (B), is an inner peripheral blade height of the blades 1 of the cutting edge 3 h b or dressing It is desirable that the dressing material 2 is effective as long as the dressing material 2 is formed so as not to be broken below the reference groove 5 during dressing without completely separating the dressing material 2. It is preferable because it can be used.
　また、この基準溝５の幅Ｗｄも、特に限定されることはないが、例えばドレッシングする内周刃ブレード１の刃先３の幅の１／２より大きく、特に刃先３の幅と同じになるように形成されているものであれば、刃先３のドレッシングを行わない側がドレス材２と接触するのをより確実に防ぐことができるとともに、基準溝５の形成に伴うドレス材２の消費を最小限に留めることができる。
　この基準溝５の形成は、例えば図２（Ｂ）に示すように、内周刃ブレード１を用いて、ドレス材２に切り込むことで形成することができる。このとき、変位量の小さい内周刃ブレードで予め基準溝を形成しておくことがより好ましい。もちろん、別のブレード等を用いて形成することもできる。
　尚、この工程は、次に説明する刃先の左右どちら側の部分をドレッシングするかを選択する工程（図１のＢ参照）の後に行うようにしても良い。 Further, the width W d of the reference groove 5 is not particularly limited, but is, for example, larger than ½ of the width of the cutting edge 3 of the inner peripheral blade 1 to be dressed, and particularly the same as the width of the cutting edge 3. If it is formed like this, it is possible to more reliably prevent the non-dressing side of the blade edge 3 from coming into contact with the dressing material 2 and minimize the consumption of the dressing material 2 due to the formation of the reference groove 5 Can be limited.
The reference groove 5 can be formed by cutting into the dress material 2 using an inner peripheral blade 1 as shown in FIG. At this time, it is more preferable to previously form the reference groove with an inner peripheral blade having a small displacement. Of course, it can also be formed using another blade or the like.
This step may be performed after a step (see B in FIG. 1) for selecting whether to dress the left or right side of the cutting edge, which will be described next.
　次に、刃先の左右どちら側の部分をドレッシングするかを選択する（図１のＢ参照）。切断中における内周刃ブレード１の変位の発生は、内周刃ブレード１によってインゴットの切断を繰り返すと刃先３の切れ味に不均一を生じ、刃先３の切れ易い側の方向へ薄板４及び刃先３が変位することによって生じる。そのため、内周刃ブレード１の変位の修正を行うには刃先３の切れ味の不均一を解消すれば良く、刃先３の切れ味の悪い側のみドレッシングを行うようにすれば良い。すなわち、切断中に発生する内周刃ブレード１の変位を、図８（Ａ）に示すように変位センサー１１２で測定し、その変位する方向とは反対側の部分をドレッシングするように選択すれば良い。 Next, select whether to dress the left or right side of the cutting edge (see B in FIG. 1). The occurrence of the displacement of the inner peripheral blade 1 during cutting causes unevenness in the sharpness of the cutting edge 3 when the ingot is repeatedly cut by the inner peripheral blade 1, and the thin plate 4 and the cutting edge 3 are moved in the direction of the cutting edge 3. Is caused by displacement. Therefore, in order to correct the displacement of the inner peripheral blade 1, it is only necessary to eliminate the non-uniformity of the cutting edge 3, and it is only necessary to perform dressing only on the side of the cutting edge 3 that is not sharp. That is, if the displacement of the inner peripheral blade 1 generated during cutting is measured by the displacement sensor 112 as shown in FIG. 8 (A) and the part opposite to the direction of displacement is selected, dressing is performed. good.
　図５（Ａ）を用いて詳細に以下説明する。内周刃ブレード１の変位方向は刃先３の断面で考えると、曲線ａ－ａ’－ｃと曲線ｂ－ｂ’－ｃの切れ味のバランスが崩れる事が原因であり、例えば図５（Ａ）の矢印Ｌ方向に変位する場合は、曲線ａ－ａ’－ｃの方が切れ味が良いことになる。この変位を修正するには、曲線ａ－ａ’－ｃと曲線ｂ－ｂ’－ｃの切れ味のバランスを均一にするために、切れ味の悪い方、すなわち曲線ｂ－ｂ’－ｃのみをドレッシングすることが重要である。逆に矢印Ｒ方向に変位する場合には曲線ａ－ａ’－ｃのみをドレッシングすることで変位の修正が可能となる。 This will be described in detail below with reference to FIG. The displacement direction of the inner peripheral blade 1 is caused by the fact that the balance of the sharpness of the curve aa′-c and the curve bb′-c is lost when considering the cross section of the blade edge 3, for example, FIG. In the case of displacement in the arrow L direction, the curve aa′-c is sharper. In order to correct this displacement, in order to make the balance of the sharpness of the curve aa′-c and the curve bb′-c uniform, only the one with the worse sharpness, that is, the curve bb′-c is dressed. It is important to. On the contrary, in the case of displacement in the direction of arrow R, the displacement can be corrected by dressing only the curve a-a'-c.
　次に、基準溝５の開口部側がドレッシングすると選択した側とは反対側になるようにして、基準溝５の開口部の角の位置と刃先３の最先端位置とが一致するように内周刃ブレード１及びドレス材２を相対的に移動する（図１のＣ参照）。図３（Ａ）は、例えばドレッシングすると選択した側を右側とした場合の内周刃ブレード１及びドレス材２の移動後の状態を示した図であり、図３（Ｂ）は図３（Ａ）の点線で囲まれた部分を拡大した図である。図３（Ｂ）に示すように、基準溝５の開口部側がドレッシングすると選択した側とは反対側になっており、基準溝５の開口部の角Ｒ１の位置と刃先３の最先端位置とが一致している（この位置を以下基準位置とする）。 Next, the side of the opening of the reference groove 5 is opposite to the side selected when dressing, and the position of the corner of the opening of the reference groove 5 is aligned with the foremost position of the cutting edge 3. The blade blade 1 and the dressing material 2 are relatively moved (see C in FIG. 1). FIG. 3A is a diagram illustrating a state after the inner peripheral blade 1 and the dressing material 2 are moved when the side selected for dressing is the right side, for example, and FIG. It is the figure which expanded the part enclosed with the dotted line of (). As shown in FIG. 3B, the opening side of the reference groove 5 is opposite to the side selected when dressing, and the position of the corner R 1 of the opening of the reference groove 5 and the foremost position of the cutting edge 3 Are coincident with each other (this position is hereinafter referred to as a reference position).
　このとき、内周刃ブレード１及びドレス材２の移動は、例えば図６に示すような移動機構を用いて行うことができる。すなわち、ドレス材２を固定するホルダー６と、このホルダー６を内周刃ブレード１に対して相対的に水平方向に移動させる手段７と、内周刃ブレード１をホルダー６に対し相対的に垂直方向に移動させる手段８を用い、これら水平方向への移動手段７と垂直方向への移動手段８を同時に制御しながら移動させる。ここで、移動精度は少なくとも０．０１ｍｍ以下で制御できることが好ましく、例えばボールネジ、リニアガイドとサーボモーター等から構成される機構を用いることができる。 At this time, the inner peripheral blade 1 and the dress material 2 can be moved by using a moving mechanism as shown in FIG. 6, for example. That is, a holder 6 for fixing the dressing material 2, means 7 for moving the holder 6 in the horizontal direction relative to the inner peripheral blade 1, and an inner peripheral blade 1 relatively perpendicular to the holder 6. Using the moving means 8 in the direction, the moving means 7 in the horizontal direction and the moving means 8 in the vertical direction are moved while being controlled simultaneously. Here, it is preferable that the movement accuracy can be controlled at least 0.01 mm or less. For example, a mechanism including a ball screw, a linear guide, a servo motor, and the like can be used.
　次に、図３（Ｃ）に示すように、刃先３を相対的にドレス材２の深さ方向及び刃先３のドレッシングすると選択した側の方向に同時に送ることによって、該ドレッシングすると選択した側とは反対側の刃先３の部分をドレス材２と接触させずに、ドレス材２に切り込ませて、刃先３の選択した側の部分のみを局所的にドレッシングする（図１のＤ参照）。尚、図３（Ｃ）は、ドレッシングすると選択した側を右側とした場合の例を示す図である。ここで、刃先３、ドレス材２の送り速度は特に限定されず、内周刃ブレード１やドレス材２の材質や大きさ等に応じて適宜決定することができるが、例えば刃先３のドレッシングすると選択した側の方向への送り速度を１０～３０ｍｍ／ｍｉｎ、ドレス材２の深さ方向への送り速度を３０～５０ｍｍ／ｍｉｎとすることができる。また、刃先３、ドレス材２の送りは例えば図６に示すような移動機構を用いて行うことができる。 Next, as shown in FIG. 3 (C), the cutting edge 3 is relatively sent in the depth direction of the dressing material 2 and the direction of the selected side when dressing the cutting edge 3 at the same time, thereby selecting the side selected for dressing. Cuts into the dressing material 2 without contacting the opposite side of the cutting edge 3 with the dressing material 2 and locally dresses only the selected side of the cutting edge 3 (see D in FIG. 1). FIG. 3C is a diagram showing an example in which the side selected for dressing is the right side. Here, the feed speeds of the blade edge 3 and the dressing material 2 are not particularly limited and can be determined as appropriate according to the material and size of the inner peripheral blade 1 and the dressing material 2. The feeding speed in the direction of the selected side can be set to 10 to 30 mm / min, and the feeding speed in the depth direction of the dressing material 2 can be set to 30 to 50 mm / min. The blade edge 3 and the dressing material 2 can be fed using a moving mechanism as shown in FIG.
　また、ドレッシングすると選択した側を左側とした場合には、基準溝５の開口部の角Ｌ１の位置と刃先３の最先端位置とが一致するようにして、刃先３を相対的にドレス材２の深さ方向及び刃先３の左側方向に同時に送るようにしてドレッシングを行えば良い。このように、本発明の内周刃ブレードのドレッシング方法では、刃先３のドレッシングする側を簡単に切り換えて実施することができる。 Further, when the side and the selected dressing was left, as the position of the corner L 1 of the opening of the reference groove 5 and the cutting edge position of the cutting edge 3 are identical, the cutting edge 3 relatively dress material The dressing may be performed by simultaneously feeding in the depth direction 2 and the left side of the blade edge 3. Thus, in the dressing method of the inner peripheral blade of the present invention, the dressing side of the blade edge 3 can be easily switched.
　以上のようにしてドレッシングを行えば、従来の作業者によるハンドドレッシングでの作業を行う必要もなく、短時間で効果的に内周刃ブレード１の刃先３の切れ味の悪い側のみドレッシングを行うことができ、切断時における内周刃ブレード１の変位を効果的に抑制できる刃先３を有する内周刃ブレード１に修正できる。その結果、次のドレッシングまでに可能な切断回数が増え、ドレッシング回数の増加を抑制して内周刃ブレードのライフを向上することができる。 If dressing is performed as described above, it is not necessary to perform a hand dressing operation by a conventional worker, and the dressing is performed only on the poorly sharp side of the cutting edge 3 of the inner peripheral blade 1 in a short time. The inner peripheral blade 1 having the cutting edge 3 that can effectively suppress the displacement of the inner peripheral blade 1 during cutting can be corrected. As a result, the number of possible cuttings before the next dressing increases, and the life of the inner peripheral blade can be improved by suppressing the increase in the number of dressings.
　このとき、図３（Ｃ）に示すように、刃先３を相対的にドレス材２の深さ方向に送る際の送り量を刃先３の高さｈｂと同じかそれ以下にし、刃先３のドレッシングすると選択した側の方向に送る際の送り量を刃先３の幅Ｗｂの１／２と同じかそれ以下にすることが好ましい。
　このようにすれば、ドレッシングすると選択した側とは反対側の刃先３の部分をドレス材２と確実に接触させずにドレッシングでき、すなわちドレッシングすると選択した側のみのドレッシングを十分に確実に行うことができる。 At this time, as shown in FIG. 3C, the feed amount when the blade edge 3 is relatively fed in the depth direction of the dressing material 2 is set to be equal to or less than the height h b of the blade edge 3. When dressing, it is preferable that the feed amount when feeding in the selected direction is equal to or less than ½ of the width W b of the blade edge 3.
In this way, dressing can be performed without reliably contacting the portion of the blade edge 3 opposite to the selected side with the dressing material 2 when dressing is performed, that is, dressing only on the selected side when dressing is performed with sufficient certainty. Can do.
　そして、上記ドレッシング工程後、さらに、内周刃ブレード１及びドレス材２を相対的に移動する工程（図１Ｃ）と、刃先３の選択した側の部分のみを局所的にドレッシングする工程（図１Ｄ）とを繰返し行うことができる（図１のＥ参照）。こうすることで、ドレッシングすると選択した側のみのドレッシングをさらに十分に行って、内周刃ブレード１の変位をより確実に修正できる。
　ここで、繰り返し行う内周刃ブレード１及びドレス材２を相対的に移動する工程での基準位置を、図４に示すように、例えばドレッシングすると選択した側を右とした場合に前工程のドレッシングで切り込んだ部分の下方のドレス材２の基準溝５の開口部の角Ｒ２とすることができる。そして、その基準位置から上記のようにしてドレッシングを行う。さらにこれら工程を繰り返す場合には、図４に示すように、そのドレッシングによる切り込み後のドレス材２の基準溝５の開口部の角Ｒ３を基準位置とすることができる。 Then, after the dressing step, further, a step of relatively moving the inner peripheral blade 1 and the dressing material 2 (FIG. 1C) and a step of locally dressing only the portion on the selected side of the blade tip 3 (FIG. 1D). ) Can be repeated (see E in FIG. 1). By doing so, the dressing of only the selected side can be performed more sufficiently when dressing, and the displacement of the inner peripheral blade 1 can be more reliably corrected.
Here, when the reference position in the process of relatively moving the inner peripheral blade 1 and the dressing material 2 to be repeatedly performed is as shown in FIG. It may be the angle R 2 of the opening of the reference groove 5 of the lower dress material 2 portions that cut in. Then, dressing is performed as described above from the reference position. More when repeating these processes, as shown in FIG. 4, it is possible to the corner R 3 of the opening portion of the reference groove 5 dress material 2 after the cut due to the dressing as a reference position.
　もちろん、前工程でのドレッシングによって切り込んだ部分の下方を繰り返しドレッシングするのではなく、ドレス材２の横方向にドレッシングの切り込みを繰り返し行うようにしても良い。
　また、上記のようにしてドレッシングを繰り返し行っていくと基準溝５の幅が次第に大きくなり、同じドレス材２ではその長さによって使用の限界に達する。この場合にはドレス材２の交換が必要となる。
　 Of course, the dressing 2 may be repeatedly cut in the lateral direction of the dressing material 2 instead of repeatedly dressing the portion cut by the dressing in the previous process.
When dressing is repeated as described above, the width of the reference groove 5 gradually increases, and the same dressing material 2 reaches the limit of use depending on its length. In this case, the dress material 2 needs to be replaced.
　以下、本発明の実施例及び比較例を示して本発明をより具体的に説明するが、本発明はこれらに限定されるものではない。 Hereinafter, the present invention will be described more specifically with reference to Examples and Comparative Examples of the present invention, but the present invention is not limited to these.
（実施例）
　図１に示すような本発明の内周刃ブレードのドレッシング方法に従って、内周刃ブレードをドレッシングし、ドレッシング後の内周刃ブレードを用いてシリコン単結晶インゴットをウェーハに切断した。その切断の際の内周刃ブレードの変位量を変位センサーで測定し、その測定値が－３０～１２０μｍの範囲を超えるまでの切断回数と、内周刃ブレードのライフを測定した。 (Example)
According to the dressing method of the inner peripheral blade of the present invention as shown in FIG. 1, the inner peripheral blade was dressed, and the silicon single crystal ingot was cut into a wafer using the inner peripheral blade after dressing. The displacement amount of the inner peripheral blade at the time of cutting was measured with a displacement sensor, and the number of cutting until the measured value exceeded the range of −30 to 120 μm and the life of the inner peripheral blade were measured.
　まず、内周刃ブレードを具備した内周刃スライサーによりシリコン単結晶インゴットを切断し、内周刃ブレードの変位量が１２０μｍを超えたもの、すなわち図８（Ａ）に示すような＋方向（左方向）に変位するものを用い、図３（Ａ）―（Ｃ）に示すように刃先の一方向（右方向）側をドレッシングするようにした。内周刃ブレードは、その刃先の幅が０．５ｍｍ、刃先の高さが０．５ｍｍのものを使用した。 First, a silicon single crystal ingot was cut by an inner peripheral blade slicer equipped with an inner peripheral blade, and the displacement amount of the inner peripheral blade exceeded 120 μm, that is, a + direction (left) as shown in FIG. The one which is displaced in the direction) is dressed on one side (right direction) side of the blade edge as shown in FIGS. As the inner peripheral blade, a blade having a blade width of 0.5 mm and a blade height of 0.5 mm was used.
　また、ドレス材に設けた基準溝は、その幅を０．５ｍｍ、深さを３ｍｍとした。
　そして、ドレス材の深さ方向への送りを、送り速度４０ｍｍ／ｍｉｎ、送り量を刃先の高さと同じである０．５ｍｍとし、刃先３のドレッシングすると選択した側の方向への送りを、送り速度を２０ｍｍ／ｍｉｎ、送り量を刃先の幅の１／２である０．２５ｍｍとしてドレッシングを行った。そして、図１に示す工程Ｃ、Ｄを１２回繰り返し行った。
　以上を１００個の異なる内周刃ブレードに対して行った。 The reference groove provided in the dress material had a width of 0.5 mm and a depth of 3 mm.
The dress material is fed in the depth direction at a feed rate of 40 mm / min, the feed amount is 0.5 mm which is the same as the height of the blade edge, and when the blade edge 3 is dressed, the feed in the selected direction is fed. Dressing was performed at a speed of 20 mm / min and a feed amount of 0.25 mm, which is half the width of the blade edge. Then, Steps C and D shown in FIG. 1 were repeated 12 times.
The above was performed on 100 different inner peripheral blades.
　その結果を表１に示す。表１に示すように、１２回のドレッシングで内周刃ブレードの変位量を目標範囲である０～９０μｍに修正することができた。また、ドレッシング完了後の平均切断回数は１１０回、ブレードライフは切断回数５０７８回といずれも後述の比較例１、比較例２に比べ向上していることが分かった。 The results are shown in Table 1. As shown in Table 1, the displacement amount of the inner peripheral blade was able to be corrected to the target range of 0 to 90 μm by 12 dressings. Further, it was found that the average number of cuttings after completion of dressing was 110 times and the blade life was 5078 times of cutting, both of which were improved compared to Comparative Examples 1 and 2 described later.
　このように、本発明の内周刃ブレードのドレッシング方法は、作業者によるハンドドレッシング作業を行うことなく、内周刃ブレードの変位を効果的に修正でき、また、内周刃ブレードのライフを向上することができることが確認できた。
　 As described above, the dressing method of the inner peripheral blade of the present invention can effectively correct the displacement of the inner peripheral blade without performing the hand dressing operation by the operator, and also improves the life of the inner peripheral blade. I was able to confirm that
（比較例１）
　内周刃ブレードを基準溝の設けられていないドレス材の部分に切り込ませた後、ドレス材を内周刃ブレードに対して水平方向に移動させる従来の方法でドレッシングを行い、実施例と同様な評価を行った。ここで、ドレス材の深さ方向への送り及びドレス材の内周刃ブレードに対して水平方向への送りの速度及び量は実施例と同様とした。また、ドレッシングする内周刃ブレードは実施例と同様のものを用い、同様に１００個の異なる内周刃ブレードについて評価した。
　その結果を表１に示す。表１に示すように、３０％の内周刃ブレードが１２回のドレッシングで内周刃ブレードの変位量を目標範囲である０～９０μｍに修正することができず、作業者によるハンドドレッシングが必要であった。また、ドレッシング完了後の平均切断回数は６０回、ブレードライフは切断回３９６８回と実施例の結果と比べ悪化していることが分かった。 (Comparative Example 1)
After cutting the inner peripheral blade into the part of the dressing material that is not provided with the reference groove, dressing is performed by the conventional method of moving the dressing material in the horizontal direction with respect to the inner peripheral blade, as in the example. Was evaluated. Here, the speed and amount of the dress material in the depth direction and the dress material in the horizontal direction with respect to the inner peripheral blade of the dress material were the same as in the example. The inner peripheral blades to be dressed were the same as those in the example, and 100 different inner peripheral blades were similarly evaluated.
The results are shown in Table 1. As shown in Table 1, 30% of the inner peripheral blade cannot be corrected to the target range of 0-90μm by 12 times of dressing, and hand dressing by the operator is required. Met. Further, it was found that the average number of cuttings after dressing was 60 times and the blade life was 3968 times, which was worse than the results of the examples.
　図５（Ｂ）に示すように、矢印Ｌ方向に変位していく場合を考えると、内周刃ブレードをドレス材に切り込ませる際に、曲線ａ－ａ’－ｃ－ｂ’－ｂ部分をドレッシングすることになるが、本来、ａ－ａ’－ｃ部分はドレッシングを行うべきではない。次にドレス材を内周刃ブレードに対して水平方向に移動させて曲線ｂ－ｂ’部分のみをドレッシングするが、この曲線ｂ－ｂ’部分は合計２回のドレッシングを行っている事になる。すなわち、曲線ｂ－ｂ’－ｃをドレッシングすべきが、ａ－ａ’－ｃの必要がない部分をドレッシングすること、ｂ－ｂ’を２回ドレッシングすることがドレッシングの効果が低く、更にはブレード変位の悪化やブレードライフを低減させた原因だと考えられる。
　
（比較例２）
　内周刃ブレードを基準溝の設けられていないドレス材に切り込ませた後、ドレス材を内周刃ブレードに対して水平方向に移動させながら内周刃ブレードを引き抜く従来の方法でドレッシングを行い、実施例と同様な評価を行った。ここで、ドレス材の深さ方向への送り及びドレス材の内周刃ブレードに対して水平方向への送りの速度及び量は実施例と同様とした。また、ドレッシングする内周刃ブレードは実施例と同様のものを用い、同様に１００個の異なる内周刃ブレードについて評価した。
　その結果を表１に示す。表１に示すように、２０％の内周刃ブレードが１２回のドレッシングで内周刃ブレードの変位量を目標範囲である０～９０μｍに修正することができず、作業者によるハンドドレッシングが必要であった。また、ドレッシング完了後の平均切断回数は８０回、ブレードライフは切断回４２３２回と実施例の結果と比べ悪化していることが分かった。 As shown in FIG. 5B, considering the case of displacement in the direction of the arrow L, when the inner peripheral blade is cut into the dress material, the curve aa′-cb′-b portion However, the aa′-c portion should not be dressed. Next, the dressing material is moved in the horizontal direction with respect to the inner peripheral blade to dress only the curve bb ′ portion. This curve bb ′ portion is subjected to dressing twice in total. . That is, the curve bb′-c should be dressed, but dressing a portion where aa′-c is not necessary, and dressing bb ′ twice, the effect of dressing is low. This is thought to be the cause of worsening blade displacement and reducing blade life.

(Comparative Example 2)
After the inner peripheral blade is cut into the dressing material not provided with the reference groove, dressing is performed by the conventional method of pulling out the inner peripheral blade while moving the dressing material horizontally with respect to the inner peripheral blade. The same evaluation as in the example was performed. Here, the speed and amount of the dress material in the depth direction and the dress material in the horizontal direction with respect to the inner peripheral blade of the dress material were the same as in the example. The inner peripheral blades to be dressed were the same as those in the example, and 100 different inner peripheral blades were similarly evaluated.
The results are shown in Table 1. As shown in Table 1, the displacement of the inner peripheral blade cannot be corrected to the target range of 0 to 90 μm with 12 dressings of 20% inner peripheral blade, and hand dressing by the operator is required Met. Moreover, it turned out that the average frequency | count of cutting | disconnection after dressing completion is 80 times, and the blade life is 4232 times of cutting | disconnection compared with the result of an Example.
　図５（Ｂ）に示すように、矢印Ｌ方向に変位していく場合を考えると、内周刃ブレードをドレス材に切り込む際に、曲線ａ－ａ’－ｃ－ｂ’－ｂ部分をドレッシングすることになるが、本来、曲線ａ－ａ’－ｃ部分はドレッシングを行うべきではない。次にドレス材を内周刃ブレードに対して水平方向に移動させながら内周刃ブレードを引き抜き、曲線ｄ－ｂ－ｅ部分をドレッシングするが、曲線ｄ－ｂ部分は合計２回のドレッシングを行っている事になり、ｂ－ｅ部分は必要がないドレッシングを行っている。すなわち、曲線ｂ－ｂ’－ｃをドレッシングすべきが、必要のない曲線ａ－ａ’－ｃ部分をドレッシングすること、曲線ｄ－ｂ部分を２回ドレッシングすることがドレッシングの効果が低く、更にはブレード変位の悪化やブレードライフを低減させた原因だと考えられる。 As shown in FIG. 5B, considering the case of displacement in the direction of arrow L, when cutting the inner peripheral blade into the dressing material, the curve aa′-cb′-b is dressed. However, the curve aa′-c portion should not be dressed. Next, the inner peripheral blade is pulled out while the dressing material is moved in the horizontal direction with respect to the inner peripheral blade, and the curved db-e portion is dressed, but the curved db portion is dressed twice in total. Therefore, dressing that does not require the be part is performed. That is, the curve bb′-c should be dressed, but dressing the unnecessary curve aa′-c, and dressing the curve db twice are less effective in dressing. Is considered to be the cause of worsening blade displacement and reducing blade life.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
　なお、本発明は、上記実施形態に限定されるものではない。上記実施形態は例示であり、本発明の特許請求の範囲に記載された技術的思想と実質的に同一な構成を有し、同様な作用効果を奏するものは、いかなるものであっても本発明の技術的範囲に包含される。 The present invention is not limited to the above embodiment. The above-described embodiment is an exemplification, and the present invention has any configuration that has substantially the same configuration as the technical idea described in the claims of the present invention and that exhibits the same effects. Are included in the technical scope.

Claims (4)

  1. 　ドーナツ状薄板の内周部に砥粒が固着されて刃先が形成された内周刃ブレードをドレス材に切り込ませて前記刃先をドレッシングする内周刃ブレードのドレッシング方法であって、
    　予め基準溝が形成された前記ドレス材を準備する工程と、
    　前記刃先の左右どちら側の部分をドレッシングするかを選択する工程と、
    　前記基準溝の開口部側が前記ドレッシングすると選択した側とは反対側になるようにして、前記基準溝の開口部の角の位置と前記刃先の最先端位置とが一致するように前記内周刃ブレード及びドレス材を相対的に移動する工程と、
    　前記刃先を相対的に前記ドレス材の深さ方向及び前記刃先のドレッシングすると選択した側の方向に同時に送ることによって、該ドレッシングすると選択した側とは反対側の前記刃先の部分を前記ドレス材と接触させずに、前記ドレス材に切り込ませて、前記刃先の選択した側の部分のみを局所的にドレッシングする工程とを有することを特徴とする内周刃ブレードのドレッシング方法。
    　     A dressing method for an inner peripheral blade that dresses the cutting edge by cutting an inner peripheral blade blade in which abrasive grains are fixed to the inner peripheral portion of the doughnut-shaped thin plate and the cutting edge is formed in a dress material,
    Preparing the dress material in which a reference groove is formed in advance;
    Selecting whether to dress the left or right side of the cutting edge;
    The inner peripheral blade such that the opening side of the reference groove is opposite to the side selected when dressing and the corner position of the opening of the reference groove coincides with the most advanced position of the cutting edge. Relatively moving the blade and dressing material;
    By sending the blade edge relatively in the depth direction of the dressing material and the direction of the side selected when dressing the blade edge, the portion of the blade edge opposite to the side selected when dressing is taken as the dressing material. A method of dressing an inner peripheral blade, comprising: cutting into the dressing material without making contact, and locally dressing only a portion on the selected side of the cutting edge.
  2. 　前記基準溝は、該基準溝の幅が前記刃先の幅の１／２より大きいことを特徴とする請求項１に記載の内周刃ブレードのドレッシング方法。
    　     2. The dressing method for an inner peripheral blade according to claim 1, wherein the reference groove has a width larger than ½ of the width of the cutting edge.
  3. 　前記刃先を相対的に前記ドレス材の深さ方向に送る際の送り量を前記刃先の高さと同じにし、前記刃先のドレッシングすると選択した側の方向に送る際の送り量を前記刃先の幅の１／２と同じにすることを特徴とする請求項１又は請求項２に記載の内周刃ブレードのドレッシング方法。
    　     The feed amount when the blade edge is relatively fed in the depth direction of the dressing material is the same as the height of the blade edge, and when the blade edge is dressed, the feed amount when the blade edge is fed in the selected direction is equal to the width of the blade edge. The dressing method for an inner peripheral blade according to claim 1 or 2, wherein the same is set to 1/2.
  4. 　前記内周刃ブレード及びドレス材を相対的に移動する工程と、前記刃先の選択した側の部分のみを局所的にドレッシングする工程とを繰返し行うことを特徴とする請求項１乃至請求項３のいずれか１項に記載の内周刃ブレードのドレッシング方法。
     
          4. The method according to claim 1, wherein the step of relatively moving the inner peripheral blade and the dressing material and the step of locally dressing only the portion on the selected side of the blade tip are repeated. The dressing method of the internal peripheral blade of any one of Claims 1.

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* Cited by examiner, † Cited by third party
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CN110176396B (en) * 2018-02-21 2024-03-12 三星钻石工业株式会社 Cutting device, cutting method and cutting plate

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JP5846096B2 (en) * 2012-10-29 2016-01-20 信越半導体株式会社 Dressing method of inner peripheral blade
US9327094B2 (en) 2013-02-09 2016-05-03 Ashtel Studios, Inc. Apparatus for assisting a child to fall asleep

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0752041A (en) * 1993-08-19 1995-02-28 Toyo A Tec Kk Dressing method for cutting edge of slicing device and device therefor
JPH09131725A (en) * 1995-11-10 1997-05-20 Tokyo Seimitsu Co Ltd Dressing method for inner diameter saw blade

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0752041A (en) * 1993-08-19 1995-02-28 Toyo A Tec Kk Dressing method for cutting edge of slicing device and device therefor
JPH09131725A (en) * 1995-11-10 1997-05-20 Tokyo Seimitsu Co Ltd Dressing method for inner diameter saw blade

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110176396B (en) * 2018-02-21 2024-03-12 三星钻石工业株式会社 Cutting device, cutting method and cutting plate

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