JP4597565B2 - 超小型構成部品の表面への汚染粒子付着を防止する方法、超小型構成部品保管装置及び薄層堆積装置 - Google Patents
超小型構成部品の表面への汚染粒子付着を防止する方法、超小型構成部品保管装置及び薄層堆積装置 Download PDFInfo
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- JP4597565B2 JP4597565B2 JP2004134234A JP2004134234A JP4597565B2 JP 4597565 B2 JP4597565 B2 JP 4597565B2 JP 2004134234 A JP2004134234 A JP 2004134234A JP 2004134234 A JP2004134234 A JP 2004134234A JP 4597565 B2 JP4597565 B2 JP 4597565B2
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/134—Plasma spraying
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Description
2 基板
5 汚染粒子ソース
7 汚染粒子
10 粒子コレクタ
16 マイクロコンポーネント
Claims (11)
- 真空チャンバ(3、15)内に置いた超小型構成部品(16)の自由表面に、少なくとも1つの汚染粒子源(5、11、13)からの第1有極粒子(7、17)が付着するのを防止する方法において、少なくともその一部が上記第1粒子(7、17)とは逆の極性を有する第2粒子のビーム(8、19)を前記汚染粒子源(5、11、13)と前記超小型構成部品(16)との間においてスパッタして前記第1粒子(7、17)を前記超小型構成部品(16)から粒子コレクタ(10、20)へと移動させることを備え、
前記第2粒子のビーム(8、19)として、陽イオンと中性化電子とからなるプラズマを用い、前記陽イオンと前記中性化電子との割合は、前記プラズマが全体として中性となるような割合となっている、
ことを特徴とする方法。 - 上記プラズマをネオン、ヘリウム、水素、アルゴンまたはキセノンの各ガスあるいはそれらの混合で形成する、上記請求項1に記載の方法。
- プラズマ発生用電圧を50V乃至200Vの範囲内とした、上記請求項1または2に記載の方法。
- 上記超小型構成部品が、少なくとも1つの薄層をその上に形成される基板(2)を含んでおり、また上記第1粒子(7)を、上記薄層を成すスパッタ物質の流れ(6)によって移動させ、前記第2粒子のビーム(8)を超小型構成部品の上流で上記スパッタ物質の流れ(6)を通過させる、上記請求項1乃至3のいずれか1つに記載の方法。
- 上記スパッタ物質の流れ(6)を、スパッタリング・プラズマ(13)をターゲット(11)に衝突させることによって形成する、上記請求項4に記載の方法。
- 上記第2粒子のビーム(8)を、上記スパッタリング・プラズマ(13)と前記スパッタ物質の流れ(6)とを同時通過させる、上記請求項5に記載の方法。
- 上記薄層をイオン・ビーム・スパッタリングによって形成する、上記請求項5または6に記載の方法。
- 上記薄層を陰極スパッタによって形成する、上記請求項5または6に記載の方法。
- 上記薄層をジュール効果熱蒸着によって形成する、上記請求項4に記載の方法。
- 少なくとも1つの超小型構成部品(16)をその中に置く真空チャンバを含む超小型構成部品保管装置において、超小型構成部品と平行にかつその近傍において第2粒子のビーム(19)を放射する粒子源(18)を有することを特徴とする、上記請求項1乃至3のいずれか1つに記載の方法を実施する保管装置。
- 少なくとも1つの基板(2)を含む超小型構成部品をその中に置く真空チャンバ(3)と、上記超小型構成部品の表面上に少なくとも1つの薄層を形成する物質の流れ(6)をスパッタする手段とから構成される薄層形成装置において、上記薄層形成物質の流れ(6)に含まれる第1粒子(7)を小型構成部品から移動させるように上記薄層形成物質の流れ(6)の方向に第2粒子の流れ(8)を放射する粒子源(9)を含むことを特徴とする、上記請求項4乃至9のいずれか1つに記載の方法を実施する薄層堆積装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0305169A FR2854169B1 (fr) | 2003-04-28 | 2003-04-28 | Procede destine a eviter le depot de particules contaminatrices sur la surface d'un micro-composant, dispositif de stockage d'un micro-composant et dispositif de depot de couches minces. |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004332115A JP2004332115A (ja) | 2004-11-25 |
JP4597565B2 true JP4597565B2 (ja) | 2010-12-15 |
Family
ID=32982313
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004134234A Expired - Fee Related JP4597565B2 (ja) | 2003-04-28 | 2004-04-28 | 超小型構成部品の表面への汚染粒子付着を防止する方法、超小型構成部品保管装置及び薄層堆積装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20050051421A1 (ja) |
EP (1) | EP1473381B1 (ja) |
JP (1) | JP4597565B2 (ja) |
AT (1) | ATE367457T1 (ja) |
DE (1) | DE602004007573T2 (ja) |
FR (1) | FR2854169B1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6972420B2 (en) * | 2004-04-28 | 2005-12-06 | Intel Corporation | Atomic beam to protect a reticle |
CN101681114B (zh) | 2007-06-12 | 2013-05-08 | 皇家飞利浦电子股份有限公司 | 光学设备和原位处理euv光学部件以增强降低的反射率的方法 |
US8084757B2 (en) * | 2008-01-17 | 2011-12-27 | Applied Materials, Inc. | Contamination prevention in extreme ultraviolet lithography |
KR20210091345A (ko) | 2018-12-10 | 2021-07-21 | 어플라이드 머티어리얼스, 인코포레이티드 | 극자외선 리소그래피 애플리케이션에서 포토마스크로부터의 부착 피처 제거 |
WO2020167744A1 (en) * | 2019-02-11 | 2020-08-20 | Applied Materials, Inc. | Method for particle removal from wafers through plasma modification in pulsed pvd |
KR102467650B1 (ko) * | 2021-11-16 | 2022-11-21 | 덕우세미텍 주식회사 | 진공 시스템에서 전자층을 이용한 입자 이동 차단 장치 및 리소그래피 장치 |
KR20230143794A (ko) * | 2022-04-06 | 2023-10-13 | 덕우세미텍 주식회사 | 진공 시스템에서 전자층을 이용한 리소그래피 장치 |
KR20230143795A (ko) * | 2022-04-06 | 2023-10-13 | 덕우세미텍 주식회사 | 진공 시스템에서 정전 트랩을 구비한 전자층을 이용한 입자 이동 차단 장치 및 리소그래피 장치 |
KR20230174667A (ko) * | 2022-06-21 | 2023-12-28 | 덕우세미텍 주식회사 | 열전달 방지기능을 구비한 전기적 포텐셜 배리어 모듈 및 이를 포함하는 리소그래피 장치 |
KR20230174666A (ko) * | 2022-06-21 | 2023-12-28 | 덕우세미텍 주식회사 | 전기적 포텐셜 배리어 모듈 및 이를 포함하는 리소그래피 장치 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0729832A (ja) * | 1993-07-15 | 1995-01-31 | Sony Corp | 成膜装置およびこれを用いた成膜方法 |
JP2002030443A (ja) * | 2000-07-11 | 2002-01-31 | Ebara Corp | 基板上への成膜方法及び装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4392453A (en) * | 1981-08-26 | 1983-07-12 | Varian Associates, Inc. | Molecular beam converters for vacuum coating systems |
US5366559A (en) * | 1993-05-27 | 1994-11-22 | Research Triangle Institute | Method for protecting a substrate surface from contamination using the photophoretic effect |
JPH07291790A (ja) * | 1994-04-15 | 1995-11-07 | Nippon Steel Corp | 分子線エピタキシー装置 |
JP3503787B2 (ja) * | 1996-01-22 | 2004-03-08 | 貢 英 | 薄膜の形成方法 |
US20040055871A1 (en) * | 2002-09-25 | 2004-03-25 | The Regents Of The University Of California | Use of ion beams for protecting substrates from particulate defect contamination in ultra-low-defect coating processes |
-
2003
- 2003-04-28 FR FR0305169A patent/FR2854169B1/fr not_active Expired - Fee Related
-
2004
- 2004-04-02 AT AT04354017T patent/ATE367457T1/de not_active IP Right Cessation
- 2004-04-02 DE DE602004007573T patent/DE602004007573T2/de not_active Expired - Lifetime
- 2004-04-02 EP EP04354017A patent/EP1473381B1/fr not_active Expired - Lifetime
- 2004-04-05 US US10/816,911 patent/US20050051421A1/en not_active Abandoned
- 2004-04-28 JP JP2004134234A patent/JP4597565B2/ja not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0729832A (ja) * | 1993-07-15 | 1995-01-31 | Sony Corp | 成膜装置およびこれを用いた成膜方法 |
JP2002030443A (ja) * | 2000-07-11 | 2002-01-31 | Ebara Corp | 基板上への成膜方法及び装置 |
Also Published As
Publication number | Publication date |
---|---|
FR2854169B1 (fr) | 2005-06-10 |
US20050051421A1 (en) | 2005-03-10 |
ATE367457T1 (de) | 2007-08-15 |
FR2854169A1 (fr) | 2004-10-29 |
DE602004007573T2 (de) | 2008-04-17 |
EP1473381B1 (fr) | 2007-07-18 |
DE602004007573D1 (de) | 2007-08-30 |
EP1473381A1 (fr) | 2004-11-03 |
JP2004332115A (ja) | 2004-11-25 |
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