JP4521537B2 - 同調可能なｍｅｍｓフィルムバルク音響波マイクロ共振器 - Google Patents

同調可能なｍｅｍｓフィルムバルク音響波マイクロ共振器 Download PDF

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Publication number
JP4521537B2
JP4521537B2 JP2003568775A JP2003568775A JP4521537B2 JP 4521537 B2 JP4521537 B2 JP 4521537B2 JP 2003568775 A JP2003568775 A JP 2003568775A JP 2003568775 A JP2003568775 A JP 2003568775A JP 4521537 B2 JP4521537 B2 JP 4521537B2
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resonator
changing
electrode
piezoelectric material
applying
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JP2005528010A (ja
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フィリップ・ロバート
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コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/173—Air-gaps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H2009/241—Bulk-mode MEMS resonators

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2003568775A 2002-02-13 2003-02-11 同調可能なｍｅｍｓフィルムバルク音響波マイクロ共振器 Expired - Lifetime JP4521537B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0201759A FR2835981B1 (fr) 2002-02-13 2002-02-13 Microresonateur mems a ondes acoustiques de volume accordable
PCT/FR2003/000427 WO2003069776A2 (fr) 2002-02-13 2003-02-11 Microresonateur mems a ondes acoustiques de volume accordable

Publications (2)

Publication Number Publication Date
JP2005528010A JP2005528010A (ja) 2005-09-15
JP4521537B2 true JP4521537B2 (ja) 2010-08-11

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JP2003568775A Expired - Lifetime JP4521537B2 (ja) 2002-02-13 2003-02-11 同調可能なｍｅｍｓフィルムバルク音響波マイクロ共振器

Country Status (5)

Country Link
US (1) US7592739B2 (fr)
EP (1) EP1474866B1 (fr)
JP (1) JP4521537B2 (fr)
FR (1) FR2835981B1 (fr)
WO (1) WO2003069776A2 (fr)

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Also Published As

Publication number Publication date
WO2003069776A2 (fr) 2003-08-21
FR2835981A1 (fr) 2003-08-15
EP1474866B1 (fr) 2012-08-29
US20050162040A1 (en) 2005-07-28
FR2835981B1 (fr) 2005-04-29
JP2005528010A (ja) 2005-09-15
WO2003069776A3 (fr) 2004-04-08
EP1474866A2 (fr) 2004-11-10
US7592739B2 (en) 2009-09-22

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