JP4606168B2 - マイクロ構造及びその製造方法 - Google Patents
マイクロ構造及びその製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims description 25
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- 229920000636 poly(norbornene) polymer Polymers 0.000 claims description 6
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 4
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- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
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- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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Description
本願は、2002年10月31日出願の出願番号60/422,530号を有する「MEMS用マイクロエアチャンネルの製造における非相容性の問題を解決するための構造材料としての二酸化珪素(Silicon-di-oxide as a Structural Material to Resolve Incompatibility Issues in the Fabrication of Micro-Airchannels for MEMS)」というタイトルの同時係属の米国仮出願の優先権を主張するものであり、この出願は全て本願に援用される。
米国政府は、本発明において払込済ライセンスを持つことができ、限られた状況下で米国政府の国立科学財団(認可番号DMI−9980804)によって与えられるMDAの条件により提供されるような適当な条件で他者に使用を許可することを特許権者に要求する権利がある。
Claims (7)
- 基板と、
前記基板上に配置されたオーバーコート層と、
前記オーバーコート層内にある少なくとも一つの空気領域と、
内側表面及び向かい合う外側表面とを有し、前記内側表面は前記空気領域の少なくとも一部分と係合し、前記向かい合う外側表面は前記オーバーコート層と係合するフレーミング層とを含み、
前記基板の一部と前記空気領域の一部とが直接接することを特徴とするマイクロ構造体。 - 前記オーバーコート層が、ポリイミド、ポリノルボルネン、エポキシド、ポリアリーレンエーテル、ポリアリーレン、無機ガラス及びこれらの組み合わせから選択される、請求項1のマイクロ構造体。
- 前記フレーミング層が、SiO2、Si3N4、SiOxNy、ここでxは0.01乃至2であり、yは0.01乃至1.33である、及びAl2Oから選択される、請求項1または請求項2のマイクロ構造体。
- 前記空気領域は高さが0.01乃至100マイクロメートルであり、幅が0.1乃至10,000マイクロメートルである、請求項1から請求項3のいずれか1項のマイクロ構造体。
- 第1の空気領域が、第2の空気領域の上方で前記第2の空気領域からほぼオフセットして配置される、請求項1から請求項4のいずれか1項のマイクロ構造体。
- 犠牲ポリマー層が配置された基板を提供することと、
前記犠牲ポリマー層をパターニングして複数の犠牲ポリマー領域を形成すること、
各犠牲ポリマー領域の少なくとも一部分の上に、その内側表面が各犠牲ポリマー領域の少なくとも一部分と係合するフレーミング層を配置することと、
前記フレーミング層の上にオーバーコート層を配置し、前記オーバーコート層は前記フレーミング層の外側表面と係合して各犠牲ポリマー領域を前記オーバーコート層から実質的に分離させることと、
を含む、マイクロ構造体を製造する方法。 - 熱分解により各領域から前記犠牲ポリマーを除去して空気領域を形成する請求項6の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US42253002P | 2002-10-31 | 2002-10-31 | |
PCT/US2003/034198 WO2004041918A2 (en) | 2002-10-31 | 2003-10-28 | Microstructures and methods of fabrication thereof |
US10/695,591 US7182875B2 (en) | 2002-10-31 | 2003-10-28 | Microstructures and methods of fabrication thereof |
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JP2006518270A JP2006518270A (ja) | 2006-08-10 |
JP2006518270A5 JP2006518270A5 (ja) | 2007-02-22 |
JP4606168B2 true JP4606168B2 (ja) | 2011-01-05 |
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JP2004550154A Expired - Fee Related JP4606168B2 (ja) | 2002-10-31 | 2003-10-28 | マイクロ構造及びその製造方法 |
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US (2) | US7182875B2 (ja) |
EP (1) | EP1562742A4 (ja) |
JP (1) | JP4606168B2 (ja) |
KR (1) | KR101078113B1 (ja) |
AU (1) | AU2003284197A1 (ja) |
WO (1) | WO2004041918A2 (ja) |
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US6969505B2 (en) | 2002-08-15 | 2005-11-29 | Velocys, Inc. | Process for conducting an equilibrium limited chemical reaction in a single stage process channel |
US6622519B1 (en) * | 2002-08-15 | 2003-09-23 | Velocys, Inc. | Process for cooling a product in a heat exchanger employing microchannels for the flow of refrigerant and product |
US7014835B2 (en) * | 2002-08-15 | 2006-03-21 | Velocys, Inc. | Multi-stream microchannel device |
US7294934B2 (en) * | 2002-11-21 | 2007-11-13 | Intel Corporation | Low-K dielectric structure and method |
US7294734B2 (en) * | 2003-05-02 | 2007-11-13 | Velocys, Inc. | Process for converting a hydrocarbon to an oxygenate or a nitrile |
WO2004103539A2 (en) * | 2003-05-16 | 2004-12-02 | Velocys Inc. | Process for forming an emulsion using microchannel process technology |
US8580211B2 (en) * | 2003-05-16 | 2013-11-12 | Velocys, Inc. | Microchannel with internal fin support for catalyst or sorption medium |
US7485671B2 (en) * | 2003-05-16 | 2009-02-03 | Velocys, Inc. | Process for forming an emulsion using microchannel process technology |
US7220390B2 (en) * | 2003-05-16 | 2007-05-22 | Velocys, Inc. | Microchannel with internal fin support for catalyst or sorption medium |
US7250074B2 (en) * | 2003-08-29 | 2007-07-31 | Velocys, Inc. | Process for separating nitrogen from methane using microchannel process technology |
US7029647B2 (en) * | 2004-01-27 | 2006-04-18 | Velocys, Inc. | Process for producing hydrogen peroxide using microchannel technology |
US9023900B2 (en) | 2004-01-28 | 2015-05-05 | Velocys, Inc. | Fischer-Tropsch synthesis using microchannel technology and novel catalyst and microchannel reactor |
US7084180B2 (en) | 2004-01-28 | 2006-08-01 | Velocys, Inc. | Fischer-tropsch synthesis using microchannel technology and novel catalyst and microchannel reactor |
US8747805B2 (en) | 2004-02-11 | 2014-06-10 | Velocys, Inc. | Process for conducting an equilibrium limited chemical reaction using microchannel technology |
US7744830B2 (en) * | 2004-04-29 | 2010-06-29 | Lawrence Livermore National Security, Llc | Catalyst for microelectromechanical systems microreactors |
US7305850B2 (en) * | 2004-07-23 | 2007-12-11 | Velocys, Inc. | Distillation process using microchannel technology |
JP5627837B2 (ja) * | 2004-07-23 | 2014-11-19 | ヴェロシス,インク. | マイクロチャネル技術を用いる蒸留プロセス |
CA2575165C (en) * | 2004-08-12 | 2014-03-18 | Velocys Inc. | Process for converting ethylene to ethylene oxide using microchannel process technology |
US7622509B2 (en) * | 2004-10-01 | 2009-11-24 | Velocys, Inc. | Multiphase mixing process using microchannel process technology |
WO2006053345A1 (en) * | 2004-11-12 | 2006-05-18 | Velocys Inc. | Process using microchannel technology for conducting alkylation or acylation reaction |
JP5704786B2 (ja) | 2004-11-16 | 2015-04-22 | ヴェロシス,インク. | マイクロチャネル技術を用いる多相反応プロセス |
EP1830952A2 (en) * | 2004-11-17 | 2007-09-12 | Velocys Inc. | Process for making or treating an emulsion using microchannel technology |
WO2006094190A2 (en) * | 2005-03-02 | 2006-09-08 | Velocys Inc. | Separation process using microchannel technology |
EP1890802A2 (en) * | 2005-05-25 | 2008-02-27 | Velocys, Inc. | Support for use in microchannel processing |
EP2543434B1 (en) * | 2005-07-08 | 2022-06-15 | Velocys Inc. | Catalytic reaction process using microchannel technology |
GB0708758D0 (en) | 2007-05-04 | 2007-06-13 | Powderject Res Ltd | Particle cassettes and process thereof |
CN101910873B (zh) * | 2007-11-19 | 2012-11-07 | 3M创新有限公司 | 具有凹面或凸面的制品及其制造方法 |
JP5556051B2 (ja) * | 2009-04-15 | 2014-07-23 | 住友ベークライト株式会社 | 樹脂組成物およびそれを用いた半導体装置 |
US20100310961A1 (en) * | 2009-06-06 | 2010-12-09 | Dr. Robert Daniel Clark | Integratable and Scalable Solid Oxide Fuel Cell Structure and Method of Forming |
GB201214122D0 (en) | 2012-08-07 | 2012-09-19 | Oxford Catalysts Ltd | Treating of catalyst support |
US20140255270A1 (en) * | 2013-02-28 | 2014-09-11 | California Institute Of Technology | Removing sacrificial layer to form liquid containment structure and methods of use thereof |
US9416003B2 (en) * | 2014-02-24 | 2016-08-16 | Freescale Semiconductor, Inc. | Semiconductor die with high pressure cavity |
TWI590735B (zh) | 2014-12-15 | 2017-07-01 | 財團法人工業技術研究院 | 訊號傳輸板及其製作方法 |
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US5562838A (en) * | 1993-03-29 | 1996-10-08 | Martin Marietta Corporation | Optical light pipe and microwave waveguide interconnects in multichip modules formed using adaptive lithography |
US5641711A (en) * | 1994-04-28 | 1997-06-24 | Texas Instruments Incorporated | Low dielectric constant insulation in VLSI applications |
DE19708472C2 (de) * | 1997-02-20 | 1999-02-18 | Atotech Deutschland Gmbh | Herstellverfahren für chemische Mikroreaktoren |
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US6096656A (en) * | 1999-06-24 | 2000-08-01 | Sandia Corporation | Formation of microchannels from low-temperature plasma-deposited silicon oxynitride |
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MY128644A (en) * | 2000-08-31 | 2007-02-28 | Georgia Tech Res Inst | Fabrication of semiconductor devices with air gaps for ultra low capacitance interconnections and methods of making same |
JP2002139419A (ja) * | 2000-10-31 | 2002-05-17 | Nippon Sheet Glass Co Ltd | 微小流路素子及びその製造方法 |
US6696358B2 (en) * | 2001-01-23 | 2004-02-24 | Honeywell International Inc. | Viscous protective overlayers for planarization of integrated circuits |
US6807352B2 (en) * | 2001-02-11 | 2004-10-19 | Georgia Tech Research Corporation | Optical waveguides with embedded air-gap cladding layer and methods of fabrication thereof |
US6599436B1 (en) * | 2001-12-06 | 2003-07-29 | Sandia Corporation | Formation of interconnections to microfluidic devices |
-
2003
- 2003-10-28 EP EP03776587A patent/EP1562742A4/en not_active Withdrawn
- 2003-10-28 US US10/695,591 patent/US7182875B2/en not_active Expired - Fee Related
- 2003-10-28 WO PCT/US2003/034198 patent/WO2004041918A2/en active Application Filing
- 2003-10-28 KR KR1020057006928A patent/KR101078113B1/ko not_active IP Right Cessation
- 2003-10-28 AU AU2003284197A patent/AU2003284197A1/en not_active Abandoned
- 2003-10-28 JP JP2004550154A patent/JP4606168B2/ja not_active Expired - Fee Related
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2007
- 2007-01-25 US US11/657,769 patent/US8637137B2/en not_active Expired - Fee Related
Also Published As
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JP2006518270A (ja) | 2006-08-10 |
US8637137B2 (en) | 2014-01-28 |
WO2004041918A2 (en) | 2004-05-21 |
EP1562742A2 (en) | 2005-08-17 |
KR101078113B1 (ko) | 2011-10-28 |
AU2003284197A1 (en) | 2004-06-07 |
AU2003284197A8 (en) | 2004-06-07 |
WO2004041918A3 (en) | 2005-02-10 |
KR20050070077A (ko) | 2005-07-05 |
EP1562742A4 (en) | 2008-08-06 |
US20040131829A1 (en) | 2004-07-08 |
US7182875B2 (en) | 2007-02-27 |
US20100112277A1 (en) | 2010-05-06 |
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