JP4924526B2 - Droplet application method, droplet discharge device, and electro-optical device manufacturing method - Google Patents

Description

The present invention relates to a droplet applying method, a droplet discharging device, and an electro-optical device manufacturing method .

A method of applying a liquid material such as ink to each section on a substrate on which a large number of sections to be pixels (color elements) are formed using an ink jet apparatus is known. For example, a method of forming a filter element of a color filter substrate using an inkjet device or a light emitting portion arranged in a matrix in a matrix display device is known.
In such a method, since it is necessary to wet and spread the ink to every corner in each pixel, a plurality of drops of ink may be attached to one pixel. As a method for facilitating the wetting and spreading of ink at that time, in Patent Document 1 below, the second ink is adhered while the first ink adhering to the first liquid exists, and the first and second inks are adhered. A method of mixing the inks in liquid form with each other is disclosed.
However, in the method described in Patent Document 1, due to the impact when the second ink collides with the first ink adhering to the first ink, the ink is scattered and enters adjacent pixels of different colors. There is a problem that color mixing is easy.

JP 2001-133622 A

An object of the present invention is to provide a droplet applying method, a droplet discharging device, and a method for manufacturing an electro-optical device, which can manufacture a high-quality substrate with color elements without color mixing or color loss with high production efficiency. is there.

Such an object is achieved by the present invention described below.
According to the droplet applying method of the present invention, a color element is obtained by relatively moving a base on which a plurality of rectangular sections to be color elements are formed and a droplet discharge means having a nozzle for discharging droplets. A droplet application method for discharging a liquid material for formation as droplets from the nozzle and applying the droplets to the compartments,
When the subsequent droplets are further discharged to the compartment a plurality of times before the first droplet that has landed on the compartment is not dry, one droplet of the first droplet is simultaneously applied to each compartment from the two nozzles. The droplets are ejected side by side in the short axis direction of the compartment, and the subsequent droplets are alternately ejected multiple times along the major axis direction of the compartment one by one from the same nozzle that ejected the first droplet. And the total amount of each subsequent droplet is smaller than the total amount of the preceding droplets ,
Among the subsequent droplets, a dot formed immediately after landing with a droplet discharged from one of the two nozzles and a dot formed immediately after landing with a droplet discharged from the other nozzle The dots formed immediately after landing with droplets ejected from the one nozzle are separated from each other, and the dots formed immediately after landing with droplets ejected from the other nozzle are also separated from each other. It is characterized by that.

  As a result, the amount of liquid material necessary for forming the color element can be quickly and reliably applied to the section to be the color element with a small number of scans, and the applied liquid material can be applied to the corner of the section. Since it is possible to spread and spread evenly and thoroughly, it is possible to reliably prevent the occurrence of color loss. In addition, it is possible to suppress the scattering of the liquid material when the subsequent droplets land, and to effectively prevent the splashes from reaching the adjacent compartment, thus reliably preventing color mixing. Can do. For this reason, a high-quality substrate with color elements can be manufactured with high production efficiency.

In the droplet applying method of the present invention, the dots formed immediately after landing in the first subsequent droplet are connected to the dots formed immediately after landing in one of the preceding droplets. Preferably it is.
In the droplet applying method of the present invention, it is preferable that dots formed immediately after landing of the droplets are connected with each other.
In the droplet applying method of the present invention, it is preferable that the amount of one droplet of the subsequent droplet is the same as the amount of one droplet of the preceding droplet.
As a result, it is possible to more reliably prevent the liquid material from splashing to the adjacent compartment when a subsequent droplet lands, and to prevent color mixing more reliably.

  In the droplet applying method of the present invention, it is preferable that the amount of one droplet of the subsequent droplet is smaller than the amount of one droplet of the preceding droplet.
  In the droplet applying method of the present invention, it is preferable that the amount of one droplet of the subsequent droplet for each time is the same.
  In the droplet applying method of the present invention, it is preferable that the amount of one droplet of the subsequent droplets is different from each other.
  In the droplet applying method according to the present invention, the dots formed immediately after landing with each of the first droplets are closest to one end of both ends positioned in the longitudinal direction of the section. It is preferable.

In the droplet applying method of the present invention, it is preferable that the total amount of the subsequent droplets is 30 to 70% of the total amount of the preceding droplets.
As a result, it is possible to more reliably prevent the liquid material from splashing to the adjacent compartment when a subsequent droplet is landed, and more reliably prevent the occurrence of color mixing, and further increase the production efficiency. Improvement can be achieved.

In the droplet applying method of the present invention, it is preferable that the flight speed of the subsequent droplet is slower than the flight speed of the preceding droplet.
As a result, it is possible to more reliably prevent the liquid material from splashing to the adjacent compartment when a subsequent droplet lands, and to prevent color mixing more reliably .

The droplet discharge device of the present invention includes a droplet discharge unit having a nozzle for discharging a droplet,
A base on which a plurality of rectangular sections to be color elements are formed, and a moving means for relatively moving the droplet discharge means;
Control means for controlling the operation of the droplet discharge means and the moving means,
A liquid droplet ejection apparatus for ejecting a liquid material for forming a color element as a liquid droplet from the nozzle and applying the liquid material for forming a color element to the section while relatively moving the liquid droplet ejection unit and the substrate;
When the subsequent droplets are further discharged to the compartment a plurality of times before the first droplet that has landed on the compartment is not dry, one droplet of the first droplet is simultaneously applied to each compartment from the two nozzles. The droplets are ejected side by side in the short axis direction of the compartment, and the subsequent droplets are alternately ejected multiple times along the major axis direction of the compartment one by one from the same nozzle that ejected the first droplet. And the total amount of each subsequent droplet is smaller than the total amount of the preceding droplets ,
Among the subsequent droplets, a dot formed immediately after landing with a droplet discharged from one of the two nozzles and a dot formed immediately after landing with a droplet discharged from the other nozzle The dots formed immediately after landing with droplets ejected from the one nozzle are separated from each other, and the dots formed immediately after landing with droplets ejected from the other nozzle are also separated from each other. It is characterized by that.

  As a result, the amount of liquid material necessary for forming the color element can be quickly and reliably applied to the section to be the color element with a small number of scans, and the applied liquid material can be applied to the corner of the section. Since it is possible to spread and spread evenly and thoroughly, it is possible to reliably prevent the occurrence of color loss. In addition, it is possible to suppress the scattering of the liquid material when the subsequent droplets land, and to effectively prevent the splashes from reaching the adjacent compartment, thus reliably preventing color mixing. Can do. For this reason, a high-quality substrate with color elements can be manufactured with high production efficiency.

The electro-optical device manufacturing method of the present invention includes a step of manufacturing a color element-attached substrate by forming color elements in a plurality of sections on a substrate using the droplet applying method of the present invention.
Accordingly, an electro-optical device including a high-quality substrate with color elements can be manufactured with high production efficiency .

Hereinafter, a droplet applying method, a droplet discharge device, and an electro-optical device manufacturing method according to the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.
<First Embodiment of Droplet Discharge Device>
(Overall configuration of droplet discharge device)
As shown in FIG. 1, the droplet discharge device 100 includes a tank 101 that holds a liquid material 111, a tube 110, and a discharge scanning unit 102 that is supplied with the liquid material 111 from the tank 101 via the tube 110. Prepare. The discharge scanning unit 102 includes a droplet discharge unit 103 having a plurality of droplet discharge heads 114 mounted on the carriage 105, a first position control device 104 (moving unit) that controls the position of the droplet discharge unit 103, A stage 106 that holds a base 10 </ b> A described later, a second position control device 108 (moving means) that controls the position of the stage 106, and a control means 112 are provided. The tank 101 and the plurality of droplet discharge heads 114 in the droplet discharge means 103 are connected by a tube 110, and the liquid material 111 is supplied from the tank 101 to each of the plurality of droplet discharge heads 114 by compressed air. The

  The first position control device 104 moves the droplet discharge means 103 along the X-axis direction and the Z-axis direction orthogonal to the X-axis direction in response to a signal from the control means 112. Further, the first position control device 104 also has a function of rotating the droplet discharge means 103 around an axis parallel to the Z axis. In the present embodiment, the Z-axis direction is a direction parallel to the vertical direction (that is, the direction of gravitational acceleration). The second position controller 108 moves the stage 106 along the Y-axis direction orthogonal to both the X-axis direction and the Z-axis direction in response to a signal from the control unit 112. Further, the second position control device 108 also has a function of rotating the stage 106 around an axis parallel to the Z axis.

The stage 106 has a plane parallel to both the X-axis direction and the Y-axis direction. The stage 106 is configured so that a substrate having a section to which the liquid material 111 is to be applied can be fixed or held on the plane.
As described above, the droplet discharge means 103 is moved in the X-axis direction by the first position control device 104. On the other hand, the stage 106 is moved in the Y-axis direction by the second position control device 108. That is, the relative position of the droplet discharge head 114 with respect to the stage 106 is changed by the first position control device 104 and the second position control device 108.
The control unit 112 is configured to receive ejection data representing a relative position at which the liquid material 111 is to be ejected from an external information processing apparatus. The detailed configuration and function of the control unit 112 will be described later.

(Droplet discharge means)
FIG. 2 is a view of the droplet discharge means 103 observed from the stage 106 side. As shown in FIG. 2, the droplet discharge means 103 includes a plurality of droplet discharge heads 114 each having substantially the same structure, and a carriage 105 that holds these droplet discharge heads 114. In the present embodiment, the number of droplet discharge heads 114 held by the droplet discharge means 103 is eight. Each droplet discharge head 114 has a bottom surface provided with a plurality of nozzles 118 described later. The shape of the bottom surface of each droplet discharge head 114 is a polygon having two long sides and two short sides. The bottom surface of the droplet discharge head 114 held by the droplet discharge means 103 faces the stage 106 side, and the long side direction and the short side direction of the droplet discharge head 114 are respectively an X-axis direction and a Y-axis direction. Parallel to the direction.

(Droplet ejection head)
FIG. 3 shows the bottom surface of the droplet discharge head 114. The droplet discharge head 114 has a plurality of nozzles 118 arranged in the X-axis direction. The plurality of nozzles 118 are arranged such that the nozzle pitch HXP in the X-axis direction in the droplet discharge head 114 is about 70 μm. Here, the “nozzle pitch HXP in the X-axis direction of the droplet discharge head 114” is a plurality of images obtained by projecting all the nozzles 118 in the droplet discharge head 114 onto the X-axis along the Y-axis direction. This corresponds to the pitch between nozzle images.

  In the present embodiment, the plurality of nozzles 118 in the droplet discharge head 114 form a nozzle row 116A and a nozzle row 116B that both extend in the X-axis direction. The nozzle row 116A and the nozzle row 116B are arranged in parallel with a space therebetween. In each of the nozzle row 116A and the nozzle row 116B, 90 nozzles 118 are aligned in the X-axis direction at regular intervals. In this embodiment, this regular interval is about 140 μm. That is, the nozzle pitch LNP of the nozzle row 116A and the nozzle pitch LNP of the nozzle row 116B are both about 140 μm.

The position of the nozzle row 116B is shifted from the position of the nozzle row 116A in the positive direction in the X-axis direction (the right direction in FIG. 3) by half the nozzle pitch LNP (about 70 μm). Therefore, the nozzle pitch HXP in the X-axis direction of the droplet discharge head 114 is half the length (about 70 μm) of the nozzle pitch LNP of the nozzle row 116A (or nozzle row 116B).
Accordingly, the nozzle line density in the X-axis direction of the droplet discharge head 114 is twice the nozzle line density of the nozzle row 116A (or nozzle row 116B). In the present specification, “nozzle line density in the X-axis direction” means the number per unit length of a plurality of nozzle images obtained by projecting a plurality of nozzles on the X-axis along the Y-axis direction. It corresponds to.

  Of course, the number of nozzle rows included in the droplet discharge head 114 is not limited to two. The droplet discharge head 114 may include M nozzle rows. Here, M is a natural number of 1 or more. In this case, in each of the M nozzle rows, the plurality of nozzles 118 are arranged at a pitch that is M times the nozzle pitch HXP. Further, when M is a natural number of 2 or more, the other (M−1) nozzle rows are only i times as long as the nozzle pitch HXP with respect to one of the M nozzle rows. There is no overlap in the X-axis direction. Here, i is a natural number from 1 to (M−1).

  Now, since each of the nozzle row 116 </ b> A and the nozzle row 116 </ b> B includes 90 nozzles 118, one droplet discharge head 114 has 180 nozzles 118. However, 5 nozzles at both ends of the nozzle row 116A are set as “pause nozzles”. Similarly, 5 nozzles at both ends of the nozzle row 116B are also set as “pause nozzles”. The liquid material 111 is not discharged from these 20 “pause nozzles”. Therefore, 160 nozzles 118 out of 180 nozzles 118 in the droplet discharge head 114 function as nozzles that discharge the liquid material 111.

As shown in FIG. 2, in the droplet discharge means 103, a plurality of the droplet discharge heads 114 are arranged in two rows along the X-axis direction. The droplet ejection heads 114 in one row and the droplet ejection heads 114 in the other row are arranged so as to partially overlap when viewed from the Y-axis direction in consideration of the rest nozzles. As a result, the droplet discharge means 103 is configured such that the nozzle 118 that discharges the liquid material 111 continues in the X-axis direction at the nozzle pitch HXP over the length of the dimension of the base 10A in the X-axis direction. ing.
In the droplet discharge means 103 of the present embodiment, the droplet discharge head 114 is disposed so as to cover the entire length of the base 10A in the X-axis direction. The base 10A may cover a part of the length in the X-axis direction.

  As shown in FIGS. 4A and 4B, each droplet discharge head 114 is an inkjet head. More specifically, each droplet discharge head 114 includes a vibration plate 126 and a nozzle plate 128. Between the diaphragm 126 and the nozzle plate 128, a liquid pool 129 in which the liquid material 111 supplied from the tank 101 through the hole 131 is always filled is located.

  In addition, a plurality of partition walls 122 are located between the diaphragm 126 and the nozzle plate 128. A portion surrounded by the diaphragm 126, the nozzle plate 128, and the pair of partition walls 122 is a cavity 120. Since the cavities 120 are provided corresponding to the nozzles 118, the number of the cavities 120 and the number of the nozzles 118 are the same. The liquid material 111 is supplied to the cavity 120 from the liquid pool 129 through the supply port 130 positioned between the pair of partition walls 122.

  On the vibration plate 126, corresponding to the respective cavities 120, vibrators 124 are positioned as drive elements that change the pressure of the liquid material 111 filled in the cavities 120. The vibrator 124 includes a piezoelectric element 124C and a pair of electrodes 124A and 124B that sandwich the piezoelectric element 124C. By applying a driving voltage between the pair of electrodes 124A and 124B, the liquid material 111 is discharged from the corresponding nozzle 118. The shape of the nozzle 118 is adjusted so that the liquid material 111 is discharged from the nozzle 118 in the Z-axis direction.

Here, the “liquid material” in this specification refers to a material having a viscosity that can be discharged from a nozzle. In this case, it does not matter whether the material is aqueous or oily. It is sufficient if it has fluidity (viscosity) that can be discharged from the nozzle, and even if a solid substance is dispersed, it may be a fluid as a whole.
The control means 112 (FIG. 1) may be configured to give a signal to each of the plurality of vibrators 124 independently of each other. That is, the volume of the material 111 ejected from the nozzle 118 may be controlled for each nozzle 118 in accordance with a signal from the control unit 112. In such a case, the volume of the material 111 discharged from each of the nozzles 118 may be variable between 0 pl to 42 pl (picoliter). The control unit 112 can also set the nozzle 118 that performs the ejection operation during the application scan and the nozzle 118 that does not perform the ejection operation.

  In this specification, a portion including one nozzle 118, a cavity 120 corresponding to the nozzle 118, and a vibrator 124 corresponding to the cavity 120 may be referred to as “ejection unit 127”. According to this notation, one droplet discharge head 114 has the same number of discharge units 127 as the number of nozzles 118. The ejection unit 127 may include an electrothermal conversion element instead of a piezo element as a drive element. That is, the discharge unit 127 may have a configuration for discharging a material by utilizing thermal expansion of the material by the electrothermal conversion element.

In the present invention, the nozzle pitch HXP in the droplet discharge means 103 is not limited to the above size, and may be any size.
Further, the droplet discharge means 103 may have a configuration in which a plurality of droplet discharge heads 114 are arranged in the Y-axis direction in addition to the configuration shown in FIG. In that case, since the nozzle pitch (nozzle line density) in the X-axis direction as the entire droplet discharge means 103 can be further reduced, droplets can be applied with higher definition.

(Control means)
Next, the configuration of the control unit 112 will be described. As shown in FIG. 5, the control unit 112 includes an input buffer memory 200, a storage unit 202, a processing unit 204, a scan driving unit 206, and a head driving unit 208. The buffer memory 200 and the processing unit 204 are connected so that they can communicate with each other. The processing unit 204 and the storage unit 202 are connected to be communicable with each other. The processing unit 204 and the scan driving unit 206 are connected so as to communicate with each other. The processing unit 204 and the head driving unit 208 are connected so as to communicate with each other. The scan driver 206 is connected to the first position control device 104 and the second position control device 108 so as to communicate with each other. Similarly, the head driving unit 208 is connected to each of the plurality of droplet discharge heads 114 so as to be able to communicate with each other.

  The input buffer memory 200 receives ejection data for ejecting droplets of the liquid material 111 from the external information processing apparatus. The discharge data includes data indicating the relative positions of all the sections on the substrate, data indicating the number of relative scans required to apply the liquid material 111 to all the sections to a desired thickness, and the on-nozzles 118a. And data specifying the nozzle 118 functioning as an off-nozzle 118b. The input buffer memory 200 supplies the ejection data to the processing unit 204, and the processing unit 204 stores the ejection data in the storage unit 202. In FIG. 5, the storage means 202 is a RAM.

  The processing unit 204 gives data indicating the relative position of the nozzle 118 to the section to the scan driving unit 206 based on the ejection data in the storage unit 202. The scanning drive unit 206 supplies the first position control device 104 and the second position control device 108 with a drive signal corresponding to this data and an ejection cycle EP (FIG. 6) described later. As a result, the droplet discharge head 114 scans relative to the section. On the other hand, the processing unit 204 gives a selection signal SC for designating ON / OFF of the nozzle 118 at each ejection timing to the head driving unit 208 based on the ejection data stored in the storage unit 202 and the ejection cycle EP. . The head drive unit 208 gives the droplet ejection head 114 with an ejection signal ES necessary for ejecting the liquid material 111 based on the selection signal SC. As a result, the liquid material 111 is discharged as droplets from the corresponding nozzle 118 in the droplet discharge head 114.

The control means 112 may be a computer including a CPU, a ROM, and a RAM. In this case, the function of the control unit 112 is realized by a software program executed by a computer. Of course, the control means 112 may be realized by a dedicated circuit (hardware).
Next, the configuration and function of the head drive unit 208 in the control unit 112 will be described.
As shown in FIG. 6A, the head drive unit 208 includes one drive signal generation unit 203 and a plurality of analog switches AS. As shown in FIG. 6B, the drive signal generation unit 203 generates a drive signal DS. The potential of the drive signal DS changes with respect to the reference potential L over time. Specifically, the drive signal DS includes a plurality of ejection waveforms P that are repeated at the ejection cycle EP. Here, the discharge waveform P corresponds to a drive voltage waveform to be applied between a pair of electrodes of the corresponding vibrator 124 in order to discharge one droplet from the nozzle 118.
The drive signal DS is supplied to each input terminal of the analog switch AS. Each of the analog switches AS is provided corresponding to each of the ejection units 127. That is, the number of analog switches AS and the number of ejection units 127 (that is, the number of nozzles 118) are the same.

  The processing unit 204 gives a selection signal SC indicating ON / OFF of the nozzle 118 to each analog switch AS. Here, the selection signal SC can take either a high level or a low level independently for each analog switch AS. On the other hand, the analog switch AS supplies the ejection signal ES to the electrode 124A of the vibrator 124 according to the drive signal DS and the selection signal SC. Specifically, when the selection signal SC is at a high level, the analog switch AS propagates the drive signal DS as the ejection signal ES to the electrode 124A. On the other hand, when the selection signal SC is at a low level, the potential of the ejection signal ES output from the analog switch AS becomes the reference potential L. When the drive signal DS is applied to the electrode 124A of the vibrator 124, the liquid material 111 is discharged from the nozzle 118 corresponding to the vibrator 124. A reference potential L is applied to the electrode 124B of each vibrator 124.

In the example shown in FIG. 6B, the high-level period in each of the two selection signals SC so that the discharge waveform P appears in the cycle 2EP that is twice the discharge cycle EP in each of the two discharge signals ES. A low-level period is set. As a result, the liquid material 111 is discharged from each of the two corresponding nozzles 118 at a period of 2EP. A common drive signal DS from the common drive signal generation unit 203 is given to each of the vibrators 124 corresponding to these two nozzles 118. For this reason, the liquid material 111 is discharged from the two nozzles 118 at substantially the same timing.
With the above configuration, the droplet discharge device 100 performs discharge scanning for applying the liquid material 111 to the substrate 10 </ b> A in accordance with the discharge data given to the control unit 112.

<Embodiment of droplet application method>
The droplet applying method of the present invention is performed using the droplet discharge device 100 as described above. Hereinafter, embodiments of the droplet applying method of the present invention will be described with reference to FIGS.
In the following description, it is assumed that a color filter substrate used for a liquid crystal display device is manufactured. However, as will be described later, the present invention is applied to manufacturing various electro-optical devices other than the color filter substrate. be able to.

  As shown in FIG. 7, a plurality of elongated sections 18R, 18G, and 18B to be color elements (pixels) are formed on the base 10A so as to be surrounded by the black matrix 14 and the bank 16. The section 18R is an area that should be a color element of R (red), the section 18G is an area that should be a color element of G (green), and the section 18B should be a color element of B (blue). It is an area.

Each of the sections 18R, 18G, and 18B has a substantially rectangular shape, the major axis direction (longitudinal direction) is parallel to the Y axis direction, and the minor axis direction is parallel to the X axis direction.
The set of partitions 18R, 18G, and 18B arranged in parallel corresponds to one pixel of the color filter substrate. A large number of sets of sections 18R, 18G, and 18B are formed in a matrix on the base 10A. That is, the base body 10A is for manufacturing a color filter substrate having a stripe arrangement.

The droplet discharge device 100 operates the second position control device 108 to move the substrate 10A and the droplet discharge means 103 relative to each other in the Y-axis direction, while supplying the liquid material 111 for forming color elements to the nozzle 118. The operation of ejecting the droplets as droplets and applying them to the section on the substrate 10A (this operation is referred to as “ejection scanning” in this specification) is performed once or a plurality of times.
In the ejection scanning, in principle, the droplet ejection means 103 is relatively moved in the Y-axis direction so that the droplet ejection means 103 passes relatively over the substrate 10A from end to end.
In the following description, the case where droplets are applied to the section 18R will be described as a representative, but droplets can be applied to the sections 18G and 18B in the same manner. Although only one section 18R is shown in the drawing, droplets can be similarly applied to all the sections 18R passing under the droplet discharge head 114 in one discharge scan.

  In the droplet applying method of the present invention, the first droplet of the liquid material 111 is discharged from the nozzle 118 to the section 18R. The first droplet may be one droplet or a plurality of droplets. After that, while the first droplet (liquid material 111) that has landed on the section 18R is not dried (while it is in a liquid state), the subsequent droplet is further discharged one or more times to the same section 18R. Each subsequent droplet may be one drop or multiple drops.

In the present invention, a plurality of liquid droplets are applied to one section 18R, and these liquid droplets are combined in a liquid state, so that the liquid material 111 can be uniformly spread to every corner of the section 18R. . Therefore, it is possible to reliably prevent occurrence of color loss.
Further, the present invention is characterized in that the total amount of each subsequent droplet is smaller than the total amount of the preceding droplet. This has the following advantages.

Since the first droplet (the liquid material 111) has already adhered when the subsequent droplet lands, the first droplet that has adhered has a strong impact when the second droplet lands. That is, the red liquid material 111 may splash and jump, and enter the adjacent green section 18G or blue section 18B. As a result, the colors are mixed to change the color, resulting in a deterioration in quality.
On the other hand, in the present invention, since the subsequent droplets are made smaller (small amount), the impact can be weakened when the subsequent droplets land, so the first droplets that have adhered to the first droplets. (Liquid material 111) is prevented from splashing and jumping, and even if it jumps, it can be effectively prevented from reaching the adjacent sections 18G and 18B. Therefore, the occurrence of color mixing as described above can be effectively prevented.

Further, since the amount of the first droplet is relatively large, the number of droplets required for applying the necessary amount of the liquid material 111 to the section 18R can be reduced, and the pixels can be formed quickly. Therefore, the production efficiency can be improved.
On the other hand, unlike the present invention, if the size of all the droplets is reduced without distinguishing between the first and second generations, color mixing can be prevented, but a necessary amount of the liquid material 111 is applied to the section 18R. The number of required droplets increases and production efficiency decreases.
In the present invention, from the viewpoint of balancing the color mixing prevention effect and the production efficiency improvement effect at a high level, the total amount of each subsequent droplet is preferably 30 to 70% of the total amount of the preceding droplet.

Hereinafter, it demonstrates more concretely, referring drawings.
7 and 8 are diagrams for explaining the first embodiment of the droplet applying method of the present invention.
In the first embodiment shown in FIGS. 7 and 8, one droplet of the first droplet 51 is ejected from one nozzle 118. Thereafter, subsequent droplets are ejected from the same nozzle 118 four times at a time. That is, reference numeral 52 is the first subsequent droplet, reference numeral 53 is the second time, reference numeral 54 is the third time, and reference numeral 55 is the fourth time. As shown in FIG. 7, the amount of one droplet of the subsequent droplets 52, 53, 54, 55 is adjusted to be smaller than the amount of one droplet of the preceding droplet 51.

The amount of one droplet discharged from the nozzle 118 can be adjusted by changing the shape of the drive voltage waveform (see FIG. 6) applied to the vibrator 124.
In the example shown in the figure, the amount of one droplet of the subsequent droplets 52, 53, 54, 55 is the same as each other, but may be different from each other, and each amount is smaller than that of the preceding droplet 51. It only has to be.

  In the present invention, it is preferable that the flight speed (discharge speed) of the subsequent droplets 52, 53, 54, and 55 is slower than the flight speed (discharge speed) of the preceding droplet 51. Thereby, since the impact at the time of landing of the subsequent droplets 52, 53, 54, 55 can be further weakened, the scattering of the liquid material 111 can be more reliably prevented. The flying speed of the droplet can be adjusted by changing the shape of the drive voltage waveform applied to the vibrator 124.

  In this embodiment, the first droplet 51 and the subsequent droplets 52, 53, 54, and 55 are moved while the base body 10A and the nozzle 118 are relatively moved in the Y-axis direction during one ejection scan. Are sequentially discharged from the nozzle 118. Thereby, as shown in FIG. 8, the landing positions of the first droplet 51 and the subsequent droplets 52, 53, 54, 55 can be shifted little by little. Therefore, the liquid material 111 can be more uniformly wetted and spread to every corner of the partition 18R.

A plurality of dots formed by landing the first droplet 51 and the subsequent droplets 52, 53, 54, and 55 are arranged along the Y-axis direction that is the scanning direction. As shown in FIG. It is preferable to apply droplets at intervals such that the dots are connected (continuous).
Here, “interval at which dots formed by droplets are connected” means that dots formed by each droplet landing on the bottom surface of section 18R exist independently without being combined with other droplets. It is the interval that connects them when they are assumed to have done.

  The diameter of a dot formed by landing one drop of the liquid material 111 discharged from the nozzle 118 on the bottom surface of the section 18R is the volume of the one drop of the liquid material 111 and the contact angle (wetting of the liquid material 111 with respect to the bottom surface of the section 18R). Therefore, the value of the diameter of the dot formed by one drop of the liquid material 111 landing on the bottom surface of the section 18R is examined in advance by experiment or theoretical calculation. It is possible to perform control to apply droplets at an “interval that connects”.

  In addition, although the dots formed by the first droplet 51 and the subsequent droplets 52, 53, 54, and 55 shown in FIG. 8 are drawn so as to overlap with each other, it is natural that these dots are actually overlapped. A plurality of droplets stick to each other to be integrated and spread around the periphery. That is, FIG. 8 is schematically drawn for easy understanding of the droplet application method of the present invention, and does not represent the actual wet spreading method of the liquid material 111 applied in the section 18R ( The same applies to FIGS. 9 and 10.

Note that the first droplet 51 and the subsequent droplets 52, 53, 54, and 55 do not have to be discharged all in one discharge scan, as long as the liquid material 111 that has previously adhered is not dry. For example, the discharge may be divided into a plurality of discharge scans.
In the present invention, the liquid material 111 is applied to the compartments 18R, and the applied liquid material 111 is repeatedly dried (prebaked) with a drying device so that the color element materials are laminated. Also good. In that case, in the present invention, when the droplet of the liquid material 111 is discharged again to the section 18R after drying, the relationship between the first droplet and the subsequent droplet described above is applied back to the start. That is, the first liquid droplet discharged to the section 18R after drying becomes the first liquid droplet.

FIG. 9 is a view for explaining a second embodiment of the droplet applying method of the present invention. Hereinafter, the second embodiment of the droplet applying method of the present invention will be described with reference to the same drawing. However, the difference from the above-described embodiment will be mainly described, and description of similar matters will be omitted.
In the second embodiment shown in FIG. 9, the first droplets 61a and 61b are ejected one droplet at a time from two nozzles 118 (hereinafter referred to as nozzles 118a and 118b) in one section 18R. Thereafter, the subsequent droplets are ejected from the nozzles 118a and 118b one at a time, five times. That is, reference numerals 62a and 62b are the first subsequent droplets, reference numerals 63a and 63b are the second, reference numerals 64a and 64b are the third, reference numerals 65a and 65b are the fourth, reference numerals 66a and 66b are the fifth. . Then, the amount of one droplet of the subsequent droplets 62a, 62b, 63a, 63b, 64a, 64b, 65a, 65b, 66a, 66b is adjusted to be smaller than the amount of one droplet of the preceding droplets 61a, 61b. Is done.

Similarly to the above-described embodiment, the droplets are applied at intervals such that dots formed by the droplets are connected to each other.
According to the droplet applying method of the second embodiment, the same effect as that of the first embodiment can be obtained.
FIG. 10 is a view for explaining a third embodiment of the droplet applying method of the present invention. Hereinafter, the third embodiment of the droplet applying method of the present invention will be described with reference to the same drawing. However, the difference from the above-described embodiment will be mainly described, and description of similar matters will be omitted.

  In the third embodiment shown in FIG. 10, the first droplets 71a and 71b are discharged one droplet at a time from two nozzles 118 (hereinafter referred to as nozzles 118a and 118b) per section 18R. Thereafter, the subsequent droplets are ejected from the nozzles 118a and 118b alternately one by one, five times. That is, reference numeral 72a is a first subsequent droplet discharged from the nozzle 118a, reference numeral 73b is a second subsequent droplet discharged from the nozzle 118b, and reference numeral 74a is a third droplet discharged from the nozzle 118a. Reference numeral 75b is the fourth subsequent droplet discharged from the nozzle 118b, and reference numeral 76a is the fifth subsequent droplet discharged from the nozzle 118a. The amount of one drop of the subsequent droplets 72a, 73b, 74a, 75b, and 76a is the same as the amount of one drop of the preceding droplets 71a and 71b.

In this way, if the first droplet is ejected simultaneously from a plurality of nozzles per section and the second droplet is ejected from a smaller number of nozzles than the first droplet, The amount of one drop may be the same as the amount of one drop of the previous droplet.
Similarly to the above-described embodiment, the droplets are applied at intervals such that dots formed by the droplets are connected to each other.
According to the droplet applying method of the third embodiment, the same effect as that of the first embodiment can be obtained.

<Second Embodiment of Droplet Discharge Device>
Next, an example in which the present invention is applied to the manufacture of a color filter substrate will be described in more detail.
A substrate 10A shown in FIGS. 11A and 11B is a substrate that becomes the color filter substrate 10 through processing by a manufacturing apparatus 1 (FIG. 12) described later. The base body 10A has a plurality of sections 18R, 18G, and 18B arranged in a matrix.

  Specifically, the base body 10 </ b> A includes a support substrate 12 having optical transparency, a black matrix 14 formed on the support substrate 12, and a bank 16 formed on the black matrix 14. The black matrix 14 is formed of a light-shielding material. The black matrix 14 and the bank 16 on the black matrix 14 are positioned on the support substrate 12 so that a plurality of matrix-like light transmission portions, that is, a plurality of matrix-like pixel regions are defined.

  In each pixel region, the concave portions defined by the support substrate 12, the black matrix 14, and the bank 16 correspond to the partition 18R, the partition 18G, and the partition 18B. The section 18R is an area where the filter layer 111FR that transmits only light in the red wavelength band is to be formed, and the section 18G is an area where the filter layer 111FG that transmits only the light in the green wavelength band is to be formed. The section 18B is an area where the filter layer 111FB that transmits only light in the blue wavelength region is to be formed.

  The base 10A shown in FIG. 11B is located on a virtual plane parallel to both the X-axis direction and the Y-axis direction. In the base 10A, the sections 18R, 18G, and 18B are periodically arranged in this order in the X-axis direction. On the other hand, the sections 18R are arranged in a line at a predetermined constant interval in the Y axis direction, and the sections 18G are arranged in a line at a predetermined constant interval in the Y axis direction, and The partitions 18B are arranged in a line at a predetermined constant interval in the Y-axis direction. Note that the X-axis direction and the Y-axis direction are orthogonal to each other.

  The interval LRY along the X-axis direction between the partitions 18R, that is, the pitch is approximately 560 μm. This interval is the same as the interval LGY along the X-axis direction between the partitions 18G, and is the same as the interval LBY along the X-axis direction between the partitions 18B. The planar image of the section 18R is a rectangle determined by the long side and the short side. Specifically, the length of the section 18R in the X-axis direction is approximately 100 μm, and the length in the Y-axis direction is approximately 300 μm. The section 18G and the section 18B also have the same shape and size as the section 18R. The spacing between the partitions and the size of the partitions correspond to the spacing and size of pixel regions corresponding to the same color in a high-definition television having a size of about 40 inches.

  The manufacturing apparatus 1 shown in FIG. 12 is an apparatus that discharges a corresponding color filter material to each of the sections 18R, 18G, and 18B of the base body 10A of FIG. Specifically, the manufacturing apparatus 1 includes a droplet discharge device 100R that applies the color filter material 111R to all the compartments 18R by the droplet application method described above, and a drying device 150R that dries the color filter material 111R on the compartments 18R. A droplet discharge device 100G for applying the color filter material 111G to all of the compartments 18G by the droplet applying method described above, a drying device 150G for drying the color filter material 111G on the compartment 18G, and the droplet applying method described above. The droplet discharge device 100B for applying the color filter material 111B to all the compartments 18B, the drying device 150B for drying the color filter material 111B in the compartments 18B, and the color filter materials 111R, 111G, 111B are heated again (post-baking). Oven 160 and post The droplet discharge device 100C for providing the protective film 20 on the layer of the color filter material 111R, 111G, 111B, the drying device 150C for drying the protective film 20, and the dried protective film 20 are heated again. A curing device 165 for curing. Further, the manufacturing apparatus 1 includes a droplet discharge device 100R, a drying device 150R, a droplet discharge device 100G, a drying device 150G, a droplet discharge device 100B, a drying device 150B, a droplet discharge device 100C, a drying device 150C, and a curing device 165. A transport device 170 that transports the base body 10A in order is also provided.

  As shown in FIG. 13, the configuration of the droplet discharge device 100R is basically the same as the configuration of the droplet discharge device 100 of the first embodiment. However, instead of the tank 101 and the tube 110, the droplet discharge device 100R includes a tank 101R and a tube 110R for the liquid color filter material 111R, and the configuration of the droplet discharge device 100R is the droplet discharge device 100. The configuration is different. Note that, among the components of the droplet discharge device 100R, the same components as those of the droplet discharge device 100 are denoted by the same reference numerals as those in the first embodiment, and redundant description is omitted.

  The configuration of the droplet discharge device 100G, the configuration of the droplet discharge device 100B, and the configuration of the droplet discharge device 100C are basically the same as the configuration of the droplet discharge device 100R. However, instead of the tank 101R and the tube 110R in the droplet discharge device 100R, the droplet discharge device 100G includes a tank and a tube for the color filter material 111G, and the configuration of the droplet discharge device 100G is a droplet discharge. Different from the configuration of the device 100R. Similarly, in place of the tank 101R and the tube 110R, the droplet discharge device 100B includes a tank and a tube for the color filter material 111B, and the configuration of the droplet discharge device 100B is the same as the configuration of the droplet discharge device 100R. Different. Furthermore, the configuration of the droplet discharge device 100C is different from the configuration of the droplet discharge device 100R in that the droplet discharge device 100C includes a tank and a tube for a protective film material instead of the tank 101R and the tube 110R. Note that the liquid color filter materials 111R, 111G, and 111B in the present embodiment are examples of liquid materials.

  Next, the operation of the droplet discharge device 100R will be described. The droplet discharge device 100R discharges the same material to a plurality of sections 18R arranged in a matrix on the base 10A. As described in the third embodiment, the base body 10A may be replaced with a substrate for an electroluminescence display device, and may further be replaced with a rear substrate for a plasma display device. You may replace with the board | substrate of the image display apparatus provided with the element.

Below, a series of processes until the color filter substrate 10 is obtained by the manufacturing apparatus 1 will be described.
First, the base body 10A of FIG. 11 is prepared according to the following procedure. First, a metal thin film is formed on the support substrate 12 by sputtering or vapor deposition. Thereafter, a lattice-like black matrix 14 is formed from the metal thin film by a photolithography process. Examples of the material of the black matrix 14 are metal chromium and chromium oxide. Note that the support substrate 12 is a substrate having optical transparency with respect to visible light, for example, a glass substrate. Subsequently, a resist layer made of a negative photosensitive resin composition is applied so as to cover the support substrate 12 and the black matrix 14. Then, the resist layer is exposed while closely contacting the mask film formed in a matrix pattern shape on the resist layer. Thereafter, the bank 16 is obtained by removing an unexposed portion of the resist layer by an etching process. The base body 10A is obtained through the above steps.

In place of the bank 16, a bank made of resin black may be used. In that case, the metal thin film (black matrix 14) becomes unnecessary, and the bank layer is only one layer.
Next, the substrate 10A is made lyophilic by oxygen plasma treatment under atmospheric pressure. By this processing, the surface of the support substrate 12, the surface of the black matrix 14, the surface of the bank 16, and the recesses defined by the support substrate 12, the black matrix 14, and the bank 16 (part of the pixel region) The surface becomes lyophilic. Further, thereafter, a plasma treatment using tetrafluoromethane as a treatment gas is performed on the base 10A. By the plasma treatment using tetrafluoromethane, the surface of the bank 16 in each recess is fluorinated (treated to be liquid repellent), whereby the surface of the bank 16 becomes liquid repellent. Note that the surface of the support substrate 12 and the surface of the black matrix 14 to which lyophilicity was previously imparted by plasma treatment using tetrafluoromethane slightly lose lyophilicity, but these surfaces are still lyophilic. maintain. As described above, the surface of the concave portion defined by the support substrate 12, the black matrix 14, and the bank 16 is subjected to a predetermined surface treatment, so that the surface of the concave portion becomes the partitions 18R, 18G, and 18B.

  Depending on the material of the support substrate 12, the material of the black matrix 14, and the material of the bank 16, a surface exhibiting desired lyophilicity and liquid repellency can be obtained without performing the above surface treatment. There is also. In such a case, the surface of the recess defined by the support substrate 12, the black matrix 14, and the bank 16 is the sections 18R, 18G, and 18B without performing the surface treatment.

  The base body 10A on which the sections 18R, 18G, and 18B are formed is carried by the transport device 170 to the stage 106 of the droplet discharge device 100R. Then, as illustrated in FIG. 14A, the droplet discharge device 100R discharges the color filter material 111R from the droplet discharge head 114 so that the layer of the color filter material 111R is formed in all of the sections 18R. . Specifically, the droplet discharge device 100R applies the color filter material 111R to the section 18R by the droplet applying method described above. When the layer of the color filter material 111R is formed on all the sections 18R of the base body 10A, the transport device 170 positions the base body 10A in the drying device 150R. And the filter layer 111FR is obtained on the division 18R by drying the color filter material 111R on the division 18R completely.

  Next, the transport device 170 positions the base body 10A on the stage 106 of the droplet discharge device 100G. 14B, the droplet discharge device 100G discharges the color filter material 111G from the droplet discharge head 114 so that the layer of the color filter material 111G is formed in all the sections 18G. . Specifically, the droplet discharge device 100G applies the color filter material 111G to the section 18G by the droplet applying method described above. When the layer of the color filter material 111G is formed in all the sections 18G of the base body 10A, the transport device 170 positions the base body 10A in the drying device 150G. Then, the filter layer 111FG is obtained on the section 18G by completely drying the color filter material 111G on the section 18G.

  Next, the transport device 170 positions the base body 10A on the stage 106 of the droplet discharge device 100B. Then, as shown in FIG. 14C, the droplet discharge device 100B discharges the color filter material 111B from the droplet discharge head 114 so that the layer of the color filter material 111B is formed in all the sections 18B. . Specifically, the droplet discharge device 100B applies the color filter material 111B to the section 18B by the droplet applying method described above. When the layer of the color filter material 111B is formed in all the sections 18B of the base body 10A, the transport device 170 positions the base body 10A in the drying device 150B. Then, the filter layer 111FB is obtained on the section 18B by completely drying the color filter material 111B on the section 18B.

Next, the transfer device 170 positions the base body 10 </ b> A in the oven 160. Thereafter, the oven 160 reheats (post-bake) the filter layers 111FR, 111FG, and 111FB.
Next, the transport device 170 positions the base body 10A on the stage 106 of the droplet discharge device 100C. Then, the droplet discharge device 100C discharges a liquid protective film material so that the protective film 20 is formed so as to cover the filter layers 111FR, 111FG, 111FB and the bank 16. After the protective film 20 covering the filter layers 111FR, 111FG, 111FB and the bank 16 is formed, the transport device 170 positions the base body 10A in the drying device 150C. Then, after the drying device 150 </ b> C completely dries the protective film 20, the curing device 165 heats the protective film 20 and completely cures, whereby the base body 10 </ b> A becomes the color filter substrate 10.

<Third Embodiment of Droplet Discharge Device>
Next, the example which applied this invention to the manufacturing apparatus of an electroluminescent display apparatus is demonstrated.
A substrate 30A shown in FIGS. 15A and 15B is a substrate that becomes the electroluminescence display device 30 by processing by the manufacturing apparatus 2 (FIG. 16) described later. The base body 30A has a plurality of sections 38R, 38G, and 38B arranged in a matrix.

  Specifically, the base body 30A includes a support substrate 32, a circuit element layer 34 formed on the support substrate 32, a plurality of pixel electrodes 36 formed on the circuit element layer 34, and a plurality of pixel electrodes 36. And a bank 40 formed therebetween. The support substrate 32 is a substrate having optical transparency with respect to visible light, and is, for example, a glass substrate. Each of the plurality of pixel electrodes 36 is an electrode having optical transparency with respect to visible light, for example, an ITO (Indium-Tin Oxide) electrode. The plurality of pixel electrodes 36 are arranged in a matrix on the circuit element layer 34, and each define a pixel region. The bank 40 has a lattice shape and surrounds each of the plurality of pixel electrodes 36. The bank 40 includes an inorganic bank 40A formed on the circuit element layer 34 and an organic bank 40B positioned on the inorganic bank 40A.

  The circuit element layer 34 includes a plurality of scan electrodes extending in a predetermined direction on the support substrate 32, an insulating film 42 formed so as to cover the plurality of scan electrodes, and a plurality of scan electrodes positioned on the insulating film 42. A plurality of signal electrodes extending in a direction orthogonal to the direction in which the electrodes extend, a plurality of switching elements 44 located near the intersections of the scan electrodes and the signal electrodes, and polyimide formed so as to cover the plurality of switching elements 44 And an interlayer insulating film 45. The gate electrode 44G and the source electrode 44S of each switching element 44 are electrically connected to the corresponding scan electrode and the corresponding signal electrode, respectively. A plurality of pixel electrodes 36 are located on the interlayer insulating film 45. The interlayer insulating film 45 is provided with a through hole 44V at a portion corresponding to the drain electrode 44D of each switching element 44, and the switching element 44 and the corresponding pixel electrode 36 are connected via the through hole 44V. An electrical connection between them is formed. Each switching element 44 is located at a position corresponding to the bank 40. That is, when viewed from a direction perpendicular to the paper surface of FIG. 15B, each of the plurality of switching elements 44 is positioned so as to be covered by the bank 40.

  A recess (a part of the pixel area) defined by the pixel electrode 36 and the bank 40 of the base body 30A corresponds to the partition 38R, the partition 38G, and the partition 38B. The section 38R is a region where the light emitting layer 211FR that emits light in the red wavelength region is to be formed, and the section 38G is a region where the light emitting layer 211FG that emits light in the green wavelength region is to be formed, The section 38B is a region where the light emitting layer 211FB that emits light in the blue wavelength region is to be formed.

  The base body 30A shown in FIG. 15B is located on a virtual plane parallel to both the X-axis direction and the Y-axis direction. In the base body 30A, the section 38R, the section 38G, and the section 38B are periodically arranged in this order in the X-axis direction. On the other hand, the sections 38R are arranged in a line at a predetermined fixed interval in the Y axis direction, and the sections 38G are arranged in a line at a predetermined fixed interval in the Y axis direction. The sections 38B are arranged in a line at predetermined intervals in the Y-axis direction. Note that the X-axis direction and the Y-axis direction are orthogonal to each other.

  The interval LRY along the X-axis direction between the partitions 38R, that is, the pitch is approximately 560 μm. This interval is the same as the interval LGY along the X-axis direction between the partitions 38G, and is the same as the interval LBY along the X-axis direction between the partitions 18B. The planar image of the section 38R is a rectangle determined by the long side and the short side. Specifically, the length of the section 38R in the X-axis direction is approximately 100 μm, and the length in the Y-axis direction is approximately 300 μm. The section 38G and the section 38B also have the same shape and size as the section 38R. The spacing between the partitions and the size of the partitions correspond to the spacing and size of pixel regions corresponding to the same color in a high-definition television having a size of about 40 inches.

  The manufacturing apparatus 2 shown in FIG. 16 is an apparatus that discharges a corresponding luminescent material to each of the sections 38R, 38G, and 38B of the base body 30A in FIG. The manufacturing apparatus 2 includes a droplet discharge device 200R that applies the luminescent material 211R to all of the sections 38R, a drying device 250R that dries the luminescent material 211R on the sections 38R, and a liquid that applies the luminescent material 211G to all of the sections 38G. The droplet discharge device 200G, the drying device 250G for drying the luminescent material 211G on the section 38G, the droplet discharge device 200B for applying the luminescent material 211B to all the sections 38B, and the drying for drying the luminescent material B on the section 38B And a device 250B. The manufacturing apparatus 2 further includes a transport device 270 that transports the base body 30A in the order of the droplet discharge device 200R, the drying device 250R, the droplet discharge device 200G, the drying device 250G, the droplet discharge device 200B, and the drying device 250B. .

A droplet discharge device 200R illustrated in FIG. 17 includes a tank 201R that holds a liquid light-emitting material 211R, a tube 210R, and a discharge scanning unit 102 that is supplied with the light-emitting material 211R from the tank 201R via the tube 210R. . Since the configuration of the ejection scanning unit 102 is the same as the configuration of the ejection scanning unit 102 (FIG. 1) of the first embodiment, the same reference numerals are given to the same components, and redundant description is omitted. The configuration of the droplet discharge device 200G and the configuration of the droplet discharge device 200B are both basically the same as the configuration of the droplet discharge device 200R. However, the configuration of the droplet discharge device 200G is different from the configuration of the droplet discharge device 200R in that the droplet discharge device 200G includes a tank and a tube for the light emitting material 211G instead of the tank 201R and the tube 210R. Similarly, the configuration of the droplet discharge device 200B is different from the configuration of the droplet discharge device 200R in that the droplet discharge device 200B includes a tank and a tube for the light emitting material 211B instead of the tank 201R and the tube 210R. . The liquid light emitting materials 211R, 211B, and 211G in the present embodiment are examples of liquid materials.
A method for manufacturing the electroluminescence display device 30 using the manufacturing apparatus 2 will be described. First, a base 30A shown in FIG. 15 is manufactured using a known film forming technique and patterning technique.

  Next, the base 30A is made lyophilic by oxygen plasma treatment under atmospheric pressure. By this processing, the surface of the pixel electrode 36, the surface of the inorganic bank 40A, and the surface of the organic bank 40B in the respective recesses (a part of the pixel region) defined by the pixel electrode 36 and the bank 40 are made lyophilic. Present. Further, thereafter, a plasma process using tetrafluoromethane as a process gas is performed on the base 30A. By the plasma treatment using tetrafluoromethane, the surface of the organic bank 40B in each recess is fluorinated (treated to be liquid repellent) so that the surface of the organic bank 40B exhibits liquid repellency. Become. Note that the surface of the pixel electrode 36 and the surface of the inorganic bank 40A previously given lyophilicity by plasma treatment using tetrafluoromethane lose some lyophilicity, but still maintain lyophilicity. . As described above, the surface of the concave portion defined by the pixel electrode 36 and the bank 40 is subjected to a predetermined surface treatment, so that the surface of the concave portion becomes the partitions 38R, 38G, and 38B.

  Depending on the material of the pixel electrode 36, the material of the inorganic bank 40, and the material of the organic bank 40, a surface exhibiting desired lyophilicity and liquid repellency can be obtained without performing the above surface treatment. Sometimes. In such a case, the surface of the recess defined by the pixel electrode 36 and the bank 40 is the sections 38R, 38G, and 38B without performing the surface treatment.

  Here, the corresponding hole transport layers 37R, 37G, and 37B may be formed on each of the plurality of pixel electrodes 36 subjected to the surface treatment. If the hole transport layers 37R, 37G, and 37B are positioned between the pixel electrode 36 and light emitting layers 211FR, 211FG, and 211FB, which will be described later, the light emission efficiency of the electroluminescent display device is increased. When a hole transport layer is provided on each of the plurality of pixel electrodes 36, the recesses defined by the hole transport layer and the bank 40 correspond to the sections 38R, 38G, and 38B.

  Note that the hole transport layers 37R, 37G, and 37B can be formed by an inkjet method. In this case, the hole transport layer can be formed by applying a predetermined amount of a solution containing a material for forming the hole transport layers 37R, 37G, and 37B to each pixel region and then drying the solution. In addition, you may form a positive hole transport layer using the drawing method (droplet provision method) described in this specification.

  The base body 30A on which the sections 38R, 38G, and 38B are formed is transported to the stage 106 of the droplet discharge device 200R by the transport device 270. 18A, the droplet discharge device 200R discharges the light emitting material 211R from the droplet discharge head 114 so that the layer of the light emitting material 211R is formed in all the partitions 38R. Specifically, the droplet discharge device 200R applies the luminescent material 211R to the section 38R by the droplet applying method described above. When the layer of the light emitting material 211R is formed in all the sections 38R of the base body 30A, the transport device 270 positions the base body 30A in the drying device 250R. Then, the light emitting material 211R on the section 38R is completely dried to obtain the light emitting layer 211FR on the section 38R.

  Next, the transport device 270 positions the base body 30A on the stage 106 of the droplet discharge device 200G. Then, as illustrated in FIG. 18B, the droplet discharge device 200G discharges the light emitting material 211G from the droplet discharge head 114 so that the layer of the light emitting material 211G is formed in all the sections 38G. Specifically, the droplet discharge device 200G applies the luminescent material 211G to the section 38G by the droplet applying method described above. When the layer of the light emitting material 211G is formed in all the sections 38G of the base body 30A, the transport device 270 positions the base body 30A in the drying device 250G. And the luminescent material 211FG is obtained on the division 38G by drying the luminescent material G on the division 38G completely.

  Next, the transport device 270 positions the base body 30A on the stage 106 of the droplet discharge device 200B. Then, as shown in FIG. 18C, the droplet discharge device 200B discharges the light emitting material 211B from the droplet discharge head 114 so that the layer of the light emitting material 211B is formed in all the sections 38B. Specifically, the droplet discharge device 200B applies the light emitting material 211B to the section 38B by the droplet applying method described above. When the layer of the light emitting material 211B is formed in all the sections 38B of the base body 30A, the transport device 270 positions the base body 30A in the drying device 250B. Then, by completely drying the light emitting material 211B on the section 38B, the light emitting layer 211FB is obtained on the section 38B.

Next, as shown in FIG. 18D, the counter electrode 46 is provided so as to cover the light emitting layers 211FR, 211FG, 211FB, and the bank 40. The counter electrode 46 functions as a cathode.
Then, the electroluminescent display apparatus 30 shown in FIG.18 (d) is obtained by adhere | attaching the sealing substrate 48 and the base | substrate 30A in a mutual peripheral part. An inert gas 49 is enclosed between the sealing substrate 48 and the base body 30A.
In the electroluminescence display device 30, light emitted from the light emitting layers 211 FR, 211 FG, and 211 FB is emitted through the pixel electrode 36, the circuit element layer 34, and the support substrate 32. The electroluminescence display device that emits light through the circuit element layer 34 in this manner is called a bottom emission type display device.

  As described above, the case where the present invention is applied to the manufacture of a liquid crystal display device (color filter substrate) and the manufacture of an electroluminescence display device has been described. However, the present invention is not limited thereto, and for example, a back substrate of a plasma display device The present invention can also be applied to the manufacture of an image display device (also referred to as SED (Surface-Conduction Electron-Emitter Display) or FED (Field Emission Display)) equipped with an electron-emitting device.

<Embodiment of Electronic Device >
An image display device (electro-optical device) 1000 such as a liquid crystal display device, an electroluminescence display device, a plasma display device, or an image display device provided with an electron-emitting device manufactured by the method as described above is a display unit of various electronic devices. Can be used.
FIG. 19 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer to which an electronic device is applied.

In this figure, a personal computer 1100 includes a main body 1104 having a keyboard 1102 and a display unit 1106. The display unit 1106 is supported by the main body 1104 via a hinge structure so as to be rotatable. Yes.
In the personal computer 1100, the display unit 1106 includes an image display device 1000.

FIG. 20 is a perspective view illustrating a configuration of a mobile phone (including PHS) to which an electronic device is applied.
In this figure, a cellular phone 1200 is provided with an image display device 1000 in a display unit, together with a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206.
FIG. 21 is a perspective view illustrating a configuration of a digital still camera to which an electronic device is applied. In this figure, connection with an external device is also simply shown.

Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an imaging device such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.
On the back of a case (body) 1302 in the digital still camera 1300, an image display device 1000 is provided in the display unit, and is configured to display based on an imaging signal from the CCD, and a finder that displays a subject as an electronic image. Function as.

A circuit board 1308 is installed inside the case. The circuit board 1308 is provided with a memory that can store (store) an imaging signal.
A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side of the case 1302 (on the back side in the illustrated configuration).
When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory of the circuit board 1308.

  In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the data communication input / output terminal 1314 as necessary. Further, the imaging signal stored in the memory of the circuit board 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation.

Electronic devices include, for example, televisions, video cameras, viewfinder type, monitor direct view type video tape recorders, laptops, in addition to the personal computers (mobile personal computers), mobile phones, and digital still cameras described above. Type personal computer, car navigation device, pager, electronic notebook (including communication function), electronic dictionary, calculator, electronic game device, word processor, workstation, video phone, TV monitor for crime prevention, electronic binoculars, POS terminal, touch panel Equipped equipment (for example, cash dispenser of financial institution, automatic ticket vending machine), medical equipment (for example, electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram display device, ultrasonic diagnostic device, endoscope display device), fish finder , Various measuring instruments, instruments (for example, cars , Aircraft, instruments and ships), a flight simulator, various monitors, and a projection display such as a projector.
The droplet application method, droplet discharge device, and electro-optical device manufacturing method of the present invention have been described above with reference to the illustrated embodiment. However, the present invention is not limited to this. Each unit constituting the droplet discharge device can be replaced with any component that can exhibit the same function. Moreover, arbitrary components may be added.

1 is a perspective view of a droplet discharge device according to a first embodiment of the present invention. The figure which observed the droplet discharge means in the droplet discharge apparatus shown in FIG. 1 from the stage side. The figure which shows the bottom face of the droplet discharge head in the droplet discharge apparatus shown in FIG. 2A and 2B are diagrams illustrating a droplet discharge head in the droplet discharge apparatus illustrated in FIG. 1, in which FIG. The block diagram which shows the control means in the droplet discharge apparatus shown in FIG. (A) is a schematic diagram showing a head drive unit, (b) is a timing chart showing a drive signal, a selection signal, and an ejection signal in the head drive unit. The figure for demonstrating 1st Embodiment of the droplet provision method of this invention. The figure for demonstrating 1st Embodiment of the droplet provision method of this invention. The figure for demonstrating 2nd Embodiment of the droplet provision method of this invention. The figure for demonstrating 3rd Embodiment of the droplet provision method of this invention. The schematic diagram which shows the base | substrate which provides a droplet with the droplet discharge apparatus of 2nd Embodiment of this invention. The schematic diagram which shows the manufacturing apparatus containing the droplet discharge apparatus of 2nd Embodiment of this invention. The perspective view of the droplet discharge apparatus of 2nd Embodiment of this invention. The schematic diagram which shows the manufacturing method by the droplet discharge apparatus of 2nd Embodiment. The schematic diagram which shows the base | substrate which provides a droplet with the droplet discharge apparatus of 3rd Embodiment of this invention. The schematic diagram which shows the manufacturing apparatus containing the droplet discharge apparatus of 3rd Embodiment of this invention. The perspective view of the droplet discharge apparatus of 3rd Embodiment of this invention. FIG. 9 is a schematic diagram illustrating a manufacturing method using a droplet discharge device according to a third embodiment. The perspective view which shows the structure of the mobile type (or notebook type) personal computer to which the electronic device is applied . The perspective view which shows the structure of the mobile telephone (PHS is also included) to which the electronic device is applied. The perspective view which shows the structure of the digital still camera to which an electronic device is applied.

Explanation of symbols

  1, 2... Manufacturing apparatus 51, 61 a, 61 b, 71 a, 71 b... Initial droplet 52, 53, 54, 55, 62 a, 62 b, 63 a, 63 b, 64 a, 64 b, 65 a, 65 b, 66 a, 66 b, 72a, 73b, 74a, 75b, 76a... Subsequent droplets 100, 100R, 100G, 100B, 100C, 200R, 200G, 200B... Droplet ejection devices 101, 101R, 201R... Tank 102. DESCRIPTION OF SYMBOLS 103 ... Droplet discharge means 104 ... 1st position control apparatus 105 ... Carriage 106 ... Stage 108 ... 2nd position control apparatus 110, 110R, 210R ... Tube 111 ... Liquid material 112 ... Control means 114 …… Droplet discharge heads 116A, 116B …… Nozzle rows 118, 118a, 118b …… No 118R …… reference nozzle 120 …… cavity 122 …… partition wall 124 …… vibrator 124A, 124B …… electrode 124C …… piezo element 126 …… vibrating plate 127 …… discharge part 128 …… nozzle plate 129 …… puddle 130 ... Supply port 131 ... Hole 200 ... Buffer memory 202 ... Storage means 203 ... Drive signal generator 204 ... Processing unit 206 ... Scanning drive unit 208 ... Head drive unit AS ... Analog switch DS ... ... Drive signal SC ... Selection signal ES ... Discharge signal 10A, 30A ... Substrate 10 ... Color filter substrate 12, 32 ... Support substrate 14 ... Black matrix 16, 40 ... Bank 20 ... Protective film 18R, 18G, 18B, 38R, 38G, 38B …… Partition 111FR, 111FG , 111FB …… Filter layer 30 …… Electroluminescence display device 34 …… Circuit element layer 36 …… Pixel electrode 37R, 37G, 37B …… Hole transport layer 40A …… Inorganic bank 40B …… Organic bank 42 …… Insulating film 44 …… Switching element 44G …… Gate electrode 44S …… Source electrode 44D …… Drain electrode 44V …… Through hole 45 …… Interlayer insulating film 46 …… Counter electrode 48 …… Sealing substrate 49 …… Inert gas 150C… ... Drying equipment 150R, 150G, 150B, 250R, 250G, 250B ... Drying equipment 111R, 111G, 111B ... Color filter material 160 ... Oven 165 ... Curing equipment 170, 270 ... Conveying equipment 211R, 211G, 211B ... ... Light emitting materials 211FR, 211FG 211FB …… Light emitting layer 1000 …… Image display device 1100 …… Personal computer 1102 …… Keyboard 1104 …… Main body 1106 …… Display unit 1200 …… Cellular phone 1202 …… Operation buttons 1204 …… Earpiece 1206 …… Sent 1300 …… Digital still camera 1302 …… Case (body) 1304 …… Light receiving unit 1306 …… Shutter button 1308 …… Circuit board 1312 …… Video signal output terminal 1314 …… Input / output terminal for data communication 1430 …… TV Monitor 1440: Personal computer

Claims (12)

A liquid material for forming a color element is moved from the nozzle while relatively moving a base on which a plurality of rectangular sections to be color elements are formed and a droplet discharge means having a nozzle for discharging droplets. A droplet applying method for discharging and applying to the compartment as a droplet,
When the subsequent droplets are further discharged to the compartment a plurality of times before the first droplet that has landed on the compartment is not dry, one droplet of the first droplet is simultaneously applied to each compartment from the two nozzles. The droplets are ejected side by side in the short axis direction of the compartment, and the subsequent droplets are alternately ejected multiple times along the major axis direction of the compartment one by one from the same nozzle that ejected the first droplet. And the total amount of each subsequent droplet is smaller than the total amount of the preceding droplets ,
Among the subsequent droplets, a dot formed immediately after landing with a droplet discharged from one of the two nozzles and a dot formed immediately after landing with a droplet discharged from the other nozzle The dots formed immediately after landing with droplets ejected from the one nozzle are separated from each other, and the dots formed immediately after landing with droplets ejected from the other nozzle are also separated from each other. A method for applying droplets, characterized in that: 2. The droplet according to claim 1, wherein a dot formed immediately after landing with the first subsequent droplet is connected to a dot formed immediately after landing with one of the first droplets. Grant method. The droplet applying method according to claim 1, wherein the first droplets are connected with dots formed immediately after landing of the droplets. 4. The droplet applying method according to claim 1 , wherein the amount of one droplet of the subsequent droplet is the same as the amount of one droplet of the preceding droplet. 4. The droplet applying method according to claim 1, wherein the amount of one droplet of the subsequent droplet is smaller than the amount of one droplet of the preceding droplet. 5. The droplet applying method according to any one of claims 1 to 5, wherein the amount of one droplet of the subsequent droplet for each time is the same. The droplet applying method according to claim 1, wherein the amount of one droplet of the subsequent droplet for each time is different from each other. 8. The dot formed immediately after landing by each of the first droplets is located at a position closest to one of the two ends located in the longitudinal direction of the section. The method for applying droplets as described. The droplet applying method according to claim 1 , wherein a total amount of the subsequent droplets is set to 30 to 70% of a total amount of the preceding droplets. The droplet applying method according to claim 1 , wherein a flight speed of the subsequent droplet is made slower than a flight speed of the preceding droplet. Droplet discharge means having a nozzle for discharging droplets;
A base on which a plurality of rectangular sections to be color elements are formed, and a moving means for relatively moving the droplet discharge means;
Control means for controlling the operation of the droplet discharge means and the moving means,
A liquid droplet ejection apparatus for ejecting a liquid material for forming a color element as a liquid droplet from the nozzle and applying the liquid material for forming a color element to the section while relatively moving the liquid droplet ejection unit and the substrate;
When the subsequent droplets are further discharged to the compartment a plurality of times before the first droplet that has landed on the compartment is not dry, one droplet of the first droplet is simultaneously applied to each compartment from the two nozzles. The droplets are ejected side by side in the short axis direction of the compartment, and the subsequent droplets are alternately ejected multiple times along the major axis direction of the compartment one by one from the same nozzle that ejected the first droplet. And the total amount of each subsequent droplet is smaller than the total amount of the preceding droplets ,
Among the subsequent droplets, a dot formed immediately after landing with a droplet discharged from one of the two nozzles and a dot formed immediately after landing with a droplet discharged from the other nozzle The dots formed immediately after landing with droplets ejected from the one nozzle are separated from each other, and the dots formed immediately after landing with droplets ejected from the other nozzle are also separated from each other. A droplet discharge device characterized by that . An electro-optical device comprising a step of manufacturing a color element-attached substrate by forming color elements in a plurality of sections on a substrate using the droplet applying method according to claim 1. Production method.

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