JP4599231B2 - 水晶振動子の製造方法、及びその水晶振動子 - Google Patents
水晶振動子の製造方法、及びその水晶振動子 Download PDFInfo
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- JP4599231B2 JP4599231B2 JP2005158824A JP2005158824A JP4599231B2 JP 4599231 B2 JP4599231 B2 JP 4599231B2 JP 2005158824 A JP2005158824 A JP 2005158824A JP 2005158824 A JP2005158824 A JP 2005158824A JP 4599231 B2 JP4599231 B2 JP 4599231B2
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- quartz
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- thickness
- vibration
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims description 57
- 239000013078 crystal Substances 0.000 title claims description 53
- 239000010453 quartz Substances 0.000 title claims description 43
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 238000000034 method Methods 0.000 claims description 15
- 230000003014 reinforcing effect Effects 0.000 claims description 13
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 11
- 230000000873 masking effect Effects 0.000 claims description 8
- 238000000206 photolithography Methods 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 2
- 238000005530 etching Methods 0.000 description 9
- 238000007740 vapor deposition Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
水晶薄片素板の振動領域とする部分に電極を形成する工程(S101)と、該水晶薄片素板の電極を含む振動部分にマスキングを施す工程(S102)と、該水晶薄片素板のマスキングされた部分の周辺に所望の厚さの、該振動部の周囲を囲う補強部を形成する酸化シリコンを蒸着する工程(S103)と、該マスキングを該水晶薄片素板から剥離する工程(S104)を有することを特徴とする。
2 水晶振動子
3 水晶薄片素板
4 振動部
5 酸化シリコンの蒸着層
6 振動領域とする部分
7 電極部
8 (酸化シリコン)厚さ
Claims (3)
- 一枚のウェハー上に多数個の水晶振動子が形成された、水晶薄片素板の振動部と該振動部の周囲を囲う補強部が一体と成った厚み滑り振動をする水晶振動子の製造方法において、
水晶薄片素板の振動領域とする部分に電極を形成する工程と、
該水晶薄片素板の電極を含む振動部分にマスキングを施す工程と、
該水晶薄片素板のマスキングされた部分の周辺に所望の厚さの、該振動部の周囲を囲う補強部を形成する酸化シリコンを蒸着する工程と、
該マスキングを該水晶薄片素板から剥離する工程と、
を有する水晶振動子の製造方法。 - フォトリソグラフィを用いて該水晶薄片素板の振動領域とする部分にマスキングを施す請求項1に記載の水晶振動子の製造方法。
- 電極が形成され振動部となる部分を有する水晶薄片素板上に、該振動部の周囲を囲むように酸化シリコンの蒸着層が堆積して形成されたことを特徴とする厚み滑り振動をする水晶振動子。
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JP2005158824A JP4599231B2 (ja) | 2005-05-31 | 2005-05-31 | 水晶振動子の製造方法、及びその水晶振動子 |
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JP2005158824A JP4599231B2 (ja) | 2005-05-31 | 2005-05-31 | 水晶振動子の製造方法、及びその水晶振動子 |
Publications (2)
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JP2006339749A JP2006339749A (ja) | 2006-12-14 |
JP4599231B2 true JP4599231B2 (ja) | 2010-12-15 |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100856293B1 (ko) | 2007-05-04 | 2008-09-03 | 삼성전기주식회사 | 수정 진동자 제조방법 |
KR100878410B1 (ko) | 2007-07-11 | 2009-01-13 | 삼성전기주식회사 | 수정 진동자 제조방법 |
WO2010143475A1 (ja) | 2009-06-09 | 2010-12-16 | 株式会社村田製作所 | 圧電デバイスの製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08213871A (ja) * | 1995-02-03 | 1996-08-20 | Sumitomo Electric Ind Ltd | 水晶振動子及びその製造方法 |
JP2003289236A (ja) * | 2002-03-28 | 2003-10-10 | Humo Laboratory Ltd | 水晶振動子およびその製造方法 |
JP2005295042A (ja) * | 2004-03-31 | 2005-10-20 | Kyocera Kinseki Corp | 高周波水晶振動板の製造方法 |
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- 2005-05-31 JP JP2005158824A patent/JP4599231B2/ja not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08213871A (ja) * | 1995-02-03 | 1996-08-20 | Sumitomo Electric Ind Ltd | 水晶振動子及びその製造方法 |
JP2003289236A (ja) * | 2002-03-28 | 2003-10-10 | Humo Laboratory Ltd | 水晶振動子およびその製造方法 |
JP2005295042A (ja) * | 2004-03-31 | 2005-10-20 | Kyocera Kinseki Corp | 高周波水晶振動板の製造方法 |
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