JP4561226B2 - Color filter deposition method - Google Patents

Description

  The present invention relates to a color filter film forming method and film forming apparatus, an electro-optical device, and an electronic apparatus manufacturing method using an inkjet method.

  A color filter manufactured using an ink jet system is formed by forming a plurality of pixel regions partitioned by a partition wall on a substrate and forming a color layer in each pixel region. For example, Patent Document 1 discloses a method (film formation method) for manufacturing this type of color filter, and includes a step of forming a partition portion that partitions a plurality of pixel regions, and a pixel region partitioned by the partition portion. And a step of forming a color layer by discharging ink by an ink-jet method, and a method of varying the film thickness of the color layer formed in each pixel region for each color is used.

  The manufacturing method of the color filter described above is the difference between the thickness of the color layer of one specific color and the thickness of the color layer of a specific other color among the differences in the thickness of the color layer for each color. It is intended to provide a color filter having a color tone that matches the user's preference of 0.3 μm or more.

JP 2003-107231 A

  In the conventional color filter film forming method as described above, when the landed ink is left in the vicinity of the corner portion of the pixel area when the landed ink spreads in the pixel area, There was a problem that the color layer could not be uniformly formed due to the reduced wettability. It is known that the portion where the ink does not get wet is a so-called white-out state and light is lost, which affects the color tone and contrast of the color filter.

  In addition, the pixel area constituting the color filter usually has at least three color layers of R (red), G (green), and B (blue), and one display pixel is constituted by the three color layers. is doing. When manufacturing a liquid crystal display device or the like, which is an electro-optical device having a predetermined number of display pixels, using such a color filter, the color tone according to the user's preference is provided as in the conventional color filter film forming method. In order to obtain it, there is a possibility that uneven color tone may occur unless the film is formed to have a uniform film thickness even in the same color layer formed in a plurality of pixel regions.

  The present invention has been made in consideration of the above-described problems, and is a color filter that can reduce white spots in a pixel region and can make the thickness of a color layer of the same color substantially uniform. It is an object of the present invention to provide a film forming method, a film forming apparatus using the film forming method, an electro-optical device, and an electronic device manufacturing method.

A color filter film forming method according to an embodiment of the present invention includes forming a color layer in a plurality of pixel regions on a substrate, the plurality of pixel regions including a first pixel region and the first pixel region. The second pixel region and the third pixel region arranged in the same direction as the short side direction of the first pixel region, the second pixel region, and the third pixel region are different color layers from each other. And the second pixel region is a film forming method of a color filter sandwiched between the first pixel region and the third pixel region, and has a liquid repellency that partitions the plurality of pixel regions A partition wall forming step of forming a partition wall portion on the substrate, and a discharge step of discharging a functional liquid in which a color material is dispersed in the plurality of pixel regions as droplets. In the discharge step, the second step When the functional liquid is ejected as droplets onto the pixel region, the first The droplets in the first landing position located at the boundary portion between the partition wall and the second pixel region located between the element region and the second pixel region discharged at regular intervals, the third pixel region and the The liquid droplets are equidistantly spaced at a boundary between the partition located between the second pixel regions and the second pixel region, and at a second landing position having a staggered arrangement with the first landing position. It is characterized by discharging.
Further, a color filter film forming method according to an embodiment of the present invention is a color filter film forming method in which a color layer is formed in a pixel region on a substrate, and is a liquid repellent material that partitions the pixel region. A partition formation process for forming the partition wall portion on the substrate and a discharge process for discharging the functional liquid in which the color material is dispersed in the pixel area as droplets, and the discharge process includes a plurality of pixel regions arranged in the same direction. And the functional liquid is ejected so as to land on the partition walls partitioning the plurality of pixel regions.

  According to this method, in the partition formation step, a liquid repellent partition that partitions the pixel region is formed, and in the ejection step, a plurality of functional liquids in which the color material is dispersed are used as liquid droplets arranged in the same direction. The ink is discharged so as to land on the pixel area and the partition wall partitioning the plurality of pixel areas. Accordingly, the functional liquid that has landed on the liquid-repellent partition wall wets so as to enter the pixel area from the partition wall, and is combined with the functional liquid that has landed in the pixel area and spread wet to cover the pixel area evenly. A functional liquid layer can be formed. In addition, the functional liquid lands on a plurality of pixel areas arranged in the same direction and partition walls that divide the pixel area, thereby forming a functional liquid layer in which the functional liquid is wet and spread in the same direction. Can do. By drying the functional liquid layer thus formed and removing the solvent component in the functional liquid, it is possible to form a color filter with little film thickness unevenness in the pixel region and in the plurality of pixel regions. it can.

  In this case, the functional liquid is ejected at substantially equal intervals in the ejection step. According to this configuration, since the functional liquid is discharged at substantially equal intervals, the functional liquid can land in the same direction without unevenness, and a color filter with less unevenness in film thickness can be formed.

  In the ejection step, it is preferable that the functional liquid is ejected so as to land on the partition wall located at the corner of the pixel region. According to this method, even when part of the functional liquid that has landed in the pixel area reaches the partition wall and the forward contact angle decreases and does not spread to the corner of the pixel area, the liquid repellency located in the corner is reduced. Since the functional liquid that has landed on the partition wall has wet so as to enter the pixel area, the functional liquid can be reliably distributed to the corners of the pixel area.

  Further, in the ejection step, the functional liquid may be ejected as droplets so as to land on the boundary between a plurality of pixel regions that are arranged in the same direction and having the same color layer and a partition that partitions the pixel region. .

  According to this method, the ejection step functions to land on the boundary between a plurality of pixel regions that are the same color layer arranged in the same direction and the liquid-repellent partition wall that partitions the pixel region. The liquid is ejected as droplets. Since the liquid droplets that have landed on the boundary part wet and spread along the boundary part, it is possible to prevent the functional liquid from being insufficiently wet and spread in the boundary part. Therefore, it is possible to form a color filter in which the functional liquid has spread to every corner of the pixel region.

  Further, the ejection step is characterized in that the functional liquid is ejected by changing the landing density of the droplets discharged to the partition wall with respect to the landing density of the droplets discharged to the pixel region. The “droplet landing density” refers to the ratio of the volume of droplets landed per unit area.

  According to this method, in the ejection step, the functional liquid is ejected while changing the landing density of the droplets ejected to the partition wall. That is, the wet and spread state of the functional liquid that has landed on the pixel region and the partition wall can be controlled by changing the landing density of the droplets discharged to the partition. In addition, since it is only necessary to change the landing density of the droplets discharged to the partition wall, it is possible to reduce the waste and reduce the number of functional liquids compared to changing the landing density of all the discharged droplets. The functional liquid can be spread over the entire pixel area.

  Further, the ejection step may change the landing density by ejecting the functional liquid so that the volume of at least one droplet ejected to the partition wall portion is different from the volume of the droplet ejected to the pixel region. Good. Alternatively, the landing density may be changed by discharging the functional liquid so that the number of droplets that land on the pixel region and the number of droplets that land on the partition wall differ per unit area.

  According to this method, in the discharging step, the functional liquid is discharged so that the volume of at least one droplet discharged to the partition wall portion differs from the volume of the droplet discharged to the pixel region, or If any one of the methods for ejecting the functional liquid so that the number of droplets that land on the pixel region and the number of droplets that land on the partition wall differs per unit area is used, The landing density can be changed. Thus, the state in which the functional liquid that has landed on the pixel region and the partition wall spreads out can be controlled to be less uneven.

  In the case of changing the landing density as described above, in the discharging step, the functional liquid is discharged so that the landing density of the droplets discharged to the partition wall portion is higher than the landing density of the droplets discharged to the pixel region. It is preferable to do. According to this method, a larger amount of functional liquid is wetted so as to enter the pixel region from the partition wall, so that the residue when the partition wall is formed exists near the partition wall in the pixel region, and the landed droplets are Even when wetting and spreading are inhibited, film formation unevenness in the pixel region can be reduced.

  The color filter film forming apparatus of the present invention forms a color layer in a pixel region by ejecting a functional liquid in which a color material is dispersed in a pixel region defined by a partition wall formed on a substrate as droplets. A color filter film forming apparatus comprising: a droplet discharge unit that discharges a functional liquid as droplets; a scanning unit that relatively moves the droplet discharge unit and the substrate; and the same color layer disposed in the same direction. A plurality of pixel regions, and a discharge control unit that controls the droplet discharge unit so that the droplets land on the partition walls that partition the pixel region.

  According to this configuration, the discharge controller discharges the droplets so that the droplets land on the plurality of pixel regions that are the same color layer arranged in the same direction and the partition wall that partitions the plurality of pixel regions. In order to control the portion, the functional liquid is ejected as droplets to a plurality of pixel areas and partition walls on the substrate, and is composed of a functional liquid wetted and spread on a plurality of pixel areas that are arranged in the same direction and have the same color layer. A color layer can be formed. Further, compared to the case where the functional liquid is landed as droplets only in the pixel region, the color filter can be formed by simple droplet discharge control without requiring high landing accuracy.

  The scanning means places the droplet discharge portion and the substrate in the same direction so that the droplets land on a plurality of pixel regions that are arranged in the same direction and have the same color layer, and a partition wall that partitions the pixel region. Relative movement in a direction orthogonal to

  According to this configuration, the scanning unit relatively moves the droplet discharge unit and the substrate in a direction orthogonal to the direction (the same direction) in which the plurality of pixel regions that are the same color layer are arranged. Compared with the case where the droplet discharge portion and the substrate are relatively moved in the same direction, droplets can be efficiently discharged to the pixel region and the partition portion.

  The ejection control unit functions by ejecting the functional liquid as droplets at substantially equal intervals and changing the landing density of the droplets discharged to the partition wall with respect to the landing density of the droplets discharged to the pixel region. It is preferable to control the droplet discharge section so as to discharge liquid droplets.

  According to this configuration, the ejection control unit ejects the functional liquid as droplets at substantially equal intervals, and controls the droplet ejection unit to change the landing density of the droplets ejected to the partition wall part. However, it is possible to manufacture a color filter with less film formation unevenness in which the droplets that have landed on the partition wall flow into the pixel region and spread throughout the pixel area.

  The electro-optical device manufacturing method of the present invention is characterized by incorporating a color filter manufactured using the color filter manufacturing method of the above invention. According to this method, an electro-optical device having high display quality with little color tone unevenness and contrast nonuniformity is provided because a color filter with less white spots due to uneven film formation and less film thickness unevenness of the same color layer is incorporated. be able to.

  According to another aspect of the invention, there is provided an electronic apparatus manufacturing method including an electro-optical device manufactured using the electro-optical device manufacturing method according to the invention. According to this method, since an electro-optical device having a high display quality with little color unevenness and contrast unevenness is incorporated, an electronic device that can check information such as an image with a high-quality image with good appearance is provided. Can do.

  First, a color filter film forming apparatus according to an embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a schematic perspective view showing the main structure of a color filter film forming apparatus. As shown in FIG. 1, the color filter film forming apparatus 10 according to the present embodiment discharges a functional liquid in which a color material is dispersed in a pixel area defined by a partition wall formed on a substrate W as droplets. A color layer is formed in the pixel region. The film forming apparatus 10 includes an ink tank 11 that holds an ink 19 as a functional liquid in which a color material is dispersed, a tube 18, and a discharge scanning unit 12 that is supplied with the ink 19 from the ink tank 11 via the tube 18. It is equipped with. The discharge scanning unit 12 includes a carriage 17 that holds a plurality of droplet discharge heads 13 (see FIG. 2), a first position control unit 14 that controls the position of the carriage 17, and a stage 15 that holds a substrate (workpiece) W. A second position control unit 16 that controls the position of the stage 15, and a discharge control unit 20. The ink tank 11 and the droplet discharge head 13 are connected by a tube 18, and the ink 19 is supplied from the ink tank 11 to each of the plurality of droplet discharge heads 13 by compressed air.

  A droplet discharge head 13 as a droplet discharge unit discharges ink 19 as droplets on the substrate W at substantially equal intervals. The first position control unit 14 (X-axis direction) and the second position control unit 16 (Y-axis direction) as scanning means move the droplet discharge head 13 and the substrate W relative to each other. The ejection control unit 20 causes droplets to land on a plurality of pixel regions that are arranged in the same direction and have the same color layer, and a partition wall that partitions the plurality of pixel regions, and the droplets ejected to the pixel region The droplet discharge head 13, the first position control unit 14, and the second position control unit 16 are controlled so as to change the landing density of the droplets discharged to the partition wall with respect to the landing density.

  The first position control unit 14 moves the carriage 17 along the X-axis direction and the Z-axis direction orthogonal to the X-axis direction in response to a signal from the discharge control unit 20. Further, the first position control unit 14 also has a function of rotating the carriage 17 around an axis parallel to the Z axis. In this embodiment, the Z-axis direction is a direction parallel to the vertical direction (that is, the direction of gravitational acceleration).

  The second position control unit 16 moves the stage 15 along the Y-axis direction orthogonal to both the X-axis direction and the Z-axis direction in response to a signal from the discharge control unit 20. Further, the second position control unit 16 also has a function of rotating the stage 15 around an axis parallel to the Z axis.

  The stage 15 has a plane parallel to both the X-axis direction and the Y-axis direction. The stage 15 is configured to fix or hold the substrate W on the plane.

  FIG. 2 is a schematic view showing the structure of the droplet discharge head. FIG. 4A is a schematic perspective view showing the structure of the droplet discharge head, and FIG. 4B is a schematic sectional view showing the structure of the droplet discharge head.

  As shown in FIG. 2A, the droplet discharge head 13 includes a diaphragm 25 having a piezoelectric element 24, a nozzle plate 26 having a plurality of nozzles 21, and a reservoir plate that constitutes a discharge chamber 22 communicating with the nozzles 21. 23 is a so-called piezo-type inkjet head having a three-layer structure.

  The nozzle plate 26 is provided with a plurality of nozzles 21 perforated at equal intervals. In this case, for example, 180 nozzles 21 are arranged in a row in one droplet discharge head 13 with a pitch of about 140 μm, for example.

  The reservoir plate 23 is provided with an ink cavity 27 that is filled with the ink 19 supplied from the ink tank 11 through the ink supply hole 29 formed in the vibration plate 25. The ink 19 filled in the ink cavity 27 is supplied to each discharge chamber 22 through the supply port 28.

  As shown in FIG. 2B, the diaphragm 25 is provided with piezoelectric elements (piezo) 24 corresponding to the respective discharge chambers 22. The piezoelectric element 24 includes a piezoelectric body 24c and a pair of electrodes 24a and 24b sandwiching the piezoelectric body 24c, and the diaphragm 25 is deformed by applying a driving voltage between the pair of electrodes 24a and 24b. Then, the ink 19 filled in the discharge chamber 22 is pressurized, and the ink 19 is discharged as droplets from the nozzle 21.

  FIG. 3 is a block diagram illustrating an electrical configuration of the discharge control unit and each unit related to the discharge control unit. As shown in FIG. 3, the ejection control unit 20 includes an input buffer memory 201 that receives ejection data of the ink 19 from an external information processing apparatus, and storage means (RAM) 202 that stores ejection data temporarily stored in the input buffer memory 201. And a processing unit 203 that transmits a control signal to each related unit. In addition, a scanning drive unit 204 that receives a control signal from the processing unit 203 and sends a position control signal to the first position control unit 14 and the second position control unit 16, and a droplet that receives a control signal from the processing unit 203. A head driving unit 205 that sends a driving voltage pulse to the ejection head 13 is provided.

  The input buffer memory 201 receives ejection data for ejecting ink 19 droplets from an external information processing apparatus. The ejection data includes data representing the relative position of the ejected portion on the substrate W, data indicating the landing density of the ink 19 droplets on the ejected portion, and nozzles of the droplet ejecting head 13. Data specifying which nozzle 21 in the row is to be driven (ON-OFF). In this case, the discharged portion is a plurality of pixel regions that are arranged in the same direction and have the same color, and a partition wall that partitions the plurality of pixel regions.

  The processing unit 203 sends a position control signal related to the discharge target portion to the scan driving unit 204 from the discharge data stored in the storage unit 202. Upon receiving this control signal, the scanning drive unit 204 sends a position control signal to the first position control unit 14 to move the droplet discharge head 13 in the X-axis direction that is the sub-scanning direction. Further, a position control signal is sent to the second position controller 16 to move the stage 15 holding the substrate W in the Y-axis direction that is the main scanning direction. Accordingly, the droplet discharge head 13 and the substrate W are relatively moved so that the droplet of the ink 19 is discharged from the droplet discharge head 13 to a desired position on the substrate W.

  Further, the processing unit 203 uses 4-bit ejection for each nozzle 21 to indicate data indicating at what landing density the droplets of the ink 19 are ejected from the ejection data stored in the storage unit 202 to the ejected part. It is converted into bitmap data and sent to the head drive unit 205. Also, based on data designating which nozzle 21 in the nozzle row of the droplet discharge head 13 is to be driven (ON-OFF), which of the four pulses of the drive signal generated by the head drive unit 205 described later is selected. A latch (LAT) signal and a channel (CH) signal, which are “timing detection signals” indicating whether a pulse is detected and transmitted, are sent to the head drive unit 205. Upon receiving these control signals, the head driving unit 205 sends an appropriate driving voltage pulse to the droplet discharge head 13 to discharge the ink 19 droplets from the nozzles 21.

  FIG. 4 is a time chart showing drive signals (pulses) sent from the head drive unit to the droplet discharge head. The ejection control unit 20 is different from the droplet ejection head 13 by sending a control signal for selecting one or two of the four pulses of the drive signal generated by the head drive unit 205 to the head drive unit 205. A droplet having a landing diameter is discharged.

  As shown in FIG. 4, the head driving unit 205 can generate a driving signal having an ejection cycle in which the first to fourth pulses are one cycle. The first pulse is a rectangular drive signal having an amplitude between the maximum drive voltage Vp and the minimum drive voltage VL having a different polarity with the reference voltage as Vm. Similarly, the second pulse is a drive signal that swings between the reference voltage Vm and the maximum drive voltage Vp, the third pulse is the same drive signal as the first pulse, and the fourth pulse is between the reference voltage Vm and the intermediate voltage Vn. This is a drive signal that swings at. By applying drive signals having different voltage waveforms to the piezoelectric element 24 in this way, the amount of bending of the diaphragm 25 to which the piezoelectric element 24 is bonded is changed, and the pressure applied to the ink 19 filled in the discharge chamber 22 is changed. Thus, it is possible to change the amount of ejected droplets.

  When ejecting a droplet having a small dot landing diameter based on the ejection data, the ejection control unit 20 sets the 4-bit bitmap data to (0100) and applies a drive signal (pulse) to the desired nozzle 21. Is sent to the head drive unit 205. The head driving unit 205 applies the second pulse selected by the bitmap data (0100) to the piezoelectric element 24 corresponding to the desired nozzle 21. Similarly, if the bitmap data is (1000), the first pulse is selected and a droplet having a medium dot landing diameter is ejected. Then, the bitmap data is set to (1010), the first pulse and the third pulse are selected, and the first pulse is applied by the latch signal to eject the droplet that becomes the middle dot, and then the same position from the same nozzle 21. Then, by applying the third pulse again by the channel signal, the medium dot is made a large dot which is overlaid twice. If the bitmap data is (0001), the fourth pulse is selected. Even when the fourth pulse is applied to the piezoelectric element 24, no droplet is ejected (no dots). In the fourth pulse, the intermediate voltage Vn is set so that the vibration plate 25 to which the piezoelectric element 24 is bonded pressurizes the ink 19 to such an extent that the meniscus of the ink 19 in the nozzle 21 is slightly vibrated. Therefore, if the nozzle 21 that does not eject the ink 19 is selected and the fourth pulse is applied to the corresponding piezoelectric element 24, the meniscus of the ink 19 of the corresponding nozzle 21 is slightly vibrated to prevent the nozzle 21 from being clogged. it can.

  As described above, if 1-bit data is assigned to each drive pulse (drive signal) to form ejection data, only a desired drive pulse can be selected according to the value of each bit. The 1-bit data assigned for each drive pulse is a “pulse selection signal”. If the fourth pulse is omitted, a 3-bit, such as (000) for no dots, (010) for small dots, (100) for medium dots, and (101) for large dots with two medium dots. What is necessary is just to translate into discharge data.

  Next, a color filter film forming method and a color filter using the film forming apparatus 10 will be described with reference to FIGS. FIG. 5 is a schematic view showing a color filter film forming method and a color filter according to this embodiment. FIG. 5A is a schematic plan view showing the landing state of the discharged droplet, FIG. 5B is a schematic plan view showing a state where the landed droplet is spread, and FIG. The schematic perspective view which represented the same figure (b) in three dimensions, and the same figure (d) are schematic plan views which show the color layer after drying. FIG. 4E is a schematic sectional view of the color filter. In addition, in order to explain in an easy-to-understand manner, the scale is illustrated at a scale different from the actual dimensions.

  As shown in FIG. 5, in the color filter film forming method of the present embodiment, a functional liquid (ink 19) in which a color material is dispersed in a pixel area 2 formed on a substrate W is ejected as droplets to form a pixel area. In this method, the color layer 8 is formed on the surface 2. A partition formation process for forming the liquid-repellent partition wall 1 for partitioning the pixel region 2 on the substrate and a discharge process for discharging the ink 19 as droplets are provided, and the discharge processes are the same arranged in the same direction. The ink 19 is ejected as droplets so as to land on the plurality of pixel regions 2 that become the color layers and the partition wall 1 that partitions the plurality of pixel regions 2.

  As shown in FIG. 5A, in the color filter A of the present embodiment, rectangular pixel regions 2 are arranged on the substrate W in a plan view lattice shape. The color layer 8 is a so-called stripe type color filter in which at least three color layers of R (red), G (green), and B (blue) are formed in parallel in the same direction.

(Partition forming process)
A photosensitive resin film having a liquid repellency is coated on the substrate W to a height of about 2 to 3 μm to form a photosensitive resin film. Then, a partition wall portion 1 is formed by exposure and development so that a desired pixel region 2 can be partitioned by a photolithography method. The partition wall portion 1 may be transparent, but preferably black having a light-shielding property, and as the black photosensitive resin material, for example, a fluororesin such as hexafluoropolypropylene exhibiting liquid repellency, and a negative transparent acrylic photosensitive material It includes a resin (photoresist) and a black inorganic pigment such as carbon black or a black organic pigment.

First, a thin-film light-shielding layer having a light-shielding property such as Cr (chromium) or Cr ₂ O ₃ (chromium oxide) or a light-reflective thin-film light-shielding layer such as Al (aluminum) or Al alloy is provided on the substrate W. For example, a film having a thickness of 0.1 to 0.15 μm is formed, and an opening is formed by etching using a photolithography method so that light enters the pixel region 2. The partition wall 1 may be formed on the light shielding layer so as to surround the pixel region 2.

(Discharge process)
The substrate W on which the partition wall 1 is formed as described above is held on the stage 15 of the film forming apparatus 10 by a method such as vacuum suction. Then, the ink 19 that is colored red (R) is supplied from the ink tank 11 in which the ink 19 is stored to the droplet discharge head 13 mounted on the carriage 17 via the tube 18. As a result, the ink 19 is filled in the ink cavity 27 and the discharge chamber 22.

  Next, as shown in FIG. 5A, the droplet discharge head 13 and the substrate are arranged so that the nozzle rows of the droplet discharge head 13 face the pixel regions 2 arranged in the same direction and having the same color in parallel. R is moved relative to W. At this time, the droplet discharge head 13 is positioned by moving the carriage 17 in the X-axis direction by the first position control unit 14. The substrate W is positioned by moving the stage 15 in the Y-axis direction by the second position control unit 16. In this position control for positioning, the processing unit 203 of the discharge control unit 20 sends a control signal to the scan drive unit 204 based on the discharge data, and the position control signal is sent from the scan drive unit 204 to the first position control unit 14 and the first position control unit. This is done by sending it to the 2-position controller 16. The arrows in the figure indicate the main scanning direction of the substrate W. That is, the droplet discharge head 13 relatively moves in a direction orthogonal to the direction in which the plurality of pixel regions 2 having the same color are arranged.

  Then, the processing unit 203 sends a pulse selection signal and timing detection signal, which are bitmap data based on the ejection data, to the head driving unit 205, and the droplets 4 are made identical at equal intervals from the nozzles 21 of the droplet ejection head 13. The ink is discharged to a plurality of pixel regions 2 that are arranged in the direction and have the same color, and a partition wall 1 that partitions the plurality of pixel regions 2.

  The landed droplets 4 spread out and merge with each other to form a belt-like ink layer 5 shown in FIG. As shown in FIG. 5C, the ink layer 5 is sufficiently raised from the height of the partition wall 1 due to surface tension because the partition wall 1 has liquid repellency.

(Drying process)
Next, the ink layer 5 is dried by heating to remove the solvent component in the ink 19. The drying process can be performed by lamp annealing, for example, in addition to a process using a hot plate or an electric furnace for heating the substrate W. The solvent evaporates by this drying process, and the partition wall 1 has liquid repellency as shown in FIG. 5D, so that the ink 19 is transferred from the region 3 where the ink layer 5 was formed to each pixel. When the evaporation of the solvent is completed within the region 2, the color layer 8 (8 </ b> R) in which the solid color material spreads throughout the pixel region 2 is formed with a uniform film thickness.

  Similarly, an ejection process and a drying process for ejecting droplets 4 from the droplet ejection head 13 filled with green (G) colored ink 19, and a liquid filled with blue (B) colored ink 19. The discharge process of discharging the droplets 4 from the droplet discharge head 13 and the drying process are repeated. As a result, the color layers 8R, 8G, and 8B of the color filter A as shown in FIG.

  An overcoat layer (protective layer) 9 is formed to protect these color layers 8R, 8G, and 8B and to flatten the surface thereof. The overcoat layer 9 may be formed using a transparent resin by a coating method such as a spin coating method, a roll coating method, a ripping method, or an ink jet method.

  In this case, as the substrate W, a transparent glass substrate or a plastic resin plate or film can be used.

  In addition, as a colored ink ejected by an ink jet method, for example, an inorganic pigment as a coloring material is dispersed in a polyurethane oligomer or a polymethyl methacrylate oligomer. Thereafter, cyclohexanone and butyl acetate as low-boiling solvents and butyl carbitol acetate as high-boiling solvents are added, and a non-ionic surfactant is added as a dispersant to prepare a colored ink whose viscosity is adjusted to a predetermined range. Can be used.

  Next, another ejection pattern of the ink 19 droplets in the ejection process will be described with reference to FIGS. 6A to 6E are schematic plan views showing discharge patterns of droplets discharged to the pixel region and the partition wall.

  FIG. 6A or 6B is a schematic plan view showing a discharge pattern in which the volume of a droplet discharged to the partition wall is changed. As shown in FIG. 6 (a) or (b), this discharge pattern is based on at least one liquid droplet 4a (or 4b) discharged on the partition wall portion 1 with respect to the liquid droplet 4 discharged to the pixel region 2. The amount of discharge (volume) is different. In FIG. 9A, for example, bitmap data (1010) is sent as a pulse selection signal from the processing unit 203 of the ejection control unit 20 to the head driving unit 205, and large dots are ejected. In FIG. 6B, bitmap data (1000) is sent in the same manner, and medium dots are ejected. In this way, the amount (volume) of the droplets 4a or 4b that land on or in the vicinity of the partition wall 1 can be increased.

  FIG. 6C is a schematic plan view showing a discharge pattern in which the number of droplets that land on the partition wall is changed. As shown in FIG. 6C, this discharge pattern is such that the number of droplets 4 that land on the pixel region 2 and the number of droplets 4 that land on the partition wall 1 are different per unit area. is there. First, the droplet 4 is ejected at a position where the droplet ejection head 13 and the substrate W face each other so that the droplet 4 reaches the partition wall 1. In the same manner as in FIG. 5A described above, the droplets 4 are equally spaced on the plurality of pixel regions 2 arranged in the same direction and having the same color, and on the partition wall 1 partitioning the plurality of pixel regions 2. To discharge. Further, the substrate W is moved in the main scanning direction and discharged so that the liquid droplets 4 land on the partition wall portion 1 as in the previous stage. In this way, a large number of droplets 4 can be landed on the partition wall 1 that separates adjacent pixel regions 2 that have the same color layer.

  FIGS. 6D and 6E are schematic plan views showing a discharge pattern for discharging so as to land on a partition wall portion located at a corner (corner portion) of the pixel region. First, the droplet 4 is discharged to the partition wall 1 a located at the corner of the pixel region 2. Subsequently, droplets 4 are ejected at equal intervals to a plurality of pixel regions 2 that are arranged in the same direction and have the same color, and a partition wall 1 that partitions the plurality of pixel regions 2. Further, the substrate W is moved in the main scanning direction and discharged so that the droplets 4 land on the partition wall 1a located at the corner of the pixel region 2 as in the previous stage. In this way, more droplets 4 can be landed on the partition wall 1a located at the corner of the pixel region 2. In addition, the droplet 4 that has landed on the partition wall 1 a spreads out wet so as to fill the corner of the pixel region 2.

  As described above, by increasing the landing density of the liquid droplets discharged to the partition wall 1, a factor that inhibits the liquid from spreading near the partition wall 1 in the pixel region 2 (for example, a liquid repellent partition wall). Even if there is a residue in the portion 1), the color layer 8 can be formed by discharging droplets that compensate for the residue to the partition wall portion 1. The landing density of the droplets discharged to the partition wall 1 does not necessarily have to be high. If the droplets 4 land on the partition wall 1 even a little, the landed droplets 4 penetrate into the pixel region 2 from the partition wall 1 and spread, so that problems such as white spots due to film thickness unevenness can be reduced. it can.

  7A to 7C are schematic plan views showing ejection patterns for ejecting droplets so as to land on the boundary between the pixel region and the partition wall.

  FIG. 7A shows droplets at equal intervals so as to land on the boundary between the pixel region 2 and the partition wall portion 1 along the long side direction of the plurality of pixel regions 2 of the same color arranged in the same direction. 4 is discharged. In this case, there is a possibility that the amount of droplets 4 ejected at equal intervals with respect to the size of the pixel region 2 increases and enters the pixel region 2 of another color in parallel. In such a case, as shown in FIG. 6B, the nozzles 21 ejected from the processing unit 203 are selected (ON-OFF) so as to be thinned out, and the droplets 4 that land on the boundary portion face each other are equal. It discharges in a plover shape so that it may become an interval. In this way, it is possible to form a uniform color layer 8 while suppressing unnecessary discharge of droplets. Further, as shown in FIG. 3C, it is possible to land a liquid droplet 4b (medium dot) having a large amount of liquid by the partition wall portion 1 positioned at the corner portion of the pixel region 2.

  As shown in FIGS. 7A to 7C, these ejection patterns are ejected so that the liquid droplets are wet and spread along the partition wall 1 that partitions the pixel region 2. Even if there is a factor that prevents the liquid droplet from getting wet and spread in the vicinity of the partition wall portion 1 or the corner portion of the pixel region 2 (for example, when there is a residue of the partition wall portion 1 having liquid repellency), it is positive. In addition, the color layer 8 can be formed by discharging droplets at the boundary.

  As a matter of course, the pitch of the partition walls 1 that partitions the adjacent pixel regions 2 with respect to the pitch of the nozzles 21 of the droplet discharge head 13 is not necessarily an integral multiple. In the present invention, if a part of the ejected liquid droplets hits the partition wall 1 or lands on the vicinity of the partition wall 1, the effect is sufficiently obtained. Furthermore, a place where the droplet does not hit the partition wall 1 may be generated at a low rate. Even in this case, since the functional liquid wets and spreads to the corners of the pixel region 2 where the liquid droplets are applied to the partition wall 1, problems such as white spots due to uneven film thickness can be reduced.

  Next, a method for manufacturing an electro-optical device incorporating a color filter formed by the color filter film forming method will be described with reference to FIGS.

  FIG. 8 is a schematic cross-sectional view showing the structure of a passive liquid crystal display device as an electro-optical device. The liquid crystal display device 100 according to this embodiment is equipped with auxiliary elements such as a liquid crystal driving IC 121, wirings 122, a light source (backlight) 170, a support (not shown), and the like, so that a transmissive liquid crystal as a final product A display device is configured.

  The liquid crystal display device 100 of this embodiment incorporates the color filter A described above. In the present embodiment, the color filter A will be briefly described. FIG. 8 shows a main part of the transmissive liquid crystal display device 100. The liquid crystal display device 100 includes a color filter substrate 102 as a color filter A and a counter substrate 101 made of a glass substrate or the like through a sealant 110. The liquid crystal layer 103 made of STN (Super Twisted Nemtic) liquid crystal or the like is sealed in the gap.

  The color filter substrate 102 includes a substrate 111, a light shielding layer 112 formed on the substrate 111, a partition wall 113 and a color layer 8, and a protective layer (overcoat covering the light shielding layer 112, the partition wall 113 and the color layer 8. Layer) 114. The color layer 8 includes each color of a red (R) color layer 8R, a green (G) color layer 8G, and a blue (B) color layer 8B. Below the protective layer 114 (on the liquid crystal layer 103 side), a plurality of electrodes 106 are formed in stripes at predetermined intervals, and further below (on the liquid crystal layer 103 side), an alignment film 109 is formed.

  Similarly, a plurality of electrodes 105 extending in a direction orthogonal to the electrodes 106 of the color filter substrate 102 are formed in stripes at predetermined intervals on the surface of the counter substrate 101 facing the color filter substrate 102. An alignment film 107 is formed on the (liquid crystal layer 103 side). Each color layer 8 of the color filter substrate 102 is arranged corresponding to the intersection position (display pixel) between the electrode 105 and the electrode 106. Further, polarizing plates (not shown) are provided on the outer surface sides of the counter substrate 101 and the color filter substrate 102, respectively. In addition, a spacer 104 is interposed between the substrates to keep a distance (referred to as a cell gap) constant within the substrate surface. The electrodes 105 and 106 are formed by forming a transparent conductive material such as ITO (Indium Tin Oxide) at a predetermined interval in a plan view stripe shape.

  In the liquid crystal display device 100, the color filter A is arranged on the upper side (observer side), but the color filter A can also be arranged on the lower side. For example, as described above, the light-shielding layer 112 is a light-reflective light-shielding layer, and a part thereof is formed so as to partially open corresponding to the pixel region 2. When the color filter A is disposed on the lower side and light from the light source 170 is incident from behind the substrate 111, the light is transmitted through the opening and functions as a transmission type. On the other hand, when external light enters from above the substrate 111 and is reflected by the light-reflective light-shielding layer portion and the reflected light passes through the color layer 8, it functions as a reflective type.

  FIG. 9 is a schematic exploded perspective view showing an active TFT (Thin Film Transistor) liquid crystal display device as an electro-optical device. A transmissive liquid crystal display device as a final product is mounted on the liquid crystal display device 400 by attaching auxiliary elements such as a liquid crystal driving IC, wiring (all not shown), a backlight 320, and a support (not shown). Is configured. The liquid crystal display device 400 includes a color filter F having the same structure as the color filter A, and the color filter F is disposed on the upper side (observer side). In the present embodiment, the color filter F will be briefly described.

  The liquid crystal display device 400 is attached to the color filter F and the element substrate 402 arranged so as to face each other, a liquid crystal layer (not shown) sandwiched therebetween, and the upper surface side (observer side) of the color filter F. The polarizing plate 403 and the polarizing plate (not shown) attached to the lower surface side of the element substrate 402 are mainly configured.

  The color filter F includes a counter substrate 405 made of glass having a plate thickness of about 300 μm (0.3 mm), for example, and a light shielding layer and a partition wall having a structure similar to that of the color filter A are provided below the counter substrate 405. And a color layer 8 and a protective layer (overcoat layer) 407 are sequentially formed. A driving electrode (entire electrode) 408 is formed below the protective layer 407 of the color filter F. Note that in the actual liquid crystal display device 400, an alignment film is provided on the liquid crystal layer side so as to cover the electrode 408, but this is omitted in FIG. 9 and on a pixel electrode 411 (described later) on the element substrate 402 side on the opposite side. Although an alignment film is provided, it is omitted in FIG. 9 and description of the alignment film is also omitted.

  An insulating layer 410 is formed on the element substrate 402, and a thin film transistor T as a TFT type switching element and a pixel electrode 411 are formed on the insulating layer 410. A scanning line 412 and a signal line 413 are formed in a matrix on the insulating layer 410 formed over the element substrate 402, and a pixel electrode 411 is formed in each region surrounded by the scanning line 412 and the signal line 413. Is provided. A thin film transistor T is incorporated in a corner portion of each pixel electrode 411 and a portion between the scanning line 412 and the signal line 413. By applying a signal to the scanning line 412 and the signal line 413, the thin film transistor T is turned on / off to be a pixel. It is comprised so that the electricity supply control to the electrode 411 can be performed. In this embodiment, the electrode 408 formed on the opposite color filter F side is a full-surface electrode that covers the entire pixel electrode formation region. Note that there are various TFT wiring circuits and pixel electrode shapes, and in this embodiment, the one shown in FIG. 9 is exemplified, but the present invention can also be applied to a liquid crystal display device having other shapes of TFTs. Of course.

  FIG. 10A is a schematic exploded perspective view of a plasma display device as an electro-optical device. As shown in FIG. 10A, the display device 500 includes a color filter 505 having a structure similar to that of the color filter A, and the color filter 505 is arranged on the observation side. The display device 500 is generally configured by a glass substrate 501 and a color filter 505 that are disposed so as to face each other, and a discharge display unit 510 formed therebetween. The discharge display unit 510 is formed by arranging a plurality of discharge chambers 516 vertically and horizontally, and among the plurality of discharge chambers 516, three discharge chambers 516 are paired to constitute one display pixel. . Accordingly, each discharge chamber 516 is arranged so as to correspond to each color layer 8 of the color filter 505.

  Address electrodes 511 are formed in stripes at predetermined intervals on the upper surface of the glass substrate 501, and a dielectric layer 519 is formed so as to cover the address electrodes 511 and the upper surface of the glass substrate 501. Further, a plurality of partition walls 515 are formed on the dielectric layer 519 so as to be positioned between the address electrodes 511 and 511 along the address electrodes 511. The partition wall 515 is also partitioned at a predetermined interval in a direction perpendicular to the address electrode 511 at a predetermined position in the longitudinal direction (not shown), and is basically adjacent to the left and right sides of the address electrode 511 in the width direction. A rectangular region is formed that is partitioned by the partition wall and the partition wall extending in a direction orthogonal to the address electrode 511. Then, discharge chambers 516 are formed so as to correspond to these rectangular regions, and one pixel is formed by three pairs of these rectangular regions. In addition, a phosphor 517 is formed inside a rectangular region partitioned by the partition 515.

  Next, on the color filter 505 side, a plurality of display electrodes 512 are formed in stripes at predetermined intervals in a direction orthogonal to the previous address electrodes 511. Further, a dielectric layer 513 is formed so as to cover them, and a protective film 514 made of MgO or the like is further formed. Although the structure of the color filter 505 is different from the color filter A described above in terms of the planar shape and area of the color layer 8, the relationship between the thickness and arrangement of the color layer 8, the light shielding layer and the partition wall Since the structure partitioned by the part is the same structure, detailed description is omitted.

  FIG. 10B is a schematic cross-sectional view of the main part showing the structure of the plasma display device. A glass substrate 501 and a color filter 505 are attached to each other so that the address electrodes 511 and the display electrodes 512 are opposed to each other so as to be orthogonal to each other, and the glass substrate 501, the partition wall 515, and the protective film 514 formed on the color filter 505 side A discharge chamber 516 is formed by evacuating a space portion surrounded by and enclosing a rare gas. Note that two display electrodes 512 formed on the color filter 505 side are formed so as to be arranged two by two for each discharge chamber 516. In FIG. 5B, the address electrodes 511 and the display electrodes 512 that are opposed to each other with the discharge chamber 516 interposed therebetween are arranged in parallel so that they can be easily understood in the drawing. As shown in FIG. 10 (a), they are arranged so as to intersect 90 °.

  Further, the address electrode 511 and the display electrode 512 are connected to a power supply (not shown), and by energizing each electrode, the discharge display unit 510 at a necessary position causes the phosphor to emit light to emit white light, and this light is emitted from the color filter. The colored light is transmitted through 505 and is mixed with colored light from other pixels to form a color image.

  Next, a method for manufacturing an electronic device according to the present invention will be described with reference to FIGS. The electro-optical device 1000 such as the above-described passive liquid crystal display device 100 including the color filter A, the active liquid crystal display device 400 including the color filter F, and the plasma display device 500 including the color filter 505 includes: It can be used for display portions of various electronic devices. FIG. 11 is a perspective view showing the configuration of a mobile (or notebook) personal computer as an electronic apparatus incorporating the electro-optical device of the present invention. In this figure, a personal computer 1100 includes a main body 1104 having a keyboard 1102 and a display unit 1106. The display unit 1106 is supported by the main body 1104 via a hinge structure so as to be rotatable. Yes. The display unit 1106 incorporates an electro-optical device 1000.

  FIG. 12 is a perspective view showing a configuration of a cellular phone (including PHS) as an electronic apparatus incorporating the electro-optical device of the present invention. In this figure, a cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, a mouthpiece 1206, and an electro-optical device 1000 incorporated in a display portion.

  FIG. 13 is a perspective view showing the configuration of a digital still camera as an electronic apparatus incorporating the electro-optical device of the present invention. In this figure, connection with an external device is also simply shown. Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an imaging device such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.

  On the back of a case (body) 1302 in the digital still camera 1300, an electro-optical device 1000 is incorporated in a display unit and configured to display based on an imaging signal from a CCD, and a finder that displays a subject as an electronic image. Function as. A circuit board 1308 is installed inside the case. The circuit board 1308 is provided with a memory that can store (store) an imaging signal.

  A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side of the case 1302 (on the back side in the illustrated configuration). When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory of the circuit board 1308.

  In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the data communication input / output terminal 1314 as necessary. Further, the imaging signal stored in the memory of the circuit board 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation.

  In addition to the above-described personal computer (mobile personal computer), mobile phone, and digital still camera, the electronic device includes, for example, a television, a video camera, a viewfinder type, a monitor direct-view type video tape recorder, a lap Top-type personal computer, car navigation system, pager, electronic notebook (including communication function), electronic dictionary, calculator, electronic game device, word processor, workstation, video phone, security TV monitor, electronic binoculars, POS terminal, touch panel Equipment (for example, cash dispensers of financial institutions, automatic ticket vending machines), medical equipment (for example, electronic thermometers, blood pressure monitors, blood glucose meters, electrocardiogram display devices, ultrasonic diagnostic devices, endoscope display devices), fish detection Machines, various measuring instruments, instruments (for example, Gages for vehicles, aircraft, and ships), a flight simulator, various monitors, and a projection display such as a projector.

  The color filter film forming method and film forming apparatus, electro-optical device, and electronic device manufacturing method according to the present invention have been described above with reference to the illustrated embodiments. However, the present invention is not limited thereto. Each part constituting the color filter can be replaced with any part capable of performing the same function. Moreover, arbitrary components may be added.

The effect of this embodiment is as follows.
(1) In the color filter film forming method of the present embodiment, the ejection step includes a plurality of pixel regions 2 arranged in the same direction and having the same color, and a partition wall 1 that partitions the plurality of pixel regions 2. The ink 19 is ejected as droplets so as to land on the surface. Therefore, the ink 19 that has landed on the liquid-repellent partition wall 1 wets so as to enter the pixel region 2 from the partition wall 1, and merges with the ink 19 that has landed in the pixel region 2 and spreads wet. An ink layer 5 that covers the inside uniformly is formed. Further, when the ink 19 lands on each of the plurality of pixel regions 2 having the same color and the partition wall 1 partitioning the pixel region 2, the ink layer 5 in which the inks 19 of the same color are wet and spread in the same direction is combined. A film can be formed. If the ink layer 5 thus formed is dried and the solvent component in the ink 19 is removed, the color filter A with little film thickness unevenness in the same color layer 8 can be formed.
(2) In the ejection step, since the ink 19 is ejected at equal intervals, the ink 19 of the same color lands in the same direction without unevenness, and the color filter A with less unevenness in film thickness can be formed.
(3) In the ejection step, the ink 19 is ejected so as to land on the partition wall 1a located at the corner (corner) of the pixel region 2. Therefore, even when a part of the ink 19 that has landed in the pixel region 2 reaches the partition wall 1 and the advancing contact angle decreases and does not spread to the corner of the pixel region 2, the partition wall 1 a having liquid repellency. Since the ink 19 that has landed is wet so as to enter the pixel region 2, the ink 19 can be reliably distributed to the corner (corner portion) of the pixel region 2.
(4) In the ejection step, the ink 19 is landed on the boundary between the plurality of pixel regions 2 arranged in the same direction and having the same color and the liquid repellent partition wall 1 partitioning the pixel region 2. It is ejected as a droplet. Since the droplets that have landed on the boundary portion spread wet along the boundary portion, it is possible to prevent the ink 19 from being insufficiently wet and spread at the boundary portion. Therefore, it is possible to form the color filter A in which the ink 19 has spread to every corner of the pixel region 2.
(5) In the ejection step, the ink 19 is ejected while changing the landing density of the droplets ejected to the partition wall 1. As a method of changing the landing density of the droplets, the volume of at least one droplet 4a (or 4b) discharged to the partition wall portion 1 is larger than the volume of the droplet 4 discharged to the pixel region 2. To discharge. Or it discharges so that the number of the droplets 4 which land on the partition part 1 may increase per unit area. According to this, since more ink 19 gets wet so as to enter the pixel region 2 from the partition wall portion 1, there is a residue when the partition wall portion 1 is formed in the vicinity of the partition wall portion 1 in the pixel region 2, and landing Even in the case where the droplets 4 are prevented from spreading and getting wet, film formation unevenness in the pixel region 2 can be prevented. In addition, since it is only necessary to change the landing density of the droplets discharged to the partition wall 1, it is possible to reduce waste and reduce the amount of ink 19 compared to changing the landing density of all the discharged droplets 4. Thus, the ink 19 can be spread over the plurality of pixel regions 2.
(6) Since the color filter A is formed using the film formation method of the color filter of the present embodiment, white spots due to film formation unevenness (insufficient wetness) and film thickness unevenness of the same color layer 8 are small. Color filter A can be used.
(7) In the color filter deposition apparatus 10, the first position control unit 14 and the second position control unit 16 include a plurality of pixel regions 2 arranged in the same direction and having the same color, and the plurality of pixel regions 2. The droplet discharge head 13 and the substrate W are moved relative to each other so that the droplets of the ink 19 land on the partition wall 1 that divides the ink. Since the droplet discharge head 13 discharges the ink 19 as droplets on the substrate W at equal intervals, the ink 19 can be uniformly discharged and a plurality of the same color layers 8 made of the ink 19 can be formed. . Further, the ejection control unit 20 performs control so that the landing density of the droplets discharged to the partition wall 1 is higher than the landing density of the droplets discharged to the pixel region 2. Accordingly, when a large amount of liquid droplets land on the partition wall 1, a large amount of ink 19 flows from the partition wall 1 to the pixel region 2, and the ink 19 spreads to every corner of the pixel region 2. A can be deposited. Compared with the case where the ink 19 is intended to land only on the pixel region 2, it is possible to perform simple droplet ejection control without requiring high landing accuracy.
(8) The color filter film forming apparatus 10 includes the droplet discharge head 13 so that the nozzle array direction of the droplet discharge head 13 is parallel to the same direction in which a plurality of pixel regions 2 having the same color layer are arranged. Since the droplets 4 are ejected by relatively moving the substrate and the substrate W, the droplets 4 can be efficiently ejected to the plurality of pixel regions 2 and the partition walls 1.
(9) The electro-optical device 1000 (passive type liquid crystal display device 100, active type liquid crystal display device 400, plasma type display device 500) is less susceptible to white spots due to film formation unevenness, and is a film of the same color layer 8 Since the color filter A of this embodiment with little thickness unevenness is incorporated, the electro-optical device 1000 having high display quality with little color tone unevenness and contrast unevenness can be obtained.
(10) The electronic apparatus (personal computer 1100, mobile phone 1200, digital still camera 1300) incorporates the electro-optical device 1000 having a high display quality with little color tone unevenness and contrast unevenness, and thus high quality with good appearance. The electronic device can check information such as an image with high image quality.

Modifications other than the present embodiment are as follows.
(Modification 1) The color filter film forming apparatus 10 has a plurality of droplet discharge heads 13 corresponding to each color of the ejected ink 19 mounted on the carriage 17 and the ink tank 11 also has the ink 19 for each color. You may provide multiple so that it may store. According to this, it is possible to form a film with all the ink types necessary for forming the color filter with one film forming apparatus 10.
(Modification 2) The nozzle row of the droplet discharge head 13 is not limited to one row. For example, another nozzle row may be increased so that there are two rows shifted by a pitch of 70 μm. According to this, droplets can be discharged at a finer pitch of 70 μm.
(Modification 3) The nozzles 21 of the droplet discharge head 13 are not limited to being arranged at equal intervals. If the nozzle 21 corresponding to the position of the pixel region 2 that ejects the droplet 4 and the partition wall 1 is selected and the droplet 4 is ejected, film thickness unevenness is caused in the plurality of pixel regions 2 that are the same color layer in the same direction. The color layer 8 can be formed in a reduced manner.
(Modification 4) The droplet discharge head 13 is not limited to a piezoelectric inkjet head. An electrostatic system in which the ink 19 filled in the ejection chamber 22 is pressurized and ejected as droplets by an electrostatic actuator having an electromechanical conversion element composed of a diaphragm and an electrode disposed opposite to the diaphragm. An inkjet head may be used. Alternatively, a so-called bubble-type inkjet which has a heating element in contact with the ink 19, generates bubbles in the ink 19 heated by the heating element, and pressurizes the ink 19 filled in the discharge chamber 22 by the bubbles and discharges it as droplets. It may be a head.
(Modification 5) In the ejection step, the nozzle rows of the droplet ejection head 13 may be ejected in a direction intersecting the plurality of pixel regions 2 having the same color arranged in the same direction in a stripe shape. In this way, a plurality of columns of a plurality of pixel regions 2 having the same color can be formed simultaneously. Further, the droplet discharge head 13 and the substrate W are moved relative to each other so as to face the partition wall 1 that partitions the adjacent pixel region 2 regardless of the size of the arrangement pitch of the pixel regions 2, and the partition wall 1 The droplet 4 can be discharged on the top.
(Modification 6) The shape of the pixel region 2 is not limited to a rectangular shape in plan view, but is, for example, a quadrangle such as a square, a trapezoid, a parallelogram (diamond), a hexagon, or an oval shape. Etc. Further, the shape of the portion facing the pixel region 2 in the partition wall 1 may be, for example, a waveform such as a sine curve, a convex shape, or a fine radius (r).
(Modification 7) The arrangement of the pixel regions 2 is not limited to a stripe shape. If the pixel regions 2 having the same color layer are arranged in the same direction, the film forming method of the color filter according to the present embodiment is used even in a mosaic shape (pixel regions of the same color in the oblique direction are arranged). It is possible to form a film by discharging droplets on the same extension line.
(Modification 8) The arrangement of the pixel regions 2 is not limited to a stripe shape. It suffices if there is a portion in which a plurality (two or more) of pixel regions 2 having the same color layer are arranged in the same direction.

The technical idea grasped from this embodiment and the modification is as follows.
(1) In the ejection step, a colored ink liquid in which a color material is dispersed in a plurality of pixel regions that are the same color layer arranged in the same direction and a liquid repellent partition that separates adjacent pixel regions A film forming method of a color filter that ejects droplets so as to land at equal intervals.
(2) A color filter film forming method in which at least a part of the droplets ejected in (1) land on the partition wall.
(3) In the ejection step, a coloring material is dispersed in a boundary portion between a plurality of pixel regions that are the same color layer arranged in the same direction and a liquid repellent partition that separates the adjacent pixel regions. A film forming method of a color filter that ejects ink droplets so as to land in a plover arrangement.

FIG. 2 is a schematic perspective view showing the main structure of the color filter film forming apparatus according to the embodiment. (A) The schematic perspective view which shows the structure of a droplet discharge head, (b) The schematic sectional drawing which shows the structure of a droplet discharge head. The block diagram which shows the electrical structure with each part relevant to a discharge control part and a discharge control part. 4 is a time chart showing drive signals (pulses) sent from a head drive unit to a droplet discharge head. (A)-(e) The schematic which shows the film-forming method of a color filter, and a color filter. (A)-(e) The schematic plan view which shows the discharge pattern of the droplet discharged to a pixel area | region and a partition part. (A)-(c) The schematic plan view which shows the discharge pattern which discharges a droplet so that it may land on the boundary part of a pixel area | region and a partition part. FIG. 3 is a schematic cross-sectional view illustrating a structure of a passive liquid crystal display device as an electro-optical device. 1 is a schematic exploded perspective view showing an active TFT liquid crystal display device as an electro-optical device. 1A is a schematic exploded perspective view showing a plasma display device as an electro-optical device, and FIG. 2B is a schematic cross-sectional view of a main part showing the structure of the plasma display device as an electro-optical device. The perspective view which shows the structure of the mobile type (or notebook type) personal computer as an electronic device. The perspective view which shows the structure of the mobile telephone (PHS is also included) as an electronic device. The perspective view which shows the structure of the digital still camera as an electronic device.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Partition part, 2 ... Pixel area | region, 4 ... Droplet, 8 ... Color layer, 10 ... Color filter film-forming apparatus, 13 ... Droplet discharge head as a droplet discharge part, 14 ... 1st as arrangement means Position control unit, 16 ... second position control unit as arrangement means, 19 ... ink as functional liquid, 20 ... discharge control unit, 100 ... passive liquid crystal display device as electro-optical device, 400 ... electro-optical device Active type liquid crystal display device, 500 ... Plasma type display device as electro-optical device, 505 ... Color filter, 1000 ... Electro-optical device, 1100 ... Mobile type (or notebook type) personal computer as electronic device, 1200 A mobile phone as an electronic device, 1300 a digital still camera as an electronic device, A a color filter, and F a color filter.

Claims (1)

A color layer is formed in a plurality of pixel regions on the substrate, and the plurality of pixel regions includes a first pixel region , a second pixel region arranged in the same direction as a short side direction of the first pixel region, and A third pixel region, wherein the first pixel region, the second pixel region, and the third pixel region have the color layers of different colors, and the second pixel region is the first pixel A color filter film forming method sandwiched between a region and the third pixel region,
A partition wall forming step of forming a liquid repellent partition wall partitioning the plurality of pixel regions on the substrate;
A discharge step of discharging a functional liquid in which a color material is dispersed in the plurality of pixel regions as droplets,
In the discharging step, when discharging the functional liquid as the droplets to the second pixel region,
Discharging the droplets at equal intervals to a first landing position located at a boundary portion between the partition wall and the second pixel region located between the first pixel region and the second pixel region;
At the boundary between the partition wall located between the third pixel region and the second pixel region and the second pixel region, and at the second landing position that is a staggered arrangement with the first landing position, A method for forming a color filter, wherein the droplets are ejected at equal intervals .

Images