JP4516021B2 - SC cut crystal unit - Google Patents
SC cut crystal unit Download PDFInfo
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- JP4516021B2 JP4516021B2 JP2005511932A JP2005511932A JP4516021B2 JP 4516021 B2 JP4516021 B2 JP 4516021B2 JP 2005511932 A JP2005511932 A JP 2005511932A JP 2005511932 A JP2005511932 A JP 2005511932A JP 4516021 B2 JP4516021 B2 JP 4516021B2
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- 239000013078 crystal Substances 0.000 title claims description 64
- 239000010453 quartz Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 238000005520 cutting process Methods 0.000 description 5
- 230000005284 excitation Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
- H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02551—Characteristics of substrate, e.g. cutting angles of quartz substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
Description
本発明は、SCカットの水晶振動子に係わり、とくに良好な振動特性を得ることのできる形状をもつSCカットの水晶振動子に関する。 The present invention relates to an SC cut crystal resonator, and more particularly to an SC cut crystal resonator having a shape capable of obtaining good vibration characteristics.
従来、2回回転水晶振動子として、例えば第3図に示すように、水晶の結晶のY軸に直交する面をX軸を中心にして約33°回転し、さらにこの回転した位置からZ軸を中心にして約22°回転した面から切り出した水晶片1に電極を形成したSCカットの水晶振動子が知られている(例えば日本国特開平11−177376号参照)。 Conventionally, as a twice-rotated crystal unit, for example, as shown in FIG. 3, a plane orthogonal to the Y-axis of the crystal of the crystal is rotated about 33 ° around the X-axis, and the Z-axis There is known an SC-cut crystal resonator in which an electrode is formed on a crystal piece 1 cut out from a surface rotated about 22 ° around the center (see, for example, Japanese Patent Application Laid-Open No. 11-177376).
このSCカットの水晶振動子は、ATカットと同様の三次曲線状の温度特性を有し、かつその変極点が94℃付近にあり、いわゆる水晶振動子が温度制御されている恒温槽型の水晶発振器の水晶振動子として用いられている。 This SC-cut quartz crystal has a temperature characteristic of a cubic curve similar to that of an AT-cut, and its inflection point is around 94 ° C. It is used as a crystal unit for oscillators.
しかしながら、SCカットの水晶振動子は、第4図に示すように、主振動であるCモードの共振(第4図で記号Cで示す)の近傍で、かつ、その高域側にBモード(Bで示す)及びAモード(Aで示す)の副振動を生じる。 However, as shown in FIG. 4, the SC-cut crystal resonator has a B mode (in the vicinity of C-mode resonance (indicated by symbol C in FIG. 4)), which is the main vibration, on the high frequency side. B) and A mode (indicated by A) side vibrations.
ここでAモードの振動の等価抵抗(以下「CI」と略称する)の値は、CモードのCIよりも大きいために発振器としては信号とした出力され難く、そのため格別水晶振動子では問題とはならない。 Here, since the value of the equivalent resistance (hereinafter abbreviated as “CI”) of the vibration in the A mode is larger than the CI in the C mode, it is difficult for the oscillator to output a signal. Don't be.
これに対してBモードの振動のCIは、CモードのCIに等しいか、場合によってはそれよりも小さいこともあり、しかも周波数もCモードの約1.09倍に位置し互いに近接している。このため、実際に発振器を製作すると往々にして副振動であるBモードで発振してしまうことがある。 On the other hand, the CI of the vibration in the B mode is equal to or smaller than the CI of the C mode, and the frequency is approximately 1.09 times that of the C mode and is close to each other. . For this reason, when an oscillator is actually manufactured, it often oscillates in the B mode, which is a secondary vibration.
したがって、SCカットの水晶振動子を用いる場合は、Cモードの振動を確実に励振するためにBモードの振動を抑圧することができるように、BモードのCIをCモードのCIよりも大きくしておく必要がある。このため水晶片の板面に不要振動を抑圧する質量を付加したり、あるいは、その保持位置を工夫することにより、Bモードの振動を抑圧することが行われている。 Therefore, when using an SC-cut crystal resonator, the B-mode CI is made larger than the C-mode CI so that the B-mode vibration can be suppressed in order to surely excite the C-mode vibration. It is necessary to keep. For this reason, B-mode vibration is suppressed by adding mass to suppress the unnecessary vibration to the plate surface of the crystal piece or by devising its holding position.
しかしながら、十分にBモードの振動を抑圧するためには試行錯誤を繰り返す必要があり手間がかかり、しかもその再現性が非常に乏しかった。 However, in order to sufficiently suppress the vibration of the B mode, it is necessary to repeat trial and error, which is troublesome and the reproducibility is very poor.
本発明のSCカットの水晶振動子は、このような従来のSCカットの水晶振動子のもつ問題点を鑑みてなされたもので、水晶片の外形形状を特殊な形状にカットし加工することによって、確実に、かつ再現性よくBモードによる共振を抑圧することができる、SCカットの水晶振動子を提供することを目的とする。 The SC-cut crystal resonator of the present invention has been made in view of the problems of such a conventional SC-cut crystal resonator. By cutting and processing the external shape of the crystal piece into a special shape, An object of the present invention is to provide an SC-cut crystal resonator capable of suppressing resonance in the B mode reliably and with high reproducibility.
本発明のSCカット水晶振動子は、水晶の結晶のY軸に直交する面をX軸を中心にして約33°〜35°回転し、この回転した位置からZ軸を中心にして22°〜24°回転した面から切り出したX’軸方向に細長い短冊形の水晶片のZ’軸に直交する端面をX’軸を中心にして+7°〜+13°または−7°〜−13°回転した方向へ傾けたことを特徴とする。また、該傾け角を−9°〜−11°または+9°〜+11°であることを特徴とするSCカットの水晶振動子である。 The SC-cut quartz resonator of the present invention rotates a plane perpendicular to the Y-axis of the crystal of crystal from about 33 ° to 35 ° about the X-axis, and from this rotated position to about 22 ° to about the Z-axis. The end face perpendicular to the Z ′ axis of a rectangular crystal piece elongated in the X′-axis direction cut out from the surface rotated by 24 ° was rotated + 7 ° to + 13 ° or −7 ° to −13 ° around the X ′ axis. It is characterized by tilting in the direction. Further, the SC-cut crystal resonator is characterized in that the tilt angle is −9 ° to −11 ° or + 9 ° to + 11 ° .
本発明のSCカット水晶振動子は、短冊形のSCカット水晶片の長手方向の端面を傾けるように加工したので、本発明Bモードの振動を抑圧でき、しかも形状を小型化しても変極点温度の変化を生じることもない。したがって、発振器の設計、製造が容易で、良好な発振特性を得られ、かつ、コストも安価なSCカットの水晶振動子を提供することができる。 Since the SC-cut crystal resonator of the present invention is processed so that the end face in the longitudinal direction of the strip-shaped SC-cut crystal piece is inclined, the vibration of the B-mode of the present invention can be suppressed and the inflection point temperature can be reduced even if the shape is reduced. No change occurs. Therefore, it is possible to provide an SC-cut crystal resonator that is easy to design and manufacture an oscillator, can obtain good oscillation characteristics, and is inexpensive.
第1図は本発明のSCカットの水晶板の切断角度を示す斜視図である。 FIG. 1 is a perspective view showing the cutting angle of the SC-cut quartz plate of the present invention.
第2図は第1図に示す水晶板から切り出した水晶片の斜視図である。 FIG. 2 is a perspective view of a crystal piece cut out from the crystal plate shown in FIG.
第3図は従来のSCカットの水晶板の切断角度を示す斜視図である。 FIG. 3 is a perspective view showing a cutting angle of a conventional SC-cut quartz plate.
第4図は従来のSCカットの水晶振動子の共振特性を示すグラフである。 FIG. 4 is a graph showing resonance characteristics of a conventional SC-cut crystal resonator.
以下本発明のSCカットの水晶振動子の一実施形態を添付した図面を参照して説明する。 An embodiment of an SC cut crystal resonator according to the present invention will be described below with reference to the accompanying drawings.
第1図は、本発明のSCカットの水晶振動子に用いる水晶片1の切断角度を示す斜視図である。 FIG. 1 is a perspective view showing a cutting angle of a crystal piece 1 used in an SC-cut crystal resonator according to the present invention.
すなわち、ここでは水晶の結晶のY軸に直交する面をX軸を回転中心にして33°〜35°回転し、この回転した位置からZ軸を回転中心にして22°〜24°回転する。 That is, here, the plane orthogonal to the Y axis of the crystal of the crystal is rotated 33 ° to 35 ° about the X axis as the rotation center, and is rotated 22 ° to 24 ° about the Z axis from the rotated position.
このような2回回転を行うと、第1図においてY軸に直交するX−Z面は、Z’−X’面となる。なお上述のように、X軸を回転中心として33°〜35°回転し、この回転した位置からZ軸を回転中心にして22°〜24°回転した場合、いわゆるSCカットの水晶振動子として励振することができる。 When such two rotations are performed, the XZ plane orthogonal to the Y axis in FIG. 1 becomes the Z′-X ′ plane. As described above, when the X-axis is rotated 33 ° to 35 ° around the rotation axis and the Z-axis is rotated about 22 ° to 24 ° from the rotated position, excitation is performed as a so-called SC-cut crystal resonator. can do.
そしてZ’−X’面の水晶板から、第2図に示すように、X’軸方向に細長い短冊形の水晶片1を切り出す。そして、この水晶片1の長手方向の端面、すなわちZ’軸に直交する端面(X’−Y’面)に傾け加工を行う。 Then, as shown in FIG. 2, a strip-shaped quartz crystal piece 1 elongated in the X′-axis direction is cut out from the crystal plate on the Z′-X ′ plane. Then, a tilting process is performed on an end face in the longitudinal direction of the crystal piece 1, that is, an end face (X'-Y 'face) perpendicular to the Z' axis.
この端面を傾ける角度は、X’軸を中心にして+7°〜+13°または−7°〜−13°回転した方向へ傾けるようにし、このようにして傾けた水晶片1の端面はX’−Y”面となる。 The angle at which this end face is tilted is tilted in the direction rotated by + 7 ° to + 13 ° or −7 ° to −13 ° around the X ′ axis, and the end face of the crystal piece 1 thus tilted is X′−. Y ”plane.
端面を傾ける角度が+7°〜+13°または−7°〜−13°において、良好なBモードの抑圧効果が得られる。より好ましくは、この傾ける角度は±9°〜±11°である。 When the angle at which the end face is inclined is + 7 ° to + 13 ° or −7 ° to −13 °, a good B-mode suppression effect can be obtained. More preferably, the angle of inclination is ± 9 ° to ± 11 ° .
なお、このような水晶片から水晶振動子を製作する場合は、水晶片の板面に対面して一対の励振電極を形成する。そして水晶片を所定容器に収納して適当な保持手段で保持し、かつ励振電極を外部へ導出して水晶振動子を構成する。 In the case of manufacturing a crystal resonator from such a crystal piece, a pair of excitation electrodes are formed facing the plate surface of the crystal piece. Then, the crystal piece is housed in a predetermined container and held by an appropriate holding means, and the excitation electrode is led out to constitute a crystal resonator.
このように水晶片の外形形状をカット加工することによって、輪郭滑り振動を抑圧することができる。とくに有害な副振動であるBモードの振動は、輪郭滑り振動系の振動であるが、本発明のSCカットの水晶振動子では、Bモードの振動を抑圧でき、主振動であるCモードの振動を確実に励振することができる。 By cutting the outer shape of the crystal piece in this way, contour slip vibration can be suppressed. The B-mode vibration, which is a particularly harmful sub-vibration, is a vibration of the contour slip vibration system. However, the SC-cut crystal resonator of the present invention can suppress the B-mode vibration and the C-mode vibration, which is the main vibration. Can be surely excited.
すなわちX’軸方向に細長い短冊形のSCカットをした水晶片において、Z’軸に直交する端面を−10°傾けたものでは、該端面を傾けていない水晶片に比してBモードのCIは約50%増加し、他方Bモードの振動は著しく抑圧される。 That is, in a crystal piece having a rectangular SC shape elongated in the X′-axis direction, an end face orthogonal to the Z′-axis is tilted by −10 °, the B-mode CI is compared with a crystal piece that is not inclined. Increases about 50%, while B-mode vibration is significantly suppressed.
したがって、従来、SCカットの水晶振動子を使用する場合に最大の障害となっていた有害なBモードの振動を確実に抑圧でき、特殊な加工、特別な発振回路を用いることなく有用な発振器を得ることができるようになる。 Therefore, it is possible to reliably suppress harmful B-mode vibration which has been the biggest obstacle in the past when using an SC-cut crystal resonator, and to provide a useful oscillator without using special processing or a special oscillation circuit. Be able to get.
さらにSCカットの水晶振動子の変極点温度94°は、水晶片を小型化した場合に、高温側へ変位する現象を提し、このため発振器を組み立てる場合に、恒温槽の設定温度の設定を難しくしていた。しかしながら、第2図に示すような端面を傾けた本発明の水晶片を用いると、水晶片の形状を小型化しても、水晶振動子の変極点温度は94°に保たれていて高温側へ変位しないようになる。 Furthermore, the inflection point temperature 94 ° of the SC-cut quartz crystal resonator is a phenomenon that shifts to the high temperature side when the crystal piece is miniaturized. Therefore, when the oscillator is assembled, the set temperature of the thermostat is set. It was difficult. However, when the crystal piece of the present invention having an inclined end face as shown in FIG. 2 is used, even if the shape of the crystal piece is reduced, the inflection point temperature of the crystal unit is kept at 94 ° and the temperature increases. It will not be displaced.
以上のように、本発明のSCカットの水晶振動子は、恒温槽型の水晶発振器の水晶振動子として有用であり、とくに、Bモードの振動を押圧してCモードの振動を確実に励振できる水晶発振器に用いるのに適している。
As described above, the SC-cut crystal resonator of the present invention is useful as a crystal resonator of a thermostat crystal oscillator, and in particular, it can surely excite C-mode vibration by pressing B-mode vibration. Suitable for use in crystal oscillators.
Claims (2)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2003276408 | 2003-07-18 | ||
JP2003276408 | 2003-07-18 | ||
PCT/JP2004/010557 WO2005008887A1 (en) | 2003-07-18 | 2004-07-16 | Sc cut quartz oscillator |
Publications (2)
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JPWO2005008887A1 JPWO2005008887A1 (en) | 2006-09-07 |
JP4516021B2 true JP4516021B2 (en) | 2010-08-04 |
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JP2005511932A Expired - Fee Related JP4516021B2 (en) | 2003-07-18 | 2004-07-16 | SC cut crystal unit |
Country Status (5)
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US (1) | US7705524B2 (en) |
EP (1) | EP1648085A4 (en) |
JP (1) | JP4516021B2 (en) |
CN (1) | CN100488047C (en) |
WO (1) | WO2005008887A1 (en) |
Families Citing this family (17)
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KR100788897B1 (en) * | 2006-02-06 | 2007-12-27 | 한국전자통신연구원 | Method for Transmitting of Acknowledgements to Hybrid ARQ Packets in OFDMA System and Transmitter/Receiver therefor |
JP4563437B2 (en) * | 2007-10-18 | 2010-10-13 | 日本電波工業株式会社 | Quartz crystal unit consisting of a Y-cut plate rotated twice |
JP4600692B2 (en) * | 2007-12-28 | 2010-12-15 | エプソントヨコム株式会社 | Quartz crystal resonator element, crystal device, and crystal resonator element manufacturing method |
FR2932334B1 (en) * | 2008-06-04 | 2010-07-30 | Centre Nat Rech Scient | HBAR RESONATOR WITH HIGH INTEGRATION |
FR2932333B1 (en) * | 2008-06-04 | 2010-08-13 | Centre Nat Rech Scient | HBAR RESONATOR WITH HIGH TEMPERATURE STABILITY |
JP4864114B2 (en) * | 2009-04-14 | 2012-02-01 | 日本電波工業株式会社 | Crystal oscillator |
JP5887968B2 (en) * | 2012-02-03 | 2016-03-16 | セイコーエプソン株式会社 | SC-cut quartz substrate, vibration element, electronic device, oscillator, and electronic equipment |
JP6295611B2 (en) * | 2013-11-05 | 2018-03-20 | セイコーエプソン株式会社 | Vibrator, oscillator, electronic device, and moving object |
JP6412384B2 (en) * | 2014-09-25 | 2018-10-24 | 株式会社アルバック | Quartz crystal resonator, sensor head having the crystal resonator, film formation control device, and method for manufacturing film formation control device |
JP6613482B2 (en) * | 2015-09-03 | 2019-12-04 | 日本電波工業株式会社 | Crystal oscillator |
JP6549452B2 (en) * | 2015-09-03 | 2019-07-24 | 日本電波工業株式会社 | Crystal oscillator |
JP6555779B2 (en) * | 2015-12-28 | 2019-08-07 | 日本電波工業株式会社 | AT cut crystal piece and crystal resonator |
JP5943160B2 (en) * | 2016-02-08 | 2016-06-29 | セイコーエプソン株式会社 | SC-cut quartz substrate, vibration element, electronic device, oscillator, and electronic equipment |
CN112117980A (en) * | 2020-09-23 | 2020-12-22 | 河北博威集成电路有限公司 | Electrode preparation method of quartz crystal resonator, resonator and oscillator |
JP7302618B2 (en) * | 2021-03-17 | 2023-07-04 | 株式会社大真空 | Crystal oscillator and its manufacturing method |
US11456700B1 (en) | 2021-08-20 | 2022-09-27 | Rockwell Collins, Inc. | Specifying SC and IT cut quartz resonators for optimal temperature compensated oscillator performance |
CN116346078B (en) * | 2023-05-31 | 2023-08-01 | 成都世源频控技术股份有限公司 | Surface-mounted quartz crystal resonator with modal suppression function |
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JPS59158612A (en) * | 1983-03-01 | 1984-09-08 | Seikosha Co Ltd | Thickness shear crystal oscillator |
JPS59193612A (en) * | 1983-04-18 | 1984-11-02 | Murata Mfg Co Ltd | Piezoelectric resonator and its manufacture |
JPH04123605A (en) * | 1990-09-14 | 1992-04-23 | Nippon Dempa Kogyo Co Ltd | Crystal resonator |
JPH05243890A (en) * | 1991-02-28 | 1993-09-21 | Nippon Dempa Kogyo Co Ltd | Crystal oscillator for sc cut |
JPH11177376A (en) * | 1997-12-12 | 1999-07-02 | Nippon Dempa Kogyo Co Ltd | Sc-cut crystal resonator |
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JPS5635524A (en) * | 1980-08-18 | 1981-04-08 | Morio Onoe | Quartz oscillator |
US4701661A (en) * | 1985-05-28 | 1987-10-20 | Frequency Electronics, Inc. | Piezoelectric resonators having a lateral field excited SC cut quartz crystal element |
JP4249502B2 (en) * | 2003-02-04 | 2009-04-02 | 日本電波工業株式会社 | Piezoelectric crystal material and piezoelectric vibrator |
-
2004
- 2004-07-16 US US10/563,431 patent/US7705524B2/en not_active Expired - Fee Related
- 2004-07-16 EP EP04747920A patent/EP1648085A4/en not_active Withdrawn
- 2004-07-16 CN CNB2004800205612A patent/CN100488047C/en not_active Expired - Fee Related
- 2004-07-16 WO PCT/JP2004/010557 patent/WO2005008887A1/en active Application Filing
- 2004-07-16 JP JP2005511932A patent/JP4516021B2/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59158612A (en) * | 1983-03-01 | 1984-09-08 | Seikosha Co Ltd | Thickness shear crystal oscillator |
JPS59193612A (en) * | 1983-04-18 | 1984-11-02 | Murata Mfg Co Ltd | Piezoelectric resonator and its manufacture |
JPH04123605A (en) * | 1990-09-14 | 1992-04-23 | Nippon Dempa Kogyo Co Ltd | Crystal resonator |
JPH05243890A (en) * | 1991-02-28 | 1993-09-21 | Nippon Dempa Kogyo Co Ltd | Crystal oscillator for sc cut |
JPH11177376A (en) * | 1997-12-12 | 1999-07-02 | Nippon Dempa Kogyo Co Ltd | Sc-cut crystal resonator |
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Publication number | Publication date |
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EP1648085A4 (en) | 2008-09-24 |
JPWO2005008887A1 (en) | 2006-09-07 |
CN1823471A (en) | 2006-08-23 |
WO2005008887A1 (en) | 2005-01-27 |
US7705524B2 (en) | 2010-04-27 |
EP1648085A1 (en) | 2006-04-19 |
CN100488047C (en) | 2009-05-13 |
US20080203858A1 (en) | 2008-08-28 |
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