JP4522889B2 - シリコンウエハ載置用冶具および微細構造体の表面形状検出方法 - Google Patents

シリコンウエハ載置用冶具および微細構造体の表面形状検出方法 Download PDF

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Publication number
JP4522889B2
JP4522889B2 JP2005058310A JP2005058310A JP4522889B2 JP 4522889 B2 JP4522889 B2 JP 4522889B2 JP 2005058310 A JP2005058310 A JP 2005058310A JP 2005058310 A JP2005058310 A JP 2005058310A JP 4522889 B2 JP4522889 B2 JP 4522889B2
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Prior art keywords
silicon wafer
mounting
jig
mounting jig
fine structure
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Expired - Fee Related
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JP2005058310A
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Japanese (ja)
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JP2006245252A (ja
JP2006245252A5 (https=
Inventor
一範 中村
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Dai Nippon Printing Co Ltd
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Dai Nippon Printing Co Ltd
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Priority to JP2005058310A priority Critical patent/JP4522889B2/ja
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Publication of JP2006245252A5 publication Critical patent/JP2006245252A5/ja
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JP2005058310A 2005-03-03 2005-03-03 シリコンウエハ載置用冶具および微細構造体の表面形状検出方法 Expired - Fee Related JP4522889B2 (ja)

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JP2005058310A JP4522889B2 (ja) 2005-03-03 2005-03-03 シリコンウエハ載置用冶具および微細構造体の表面形状検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005058310A JP4522889B2 (ja) 2005-03-03 2005-03-03 シリコンウエハ載置用冶具および微細構造体の表面形状検出方法

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JP2006245252A JP2006245252A (ja) 2006-09-14
JP2006245252A5 JP2006245252A5 (https=) 2007-12-06
JP4522889B2 true JP4522889B2 (ja) 2010-08-11

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JP2005058310A Expired - Fee Related JP4522889B2 (ja) 2005-03-03 2005-03-03 シリコンウエハ載置用冶具および微細構造体の表面形状検出方法

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JP (1) JP4522889B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5036614B2 (ja) * 2008-04-08 2012-09-26 東京応化工業株式会社 基板用ステージ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01121932U (https=) * 1988-02-15 1989-08-18
JPH0727952B2 (ja) * 1988-03-18 1995-03-29 富士電機株式会社 ウエハ搬送装置
JP3414491B2 (ja) * 1994-05-12 2003-06-09 オリンパス光学工業株式会社 基板保持部材及びこれを用いた基板外観検査装置
JPH09199437A (ja) * 1996-01-12 1997-07-31 Sumitomo Sitix Corp 半導体ウェーハ支持装置
JP3157738B2 (ja) * 1997-02-27 2001-04-16 山形日本電気株式会社 ウエハ移載装置および移載方法
JP2002258161A (ja) * 2001-03-05 2002-09-11 Dainippon Printing Co Ltd 共焦点型レーザー顕微鏡における合焦点位置決定方法および測定対象物の表面の高さ測定方法

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