JP4555567B2 - 分子メモリ及びその製造方法 - Google Patents
分子メモリ及びその製造方法 Download PDFInfo
- Publication number
- JP4555567B2 JP4555567B2 JP2003523036A JP2003523036A JP4555567B2 JP 4555567 B2 JP4555567 B2 JP 4555567B2 JP 2003523036 A JP2003523036 A JP 2003523036A JP 2003523036 A JP2003523036 A JP 2003523036A JP 4555567 B2 JP4555567 B2 JP 4555567B2
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- Japan
- Prior art keywords
- molecular memory
- dielectric layer
- memory according
- spin transfer
- iron
- Prior art date
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- Expired - Fee Related
Links
- 230000015654 memory Effects 0.000 title claims description 35
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 239000010410 layer Substances 0.000 claims description 49
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 29
- 239000003990 capacitor Substances 0.000 claims description 23
- 239000003989 dielectric material Substances 0.000 claims description 22
- 229920000642 polymer Polymers 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 16
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 claims description 15
- 150000001875 compounds Chemical class 0.000 claims description 15
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 12
- 239000010931 gold Substances 0.000 claims description 12
- 229910052737 gold Inorganic materials 0.000 claims description 12
- 150000003852 triazoles Chemical class 0.000 claims description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 5
- 239000012736 aqueous medium Substances 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 4
- 229920002689 polyvinyl acetate Polymers 0.000 claims description 4
- 239000011118 polyvinyl acetate Substances 0.000 claims description 4
- 239000011241 protective layer Substances 0.000 claims description 4
- 239000002904 solvent Substances 0.000 claims description 4
- 229910020366 ClO 4 Inorganic materials 0.000 claims description 3
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 3
- ORTRWBYBJVGVQC-UHFFFAOYSA-N hexadecane-1-thiol Chemical compound CCCCCCCCCCCCCCCCS ORTRWBYBJVGVQC-UHFFFAOYSA-N 0.000 claims description 3
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 3
- -1 polydimethylsiloxane Polymers 0.000 claims description 3
- 229940042055 systemic antimycotics triazole derivative Drugs 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 2
- 238000005406 washing Methods 0.000 claims description 2
- 230000007704 transition Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 5
- 239000012876 carrier material Substances 0.000 description 4
- 239000002131 composite material Substances 0.000 description 4
- 150000003573 thiols Chemical class 0.000 description 4
- 238000000429 assembly Methods 0.000 description 3
- 230000000712 assembly Effects 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000003446 ligand Substances 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 238000005063 solubilization Methods 0.000 description 2
- 230000007928 solubilization Effects 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- MZWDAEVXPZRJTQ-WUXMJOGZSA-N 4-[(e)-(4-fluorophenyl)methylideneamino]-3-methyl-1h-1,2,4-triazole-5-thione Chemical compound CC1=NNC(=S)N1\N=C\C1=CC=C(F)C=C1 MZWDAEVXPZRJTQ-WUXMJOGZSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 150000001450 anions Chemical group 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000010981 drying operation Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000002609 medium Substances 0.000 description 1
- 239000002052 molecular layer Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002959 polymer blend Polymers 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0009—RRAM elements whose operation depends upon chemical change
- G11C13/0014—RRAM elements whose operation depends upon chemical change comprising cells based on organic memory material
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0009—RRAM elements whose operation depends upon chemical change
- G11C13/0014—RRAM elements whose operation depends upon chemical change comprising cells based on organic memory material
- G11C13/0016—RRAM elements whose operation depends upon chemical change comprising cells based on organic memory material comprising polymers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/02—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using elements whose operation depends upon chemical change
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/701—Organic molecular electronic devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/30—Coordination compounds
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
- Y10S977/933—Spintronics or quantum computing
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Semiconductor Memories (AREA)
- Formation Of Insulating Films (AREA)
Description
とにより、幾つものレベルのリソグラフィを必要とする複雑な装置の製造がこのようにして可能になる。
ず)。
の利点を有する。
なく、導電率のヒステリシス変化にも基づき得る。
た誘電率の様相を説明として例示する。
なく、本発明の様々な応用例を実施できることが、理解される。
2 上部電極
3 下部電極
4 基板
5 スタンプ
6 インキ付け溶液
7 水性媒体
9 導電層
10 導電層
Claims (17)
- シリコンの基板と、
それぞれが誘電体層を挟む2つの電極を有する複数のキャパシタと、
外部回路との電気接点を確保するための接続部と、から構成される分子メモリであって
前記誘電体層は、誘電率がヒステリシスを有するスピン転移誘電体層であって、
前記誘電体層を構成する誘電材料は、鉄(Fe)及びトリアゾール誘導体のスピン転移錯体を含む重合体、又は鉄(Fe)のスピン転移錯体から少なくとも部分的に構成されることを特徴とする分子メモリ。 - それぞれのキャパシタが、マイクロメートルまたはナノメートルサイズの電極を備える
ことを特徴とする請求項1に記載の分子メモリ。 - 前記誘電体層の前記ヒステリシスは、前記ヒステリシス現象の少なくとも一部が室温領域で生じることを特徴とする請求項1または2に記載の分子メモリ。
- 前記誘電体層は、化合物[Fe(NH2trz)3](NO3)2から少なくとも部分的に構成されることを特徴とする請求項1から3のいずれかに記載の分子メモリ。
- 前記誘電体層は、化合物[Fe(Htrz)2(trz)](NO3)2から少なくとも部分的に構成されることを特徴とする請求項1から3のいずれかに記載の分子メモリ。
- 前記誘電体層は、化合物[Fe(NH2trz)3](Br)2から少なくとも部分的に構成されることを特徴とする請求項1から3のいずれかに記載の分子メモリ。
- 前記誘電体層は、化合物[Fe(Htrz)3−3X(NH2trz)3X](ClO4).H2O、又は化合物[Fe(NH2trz)3](NO3)1.7(BF4)0.4から構成されることを特徴とする請求項1から3のいずれかに記載の分子メモリ。
- 前記誘電体層は、鉄(Fe)及びトリアゾール誘導体のスピン転移錯体を含む前記重合体、または、前記鉄(Fe)のスピン転移錯体から構成されることを特徴とする請求項1から7のいずれかに記載の分子メモリ。
- 前記電極は、金でできていることを特徴とする請求項1から8のいずれかに記載の分子メモリ。
- 分子メモリの製造方法であって、
a)シリコンからなる基板を準備するステップと、
b)スピン転移誘電体層を準備するステップであって、
前記誘電体層は、鉄(Fe)及びトリアゾール誘導体のスピン転移錯体を含む重合体、又は鉄(Fe)のスピン転移錯体から少なくとも部分的に構成され、誘電率がヒステリシスを有する誘電体層を準備するステップと、
c)前記基板上に第1の導体層を形成するステップと、
d)前記第1の導体層上に前記誘電体層を覆うステップと、
e)前記誘電体層上に第2の導体層を形成するステップと、
f)ヘキサデカンチオールのインキ付け溶液中にスタンプを浸漬させるステップと、
g)前記浸漬させたスタンプを乾燥させ、洗浄させるステップと、
h)前記乾燥させ、洗浄させたスタンプを用いて、前記第2の導体層上に保護層を形成するステップと、
i)前記保護層を形成後、前記第2の導体層をケミカルエッチングするステップと、
j)前記基板上に外部回路との電気接点を確保するための端子を設けるステップと、
を含むことを特徴とする分子メモリの製造方法。 - 前記誘電体層は、鉄(Fe)及びトリアゾール誘導体のスピン転移錯体を含む前記重合体40%、及び、ポリ酢酸ビニル60%の、アセトニトリル中の混合物によって得られることを特徴とする請求項10に記載の分子メモリの製造方法。
- 前記誘電体層は、前記鉄(Fe)のスピン転移錯体と、前記鉄(Fe)のスピン転移錯体に適した溶剤中の第2の重合体とを混合させて得られることを特徴とする請求項10に記載の分子メモリの製造方法。
- 前記インキ付け溶液は、0.01 mol/l〜0.1 mol/lのモル濃度を有することを特徴とする請求項10から12のいずれかに記載の分子メモリの製造方法。
- 前記インキ付け溶液は、30℃〜50℃の温度に至ることを特徴とする請求項10から13のいずれかに記載の分子メモリの製造方法。
- 蝕刻は、水性媒体で、かつ室温で行われることを特徴とする請求項10に記載の分子メモリの製造方法。
- 前記スタンプは、透明であることを特徴とする請求項10に記載の分子メモリの製造方法。
- 前記スタンプは、ポリジメチルシロキサンを成分とすることを特徴とする請求項16に記載の分子メモリの製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0111328A FR2829293B1 (fr) | 2001-08-31 | 2001-08-31 | Memoire moleculaire et son procede de fabrication |
PCT/FR2002/002961 WO2003019695A1 (fr) | 2001-08-31 | 2002-08-29 | Memoire moleculaire et son procede de fabrication |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005501427A JP2005501427A (ja) | 2005-01-13 |
JP2005501427A5 JP2005501427A5 (ja) | 2010-02-12 |
JP4555567B2 true JP4555567B2 (ja) | 2010-10-06 |
Family
ID=8866873
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003523036A Expired - Fee Related JP4555567B2 (ja) | 2001-08-31 | 2002-08-29 | 分子メモリ及びその製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7638831B2 (ja) |
EP (1) | EP1430552B1 (ja) |
JP (1) | JP4555567B2 (ja) |
FR (1) | FR2829293B1 (ja) |
WO (1) | WO2003019695A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
MXPA04002006A (es) * | 2001-08-31 | 2004-06-07 | Sucampo Ag | Analogos de prostagladina como abridor del canal de cloruro. |
FR2937561B1 (fr) * | 2008-10-23 | 2010-12-31 | Centre Nat Rech Scient | Procede de delimitation d'une aire de sport ou de jeu au moyen d'un materiau a transition de spin thermochrome |
FR2952371B1 (fr) | 2009-11-12 | 2012-08-10 | Centre Nat Rech Scient | Materiaux a transition de spin thermochromes dopes par un ou plusieurs agents fluorescents |
EP3789761B1 (en) * | 2019-09-05 | 2024-03-20 | Fundación Imdea Nanociencia | Colorimetric detector |
FR3101479B1 (fr) | 2019-10-01 | 2021-10-15 | Centre Nat Rech Scient | Utilisation d’un matériau à transition de spin pour mesurer et/ou limiter la température de composants électroniques/photoniques |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03289169A (ja) * | 1990-04-05 | 1991-12-19 | Toagosei Chem Ind Co Ltd | 半導体記憶装置 |
FR2684238A1 (fr) * | 1991-11-22 | 1993-05-28 | Philips Electronique Lab | Composes chimiques a transition de spin, et leur utilisation pour le stockage, le traitement d'information et/ou l'affichage de donnees. |
US5582900A (en) * | 1991-11-22 | 1996-12-10 | U.S. Philips Corporation | Spin-transition compounds and their use for storing, processing and/or displaying information |
US6255026B1 (en) * | 1992-11-20 | 2001-07-03 | U.S. Philips Corporation | Methods and devices having means for writing storing and erasing which comprise an active medium containing at least one spin-transition parent compound |
EP0666561A1 (fr) * | 1994-02-03 | 1995-08-09 | Laboratoires D'electronique Philips S.A.S. | Composés chimiques de départ à transition de spin et dispositifs munis de moyens d'inscription, mémorisation et effaçage comprenant un milieu actif incluant au moins un de ces composés |
FR2734824A1 (fr) * | 1995-05-31 | 1996-12-06 | Philips Electronique Lab | Composes chimiques de depart a transition de spin et dispositifs munis de moyens d'inscription, memorisation et effacage comprenant un milieu actif incluant au moins un de ces composes |
JPH09162366A (ja) * | 1995-12-08 | 1997-06-20 | Nkk Corp | 半導体記憶装置およびその製造方法 |
JP3951322B2 (ja) * | 1996-07-23 | 2007-08-01 | 昭和電工株式会社 | スルフィド化合物の製造方法 |
JPH1056145A (ja) * | 1996-08-07 | 1998-02-24 | Hitachi Ltd | 半導体集積回路装置の製造方法 |
JPH11283880A (ja) * | 1998-03-31 | 1999-10-15 | Mitsubishi Chemical Corp | 電解コンデンサ用電解液及びそれを用いた電解コンデンサ |
US6275373B1 (en) * | 1999-12-09 | 2001-08-14 | Pacesetter, Inc. | Enhanced very high volt electrolyte |
EP1249021A4 (en) * | 2000-01-14 | 2007-03-28 | Univ North Carolina State | SUBSTRATES WITH NETWORKED SNOWWORK COORDINATION COMPOUND POLYMERS AND METHOD FOR THEIR APPLICATION |
US6272038B1 (en) * | 2000-01-14 | 2001-08-07 | North Carolina State University | High-density non-volatile memory devices incorporating thiol-derivatized porphyrin trimers |
JP2005502247A (ja) | 2001-09-06 | 2005-01-20 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | オーディオ再生装置 |
FR2898910B1 (fr) | 2006-03-23 | 2008-06-20 | Centre Nat Rech Scient | Nouveau procede d'application en couche mince de materiaux moleculaires a transition de spin |
-
2001
- 2001-08-31 FR FR0111328A patent/FR2829293B1/fr not_active Expired - Fee Related
-
2002
- 2002-08-29 EP EP02796325.5A patent/EP1430552B1/fr not_active Expired - Lifetime
- 2002-08-29 JP JP2003523036A patent/JP4555567B2/ja not_active Expired - Fee Related
- 2002-08-29 WO PCT/FR2002/002961 patent/WO2003019695A1/fr active Application Filing
- 2002-08-29 US US10/487,796 patent/US7638831B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2829293A1 (fr) | 2003-03-07 |
EP1430552A1 (fr) | 2004-06-23 |
EP1430552B1 (fr) | 2014-10-15 |
WO2003019695A1 (fr) | 2003-03-06 |
US20050161728A1 (en) | 2005-07-28 |
US7638831B2 (en) | 2009-12-29 |
JP2005501427A (ja) | 2005-01-13 |
FR2829293B1 (fr) | 2003-11-14 |
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