JP4593647B2 - Circular substrate processing method and processing apparatus - Google Patents

Description

  The present invention relates to a processing method and a processing apparatus for a magnetic disk substrate or other circular substrate (referred to as a blank material after punching in this specification).

For example, for a magnetic disk substrate, a metal (aluminum alloy) strip is punched into a circular shape (doughnut shape) by a press die equipped with a die, a punch and a stripper, and the punched substrate is subjected to pressure annealing to remove distortion. , Substrate processing (inner and outer edge grinding, surface grinding) ⇒ plating processing ⇒ finished product by polishing process.
As shown in FIG. 8, the outer edge portion of the circular substrate (blank material) 1 from which the metal strip has been punched is sag (end face) on the shear surface side (lower surface side in the figure) cut by the die blade during punching. On the other hand, burrs 10 and fine irregularities are formed on the fracture surface side (upper surface side in the figure) that is broken by the punch blade. The sagging and burrs are similarly formed on the inner edge of the substrate by the inner edge of the punch and the outer edge of the hole punch.

The substrate after punching is transferred from the punching part to the stacking part (stacking part) by a transfer line such as a belt conveyor having alignment guides on both sides, pressure-annealed in the stacking state, and sent to another processing factory in the shrink packaging state. After being sent, the burr 10 is removed when the inner and outer edges are ground.
Thus, conventionally, deburring of a substrate is performed by grinding at the time of substrate processing, but in the process of transporting the substrate by the transport line or the process of stacking, the outer edge portion is the guide of the alignment guide or stacking unit. Contact with other members causes part of the burrs 10 and fine irregularities at the outer edge to fall off and generate chips (hereinafter referred to as “burr scraps”).
The outer edge portion of the substrate is pushed back at the time of punching, but the inner edge portion remains punched, and the cut edge does not come into contact with the skeleton, so that burrs and chips are less likely to fall off.

Most of the burrs remain attached on the substrate (substrate surface), and these burrs are sandwiched between the substrates when the substrates are stacked, and during subsequent pressure annealing of the substrate. When being subjected to shrink wrapping or during transportation after shrink wrapping, a surface pressure is applied, resulting in a state embedded in the substrate surface. The burr scrap that is embedded in the substrate surface is then removed from the substrate surface by surface grinding during substrate processing, but if the amount of burr scrap embedded in the substrate surface is larger than the grinding allowance of the substrate, After the surface grinding, the recessed portion of the embedded portion becomes a pit, which causes a deterioration in the quality of the disc.
JP-A-5-314474

  The problem to be solved by the present invention is to smoothly carry out various circular substrates, processing methods thereof, and the processing methods that eliminate the influence on products such as burr scraps falling off from the outer edge of the substrate in the process after punching. It is in providing the processing apparatus which can do.

The present invention is configured as follows to solve the above-described problems.
A circular substrate processing method and apparatus according to the present invention includes a first guide member and a second guide member, which are firstly disposed to face each other with a substrate interposed therebetween, and at least one first guide member is provided. The second guide member is a guide that is continuously driven along the direction, and the second guide member is formed on the outer edge portion of the substrate after punching on the transport line by a deburring means including a guide member that is harder than the substrate. A deburring process and a deburring process generated by the deburring process from the substrate. In the deburring process on the outer edge of the substrate, the outer edge of the substrate is the length of the rolling contact portion between parts is the the substrate in a state of being rolling contact with the guide member is rotated one or more times with a length sufficient to rotate said substrate at least once, the substrate is the guide When in contact with a member It is characterized in that deburring while transported in the transport direction by pressing the guide member at a predetermined elasticity to the outer edge of the substrate.
Is characterized in that the removal of burr debris by either or both of the means of any of the suction and irrigation, in the process of the burr debris second removed from the substrate.
And rolling contact an outer edge of the substrate after punching on the transport line to the third, and a first guide member and second guide members disposed at opposite state across the substrate, at least a first guide The member is a guide which is continuously driven endlessly along one direction, the second guide member is made of a material harder than the substrate, and the guide member is moved when the substrate is in rolling contact with the guide member. Deburring means provided with a guide member that is pressed against the outer edge of the substrate with a predetermined elasticity and rotated in the transport direction by rotating the substrate one or more times and deburred on the outer periphery of the substrate, and adhered to the substrate Burr debris removal means for removing burr debris is provided, and the length of the rolling contact portion of the guide member with the substrate outer edge is sufficient to allow the substrate to rotate once or more. .
Fourth , the first guide member is a belt held by a pair of pulleys.
Fifth , the first guide member is composed of a large number of members divided along the driving direction, and each member is a belt held by a pair of pulleys or an endless chain held by a pair of gears. It is characterized by being attached continuously.
The sixth first guide member provided along the rotation member f the rotational direction of rotating in one direction, the second guide member is disposed opposite to the concave arcuate outer peripheral direction of the first guide member It is characterized by having.
Seventh , a biasing member that biases the second guide member and / or the first guide member toward the substrate is provided.
The eighth second guide member and / or the first guide member is characterized by having a groove portion that the outer edge of the substrate is guided.
Ninthly , at least the second guide member has a groove-like portion that guides an outer edge portion of the substrate, and is composed of at least two parts that are divided along the center of the bottom of the groove-like portion. The urging member that urges the second guide member in the direction of the substrate is an urging member that urges the second guide member in a direction sandwiching the outer edge portion of the substrate by the parts.
Tenth , a gap is formed between two parts constituting the second guide member at least in a state where the outer edge of the substrate is guided into the groove-like portion, and the second guide member has a second gap on the back side thereof. It is characterized in that burr debris removing means for sucking and removing burr debris from a gap between two parts is installed.
11thly , the said 1st guide member and the 2nd guide member are installed in the middle of the conveyance line of the said board | substrate, and the said 1st guide member synchronizes with the conveyance speed along the conveyance direction of the said conveyance line. It is characterized by driving.

  According to the present invention, since the burrs at the outer edge are removed from the substrate, there is no room for burrs to be generated even if the outer edge of the substrate comes into contact with a guide or other member thereafter. It is possible to prevent the occurrence of pit defects (occurrence of pits) due to the remaining of slag.

  According to the method for processing a circular substrate according to the present invention, deburring is performed on the outer edge portion of the substrate after punching, and the generated debris is removed from the substrate. Even if it comes into contact with other members, burrs are not generated. Therefore, the circular substrate according to the present invention can be processed reliably and smoothly.

  According to the circular substrate processing apparatus of the present invention, the outer edge burrs are removed while the substrate is rotated one or more times in a state where the outer edge of the substrate after punching is in contact with the guide member. Since the adhering burrs are removed from the substrate by the burrs removing means, the above processing method can be carried out smoothly.

A preferred embodiment of the present invention will be described with reference to FIGS.
First Embodiment FIG. 1 is a partial plan view showing a first embodiment of a circular substrate processing apparatus according to the present invention, and FIG. 2 is a partial enlarged cross-sectional view taken along arrow AA in FIG.

The processing apparatus of this embodiment is a form in which the processing apparatus according to the present invention is applied to the processing of an aluminum alloy substrate for a magnetic disk, and the metal strip intermittently transferred to the installation position of a punching press mold (not shown) The doughnut-shaped substrate 1 is sequentially punched by the punching press die.
After the punching, the substrate 1 is deburred by the deburring means 3 provided with guide members 3a and 3b whose outer edge portions are brought into rolling contact, and the debris remaining on the substrate 1 is removed by the deburring means. It is removed from the substrate 1 by 4a and 4.
In this embodiment, the deburring means 3 provided with the guide members 3a and 3b and the deburring dust removing means 4a and 4 are installed in the middle of the transport line 2 of the punched substrate 1, and the guide members 3a and 3b. The length of the rolling contact portion with the outer edge portion of the substrate is sufficient for the substrate 1 to rotate once or more.
On both sides of the transport line 2, alignment guides (not shown) are installed in portions other than the installation area of the deburring means 3 and the debris removal means 4.

In this embodiment, 3a is a first guide member, 3b is a second guide member, and the first guide member 3a is a guide that is continuously driven endlessly along the transport direction of the transport line 2.
The conveyance line 2 has an arcuate bent portion 20 having a U-turn shape in plan view in the middle, and the deburring means 3 is installed on the arcuate bent portion 20.
That is, the arcuate bent portion 20 is provided with a rotating body 30 that rotates in the transport direction with the central portion serving as a rotation axis, and the first guide member 3a is arranged along the rotating direction (concentric with respect to the rotating body 30). Attached).
In the outer peripheral direction of the first guide member 3a, an arc-shaped second guide member 3b is installed so as to face the first guide member 3a with the substrate 1 to be conveyed interposed therebetween. Since the inner peripheral length of the second guide member 3b is equal to or greater than the peripheral length of the substrate 1, the substrate 1 is once in a state where the outer edge portion is in rolling contact with the guide members 3a and 3b when passing through the arc-shaped bent portion 20. It rotates above.

As shown in FIG. 2, each guide member 3a, 3b has a groove portion 32 having a substantially V-shaped cross section along the transport direction of the transport line, and the outer edge portion of each substrate 1 is each guide member 3a. , 3b so as to be in rolling contact with the groove-shaped portion 32.
The second guide member 3 b is composed of two upper and lower parts 31, 31 that are divided along the center of the bottom of the groove 32. These parts 31 and 31 are arranged so as to overlap with each other through an appropriate gap when the outer edge portion of the substrate 1 is guided to the groove portion 32, and the outer edge portion of the substrate 1 is arranged on the inclined surface of the groove portion 32. It is biased by a plurality of biasing portions 33 such as springs in the sandwiching direction. Reference numeral 33a denotes a holder (spring receiver) fixed to a frame (not shown), 33b denotes a guide pin vertically attached to the corresponding part 31, and the guide pin 33b holds a biasing member 33 made of a coil spring. And it penetrates movably with respect to the receiving tool 33a.
Since the parts 31 and 31 are biased as described above, the corners of the outer edge of the substrate 1 are pressed by the slopes of the groove-shaped part 32 between the parts 31 and 31, and the first Since it is pressed in the direction of the guide member 3a, the deburring process is promoted, and even when the board 1 has a large thickness or diameter variation, the variation can be absorbed.

  The guide members 3a and 3b are made of a material harder than the material of the substrate 1, and alloy tool steel (SKD), high speed tool steel (SKH), tool steel (SK) and the like are used. The guide members 3a and 3b are preferably subjected to nitriding treatment or hard Cr plating on the contact surface with the outer edge portion of the substrate 1 in order to extend their life and sharpness.

One 4a of the debris removal means 4 and 4a is a suction-type means installed on the back side of the second guide member 3b. That is, a suction box 40 opened so as to face the back surface is provided in a gap between the upper and lower parts 31 and 31 constituting the second guide member 3b, and a suction pipe (not shown) communicates with the suction box 40. During operation, the burrs that fall off the substrate 1 are sucked into the suction box 40.
The other deburring removal means 4 is a cleaning type means installed behind the deburring means 3 in the transport line. The debris removal means 4 includes a plurality of pairs of rollers (not shown) that rotate in the transport direction with the substrate 1 being transported from above and below, and cleaning water (hot water) from above and below the transport line 2 between the rollers. A plurality of spray nozzles (not shown) are sprayed, and each of these rollers and spray nozzles is covered by a cleaning box 41 together with a part of the transport line 2.
A cleaning agent that does not adversely affect the quality of the substrate 1 can be added to the cleaning water sprayed from the spray nozzle.

In the processing apparatus according to the first embodiment, the second guide member 3b may be a member having the same cross-sectional shape as the first guide member 3a, instead of the parts 31 and 31 that are divided as described above. it can.
In that case, the members in a state in which the guide member is divided into a plurality (for example, three) along the conveyance direction are installed so as to form an arc shape in plan view through a predetermined gap, and the respective members are It is desirable to provide a biasing member that biases in the direction of the substrate 1 (in the central direction of the arc-shaped bent portion 20). The reason is that deburring of the outer edge portion of the substrate 1 can be performed efficiently, and that variations in the thickness and diameter of the substrate 1 can be absorbed.

The operation of the processing apparatus of the first embodiment will be described together with an embodiment of a circular substrate processing method.
The substrates 1 transported at a predetermined interval by the transport line 2 sequentially reach the deburring means 3, and their outer edge portions are the outer peripheral portion of the first guide member 3a and the inner peripheral portion of the second guide member 3b. Rolling contact is made while being guided to each groove-like portion 32. The first guide member 3a rotates in synchronization with the line speed along the conveyance direction, so that the substrate 1 is sandwiched between the guide members 3a and 3b in the radial direction while rotating along the conveyance direction. Deburring processing is performed on the outer edge of the substrate 1 during this time.

Along with the deburring process, a part of the burr debris dropped from the outer edge of the substrate is removed by suction by the deburring debris removing means 4a in the suction form installed on the back surface of the second guide member 3b. 1 sequentially passes through the other debris removal means 4.
When passing through the debris removal means 4 in this cleaning form, the debris remaining on the substrate 1 is removed by the cleaning, and at the same time, the oil used at the time of punching is also washed away from the substrate 1.

  As shown in FIG. 7, the burrs 10 (FIG. 8) at the outer edge of the substrate 1 that has passed through the deburring means 3 and the deburring removal means 4a and 4 are removed, and the adhesion remains on the substrate 1 after the removal. The debris that had been removed is also removed. Therefore, even if a guide or other member comes into contact with the outer edge of the substrate 1 in a later process, there is no possibility that burrs will be generated, and pits are formed in the finished product (hereinafter referred to as “pit defects”). Can be prevented.

Second Embodiment FIG. 3 is a partial plan view showing a second embodiment of the processing apparatus for a circular substrate, and the deburring means 3 is installed in a linear conveyance section of the conveyance line.
The deburring means 3 includes a first guide member 3a installed along the conveyance direction on one side of the conveyance line 2, and a second guide member installed along the other side of the conveyance line 2. 3b.

The first guide member 3a has a cross-sectional shape similar to that of the first guide member 3a of FIG. 2 (first embodiment), and is divided in a certain length along the conveyance direction. It is comprised from many members 34 which are continuously driven endlessly along.
Each member 34 is continuously attached to an endless chain 30b held by a pair of horizontal gears 30a, 30a. The chain 30b is synchronized with the speed of the line along the conveying direction of the conveying line 2. It is controlled to drive continuously.

Each member 34 is a substrate in which the outer edge portion is guided to the groove-like portion of each member 34 by a biasing member 35 made of a coil spring installed on the back side in a portion that faces the conveyance line 2 and is driven. It is energized so that it can be pressed to 1 part. In this embodiment, a holding member 35c is installed on a support member (not shown) so as to advance and retreat within a predetermined range in the direction of the conveyance line 2, and at least in a state of rolling contact with each member 34 traveling in front of the holding member 35c. A pair of rollers 35d and 35d are held, and the biasing member 35 biases each member 34 as described above via each roller 35d held by the holding member 35c.
35a is a holder fixed to a frame or the like (not shown), 35b is a guide pin that movably penetrates the holder 35a in the axial direction, and the guide pin 35b is perpendicular to the back side of the holding member 35c. The urging member 35 made of a coil spring is held. The holding member 35c including the urging member 35 also serves as a guide rail that supports the chain 30b so as not to loosen in the horizontal direction, and the chain 30b is supported by a guide rail (not shown) so as not to loosen in the vertical direction. Has been.

The second guide member 3b has the same cross-sectional shape as each member 34 constituting the first guide member 3a, and is attached to a support member (not shown) so as to advance and retreat in a predetermined range toward the transport line 2. The biasing member 33 made of a coil spring is biased toward the substrate 1 in a state where the outer edge portion is guided to the groove-shaped portion of the second guide member 3b.
33a is a holder attached to a frame (not shown), 33b is a guide pin holding a biasing member 33 made of a coil spring, and the guide pin 33b is vertically attached to the back side of the guide member 3b. 33a is movably penetrated.
The material of each guide member 3a (member 34), 3b is the same as that of the guide members 3a, 3b of the first embodiment.

According to the circular substrate processing apparatus of the second embodiment, each substrate 1 is driven by the first and second members 34 of the first guide member 3a that is continuously driven in synchronization with the line speed of the transport line 2. It is conveyed while rotating in the clockwise direction of FIG. 3 in a state where the outer edge portion is in rolling contact with the groove-like portions of the guide members 3a and 3b.
While each substrate 1 is transported while rotating as described above, the outer edge portion rotates in the grooved portions of the guide members 3a and 3b and rotates one or more times, so that the burr at the outer edge portion drops off. (Burr removal processing is performed on the outer edge portion), and the debris that has fallen off and adheres to the substrate 1 is removed from the substrate 1 by a debris removal means (not shown) in a cleaning form installed at a downstream position of the transfer line 2. The
Further, since the first guide member 3a and the second guide member 3b are biased in a direction in which each substrate 1 is sandwiched between them, variations in the thickness and diameter of each substrate 1 can be absorbed.
Since other operations and effects of this embodiment are the same as those of the apparatus of the first embodiment, description thereof will be omitted.

In the second embodiment, the gears 30a and the chain 30b on the first guide member 3a side can be replaced with pulleys and belts, respectively, and the second guide member 3b can be replaced with the second of the apparatus of the first embodiment. The guide member 3b is composed of linear upper and lower parts having the same cross-sectional shape, and urges them in the direction in which the outer edge portion of the substrate 1 is sandwiched, and toward the back side of the second guide member as shown in FIG. A debris removing means having a similar suction form can be provided.
Even if one of the urging members 33 and 35 is omitted, it can be implemented.
Moreover, the 2nd guide member 3b can be comprised in the form which can be driven similarly to the 1st guide member 3a. In this case, the second guide member 3b is continuously driven in the direction opposite to the transport direction of the transport line 2, or continuously driven along the transport direction of the transport line 2 at a slower speed than the first guide member 3a. In either case, however, the drive speeds of the guide members 3a and 3b are controlled so that the substrate 1 is transported in synchronization with the transport speed of the transport line 2 while rotating.

Third Embodiment FIG. 4 is a partial plan view showing a third embodiment of a processing apparatus for a circular substrate, and the deburring means 3 is installed on one side of the linear conveyance section of the conveyance line 2 along the conveyance direction. The first guide member 3a and the second guide member 3b installed along the other side portion. The first guide member 3a is continuously driven endlessly in the transport direction in synchronization with the transport speed of the transport line 2 during operation.
The second guide member 3b is configured in substantially the same manner as the second guide member 3b in the apparatus of the second embodiment.

The first guide member 3a is constituted by a belt (V belt) 3d held by a pair of horizontal pulleys 30c, 30c.
The portion of the first guide member 3a that drives to face the conveyance line 2 is urged toward the substrate 1 by the urging member 35 in the same state as in the processing apparatus of the second embodiment. The holding member 35c holds at least a pair of rollers (not shown) that are in rolling contact with the belt 30d constituting the first guide member 3a.

According to the processing apparatus of the third embodiment, each substrate 1 is grooved in the first and second guide members 3a and 3b by the first guide member 3a that is continuously driven in synchronization with the transport speed of the transport line 2. In the state where the outer edge portion is in rolling contact with the shape portion, the sheet is conveyed while rotating clockwise in FIG.
While each substrate 1 is conveyed while rotating as described above, the outer edge rotates one or more times in a state of rolling contact with the grooved portion of the second guide member 3b, so that the outer edge is deburred. The debris that has fallen off and adheres to the substrate 1 is removed from the substrate 1 by a debris removing means (not shown) in a cleaning form installed at a downstream position of the transfer line 2.
Further, since the first guide member 3a and the second guide member 3b are biased in a direction in which each substrate 1 is sandwiched between them, variations in the thickness and diameter of each substrate 1 can be absorbed.
Since other operations and effects of this embodiment are the same as those of the apparatus of the first embodiment, description thereof will be omitted.

In the third embodiment, the second guide member 3b is composed of upper and lower parts similar to those of the second guide member 3b of the apparatus of the first embodiment, urges them in the same manner, and the second guide member 3b The debris removal means of the suction | inhalation form similar to FIG. 2 can be provided in the back side of a guide member.
Even if one of the urging members 33 and 35 is omitted, it can be implemented.
Moreover, the 2nd guide member 3b can be comprised similarly to the 1st guide member 3a in 2nd Embodiment. In this case, the second guide member 3b is continuously driven in the direction opposite to the transport direction of the transport line 2, or continuously driven along the transport direction of the transport line 2 at a slower speed than the first guide member 3a. In either case, however, the drive speeds of the guide members 3a and 3b are controlled so that the substrate 1 is transported in synchronization with the transport speed of the transport line 2 while rotating.

Fourth Embodiment FIG. 5 is a partial front view showing a fourth embodiment of a processing apparatus for a circular substrate. And a second guide member 3b installed along the lower part of the transport line 2. The first guide member 3a is continuously driven endlessly in the transport direction in synchronization with the transport speed of the transport line 2 during operation.
The first guide member 3a is constituted by a belt (V-belt) held by a pair of vertical pulleys 30c, 30c.
The second guide member 3b has a cross-sectional shape similar to that of the first guide member 3a of the apparatus of the first embodiment, and is made of a material harder than the substrate 1 like the guide member 3a of the first embodiment. ing.

According to the processing apparatus of the fourth embodiment, each substrate 1 is grooved in the first and second guide members 3a and 3b by the first guide member 3a that is continuously driven in synchronization with the line speed of the transport line 2. In the state where the outer edge portion is in rolling contact with the shape portion, it is conveyed while rotating clockwise in the figure.
While each substrate 1 is conveyed while rotating as described above, the outer edge portion rotates a plurality of times along the conveying direction with the outer edge portion rolling into the groove-like portion of the second guide member 3b. The deburring process that has been removed and adhered to the substrate 1 is removed from the substrate 1 by a deburring removal means (not shown) installed at a downstream position of the transfer line 2.
Further, since the outer edge portion of the substrate 1 is always in contact with the groove-like portion of the second guide member 3b on the fixed side due to gravity, it is possible to absorb variations in the plate thickness.
Since other operations and effects of this embodiment are the same as those of the apparatus of the first embodiment, description thereof will be omitted.

  In the fourth embodiment, a vertical wall in which the groove portion of the second guide member 3b installed in the lower portion is deep and low friction sheets are fixed on both sides of the inner bottom portion having a V-shaped or concave arc shape in cross section. The first guide member 3a can be omitted, and the substrate 1 can be configured to roll in the transport direction along the second guide member 3b by its own weight.

Other Embodiments FIG. 6A to FIG. 6F are cross-sectional views showing modifications of different guide members in the processing apparatus according to the present invention.
(A) The figure is a form in which the surface on which the outer edge portion of the substrate 1 rolls is formed by a vertical rough surface in both the first guide member 3a on the driving side and the second guide member 3b on the fixed side. The other configurations of the first guide member 3a, the installation state thereof, and the installation state of the second guide member 3b are the same as those in the second embodiment shown in FIG. Those explanations are omitted.
Reference numeral 36 denotes a support member that supports the holding member 35c of the roller 35d so as to advance and retreat within a predetermined range toward the conveyance line 2, 37 denotes a guide rail that prevents the endless chain 30b from loosening, and 38 denotes a second member. It is a support member that supports the guide member 3b so as to advance and retreat within a predetermined range toward the transport line 2.

(B) The figure is a form in which the groove-like portion 32 of the second guide member 3b is formed in a concave arc shape in section, and the second guide member 3b is urged by the same configuration as the embodiment of FIG. The member 33 is biased toward the substrate 1. The first guide member can also be formed in a similar shape.
(C) The figure shows a form in which each member 34 constituting the first guide member 3a is formed in a state of being divided along the length direction from the center of the groove-like portion 32. Are continuously attached to endless chains 30b, 30b, which are held in separate pairs of gears (not shown). Each member 34, 34 is urged by each urging member 35 comprising a coil spring in a direction sandwiching the outer edge portion of the substrate 1 from the vertical direction. The installation state for urging each member 34 by the urging member 35 is substantially the same as in the case of FIG.

(D) The figure shows a form in which the second guide member 3b is composed of parts 31, 31 in a state where the second guide member 3b is divided along the length direction from the center of the groove-shaped portion 32 having an arcuate cross section. Similarly to the embodiment of FIG. 2, 31 and 31 are urged by the urging members 33 and 33 in the direction of sandwiching the outer edge portion of the substrate 1.
Each member of the first guide member (a member similar to the member 34 in FIG. 3) can also be formed in a similar cross-sectional shape. The installation state of each member in this case is substantially the same as in FIG.

(E) In the figure, the second guide member 3b is constituted by three parts 31, 31, and 31a each having a triangular cross-section at the front end portion to be assembled. Each part 31, 31, 31a is an urging member. 33 is urged in the direction of the substrate 1.
Each member constituting the first guide member (a member similar to the member 34 in FIG. 3) can also be formed in the same cross-sectional shape. In this case, each of the upper and lower members and the side members are respectively It is attached to another endless chain, and the installation state thereof is the same as that of FIG. (A) for the side members and the same as that of FIG.

(F) In the figure, one of the two parts 31 constituting the second guide member 3b is formed in a substantially triangular cross section, while the other part 31 is formed in a shape having a triangular section at the tip. The parts 31 and 31 are vertically combined with the slope of the other part 31 opposite to the slope of the other part 31, and only the other part 31 is biased toward the outer edge of the substrate 1. . The lower part 31 and the upper part 31 are the same even if they are arranged in reverse.
The members constituting the first guide member (members similar to the members 34 in FIG. 3) can also be formed in the same cross-sectional shape. In this case, the upper and lower members are respectively connected to different endless chains. Install.

In each of the above embodiments, the first guide member 3a and / or the second guide member 3b is urged toward the outer edge portion of the substrate 1 by the urging members 35 and 33. If the variation in the plate thickness and diameter is small, it is not necessary to bias the guide member.
In particular, as shown in FIG. 4, when a belt is used for the first guide member on the driving side, the belt absorbs variations in the plate thickness and diameter of the substrate 1, so that the guide member is not energized. The effect of.

  Prototypes of the processing apparatus of each example of the following configuration and the processing apparatus of the comparative example, for the disk processed the substrate by the processing apparatus, the presence or absence of pits of the substrate after the processing is examined, the result is the material of the guide member The results are shown in Table 1.

Substrate An aluminum alloy substrate (blank material) for a 3.5 inch magnetic disk having an outer diameter of 96.0 mm and a plate thickness of 1.84 mm is used.
1st guide member In each processing apparatus installed in the linear part of a conveyance line, while using the belt (V belt) guided so that the part which a board | substrate outer edge part roll-contacts may not loosen, the said belt is urged | biased in the direction of a board | substrate. I did not. The length was sufficient for the substrate with which the outer edge portion was rolled to rotate one or more times. The driving speeds (Examples 13 and below installed at the arcuate bends are indicated by the number of revolutions) are shown in Table 1, respectively.
In each processing apparatus in which the deburring means is installed in the arc-shaped bent portion of the transfer line, it has a groove-shaped portion having a V-shaped cross section (FIG. 2) and is made of the same material as the second guide member. did.
When neither of the second guide members are driven and each has a groove-shaped portion with a V-shaped cross section as shown in Table 1 and is used in different forms and materials, and is configured with two upper and lower parts. Each was biased in a direction to sandwich the outer edge of the substrate. The interior angle of the groove-shaped part was designed to be 50 °, and the angle of each inclined surface with respect to the substrate surface was 25 °. The length was sufficient for the substrate with which the outer edge portion was rolled to rotate one or more times.
Comparative Example 1
Twenty substrates 1 after punching were stacked on a rotating cradle 5 as shown in FIG. 9, the brush 6 was brought into contact with the outer edge portion in a fixed state, and the substrate 1 was rotated at 100 rpm.
Comparative Example 2
Substrate without blanking after punching Deburring means Means for cleaning were used in both the examples and comparative examples.
Pit failure Processed sample is investigated in the process before substrate processing (shrink pack), ◎ when there is no pit, △ when there is a pit, but a level that can be removed when processing the substrate is shallow, pit is present The case where the level could not be removed during substrate processing was indicated as x.

  According to the results of Table 1, in the samples of the examples according to the present invention, burrs at the outer edge were removed from the substrate, and no pit defects were observed, whereas in Comparative Examples 1 and 2, there were pit defects. Admitted. In the cases of Examples 5 to 12 and Examples 17 to 24, in which the second guide member is composed of two upper and lower parts, and the parts are biased in the direction of sandwiching the outer edge of the substrate, the second guide member is used. As compared with the cases of Examples 1 to 4 and Examples 13 to 16 which were not energized as an integrated type, the deburring process could be performed more effectively.

  In each of the above embodiments, the case where an aluminum alloy substrate for a magnetic disk is a processing target has been described. However, the present invention is another circular substrate that should prevent the generation of pits on the product surface of the substrate, This includes the case where a substrate (blank material) from which a strip is punched is used as a processing target.

It is a fragmentary top view which shows 1st Embodiment of the processing apparatus of the circular substrate which concerns on this invention. It is a partial expanded sectional view which follows the arrow AA of FIG. It is a fragmentary top view which shows 2nd Embodiment of the processing apparatus of a circular substrate. It is a fragmentary top view which shows 3rd Embodiment of the processing apparatus of a circular substrate. It is a partial front view which shows 4th Embodiment of the processing apparatus of a circular substrate. It is a figure which shows the deformation | transformation form of the guide member in the processing apparatus of the circular board | substrate which concerns on this invention, (a) Figures-(f) is sectional drawing which shows the deformation | transformation form of another guide member. It is a partial expanded sectional view of the circular substrate concerning the present invention. It is a partial expanded sectional view of the punched circular substrate (blank material). It is a schematic perspective view which shows the processing apparatus of the circular substrate of a comparative example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate 10 Burr 10a Residual convex part 11 Sag 12 Face pressing part 2 Conveying line 20 Arc-shaped bent part 3 Deburring means 3a 1st guide member 3b 2nd guide member 30 Rotating body 30a Gear (pulley)
30b Chain (belt)
30c Pulley 30d Belt 31, 31a Parts 32 Groove portion 33, 35 Biasing member 33a, 35a Receiving member 33b, 35b Guide pin 35c Holding member 35d Roller 36, 38 Support member 37 Guide rail 4, 4a Debris removal means 40 Suction Box 41 Washing box

Claims (11)

A first guide member and a second guide member installed in a state of being opposed to each other with the substrate interposed therebetween, wherein at least the first guide member is a guide that is continuously driven endlessly along one direction; The deburring means having the guide member 2 made of a material harder than the substrate is used to deburr the outer edge of the substrate after punching on the transfer line, and the deburring generated by the deburring process is performed. A step of removing debris from the substrate, and in the step of deburring the outer edge portion of the substrate, the length of the rolling contact portion between the outer edge portion of the substrate and the outer edge portion of the substrate is one or more times. The substrate is rotated one or more times in a state of rolling contact with the guide member having a sufficient length to rotate, and the guide member is moved to the outer edge of the substrate when the substrate is in rolling contact with the guide member. With predetermined elasticity Characterized that, the processing method of a circular substrate that deburring while transported in the transport direction by and attached. The circular substrate processing method according to claim 1, wherein in the step of removing the debris from the substrate, the debris is removed by one or both of suction and cleaning. And rolling contact an outer edge of the substrate after punching on the transport line, and a first guide member and second guide members disposed at opposite state across the substrate, at least a first guide member one A guide that is continuously driven endlessly in a direction, and the second guide member is made of a material harder than the substrate, and the guide member is moved to the outer edge of the substrate when the substrate is in rolling contact with the guide member. Deburring means provided with a guide member that is pressed against a portion with a predetermined elasticity and rotated in the transport direction by rotating the substrate one or more times and deburring the outer periphery of the substrate, and debris adhering to the substrate A circular substrate characterized in that a burr debris removing means for removing is provided, and the length of the rolling contact portion with the substrate outer edge portion of the guide member is sufficient for the substrate to rotate one or more times. Processing equipment. The circular substrate processing apparatus according to claim 3 , wherein the first guide member is a belt held by a pair of pulleys. The first guide member is composed of a number of members divided along the driving direction, and each member is continuously connected to a belt held by a pair of pulleys or an endless chain held by a pair of gears. It is attached, the processing apparatus of a circular substrate according to claim 3. The first guide member is provided along a rotational direction of a rotating body that rotates in one direction, and the second guide member is disposed to face the outer circumferential direction of the first guide member in a concave arc shape. The circular substrate processing apparatus according to claim 3 . The circular substrate processing apparatus according to claim 3 , further comprising a biasing member that biases the second guide member or / and the first guide member toward the substrate. The circular substrate processing apparatus according to claim 3 , wherein the second guide member and / or the first guide member has a groove-like portion in which an outer edge portion of the substrate is guided. At least the second guide member has a groove-like portion that guides an outer edge portion of the substrate, and includes at least two parts that are divided along the center of the bottom of the groove-like portion. The circular substrate processing apparatus according to claim 7 , wherein the urging member that urges the two guide members in the direction of the substrate is a urging member that urges the parts in a direction in which an outer edge portion of the substrate is sandwiched between the parts. . At least in the state where the outer edge of the substrate is guided in the groove-like portion, a gap is formed between the two parts constituting the second guide member, and between the two parts on the back side of the second guide member The apparatus for processing a circular substrate according to claim 9 , wherein burr debris removing means for removing burr debris from the gap is provided. The first guide member and the second guide member are installed in the middle of the transport line of the substrate, and the first guide member is driven in synchronization with the transport speed along the transport direction of the transport line. The circular substrate processing apparatus according to claim 3 .

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