JP4561107B2 - Heating apparatus and heating method - Google Patents

Description

The present invention relates to a heating apparatus and a heating method , and particularly in heating an object to be heated that requires a long heating time, the process lead time is short, the uniformity of the temperature distribution in the heating chamber, and the atmospheric gas concentration. The present invention relates to a heating apparatus and a heating method capable of stably maintaining uniformity.

  In the manufacture of electronic components such as semiconductor components or electronic devices using these electronic components, a thermostatic bath is used to heat or dry these electronic components or electronic devices at a predetermined temperature. A method of circulating hot air heated by an internal heater in the thermostat is widely used (for example, see Patent Document 1).

  FIG. 3 is a cross-sectional view of a conventional heating apparatus that performs heating by circulating hot air. When this heating device is heating an object to be heated, the open / close shutter 130 is pulled upward and opened, and the high-temperature atmosphere gas heated by the atmosphere gas heater 111 is supplied to the circulation fan. After circulating through the air filter 131 and passing through the air filter 131 to heat the object to be heated (not shown) placed on the front surface of the air filter 131, it is again heated by the atmospheric gas heater 111 to be a circulation fan. Cycle through 121. When supplying the object to be heated sent from the previous process into the heating chamber 101, the supply / discharge door 113 is opened to supply the object to be heated into the heating chamber 101. Prior to that, the supply / discharge door is supplied. The open / close exhaust damper 129 is opened and the open / close shutter 130 is closed so that the operator is not exposed to hot air when the 113 is opened, and then the supply / discharge door 113 is opened. Next, after supplying the object to be heated into the heating chamber 101, the supply / discharge door 113 is closed, the openable shutter 130 is opened, and the openable exhaust damper 129 is closed. Done. In the state where the openable exhaust damper 129 is open, the atmospheric gas is supplied through the atmospheric gas supply pipe 109. A similar process is performed when an object to be heated is taken out of the heating chamber 101.

When the interval of feeding the object to be heated from the previous process to the heating process is shorter than the heating time, a waiting time for the object to be heated from the previous process is provided, particularly when the heating time is long. The heated object is stored until the currently performed heating process is completed, and then supplied to the heating apparatus in a lump.
JP 2001-56141 A (page 3-4, FIG. 1-3)

  The first problem is that the process lead time becomes long. As mentioned above, when the interval of feeding the object to be heated from the previous process to the heating process is shorter than the heating time, the objects to be heated are collected and then supplied together into the heating device. In particular, when a long heating time is required, a large amount of stagnation time occurs in the object to be heated between the previous process and the heating process. For example, if the required heating holding time (heating time after the heated object reaches a predetermined temperature) is 5 hours and the interval of feeding the heated object from the previous process is 30 minutes, The object to be heated waiting to be sent from the previous process requires a stagnation time of at least 4 hours 30 minutes to 5 hours, and together with the required heating holding time of 5 hours, the lead time is nearly 10 hours in total. It will take. Further, the heating time is the sum of the temperature rise time until the temperature rises from the temperature at the time of supplying the article to be heated to the required heating temperature and the required heating holding time. When the objects to be heated are collectively supplied into the heating chamber, it takes time to increase the temperature of the objects to be heated. For example, if it takes 1 hour and 30 minutes to increase the temperature, the lead time becomes longer. In the above-described heating device, the temperature in the heating chamber decreases when supplying / discharging the object to be heated to / from the heating device, so that the lead time is further increased until the temperature in the heating chamber increases to a predetermined required heating temperature. Become.

  The second problem is that variations in temperature distribution and atmospheric gas concentration within and between heated objects become large. As described above, when supplying / discharging the object to be heated, since the supply / discharge door 113 is opened with the open / close shutter 130 closed, low-temperature air is mixed into the heated high-temperature atmospheric gas in the heating chamber, Temperature variation and atmospheric gas concentration variation occur in the heating chamber. Due to temperature variations in the heating chamber and atmospheric gas concentration variations, especially when heated objects are supplied together in the heating chamber, temperature variations and atmospheric gas concentration variations in the heated object and between heated objects increase, The low part is out of the heating conditions, and the low part of the atmospheric gas concentration causes quality defects such as oxidation and moisture absorption.

  The present invention has been made in view of the above-mentioned problems, and the object thereof is to shorten the process lead time even in the heating of a heated object that requires a long heating time, and the uniformity of the temperature distribution in the heating chamber. An object of the present invention is to provide a heating device that can keep the uniformity of the atmospheric gas concentration stable.

In order to achieve the above object, according to the present invention, a heating chamber in which a supply port to which an object to be heated is supplied and an outlet to which the object to be heated is discharged is formed and simultaneously heats the plurality of objects to be heated. And a heating mechanism that transports the object to be heated from the supply port to the discharge port, as a means for heating the object to be heated, heating the entire heating chamber in the heating chamber. There is provided a heating apparatus comprising an atmospheric gas circulation means for circulating the atmospheric gas and a direct conduction heating means for selectively heating the object to be heated closest to the supply port .

Moreover, in order to achieve the said objective, according to this invention, it is a heating method using said heating apparatus, Comprising: While the said to-be-heated material is conveyed from the said supply port to the said discharge port, the said supply port A heating method is provided , wherein the heating chamber is filled with an atmosphere gas having a substantially constant temperature and a substantially constant component / concentration, except in the vicinity of the discharge port and the vicinity of the discharge port. Is done.

The heating apparatus according to the present invention includes an atmospheric gas circulation means for circulating the heated atmospheric gas in the heating chamber, and a direct conduction heating means for selectively heating only a specific object to be heated. Therefore, it is possible to selectively heat only the object to be heated in a low temperature state, and it is possible to prevent the temperature of the heating chamber from being lowered due to new introduction of the object to be heated. Furthermore, shortening of the heating time of the object to be heated and downsizing of the apparatus can be realized.

Next, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a cross-sectional view of a heating apparatus according to the present invention. The heating chamber 1 is formed inside a heating tank 32 formed so that the supply port 16 and the discharge port 17 for the object to be heated face each other on both sides. A heat insulating tank 33 is disposed outside the heating tank 32, and the heat insulating chamber 2 is formed between the heat insulating tank 33 and the heating tank 32. A shutter opening / closing mechanism 28 is attached to the upper surface of the heat insulating tank 33, and the supply port shutter 26 and the discharge port shutter 27 are moved up and down by the shutter opening / closing mechanism to open and close the supply port 16 and the discharge port 17, respectively. It is like that. A supply door 13 and a discharge door 14 are formed on the side surface of the heat insulating tank 33 so as to face the supply port 16 and the discharge port 17 of the heating tank 32, respectively. And it opens at the time of discharge | emission from the heat insulation chamber 2. FIG. Further, an atmospheric gas supply pipe 9 having an atmospheric gas supply port is formed on the lower surface of the heating tank 32 so as to penetrate the lower surface of the heat insulating tank 33. By supplying the atmospheric gas from the atmospheric gas supply pipe 9 to the heating chamber 1, the heating chamber 1 is kept at a positive pressure than the heat insulating chamber 2 and the outside of the heat insulating chamber 2. An atmosphere gas discharge pipe 10 for discharging the atmosphere gas when the supply port 16 and / or the discharge port 17 of the heating tank 32 is opened is further formed on the lower surface of the heat insulation tank 33.

  The object to be heated 3 is conveyed by a drive mechanism including a chain or steel belt (hereinafter referred to as “chain”) 5, 6, sprockets 18, 19, 20, and a drive motor 4. The sprockets 18 and 19 are disposed in the heat insulation chamber 2 between the supply door 13 of the heat insulation tank 33 and the supply port 16 of the heating tank 32, respectively, and the discharge door 14 of the heat insulation tank 33 and the discharge port 17 of the heating tank 32. It is rotatably arranged under the gap. The chain 5 meshes with the teeth of the sprockets 18 and 19 at both ends, and the upper side (conveying side) passes near the lower ends of the supply port 16 and the discharge port 17 and the lower side (return side) is heated. The both sides of the tank 32 are penetrated, and each inside the heat insulating chamber 2 extends linearly. The sprocket 20 is driven by the drive motor 4 and rotates in the clockwise direction. The rotational movement of the sprocket 20 is transmitted to the sprocket 19 through the chain 6. Therefore, when the sprocket 20 is rotated by the drive motor 4, the chain 5 is rotated in the clockwise direction, and the article 3 to be heated on the chain 5 is moved from the left to the right in the drawing. When the supply port shutter 26 and the discharge port shutter 27 are lowered to close the supply port 16 and the discharge port 17, respectively, the bottom surfaces of the supply port shutter 26 and the discharge port shutter 27 are in contact with the chain 5 on the transport side. Stop very close to the top. In addition, a gap that allows the chain 5 to freely rotate is formed between the inner wall of the through hole on both side surfaces of the heating tank 32 through which the return side of the chain 5 passes and the chain 5.

  As a method of heating the object to be heated 3 in the heating chamber 1, a high-temperature atmospheric gas heated by the atmospheric gas heater 11 installed in the heating chamber 1 is used as a fan drive motor 22 installed outside the heating chamber 1. The hot air circulation system which is driven by the circulation fan 21 in the heating chamber 1 and circulates in the heating chamber 1 and the direct heating heaters 7 and 8 are brought into direct contact with the upper and lower surfaces of the object 3 to be heated, respectively. Combined with direct conduction heating method. The direct heater 8 is moved up and down by a vertical drive unit 15. The chain 5 has such a structure that when the chain 5 is stationary, the direct heater 8 can move above the chain 5 while being opposed to the direct heater 7 by the vertical drive unit 15. It has become. Immediately after being supplied into the heating chamber 1, the article 3 to be heated rests between the opposed surfaces of the direct heaters 7 and 8.

  Fig.2 (a) is a front view of the to-be-heated material 3 used in this Embodiment. The object to be heated 3 is obtained by inserting a plurality of lead frames 24 in which IC chips are sealed with resin into a cassette 23. 2B and 2C are a plan view and a side view, respectively, of one lead frame inserted into the cassette 23 of FIG. 2A. A lead frame 24 of a metal sheet made of a Cu alloy or the like is resin-sealed with a mold resin 25 after the IC chip is mounted.

Next, the operation of the heating apparatus according to the present embodiment will be described in more detail with reference to FIG.
When the object to be heated 3 is fed from the previous process at a certain time interval (hereinafter, the interval time is referred to as “loading interval time”), for example, every 30 minutes, the supply door 13 of the heat insulating tank 33 opens, The heated object 3 is placed on the chain 5 in the heat insulating chamber 2 and waits for the supply door 13 to open for supply to the heating chamber 1. At this time, the chain 5 is stationary, and the supply port 16 and the discharge port 17 of the heating tank 32 are closed by the supply port shutter 26 and the discharge port shutter 27, respectively. Therefore, the heating chamber 1 is almost sealed. Is in a state. When the object to be heated 3 enters a standby state in the heat insulating chamber 2, the supply door 13 is closed. The supply door 13 and / or the discharge door 14 are controlled so as to open only when the transport mechanism 12 is stopped and the supply port 16 and the discharge port 17 are closed. Further, both the supply port 16 and the discharge port 17 are normally closed so that the atmospheric gas in the heating chamber 1 does not flow to the outside, and the object to be heated 3 is heated at each carry-in interval time. Only when supplying to the chamber 1 and discharging from the heating chamber 1, the chamber is controlled to open on the condition that the supply door 13 and the discharge door 14 of the heat insulation chamber 2 are closed. In addition, when the supply port 16 and / or the discharge port 17 are opened, the transport mechanism supplies the chain 5 into the heating chamber 1 from a predetermined distance (a position where the heated object 3 waits in the heat insulating chamber 2). It is controlled so as to carry out intermittent transport that repeats the operation of moving at a distance to the position where it stops immediately after being performed, and stopping at other times. This transport method has an effect that the energy consumption accompanying the transport can be reduced as compared with the continuous transport method in which the transport speed must be lowered and always transported continuously.

  When a predetermined carry-in interval time has passed since the supply port 16 and the discharge port 17 were opened in order to put the heated object 3 in and out of the heating chamber 1 last time, the shutter up-and-down mechanism 28 again causes the supply port shutter 26 and the discharge port The outlet shutter 27 is driven to open the supply port 16 and the discharge port 17. The supply door 13 and the discharge door 14 of the heat insulation chamber 2 are closed.

  Next, the drive motor 4 is actuated to start the drive mechanism, and the chain 5 rotates in the clockwise direction. Accordingly, the object to be heated 3 that is in a standby state on the chain 5 in the heat insulating chamber 2 starts to move into the heating chamber 1. At the same time, the article to be heated 3 located at the rightmost end of the heating chamber 1 and having undergone all the heat treatments starts to move to the heat insulating chamber 2. The object to be heated 3 in the heat insulation chamber 2 passes through the supply port 16, completely enters the heating chamber 1, and is located between the faces where the direct heating heaters 7 and 8 face each other, When the heated object 3 located at the rightmost end of the heating chamber 1 passes through the discharge port 17 and reaches a predetermined position in the heat insulating chamber 2, the drive motor 4 stops operating, and therefore the chain The rotation of 5 stops.

  At this time, prior to opening the supply port 16 and the discharge port 17, the atmosphere gas having the same component as the atmosphere gas filling the heating chamber 1 is supplied into the heating chamber 1 through the atmosphere gas supply pipe 9. The supplied atmospheric gas is heated by the atmospheric gas heater 11 and uniformly circulates in the heating chamber 1 by the circulation fan 21, so that the inside of the heating chamber 1 becomes a positive pressure from the heat insulating chamber 2. Therefore, even if the supply port 16 and the discharge port 17 are opened, the atmosphere gas continues to flow from the heating chamber 1 through the heat insulation chamber 2 and out of the heating device from the atmosphere gas discharge pipe 10. Gases having different components and / or temperatures from the atmospheric gas filling the chamber 1 do not flow in. Therefore, the temperature and the atmospheric gas concentration in the heating chamber 1 are always kept uniform in the heating chamber 1. Further, since the outside air flowing into the heating chamber 1 does not have to be heated, the energy consumption required for heating can be kept to a minimum.

  It should be noted that when a predetermined carry-in interval time has passed since the supply port 16 and the discharge port 17 were opened last time, there is an object 3 to be heated located at the rightmost end of the heating chamber 1 after receiving all the heat treatments. If not, the outlet 17 of the heating chamber 1 is not opened. Moreover, when the to-be-heated material 3 in a standby state does not exist in the heat insulation chamber 2, the supply port 16 of the heating chamber 1 is not opened. However, even when neither the discharge port 17 nor the supply port 16 of the heating chamber 1 is opened, the drive mechanism operates every predetermined carry-in interval time, and the supply object 16 on the chain 5 is heated by a predetermined distance. To the discharge port 17.

  Next, after the chain 5 is stopped, the shutter up-and-down mechanism 28 drives the supply port shutter 26 and the discharge port shutter 27 to close the supply port 16 and the discharge port 17 to make the heating chamber 1 almost sealed again. . At this time, since the object to be heated 3 has just entered the high-temperature heating chamber 1 from the state held in the low-temperature heat-insulating chamber 2, the temperature is lower than the atmospheric gas temperature in the heating chamber 1, and therefore In this state, the atmospheric gas temperature in the heating chamber 1 is lowered. Therefore, if the heated object 3 that has just entered the heating chamber 1 is not rapidly heated, the temperature uniformity in the heating chamber 1 is disturbed, and the heated object 3 in the heating chamber 1 is not uniform. Will be heated. In order to solve this problem, the above-described direct conduction heating method is used. That is, when the article 3 to be heated immediately after being supplied into the heating chamber 1 is placed stationary between the opposing surfaces of the direct heaters 7 and 8, the direct heater 8 is moved by the vertical drive unit 15. After rising and coming into contact with the bottom surface of the heated object 3 immediately after being supplied into the heating chamber 1, the heated object 3 is further raised, and the heated object 3 is sandwiched between the direct heating block 7 and the direct heating block. 7 and heating from above and below by direct contact heat conduction. Thus, the combined heating of the direct conduction heating method and the hot air circulation method quickly raises the temperature of the article 3 to be heated immediately after being supplied into the heating chamber 1. Thereby, a decrease in the atmospheric gas temperature in the heating chamber 1 is prevented or quickly recovered.

  Here, after the carry-in interval of the heated object 3 and the necessary heating time (time required for heating at a predetermined heating temperature) and the heated object 3 are supplied from the supply port 16 into the heating chamber 1, Consider the relationship between the number of times the movement from the supply port 16 to the discharge port 17 by the chain 5 is stopped (and the actual heating time) in the heating chamber 1 before the discharge from the outlet 17 to the heat insulation chamber 2. For example, it is assumed that the minimum required heating time is 3 hours 30 minutes and the stop time is 30 minutes. If the heated object 3 immediately after being supplied into the heating chamber 1 rises to the temperature in the heating chamber 1 without taking any time, the number of times the heated object 3 is stopped is 7 times. That is, if the heating tank 32 is configured so that seven objects to be heated can be accommodated in the heating chamber 1, one object to be heated is supplied to the heating chamber 1 at every loading interval time of the object to be heated 3. At the same time, one object to be heated can be discharged from the heating chamber 1. However, since it takes some time for the heated object 3 immediately after being supplied into the heating chamber 1 to rise to the temperature in the heating chamber 1, every time the heated object 3 is brought into the transport interval time. In addition, in order to supply one object to be heated to the heating chamber 1 and simultaneously discharge one object to be heated from the heating chamber 1, the number of times the object 3 is stopped is at least 8 times are required. By heating using the direct conduction heating method and the hot air circulation method, the heated object 3 immediately after being supplied into the heating chamber 1 is heated to the temperature in the heating chamber 1 during the first 30 minutes. If it rises, this will be 8 times (actual heating time: 4 hours). The heating tank 32 is configured to accommodate eight objects to be heated in the heating chamber 1. On the other hand, when the direct conduction heating method is not used, the heated object 3 immediately after being supplied into the heating chamber 1 does not rise to the temperature in the heating chamber 1 during the first 30 minutes. This number is 9 times or more (actual heating time: 4 hours 30 minutes or more). The heating tank 32 must be configured to accommodate nine or more objects to be heated in the heating chamber 1. Therefore, the combined heating of the direct conduction heating method and the hot air circulation method described above minimizes the number of times the heated object 3 is stopped (and the actual heating time) and makes the heating tank 32 the most compact.

  Next, the drive mechanism starts to move from the time when the object to be heated 3 sent to the heating tank 32 is heated to the same temperature as in the heating chamber 1 by the combined heating of the direct conduction heating method and the hot air circulation method. At any time before the time, the direct heater 8 is driven by the vertical drive unit 15 and is lowered to a predetermined position where it does not interfere with the transport mechanism 12. As a result, the object to be heated 3 sandwiched between the direct heaters 7 and 8 is returned onto the chain 5.

  And after the to-be-heated material 3 was sent from the previous process last time, when the predetermined | prescribed to-be-heated object carrying-in interval time passes, the new to-be-heated material 3 will be sent again from the previous process, and the above-mentioned process is performed. repeat. The feeding of the article 3 to be heated from the previous process may be before the direct heater 8 is lowered or may be after.

  In this way, when the object to be heated 3 is conveyed by repeatedly stopping and moving a predetermined number of times, the object to be heated 3 is heated for the minimum necessary heating time or more, and the heat insulating chamber 2 is discharged from the discharge port 17. To be discharged. When the article 3 to be heated is discharged into the heat insulating chamber 2, the transport mechanism 12 is stopped, the discharge port 17 is closed, and the supply door 16 and the discharge port 17 are closed. Is opened, the object to be heated 3 in the heat insulation chamber 2 is taken out of the heat insulation chamber 2, and the entire process of heating the object to be heated is completed.

  As mentioned above, although this invention was demonstrated based on the preferable embodiment, the heating apparatus of this invention is not restrict | limited only to embodiment mentioned above, In the range which does not change the summary of this invention, it is various. Modified heating devices are also within the scope of the present invention. For example, in the heating apparatus of the present invention, the atmospheric gas in the heating chamber may be supplied to the heating chamber in a heated state, rather than being heated in the heating chamber. Thereby, it is not necessary to install a heater and a circulation fan in the heating chamber, and a circulation fan motor need not be installed. Further, instead of the hot air circulation method using the circulation fan, a heat convection method in which the circulation fan and the circulation fan motor are omitted may be used. Further, as direct conduction heating, if the heater can conduct heat efficiently to the object to be heated even if it is not directly touching the object to be heated, between the object to be heated, for example, You may have a clearance of about 0.1 mm. Direct conduction heating may be performed by blowing hot air. Furthermore, a certain error (variation) is allowed in the movement distance and stop time of the object to be heated at the time of intermittent conveyance as long as the operation is not hindered. Further, the heated object is not conveyed linearly between the supply port and the discharge port facing to the left and right, but is conveyed on the circumference or the outer circumference of the polygon, or is folded and conveyed. Accordingly, the supply port and the discharge port, the supply door and the discharge door can be made common, and the shutters of the supply port and the discharge port can be made common.

  The heating device according to the present embodiment described above can be used, for example, from 4 hours in the manufacture of electronic components such as semiconductor components, semiconductor devices using these electronic components, semiconductor modules, and electronic devices equipped with these components. Burn-in test requiring heating for 24 hours, aging treatment requiring heating for 2 to 48 hours, drying treatment for curing, degreasing and moisture absorption of thermosetting resin requiring heating for 4 to 8 hours And has the effects described above. In addition, the object to be heated may be supplied in units of lots, for example, instead of being sent in units of products from the previous process. Further, the heating atmosphere gas may be an inert gas such as nitrogen or helium, or dry air. Further, the opening / closing control of the supply port / discharge port and / or the supply door / discharge door may be performed sequentially based on a pre-programmed step when an object to be heated is sent from the previous process. It may be made on the basis of information on the position on the transport mechanism detected by the means regarding the object to be heated, or may be made in combination.

Sectional drawing of the heating apparatus which concerns on embodiment of this invention. The front view [(a)] of the to-be-heated object of FIG. 1, the top view [(b)], and side view [(c)] of a part of to-be-heated object. Sectional drawing of the conventional heating apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Heating chamber 2 Heat insulation chamber 3 To-be-heated object 4 Drive motor 5, 6 Chain 7, 8 Direct heater 9 Atmosphere gas supply pipe 10 Atmosphere gas exhaust pipe 11 Atmosphere gas heater 13 Supply door 14 Discharge door 15 Vertical drive part 16 Supply Port 17 Discharge port 18, 19, 20 Sprocket 21 Circulation fan 22 Fan drive motor 23 Cassette 24 Lead frame 25 Resin mold 26 Supply port shutter 27 Discharge port shutter 28 Shutter opening / closing mechanism 32 Heating tank 33 Heat insulation tank

Claims (15)

A supply port to which an object to be heated is supplied and an outlet to which the object to be heated is discharged are formed, a heating chamber for simultaneously heating a plurality of objects to be heated, and the object to be heated from the supply port to the discharge port in the heating device having a transport mechanism for transporting an object, as a means for heating the object to be heated, said in the heating chamber to heat the entire heating chamber, and the ambient gas circulation means for circulating the heated atmosphere gas, the And a direct conduction heating means for selectively heating the object to be heated closest to the supply port . The heating apparatus according to claim 1, wherein the direct conduction heating unit is a heater that contacts the object to be heated, or a hot air spray unit that blows hot air on the object to be heated. The transport mechanism, the heating apparatus according to claim 1 or 2, characterized in that the intermittent transport with at least two stops while conveying the object to be heated from the supply port to the discharge openings. The heating chamber is formed in a double tank that at least partially covers the heating chamber, and the supply port and the discharge port are formed in an inner tank of the double tank. The heating device according to any one of claims 1 to 3 , wherein the heating device is provided. The heating apparatus according to claim 4 , wherein the transport mechanism is formed to extend between double tanks that at least partially cover the heating chamber. When an object to be heated outside the outer tank is supplied to the outer tank of the double tank that at least partially covers the heating chamber onto the transport mechanism between the two tanks. a supply door opening, according to claim 5 in which the object to be heated above the transport mechanism between the double tank, characterized in that the discharge door for discharging to the outside of the outer vessel is formed The heating device according to 1. The heating apparatus according to claim 6, wherein the supply port and the discharge port are the same port , and the supply door and the discharge door are the same door and are shared. A heating method using the heating device according to any one of claims 1 to 7 , wherein the heated object is conveyed from the supply port to the discharge port in the vicinity of the supply port and the discharge port. A heating method, wherein the heating chamber is filled with an atmosphere gas having a constant component and a constant concentration except for the vicinity of the outlet. The heating method according to claim 8 , wherein the intermittent conveyance of the object to be heated by the conveyance mechanism is performed by repeating conveyance and stop a plurality of times at regular time intervals . The heating method according to claim 8 or 9 , wherein the supply port and the discharge port are openable and closable, and are opened only when the object to be heated is supplied and discharged into the heating chamber. When the supply port and / or the outlet is open, to claim 1 0 atmospheric gas of the same component and ambient gas meets the heating chamber, characterized in that it is supplied to the heating chamber The heating method as described. The heating method according to any one of claims 8 to 11, wherein when the supply door and / or the discharge door are open, the supply port and the discharge port are closed. Wherein when the supply port and / or the outlet is open, the heating method according to claim 8 1 2, characterized in that said supply door and said discharge door is closed. The heating method according to claim 8, wherein the object to be heated is carried in each time the intermittent conveyance is stopped.

The heating time for heating the object to be heated, the heating method according to any one of claims 8, characterized in that at least 1 hour 4.

Images