JP4568170B2 - Method for producing cryogenic regenerator material and method for producing cryogenic regenerator - Google Patents

Method for producing cryogenic regenerator material and method for producing cryogenic regenerator Download PDF

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JP4568170B2
JP4568170B2 JP2005149521A JP2005149521A JP4568170B2 JP 4568170 B2 JP4568170 B2 JP 4568170B2 JP 2005149521 A JP2005149521 A JP 2005149521A JP 2005149521 A JP2005149521 A JP 2005149521A JP 4568170 B2 JP4568170 B2 JP 4568170B2
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magnetic regenerator
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正巳 岡村
尚行 蘓理
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Toshiba Corp
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本発明は、冷凍機等に使用される極低温用蓄冷材の製造方法、および極低温用蓄冷器の製造方法に関する。 The present invention relates to a method for producing a refrigerator or the like cryogenic for cold storage material that are used in, and a method of manufacturing a cryogenic regenerator.

近年、超電導技術の発展は著しく、その応用分野が拡大するに伴って、小型で高性能の冷凍機の開発が不可欠になってきている。このような冷凍機には、軽量・小型で、熱効率の高いことが要求されている。例えば、超電導MRI装置やクライオポンプ等においては、ギフォード・マクマホン方式(GM方式)やスターリング方式等の冷凍サイクルによる冷凍機が用いられている。また、磁気浮上列車にも高性能の冷凍機は必須とされており、さらに一部の単結晶引上げ装置等においても高性能の冷凍機が用いられている。   In recent years, the development of superconducting technology has been remarkable, and as the field of application has expanded, the development of small, high-performance refrigerators has become indispensable. Such refrigerators are required to be lightweight, small and have high thermal efficiency. For example, in superconducting MRI apparatuses, cryopumps, and the like, refrigerators using refrigeration cycles such as the Gifford-McMahon method (GM method) and the Stirling method are used. In addition, a high-performance refrigerator is indispensable for a magnetic levitation train, and a high-performance refrigerator is also used in some single crystal pulling devices and the like.

このような冷凍機においては、蓄冷材が充填された蓄冷器内を、圧縮されたHeガス等の作動媒質が一方向に流れて、その熱エネルギーを蓄冷材に供給し、ここで膨張した作動媒質が反対方向に流れ、蓄冷材から熱エネルギーを受けとるというサイクルを繰り返す。こうした過程で復熱効果が良好になるに伴って作動媒質サイクルの熱効率が向上し、一層低い温度を実現することが可能となる。   In such a refrigerator, a working medium such as compressed He gas flows in one direction in the regenerator filled with the regenerator material, supplies the heat energy to the regenerator material, and expands here. The medium flows in the opposite direction and repeats the cycle of receiving thermal energy from the cold storage material. As the recuperation effect is improved in such a process, the thermal efficiency of the working medium cycle is improved, and a lower temperature can be realized.

冷凍機に使用される蓄冷材としては、従来、CuやPb等が主に用いられてきた。しかし、このような蓄冷材は20K以下の極低温で比熱が著しく小さくなるため、上述した復熱効果が十分に機能せず、極低温を実現することが困難であった。そこで、最近ではより絶対零度に近い温度を実現するために、極低温域において大きな比熱を示す、Er3Ni、ErNi、ErNi2等のEr−Ni系金属間化合物(特許文献1参照)やErRhのようなRRh系金属間化合物(R:Sm,Gd,Tb,Dy,Ho,Er,Tm,Yb等)(特許文献2参照)等の磁性蓄冷材を用いることが検討されている。
特開平1-310269号公報 特開昭51-52378号
Conventionally, Cu, Pb, etc. have been mainly used as the regenerator material used in the refrigerator. However, since the specific heat of such a cold storage material becomes extremely small at an extremely low temperature of 20K or less, the above-described recuperation effect does not sufficiently function, and it has been difficult to realize an extremely low temperature. Therefore, recently, in order to realize a temperature close to absolute zero, Er—Ni-based intermetallic compounds such as Er 3 Ni, ErNi, ErNi 2 and the like that exhibit a large specific heat in a cryogenic temperature range (see Patent Document 1) and ErRh The use of magnetic regenerator materials such as RRh-based intermetallic compounds (R: Sm, Gd, Tb, Dy, Ho, Er, Tm, Yb, etc.) (see Patent Document 2) has been studied.
JP-A-1-310269 JP 51-52378

ところで、上述したような冷凍機の作動状態においては、Heガス等の作動媒質が高圧かつ高速で、その流れの向きが頻繁に変わるように、蓄冷器内に充填された蓄冷材間の空隙を通過する。このため、蓄冷材には機械的振動をはじめとする種々な力が加わる。また、冷凍機を例えば磁気浮上列車や人工衛星等に搭載する場合、蓄冷材には大きな加速度が作用する。   By the way, in the operating state of the refrigerator as described above, a gap between the regenerators filled in the regenerator is formed so that the working medium such as He gas is high-pressure and high-speed and the direction of the flow is frequently changed. pass. For this reason, various forces including mechanical vibration are applied to the cold storage material. In addition, when the refrigerator is mounted on, for example, a magnetic levitation train or an artificial satellite, a large acceleration acts on the cold storage material.

このように、蓄冷材には種々の力が作用するのに対して、上述したEr3NiやErRh等の金属間化合物からなる磁性蓄冷材は一般に脆性材料であるため、上記した運転中の機械的振動や加速度等が原因となって微粉化しやすいという問題を有していた。発生した微粉はガスシールを阻害する等して、蓄冷器の性能に悪影響を及ぼし、ひいては冷凍機の能力を低下させてしまう。 In this way, various forces act on the regenerator material, whereas the above-described magnetic regenerator material made of an intermetallic compound such as Er 3 Ni or ErRh is generally a brittle material. It has a problem that it tends to be pulverized due to mechanical vibration and acceleration. The generated fine powder has an adverse effect on the performance of the regenerator by, for example, hindering the gas seal, and consequently reduces the capacity of the refrigerator.

本発明は、機械的振動や加速度等に対する機械的特性に優れた極低温用蓄冷材を再現性よく作製することを可能にした極低温用蓄冷材の製造方法、さらに長期間にわたって優れた冷凍性能を発揮させることを可能にした極低温用蓄冷器の製造方法を提供することを目的としている。 The present invention relates to a method for producing a cryogenic regenerator material having excellent mechanical properties against mechanical vibration, acceleration, etc. with excellent reproducibility, and a refrigerating performance excellent over a long period of time. It aims at providing the manufacturing method of the regenerator for cryogenic temperature which enabled it to exhibit.

本発明の一態様に係る極低温用蓄冷材の製造方法は、磁性蓄冷材粒体を具備する極低温用蓄冷材で、
前記磁性蓄冷材粒体を構成する磁性蓄冷材粒子個々の投影像の周囲長をL、前記投影像の実面積をAとしたとき、前記磁性蓄冷材粒体はL2/4πAで表される形状因子Rが1.5を超える前記磁性蓄冷材粒子の比率が5%以下となるように形状分級され、かつ前記磁性蓄冷材粒体を構成する磁性蓄冷材粒子のうち、前記磁性蓄冷材粒体に最大加速度が300m/s2の単振動を1×106回加えたときに破壊する前記磁性蓄冷材粒子の比率が1重量%以下である極低温用蓄冷材の製造方法であって、下記(a)〜(d)の条件を満たす磁性蓄冷材粒体を作製する工程と、前記磁性蓄冷材粒体から一定量の磁性蓄冷材粒子を抽出し、これら抽出した磁性蓄冷材粒子の集団に最大加速度が300m/s2の単振動を1×106回加えたときに破壊する粒子の比率を測定する工程と、前記単振動を加えたときに破壊する粒子の比率が1重量%以下の前記磁性蓄冷材粒体を選別する工程と、前記磁性蓄冷材粒体を構成する磁性蓄冷材粒子個々の投影像の周囲長をL、前記投影像の実面積をAとしたとき、L2/4πAで表される形状因子Rが1.5を超える前記磁性蓄冷材粒子の比率が5%以下となるように、前記磁性蓄冷材粒体を形状分級する工程とを具備することを特徴としている。
(a)該磁性蓄冷材粒体を構成する磁性蓄冷材粒子の炭素含有量が0.1重量%以下である
(b)該磁性蓄冷材粒体を構成する磁性蓄冷材粒子の窒素含有量が0.3重量%以下である
(c)該磁性蓄冷材粒体を構成する磁性蓄冷材粒子の70重量%以上が0.01〜3.0mmの範囲の粒径を有する
(d)一般式:RM z (式中、RはY、La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、TmおよびYbから選ばれる少なくとも1種の希土類元素を、MはNi、Co、Cu、Ag、AlおよびRuから選ばれる少なくとも1種の金属元素を示し、zは0.001〜9.0の範囲の数を示す)または一般式:RRh(式中、RはY、La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、TmおよびYbから選ばれる少なくとも1種の希土類元素を示す)で表される希土類元素を含む金属間化合物からなる
The method for producing a cryogenic regenerator material according to one aspect of the present invention is a cryogenic regenerator material comprising magnetic regenerator particles,
The magnetic regenerator material particles are represented by L 2 / 4πA, where L is the perimeter of the projected image of each magnetic regenerator material particle constituting the magnetic regenerator material particle, and A is the actual area of the projected image. Of the magnetic regenerator particles that are shape-classified so that the ratio of the magnetic regenerator particles with a shape factor R exceeding 1.5 is 5% or less and that constitute the magnetic regenerator particles, the magnetic regenerator particles maximum acceleration is a the production process for extremely low temperature cold accumulating material ratio of the magnetic cold accumulating material particles is not more than 1% by weight to break when applying 1 × 10 6 times the simple harmonic oscillation of 300m / s 2, below ( a step of producing magnetic regenerator particles satisfying the conditions of a) to (d), extracting a certain amount of magnetic regenerator particles from the magnetic regenerator particles, and maximizing a population of these extracted magnetic regenerator particles a step of measuring the ratio of particles to break when the acceleration is added 1 × 10 6 times the simple harmonic oscillation of 300m / s 2, the The step of selecting the magnetic regenerator material particles having a particle ratio of 1% by weight or less that breaks when vibration is applied, and the perimeter of the projected images of the individual magnetic regenerator material particles constituting the magnetic regenerator material particles. L, where the actual area of the projected image is A, the magnetic regenerator material particles such that the ratio of the magnetic regenerator material particles having a shape factor R represented by L 2 / 4πA of more than 1.5 is 5% or less. And a step of classifying the body.
(A) The carbon content of the magnetic regenerator material particles constituting the magnetic regenerator material particles is 0.1% by weight or less.
(B) The nitrogen content of the magnetic regenerator material particles constituting the magnetic regenerator material granule is 0.3% by weight or less.
(C) 70% by weight or more of the magnetic regenerator material particles constituting the magnetic regenerator material particles have a particle size in the range of 0.01 to 3.0 mm.
(D) General formula: RM z (wherein R is at least one selected from Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm and Yb) R represents a rare earth element, M represents at least one metal element selected from Ni, Co, Cu, Ag, Al and Ru, and z represents a number in the range of 0.001 to 9.0, or a general formula: RRh (wherein R represents a rare earth element represented by Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, and Yb. Containing intermetallic compounds

本発明の一態様に係る極低温用蓄冷器の製造方法は、蓄冷容器と、前記蓄冷容器に充填された磁性蓄冷材粒体からなり、前記磁性蓄冷材粒体を構成する磁性蓄冷材粒子個々の投影像の周囲長をL、前記投影像の実面積をAとしたとき、前記磁性蓄冷材粒体はL2/4πAで表される形状因子Rが1.5を超える前記磁性蓄冷材粒子の比率が5%以下となるように形状分級され、かつ前記磁性蓄冷材粒体を構成する磁性蓄冷材粒子のうち、前記磁性蓄冷材粒体に最大加速度が300m/s2の単振動を1×106回加えたときに破壊する前記磁性蓄冷材粒子の比率が1重量%以下である極低温用蓄冷材とを具備する極低温用蓄冷器の製造方法であって、下記(a)〜(d)の条件を満たす磁性蓄冷材粒体を作製する工程と、前記磁性蓄冷材粒体から一定量の磁性蓄冷材粒子を抽出し、これら抽出した磁性蓄冷材粒子の集団に最大加速度が300m/s2の単振動を1×106回加えたときに破壊する粒子の比率を測定する工程と、前記単振動を加えたときに破壊する粒子の比率が1重量%以下の前記磁性蓄冷材粒体を選別する工程と、前記磁性蓄冷材粒体を構成する磁性蓄冷材粒子個々の投影像の周囲長をL、前記投影像の実面積をAとしたとき、L2/4πAで表される形状因子Rが1.5を超える前記磁性蓄冷材粒子の比率が5%以下となるように、前記磁性蓄冷材粒体を形状分級する工程と、選別され、かつ形状分級された前記単振動を加えたときに破壊する粒子の比率が1重量%以下で、かつ前記形状因子Rが1.5を超える磁性蓄冷材粒子の比率が5%以下である前記磁性蓄冷材粒体を、蓄冷容器に充填して蓄冷器を作製する工程とを具備することを特徴としている。
(a)該磁性蓄冷材粒体を構成する磁性蓄冷材粒子の炭素含有量が0.1重量%以下である
(b)該磁性蓄冷材粒体を構成する磁性蓄冷材粒子の窒素含有量が0.3重量%以下である
(c)該磁性蓄冷材粒体を構成する磁性蓄冷材粒子の70重量%以上が0.01〜3.0mmの範囲の粒径を有する
(d)一般式:RM z (式中、RはY、La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、TmおよびYbから選ばれる少なくとも1種の希土類元素を、MはNi、Co、Cu、Ag、AlおよびRuから選ばれる少なくとも1種の金属元素を示し、zは0.001〜9.0の範囲の数を示す)または一般式:RRh(式中、RはY、La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、TmおよびYbから選ばれる少なくとも1種の希土類元素を示す)で表される希土類元素を含む金属間化合物からなる
The method for manufacturing a cryogenic regenerator according to one aspect of the present invention includes a regenerator container and magnetic regenerator material particles filled in the regenerator container, and each of the magnetic regenerator material particles constituting the magnetic regenerator material particles. When the perimeter of the projected image is L and the actual area of the projected image is A, the magnetic regenerator material particles have a ratio of the magnetic regenerator material particles having a shape factor R expressed by L 2 / 4πA exceeding 1.5. Of the magnetic regenerator material particles that are classified so as to be 5% or less and constitute the magnetic regenerator material particles, a single vibration with a maximum acceleration of 300 m / s 2 is applied to the magnetic regenerator material particles 1 × 10 A method for producing a cryogenic regenerator comprising a cryogenic regenerator material in which the ratio of the magnetic regenerator particles that breaks when applied six times is 1% by weight or less, comprising the following (a) to (d a step of preparing a satisfying magnetic regenerator material granular material), a certain amount of the magnetic cold accumulating material particles from the magnetic regenerator material granules Extracting the steps of maximum acceleration the population of these extracted magnetic regenerator material particles measuring the ratio of particles destroyed when added 1 × 10 6 times the simple harmonic oscillation of 300 meters / s 2, the single vibration added A step of selecting the magnetic regenerator material particles having a particle ratio of 1% by weight or less, and a perimeter of the projected image of the magnetic regenerator material particles constituting the magnetic regenerator material particles, L, Assuming that the actual area of the projected image is A, the magnetic regenerator material particles are shaped so that the ratio of the magnetic regenerator material particles having a shape factor R represented by L 2 / 4πA exceeding 1.5 is 5% or less. The ratio of the particles to be destroyed when the simple vibrations that have been classified and shape classified are applied is 1% by weight or less, and the ratio of the magnetic regenerator material particles having the shape factor R exceeding 1.5 is 5 A step of filling a regenerator container with the magnetic regenerator material particles that are less than or equal to% to produce a regenerator. It is characterized by having.
(A) The carbon content of the magnetic regenerator material particles constituting the magnetic regenerator material particles is 0.1% by weight or less.
(B) The nitrogen content of the magnetic regenerator material particles constituting the magnetic regenerator material granule is 0.3% by weight or less.
(C) 70% by weight or more of the magnetic regenerator material particles constituting the magnetic regenerator material particles have a particle size in the range of 0.01 to 3.0 mm.
(D) General formula: RM z (wherein R is at least one selected from Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm and Yb) R represents a rare earth element, M represents at least one metal element selected from Ni, Co, Cu, Ag, Al and Ru, and z represents a number in the range of 0.001 to 9.0, or a general formula: RRh (wherein R represents a rare earth element represented by Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, and Yb. Containing intermetallic compounds

本発明によれば、機械的振動や加速度等に対して優れた機械的特性を再現性よく得ることができる。従って、このような極低温用蓄冷材を用いた極低温用蓄冷器、さらには冷凍機によれば優れた冷凍性能を再現性よく長期間にわたって維持することが可能となる。 According to the onset bright, it can be obtained with good reproducibility excellent mechanical properties with respect to mechanical vibration and acceleration, and the like. Therefore, very low-temperature regenerator using such very low temperature for the cold storage material, more can be maintained over a long period of time with good reproducibility excellent refrigeration performance according to the refrigerator.

以下、本発明を実施するための形態について説明する。本発明の一実施形態による極低温用蓄冷材は磁性蓄冷材粒体、すなわち磁性蓄冷材粒子の集合体(集団)からなるものである。本発明で用いられる磁性蓄冷材としては、例えば
一般式:RMz ……(1)
(式中、RはY、La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、TmおよびYbから選ばれる少なくとも1種の希土類元素を、MはNi、Co、Cu、Ag、AlおよびRuから選ばれる少なくとも1種の金属元素を示し、zは0.001〜9.0の範囲の数を示す。以下同じ)
で表される希土類元素を含む金属間化合物や、
一般式:RRh ……(2)
で表される希土類元素を含む金属間化合物が挙げられる。
Hereinafter, modes for carrying out the present invention will be described. The cryogenic regenerator material according to one embodiment of the present invention comprises a magnetic regenerator material particle, that is, an aggregate (group) of magnetic regenerator particles. Examples of the magnetic regenerator material used in the present invention include, for example, the general formula: RM z (1)
(Wherein R is at least one rare earth element selected from Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm and Yb, and M is Ni, Represents at least one metal element selected from Co, Cu, Ag, Al and Ru, and z represents a number in the range of 0.001 to 9.0 (the same applies hereinafter).
Intermetallic compounds containing rare earth elements represented by
General formula: RRh (2)
The intermetallic compound containing the rare earth element represented by these is mentioned.

上述したような磁性蓄冷材粒子は、その粒径が揃い、かつ形状が球状に近いほど、ガスの流れを円滑にすることができる。このようなことから、磁性蓄冷材粒体(全粒子)の70重量%以上を、粒径が0.01〜3.0mmの範囲の磁性蓄冷材粒子で構成することが好ましい。磁性蓄冷材粒子の粒径が0.01mm未満であると充填密度が高くなりすぎ、ヘリウム等の作動媒質の圧力損失が増大するおそれが高くなる。一方、粒径が3.0mmを超えると、磁性蓄冷材粒子と作動媒質間の伝熱面積が小さくなり、熱伝達効率が低下する。よって、このような粒子が磁性蓄冷材粒体の30重量%を超えると、蓄冷性能の低下等を招くおそれがある。より好ましい粒径は0.05〜2.0mmの範囲であり、さらに好ましくは0.1〜0.5mmの範囲である。粒径が0.01〜3.0mmの範囲の粒子の磁性蓄冷材粒体中における比率は80重量%以上とすることがより好ましく、さらに好ましくは90重量%以上である。   The magnetic regenerator material particles as described above can make the gas flow smoother as their particle diameters become uniform and the shape is closer to a spherical shape. Therefore, it is preferable that 70% by weight or more of the magnetic regenerator material particles (total particles) is composed of magnetic regenerator particles having a particle size in the range of 0.01 to 3.0 mm. When the particle diameter of the magnetic regenerator material particles is less than 0.01 mm, the packing density becomes too high, and the risk of increasing the pressure loss of a working medium such as helium increases. On the other hand, when the particle diameter exceeds 3.0 mm, the heat transfer area between the magnetic regenerator material particles and the working medium is reduced, and the heat transfer efficiency is lowered. Therefore, when such particles exceed 30% by weight of the magnetic regenerator material particles, there is a risk of causing a decrease in regenerator performance. A more preferable particle diameter is in the range of 0.05 to 2.0 mm, and further preferably in the range of 0.1 to 0.5 mm. The ratio of particles having a particle size in the range of 0.01 to 3.0 mm in the magnetic regenerator material granule is more preferably 80% by weight or more, and still more preferably 90% by weight or more.

本発明の極低温用蓄冷材は、上述したような磁性蓄冷材粒子の集団に対して最大加速度が300m/s2の単振動を1×106回加えたときに、破壊する磁性蓄冷材粒子の比率が1重量%以下である磁性蓄冷材粒体からなるものである。本発明は、磁性蓄冷材粒子個々の機械的強度が不純物である窒素や炭素の量、凝固過程における冷却速度や金属組織、形状等と複雑に関係し、かつ集団とした場合に複雑な応力集中が生じる磁性蓄冷材粒子の集団としての機械的強度に着目したものである。 The cryogenic regenerator material of the present invention is a magnetic regenerator particle that breaks when a single vibration having a maximum acceleration of 300 m / s 2 is applied to the group of magnetic regenerator particles as described above 1 × 10 6 times. The magnetic regenerator material particles having a ratio of 1% by weight or less. In the present invention, the magnetic strength of each magnetic regenerator material particle is intricately related to the amount of nitrogen and carbon as impurities, the cooling rate in the solidification process, the metal structure, the shape, etc. Focusing on the mechanical strength as a group of magnetic regenerator material particles in which is generated.

このような磁性蓄冷材粒子の集団、すなわち磁性蓄冷材粒体に最大加速度が300m/s2の単振動を1×106回加えたときに破壊する粒子の比率を測定することによって、磁性蓄冷材粒体の機械的強度に対する信頼性を評価することが可能となる。本発明の一実施形態による極低温用蓄冷材の製造方法は、磁性蓄冷材粒体から一定量の磁性蓄冷材粒子を抽出し、これら抽出した磁性蓄冷材粒子の集団に最大加速度が300m/s2の単振動を1×106回加えたときに破壊する粒子の比率を測定し、この際に破壊する粒子の比率が1重量%以下の磁性蓄冷材粒体を選別する工程を具備する。 By measuring the ratio of such magnetic regenerator particles, that is, the percentage of particles that break when a single vibration with a maximum acceleration of 300 m / s 2 is applied to the magnetic regenerator particles 1 × 10 6 times, It becomes possible to evaluate the reliability with respect to the mechanical strength of the particles. A method for producing a cryogenic regenerator material according to an embodiment of the present invention extracts a certain amount of magnetic regenerator particles from magnetic regenerator particles, and a maximum acceleration of 300 m / s in the group of these extracted magnetic regenerator particles. A step of measuring a ratio of particles to be broken when the single vibration of 2 is applied 1 × 10 6 times, and selecting a magnetic regenerator material particle having a ratio of the particles to be broken at this time of 1% by weight or less.

すなわち、磁性蓄冷材粒体に最大加速度が300m/s2の単振動を1×106回加えたときに破壊する粒子の比率が1重量%以下であると、磁性蓄冷材粒体の製造ロット、さらには製造条件等が異なっていたとしても、冷凍機運転中の機械的振動や冷凍機が搭載されたシステムの運動による加速度等が原因で微粉化する磁性蓄冷材粒子がほとんどない。従って、このような機械的特性を有する磁性蓄冷材粒体を用いることによって、冷凍機におけるガスシールの阻害等の発生を防止することができる。磁性蓄冷材粒体に最大加速度が300m/s2の単振動を1×106回加えたときに破壊する磁性蓄冷材粒子の比率は、0.5重量%以下であることがより好ましく、さらに好ましくは0.1重量%以下である。 In other words, if the ratio of the particles that break when 1 × 10 6 times a single vibration with a maximum acceleration of 300 m / s 2 is applied to the magnetic regenerator material granules is 1% by weight or less, the magnetic regenerator material production lot Furthermore, even if the production conditions are different, there are almost no magnetic regenerator particles that are pulverized due to mechanical vibration during operation of the refrigerator or acceleration due to the movement of the system in which the refrigerator is mounted. Therefore, by using magnetic regenerator material particles having such mechanical characteristics, it is possible to prevent the occurrence of gas seal obstruction or the like in the refrigerator. The ratio of magnetic regenerator particles that breaks when a single vibration with a maximum acceleration of 300 m / s 2 is applied 1 × 10 6 times to the magnetic regenerator material particles is more preferably 0.5% by weight or less, and still more preferably 0.1 wt% or less.

ここで、上記振動試験(加速度試験)における最大加速度が300m/s2未満であると、ほとんどの磁性蓄冷材粒子が破壊しないため、信頼性を評価することができない。また、最大加速度が300m/s2の単振動を磁性蓄冷材粒体に加える回数が1×106回未満であると、冷凍機が搭載されたシステムの運動により磁性蓄冷材粒体に作用する加速度等に対して、十分実用的な信頼性を評価することができない。本発明においては上記した振動試験の条件が重要であり、単振動の最大加速度および振動回数を上記した値とすることによって、はじめて磁性蓄冷材粒体の実使用条件に対する信頼性を評価することが可能となる。磁性蓄冷材粒体の信頼性評価は、最大加速度が400m/s2の単振動を1×106回加えたときに、あるいは最大加速度が300m/s2の単振動を1×107回加えたときに、破壊する磁性蓄冷材粒子の比率が1重量%以下であることがより好ましい。 Here, when the maximum acceleration in the vibration test (acceleration test) is less than 300 m / s 2 , most of the magnetic regenerator material particles are not broken, and thus the reliability cannot be evaluated. In addition, if the number of times that a single vibration with a maximum acceleration of 300 m / s 2 is applied to the magnetic regenerator material particles is less than 1 × 10 6 times, it acts on the magnetic regenerator material particles due to the movement of the system in which the refrigerator is mounted. Sufficient practical reliability cannot be evaluated for acceleration and the like. In the present invention, the conditions of the vibration test described above are important, and by setting the maximum acceleration of single vibration and the number of vibrations to the above-described values, it is possible to evaluate the reliability of the magnetic regenerator particles for actual use conditions for the first time. It becomes possible. The reliability evaluation of magnetic regenerator particles is performed when a single vibration with a maximum acceleration of 400 m / s 2 is applied 1 × 10 6 times, or a single vibration with a maximum acceleration of 300 m / s 2 is applied 1 × 10 7 times. It is more preferable that the ratio of the magnetic regenerator particles to be destroyed is 1% by weight or less.

上述した磁性蓄冷材粒体の信頼性評価試験(振動試験)は、以下のようにして実施する。まず、粒径等を規定範囲とした磁性蓄冷材粒体から製造ロット毎に無作為に一定量の磁性蓄冷材粒子を抽出する。次いで、抽出した磁性蓄冷材粒体を図1に示すような振動試験用の円筒容器1に充填し、最大加速度が300m/s2の単振動を1×106回加える。振動試験用の円筒容器1の材質にはアルマイト等が用いられる。振動試験後に、破壊した磁性蓄冷材粒子を篩分けや形状分級等により選別し、その重量を測定することによって、磁性蓄冷材粒子の集団としての信頼性を評価する。 The reliability evaluation test (vibration test) of the magnetic regenerator material particles described above is performed as follows. First, a certain amount of magnetic regenerator particles are randomly extracted for each production lot from magnetic regenerator particles having a particle size and the like within a specified range. Next, the extracted magnetic regenerator material particles are filled into a cylindrical container 1 for vibration test as shown in FIG. 1, and a single vibration having a maximum acceleration of 300 m / s 2 is applied 1 × 10 6 times. Anodized or the like is used as the material of the cylindrical container 1 for vibration test. After the vibration test, the broken magnetic regenerator material particles are selected by sieving, shape classification, etc., and the weight thereof is measured to evaluate the reliability of the magnetic regenerator material particles as a group.

ここで、振動試験用容器中に磁性蓄冷材粒体を充填する密度(充填率)は、磁性蓄冷材粒子の形状および粒径分布等に複雑に依存するが、充填率が低すぎると試験用容器内に磁性蓄冷材粒子が動き回ることができる自由空間が存在し、磁性蓄冷材粒体の耐振動特性を正確に評価することができない。一方、充填率を高く設定しすぎると、試験用容器中に磁性蓄冷材粒子を充填する際に押込むことが必要となり、そのときの圧縮力で破壊する可能性が高くなる。従って、充填率は広く変化させて試験する必要ある。すなわち、本発明において、振動試験により破壊した磁性蓄冷材粒子の比率は、1つのロットに対して充填率を種々変化させて試験を行い、そのうちで破壊した磁性蓄冷材粒子の比率が最低の値を測定値として採用するものとする。   Here, the density (filling rate) at which the vibration test container is filled with the magnetic regenerator material particles depends complicatedly on the shape and particle size distribution of the magnetic regenerator material particles. A free space in which the magnetic regenerator material particles can move around exists in the container, and the vibration resistance characteristics of the magnetic regenerator material particles cannot be accurately evaluated. On the other hand, if the filling rate is set too high, it is necessary to push the magnetic cold storage material particles into the test container, and the possibility of destruction by the compressive force at that time increases. Therefore, it is necessary to test by changing the filling rate widely. That is, in the present invention, the ratio of the magnetic regenerator material particles broken by the vibration test was tested by varying the filling rate for one lot, and among them, the ratio of the broken magnetic regenerator particles was the lowest value. Shall be adopted as the measured value.

本発明の極低温用蓄冷材は、上述した信頼性評価試験(振動試験)を満足するものであれば、その組成や形状等に特に限定されるものではないが、機械的振動や加速度等による粒子破壊の一要因となる粒子中の不純物濃度および形状に関して、以下の条件を満足させることが望ましい。
(a) 粒子形状に加工した状態で、磁性蓄冷材粒子中の不純物としての窒素量を0.3重量%以下とする。
(b) 粒子形状に加工した状態で、磁性蓄冷材粒子中の不純物としての炭素量を0.1重量%以下とする。
(c) 磁性蓄冷材粒体を構成する粒子個々の投影像の周囲長をL、投影像の実面積をAとしたとき、L2/4πAで表される形状因子Rが1.5を超える粒子の存在比率を5%以下とする。
The cryogenic regenerator material of the present invention is not particularly limited to its composition or shape as long as it satisfies the reliability evaluation test (vibration test) described above, but it depends on mechanical vibration, acceleration, etc. It is desirable that the following conditions are satisfied with respect to the impurity concentration and shape in the particles that cause particle destruction.
(A) In the state processed into the particle shape, the amount of nitrogen as an impurity in the magnetic regenerator material particles is set to 0.3% by weight or less.
(B) The amount of carbon as an impurity in the magnetic regenerator material particles is 0.1% by weight or less in a state of being processed into a particle shape.
(C) When the perimeter of the projected image of each particle constituting the magnetic regenerator material granule is L and the actual area of the projected image is A, the shape factor R represented by L 2 / 4πA is greater than 1.5. The abundance ratio is 5% or less.

すなわち、磁性蓄冷材粒子中の不純物としての窒素および炭素は、前述した(1)式や(2)式で表される磁性蓄冷材の結晶粒界に希土類窒化物や希土類炭化物を析出させ、磁性蓄冷材粒子の機械的強度の低下要因となる。言い換えると、これら窒素および炭素の量を低減することによって、良好な機械的強度が安定して得られ、再現性よく信頼性評価試験(振動試験)を満足させることが可能となる。このような理由から、磁性蓄冷材粒子中の不純物としての窒素量は0.3重量%以下とすることが好ましく、また炭素量は0.1重量%以下とすることが好ましい。不純物としての窒素量は0.1重量%以下とすることがより好ましく、さらに好ましくは0.05重量%以下である。不純物としての炭素量は0.05重量%以下とすることがより好ましく、さらに好ましくは0.02重量%以下である。   That is, nitrogen and carbon as impurities in the magnetic regenerator material particles cause rare earth nitrides and rare earth carbides to precipitate at the crystal grain boundaries of the magnetic regenerator material represented by the above-described formulas (1) and (2). It becomes a factor of lowering the mechanical strength of the regenerator particles. In other words, by reducing the amounts of nitrogen and carbon, good mechanical strength can be stably obtained, and the reliability evaluation test (vibration test) can be satisfied with good reproducibility. For these reasons, the amount of nitrogen as an impurity in the magnetic regenerator material particles is preferably 0.3% by weight or less, and the carbon amount is preferably 0.1% by weight or less. The amount of nitrogen as an impurity is more preferably 0.1% by weight or less, and still more preferably 0.05% by weight or less. The amount of carbon as an impurity is more preferably 0.05% by weight or less, and further preferably 0.02% by weight or less.

また、磁性蓄冷材粒子の形状は、前述したように球状が好ましく、その球状度が高くかつ表面が滑らかであるほど、ガスの流れを円滑にすることができると共に、磁性蓄冷材粒体に機械的振動等が加わったときの極度の応力集中を抑制することができる。これによって、磁性蓄冷材粒子の集団としての機械的強度を高めることができる。すなわち、粒子表面に突起物が存在する等の複雑な表面形状を有する粒子ほど、磁性蓄冷材粒子が力を受けたときに応力集中が生じやすく、磁性蓄冷材粒体の機械的強度に悪影響を及ぼす。   In addition, the shape of the magnetic regenerator material particles is preferably spherical as described above, and the higher the sphericity and the smoother the surface, the smoother the gas flow, and the magnetic regenerator material particles can be machined. It is possible to suppress extreme stress concentration when mechanical vibration or the like is applied. Thereby, the mechanical strength as a group of magnetic cold storage material particles can be increased. That is, particles having a complicated surface shape such as the presence of protrusions on the particle surface tend to cause stress concentration when the magnetic regenerator material particles are subjected to force, which adversely affects the mechanical strength of the magnetic regenerator material particles. Effect.

そこで、磁性蓄冷材粒体を構成する粒子個々の投影像の周囲長をL、投影像の実面積をAとしたとき、L2/4πAで表される形状因子Rが1.5を超える粒子の存在比率を5%以下とすることが好ましい。すなわち、形状因子Rが1.5を超える磁性蓄冷材粒子の比率が5%以下となるように、磁性蓄冷材粒体を形状分級することが好ましい。なお、形状因子Rは、例えば磁性蓄冷材粒体の製造ロット毎に無作為に100個以上の粒子を抽出し、これらを画像処理して評価することが好ましい。粒子の抽出数が少なすぎると、磁性蓄冷材粒体全体の形状因子Rを正確に評価することができないおそれがある。 Therefore, the presence of particles having a shape factor R expressed by L 2 / 4πA exceeding 1.5, where L is the perimeter of the projected image of each particle constituting the magnetic regenerator grain and A is the actual area of the projected image. The ratio is preferably 5% or less. That is, it is preferable to classify the magnetic regenerator particles so that the ratio of magnetic regenerator particles having a shape factor R exceeding 1.5 is 5% or less. The shape factor R is preferably evaluated by, for example, randomly extracting 100 or more particles for each production lot of magnetic regenerator material granules, and processing these images. If the number of extracted particles is too small, the shape factor R of the entire magnetic regenerator material granule may not be accurately evaluated.

上記した形状因子Rは、全体形状としては球状度が高い粒子であっても、表面に突起物等が存在していると大きな値(部分異形性大)となる。一方、表面が比較的滑らかであれば、多少球状度が低い粒子であっても形状因子Rは低い値となる。このように、形状因子Rは表面に突起物等が存在する粒子ほど大きい値となる傾向を有している。すなわち、形状因子Rが小さいということは、粒子表面が比較的滑らかである(部分異形性小)ことを意味し、粒子の部分形状の評価に有効なパラメータである。従って、形状因子Rが1.5を超える粒子の存在比率を5%以下とすることによって、磁性蓄冷材粒体の機械的強度の向上を図ることが可能となる。形状因子Rが1.5を超える粒子の存在比率は2%以下であることがより好ましく、さらに好ましくは1%以下である。さらには、形状因子Rが1.3を超える粒子の存在比率が15%以下であることが好ましい。形状因子Rが1.3を超える粒子の存在比率は10%以下であることがより好ましく、さらに好ましくは5%以下である。   The above-described shape factor R takes a large value (large partial deformity) even when particles having a high sphericity as a whole shape are present on the surface. On the other hand, if the surface is relatively smooth, the shape factor R has a low value even for particles having a somewhat low sphericity. As described above, the shape factor R tends to have a larger value as particles having protrusions on the surface thereof. That is, the small shape factor R means that the particle surface is relatively smooth (small partial deformity), and is an effective parameter for evaluating the partial shape of the particle. Therefore, the mechanical strength of the magnetic regenerator material particles can be improved by setting the ratio of particles having a shape factor R exceeding 1.5 to 5% or less. The abundance ratio of particles having a shape factor R exceeding 1.5 is more preferably 2% or less, and further preferably 1% or less. Further, the abundance ratio of particles having a shape factor R exceeding 1.3 is preferably 15% or less. The abundance ratio of particles having a shape factor R exceeding 1.3 is more preferably 10% or less, and further preferably 5% or less.

上述したような磁性蓄冷材粒体の製造方法は、特に限定されるものではなく、種々の製造方法を適用することができる。例えば、所定組成の溶湯を、遠心噴霧法、ガスアトマイズ法、回転電極法等により急冷凝固させて粒体化する方法を適用することができる。この際、高純度の原料を使用したり、また急冷凝固する際の雰囲気中の不純物ガス量を低減する等によって、磁性蓄冷材粒子中の窒素量および炭素量を低減することができる。また、例えば製造条件の最適化や傾斜振動法等による形状分級を行うことによって、形状因子Rが1.5を超える粒子の存在比率が5%以下の磁性蓄冷材粒体を得ることができる。   The manufacturing method of the magnetic regenerator material granule as described above is not particularly limited, and various manufacturing methods can be applied. For example, it is possible to apply a method in which a molten metal having a predetermined composition is rapidly cooled and solidified by a centrifugal spraying method, a gas atomizing method, a rotating electrode method, or the like. At this time, the amount of nitrogen and the amount of carbon in the magnetic regenerator particles can be reduced by using high-purity raw materials or reducing the amount of impurity gas in the atmosphere when rapidly solidifying. Further, for example, by performing shape classification by optimization of manufacturing conditions, a gradient vibration method, or the like, a magnetic regenerator material granule having an abundance ratio of particles having a shape factor R exceeding 1.5 can be obtained at 5% or less.

この実施形態の極低温用蓄冷材は、蓄冷容器に充填されて極低温用蓄冷器を構成するものであり、さらに極低温用蓄冷器は冷凍機に使用される。すなわち冷凍機は、蓄冷容器に充填する極低温用蓄冷材として、上述した機械的特性を有する磁性蓄冷材粒体、すなわち最大加速度が300m/s2の単振動を1×106回加えたときに破壊する粒子の比率が1重量%以下である磁性蓄冷材粒体を用いた蓄冷器を具備するものである。 The cryogenic regenerator material of this embodiment is filled in a regenerator container to constitute a cryogenic regenerator, and the cryogenic regenerator is used in a refrigerator. In other words, the refrigerator is a cryogenic regenerator material filled in a regenerator container, when the magnetic regenerator material granule having the above-mentioned mechanical characteristics, that is, when a single vibration with a maximum acceleration of 300 m / s 2 is applied 1 × 10 6 times A regenerator using a magnetic regenerator material granule in which the ratio of particles to be destroyed is 1% by weight or less is provided.

上述した冷凍機に用いられる極低温用蓄冷材は、前述したように冷凍機運転中の機械的振動や冷凍機が搭載されたシステムの運動による加速度等が原因で微粉化する磁性蓄冷材粒子がほとんどないため、冷凍機のガスシールの阻害等を招くことがない。従って、冷凍性能を長時間安定に維持することが可能となる。そして、MRI装置、クライオポンプ、磁気浮上列車、および磁界印加式単結晶引上げ装置は、いずれも冷凍機性能が各装置の性能を左右することから、上述したような冷凍機を用いたMRI装置、クライオポンプ、磁気浮上列車、および磁界印加式単結晶引上げ装置は、いずれも長期間にわたって優れた性能を発揮させることができる。   As described above, the cryogenic regenerator material used in the refrigerator includes magnetic regenerator particles that are pulverized due to mechanical vibration during operation of the refrigerator and acceleration due to the movement of the system in which the refrigerator is mounted, as described above. Since there is almost no obstruction of the gas seal of the refrigerator or the like is not caused. Accordingly, it is possible to maintain the refrigeration performance stably for a long time. The MRI apparatus, the cryopump, the magnetic levitation train, and the magnetic field application type single crystal pulling apparatus all have an MRI apparatus that uses a refrigerator as described above because the refrigerator performance affects the performance of each apparatus. The cryopump, the magnetic levitation train, and the magnetic field application type single crystal pulling device can all exhibit excellent performance over a long period of time.

次に、本発明の具体的な実施例およびその評価結果について述べる。   Next, specific examples of the present invention and evaluation results thereof will be described.

実施例1、比較例1
まず、高周波溶解によりEr3Ni母合金を作製した。このEr3Ni母合金を約1263Kで溶融し、この溶湯をAr雰囲気中(圧力=約80kPa)で回転円盤上に滴下して急冷凝固させた。得られた粒体を形状分級ならびに篩分し、粒径180〜250μmの球状粒子を1kg選別した。この工程を繰り返し行って、10ロットの球状Er3Ni粒体を得た。
Example 1 and Comparative Example 1
First, an Er 3 Ni mother alloy was prepared by high frequency melting. This Er3Ni master alloy was melted at about 1263 K, and this molten metal was dropped on a rotating disk in an Ar atmosphere (pressure = about 80 kPa) and rapidly solidified. The obtained granules were classified and sieved, and 1 kg of spherical particles having a particle size of 180 to 250 μm were selected. This process was repeated to obtain 10 lots of spherical Er 3 Ni particles.

次に、上記10ロットの各球状Er3Ni粒体から無作為に抽出したEr3Ni粒子を、それぞれ図1に示した振動試験用容器1(D=15mm,h=14mm)中に充填し、振動試験機にて最大加速度が300m/s2の単振動を1×106回加えた。試験後の各粒体を適宜形状分級ならびに篩分けし、破壊した球状Er3Ni粒子の比率を求めた。各ロット毎の破壊した粒子の比率(破壊率)を表1に示す。表1から明らかなように、試料No1〜No8の各球状Er3Ni粒体が実施例1に相当し、試料No9〜No10の各球状Er3Ni粒体は比較例1に相当する。 Next, the 10 Er 3 Ni particles extracted at random from the spherical Er 3 Ni particles of lots, vibration test container shown in FIGS 1 1 (D = 15mm, h = 14mm) was packed into a A single vibration with a maximum acceleration of 300 m / s 2 was applied 1 × 10 6 times using a vibration tester. Each granule after the test was appropriately classified and sieved, and the ratio of the broken spherical Er 3 Ni particles was determined. Table 1 shows the ratio of broken particles (breakage rate) for each lot. As apparent from Table 1, the spherical Er 3 Ni particles of samples No 1 to No 8 correspond to Example 1, and the spherical Er 3 Ni particles of Samples No 9 to No 10 correspond to Comparative Example 1.

ここで、Er3Ni粒子の振動試験用容器1中への充填率は55〜66%の範囲で変化させ、最も低い破壊率をそのロットの破壊率とした。図2は、試料No1の球状Er3Ni粒体の振動試験用容器への充填率と振動試験による破壊率との関係を示している。図2では充填率63.7%で破壊率が0(検出限界以下)となったため、この値がこのロットの破壊率となる。なお、それ以上の充填率では試験を行っていない。 Here, the filling rate of Er 3 Ni particles into the vibration test container 1 was changed in the range of 55 to 66%, and the lowest breaking rate was defined as the breaking rate of the lot. FIG. 2 shows the relationship between the filling rate of the spherical Er 3 Ni particles of sample No1 into the vibration test container and the fracture rate by the vibration test. In FIG. 2, since the destruction rate is 0 (below the detection limit) at a filling rate of 63.7%, this value is the destruction rate of this lot. In addition, the test was not performed at a filling rate higher than that.

上述したEr3Niからなる各ロットの磁性蓄冷材球状粒体を、蓄冷容器に充填率63.5〜63.8%で充填してそれぞれ蓄冷器を作製し、これらの蓄冷器を図3に構造を示す2段式のGM冷凍機に、2段目蓄冷器(第2の蓄冷器15)としてそれぞれ組込み、冷凍試験を行った。その結果を表1に併せて示す。 Each of the lots of magnetic regenerator material spherical particles made of Er 3 Ni described above is filled in a regenerator at a filling rate of 63.5 to 63.8% to produce regenerators, and these regenerators are shown in FIG. A refrigeration test was conducted by incorporating each of the two-stage regenerators (second regenerator 15) into a stage-type GM refrigerator. The results are also shown in Table 1.

Figure 0004568170
Figure 0004568170

表1から明らかなように、最大加速度が300m/s2の単振動を1×106回加えたときに破壊する粒子の比率が1重量%以下である磁性蓄冷材粒体を用いた冷凍機は、いずれも優れた冷凍能力を長期間にわたって維持できることが分かる。 As is clear from Table 1, a refrigerator using a magnetic regenerator granule that has a particle ratio of 1% by weight or less when a single vibration with a maximum acceleration of 300 m / s 2 is applied 1 × 10 6 times. It can be seen that both can maintain excellent refrigeration capacity over a long period of time.

なお、図3に示す2段式のGM冷凍機10は、大径の第1のシリンダ11と、この第1のシリンダ11と同軸的に接続された小径の第2のシリンダ12とが設置された真空容器13を有している。第1のシリンダ11には第1の蓄冷器14が往復動自在に配置されており、第2のシリンダ12には第2の蓄冷器15が往復動自在に配置されている。第1のシリンダ11と第1の蓄冷器14との間、および第2のシリンダ12と第2の蓄冷器15との間には、それぞれシールリング16、17が配置されている。   The two-stage GM refrigerator 10 shown in FIG. 3 includes a large-diameter first cylinder 11 and a small-diameter second cylinder 12 that is coaxially connected to the first cylinder 11. A vacuum vessel 13 is provided. A first regenerator 14 is disposed in the first cylinder 11 so as to be able to reciprocate, and a second regenerator 15 is disposed in the second cylinder 12 so as to be capable of reciprocating. Seal rings 16 and 17 are disposed between the first cylinder 11 and the first regenerator 14, and between the second cylinder 12 and the second regenerator 15, respectively.

第1の蓄冷器14には、Cuメッシュ等の第1の蓄冷材18が収容されている。第2の蓄冷器15は、本発明の極低温用蓄冷材が第2の蓄冷材19として収容されている。第1の蓄冷器14および第2の蓄冷器15は、第1の蓄冷材18や極低温用蓄冷材19の間隙等に設けられたHeガス等の作動媒質の通路をそれぞれ有している。第1の蓄冷器14と第2の蓄冷器15との間には、第1の膨張室20が設けられている。また、第2の蓄冷器15と第2のシリンダ12の先端壁との間には、第2の膨張室21が設けられている。第1の膨張室20の底部に第1の冷却ステージ22が、また第2の膨張室21の底部に第1の冷却ステージ22より低温の第2の冷却ステージ23が形成されている。   The first regenerator 14 accommodates a first regenerator material 18 such as Cu mesh. In the second regenerator 15, the cryogenic regenerator material of the present invention is accommodated as the second regenerator material 19. The first regenerator 14 and the second regenerator 15 each have a passage for a working medium such as He gas provided in the gap between the first regenerator 18 and the cryogenic regenerator 19. A first expansion chamber 20 is provided between the first regenerator 14 and the second regenerator 15. Further, a second expansion chamber 21 is provided between the second regenerator 15 and the tip wall of the second cylinder 12. A first cooling stage 22 is formed at the bottom of the first expansion chamber 20, and a second cooling stage 23 having a temperature lower than that of the first cooling stage 22 is formed at the bottom of the second expansion chamber 21.

上述したような2段式のGM冷凍機10には、コンプレッサ24から高圧の作動媒質(例えばHeガス)が供給される。供給された作動媒質は、第1の蓄冷器14に収容された第1の蓄冷材18間を通過して第1の膨張室20に到達し、さらに第2の蓄冷器15に収容された極低温用蓄冷材(第2の蓄冷材)19間を通過して第2の膨張室21に到達する。この際に、作動媒質は各蓄冷材18、19に熱エネルギーを供給して冷却される。各蓄冷材18、19間を通過した作動媒質は、各膨張室20、21で膨張して寒冷を発生させ、各冷却ステージ22、23が冷却される。膨張した作動媒質は、各蓄冷材18、19間を反対方向に流れる。作動媒質は各蓄冷材18、19から熱エネルギーを受け取った後に排出される。こうした過程で復熱効果が良好になるにしたがって、作動媒質サイクルの熱効率が向上し、より一層低い温度が実現される。   A high-pressure working medium (for example, He gas) is supplied from the compressor 24 to the two-stage GM refrigerator 10 as described above. The supplied working medium passes between the first regenerators 18 accommodated in the first regenerator 14 and reaches the first expansion chamber 20, and further, the pole accommodated in the second regenerator 15. It passes between the low-temperature regenerator material (second regenerator material) 19 and reaches the second expansion chamber 21. At this time, the working medium is cooled by supplying heat energy to the regenerator materials 18 and 19. The working medium that has passed between the cold storage materials 18 and 19 expands in the expansion chambers 20 and 21 to generate cold, and the cooling stages 22 and 23 are cooled. The expanded working medium flows in the opposite direction between the regenerator materials 18 and 19. The working medium is discharged after receiving thermal energy from each of the cold storage materials 18 and 19. As the recuperation effect is improved in such a process, the thermal efficiency of the working medium cycle is improved, and an even lower temperature is realized.

実施例2、比較例2
高周波溶解によりHoCu2母合金を作製した。このHoCu2母合金を約1323Kで溶融し、この溶湯をAr雰囲気中(圧力=約80kPa)で回転円盤上に滴下して急冷凝固させた。得られた粒体を篩分し、粒径を180〜250μmの範囲に調整した後、傾斜振動板法による形状分級を行い、球状粒体を1kg選別した。このような工程を複数回行って、5ロットの球状HoCu2粒体を得た。ここで、形状分級の条件、例えば傾斜角、振動強度等を調整することによって、各ロットの球状度を変化させた。
Example 2 and Comparative Example 2
A HoCu 2 master alloy was prepared by high frequency melting. This HoCu 2 master alloy was melted at about 1323 K, and this molten metal was dropped on a rotating disk in an Ar atmosphere (pressure = about 80 kPa) and rapidly solidified. The obtained granules were sieved and the particle size was adjusted in the range of 180 to 250 μm, and then shape classification was carried out by the gradient vibration plate method, and 1 kg of spherical granules were selected. Such a process was performed several times to obtain 5 lots of spherical HoCu 2 particles. Here, the sphericity of each lot was changed by adjusting the shape classification conditions such as the inclination angle and the vibration intensity.

次に、これら5ロットの球状HoCu2粒体から無作為に300個の粒子を抽出し、個々の粒子の投影像の周囲長Lと投影像の実面積Aを画像処理により測定し、L2/4πAで表される形状因子Rを評価した。各ロットに対して実施例1と同様にして振動試験を行い、破壊した球状HoCu2粒子の比率を求めた。各ロット毎の形状因子Rおよび振動試験による粒子の破壊率を表2に示す。表2から明らかなように、試料No1〜No4の各球状HoCu2粒体が実施例2に相当し、試料No5の球状HoCu2粒体は比較例2に相当する。 Next, 300 particles are randomly extracted from these 5 lots of spherical HoCu 2 particles, the perimeter L of the projected image of each particle and the actual area A of the projected image are measured by image processing, and L 2 The shape factor R expressed by / 4πA was evaluated. A vibration test was performed on each lot in the same manner as in Example 1 to determine the ratio of the broken spherical HoCu 2 particles. Table 2 shows the shape factor R for each lot and the fracture rate of the particles by the vibration test. As is clear from Table 2, each spherical HoCu 2 particle of Samples No 1 to No 4 corresponds to Example 2, and the spherical HoCu 2 particle of Sample No 5 corresponds to Comparative Example 2.

上述したHoCu2からなる各ロットの磁性蓄冷材球状粒体を、それぞれ蓄冷容器の低温側1/2に充填率63.5〜64.0%で充填し、高温側1/2にはPb球を充填した後、実施例1と同様に2段式GM冷凍機に2段目蓄冷器として組込み、実施例1と同様の冷凍試験を行った。その結果を表2に併せて示す。 After filling the above-mentioned magnetic regenerator material spherical particles of each of the above-mentioned HoCu 2 with a filling rate of 63.5 to 64.0% on the low temperature side 1/2 of the regenerator, and with the Pb sphere on the high temperature side 1/2 As in Example 1, a two-stage GM refrigerator was incorporated as a second-stage regenerator, and the same refrigeration test as in Example 1 was performed. The results are also shown in Table 2.

Figure 0004568170
Figure 0004568170

表2から明らかなように、最大加速度が300m/s2の単振動を1×106回加えたときに破壊する粒子の比率が1重量%以下である磁性蓄冷材粒体を用いた冷凍機は、いずれも優れた冷凍能力を長期間にわたって維持できることが分かる。 As is clear from Table 2, a refrigerator using a magnetic regenerator granule that has a particle ratio of 1% by weight or less when a single vibration with a maximum acceleration of 300 m / s 2 is applied 1 × 10 6 times. It can be seen that both can maintain excellent refrigeration capacity over a long period of time.

実施例3、比較例3
高周波溶解によりErNi0.9Co0.1母合金を作製した。このErNi0.9Co0.1母合金を約1523Kで溶融し、この溶湯をAr雰囲気中(圧力=約80kPa)で回転円盤上に滴下して急冷凝固させた。得られた粒体を適宜形状分級ならびに篩分し、粒径180〜250の球状粒体を1kg選別した。このような工程を複数回行って、5ロットの球状ErNi0.9Co0.1粒体を得た。
Example 3 and Comparative Example 3
An ErNi 0.9 Co 0.1 master alloy was prepared by high frequency melting. This ErNi 0.9 Co 0.1 master alloy was melted at about 1523 K, and this molten metal was dropped on a rotating disk in an Ar atmosphere (pressure = about 80 kPa) and rapidly solidified. The obtained granules were appropriately classified and sieved, and 1 kg of spherical granules having a particle size of 180 to 250 were selected. Such a process was performed several times to obtain 5 lots of spherical ErNi 0.9 Co 0.1 particles.

ここでは、母合金を作製する際の原料ロット、高周波溶解時の雰囲気の真空度、急冷凝固工程中の不純物ガス濃度等が異なるため、球状粒子中の不純物量が異なる。球状粒子中の窒素量および炭素量を表3に示す。これら5ロットの球状ErNi0.9Co0.1粒体に対して実施例1と同様にして振動試験を行い、破壊した球状ErNi0.9Co0.1粒子の比率を求めた。各ロット毎の窒素量および炭素量、振動試験による粒子の破壊率を表3に示す。表3から明らかなように、試料No1〜No4の各球状ErNi0.9Co0.1粒体が実施例3に相当し、試料No5の球状ErNi0.9Co0.1粒体は比較例3に相当する。 Here, the amount of impurities in the spherical particles differs because the raw material lot when producing the master alloy, the degree of vacuum of the atmosphere during high-frequency melting, the impurity gas concentration during the rapid solidification process, and the like are different. Table 3 shows the amounts of nitrogen and carbon in the spherical particles. These five lots of spherical ErNi 0.9 Co 0.1 particles were subjected to a vibration test in the same manner as in Example 1 to determine the ratio of the broken spherical ErNi 0.9 Co 0.1 particles. Table 3 shows the amount of nitrogen and carbon for each lot, and the particle destruction rate by the vibration test. As is clear from Table 3, each spherical ErNi 0.9 Co 0.1 particle of Samples No. 1 to No. 4 corresponds to Example 3, and the spherical ErNi 0.9 Co 0.1 particle of Sample No. 5 corresponds to Comparative Example 3.

上述したErNi0.9Co0.1からなる各ロットの磁性蓄冷材球状粒体を、それぞれ蓄冷容器の低温側1/2に充填率63.4〜64.0%で充填し、高温側1/2にはPb球を充填した後、実施例1と同様に2段式GM冷凍機に2段目蓄冷器として組込み、実施例1と同様に冷凍試験を行った。その結果を表3に併せて示す。 Each lot of magnetic regenerator material spherical particles made of ErNi 0.9 Co 0.1 described above is filled in the cold storage ½ of the cold storage container at a filling rate of 63.4-64.0%, and the high temperature ½ is filled with Pb spheres. After that, as in Example 1, it was incorporated into a two-stage GM refrigerator as a second-stage regenerator, and a refrigeration test was conducted in the same manner as in Example 1. The results are also shown in Table 3.

Figure 0004568170
Figure 0004568170

表3から明らかなように、最大加速度が300m/s2の単振動を1×106回加えたときに破壊する粒子の比率が1重量%以下である磁性蓄冷材粒体を用いた冷凍機は、いずれも優れた冷凍能力を長期間にわたって維持できることが分かる。 As is clear from Table 3, a refrigerator using a magnetic regenerator material granule in which the ratio of particles that breaks when a single vibration with a maximum acceleration of 300 m / s 2 is applied 1 × 10 6 times is 1% by weight or less. It can be seen that both can maintain excellent refrigeration capacity over a long period of time.

実施例4、比較例4
高周波溶解によりErNi母合金、Er3Co母合金、ErCu母合金、Ho2Al母合金をそれぞれ作製した。これら各母合金を約1493Kで溶融し、これらの溶湯をAr雰囲気中(圧力=約80kPa)で回転円盤上に滴下して急冷凝固させた。得られた各粒体を適宜形状分級ならびに篩分し、粒径180〜250μmの球状粒体をそれぞれ1kg選別した。このような工程を複数回行って、それぞれ5ロットの球状粒体を得た。
Example 4 and Comparative Example 4
ErNi mother alloy, Er 3 Co mother alloy, ErCu mother alloy, and Ho 2 Al mother alloy were prepared by high frequency melting. Each of these master alloys was melted at about 1493 K, and these molten metals were dropped on a rotating disk in an Ar atmosphere (pressure = about 80 kPa) and rapidly solidified. Each of the obtained granules was appropriately classified and sieved, and 1 kg of spherical granules having a particle diameter of 180 to 250 μm were selected. Such a process was performed several times to obtain 5 lots of spherical particles each.

これら各球状粒体の各ロットに対して、実施例1と同様にして振動試験を行って破壊率を測定し、破壊率が最も低かったロット(実施例)と最も高かったロット(比較例)をそれぞれ選択した。これら各ロットについて、形状因子Rの測定と窒素および炭素の分析を行った。これらの結果を表4に示す。   For each lot of these spherical particles, a vibration test was performed in the same manner as in Example 1 to measure the fracture rate. The lot with the lowest fracture rate (Example) and the lot with the highest fracture rate (Comparative Example) Was selected respectively. For each of these lots, the shape factor R was measured and the nitrogen and carbon were analyzed. These results are shown in Table 4.

Figure 0004568170
Figure 0004568170

上述した各磁性蓄冷材球状粒体を、以下のようにして冷凍機に組込んだ。まず、ErNiからなる磁性蓄冷材球状粒体を、それぞれ蓄冷容器の低温側1/2に充填率63.2〜64.0%で充填し、高温側1/2にはEr3Co、ErCu、またはHo2Alからなる磁性蓄冷材球状粒体をそれぞれ充填率63.0〜64.1%で充填した後、実施例1と同様に2段式GM冷凍機に2段目蓄冷器としてそれぞれ組込み、実施例1と同様に冷凍試験を行った。その結果を表4に併せて示す。 Each magnetic regenerator material spherical particle described above was incorporated into a refrigerator as follows. First, spherical particles of magnetic regenerator material made of ErNi are filled in the low temperature side 1/2 of the cold storage container at a filling rate of 63.2 to 64.0%, respectively, and Er 3 Co, ErCu, or Ho 2 Al on the high temperature side 1/2. After filling the magnetic regenerator material spherical particles composed of 63.0% to 64.1% with each other, it is incorporated in the two-stage GM refrigerator as the second-stage regenerator in the same manner as in Example 1 and frozen in the same manner as in Example 1. A test was conducted. The results are also shown in Table 4.

次に、MRI装置、磁気浮上列車、クライオポンプ、および磁界印加式単結晶引上げ装置の構成例について述べる。   Next, configuration examples of the MRI apparatus, the magnetic levitation train, the cryopump, and the magnetic field application type single crystal pulling apparatus will be described.

図4は、本発明を適用した超電導MRI装置の概略構成を示す図である。同図に示す超電導MRI装置30は、人体に対して空間的に均一で時間的に安定な静磁界を印加する超電導静磁界コイル31、発生磁界の不均一性を補正する図示を省略した補正コイル、測定領域に磁界勾配を与える傾斜磁界コイル32、およびラジオ波送受信用プローブ33等により構成されている。そして、超電導静磁界コイル31の冷却用として、前述したような冷凍機34が用いられている。なお、図中35はクライオスタット、36は放射断熱シールドである。   FIG. 4 is a diagram showing a schematic configuration of a superconducting MRI apparatus to which the present invention is applied. The superconducting MRI apparatus 30 shown in FIG. 1 includes a superconducting static magnetic field coil 31 that applies a spatially uniform and temporally stable static magnetic field to a human body, and a correction coil that is not shown to correct nonuniformity of the generated magnetic field. A gradient magnetic field coil 32 that applies a magnetic field gradient to the measurement region, a radio wave transmission / reception probe 33, and the like. The refrigerator 34 as described above is used for cooling the superconducting static magnetic field coil 31. In the figure, 35 is a cryostat, and 36 is a radiation heat shield.

上述した冷凍機34を用いた超電導MRI装置30においては、超電導静磁界コイル31の動作温度を長期間にわたって安定に保証することができるため、空間的に均一で時間的に安定な静磁界を長期間にわたって得ることができる。従って、超電導MRI装置30の性能を長期間にわたって安定して発揮させることが可能となる。   In the superconducting MRI apparatus 30 using the above-described refrigerator 34, the operating temperature of the superconducting static magnetic field coil 31 can be stably assured over a long period of time, and therefore a spatially uniform and temporally stable static magnetic field is long. Can be obtained over a period of time. Therefore, the performance of the superconducting MRI apparatus 30 can be stably exhibited over a long period of time.

図5は、本発明を適用した磁気浮上列車の要部概略構成を示す図であり、磁気浮上列車用超電導マグネット40の部分を示している。同図に示す磁気浮上列車用の超電導マグネット40は、超電導コイル41、この超電導コイル41を冷却するための液体ヘリウムタンク42、この液体ヘリウムの揮散を防ぐ液体窒素タンク43、および冷凍機44等により構成されている。なお、図中45は積層断熱材、46はパワーリード、47は永久電流スイッチである。   FIG. 5 is a diagram showing a schematic configuration of a main part of a magnetic levitation train to which the present invention is applied, and shows a portion of a superconducting magnet 40 for a magnetic levitation train. A superconducting magnet 40 for a magnetic levitation train shown in the figure includes a superconducting coil 41, a liquid helium tank 42 for cooling the superconducting coil 41, a liquid nitrogen tank 43 for preventing the liquid helium from being volatilized, a refrigerator 44, and the like. It is configured. In the figure, 45 is a laminated heat insulating material, 46 is a power lead, and 47 is a permanent current switch.

冷凍機44を用いた磁気浮上列車用超電導マグネット40においては、超電導コイル41の動作温度を長期間にわたって安定に保証することができるため、列車の磁気浮上および推進に必要な磁界を長期間にわたって安定して得ることができる。特に、磁気浮上列車用超電導マグネット40では加速度が作用するが、冷凍機44は加速度が作用した場合においても長期間にわたって優れた冷凍能力を維持できることから、磁界強度等の長期安定化に大きく貢献する。従って、このような超電導マグネット40を用いた磁気浮上列車は、その信頼性を長期間にわたって発揮させることが可能となる。   In the superconducting magnet 40 for a magnetically levitated train using the refrigerator 44, the operating temperature of the superconducting coil 41 can be stably ensured over a long period of time, so that the magnetic field necessary for the magnetic levitation and propulsion of the train can be stabilized over a long period of time. Can be obtained. In particular, the superconducting magnet 40 for a magnetic levitation train acts on acceleration, but the refrigerator 44 can maintain excellent refrigeration capacity over a long period of time even when acceleration acts, thus greatly contributing to long-term stabilization of magnetic field strength and the like. . Therefore, the magnetic levitation train using such a superconducting magnet 40 can exhibit its reliability over a long period of time.

図6は、本発明を適用したクライオポンプの概略構成を示す図である。同図に示すクライオポンプ50は、気体分子を凝縮または吸着するクライオパネル51、このクライオパネル51を所定の極低温に冷却する冷凍機52、これらの間に設けられたシールド53、吸気口に設けられたバッフル54、およびアルゴン、窒素、水素等の排気速度を変化させるリング55等により構成されている。冷凍機52を用いたクライオポンプ50は、クライオパネル51の動作温度を長期間にわたって安定に保証することができる。従って、クライオポンプ50の性能を長期間にわたって安定して発揮させることが可能となる。   FIG. 6 is a diagram showing a schematic configuration of a cryopump to which the present invention is applied. A cryopump 50 shown in the figure includes a cryopanel 51 that condenses or adsorbs gas molecules, a refrigerator 52 that cools the cryopanel 51 to a predetermined cryogenic temperature, a shield 53 provided therebetween, and a suction port. Baffle 54, and a ring 55 for changing the exhaust speed of argon, nitrogen, hydrogen or the like. The cryopump 50 using the refrigerator 52 can guarantee the operating temperature of the cryopanel 51 stably over a long period of time. Therefore, the performance of the cryopump 50 can be exhibited stably over a long period of time.

図7は、本発明を適用した磁界印加式単結晶引上げ装置の概略構成を示す図である。同図に示す磁界印加式単結晶引上げ装置60は、原料溶融用るつぼ、ヒータ、単結晶引上げ機構等を有する単結晶引上げ部61、原料融液に対して静磁界を印加する超電導コイル62、および単結晶引上げ部61の昇降機構63等により構成されている。そして、超電導コイル62の冷却用として、前述したような冷凍機64が用いられている。なお、図中65は電流リード、66は熱シールド板、67はヘリウム容器である。冷凍機64を用いた磁界印加式単結晶引上げ装置60においては、超電導コイル62の動作温度を長期間にわたって安定に保証することができるため、単結晶の原料融液の対流を抑える良好な磁界を長期間にわたって得ることができる。従って、磁界印加式単結晶引上げ装置60の性能を長期間にわたって安定して発揮させることが可能となる。   FIG. 7 is a diagram showing a schematic configuration of a magnetic field application type single crystal pulling apparatus to which the present invention is applied. A single-crystal pulling apparatus 60 for applying a magnetic field shown in the figure includes a raw crystal melting crucible, a heater, a single crystal pulling unit 61 having a single crystal pulling mechanism, a superconducting coil 62 for applying a static magnetic field to the raw material melt, It is constituted by an elevating mechanism 63 of the single crystal pulling unit 61 or the like. The refrigerator 64 as described above is used for cooling the superconducting coil 62. In the figure, 65 is a current lead, 66 is a heat shield plate, and 67 is a helium vessel. In the magnetic field application type single crystal pulling apparatus 60 using the refrigerator 64, the operating temperature of the superconducting coil 62 can be stably ensured over a long period of time, so that a good magnetic field that suppresses convection of the single crystal raw material melt can be obtained. It can be obtained over a long period of time. Therefore, the performance of the magnetic field application type single crystal pulling apparatus 60 can be stably exhibited over a long period of time.

本発明の磁性蓄冷材粒体の信頼性評価試験に用いる振動試験用容器の一例を示す断面図である。It is sectional drawing which shows an example of the container for a vibration test used for the reliability evaluation test of the magnetic cool storage material granule of this invention. 本発明の一実施例による磁性蓄冷材粒体の振動試験用容器への充填率と振動試験により破壊した粒子の比率との関係を示す図である。It is a figure which shows the relationship between the filling rate to the container for a vibration test of the magnetic regenerator material granule by one Example of this invention, and the ratio of the particle | grains destroyed by the vibration test. 本発明の一実施例で作製したGM冷凍機の要部構成を示す図である。It is a figure which shows the principal part structure of the GM refrigerator produced by one Example of this invention. 本発明による超電導MRI装置の概略構成を示す図である。It is a figure which shows schematic structure of the superconducting MRI apparatus by this invention. 本発明による磁気浮上列車の要部概略構成を示す図である。It is a figure which shows the principal part schematic structure of the magnetic levitation train by this invention. 本発明によるクライオポンプの概略構成を示す図である。It is a figure which shows schematic structure of the cryopump by this invention. 本発明による磁界印加式単結晶引上げ装置の要部概略構成を示す図である。It is a figure which shows the principal part schematic structure of the magnetic field application type single crystal pulling apparatus by this invention.

符号の説明Explanation of symbols

1…振動試験用円筒容器、10…GM冷凍機、14,15…蓄冷器、19…第2の蓄冷材(極低温用蓄冷材)。   DESCRIPTION OF SYMBOLS 1 ... Cylindrical container for vibration tests, 10 ... GM refrigerator, 14, 15 ... Regenerator, 19 ... 2nd cool storage material (cold storage material for cryogenic temperature).

Claims (2)

磁性蓄冷材粒体を具備する極低温用蓄冷材で、
前記磁性蓄冷材粒体を構成する磁性蓄冷材粒子個々の投影像の周囲長をL、前記投影像の実面積をAとしたとき、前記磁性蓄冷材粒体はL2/4πAで表される形状因子Rが1.5を超える前記磁性蓄冷材粒子の比率が5%以下となるように形状分級され、かつ前記磁性蓄冷材粒体を構成する磁性蓄冷材粒子のうち、前記磁性蓄冷材粒体に最大加速度が300m/s2の単振動を1×106回加えたときに破壊する前記磁性蓄冷材粒子の比率が1重量%以下である極低温用蓄冷材の製造方法であって、
下記(a)〜(d)の条件を満たす磁性蓄冷材粒体を作製する工程と、
前記磁性蓄冷材粒体から一定量の磁性蓄冷材粒子を抽出し、これら抽出した磁性蓄冷材粒子の集団に最大加速度が300m/s2の単振動を1×106回加えたときに破壊する粒子の比率を測定する工程と、
前記単振動を加えたときに破壊する粒子の比率が1重量%以下の前記磁性蓄冷材粒体を選別する工程と、
前記磁性蓄冷材粒体を構成する磁性蓄冷材粒子個々の投影像の周囲長をL、前記投影像の実面積をAとしたとき、L2/4πAで表される形状因子Rが1.5を超える前記磁性蓄冷材粒子の比率が5%以下となるように、前記磁性蓄冷材粒体を形状分級する工程と
を具備することを特徴とする極低温用蓄冷材の製造方法。
(a)該磁性蓄冷材粒体を構成する磁性蓄冷材粒子の炭素含有量が0.1重量%以下である
(b)該磁性蓄冷材粒体を構成する磁性蓄冷材粒子の窒素含有量が0.3重量%以下である
(c)該磁性蓄冷材粒体を構成する磁性蓄冷材粒子の70重量%以上が0.01〜3.0mmの範囲の粒径を有する
(d)一般式:RM z (式中、RはY、La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、TmおよびYbから選ばれる少なくとも1種の希土類元素を、MはNi、Co、Cu、Ag、AlおよびRuから選ばれる少なくとも1種の金属元素を示し、zは0.001〜9.0の範囲の数を示す)または一般式:RRh(式中、RはY、La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、TmおよびYbから選ばれる少なくとも1種の希土類元素を示す)で表される希土類元素を含む金属間化合物からなる
A cryogenic regenerator with magnetic regenerator particles,
The magnetic regenerator material particles are represented by L 2 / 4πA, where L is the perimeter of the projected image of each magnetic regenerator material particle constituting the magnetic regenerator material particle, and A is the actual area of the projected image. Of the magnetic regenerator particles that are shape-classified so that the ratio of the magnetic regenerator particles with a shape factor R exceeding 1.5 is 5% or less and that constitute the magnetic regenerator particles, the magnetic regenerator particles A method for producing a cryogenic regenerator material in which the ratio of the magnetic regenerator material particles that break when a single vibration with a maximum acceleration of 300 m / s 2 is applied 1 × 10 6 times is 1% by weight or less,
A step of producing magnetic regenerator material particles satisfying the following conditions (a) to (d) ;
Extract a certain amount of magnetic regenerator particles from the magnetic regenerator particles and destroy them when a single vibration with a maximum acceleration of 300 m / s 2 is applied to the group of extracted magnetic regenerator particles 1 × 10 6 times Measuring the ratio of particles;
Selecting the magnetic regenerator material particles having a ratio of particles of 1% by weight or less that break when the simple vibration is applied;
The shape factor R represented by L 2 / 4πA exceeds 1.5, where L is the perimeter of the projected image of each magnetic regenerator material particle constituting the magnetic regenerator material particle, and A is the actual area of the projected image. And a step of classifying the magnetic regenerator material particles so that the ratio of the magnetic regenerator material particles is 5% or less.
(A) The carbon content of the magnetic regenerator material particles constituting the magnetic regenerator material particles is 0.1% by weight or less.
(B) The nitrogen content of the magnetic regenerator material particles constituting the magnetic regenerator material granule is 0.3% by weight or less.
(C) 70% by weight or more of the magnetic regenerator material particles constituting the magnetic regenerator material particles have a particle size in the range of 0.01 to 3.0 mm.
(D) General formula: RM z (wherein R is at least one selected from Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm and Yb) R represents a rare earth element, M represents at least one metal element selected from Ni, Co, Cu, Ag, Al and Ru, and z represents a number in the range of 0.001 to 9.0, or a general formula: RRh (wherein R represents a rare earth element represented by Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, and Yb. Containing intermetallic compounds
蓄冷容器と、
前記蓄冷容器に充填された磁性蓄冷材粒体からなり、前記磁性蓄冷材粒体を構成する磁性蓄冷材粒子個々の投影像の周囲長をL、前記投影像の実面積をAとしたとき、前記磁性蓄冷材粒体はL2/4πAで表される形状因子Rが1.5を超える前記磁性蓄冷材粒子の比率が5%以下となるように形状分級され、かつ前記磁性蓄冷材粒体を構成する磁性蓄冷材粒子のうち、前記磁性蓄冷材粒体に最大加速度が300m/s2の単振動を1×106回加えたときに破壊する前記磁性蓄冷材粒子の比率が1重量%以下である極低温用蓄冷材と
を具備する極低温用蓄冷器の製造方法であって、
下記(a)〜(d)の条件を満たす磁性蓄冷材粒体を作製する工程と、
前記磁性蓄冷材粒体から一定量の磁性蓄冷材粒子を抽出し、これら抽出した磁性蓄冷材粒子の集団に最大加速度が300m/s2の単振動を1×106回加えたときに破壊する粒子の比率を測定する工程と、
前記単振動を加えたときに破壊する粒子の比率が1重量%以下の前記磁性蓄冷材粒体を選別する工程と、
前記磁性蓄冷材粒体を構成する磁性蓄冷材粒子個々の投影像の周囲長をL、前記投影像の実面積をAとしたとき、L2/4πAで表される形状因子Rが1.5を超える前記磁性蓄冷材粒子の比率が5%以下となるように、前記磁性蓄冷材粒体を形状分級する工程と、
選別され、かつ形状分級された前記単振動を加えたときに破壊する粒子の比率が1重量%以下で、かつ前記形状因子Rが1.5を超える磁性蓄冷材粒子の比率が5%以下である前記磁性蓄冷材粒体を、蓄冷容器に充填して蓄冷器を作製する工程と
を具備することを特徴とする極低温用蓄冷器の製造方法。
(a)該磁性蓄冷材粒体を構成する磁性蓄冷材粒子の炭素含有量が0.1重量%以下である
(b)該磁性蓄冷材粒体を構成する磁性蓄冷材粒子の窒素含有量が0.3重量%以下である
(c)該磁性蓄冷材粒体を構成する磁性蓄冷材粒子の70重量%以上が0.01〜3.0mmの範囲の粒径を有する
(d)一般式:RM z (式中、RはY、La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、TmおよびYbから選ばれる少なくとも1種の希土類元素を、MはNi、Co、Cu、Ag、AlおよびRuから選ばれる少なくとも1種の金属元素を示し、zは0.001〜9.0の範囲の数を示す)または一般式:RRh(式中、RはY、La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、TmおよびYbから選ばれる少なくとも1種の希土類元素を示す)で表される希土類元素を含む金属間化合物からなる
A cold storage container,
The magnetic regenerator material particles filled in the regenerator container, when the perimeter of the projected image of the magnetic regenerator material particles constituting the magnetic regenerator material particles is L, and the actual area of the projected image is A, The magnetic regenerator particles are classified so that the ratio of the magnetic regenerator particles having a shape factor R expressed by L 2 / 4πA of more than 1.5 is 5% or less, and constitute the magnetic regenerator particles The ratio of the magnetic regenerator material particles that break when the magnetic regenerator material particles are broken by applying a single vibration with a maximum acceleration of 300 m / s 2 1 × 10 6 times to the magnetic regenerator material particles is 1% by weight or less. A method of manufacturing a cryogenic regenerator comprising a cryogenic regenerator material,
A step of producing magnetic regenerator material particles satisfying the following conditions (a) to (d) ;
Extract a certain amount of magnetic regenerator particles from the magnetic regenerator particles and destroy them when a single vibration with a maximum acceleration of 300 m / s 2 is applied to the group of extracted magnetic regenerator particles 1 × 10 6 times Measuring the ratio of particles;
Selecting the magnetic regenerator material particles having a ratio of particles of 1% by weight or less that break when the simple vibration is applied;
The shape factor R represented by L 2 / 4πA exceeds 1.5, where L is the perimeter of the projected image of each magnetic regenerator material particle constituting the magnetic regenerator material particle, and A is the actual area of the projected image. A step of classifying the magnetic regenerator material particles so that the magnetic regenerator particle ratio is 5% or less;
The ratio of the particles to be destroyed when the single vibrations that have been selected and classified are applied is 1% by weight or less, and the ratio of the magnetic regenerator particles having the shape factor R exceeding 1.5 is 5% or less. And a step of filling a regenerator container with magnetic regenerator material particles to produce a regenerator, and a method for producing a cryogenic regenerator.
(A) The carbon content of the magnetic regenerator material particles constituting the magnetic regenerator material particles is 0.1% by weight or less.
(B) The nitrogen content of the magnetic regenerator material particles constituting the magnetic regenerator material granule is 0.3% by weight or less.
(C) 70% by weight or more of the magnetic regenerator material particles constituting the magnetic regenerator material particles have a particle size in the range of 0.01 to 3.0 mm.
(D) General formula: RM z (wherein R is at least one selected from Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm and Yb) R represents a rare earth element, M represents at least one metal element selected from Ni, Co, Cu, Ag, Al and Ru, and z represents a number in the range of 0.001 to 9.0, or a general formula: RRh (wherein R represents a rare earth element represented by Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, and Yb. Containing intermetallic compounds
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WO2014057657A1 (en) * 2012-10-09 2014-04-17 株式会社 東芝 Rare earth storage medium particles, rare earth storage medium particle group, and cold head using same, superconducting magnet, inspection device, and cryopump
CN114774728B (en) * 2022-04-13 2023-05-12 江苏大学 Wear-resistant aluminum alloy and preparation method thereof

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL161196C (en) * 1974-09-02 1980-01-15 Philips Nv HEAT GENERATOR, OF WHICH THE FILLING MASS CONTAINS A RARE EARTH ELEMENT.
JPH07101134B2 (en) * 1988-02-02 1995-11-01 株式会社東芝 Heat storage material and low temperature heat storage
JPH0282374A (en) * 1988-09-20 1990-03-22 Asahi Chem Ind Co Ltd Void ratio measuring method for porous substance
JPH0668418B2 (en) * 1989-05-23 1994-08-31 株式会社東芝 Cold storage material manufacturing method and cryogenic refrigerator
US5186765A (en) * 1989-07-31 1993-02-16 Kabushiki Kaisha Toshiba Cold accumulating material and method of manufacturing the same
JPH04231401A (en) * 1990-12-27 1992-08-20 Shin Etsu Chem Co Ltd Method for globurizing rare-earth metal-transition metal alloy powder
EP0592997A3 (en) * 1992-10-16 1994-11-17 Becton Dickinson Co Methods and apparatus for measuring tissue section thickness.
JPH06240241A (en) * 1993-02-12 1994-08-30 Toshiba Corp Cold-reserving agent for cryogenic temperature and cold-reserving apparatus for cryogenic temperature using the same
JPH0783589A (en) * 1993-09-09 1995-03-28 Toshiba Corp Heat accumulator
DE69633793T2 (en) * 1996-02-22 2005-10-27 Kabushiki Kaisha Toshiba, Kawasaki REGENERATOR MATERIAL FOR USE AT VERY LOW TEMPERATURES

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