DE03711233T1 - Vakuumpumpen mit verbesserten laufradkonfigurationen - Google Patents
Vakuumpumpen mit verbesserten laufradkonfigurationen Download PDFInfo
- Publication number
- DE03711233T1 DE03711233T1 DE03711233T DE03711233T DE03711233T1 DE 03711233 T1 DE03711233 T1 DE 03711233T1 DE 03711233 T DE03711233 T DE 03711233T DE 03711233 T DE03711233 T DE 03711233T DE 03711233 T1 DE03711233 T1 DE 03711233T1
- Authority
- DE
- Germany
- Prior art keywords
- vacuum pumps
- improved wheel
- wheel configurations
- configurations
- improved
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/099,380 US6607351B1 (en) | 2002-03-12 | 2002-03-12 | Vacuum pumps with improved impeller configurations |
PCT/US2003/005621 WO2003078845A1 (en) | 2002-03-12 | 2003-02-24 | Vacuum pumps with improved impeller configurations |
Publications (1)
Publication Number | Publication Date |
---|---|
DE03711233T1 true DE03711233T1 (de) | 2005-05-04 |
Family
ID=27733489
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE03711233T Pending DE03711233T1 (de) | 2002-03-12 | 2003-02-24 | Vakuumpumpen mit verbesserten laufradkonfigurationen |
DE60332330T Expired - Lifetime DE60332330D1 (de) | 2002-03-12 | 2003-02-24 | Vakuumpumpen mit verbesserten laufradkonfigurationen |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60332330T Expired - Lifetime DE60332330D1 (de) | 2002-03-12 | 2003-02-24 | Vakuumpumpen mit verbesserten laufradkonfigurationen |
Country Status (5)
Country | Link |
---|---|
US (1) | US6607351B1 (de) |
EP (1) | EP1485623B1 (de) |
JP (1) | JP4599061B2 (de) |
DE (2) | DE03711233T1 (de) |
WO (1) | WO2003078845A1 (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7445422B2 (en) * | 2005-05-12 | 2008-11-04 | Varian, Inc. | Hybrid turbomolecular vacuum pumps |
GB2450061B (en) | 2006-03-14 | 2011-12-21 | Cambridge Res And Dev Ltd | Rotor for a Radial-Flow Turbine and Method of Driving a Rotor |
US7628577B2 (en) | 2006-08-31 | 2009-12-08 | Varian, S.P.A. | Vacuum pumps with improved pumping channel configurations |
US20080056886A1 (en) * | 2006-08-31 | 2008-03-06 | Varian, S.P.A. | Vacuum pumps with improved pumping channel cross sections |
US8998586B2 (en) * | 2009-08-24 | 2015-04-07 | David Muhs | Self priming pump assembly with a direct drive vacuum pump |
DE102010019940B4 (de) * | 2010-05-08 | 2021-09-23 | Pfeiffer Vacuum Gmbh | Vakuumpumpstufe |
US20120177511A1 (en) * | 2011-01-10 | 2012-07-12 | Peopleflo Manufacturing, Inc. | Modular Pump Rotor Assemblies |
GB2498816A (en) | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
WO2014067704A1 (de) * | 2012-10-29 | 2014-05-08 | Continental Automotive Gmbh | Strömungsmaschine in einem kraftfahrzeug |
US11519419B2 (en) | 2020-04-15 | 2022-12-06 | Kin-Chung Ray Chiu | Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3317868A1 (de) * | 1983-05-17 | 1984-11-22 | Leybold-Heraeus GmbH, 5000 Köln | Reibungspumpe |
JPS6341695A (ja) * | 1986-08-07 | 1988-02-22 | Seiko Seiki Co Ltd | タ−ボ分子ポンプ |
DE3919529C2 (de) | 1988-07-13 | 1994-09-29 | Osaka Vacuum Ltd | Vakuumpumpe |
US5238362A (en) | 1990-03-09 | 1993-08-24 | Varian Associates, Inc. | Turbomolecular pump |
GB9125848D0 (en) * | 1991-12-04 | 1992-02-05 | Boc Group Plc | Improvements in vacuum pumps |
US5358373A (en) | 1992-04-29 | 1994-10-25 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
DE4314418A1 (de) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten |
US5456575A (en) * | 1994-05-16 | 1995-10-10 | Varian Associates, Inc. | Non-centric improved pumping stage for turbomolecular pumps |
US5449270A (en) * | 1994-06-24 | 1995-09-12 | Varian Associates, Inc. | Tangential flow pumping channel for turbomolecular pumps |
GB9609281D0 (en) | 1996-05-03 | 1996-07-10 | Boc Group Plc | Improved vacuum pumps |
GB9810872D0 (en) | 1998-05-20 | 1998-07-22 | Boc Group Plc | Improved vacuum pump |
JP3788558B2 (ja) * | 1999-03-23 | 2006-06-21 | 株式会社荏原製作所 | ターボ分子ポンプ |
-
2002
- 2002-03-12 US US10/099,380 patent/US6607351B1/en not_active Expired - Lifetime
-
2003
- 2003-02-24 DE DE03711233T patent/DE03711233T1/de active Pending
- 2003-02-24 WO PCT/US2003/005621 patent/WO2003078845A1/en active Application Filing
- 2003-02-24 EP EP03711233A patent/EP1485623B1/de not_active Expired - Fee Related
- 2003-02-24 JP JP2003576819A patent/JP4599061B2/ja not_active Expired - Fee Related
- 2003-02-24 DE DE60332330T patent/DE60332330D1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO2003078845A1 (en) | 2003-09-25 |
JP2006500497A (ja) | 2006-01-05 |
JP4599061B2 (ja) | 2010-12-15 |
DE60332330D1 (de) | 2010-06-10 |
US6607351B1 (en) | 2003-08-19 |
EP1485623A1 (de) | 2004-12-15 |
EP1485623B1 (de) | 2010-04-28 |
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