JPH09131725A - Dressing method for inner diameter saw blade - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for dressing an inner diameter saw blade which can efficiently dress the blade in a short time. SOLUTION: The edge 12b of an inner diameter saw, blade 12 obliquely upward cuts a dressing stone 42. Thus, the upper end part D of the edge 12b is brought into contact with a dressing stone 42, and dressed. Further, the blade 12 is horizontally drawn from the stone 42 from the above state, and hence the rear end upper side part F of the edge 12b of the blade 12 is brought into contact, with the trough 42A of the cutout groove 43 of the stone 42 formed of the cutout, and the part F is dressed. Thus, the one side (upper side) face of the edge of the inner diameter saw blade is dressed, and the other (lower side) face is dressed by the similar process, and thus the both sides of the edge 12b are dressed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of dressing an inner peripheral blade, and more particularly to a method of dressing an inner peripheral blade of a slicing machine for cutting an ingot of silicon or the like, which is a raw material for semiconductor elements, into wafers.

[0002]

2. Description of the Related Art A slicing machine is a device for cutting an ingot into wafers by pressing the ingot against the edge of a rotating inner peripheral blade. As shown in FIG. 7, an inner peripheral blade 12 used in this slicing machine is formed by fixing a thin base metal 12a formed in a donut shape and abrasive grains such as diamond to the inner periphery of the base metal 12a. Cutting edge 12b
The cutting edge 12b cuts the ingot.

By the way, while the inner peripheral blade continues to cut, sludge (cutting powder of ingot) is accumulated on the cutting edge and the abrasive grains on the surface are buried or the abrasive grains are abraded, resulting in a cutting ability. descend. When the ingot is cut by the inner peripheral blade having the reduced cutting ability, the cutting resistance of the ingot increases, so that the force acting in the axial direction of the inner peripheral blade increases. As a result, the inner peripheral blade is displaced along the axial direction, and a wafer with a large warp or a wafer with a large depth of the processing strain layer on the cut surface is cut.

On the other hand, in the process of manufacturing a semiconductor element, since the wafer is required to have a high level of surface accuracy, both sides of the wafer are ground by lapping or the like in a post process.
However, since the wafer is thin, if the warp occurs or the depth of the processing strain layer on the cut surface is large, it takes a lot of time for the surface grinding operation. Therefore, the inner peripheral blade dresses the cutting edge with a dressing stone when the cutting ability of the cutting edge decreases. At this time, which portion of the cutting edge should be dressed and how much should be dressed are determined from the warp of the cut wafer, the depth of the processing strained layer on the cut surface, and the like.

As shown in FIG. 7, the tip upper side portion D of the cutting edge 12b (from the tip A of the cutting edge 12b to the upper end B of the cutting edge 12b).
Up to) and the lower part E (the portion from the tip A to the lower end C of the cutting edge 12b) mainly relate to the warp of the wafer. Therefore, when the wafer warps, D or E is dressed. Further, the rear end upper part F of the cutting edge 12b
Since the portion (the portion from the upper end B toward the base metal 12a side) and the lower portion G (the portion from the lower end C toward the base metal 12a side) are mainly related to the depth of the processing strain layer of the cutting face, the processing of the cutting face is performed. When the strain depth becomes large, F or G is dressed.

Therefore, in order to dress the cutting edge, it is basically necessary to bring the dressing stone and the cutting edge relatively close to each other and relatively displace them in the axial direction while the inner peripheral blade is rotated. The conventional methods of dressing the inner peripheral blade have been as follows. The first method is a method in which an operator holds the dressing stone by hand, and the dressing portion and the dressing amount are selectively adjusted by the pressing angle and the pressing force of the dressing stone.

The second method is disclosed in Japanese Patent Application Laid-Open No.
The method disclosed in Japanese Patent No. 301063,
The dressing stone formed in a columnar shape is rotated and driven, and the dressing stone is tilted and dressed by a driving device movable in three directions of XYZ. In this method, the dressing timing, dressing portion, and dressing amount are automatically determined from various cutting information. Then, by rotating the dressing stone, the cutting edge 12b shown in FIG.
The dressing of the tip upper side part D and the rear end upper side part F is switched, or the dressing of the tip lower part E and the rear end lower part G of the cutting edge 12b is switched.

A third method is to install a dressing stone on a driving device that is movable in the horizontal and vertical directions, and dress any part of the cutting edge by a combination of moving the dressing stone in the horizontal and vertical directions. Japanese Patent Application No. 7-128389).

[0009]

However, in the first method, there is a problem in terms of safety because the operator must work near the rotating inner peripheral blade. The first method also has a drawback that accurate dressing is not always guaranteed because it depends on the skill of the operator.

On the other hand, the second method requires the provision of a dedicated device for driving the dressing stone, and therefore has the drawbacks that the device becomes complicated and large, and the equipment cost becomes expensive. Further, the third method has a drawback in that the operation of the dressing stone is complicated and the dressing requires a long time because of the combination of the horizontal and vertical movements of the dressing stone.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a method of dressing an inner peripheral blade that can efficiently perform dressing of the inner peripheral blade in a short time.

[0012]

In order to achieve the above object, the present invention moves the blade edge of a rotating inner peripheral blade and a dressing stone relatively close to each other, and dresses with the blade edge of the inner peripheral blade. By cutting the stone,
In the dressing method of the inner peripheral blade for dressing the blade edge of the inner peripheral blade, by cutting the blade edge of the inner peripheral blade in an oblique direction with respect to the dressing stone,
After dressing the cutting edge tip one side surface of the inner peripheral blade with the dressing stone, by moving the inner peripheral blade and the dressing stone in a direction relatively away from each other, the blade tip rear end one side surface of the inner peripheral blade It is characterized in that dressing is performed at the peaks or valleys of the cut grooves of the dressing stone formed by the cuts.

Further, in order to achieve the above-mentioned object, by moving the cutting edge of the rotating inner peripheral blade and the dressing stone in a direction relatively approaching each other and cutting the dressing stone with the blade edge of the inner peripheral blade, In the dressing method of the inner peripheral blade for dressing the blade edge of the inner peripheral blade, by cutting the blade edge of the inner peripheral blade obliquely with respect to the dressing stone, the blade tip tip one side surface of the inner peripheral blade with the dressing stone. After dressing, by changing the cutting direction of the cutting edge of the inner peripheral blade, dressing the other side of the cutting edge tip of the inner peripheral blade with the dressing stone, a direction in which the inner peripheral blade and the dressing stone are relatively separated from each other. By moving the inner peripheral blade to one side of the rear end of the cutting edge by the notch. With dressing on the mountain portion of the cut recess of the dressing stone it has, characterized in that dressing valley groove cut the cutting edge trailing the other side.

Further, in order to achieve the above-mentioned object, by moving the cutting edge of the rotating inner peripheral blade and the dressing stone in a direction relatively approaching each other and cutting the dressing stone with the blade edge of the inner peripheral blade, In the dressing method of the inner peripheral blade for dressing the blade edge of the inner peripheral blade, by horizontally cutting the blade edge of the inner peripheral blade with respect to the dressing stone, dressing the tip end side surfaces of the inner peripheral blade with the dressing stone. Then
By withdrawing the cutting edge of the inner peripheral blade in an oblique direction with respect to the dressing stone, after dressing one side surface of the rear edge of the inner peripheral blade with the dressing stone, the pulling direction of the cutting edge of the inner peripheral blade is changed. Thus, the other side surface of the inner peripheral blade edge rear end is dressed with the dressing stone.

According to the first aspect of the present invention, by cutting the cutting edge of the inner peripheral blade in a direction oblique to the dressing stone, the side surface of the tip end of the inner peripheral blade abuts on the dressing stone, and its contact is made. One side of the tip of the cutting edge that touches is dressed. Further, by moving the inner peripheral blade and the dressing stone relatively away from the state of cutting in an oblique direction, the blade tip rear end side surface of the inner peripheral blade, the dressing formed by the notch The stone abuts on the ridges or valleys of the cut groove, and the side surface of the abutting trailing edge is dressed. As a result, dressing is performed on one side surface of the cutting edge of the inner peripheral blade.

According to the second aspect of the present invention, by cutting the blade edge of the inner peripheral blade in an oblique direction with respect to the dressing stone, one side surface of the tip of the inner peripheral blade is dressed with the dressing stone. Then, subsequently, by changing the cutting direction of the blade tip of the inner peripheral blade, the other side of the blade tip tip of the inner peripheral blade is dressed with the dressing stone. This allows
Both sides of the tip of the inner peripheral blade are dressed. Then, after alternately cutting diagonally as described above, by moving the inner peripheral blade and the dressing stone in a direction in which they relatively separate from each other, one side surface of the blade tip rear end of the inner peripheral blade is formed by the notch. In addition, the dressing stone is brought into contact with the crest portion of the cutting groove to be dressed, and the other side surface of the trailing edge of the cutting edge is brought into contact with the trough portion of the cutting groove to be dressed. As a result, both sides of the blade edge of the inner peripheral blade are dressed.

According to the third aspect of the present invention, by cutting the cutting edge of the inner peripheral blade horizontally with respect to the dressing stone, both side surfaces of the tip of the inner peripheral blade are dressed with the dressing stone. . Then, from the state of cutting horizontally, by pulling out the blade tip of the inner peripheral blade in an oblique direction with respect to the dressing stone, dressing the blade tip rear end one side surface of the inner peripheral blade with the dressing stone, then continuously. By changing the pulling-out direction of the cutting edge of the inner peripheral blade, the other side surface of the rear end of the inner peripheral blade is dressed with the dressing stone. As a result, both sides of the blade edge of the inner peripheral blade are dressed.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of the dressing method for an inner peripheral blade according to the present invention will be described in detail below with reference to the accompanying drawings. FIG. 1 is a side sectional view showing a configuration of a slicing machine to which a dressing method for an inner peripheral blade according to the present invention is applied.

As shown in FIG. 1, the slicing machine 10 is mainly composed of a rotary drive unit 14 for rotationally driving the inner peripheral blade 12 and a horizontal / vertical drive unit 18 for horizontally and vertically driving the ingot 16. To be done. The rotation driving unit 14 includes a chuck body 20 that supports the inner peripheral blade 12, and the chuck body 20 is connected to an upper end of a spindle 22 that is connected to a motor (not shown). On the other hand, the inner peripheral blade 12 is a base metal 1 formed in a donut shape.
2a and a cutting edge 12b formed by fixing diamond abrasive grains to the inner peripheral edge of the base metal 12a. The outer edge of the base metal 12a is pulled up and supported by the chuck body 20. Further, the chuck body 20 is provided with a tensioning mechanism (not shown), and the inner peripheral blade 1
No. 2 is constructed so that its tension can be adjusted by this tensioning mechanism.

The horizontal / vertical drive unit 18 has a cutting feed table 24, and the cutting feed table 24 is provided with a work indexing slider 26 and a recovery / polishing device 28. The cutting feed table 24 is installed on a gantry (not shown) and driven by a drive device (not shown) to move the X-
Slide and move in the X direction. The work indexing slider 26 is installed on the cutting feed table 24 and driven by a driving device (not shown) to slide in the Z-Z direction in the drawing. A work support 29 is provided below the work indexing slider 26, and the semiconductor ingot 16 is fixed to the lower surface of the work support 29 via a work block 30.

Therefore, the semiconductor ingot 16 supported by the work support table 29 is the cutting feed table 14
Can be moved in the cutting feed direction (X-X direction) and in the work indexing direction (Z-Z direction) by the work indexing slider 15. Further, the cutting feed table 24 and the work indexing slider 26 have a CPU 32.
It is driven by the command signal from.

The recovery / polishing device 28 includes a recovery dish 34,
Moving mechanism 36 for moving the recovery tray 34, and moving mechanism 3
6 is composed of a servo controller 38 for controlling the drive. The recovery tray 34 is formed in a substantially rectangular shape and has a plurality of pads 4 on its upper surface for receiving the cut wafers.
0, 40, ... Are provided. The pad 40 is formed in a cylindrical shape and communicates with a vacuum pump (not shown). Then, by operating this vacuum pump, the cut wafer is suction-fixed.

A dressing stone 42 for dressing the inner peripheral blade 12 is provided at the tip of the recovery dish 34. This dressing stone 42
Is detachably attached to the tip of the recovery dish 34 via a stone holder 44. The moving mechanism 36 is
As shown in FIG. 2, a horizontal drive unit 46 that slides the recovery tray 34 in the left-right direction in the figure, and the recovery tray 34.
Is composed of a vertical drive unit 48 for sliding up and down in the figure.

The horizontal drive unit 46 includes a horizontal slider 50.
The horizontal slider 50 includes a linear bearing 54 on a guide rail 54 disposed on a base 52.
It is slidably supported via A and 54A. The base 32 is fixed to the cutting / feeding table 24 with bolts 56, 56, ... And a nut member 58 is provided at the left end in the figure via a bracket 58A. A lead screw 60A is screwed to the nut member 58, and one end of the lead screw 60A is
It is connected to a rotary shaft of a servo motor 60 installed on the horizontal slider 50.

As a result, the horizontal slider 50 slides on the guide rail 54 in the left-right direction in the drawing by driving the servomotor 60 and rotating the lead screw 56A. In addition, the servo motor 6
The rotation amount of 0 is sequentially fed back to the servo controller 38. The vertical drive unit 48 includes a vertical slide arm 62.
Are slidably supported on guide rails 66 arranged on the columns 64 via linear bearings 66A, 66A. The column 64 is the horizontal slider 5
It is supported by 0, and the servo motor 68 is arranged at the upper end thereof. The rotation axis of this servo motor 68 is
The lead screw 68A is connected, and one end of the lead screw 68A is connected to the vertical slide arm 62.
It is screwed to a nut member 70 provided via a support member 70A. The rotation amount of the servo motor 68 is sequentially fed back to the servo controller 38.

As a result, the vertical slide arm 62 is
The lead screw 68 is driven by driving the servo motor 68.
By rotating A, it slides on the guide rail 66 in the vertical direction in the figure. With the above structure, the vertical slide arm 62 is driven by the horizontal drive unit 46 and the vertical drive unit 48 to move in the horizontal / vertical directions.

FIG. 3 is a plan view showing the structure of the vertical slide arm 62. As shown in the figure, the vertical slide arm 62 is formed in an L shape, and a rotary actuator 72 is installed at a base end portion thereof. A shaft 74 is rotatably supported at the tip portion. A drive gear 76 is fixed to the lower end of the drive shaft 72A of the rotary actuator 72, and a transmission gear (not shown) is screwed to the drive gear 76. On the other hand, a driven gear 78 is fixed to the upper end of the shaft 74, and the pulley 8 is attached to the corner of the vertical slide arm 62.
0 and 80 are rotatably supported. Then, the transmission gear screwed to the drive gear 76 and the driven gear 78 are
A timing belt 82 is wound around the pulleys 80, 80.

As a result, when the rotary actuator 72 rotates, the rotation is transmitted to the shaft 74 via the timing belt 82. The recovery dish 34,
It is attached to the lower end of the shaft 74 via a connecting member 82. The servo controller 38 controls the servo motors 60, 6 based on the target value output from the CPU.
8 and the rotary actuator 72 are driven and controlled.
A return control program for returning the recovery tray 34 to the wafer recovery position is previously input to the servo controller 38, and when the operation of the slicing machine 10 is switched from the dressing operation to the wafer cutting operation,
The recovery tray 34 is quickly returned to the wafer recovery position, and an appropriate clearance is formed between the wafer to be cut and the pad 40.

The dressing method for the inner peripheral blade according to the present invention using the slicing machine configured as described above is carried out as follows. First, as shown in FIG. 2, the recovery tray 34 located at the wafer recovery position during the wafer cutting operation is replaced by the rotary actuator 72 and the servo motor 6.
0, 68 are driven to start the dressing position, that is,
The dressing stone 42 and the cutting edge 12b of the inner peripheral blade 12 are located at positions facing each other. At the same time, the inner blade 1
Rotate 2.

Next, by driving the servomotor 60, the horizontal slider 50 is slid in the X (-) direction in the figure, and the dressing stone 42 is directed toward the rotating inner peripheral blade 12 (X (-in the figure). ) Direction) Send in. And
Insert the dressing stone 42 into the cutting edge 12b of the inner peripheral blade 12.
Then, the cutting is performed from the position shown in FIG. 4A, that is, from the tip A of the cutting edge 12b to the upper end B (lower end C).

Next, by driving the servo motor 60, the horizontal slider 50 is slid in the X (-) direction in the figure, and the dressing stone 42 is directed toward the rotating inner peripheral blade 12 (X (-in the figure). ) Direction) Feed a specified amount. At the same time, by driving the servo motor 68,
The vertical slide arm 62 is slid in the Z (-) direction in the figure, and the dressing stone 42 is moved by a predetermined amount (base metal 1
2a descends to the extent that it does not contact the cut groove 43 (Z in the figure)
(-) Direction). As a result, the dressing stone 42 moves diagonally downward and is cut diagonally upward by the cutting edge 12b, as shown in FIG. 4 (b).

Here, on the dressing stone 42, the tip upper part D (the cutting edge 12) of the cutting edge 12b shown in FIG.
The portion from the leading edge A of b to the upper end B of the cutting edge 12b) abuts, and the dressing stone 42 is cut obliquely upward by the upper end portion D of the cutting edge 12b. As a result, the upper end portion D of the cutting edge 12b is dressed.

Next, by driving the servomotor 60, the horizontal slider 50 is slid in the X (+) direction in the figure, and the dressing stone 42 is separated from the rotating inner peripheral blade 12 (X (+) in the figure). ) Direction) by a predetermined amount. As a result, the dressing stone 42
As shown in FIG. 4 (c), the blade 12 b is moved horizontally and the cutting edge 12 b is pulled out from the dressing stone 42.

Here, in the process of pulling out the cutting edge 12b from the dressing stone 42, a rear end upper portion F (a portion from the upper end B toward the base metal 12a side) shown in FIG. Valley portion 43 of the cut groove 43 formed by cutting into
It comes into contact with A and is pulled out while shaving the valley portion 43A. Thereby, the rear end upper part F of the cutting edge 12b is
Dressed.

By performing the series of steps described above, the dressing of one side (upper side) of the cutting edge 12b of the inner peripheral blade 12 is completed. Therefore, the other side (lower side) surface of the cutting edge 12b can be dressed by cutting the dressing stone 42 obliquely downward and pulling it out horizontally. As a result, dressing on both sides of the cutting edge 12b can be performed.

By changing the cutting amount, the cutting angle, and the number of dressings depending on the state of the cutting edge 12b, a desired portion of the cutting edge 12b can be dressed by a desired amount. As described above, according to the dressing method for the inner peripheral blade of the first embodiment, a simple and simple operation of cutting the cutting edge 12b of the inner peripheral blade 12 obliquely with respect to the dressing stone 42 and pulling it out horizontally. Thereby, the cutting edge 12b can be dressed. Thereby, the cutting edge 1 of the inner peripheral blade 12 can be efficiently provided in a short time.
2b dressing can be performed.

Further, since it can be carried out by using a device having a simple and simple drive structure and can also be carried out by using an existing device, the device can be complicated and large as in the conventional case. In addition, the facility cost does not increase. Furthermore, since dressing does not require manpower, loss of cutting time due to dressing can be reduced, throughput can be improved, and work safety can be ensured.

Further, the consumption amount of the dressing stone 42 can be suppressed to a necessary minimum. FIG. 5 is an explanatory view for explaining the second embodiment of the dressing method for the inner peripheral blade according to the present invention. In the first embodiment, the method of dressing only one side surface of the blade edge 12b of the inner peripheral blade 12 in one operation has been described, but in the second embodiment, the blade edge 12b of the blade edge 12b is operated in one operation. A method of dressing both sides will be described. The slicing machine used for the implementation is the same as the slicing machine 10 described in the first embodiment.

First, similarly to the first embodiment, the recovery dish 34 is positioned at the dressing start position and the inner peripheral blade 12 is rotated. Next, the horizontal slider 50
Slide in the X (-) direction in the figure, and turn the dressing stone 42 toward the rotating inner peripheral blade 12 (X in the figure).
(-) Direction) Send in. Then, the dressing stone 42 is cut by the cutting edge 12b of the inner peripheral blade 12 from the position shown in FIG. 5A, that is, from the tip A of the cutting edge 12b to the upper end B (lower end C).

Next, the horizontal slider 50 is slid in the X (-) direction in the figure to feed the dressing stone 42 toward the rotating inner peripheral blade 12 (X (-) direction in the figure) by a predetermined amount, and vertically. Slide arm 62 in the figure
The dressing stone 42 is slid in the (-) direction and lowered by a predetermined amount (Z (-) direction in the drawing). As a result, the dressing stone 42 moves obliquely downward and is cut obliquely upward by the cutting edge 12b, as shown in FIG. 5 (b).

Here, the tip upper part D of the cutting edge 12b shown in FIG. 7 contacts the dressing stone 42,
The dressing stone 42 is cut obliquely upward by the upper end portion D of the cutting edge 12b. As a result, the upper end portion D of the cutting edge 12b is dressed. Next, the horizontal slider 50 is slid in the X (-) direction in the figure, the dressing stone 42 is fed toward the rotating inner peripheral blade 12 (X (-) direction in the figure) by a predetermined amount, and the vertical slide arm 62 is also provided. In the figure Z (+)
The dressing stone 42 is moved upward by a predetermined amount (Z (+) direction in the figure). This allows
As shown in FIG. 5B, the dressing stone 42 moves diagonally upward and is cut diagonally downward by the cutting edge 12b.

Here, the dressing stone 42 has a lower end portion E (the cutting edge 12) of the cutting edge 12b shown in FIG.
The portion from the tip end A of b to the lower end C of the cutting edge 12b) abuts, and the dressing stone 42 is cut obliquely downward by the tip lower side portion E of the cutting edge 12b. Thereby, the lower end portion E of the cutting edge 12b is dressed.

Next, the horizontal slider 50 is slid in the X (+) direction in the figure to move the dressing stone 42 by a predetermined amount in the direction (X (+) direction in the figure) away from the rotating inner peripheral blade 12. As a result, the dressing stone 42 moves horizontally as shown in FIG. 5C, and the cutting edge 12 b is pulled out from the dressing stone 42.

Here, in the process of pulling out the cutting edge 12b from the dressing stone 42, first, the rear end lower portion G (the portion from the lower end C toward the base metal 12a side) shown in FIG. 7 is formed by the notch. The ridge 43B of the cut groove 43 is abutted, and the ridge 43B is scraped and pulled out. As a result, the rear end lower portion G of the cutting edge 12b is dressed.

Further, in the process of pulling out the cutting edge 12b from the dressing stone 42, the rear end upper side portion F shown in FIG. 7 abuts on the valley portion 43A of the cut groove 43, and is pulled out while scraping the valley portion 43A. Be done. As a result, the rear end upper portion F of the cutting edge 12b is dressed. By performing the series of steps, the dressing on both sides of the cutting edge 12b of the inner peripheral blade 12 is completed.

As described above, according to the inner peripheral blade dressing method of the second embodiment, the cutting edge 12b can be dressed by a simple and simple operation, as in the first embodiment. The same effect as the first embodiment can be obtained. Further, similarly to the first embodiment, by changing the cutting amount, the cutting angle, and the number of times of dressing according to the state of the cutting edge 12b, it is possible to dress a desired portion of the cutting edge 12b by a desired amount. .

FIG. 6 is an explanatory view for explaining the third embodiment of the dressing method for the inner peripheral blade according to the present invention. In the third embodiment, as in the second embodiment,
A method of dressing both side surfaces of the cutting edge 12b by one operation will be described. The slicing machine used for the implementation is the same as the slicing machine 10 described in the first embodiment.

First, similarly to the first embodiment, the recovery dish 34 is positioned at the dressing start position and the inner peripheral blade 12 is rotated. Next, the horizontal slider 50
Slide in the X (-) direction in the figure, and turn the dressing stone 42 toward the rotating inner peripheral blade 12 (X in the figure).
(-) Direction) Send in. Then, the dressing stone 42 is cut by the cutting edge 12b of the inner peripheral blade 12 to the position shown in FIG.

Here, the tip end upper side portion D and the lower side portion E of the cutting edge 12b shown in FIG. 7 are brought into contact with the dressing stone 42, whereby both side portions of the tip end of the cutting edge 12b, that is, the tip upper side portion. D and the lower part E are dressed. Next, move the horizontal slider 50 to X (+) in the figure.
The dressing stone 42 is slid and moved in a direction to feed the dressing stone 42 in a direction away from the rotating inner peripheral blade 12 (X (+) direction in the drawing) by a predetermined amount, and the vertical slide arm 62
Is slid in the Z (-) direction in the figure, and the dressing stone 42 is lowered by a predetermined amount (Z (-) direction in the figure). As a result, the dressing stone 42 is moved to the position shown in FIG.
As shown in (b), the blade tip 12b moves diagonally downward.
Are pulled obliquely upward relative to the dressing stone 42.

Here, the dressing stone 42 is brought into contact with the rear end upper portion F of the cutting edge 12b shown in FIG.
The dressing stone 42 is cut obliquely upward by the rear end upper portion F of the cutting edge 12b. As a result, the rear end upper portion F of the cutting edge 12b is dressed. Next, the horizontal slider 50 is slid in the X (+) direction in the drawing, and the dressing stone 42 is pulled out by a predetermined amount in the direction (X (+) direction in the drawing) away from the rotating inner peripheral blade 12 (vertical slide arm). 62 is slid in the Z (+) direction in the figure to raise the dressing stone 42 by a predetermined amount (Z (+) direction in the figure). As a result, the dressing stone 42 moves diagonally upward, as shown in FIG. 6C, and the cutting edge 12 b is pulled obliquely downward relative to the dressing stone 42.

Here, the dressing stone 42 is brought into contact with the lower rear end portion G of the cutting edge 12b shown in FIG.
The dressing stone 42 is cut diagonally downward by the lower end portion G of the cutting edge 12b. Thereby, the lower end portion E of the cutting edge 12b is dressed. By performing the series of steps, the inner peripheral blade 12
The dressing on both sides of the blade edge 12b is finished.

As described above, according to the dressing method for the inner peripheral blade of the third embodiment, the cutting edge 12b is dressed by a simple and simple operation as in the first and second embodiments. It is possible to obtain the same effects as those of the first and second embodiments. Further, similar to the first and second embodiments, the cutting amount, the cutting angle, and the number of dressings are changed according to the state of the cutting edge 12b to dress a desired portion of the cutting edge 12b by a desired amount. be able to.

In the present embodiment, the vertical slicing machine 10 for rotating the inner peripheral blade 12 in the horizontal plane has been described as an example, but the present invention is also applicable to a horizontal slicing machine for rotating the inner peripheral blade 12 in the vertical plane. can do. Further, in the present embodiment, the case where the cutting edge 12b of the inner peripheral blade 12 is dressed has been described, but the present invention can also be applied to the case where the cutting edge 12b of the outer peripheral blade is dressed.

In addition, dressing conditions such as a dressing start time, a dressing stone cutting speed, a cutting amount, and the number of cuts may be automatically determined, and the dressing may be automatically performed as follows. . That is, during the cutting operation of the slicing machine 10, the displacement of the inner peripheral blade 12, the pressure of the air blown from the air pad for correcting the displacement of the inner peripheral blade 12, the rotation speed of the inner peripheral blade 12, and the semiconductor during cutting. The cutting resistance applied to the ingot 16 is measured, and the measured value is measured by the CPU 32.
Output to The CPU 32 determines the dressing timing, dressing conditions, and the like by processing the measured values with a dressing program input in advance. C
A command signal such as the dressing timing and dressing conditions determined by the PU 32 is output to the servo controller 38, and the servo controller 38 servo-controls the moving mechanism 36 based on the command signal. As a result, the slicing machine 10 automatically switches from the cutting operation to the dressing operation, and starts appropriate dressing according to the damage status of the blade edge 12b of the inner peripheral blade 12.

[0055]

As described above, according to the present invention,
Since the cutting edge of the inner peripheral blade is cut diagonally to the dressing stone and pulled out horizontally, dressing of the cutting edge can be performed,
The cutting edge of the inner peripheral blade can be efficiently dressed in a short time.

Further, since it can be carried out by a device having a simple and simple drive structure and can be carried out by utilizing an existing device, the device is not complicated and large-sized as in the conventional case. Also, the equipment cost does not increase. Furthermore, since dressing does not require manpower, loss of cutting time due to dressing can be reduced, throughput can be improved, and work safety can be ensured.

[Brief description of the drawings]

FIG. 1 is a side sectional view showing a configuration of a slicing machine to which a dressing method for an inner peripheral blade according to the present invention is applied.

FIG. 2 is a side view showing a configuration of a drive mechanism of the recovery / polishing device.

FIG. 3 is a plan view showing the configuration of a vertical slide arm.

FIG. 4 is a first method of dressing an inner peripheral blade according to the present invention.
Explanatory diagram for explaining the embodiment of

FIG. 5 is a second method of dressing an inner peripheral blade according to the present invention.
Explanatory diagram for explaining the embodiment of

FIG. 6 shows a second method of dressing an inner peripheral blade according to the present invention.
Explanatory diagram for explaining the embodiment of

FIG. 7 is a side sectional view showing the configuration of the inner peripheral blade.

[Explanation of symbols]

10 ... Slicing machine 12 ... Inner peripheral blade 12a ... Base metal 12b ... Blade edge 16 ... Ingot 26 ... Work indexing slider 28 ... Recovery / polishing device 34 ... Recovery plate 36 ... Moving mechanism 38 ... Servo controller 42 ... Dressing stone 43 ... Notch groove 43A ... Valley of notch 43B ... Crest of notch 46 ... Horizontal drive 48 ... Vertical drive 50 ... Horizontal slider 60 ... Servo motor (for driving horizontal slider) 62 ... Vertical slide arm 68 ... Servo motor (vertical slide) Arm drive) 72 ... Rotary actuator A ... Cutting edge B ... Cutting edge upper end C ... Cutting edge lower end D ... Cutting edge upper part (from tip A to upper end B) E ... Cutting edge lower part (tip) A part from A to the lower end C F ... Upper part of the rear end of the cutting edge (a part from the upper end B toward the base metal 12a side) ) G ... rear lower portion of the cutting edge (the portion extending from the lower end C on the metal base 12a side)

Claims (3)

[Claims] 1. The edge of the inner peripheral blade is dressed by moving the edge of the rotating inner peripheral blade and the dressing stone in a direction relatively close to each other and cutting the dressing stone with the edge of the inner peripheral blade. In the dressing method of the inner peripheral blade, by cutting the blade edge of the inner peripheral blade in an oblique direction with respect to the dressing stone, after dressing the tip end one side surface of the inner peripheral blade with the dressing stone, the inner periphery By moving the blade and the dressing stone in a direction away from each other, the side surface of the blade tip rear end of the inner peripheral blade is dressed with the ridges or valleys of the cut groove of the dressing stone formed by the cut. A method for dressing an inner peripheral blade, which is characterized in that 2. The cutting edge of the inner peripheral blade is dressed by moving the blade edge of the rotating inner peripheral blade and the dressing stone in a direction relatively approaching each other and cutting the dressing stone with the blade edge of the inner peripheral blade. In the dressing method of the inner peripheral blade, by cutting the blade edge of the inner peripheral blade in an oblique direction with respect to the dressing stone, after dressing the blade tip tip one side surface of the inner peripheral blade with the dressing stone, the inner peripheral blade By changing the cutting direction of the blade edge of the inner peripheral blade, the other side of the blade tip tip of the inner peripheral blade is dressed with the dressing stone, and the inner peripheral blade and the dressing stone are moved in a direction relatively separated from each other. Of the dressing stone formed by the notch on one side surface of the blade tip rear end of the peripheral blade With dressing on the mountain portion of the interrupt grooves, dressing method of the circumferential edge, characterized in that the dressing valley groove cut the cutting edge trailing the other side. 3. The edge of the inner peripheral blade is dressed by moving the edge of the rotating inner peripheral blade and the dressing stone in a direction in which they are relatively close to each other and cutting the dressing stone with the edge of the inner peripheral blade. In the dressing method of the inner peripheral blade, by horizontally cutting the blade edge of the inner peripheral blade with respect to the dressing stone, dressing the blade tip tip both sides of the inner peripheral blade with the dressing stone, the inner peripheral blade edge. By obliquely pulling out with respect to the dressing stone, after dressing one side surface of the inner peripheral blade edge rear end with the dressing stone, by changing the withdrawing direction of the inner peripheral blade edge, the inner circumference Inner circumference characterized by dressing the other side of the rear end of the blade tip with the dressing stone Dressing method of.