JPH0685598A - Crystal oscillator for sc cut - Google Patents

Crystal oscillator for sc cut

Info

Publication number
JPH0685598A
JPH0685598A JP25725992A JP25725992A JPH0685598A JP H0685598 A JPH0685598 A JP H0685598A JP 25725992 A JP25725992 A JP 25725992A JP 25725992 A JP25725992 A JP 25725992A JP H0685598 A JPH0685598 A JP H0685598A
Authority
JP
Japan
Prior art keywords
crystal
mode
axis
crystal piece
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25725992A
Other languages
Japanese (ja)
Inventor
Mitsuaki Koyama
山 光 明 小
Mikio Saito
藤 三 樹 夫 斉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP25725992A priority Critical patent/JPH0685598A/en
Publication of JPH0685598A publication Critical patent/JPH0685598A/en
Pending legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To provide the third-order overtone SC cut crystal oscillator which can suppress oscillation in the B mode and A mode of sub oscillation and can surely excite oscillation in the C mode of main oscillation. CONSTITUTION:Concerning the disk-shaped SC cut crystal oscillator which is resonated with the third-order overtone cut out of a face rotating the face of crystal orthogonal to a Y axis almost at 33 deg. with an X axis as a center and further rotating it almost at 22 deg. from this rotated position with a Z axis as a center, the diameter of a crystal piece 1 is longer than 3mm and shorter than 20mm, one plate face of the crystal piece 1 is made flat, convex work is applied to the other plate face, the circular exciting electrode of a diameter shorter than the 30% diameter of the crystal piece 1 is formed in counter to both of side plate faces of the crystal piece 1, and the center of this exciting electrode is positioned in the range of + or -10 deg. from the center of the crystal piece 1 in the direction of an XX' axis.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、3次オーバトーンで使
用するSCカットの水晶振動子に係わり、特に副振動の
抑圧に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an SC-cut crystal unit used in a third overtone, and more particularly to suppression of side vibration.

【0002】[0002]

【従来の技術】一般に圧電結晶は、結晶軸に対して特定
の切断角度においてのみ圧電振動を励振することができ
る。たとえば水晶の圧電特性を利用した水晶振動子の場
合も、結晶軸に対して特定の切断角度においてのみ圧電
振動を励振することができ、これらの切断角度は、複数
の組み合わせが存在し、かつそれぞれの切断角度におい
て固有の振動特性を呈する。たとえば数MHzないし十
数MHzの周波数で最も一般的に使用されるATカット
の水晶振動子は、25℃付近に変曲点を有する3次曲線
状の温度特性を示す。一方近時、応力感度、熱衝撃特
性、位相雑音性能等について優れた性能を有するSCカ
ットの水晶振動子が注目されている。このようなSCカ
ットの水晶振動子は、95℃付近に変曲点を有する3次
曲線状の温度特性を示す。したがって、一定温度に加熱
した恒温槽に収納して使用する周波数安定度の高い、い
わゆる恒温槽型の発振器等に用いるために極めて望まし
い特性を有している。
2. Description of the Related Art Generally, a piezoelectric crystal can excite piezoelectric vibration only at a specific cutting angle with respect to a crystal axis. For example, even in the case of a crystal resonator that utilizes the piezoelectric characteristics of crystal, piezoelectric vibration can be excited only at a specific cutting angle with respect to the crystal axis, and there are a plurality of combinations of these cutting angles, and It exhibits unique vibration characteristics at the cutting angle of. For example, an AT-cut crystal resonator most commonly used at a frequency of several MHz to ten and several MHz exhibits a cubic curve-shaped temperature characteristic having an inflection point near 25 ° C. On the other hand, recently, SC-cut crystal resonators having excellent performances such as stress sensitivity, thermal shock characteristics, and phase noise performance have attracted attention. Such an SC-cut crystal resonator exhibits a cubic curve-shaped temperature characteristic having an inflection point near 95 ° C. Therefore, it has extremely desirable characteristics for use in a so-called constant temperature oven type oscillator having a high frequency stability, which is stored in a constant temperature oven heated to a constant temperature for use.

【0003】ところで、このようなSCカットの水晶振
動子は、図1に示すように主振動であるCモードの共振
(図示C)の近傍で、かつその高域側の周波数にBモー
ド(図示B)およびAモード(図示A)の副振動を生じ
る。ここでAモードの振動の等価抵抗(以下CIと略称
する)の値は、一般にCモードのそれに比して大きいた
め格別問題とはならない。これに対してBモードの振動
のCIは、Cモードのそれに等しいか場合によっては小
さくなる。このために、実際に発振器を製作すると往々
にして副振動であるBモードで発振してしまう問題があ
る。したがって、SCカットの水晶振動子を用いる場合
は、Cモードの振動を確実に励振するために、Bモード
の振動を抑圧してそのCIを、Cモードのそれよりも大
きくしておく必要がある。このために、水晶片の外形形
状、保持位置等について種々の工夫を行うことによって
Bモードの振動を抑圧することが行われている。このよ
うなものでは、たとえば水晶片の両側板面を凸レンズ状
に成形する、いわゆるベベル加工を非対称形となるよう
に施すことによってBモードの振動を抑圧するようにし
たものもある。しかしながら、このようなものでは水晶
片の外形形状を特殊な形状にしなければならず加工が面
倒で生産性も低い問題があった。
By the way, such an SC-cut crystal oscillator has a B-mode (shown in the figure) in the vicinity of the C-mode resonance (shown in the figure), which is the main vibration, and at a frequency on the high frequency side, as shown in FIG. B) and A mode (shown in A) side vibrations are generated. Here, since the value of the equivalent resistance of vibration in the A mode (hereinafter abbreviated as CI) is generally larger than that in the C mode, there is no particular problem. On the other hand, the CI of the B mode vibration is equal to or smaller than that of the C mode in some cases. Therefore, when an oscillator is actually manufactured, there is a problem that the oscillator often oscillates in the B mode which is a secondary vibration. Therefore, in the case of using the SC-cut crystal oscillator, it is necessary to suppress the B-mode vibration and make its CI larger than that of the C-mode in order to reliably excite the C-mode vibration. . For this reason, B-mode vibrations have been suppressed by variously devising the outer shape of the crystal piece, the holding position, and the like. In such a device, for example, the B-mode vibration is suppressed by performing so-called beveling in which both side plate surfaces of the crystal blank are formed into a convex lens shape so as to be asymmetrical. However, in such a case, there has been a problem that the outer shape of the crystal piece has to be made into a special shape, the processing is troublesome, and the productivity is low.

【0004】[0004]

【発明が解決しようとする課題】本発明は、上記の事情
に鑑みてなされたもので、AモードおよびBモードの副
振動を抑圧し、主振動であるCモードの振動を確実に励
振することができ、微細な調整を行う必要もなく生産性
も良好な3次オーバトーンで用いるSCカットの水晶振
動子を提供することを目的とするものである。
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and suppresses auxiliary vibrations of A mode and B mode and surely excites vibration of C mode which is a main vibration. It is an object of the present invention to provide an SC-cut crystal resonator used in the third overtone, which does not require fine adjustment and has good productivity.

【0005】[0005]

【課題を解決するための手段】本発明は、水晶の結晶の
Y軸に直交する面をX軸を中心にして約33゜回転し、
更にこの回転した位置からZ軸を中心にして約22゜回
転した面から切り出した3次オーバトーンで共振する円
板状のSCカットの水晶振動子において、水晶片の直径
は3mmよりも大きく20mmよりも小さく、水晶片の
一方の板面を平面とし他方の板面にコンベックス加工を
施し、水晶片の両側板面に相対面して水晶片の直径の3
0%よりも小さい直径の円形の励振電極を形成し、この
励振電極の中心を水晶片の中心からXX’軸方向に対し
て±10゜の範囲に位置させたことを特徴とするもので
ある。
According to the present invention, a plane perpendicular to the Y axis of a crystal of quartz is rotated about the X axis by about 33 °,
Furthermore, in the disk-shaped SC-cut crystal resonator that resonates with a third overtone cut out from the surface rotated about 22 degrees from the rotated position about the Z axis, the diameter of the crystal piece is larger than 3 mm and 20 mm. Smaller than that, one plate surface of the crystal piece is a flat surface, and the other plate surface is subjected to convex processing.
A circular excitation electrode having a diameter smaller than 0% is formed, and the center of the excitation electrode is located within a range of ± 10 ° from the center of the crystal element with respect to the XX 'axis direction. .

【0006】[0006]

【実施例】以下本発明の一実施例を図1に示す水晶片の
板面の平面図、図2に示す水晶片の断面図を参照して詳
細に説明する。図中1は、直径14mmのSCカットの
水晶片である。この水晶片1は、水晶の結晶のY軸に直
交する面をX軸を中心にして約33゜回転し、更にこの
回転した位置からZ軸を中心にして約22゜回転した面
から切り出したものである。そして、回転したX軸とZ
軸を各々XX’軸とZZ’軸として、+XX’軸方向の
端部をZZ’軸に平行に切除し、XX’軸方向の寸法
を、13.5mmとした。また、この水晶片1は図2に
示す断面図のように一方の板面を平面とし、他方の板面
にコンベックス加工を施し、不要な振動モードの発生、
スプリアス等を抑圧するようにしている。そして上記水
晶片1の両側板面に直径5mmの円形の電極を相対面し
て形成している。なお、この励振電極の中心は水晶片1
の中心からXX’軸方向へ偏心して設けている。そして
上記励振電極は、水晶に対する付着性の良好なCr(ク
ロム)を第一層として蒸着し、この上に電気の良導体で
化学的に安定なAu(金)を第二層として蒸着したもの
である。そして、これらの電極材料の厚みは、それぞれ
Crを約200m-10としAuを約1500m-10とし
た。このようにすれば、たとえば図 に示すようにCモ
ードの共振特性に対してBモードの共振特性を充分に抑
圧することができ、主振動であるCモードの共振を確実
に励振することができる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below in detail with reference to the plan view of the plate surface of the crystal piece shown in FIG. 1 and the sectional view of the crystal piece shown in FIG. In the figure, 1 is an SC-cut crystal piece having a diameter of 14 mm. The crystal piece 1 was cut from a surface rotated about 22 ° about the Z axis from the rotated position about 33 ° about the X axis on the surface orthogonal to the Y axis of the crystal of the crystal. It is a thing. And the rotated X axis and Z
The axes were taken as the XX ′ axis and the ZZ ′ axis, respectively, and the end portion in the + XX ′ axis direction was cut in parallel with the ZZ ′ axis, and the dimension in the XX ′ axis direction was set to 13.5 mm. Further, as shown in the cross-sectional view of FIG. 2, the crystal piece 1 has one plate surface as a flat surface and the other plate surface is subjected to convex processing to generate an unnecessary vibration mode.
I try to suppress spurious. Then, a circular electrode having a diameter of 5 mm is formed on both sides of the crystal blank 1 so as to face each other. The center of this excitation electrode is the crystal piece 1.
It is provided so as to be eccentric in the XX'-axis direction from the center. The excitation electrode is formed by depositing Cr (chrome), which has good adhesion to quartz, as a first layer, and then depositing Au (gold), which is a good conductor of electricity and is chemically stable, as a second layer. is there. The thickness of these electrode materials was such that Cr was about 200 m-10 and Au was about 1500 m-10. With this configuration, for example, as shown in the figure, the B-mode resonance characteristic can be sufficiently suppressed with respect to the C-mode resonance characteristic, and the C-mode resonance, which is the main vibration, can be reliably excited. .

【0007】本発明においては、水晶片の直径を3mm
ないし20mmとした。この理由は、3mmよりも小さ
い径では所望の共振特性を得ることが困難なこと、20
mmよりも大きい径では大きすぎて実用性に問題がある
ためである。また励振電極は円形で水晶片の径の30%
よりも小さくしたが、この理由は励振電極の径が大き
く、あるいは円形でない場合は不必要な振動モード等を
生じ易くなるためである。さらに励振電極をXX’軸方
向に偏心させた理由は、水晶片の中心を通るXX’軸上
の異なる位置に励振電極を形成したときにCモード、B
モードおよびAモードの各々のレベルを測定し、また同
様に、水晶片の中心を通るZZ’軸上の異なる位置に電
極を形成したときのCモード、BモードおよびAモード
の各々のレベルを測定した。これらの測定の結果、Cモ
ードのレベルを基準としたときのBモードおよびAモー
ドの各々のレベルの差(dB)は図3のグラフに示すよ
うになった。図3において横軸は水晶片の中心から励振
電極の中心までの距離であり、は電極を−Z方向へ移
動したもの、は同じく+Z方向へ移動したもの、は
−X方向へ移動したもの、は+X方向へ移動したもの
である。図3に示す結果から、主振動であるCモードの
レベルに対して、副振動であるBモードおよびAモード
各々のレベルを小さくするためには、電極の位置を水晶
片の中心とするよりも+XX’軸の方向に偏心させるこ
とが望ましく、この場合、たとえばXX’軸方向へ2.
5mm偏心した場合はBモードの共振は9dB程度低く
なり充分に抑圧できることを示している。このような構
成であれば、励振電極を形成する位置をXX’軸方向へ
偏心させればよいので、たとえば予め電極位置を偏心さ
せた蒸着マスクを用いることによって容易に良好な共振
特性の水晶振動子を量産することができ、微細な調整を
行う必要もなく特性のバラツキも少なくできる。
In the present invention, the diameter of the crystal piece is 3 mm.
Or 20 mm. The reason is that it is difficult to obtain a desired resonance characteristic with a diameter smaller than 3 mm.
This is because a diameter larger than mm is too large and there is a problem in practicality. The excitation electrode is circular and 30% of the diameter of the crystal piece.
This is because the diameter of the excitation electrode is large, or unnecessary vibration modes are likely to occur when the diameter of the excitation electrode is not circular. Further, the reason why the excitation electrode is eccentric in the XX'-axis direction is that when the excitation electrode is formed at different positions on the XX'-axis passing through the center of the crystal element, the C mode, B
The level of each of the C-mode, the A-mode and the A-mode is measured, and similarly, the level of each of the C-mode, the B-mode and the A-mode is measured when electrodes are formed at different positions on the ZZ 'axis passing through the center of the crystal piece. did. As a result of these measurements, the level difference (dB) between the B mode and the A mode when the level of the C mode was used as a reference was as shown in the graph of FIG. In FIG. 3, the horizontal axis is the distance from the center of the crystal element to the center of the excitation electrode, is the electrode moved in the −Z direction, is the electrode moved in the + Z direction, is the electrode moved in the −X direction, Is moved in the + X direction. From the results shown in FIG. 3, in order to reduce the levels of the B mode and the A mode, which are the sub-vibrations, with respect to the level of the C mode, which is the main vibration, the position of the electrode is more than that of the center of the crystal piece. It is desirable to make it eccentric in the + XX ′ axis direction, and in this case, for example, in the XX ′ axis direction.2.
When the eccentricity is 5 mm, the B-mode resonance is lowered by about 9 dB, which means that it can be sufficiently suppressed. With such a configuration, the position where the excitation electrode is formed may be decentered in the XX'-axis direction. Therefore, for example, by using a vapor deposition mask in which the electrode position is decentered in advance, it is possible to easily obtain a crystal vibration having a good resonance characteristic. Since the child can be mass-produced, there is no need to make fine adjustments and variations in characteristics can be reduced.

【発明の効果】以上詳述したように本発明によれば、A
モードおよびBモードの副振動を確実に抑圧し、主振動
であるCモードの振動を励振することができる3次オー
バトーンで用いるSCカットの水晶振動子を提供するこ
とができる。
As described above in detail, according to the present invention, A
It is possible to provide an SC-cut crystal resonator used in the third overtone, which can suppress the secondary vibrations of the mode and the B mode without fail and excite the vibration of the C mode, which is the main vibration.

【0009】[0009]

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の水晶片の板面の平面図であ
る。
FIG. 1 is a plan view of a plate surface of a crystal piece according to an embodiment of the present invention.

【図2】図1に示す水晶片の側面図である。2 is a side view of the crystal piece shown in FIG. 1. FIG.

【図3】本発明の水晶振動子の電極の偏心量とCモード
のレベルに対するBモードのレベル差を表したグラフで
ある。
FIG. 3 is a graph showing the amount of eccentricity of the electrodes of the crystal unit of the present invention and the level difference between B mode and C mode level.

【図4】本発明の一実施例の水晶振動子の共振特性を示
す図である。
FIG. 4 is a diagram showing a resonance characteristic of a crystal unit according to an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 水晶片 1 crystal piece

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 水晶の結晶のY軸に直交する面をX軸を
中心にして約33゜回転し、更にこの回転した位置から
Z軸を中心にして約22゜回転した面から切り出した3
次オーバトーンで共振する円板状のSCカットの水晶振
動子において、 水晶片の直径は3mmよりも大きく20mmよりも小さ
く、 水晶片の一方の板面を平面とし他方の板面にコンベック
ス加工を施し、 水晶片の両側板面に相対面して水晶片の直径の30%よ
りも小さい直径の円形の励振電極を形成し、 この励振電極の中心を水晶片の中心からXX’軸方向に
対して±10゜の範囲に位置させたことを特徴とするS
Cカットの水晶振動子
1. A plane perpendicular to the Y-axis of a crystal of quartz is rotated about 33 ° about the X-axis, and further cut out from this rotated position about 22 ° about the Z-axis.
In a disk-shaped SC-cut crystal resonator that resonates with the next overtone, the diameter of the crystal piece is larger than 3 mm and smaller than 20 mm, and one plate surface of the crystal piece is flat and the other plate is convex-processed. Then, a circular excitation electrode having a diameter smaller than 30% of the diameter of the crystal piece is formed so as to face both sides of the crystal piece, and the center of the excitation electrode is set in the XX'-axis direction from the center of the crystal piece. S characterized by being positioned within ± 10 °
C-cut crystal unit
JP25725992A 1992-08-31 1992-08-31 Crystal oscillator for sc cut Pending JPH0685598A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25725992A JPH0685598A (en) 1992-08-31 1992-08-31 Crystal oscillator for sc cut

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25725992A JPH0685598A (en) 1992-08-31 1992-08-31 Crystal oscillator for sc cut

Publications (1)

Publication Number Publication Date
JPH0685598A true JPH0685598A (en) 1994-03-25

Family

ID=17303903

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25725992A Pending JPH0685598A (en) 1992-08-31 1992-08-31 Crystal oscillator for sc cut

Country Status (1)

Country Link
JP (1) JPH0685598A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10250224B2 (en) 2014-06-16 2019-04-02 Nihon Dempa Kogyo Co., Ltd. Piezoelectric vibrating piece and piezoelectric device
US10277197B2 (en) 2015-12-25 2019-04-30 Nihon Dempa Kogyo Co., Ltd. Piezoelectric vibrating piece and piezoelectric device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10250224B2 (en) 2014-06-16 2019-04-02 Nihon Dempa Kogyo Co., Ltd. Piezoelectric vibrating piece and piezoelectric device
US10277197B2 (en) 2015-12-25 2019-04-30 Nihon Dempa Kogyo Co., Ltd. Piezoelectric vibrating piece and piezoelectric device

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