JP4599061B2 - 改良されたインペラー形状を有する真空ポンプ - Google Patents

改良されたインペラー形状を有する真空ポンプ Download PDF

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Publication number
JP4599061B2
JP4599061B2 JP2003576819A JP2003576819A JP4599061B2 JP 4599061 B2 JP4599061 B2 JP 4599061B2 JP 2003576819 A JP2003576819 A JP 2003576819A JP 2003576819 A JP2003576819 A JP 2003576819A JP 4599061 B2 JP4599061 B2 JP 4599061B2
Authority
JP
Japan
Prior art keywords
stage
impeller
pumping
disk
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003576819A
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English (en)
Japanese (ja)
Other versions
JP2006500497A5 (enExample
JP2006500497A (ja
Inventor
ハブラニアン，マーズベッド
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Inc
Original Assignee
Varian Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Inc filed Critical Varian Inc
Publication of JP2006500497A publication Critical patent/JP2006500497A/ja
Publication of JP2006500497A5 publication Critical patent/JP2006500497A5/ja
Application granted granted Critical
Publication of JP4599061B2 publication Critical patent/JP4599061B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP2003576819A 2002-03-12 2003-02-24 改良されたインペラー形状を有する真空ポンプ Expired - Fee Related JP4599061B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/099,380 US6607351B1 (en) 2002-03-12 2002-03-12 Vacuum pumps with improved impeller configurations
PCT/US2003/005621 WO2003078845A1 (en) 2002-03-12 2003-02-24 Vacuum pumps with improved impeller configurations

Publications (3)

Publication Number Publication Date
JP2006500497A JP2006500497A (ja) 2006-01-05
JP2006500497A5 JP2006500497A5 (enExample) 2006-03-02
JP4599061B2 true JP4599061B2 (ja) 2010-12-15

Family

ID=27733489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003576819A Expired - Fee Related JP4599061B2 (ja) 2002-03-12 2003-02-24 改良されたインペラー形状を有する真空ポンプ

Country Status (5)

Country Link
US (1) US6607351B1 (enExample)
EP (1) EP1485623B1 (enExample)
JP (1) JP4599061B2 (enExample)
DE (2) DE03711233T1 (enExample)
WO (1) WO2003078845A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7445422B2 (en) * 2005-05-12 2008-11-04 Varian, Inc. Hybrid turbomolecular vacuum pumps
WO2007104973A2 (en) 2006-03-14 2007-09-20 Goodman, Simon, John, Nye Rotor and nozzle assembly for a radial turbine and method of operation
US20080056886A1 (en) * 2006-08-31 2008-03-06 Varian, S.P.A. Vacuum pumps with improved pumping channel cross sections
US7628577B2 (en) 2006-08-31 2009-12-08 Varian, S.P.A. Vacuum pumps with improved pumping channel configurations
US8998586B2 (en) * 2009-08-24 2015-04-07 David Muhs Self priming pump assembly with a direct drive vacuum pump
DE102010019940B4 (de) * 2010-05-08 2021-09-23 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
US20120177511A1 (en) * 2011-01-10 2012-07-12 Peopleflo Manufacturing, Inc. Modular Pump Rotor Assemblies
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
WO2014067704A1 (de) * 2012-10-29 2014-05-08 Continental Automotive Gmbh Strömungsmaschine in einem kraftfahrzeug
US11519419B2 (en) 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3317868A1 (de) * 1983-05-17 1984-11-22 Leybold-Heraeus GmbH, 5000 Köln Reibungspumpe
JPS6341695A (ja) * 1986-08-07 1988-02-22 Seiko Seiki Co Ltd タ−ボ分子ポンプ
DE3919529C2 (de) 1988-07-13 1994-09-29 Osaka Vacuum Ltd Vakuumpumpe
US5238362A (en) 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
GB9125848D0 (en) * 1991-12-04 1992-02-05 Boc Group Plc Improvements in vacuum pumps
US5358373A (en) 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
US5456575A (en) * 1994-05-16 1995-10-10 Varian Associates, Inc. Non-centric improved pumping stage for turbomolecular pumps
US5449270A (en) * 1994-06-24 1995-09-12 Varian Associates, Inc. Tangential flow pumping channel for turbomolecular pumps
GB9609281D0 (en) 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
GB9810872D0 (en) 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
JP3788558B2 (ja) * 1999-03-23 2006-06-21 株式会社荏原製作所 ターボ分子ポンプ

Also Published As

Publication number Publication date
EP1485623B1 (en) 2010-04-28
EP1485623A1 (en) 2004-12-15
US6607351B1 (en) 2003-08-19
DE03711233T1 (de) 2005-05-04
JP2006500497A (ja) 2006-01-05
WO2003078845A1 (en) 2003-09-25
DE60332330D1 (de) 2010-06-10

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