EP1430552B1 - Memoire moleculaire et son procede de fabrication - Google Patents

Memoire moleculaire et son procede de fabrication Download PDF

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Publication number
EP1430552B1
EP1430552B1 EP02796325.5A EP02796325A EP1430552B1 EP 1430552 B1 EP1430552 B1 EP 1430552B1 EP 02796325 A EP02796325 A EP 02796325A EP 1430552 B1 EP1430552 B1 EP 1430552B1
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EP
European Patent Office
Prior art keywords
memory according
molecular memory
dielectric material
trz
molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP02796325.5A
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German (de)
English (en)
French (fr)
Other versions
EP1430552A1 (fr
Inventor
Azzedine Bousseksou
Christophe Vieu
Jean-François Bât. I12G1 LETARD
Philippe Demont
Jean-Pierre Tuchagues
Laurent Malaquin
Jérôme MENEGOTTO
Lionel Salmon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
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Centre National de la Recherche Scientifique CNRS
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Publication of EP1430552A1 publication Critical patent/EP1430552A1/fr
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Publication of EP1430552B1 publication Critical patent/EP1430552B1/fr
Anticipated expiration legal-status Critical
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0009—RRAM elements whose operation depends upon chemical change
    • G11C13/0014—RRAM elements whose operation depends upon chemical change comprising cells based on organic memory material
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0009—RRAM elements whose operation depends upon chemical change
    • G11C13/0014—RRAM elements whose operation depends upon chemical change comprising cells based on organic memory material
    • G11C13/0016—RRAM elements whose operation depends upon chemical change comprising cells based on organic memory material comprising polymers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/02—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using elements whose operation depends upon chemical change
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/701—Organic molecular electronic devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/30—Coordination compounds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/933—Spintronics or quantum computing

Definitions

  • the present invention relates to the field of microelectronics, and in particular the manufacture of a set of nanoscale capacitors with molecular memories or memories based on molecular aggregates
  • the present invention relates more particularly to a molecular memory consisting of a substrate, preferably made of silicon, of a set of capacitors, each capacitor comprising two conductive layers constituting the armatures of the capacitors and between which a dielectric material is arranged, as well as connection means for providing electrical contacts with the external circuits.
  • the memories currently used are semiconductor memories, which use magnetic or electric fields to write the information. However, they have a certain instability, and a fortiori are sensitive to disturbances such as the magnetic field or the electric field. On the other hand, the memory capacity is still relatively limited because of the size of these memories.
  • the present invention therefore aims to remedy these drawbacks by proposing a memory consisting of nanoscale capacitors, in order to achieve information storage at the molecular scale.
  • the present invention is of the type described above and is remarkable, in its broadest sense, in that the dielectric material is at least partially formed of a spin-transition complex or a spin-transition phenomenon.
  • the dielectric material consists at least partially of the compound [Fe (NH 2 trz) 3 ] (NO 3 ) 2 , the compound [Fe (Htrz) 2 (trz)] (NO 3 ) 2 or the compound [Fe (NH 2 trz) 3 ] (Br) 2 , or at least partially consists of an alloy of ligands or anions, selected from the compound [Fe (Htrz) 3-3x (NH 2 trz) 3x ] (ClO 4 ). H 2 O or the compound [Fe (NH 2 trz) 3 ] (NO 3 ) 1.7 (BF 4 ) 0.4 .
  • the dielectric material consists of mixing the polymer containing these triazole derivatives with another polymer in acetonitrile.
  • the mixture in acetonitrile will consist of 40% of the polymer containing triazole derivatives and 60% of polyvinyl acetate.
  • the dielectric material consists of a mixture, either of the spin-transition complex with another polymer in the solvent of the spin-transition complex, or of the seat material of the transition phenomenon. spin with another polymer in the solvent of the material.
  • the frames are in gold.
  • the solution which has a molar concentration of between 0.01 mol.l -1 and 0.1 mol.l -1 , is brought to a temperature of between 30 ° C. and 50 ° C., in order to allow the solubilization of thiols contained in the inking solution.
  • the chemical etching takes place in an aqueous medium and at room temperature, so as not to damage the complex and the polymer.
  • the buffer is transparent, of the polydimethylsiloxane type.
  • This manufacturing method makes it possible to shape the molecular memory without altering the spin transition complex or the seat material of the spin transition phenomenon constituting at least partially the dielectric material (no oxidation, no dissolution, etc.). ). This method also allows to align patterns on several levels for the manufacture of complex memory components.
  • the present invention also relates to a method for storing and reading information, carried out using a molecular memory according to any one of claims 1 to 7, characterized in that the storage and reading of information is based on hysteretic variations in the capacitance and conductivity of said dielectric material (1).
  • the capacitor of nanometric size according to the invention is of the planar capacitor type consisting of two conductive reinforcements (2, 3), the so-called lower armature (3) and the so-called upper armature (2), between which a dielectric material (1) is arranged.
  • Said lower armature (3) of said capacitor rests on a substrate (4), preferably of silicon.
  • said frames (2, 3) are in gold.
  • Said dielectric material (1) consists at least partially of a polymer containing triazole derivatives chosen from the compounds of claim 1.
  • This complex is mixed with a polymer, of the polyvinyl acetate type, in acetonitrile, in order to facilitate coating by spin-coating said complex.
  • said dielectric material (1) is obtained by mixing in acetonitrile 40% of said complex with 60% polyvinyl acetate.
  • said dielectric material consists of the compound [Fe (NH 2 trz) 3 ] (NO 3 ) 2 .
  • said dielectric material consists of the compound [Fe (Htrz) 2 (trz)] (NO 3 ).
  • said dielectric material consists of the compound [Fe (NH 2 trz) 3 ] (Br) 2 .
  • said dielectric material consists of an alloy of ligands or anions selected from the compounds [Fe (Htrz) 3-3x (NH 2 trz) 3x ] (ClO 4 ). H 2 O or [Fe (NH 2 trz) 3 ] (NO 3 ) 1.7 (BF 4 ) 0.4 .
  • Said dielectric material (1) may also consist at least partially of a spin transition complex, which will be mixed in the synthesis solvent of said complex.
  • the figure 2 illustrates the various steps relating to the manufacture of a molecular memory consisting of a set of capacitors according to the invention.
  • said silicon substrate (4) having a thickness of 500 ⁇ m, is covered with a titanium adhesion layer (8) with a thickness of 50 nm, then with a layer of gold (9) having a thickness of 50 nm, said gold layer (9) representing said lower armature (3).
  • Said gold layer (9) is then coated with the complex / polymer mixture constituting said dielectric material (1), the complex being either a spin-transition molecular complex or a seat material of the spin transition phenomenon chosen from the compounds of the claim 1.
  • Said dielectric material (1) is then covered with a layer of gold (10) with a thickness of 50 nm.
  • the manufacture of said upper plates (2) of each of said capacitors is then conducted via a micro / nano-buffering protection of an inking solution (6) composed of thiols in absolute ethanol (HexaDecaneThiol).
  • an elastomer buffer (5) made from an initial mold made by conventional methods of microelectronics (optical lithography and ion etching or electronic lithography and ion etching for micrometric reasons or electronic lithography and ion etching for nanometric patterns), is imbibed by immersion in said inking solution (6) having a concentration of 0.1 mol.L -1 .
  • said inking solution (6) is brought to a temperature of between 30 ° C. and 50 ° C.
  • said buffer (5) After drying and washing the surface of said buffer (5) with absolute ethanol at a temperature of 60 ° C. in order to dissolve any crystals that have formed after the drying operation, said buffer (5) is applied on said gold layer (10).
  • said buffer (5) is applied on said gold layer (10).
  • 0.1 mol.L-1 of ink are deposited.
  • molecular thus forming a molecular layer, which can be monomolecular, self-assembly, very dense.
  • Said gold layer (10) is then etched to reveal the patterns formed by thiol monolayers.
  • the previously obtained substrates are immersed at room temperature in an aqueous medium (7), of the Ferri / Ferrocyanide solution type.
  • the reaction is carried out at a pH of 12 in order to avoid any risk of HCN formation and to prevent the precipitation of the silicates resulting from the chemical etching of the surface of said substrate (4).
  • the elastomer used to constitute said buffer (5) is polydimethylsiloxane, also known by the trade name of Sylgard 184. Thanks to its transparency, it makes it possible to align the patterns of said stamp (5) with preexisting patterns on the surface. 'sample. This allows the manufacture of complex devices requiring multiple levels of lithography.
  • the figure 3 illustrates an exemplary embodiment of a memory component consisting of a set of capacitors of different sizes obtained during the implementation of the method described above.
  • Said component consists successively of a substrate (4), preferably of silicon, of a gold layer (9) constituting said lower armature (3) of said capacitors, of a dielectric material (1) constituted at least partially a spin-transition molecular complex or a seat material of the spin transition phenomenon selected from the compounds of claim 1, and gold discs (11) of different sizes, each constituting said upper armature (2).
  • a capacitor The outer face of at least one of said upper armatures (2) is connected by a connecting wire to a connection pad placed on a free part of said substrate (4) to ensure electrical contacts with the external circuits (not shown in FIG. figure 3 ).
  • the molecular component may also consist of a set of planar capacitors, each capacitor comprising two electrodes of the electrode type, of micrometric or nanometric size, between which is disposed said spin transition seat dielectric material.
  • the electrodes of said capacitors constituting such a molecular component are manufactured according to the previously described buffering method or by any other means of nanolithography.
  • the horizontal architecture of such capacitors thus has many advantages, particularly in terms of addressing and integration density.
  • the storage of information and the reading of the information can be based not only on the hysteretic variations of the capacitance, but also on the hysteretic variations of the conductivity of the electrical medium.
  • the figure 4 illustrates for explanatory purposes the behavior of the dielectric constant measured in the compound [Fe (NH 2 trz) 3 ] (NO 3 ) 2 as a function of temperature.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Semiconductor Memories (AREA)
  • Formation Of Insulating Films (AREA)
EP02796325.5A 2001-08-31 2002-08-29 Memoire moleculaire et son procede de fabrication Expired - Lifetime EP1430552B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0111328 2001-08-31
FR0111328A FR2829293B1 (fr) 2001-08-31 2001-08-31 Memoire moleculaire et son procede de fabrication
PCT/FR2002/002961 WO2003019695A1 (fr) 2001-08-31 2002-08-29 Memoire moleculaire et son procede de fabrication

Publications (2)

Publication Number Publication Date
EP1430552A1 EP1430552A1 (fr) 2004-06-23
EP1430552B1 true EP1430552B1 (fr) 2014-10-15

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EP02796325.5A Expired - Lifetime EP1430552B1 (fr) 2001-08-31 2002-08-29 Memoire moleculaire et son procede de fabrication

Country Status (5)

Country Link
US (1) US7638831B2 (ja)
EP (1) EP1430552B1 (ja)
JP (1) JP4555567B2 (ja)
FR (1) FR2829293B1 (ja)
WO (1) WO2003019695A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1420794B1 (en) * 2001-08-31 2017-12-27 Sucampo AG Prostaglandin analogs as chloride channel openers
FR2937561B1 (fr) * 2008-10-23 2010-12-31 Centre Nat Rech Scient Procede de delimitation d'une aire de sport ou de jeu au moyen d'un materiau a transition de spin thermochrome
FR2952371B1 (fr) 2009-11-12 2012-08-10 Centre Nat Rech Scient Materiaux a transition de spin thermochromes dopes par un ou plusieurs agents fluorescents
EP3789761B1 (en) * 2019-09-05 2024-03-20 Fundación Imdea Nanociencia Colorimetric detector
FR3101479B1 (fr) 2019-10-01 2021-10-15 Centre Nat Rech Scient Utilisation d’un matériau à transition de spin pour mesurer et/ou limiter la température de composants électroniques/photoniques

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5582900A (en) * 1991-11-22 1996-12-10 U.S. Philips Corporation Spin-transition compounds and their use for storing, processing and/or displaying information

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03289169A (ja) * 1990-04-05 1991-12-19 Toagosei Chem Ind Co Ltd 半導体記憶装置
FR2684238A1 (fr) * 1991-11-22 1993-05-28 Philips Electronique Lab Composes chimiques a transition de spin, et leur utilisation pour le stockage, le traitement d'information et/ou l'affichage de donnees.
US6200730B1 (en) * 1992-11-20 2001-03-13 U.S. Philips Corporation Spin-transition parent compounds
EP0666561A1 (fr) * 1994-02-03 1995-08-09 Laboratoires D'electronique Philips S.A.S. Composés chimiques de départ à transition de spin et dispositifs munis de moyens d'inscription, mémorisation et effaçage comprenant un milieu actif incluant au moins un de ces composés
FR2734824A1 (fr) * 1995-05-31 1996-12-06 Philips Electronique Lab Composes chimiques de depart a transition de spin et dispositifs munis de moyens d'inscription, memorisation et effacage comprenant un milieu actif incluant au moins un de ces composes
JPH09162366A (ja) * 1995-12-08 1997-06-20 Nkk Corp 半導体記憶装置およびその製造方法
JP3951322B2 (ja) * 1996-07-23 2007-08-01 昭和電工株式会社 スルフィド化合物の製造方法
JPH1056145A (ja) * 1996-08-07 1998-02-24 Hitachi Ltd 半導体集積回路装置の製造方法
JPH11283880A (ja) * 1998-03-31 1999-10-15 Mitsubishi Chemical Corp 電解コンデンサ用電解液及びそれを用いた電解コンデンサ
US6275373B1 (en) * 1999-12-09 2001-08-14 Pacesetter, Inc. Enhanced very high volt electrolyte
US6272038B1 (en) * 2000-01-14 2001-08-07 North Carolina State University High-density non-volatile memory devices incorporating thiol-derivatized porphyrin trimers
WO2001052266A1 (en) * 2000-01-14 2001-07-19 North Carolina State University Substrates carrying polymers of linked sandwich coordination compounds and methods of use thereof
JP2005502247A (ja) 2001-09-06 2005-01-20 コーニンクレッカ　フィリップス　エレクトロニクス　エヌ　ヴィ オーディオ再生装置
FR2898910B1 (fr) 2006-03-23 2008-06-20 Centre Nat Rech Scient Nouveau procede d'application en couche mince de materiaux moleculaires a transition de spin

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5582900A (en) * 1991-11-22 1996-12-10 U.S. Philips Corporation Spin-transition compounds and their use for storing, processing and/or displaying information

Also Published As

Publication number Publication date
EP1430552A1 (fr) 2004-06-23
JP2005501427A (ja) 2005-01-13
US20050161728A1 (en) 2005-07-28
JP4555567B2 (ja) 2010-10-06
FR2829293B1 (fr) 2003-11-14
US7638831B2 (en) 2009-12-29
FR2829293A1 (fr) 2003-03-07
WO2003019695A1 (fr) 2003-03-06

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