JP4578705B2 - 不純物濃度測定方法 - Google Patents

不純物濃度測定方法 Download PDF

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Publication number
JP4578705B2
JP4578705B2 JP2001068069A JP2001068069A JP4578705B2 JP 4578705 B2 JP4578705 B2 JP 4578705B2 JP 2001068069 A JP2001068069 A JP 2001068069A JP 2001068069 A JP2001068069 A JP 2001068069A JP 4578705 B2 JP4578705 B2 JP 4578705B2
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probe
measurement
sample
current
impurity concentration
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Japanese (ja)
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JP2001324439A5 (enExample
JP2001324439A (ja
Inventor
秀暢 福留
尚男 中島
繁彦 長谷川
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Fujitsu Semiconductor Ltd
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Fujitsu Semiconductor Ltd
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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP2001068069A 2000-03-10 2001-03-12 不純物濃度測定方法 Expired - Fee Related JP4578705B2 (ja)

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JP2001068069A JP4578705B2 (ja) 2000-03-10 2001-03-12 不純物濃度測定方法

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JP2000-66698 2000-03-10
JP2000066698 2000-03-10
JP2001068069A JP4578705B2 (ja) 2000-03-10 2001-03-12 不純物濃度測定方法

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JP2010065501A Division JP2010160161A (ja) 2000-03-10 2010-03-23 不純物濃度測定方法、ｓｔｍ測定方法及びｓｔｓ測定方法

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JP2001324439A JP2001324439A (ja) 2001-11-22
JP2001324439A5 JP2001324439A5 (enExample) 2007-10-11
JP4578705B2 true JP4578705B2 (ja) 2010-11-10

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4514627B2 (ja) * 2005-03-04 2010-07-28 富士通セミコンダクター株式会社 濃度測定方法および濃度測定処理プログラム
JP4769568B2 (ja) 2005-12-19 2011-09-07 富士通セミコンダクター株式会社 半導体装置の製造方法、及び半導体装置の評価方法
DE102006011660A1 (de) * 2006-03-12 2007-09-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Ermittlung einer Dotierungsdichte in einer Halbleiterprobe
US7883909B2 (en) * 2006-12-28 2011-02-08 Texas Instruments Incorporated Method to measure ion beam angle
CN119224257B (zh) * 2024-12-02 2025-03-25 四川长青松科技有限公司 一种水中总磷总氮CODmn检测装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3014872B2 (ja) * 1992-10-28 2000-02-28 キヤノン株式会社 探針−試料間距離制御機構およびその使用装置
JPH10232240A (ja) * 1997-02-19 1998-09-02 Canon Inc 表面観察装置

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