JP2006058711A - Color filter substrate, manufacturing method for color filter substrate, electrooptical device and electronic device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a color filter substrate capable of obtaining a bright image free from unevenness and having high utilization efficiency of light, and a manufacturing method for the color filter substrate, an electrooptical device and electronic device. <P>SOLUTION: The color filter substrate 10 has base substance 10A, filter layers 111FR, 111FG and 111FB formed by discharging and imparting liquid materials for forming a color filter respectively containing a colorant as droplets from a nozzle at parts corresponding to respective pixels on the base substance 10A, and a protective film 20 formed on the filter layer and covering over the filter layer. The bonding surfaces of the protective film 20 and the respective filter layers are respectively formed to have concave shape made concave to the filter layer sides, and the protective film 20 is composed of material having a higher refractive index than the filter layer, whereby the protective layer has the function of a convex lens. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a color filter substrate, a method for manufacturing a color filter substrate, an electro-optical device, and an electronic apparatus.

It is known to apply a liquid material such as ink to each section on a substrate on which a section to be a color element (pixel) is formed using an ink jet apparatus (by an ink jet method). For example, it is known to form filter elements of a color filter substrate using an ink jet device or light emitting portions arranged in a matrix in a matrix display device.
Further, Patent Document 1 describes a color filter substrate (optical element) in which a microlens made of a convex lens has a color filter function. This color filter substrate is used as a color filter substrate which is a component of a liquid crystal display device.

However, in the color filter substrate described in Patent Document 1, since the color filter has a lens material in addition to the original color filter constituent material such as a colorant, when improving the characteristics as a color filter, It becomes an obstacle (disadvantage).
In addition, since the convex lens is directly formed by the ink jet method, it is difficult to accurately form the convex surface shape of the lens, and the variation in lens characteristics for each pixel is large. For this reason, brightness unevenness or the like is likely to occur.
Further, since the filter portion also serves as a convex lens, the thickness of the central portion of the filter portion is increased, and the light transmittance is lowered, thereby darkening the image.

Japanese Patent Laid-Open No. 11-2704

  An object of the present invention is to provide a color filter substrate, a method for manufacturing a color filter substrate, an electro-optical device, and an electronic apparatus that can obtain a bright image without unevenness and have high light use efficiency.

Such an object is achieved by the present invention described below.
The color filter substrate of the present invention is formed by discharging and applying a liquid material for forming a color filter containing a colorant as droplets from a nozzle to a base and a portion corresponding to each pixel on the base. A color filter substrate having a filter layer and a protective film formed on the filter layer and covering the filter layer,
The bonding surface between the protective film and each filter layer has a concave shape recessed toward the filter layer, and the protective film is made of a material having a higher refractive index than the filter layer. To do.

  According to the present invention, since the portion (pixel area) corresponding to each pixel of the protective film of the color filter substrate has a function of a convex lens, light can be condensed (converged) by the protective film for each pixel area. it can. As a result, when the color filter substrate is used in an image display device (electro-optical device) such as a liquid crystal display device, a bright image with high contrast can be displayed and light emitted from the backlight. The utilization efficiency of is improved.

In addition, the joint surface between the protective film and each filter layer has a concave shape that is recessed toward the filter layer, and the thickness of the central portion of the filter layer is thin, so that the light transmittance is high. Accordingly, when the color filter substrate is used for an image display device such as a liquid crystal display device, a brighter image can be obtained.
In addition, since the protective film has a function of a convex lens and the filter layer does not need to have a function of a convex lens, the characteristics of the filter layer as a color filter are improved as compared with the case where the filter layer has a function of a convex lens. Is advantageous.

The method for producing a color filter substrate of the present invention includes a base, a filter layer formed on a portion corresponding to each pixel on the base, and a protective film formed on the filter layer and covering the filter layer. A color filter substrate manufacturing method comprising:
A liquid material for forming a color filter containing a colorant is transferred from the nozzle by relatively moving a substrate on which a plurality of sections to be pixels are formed and a droplet discharge means having a nozzle for discharging droplets. Discharging the droplets and applying them to the compartments;
Drying the liquid material for forming a color filter applied to the section so that the surface opposite to the base has a concave shape, and forming the filter layer;
Formed on the filter layer is a protective film that covers the filter layer made of a material having a refractive index higher than that of the filter layer. And a step of performing.

According to the present invention, it is possible to easily and reliably manufacture a color filter substrate in which a portion (pixel region) corresponding to each pixel of the protective film has a function of a convex lens.
In particular, once the surface of the filter layer opposite to the base is formed into a concave shape, and a protective film is formed on it, the convex shape of the protective film (convex lens) compared to the case where a direct convex lens is formed by the inkjet method. Can be formed with high accuracy, thereby reducing variations in lens characteristics for each pixel. As a result, when the color filter substrate is used in an image display device (electro-optical device) such as a liquid crystal display device, a good image without brightness unevenness can be obtained.

  Moreover, since the part corresponding to each pixel of the protective film of the color filter substrate has the function of a convex lens, light can be condensed (converged) by the protective film for each pixel region. As a result, when the color filter substrate is used in an image display device such as a liquid crystal display device, for example, a bright image with high contrast can be displayed and the use efficiency of light emitted from the backlight is improved. To do.

In addition, the joint surface between the protective film and each filter layer has a concave shape that is recessed toward the filter layer, and the thickness of the central portion of the filter layer is thin, so that the light transmittance is high. Accordingly, when the color filter substrate is used for an image display device such as a liquid crystal display device, a brighter image can be obtained.
In addition, since the protective film has a function of a convex lens and the filter layer does not need to have a function of a convex lens, the characteristics of the filter layer as a color filter are improved as compared with the case where the filter layer has a function of a convex lens. Is advantageous.

In the method for producing a color filter substrate of the present invention, in the step of drying the liquid material for forming the color filter, the liquid material for forming the color filter is preferably heated at 50 ° C. or higher.
Thereby, the surface on the opposite side to the base | substrate of a filter layer can be made into a concave shape more reliably.

In the color filter substrate manufacturing method of the present invention, the viscosity of the liquid material for forming the color filter discharged from the nozzle is preferably 20 mPa · S or less.
Thereby, the surface on the opposite side to the base | substrate of a filter layer can be made into a concave shape more reliably.
In the method for producing a color filter substrate of the present invention, in the step of forming the protective film, the substrate and the droplet discharge means are relatively moved so that the liquid material for forming the protective film is discharged from the nozzle. It is preferable that the liquid material for forming the protective film is dried by discharging it as droplets and applying it onto the filter layer.
Thereby, the surface on the substrate side has a convex shape, and a protective film having the function of a convex lens can be easily and reliably formed.

In the method for producing a color filter substrate of the present invention, it is preferable that the liquid material for forming the protective film contains a powdered resin as a lens material.
Thereby, the protective film which has the function of a convex lens can be formed more reliably.
The electro-optical device of the present invention includes a color filter substrate manufactured by the method for manufacturing a color filter substrate of the present invention.
Accordingly, it is possible to display an electro-optical device that is free from image unevenness, has a high contrast, and can display a bright image and has high light use efficiency.

In the electro-optical device of the present invention, the electro-optical device is preferably a liquid crystal display device having a liquid crystal layer.
As a result, a bright image with no image unevenness, high contrast, and high light use efficiency can be realized.
An electronic apparatus according to the present invention includes the electro-optical device according to the present invention.
Accordingly, it is possible to realize an electronic apparatus including an electro-optical device that has no image unevenness, can display a bright image with high contrast, and has high light use efficiency.

Hereinafter, a color filter substrate, a method for manufacturing a color filter substrate, an electro-optical device, and an electronic apparatus according to the invention will be described in detail based on preferred embodiments shown in the accompanying drawings.
In the present embodiment, an embodiment of a color filter substrate, a method for manufacturing the color filter substrate, and a liquid crystal display device (electro-optical device) including the color filter substrate will be described.
In this case, first, a configuration example of a droplet discharge device used in the present embodiment will be described.

(Overall configuration of droplet discharge device)
FIG. 1 is a perspective view showing a configuration example of a droplet discharge device used in the present embodiment.
As shown in FIG. 1, the droplet discharge device 100 includes a tank 101 that holds a liquid material 111, a tube 110, and a discharge scanning unit 102 that is supplied with the liquid material 111 from the tank 101 via the tube 110. Prepare. The discharge scanning unit 102 includes a droplet discharge unit 103 having a plurality of droplet discharge heads 114 mounted on the carriage 105, a first position control device 104 (moving unit) that controls the position of the droplet discharge unit 103, A stage 106 that holds a base 10 </ b> A described later, a second position control device 108 (moving means) that controls the position of the stage 106, and a control means 112 are provided. The tank 101 and the plurality of droplet discharge heads 114 in the droplet discharge means 103 are connected by a tube 110, and the liquid material 111 is supplied from the tank 101 to each of the plurality of droplet discharge heads 114 by compressed air. The

The first position control device 104 moves the droplet discharge means 103 along the X-axis direction and the Z-axis direction orthogonal to the X-axis direction in response to a signal from the control means 112. Further, the first position control device 104 also has a function of rotating the droplet discharge means 103 around an axis parallel to the Z axis. In the present embodiment, the Z-axis direction is a direction parallel to the vertical direction (that is, the direction of gravitational acceleration). The second position controller 108 moves the stage 106 along the Y-axis direction orthogonal to both the X-axis direction and the Z-axis direction in response to a signal from the control unit 112. Further, the second position control device 108 also has a function of rotating the stage 106 around an axis parallel to the Z axis.
The stage 106 has a plane parallel to both the X-axis direction and the Y-axis direction. The stage 106 is configured so that a substrate having a section to which the liquid material 111 is to be applied can be fixed or held on the plane.

As described above, the droplet discharge means 103 is moved in the X-axis direction by the first position control device 104. On the other hand, the stage 106 is moved in the Y-axis direction by the second position control device 108. That is, the first position control device 104 and the second position control device 108 change the relative position of the droplet discharge head 114 with respect to the stage 106 (the substrate 10A held on the stage 106 and the liquid droplet discharge means 103 are relative to each other). Move on).
The control unit 112 is configured to receive ejection data representing a relative position at which the liquid material 111 is to be ejected from an external information processing apparatus. The detailed configuration and function of the control unit 112 will be described later.

(Droplet discharge means)
FIG. 2 is a view of the droplet discharge means 103 observed from the stage 106 side. As shown in FIG. 2, the droplet discharge means 103 includes a plurality of droplet discharge heads 114 each having substantially the same structure, and a carriage 105 that holds these droplet discharge heads 114. In the present embodiment, the number of droplet discharge heads 114 held by the droplet discharge means 103 is eight. Each droplet discharge head 114 has a bottom surface provided with a plurality of nozzles 118 described later. The shape of the bottom surface of each droplet discharge head 114 is a polygon having two long sides and two short sides. The bottom surface of the droplet discharge head 114 held by the droplet discharge means 103 faces the stage 106 side, and the long side direction and the short side direction of the droplet discharge head 114 are respectively an X-axis direction and a Y-axis direction. Parallel to the direction.

(Droplet ejection head)
FIG. 3 shows the bottom surface of the droplet discharge head 114. The droplet discharge head 114 has a plurality of nozzles 118 arranged in the X-axis direction. The plurality of nozzles 118 are arranged such that the nozzle pitch HXP in the X-axis direction in the droplet discharge head 114 is about 70 μm. Here, the “nozzle pitch HXP in the X-axis direction of the droplet discharge head 114” is a plurality of images obtained by projecting all the nozzles 118 in the droplet discharge head 114 onto the X-axis along the Y-axis direction. This corresponds to the pitch between nozzle images.

  In the present embodiment, the plurality of nozzles 118 in the droplet discharge head 114 form a nozzle row 116A and a nozzle row 116B that both extend in the X-axis direction. The nozzle row 116A and the nozzle row 116B are arranged in parallel with a space therebetween. In each of the nozzle row 116A and the nozzle row 116B, 90 nozzles 118 are aligned in the X-axis direction at regular intervals. In this embodiment, this regular interval is about 140 μm. That is, the nozzle pitch LNP of the nozzle row 116A and the nozzle pitch LNP of the nozzle row 116B are both about 140 μm.

The position of the nozzle row 116B is shifted from the position of the nozzle row 116A in the positive direction in the X-axis direction (the right direction in FIG. 3) by half the nozzle pitch LNP (about 70 μm). Therefore, the nozzle pitch HXP in the X-axis direction of the droplet discharge head 114 is half the length (about 70 μm) of the nozzle pitch LNP of the nozzle row 116A (or nozzle row 116B).
Accordingly, the nozzle line density in the X-axis direction of the droplet discharge head 114 is twice the nozzle line density of the nozzle row 116A (or nozzle row 116B). In the present specification, “nozzle line density in the X-axis direction” means the number per unit length of a plurality of nozzle images obtained by projecting a plurality of nozzles on the X-axis along the Y-axis direction. It corresponds to.

  Of course, the number of nozzle rows included in the droplet discharge head 114 is not limited to two. The droplet discharge head 114 may include M nozzle rows. Here, M is a natural number of 1 or more. In this case, in each of the M nozzle rows, the plurality of nozzles 118 are arranged at a pitch that is M times the nozzle pitch HXP. Further, when M is a natural number of 2 or more, the other (M−1) nozzle rows are only i times as long as the nozzle pitch HXP with respect to one of the M nozzle rows. There is no overlap in the X-axis direction. Here, i is a natural number from 1 to (M−1).

  Now, since each of the nozzle row 116 </ b> A and the nozzle row 116 </ b> B includes 90 nozzles 118, one droplet discharge head 114 has 180 nozzles 118. However, 5 nozzles at both ends of the nozzle row 116A are set as “pause nozzles”. Similarly, 5 nozzles at both ends of the nozzle row 116B are also set as “pause nozzles”. The liquid material 111 is not discharged from these 20 “pause nozzles”. Therefore, 160 nozzles 118 out of 180 nozzles 118 in the droplet discharge head 114 function as nozzles that discharge the liquid material 111.

As shown in FIG. 2, in the droplet discharge means 103, a plurality of the droplet discharge heads 114 are arranged in two rows along the X-axis direction. The droplet ejection heads 114 in one row and the droplet ejection heads 114 in the other row are arranged so as to partially overlap when viewed from the Y-axis direction in consideration of the rest nozzles. As a result, the droplet discharge means 103 is configured such that the nozzle 118 that discharges the liquid material 111 continues in the X-axis direction at the nozzle pitch HXP over the length of the dimension of the base body 10A in the X-axis direction. ing.
In the droplet discharge means 103 of the present embodiment, the droplet discharge head 114 is disposed so as to cover the entire length of the base 10A in the X-axis direction. The base 10A may cover a part of the length corresponding to the dimension in the X-axis direction.

  As shown in FIGS. 4A and 4B, each droplet discharge head 114 is an inkjet head. More specifically, each droplet discharge head 114 includes a vibration plate 126 and a nozzle plate 128. Between the diaphragm 126 and the nozzle plate 128, a liquid pool 129 in which the liquid material 111 supplied from the tank 101 through the hole 131 is always filled is located.

  In addition, a plurality of partition walls 122 are located between the diaphragm 126 and the nozzle plate 128. A portion surrounded by the diaphragm 126, the nozzle plate 128, and the pair of partition walls 122 is a cavity 120. Since the cavities 120 are provided corresponding to the nozzles 118, the number of the cavities 120 and the number of the nozzles 118 are the same. The liquid material 111 is supplied to the cavity 120 from the liquid pool 129 through the supply port 130 positioned between the pair of partition walls 122.

On the diaphragm 126, the vibrator 124 is positioned corresponding to each cavity 120. The vibrator 124 includes a piezoelectric element 124C and a pair of electrodes 124A and 124B that sandwich the piezoelectric element 124C. By applying a driving voltage between the pair of electrodes 124A and 124B, the liquid material 111 is discharged from the corresponding nozzle 118. The shape of the nozzle 118 is adjusted so that the liquid material 111 is discharged from the nozzle 118 in the Z-axis direction.
Here, the “liquid material” in this specification refers to a material having a viscosity that can be discharged from a nozzle. In this case, it does not matter whether the material is aqueous or oily. It is sufficient if it has fluidity (viscosity) that can be discharged from the nozzle, and even if a solid substance is mixed, it may be a fluid as a whole.

  The control means 112 (see FIG. 1) may be configured to give a signal to each of the plurality of vibrators 124 independently of each other. That is, the volume of the liquid material 111 ejected from the nozzle 118 may be controlled for each nozzle 118 in accordance with a signal from the control unit 112. In such a case, the volume of the liquid material 111 discharged from each of the nozzles 118 may be variable between 0 pl to 42 pl (picoliter). The control unit 112 can also set the nozzle 118 that performs the ejection operation during the application scan and the nozzle 118 that does not perform the ejection operation.

In this specification, a portion including one nozzle 118, a cavity 120 corresponding to the nozzle 118, and a vibrator 124 corresponding to the cavity 120 may be referred to as “ejection unit 127”. According to this notation, one droplet discharge head 114 has the same number of discharge units 127 as the number of nozzles 118.
In the present invention, the droplet discharge head 114 may use an electrostatic actuator as a driving element instead of a piezoelectric element. Further, the droplet discharge head 114 may be configured to use an electrothermal conversion element as a drive element and to discharge a liquid material by utilizing thermal expansion of the material by the electrothermal conversion element.

In the present invention, the nozzle pitch HXP in the droplet discharge means 103 is not limited to the above-described size, and may be any size.
Further, the droplet discharge means 103 may have a configuration in which a plurality of droplet discharge heads 114 are stacked in the Y-axis direction in addition to the configuration shown in FIG. In that case, since the nozzle pitch (nozzle line density) in the X-axis direction as the entire droplet discharge means 103 can be further reduced, droplets can be applied with higher definition.

(Control means)
Next, the configuration of the control unit 112 will be described. As shown in FIG. 5, the control unit 112 includes an input buffer memory 200, a storage unit 202, a processing unit 204, a scan driving unit 206, and a head driving unit 208. The buffer memory 200 and the processing unit 204 are connected so that they can communicate with each other. The processing unit 204 and the storage unit 202 are connected to be communicable with each other. The processing unit 204 and the scan driving unit 206 are connected so as to communicate with each other. The processing unit 204 and the head driving unit 20 are connected to be communicable with each other. The scan driver 206 is connected to the first position control device 104 and the second position control device 108 so as to communicate with each other. Similarly, the head driving unit 208 is connected to each of the plurality of droplet discharge heads 114 so as to be able to communicate with each other.

  The input buffer memory 200 receives ejection data for ejecting droplets of the liquid material 111 from the external information processing apparatus. The discharge data includes data indicating the relative positions of all sections on the substrate, data indicating the number of relative scans required to apply the liquid material 111 to all sections to a desired thickness, and on-nozzles. Data specifying the functioning nozzle 118 and data specifying the nozzle 118 functioning as an off-nozzle are included. The explanation of the on nozzle and the off nozzle will be described later. The input buffer memory 200 supplies the ejection data to the processing unit 204, and the processing unit 204 stores the ejection data in the storage unit 202. In FIG. 5, the storage means 202 is a RAM.

The processing unit 204 gives data indicating the relative position of the nozzle 118 to the section to the scan driving unit 206 based on the ejection data in the storage unit 202. The scanning drive unit 206 supplies the first position control device 104 and the second position control device 108 with a drive signal corresponding to this data and an ejection cycle EP (see FIG. 6) described later. As a result, the droplet discharge head 114 scans relative to the section. On the other hand, the processing unit 204 gives a selection signal SC for designating ON / OFF of the nozzle 118 at each ejection timing to the head driving unit 208 based on the ejection data stored in the storage unit 202 and the ejection cycle EP. . The head drive unit 208 gives the droplet ejection head 114 with an ejection signal ES necessary for ejecting the liquid material 111 based on the selection signal SC. As a result, the liquid material 111 is discharged as droplets from the corresponding nozzle 118 in the droplet discharge head 114.
The control means 112 may be a computer including a CPU, a ROM, and a RAM. In this case, the function of the control unit 112 is realized by a software program executed by a computer. Of course, the control means 112 may be realized by a dedicated circuit (hardware).

Next, the configuration and function of the head drive unit 208 in the control unit 112 will be described.
As shown in FIG. 6A, the head drive unit 208 includes one drive signal generation unit 203 and a plurality of analog switches AS. As shown in FIG. 6B, the drive signal generation unit 203 generates a drive signal DS. The potential of the drive signal DS changes with respect to the reference potential L over time. Specifically, the drive signal DS includes a plurality of ejection waveforms P that are repeated at the ejection cycle EP. Here, the discharge waveform P corresponds to a drive voltage waveform to be applied between a pair of electrodes of the corresponding vibrator 124 in order to discharge one droplet from the nozzle 118.

The drive signal DS is supplied to each input terminal of the analog switch AS. Each of the analog switches AS is provided corresponding to each of the ejection units 127. That is, the number of analog switches AS and the number of ejection units 127 (that is, the number of nozzles 118) are the same.
The processing unit 204 gives a selection signal SC indicating ON / OFF of the nozzle 118 to each analog switch AS. Here, the selection signal SC can take either a high level or a low level independently for each analog switch AS. On the other hand, the analog switch AS supplies the ejection signal ES to the electrode 124A of the vibrator 124 according to the drive signal DS and the selection signal SC. Specifically, when the selection signal SC is at a high level, the analog switch AS propagates the drive signal DS as the ejection signal ES to the electrode 124A. On the other hand, when the selection signal SC is at a low level, the potential of the ejection signal ES output from the analog switch AS becomes the reference potential L. When the drive signal DS is applied to the electrode 124A of the vibrator 124, the liquid material 111 is discharged from the nozzle 118 corresponding to the vibrator 124. A reference potential L is applied to the electrode 124B of each vibrator 124.

In the example shown in FIG. 6B, the high-level period in each of the two selection signals SC so that the discharge waveform P appears in the cycle 2EP that is twice the discharge cycle EP in each of the two discharge signals ES. A low-level period is set. As a result, the liquid material 111 is discharged from each of the two corresponding nozzles 118 at a period of 2EP. A common drive signal DS from the common drive signal generation unit 203 is given to each of the vibrators 124 corresponding to these two nozzles 118. For this reason, the liquid material 111 is discharged from the two nozzles 118 at substantially the same timing.
With the above configuration, the droplet discharge device 100 performs discharge scanning for applying the liquid material 111 to the substrate 10 </ b> A in accordance with the discharge data given to the control unit 112. Thereby, a predetermined amount of the liquid material 111 can be applied only to a predetermined region on the gas 10A.

Next, an embodiment of a color filter substrate and a method for manufacturing the color filter substrate will be described.
7A and 7B are views showing the base 10A, where FIG. 7A is a cross-sectional view and FIG. 7B is a plan view. Hereinafter, the base 10A will be described with reference to FIG.
A substrate 10A shown in FIGS. 7A and 7B is a substrate that becomes the color filter substrate 10 through processing by a manufacturing apparatus 1 (see FIG. 8) described later. The base 10A has a plurality of sections 18R, 18G, and 18B that are arranged in a matrix and are to be color elements (pixels).

  Specifically, the base body 10 </ b> A includes a support substrate 12, a black matrix 14 formed on the support substrate 12, and a bank 16 formed on the black matrix 14. The support substrate 12 is a substrate having optical transparency with respect to visible light, and is, for example, a glass substrate. The black matrix 14 is formed of a light-shielding material. The black matrix 14 and the bank 16 on the black matrix 14 are positioned on the support substrate 12 so that a plurality of matrix-like light transmission portions, that is, a plurality of matrix-like pixel regions are defined.

  In each pixel region, the concave portions defined by the support substrate 12, the black matrix 14, and the bank 16 correspond to the partition 18R, the partition 18G, and the partition 18B. The section 18R is an area where the filter layer 111FR that transmits only light in the red wavelength band is to be formed, and the section 18G is an area where the filter layer 111FG that transmits only the light in the green wavelength band is to be formed. The section 18B is an area where the filter layer 111FB that transmits only light in the blue wavelength region is to be formed.

The base body 10A shown in FIG. 7B is located on a virtual plane parallel to both the X-axis direction and the Y-axis direction. The row direction and the column direction of the matrix formed by the plurality of sections 18R, 18G, and 18B are parallel to the X-axis direction and the Y-axis direction, respectively. In the base body 10A, the section 18R, the section 18G, and the section 18B are periodically arranged in this order in the Y-axis direction. On the other hand, the sections 18R are arranged in a line at a predetermined constant interval in the X axis direction, and the sections 18G are arranged in a line at a predetermined constant interval in the X axis direction, and The partitions 18B are arranged in a line at a predetermined constant interval in the X-axis direction. Note that the X-axis direction and the Y-axis direction are orthogonal to each other.
A set of sections 18R, 18G, and 18B arranged in the Y-axis direction corresponds to one pixel of the color filter substrate 10. The base 10A is for manufacturing the color filter substrate 10 in a stripe arrangement.

  FIG. 8 is a diagram schematically showing an apparatus for manufacturing the color filter substrate 10 including a droplet discharge device. The manufacturing apparatus 1 shown in the figure includes a droplet discharge device 100R that applies a liquid color filter material (liquid material for forming a color filter) 111R to all of the sections 18R of the base body 10A, and a color filter material 111R on the sections 18R. A drying device 150R for drying the liquid, a droplet discharge device 100G for applying a liquid color filter material (liquid material for forming a color filter) 111G to all the sections 18G of the base 10A, and a color filter material 111G on the sections 18G. A drying device 150G for drying, a droplet discharge device 100B for applying a liquid color filter material 111B (liquid material for forming a color filter) to all the compartments 18B of the base 10A, and a color filter material 111B for the compartments 18B are dried. Dryer 150B and color filter materials 111R and 11 Applying a liquid protective film material (liquid material for forming a protective film) on the layer 160 of the post-baked color filter materials 111R, 111G, and 111B, and the oven 160 for heating (post-baking) G and 111B again. A droplet discharge device 100C for providing the protective film 20 by the above, a drying device 150C for drying the protective film 20, and a curing device 165 for heating and drying the dried protective film 20 again. Further, the manufacturing apparatus 1 includes a droplet discharge device 100R, a drying device 150R, a droplet discharge device 100G, a drying device 150G, a droplet discharge device 100B, a drying device 150B, a droplet discharge device 100C, a drying device 150C, and a curing device 165. A transport device 170 that transports the base body 10A in order is also provided. In addition, as the drying apparatuses 150R, 150G, 150B, and 150C, for example, an apparatus including a hot plate can be used.

  FIG. 9 is a perspective view illustrating a configuration example of the droplet discharge device 100R of the manufacturing apparatus 1. As shown in the figure, the configuration of the droplet discharge device 100R is basically the same as the configuration of the droplet discharge device 100 described above. However, instead of the tank 101 and the tube 110, the droplet discharge device 100R includes a tank 101R that holds the color filter material 111R and a tube 110R for the color filter material 111R. Is different from the configuration of the droplet discharge device 100.

  The configuration of the droplet discharge device 100G, the configuration of the droplet discharge device 100B, and the configuration of the droplet discharge device 100C are basically the same as the configuration of the droplet discharge device 100R. However, instead of the tank 101R and the tube 110R in the droplet discharge device 100R, the droplet discharge device 100G includes a tank for holding the color filter material 111G and a tube for the color filter material 111G. The configuration of the apparatus 100G is different from the configuration of the droplet discharge apparatus 100R. Similarly, instead of the tank 101R and the tube 110R, the droplet discharge device 100B includes a tank that holds the color filter material 111B and a tube for the color filter material 111B. Different from the configuration of the droplet discharge device 100R. Further, instead of the tank 101R and the tube 110R, the droplet discharge device 100C includes a tank that holds the protective film material and a tube for the protective film, and the configuration of the droplet discharge device 100C is the droplet discharge device 100R. The configuration is different.

  Here, the color filter substrate 10 of the present embodiment has a curved concave shape in which the bonding surfaces (interfaces) between the protective film 20 and the filter layers 111FR, 111FG, and 111FB are recessed toward the filter layers 111FR, 111FG, and 111FB, respectively. It has a (concave surface shape), and the protective film 20 is made of a material having a higher refractive index than the filter layers 111FR, 111FG, and 111FB, and thus has a feature of having a function of a convex lens.

  That is, the surface of each filter layer 111FR, 111FG, 111FB opposite to the base body 10A (the surface on the protective film 20 side) has a curved concave shape, and the portion of the protective film 20 corresponding to each filter layer 111FR, 111FG, 111FB Each of the surfaces on the substrate 10A side (surfaces on the filter layers 111FR, 111FG, 111FB side) has a curved convex surface shape (convex surface shape). The protective film 20 is made of a material having a refractive index higher than that of the filter layers 111FR, 111FG, and 111FB, so that portions (pixel regions) corresponding to the filter layers 111FR, 111FG, and 111FB of the protective film 20 are respectively formed. And has a function of a convex lens.

Hereinafter, a method for manufacturing the color filter substrate 10 (a series of steps until the color filter substrate 10 is obtained by the manufacturing apparatus 1) will be described.
First, the base body 10A of FIG. 7 is prepared according to the following procedure. First, a metal thin film is formed on the support substrate 12 by sputtering or vapor deposition. Thereafter, a lattice-like black matrix 14 is formed from the metal thin film by a photolithography process. Examples of the material of the black matrix 14 are metal chromium and chromium oxide. Note that the support substrate 12 is a substrate having optical transparency with respect to visible light, for example, a glass substrate. Subsequently, a resist layer made of a negative photosensitive resin composition is applied so as to cover the support substrate 12 and the black matrix 14. Then, the resist layer is exposed while closely contacting the mask film formed in a matrix pattern shape on the resist layer. Thereafter, the bank 16 is obtained by removing an unexposed portion of the resist layer by an etching process. The base body 10A is obtained through the above steps.
In place of the bank 16, a bank made of resin black may be used. In that case, the metal thin film (black matrix 14) becomes unnecessary, and the bank layer is only one layer.

  Next, the substrate 10A is made lyophilic by oxygen plasma treatment under atmospheric pressure. By this processing, the surface of the support substrate 12, the surface of the black matrix 14, the surface of the bank 16, and the recesses defined by the support substrate 12, the black matrix 14, and the bank 16 (part of the pixel region) The surface becomes lyophilic. Further, thereafter, a plasma treatment using tetrafluoromethane as a treatment gas is performed on the base 10A. By the plasma treatment using tetrafluoromethane, the surface of the bank 16 in each recess is fluorinated (treated to be liquid repellent), whereby the surface of the bank 16 becomes liquid repellent. Note that the surface of the support substrate 12 and the surface of the black matrix 14 to which lyophilicity was previously imparted by plasma treatment using tetrafluoromethane slightly lose lyophilicity, but these surfaces are still lyophilic. maintain. As described above, the surface of the concave portion defined by the support substrate 12, the black matrix 14, and the bank 16 is subjected to a predetermined surface treatment, so that the surface of the concave portion becomes the partitions 18R, 18G, and 18B.

  Depending on the material of the support substrate 12, the material of the black matrix 14, and the material of the bank 16, a surface exhibiting desired lyophilicity and liquid repellency can be obtained without performing the above surface treatment. There is also. In such a case, the surface of the recess defined by the support substrate 12, the black matrix 14, and the bank 16 is the sections 18R, 18G, and 18B without performing the surface treatment.

  The base body 10A on which the sections 18R, 18G, and 18B are formed is carried by the transport device 170 to the stage 106 of the droplet discharge device 100R. Then, as shown in FIG. 10A, the droplet discharge device 100R includes a droplet discharge head 114 so that the color filter material 111R is applied to all of the sections 18R to form a layer of the color filter material 111R. The color filter material 111R is discharged from (the step of applying the color filter material 111R to the section 18R is performed).

The color filter material 111R contains colorants such as pigments and dyes.
The viscosity of the color filter material 111R is preferably 20 mPa · S or less, and more preferably about 3 to 5 mPa · S. Thereby, the surface on the opposite side to the base body 10A of the filter layer 111FR can be more surely formed into a curved concave shape.
Since the color filter materials 111G and 111B described later are the same as those of the color filter material 111R, description thereof will be omitted.

  When the layer of the color filter material 111R is formed on all the sections 18R of the base body 10A, the transport device 170 positions the base body 10A in the drying device 150R. Then, as shown in FIG. 10B, the color filter material 111R on the section 18R is completely dried (performs a drying step) so that the surface opposite to the base 10A has a curved concave shape. A filter layer 111FR is obtained on the section 18R.

In the step of drying the color filter material 111R, the color filter material 111R is preferably heated at 50 ° C. or higher, and more preferably heated at about 60 to 90 ° C. Thereby, the surface on the opposite side to the base body 10A of the filter layer 111FR can be more surely formed into a curved concave shape.
The heating time is preferably about 3 to 20 minutes, more preferably about 5 to 10 minutes. Thereby, the surface on the opposite side to the base body 10A of the filter layer 111FR can be more surely formed into a curved concave shape.

  Here, the surface of the layer of the color filter material 111R formed in the section 18R opposite to the base 10A (hereinafter, also simply referred to as “surface”) is curved before drying, as shown in FIG. 10A. It has a convex shape (convex shape). When the color filter material 111R is heated and dried at a relatively high temperature, particularly at the preferred temperature, the color filter material 111R is first dried from the bank 16 side as shown in FIG. The central color filter material 111R is drawn toward the bank 16 and the bank 16 is raised. In this way, the surface of the base body 10A of the filter layer 111FR can be formed into a curved concave shape.

Further, by adjusting the physical properties such as the viscosity of the color filter material 111R, the drying conditions such as the heating temperature and the heating time, etc., the pattern of the curved concave surface of the filter layer 111FR (for example, the degree of curvature) can be adjusted. .
Since conditions and actions in the process of drying the color filter materials 111G and 111B described later are the same as those in the case of the color filter material 111R, description thereof will be omitted.

  Next, the transport device 170 positions the base body 10A on the stage 106 of the droplet discharge device 100G. Then, as shown in FIG. 10C, the droplet discharge device 100G has the droplet discharge head 114 so that the color filter material 111G is applied to all the sections 18G to form a layer of the color filter material 111G. The color filter material 111G is discharged from (the step of applying the color filter material 111G to the section 18G is performed).

  When the layer of the color filter material 111G is formed in all the sections 18G of the base body 10A, the transport device 170 positions the base body 10A in the drying device 150G. Then, as shown in FIG. 10 (d), by completely drying the color filter material 111G on the section 18G so that the surface on the side opposite to the base body 10A has a curved concave shape (performs a drying step), A filter layer 111FG is obtained on the section 18G.

  Next, the transport device 170 positions the base body 10A on the stage 106 of the droplet discharge device 100B. Then, as shown in FIG. 11 (e), the droplet discharge device 100B has a droplet discharge head 114 so that the color filter material 111B is applied to all of the sections 18B to form a layer of the color filter material 111B. The color filter material 111B is discharged from (the step of applying the color filter material 111B to the section 18B is performed).

  When the layer of the color filter material 111B is formed in all the sections 18B of the base body 10A, the transport device 170 positions the base body 10A in the drying device 150B. And as shown in FIG.11 (f), by completely drying the color filter material 111B on the division 18B so that the surface on the opposite side to the base | substrate 10A may become a curved concave shape (performing a drying process), A filter layer 111FB is obtained on the section 18B.

Next, the transport device 170 positions the base body 10 </ b> A in the oven 160. Thereafter, the oven 160 reheats (post-bake) the filter layers 111FR, 111FG, and 111FB.
Next, the transport device 170 positions the base body 10A on the stage 106 of the droplet discharge device 100C. Then, on the filter layers 111FR, 111FG, 111FB and the bank 16 of the base body 10A, the filter layers 111FR, 111FG, 111FB, and the bank 16 are covered, and bonding surfaces (interfaces) with the filter layers 111FR, 111FG, 111FB are provided. Each of the filter layers 111FR, 111FG, and 111FB has a curved concave shape, and is made of a material having a higher refractive index than the filter layers 111FR, 111FG, and 111FB, and has a light-transmitting protective film (overcoat). (Coat) 20 is formed.

  That is, the droplet discharge device 100C includes a protective film on the filter layers 111FR, 111FG, 111FB, and the bank 16 so that the protective film 20 is formed so as to cover the filter layers 111FR, 111FG, 111FB, and the bank 16. The material is discharged and applied onto the filter layers 111FR, 111FG, 111FB, and the bank 16. Thereby, the filter layer 111FR, 111FG, 111FB and the bank 16 are covered with the filter layer 111FR, 111FG, 111FB, and the bank 16, and the curved convex surface corresponding to the surface shape of the curved concave surface of the filter layer 111FR, 111FG, 111FB. The protective film 20 having the surface shape is formed. After this protective film 20 is formed, the transfer device 170 positions the base body 10A in the drying device 150C. Then, as shown in FIG. 11G, after the drying device 150C completely dries the protective film 20, the curing device 165 heats the protective film 20 and completely cures, so that the base 10A is a color filter. A substrate 10 is formed. By providing the protective film 20, the filter layers 111FR, 111FG, and 111FB are protected, and damage and deterioration of the filter layers 111FR, 111FG, and 111FB can be prevented. Further, portions (pixel regions) corresponding to the filter layers 111FR, 111FG, and 111FB of the protective film 20 each have a function of a convex lens.

  The protective film material used for forming the protective film 20 preferably includes a lens material (a material having a high refractive index). As the lens material, for example, various resins such as an acrylic resin, various glasses, and the like, which are constituent materials of the lens, can be used, and it is particularly preferable to use a powdery resin. Thereby, the protective film 20 having the function of a convex lens can be formed more reliably.

Here, as described above, by adjusting the physical properties such as the viscosity of the color filter materials 111R, 111G, and 111B, the drying conditions such as the heating temperature and the heating time, etc., the pattern of the curved concave surface of the filter layers 111FR, 111G, and 111B (For example, the degree of bending) can be adjusted, and thereby the pattern of the curved convex surface (for example, the degree of bending) of the protective film 20 can be adjusted. Thereby, the lens characteristics of the protective film 20 such as the degree of light condensing (converging) by the protective film 20 can be adjusted. In addition, for example, the lens characteristics of the protective film 20 can be adjusted by the content of the lens material in the protective film material, the selection of the lens material to be used, and the like.
The color filter substrate of the present invention is not limited to the color filter substrate having a stripe arrangement, and can be applied to a color filter substrate having any pixel pattern such as a delta arrangement, a mosaic arrangement, or a pen tile arrangement.

Next, an embodiment of a liquid crystal display device which is an image display device (electro-optical device) having the color filter substrate 10 will be described.
FIG. 12 is a cross-sectional view showing an embodiment of a liquid crystal display device. As shown in the figure, the liquid crystal display device 60 includes a color filter substrate 10, a substrate (opposite substrate) 62 provided so as to face the protective film 20 of the color filter substrate 10, and a color filter substrate 10 (protection). FIG. 12 shows a liquid crystal layer 61 made of liquid crystal sealed in a gap between the film 20) and the substrate 62, a polarizing plate 63 provided on the lower side of the supporting substrate 12 of the color filter substrate 10 in FIG. 12 has a polarizing plate 64 provided on the upper side. The board | substrate 62 is a board | substrate which has a light transmittance with respect to visible light, for example, is a glass substrate.

In addition, the liquid crystal display device 60 is arranged in a matrix and has a plurality of pixel electrodes that are transparent to visible light, a plurality of switching elements (for example, TFT: thin film transistor) corresponding to each pixel electrode, and a visible light source. A common electrode having optical transparency to light (none of which is shown).
The liquid crystal display device 60 is configured such that light emitted from a backlight (not shown) is incident from the color filter substrate 10 side (lower side in FIG. 12).

  As described above, according to the color filter substrate 10 and the liquid crystal display device 60, portions (pixel regions) corresponding to the filter layers 111FR, 111FG, and 111FB of the protective film 20 of the color filter substrate 10 have a function of a convex lens. Therefore, light can be condensed (converged) by the protective film 20 for each pixel region. As a result, a bright image with high contrast can be displayed. In addition, utilization efficiency of light emitted from the backlight is improved.

Further, the surface of the filter layers 111FR, 111FG, 111FB opposite to the base 10A has a curved concave shape, and the thickness of the central portion of the filter layers 111FR, 111FG, 111FB is thin, so that the light transmittance is high. Thus, a brighter image can be obtained.
In addition, since the protective film 20 has a function of a convex lens and the filter layers 111FR, 111FG, and 111FB do not need to have a function of a convex lens, the filter layers 111FR and 111FG are compared with a case where the filter layer has a function of a convex lens. , 111FB is advantageous for improving the characteristics as a color filter.
Further, according to the method for manufacturing the color filter substrate 10, the color filter substrate 10 in which the portions corresponding to the filter layers 111FR, 111FG, and 111FB of the protective film 20 have the function of a convex lens can be easily and reliably manufactured.

  In particular, once the surface of the filter layers 111FR, 111FG, 111FB opposite to the base body 10A is formed into a curved concave shape, a protective film material is discharged and applied thereon to form the protective film 20 having the function of a convex lens. Therefore, the curved convex surface shape of the protective film 20 (convex lens) can be formed with higher accuracy than in the case of directly forming a convex lens by the ink jet method, and this can reduce variations in lens characteristics for each pixel. As a result, a good image without uneven brightness can be obtained.

<Embodiment of Electronic Device of the Present Invention>
An image display device (electro-optical device) 1000 such as a liquid crystal display device having a color filter substrate as described above can be used for display portions of various electronic devices.
FIG. 13 is a perspective view showing the configuration of a mobile (or notebook) personal computer to which the electronic apparatus of the present invention is applied.

In this figure, a personal computer 1100 includes a main body 1104 having a keyboard 1102 and a display unit 1106. The display unit 1106 is supported by the main body 1104 via a hinge structure so as to be rotatable. Yes.
In the personal computer 1100, the display unit 1106 includes an image display device 1000.

FIG. 14 is a perspective view showing a configuration of a mobile phone (including PHS) to which the electronic apparatus of the invention is applied.
In this figure, a cellular phone 1200 is provided with an image display device 1000 in a display unit, together with a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206.
FIG. 15 is a perspective view showing the configuration of a digital still camera to which the electronic apparatus of the present invention is applied. In this figure, connection with an external device is also simply shown.

Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an imaging device such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.
On the back of a case (body) 1302 in the digital still camera 1300, an image display device 1000 is provided in the display unit, and is configured to display based on an imaging signal from the CCD, and a finder that displays a subject as an electronic image. Function as.

A circuit board 1308 is installed inside the case. The circuit board 1308 is provided with a memory that can store (store) an imaging signal.
A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side of the case 1302 (on the back side in the illustrated configuration).
When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory of the circuit board 1308.

  In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory of the circuit board 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation.

The electronic apparatus according to the present invention includes, for example, a television, a video camera, a viewfinder type, and a monitor direct-view type video tape recorder in addition to the above-described personal computer (mobile personal computer), mobile phone, and digital still camera. , Laptop personal computers, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, videophones, security TV monitors, electronic binoculars, POS terminals , Devices equipped with touch panels (for example, cash dispensers of financial institutions, automatic ticket vending machines), medical devices (for example, electronic thermometers, blood pressure monitors, blood glucose meters, electrocardiographic display devices, ultrasonic diagnostic devices, endoscope display devices), Fish finder, various measuring instruments, instruments (eg If, gages for vehicles, aircraft, and ships), a flight simulator, various monitors, and a projection display such as a projector.
As described above, the color filter substrate, the color filter substrate manufacturing method, the electro-optical device, and the electronic apparatus according to the invention have been described based on the illustrated embodiments. However, the invention is not limited thereto, and the configuration of each part Can be replaced with any structure having a similar function. Moreover, arbitrary components and processes may be added to the present invention.

The perspective view which shows the structural example of the droplet discharge apparatus to be used. The figure which observed the droplet discharge means in the droplet discharge apparatus shown in FIG. 1 from the stage side. The figure which shows the bottom face of the droplet discharge head in the droplet discharge apparatus shown in FIG. 2A and 2B are diagrams illustrating a droplet discharge head in the droplet discharge apparatus illustrated in FIG. 1, in which FIG. The block diagram which shows the control means in the droplet discharge apparatus shown in FIG. (A) is a schematic diagram showing a head drive unit, (b) is a timing chart showing a drive signal, a selection signal and an ejection signal in the head drive unit. It is a figure which shows the base | substrate for manufacturing a color filter substrate, (a) is sectional drawing, (b) is a top view. The figure which shows typically the manufacturing apparatus of the color filter substrate containing a droplet discharge apparatus. The perspective view which shows the structural example of the droplet discharge apparatus of the manufacturing apparatus shown in FIG. The schematic diagram which shows the manufacturing method of a color filter board | substrate. The schematic diagram which shows the manufacturing method of a color filter board | substrate. Sectional drawing which shows embodiment of a liquid crystal display device. FIG. 14 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer to which the electronic apparatus of the invention is applied. The perspective view which shows the structure of the mobile telephone (PHS is also included) to which the electronic device of this invention is applied. FIG. 14 is a perspective view illustrating a configuration of a digital still camera to which the electronic apparatus of the invention is applied.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Manufacturing apparatus 100, 100R, 100G, 100B, 100C ... Droplet discharge device 101, 101R ... Tank 102 ... Discharge scanning part 103 ... Droplet discharge means 104 ... First position control device 105 ... Carriage 106 ... Stage 108 ... Second position control device 110, 110R ... Tube 111 ... Liquid material 112 ... Control means 114 ... Droplet ejection head 116A, 116B ... Nozzle array 118 ... Nozzle 120 ... Cavity 122 …… Branch 124 …… Vibrator 124A, 124B …… Electrode 124C …… Piezo element 126 …… Vibration plate 127 …… Discharge part 128 …… Nozzle plate 129 …… Liquid pool 130 …… Supply port 131 …… Hole 200 …… Buffer memory 202 …… Storage means 203 …… Drive signal generation unit 204 …… Process Section 206... Scanning driving section 208... Head driving section AS... Analog switch DS... Driving signal SC... Selection signal ES. ... black matrix 16 ... bank 20 ... protective film 18R, 18G, 18B ... partition 111FR, 111FG, 111FB ... filter layer 60 ... liquid crystal display device 61 ... liquid crystal layer 62 ... substrate 63, 64 ... polarized light Plate 150C …… Drying device 150R, 150G, 150B …… Drying device 111R, 111G, 111B …… Color filter material 160 …… Oven 165 …… Curing device 170 …… Conveying device 1000 …… Image display device 1100 …… Personal computer 1102 …… Keyboard 1104 …… Main body 1106 …… Table Unit 1200... Cellular phone 1202 .. operation button 1204 .. earpiece 1206 .. mouthpiece 1300 .. digital still camera 1302 .. case (body) 1304 .. light receiving unit 1306 .. shutter button 1308. 1312 …… Video signal output terminal 1314 …… Input / output terminal for data communication 1430 …… TV monitor 1440 …… Personal computer

Claims (9)

A filter layer formed by ejecting a liquid material for forming a color filter containing a colorant as a droplet from a nozzle to a portion corresponding to each pixel on the substrate, and the filter layer, A color filter substrate formed thereon and having a protective film covering the filter layer,
The bonding surface between the protective film and each filter layer has a concave shape recessed toward the filter layer, and the protective film is made of a material having a higher refractive index than the filter layer. Color filter substrate. A color filter substrate manufacturing method comprising: a base; a filter layer formed on a portion corresponding to each pixel on the base; and a protective film formed on the filter layer and covering the filter layer,
A liquid material for forming a color filter containing a colorant is transferred from the nozzle by relatively moving a substrate on which a plurality of sections to be pixels are formed and a droplet discharge means having a nozzle for discharging droplets. Discharging the droplets and applying them to the compartments;
Drying the liquid material for forming a color filter applied to the section so that the surface opposite to the base has a concave shape, and forming the filter layer;
Formed on the filter layer is a protective film that covers the filter layer made of a material having a refractive index higher than that of the filter layer. A process for producing a color filter substrate.   The method for manufacturing a color filter substrate according to claim 2, wherein in the step of drying the liquid material for forming the color filter, the liquid material for forming the color filter is heated at 50 ° C or higher.   4. The method of manufacturing a color filter substrate according to claim 2, wherein the liquid material for forming the color filter discharged from the nozzle has a viscosity of 20 mPa · S or less. 5.   In the step of forming the protective film, the substrate and the droplet discharge means are relatively moved, and a liquid material for forming the protective film is discharged as droplets from the nozzle and applied onto the filter layer. The method for producing a color filter substrate according to any one of claims 2 to 4, wherein the applied liquid material for forming a protective film is dried.   The method for producing a color filter substrate according to claim 5, wherein the liquid material for forming the protective film includes a powdered resin as a lens material.   An electro-optical device comprising a color filter substrate manufactured by the method for manufacturing a color filter substrate according to claim 2.   The electro-optical device according to claim 7, wherein the electro-optical device is a liquid crystal display device having a liquid crystal layer. An electronic apparatus comprising the electro-optical device according to claim 7.

Images