JP2884569B2 - Method of manufacturing rectangular AT-cut quartz resonator for overtone - Google Patents
Method of manufacturing rectangular AT-cut quartz resonator for overtoneInfo
- Publication number
- JP2884569B2 JP2884569B2 JP63088478A JP8847888A JP2884569B2 JP 2884569 B2 JP2884569 B2 JP 2884569B2 JP 63088478 A JP63088478 A JP 63088478A JP 8847888 A JP8847888 A JP 8847888A JP 2884569 B2 JP2884569 B2 JP 2884569B2
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- Prior art keywords
- axis
- rectangular
- overtone
- dimension
- vibrating piece
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Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明はATカットで切断された矩形状の水晶片を用
い、高周波発振を行なわせるオーバートーン用矩形状AT
振動子に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention uses a rectangular crystal piece cut by an AT cut, and a rectangular AT for overtone that performs high-frequency oscillation.
Related to a vibrator.
現在、数多くある水晶振動子の内で、最も汎用性の高
い振動子はAT振動子である。At present, among the many quartz oscillators, the most versatile oscillator is the AT oscillator.
このAT振動子は、比較的良好な周波数−温度特性（以
下温特と略す）を有する為に、通信機器クロック等の民
生機器に利用されている。This AT resonator has relatively good frequency-temperature characteristics (hereinafter abbreviated as temperature characteristic), and is therefore used in consumer devices such as communication device clocks.
従来、AT振動子は、円板状AT振動子のみが存在してい
た。Conventionally, the AT vibrator has only a disk-shaped AT vibrator.
しかし、近年電子機器分野の小型軽量化が進み、水晶
振動子にも小型化が要求されるようになってきた。However, in recent years, the size and weight of electronic devices have been reduced, and quartz oscillators have also been required to be reduced in size.
そこで、Ｘ軸（電気軸）を長さｌ、Ｚ′軸（Ｚ軸（光
軸）をＸ軸まわりに回転した軸）を幅ｗ、Ｙ′軸（Ｙ軸
（機械軸）をＸ軸まわりに回転した軸）を厚みｔとし
て、Ｘ軸方向に長い矩形状に加工されたAT振動子が作製
されるようになってきた。Therefore, the X-axis (electric axis) has a length l, the Z'-axis (the axis obtained by rotating the Z-axis (optical axis) around the X-axis) has a width w, and the Y'-axis (the Y-axis (mechanical axis) has a length around the X-axis). An AT vibrator that has been processed into a rectangular shape that is long in the X-axis direction, with the thickness t being the (rotated shaft) is now being manufactured.
しかし、オーバートーン用矩形状AT振動子には、通常
この主振動以外に、主振動の周波数の近傍にスプリアス
振動が存在し、特温に悪影響を及ぼす、また直列共振抵
抗（以下CI値を略す）が高いという課題があった。However, in addition to the main vibration, a spurious vibration exists near the main vibration frequency in the rectangular AT vibrator for overtones, which has an adverse effect on the special temperature and a series resonance resistance (hereinafter, CI value is abbreviated). ) Was high.
本発明は上述の課題を解決することにあり、その目的
は、オーバートーン用矩形状AT振動子において、スプリ
アス振動による影響を防止する方法、またCI値を低くす
る方法を提供するところにある。An object of the present invention is to solve the above-described problems, and an object of the present invention is to provide a method for preventing the influence of spurious vibration and a method for lowering the CI value in a rectangular AT vibrator for overtone.
（１）本発明のオーバートーン用矩形状ATカット水晶振
動子の製造方法は、水晶単結晶の電気軸をＸ軸とし機械
軸をＹ軸とし光軸をＺ軸とし、Ｘ軸回りに回転されたＹ
軸及びＺ軸をそれぞれＹ′軸及びＺ′軸としたとき、矩
形状ATカット振動片のＸ軸方向の寸法を8mm以下とし
Ｚ′軸方向の寸法を3mm以下としＹ′軸方向の寸法を0.5
mm以下として形成し、 前記矩形状ATカット振動片の主面上に電極を形成する
前後の周波数変化量を△ｆ（単位をppmとする。）とし
３次オーバートーンの周波数をｆ（単位をMHzとす
る。）としたとき、△f/fが370＜△f/f＜670となるよう
に前記電極を形成したことを特徴とする。(1) In the method for manufacturing a rectangular AT-cut quartz resonator for overtone according to the present invention, the quartz single crystal is rotated around the X axis with the electric axis as the X axis, the mechanical axis as the Y axis, the optical axis as the Z axis, and the X axis. Y
When the axis and the Z axis are the Y 'axis and the Z' axis, respectively, the dimension in the X axis direction of the rectangular AT-cut vibrating piece is 8 mm or less, the dimension in the Z 'axis direction is 3 mm or less, and the dimension in the Y' axis direction is 0.5
mm or less, the frequency change before and after the electrode is formed on the main surface of the rectangular AT-cut vibrating piece is Δf (unit is ppm), and the frequency of the third overtone is f (unit is f MHz), the electrode is formed such that Δf / f satisfies 370 <Δf / f <670.
（２）さらに、前記矩形状ATカット振動片のＺ′軸方向
の寸法を幅ｗとしＹ′軸方向の寸法を厚みｔとしたと
き、幅ｗと厚みｔとの辺比w/tを、 w/t＝8.4±0.2、 w/t＝10.64±0.2、 w/t＝11.85±0.15、 w/t＝13.45±0.15、 w/t＝14.8±0.2、 w/t＝17.6±0.2、 w/t＝19.8±0.2又は w/t＝20.9±0.2 としたことを特徴とする。(2) Further, when the dimension in the Z′-axis direction of the rectangular AT-cut vibrating piece is a width w and the dimension in the Y′-axis direction is a thickness t, a side ratio w / t between the width w and the thickness t is defined as: w / t = 8.4 ± 0.2, w / t = 10.64 ± 0.2, w / t = 11.85 ± 0.15, w / t = 13.45 ± 0.15, w / t = 14.8 ± 0.2, w / t = 17.6 ± 0.2, w / It is characterized by t = 19.8 ± 0.2 or w / t = 20.9 ± 0.2.
本発明は以上の構成を有するので、前記オーバートー
ン用矩形状AT振動片の主面上に電極を形成する前後の周
波数変化量（以後、△ｆと略す）と、前記オーバートー
ン用矩形状AT振動片の幅ｗと厚みｔを適当に選択するこ
とにより、スリアス振動を抑制することができ、またCI
値を低くすることができる。Since the present invention has the above configuration, the amount of frequency change before and after forming an electrode on the main surface of the rectangular AT vibrating piece for overtone (hereinafter abbreviated as Δf) and the rectangular AT vibrating piece for overtone are described. By appropriately selecting the width w and the thickness t of the vibrating piece, it is possible to suppress the thrilling vibration.
You can lower the value.
以下、本発明について実施例に基づいて詳細に説明す
る。Hereinafter, the present invention will be described in detail based on examples.
第１図は、本発明のオーバートーン用矩形状AT振動子
の１実施例を示す斜視図であり、前記オーバートーン用
矩形状AT振動子は、蒸着等の方法により電極２が形成さ
れたオーバートーン用矩形状AT振動片１と、気密端子３
を貫通する２本のリード端子４の一方の端のインナーリ
ード５と前記電極２の一方の幅とを半田６等の接着剤で
固定し、さらにケース７を前記気密端子３に圧入して構
成されている。FIG. 1 is a perspective view showing one embodiment of a rectangular AT vibrator for overtone according to the present invention, wherein the rectangular AT vibrator for overtone has an electrode 2 formed by a method such as vapor deposition. Rectangular AT vibrating reed 1 for tone and hermetic terminal 3
The inner lead 5 at one end of the two lead terminals 4 penetrating the electrode 2 and one width of the electrode 2 are fixed with an adhesive such as solder 6 and the case 7 is pressed into the airtight terminal 3. Have been.
また第１図の前記オーバートーン用矩形状AT振動片１
において、Ｙ′軸方向に厚みｔ、Ｚ′軸方向に幅Ｗとと
ってある。1. The overtone rectangular AT vibrating reed 1 shown in FIG.
, The thickness t is taken in the Y'-axis direction and the width W is taken in the Z'-axis direction.
またこの時幅ｗと厚みｔとの辺比w/tを w/t＝8.4±0.2 となるようにｗ、ｔを選択してある。 At this time, w and t are selected so that the side ratio w / t between the width w and the thickness t is w / t = 8.4 ± 0.2.
第２図は、△ｆとCIとの関係図である。 FIG. 2 is a diagram showing the relationship between Δf and CI.
第２図（ａ）は、周波数を変更した場合の△ｆとCIと
の相関図である。同図を見ると周波数が高くなるにつれ
て△ｆは小さくてもCIが低くなることが分かる。また各
周波数共に△ｆが大きくなりすぎるとCI値が高くなる傾
向にあるがこれは質量付加により振動が励振しにくくな
っていることをあらわしている。FIG. 2A is a correlation diagram between Δf and CI when the frequency is changed. It can be seen from the figure that as the frequency increases, the CI decreases even though Δf decreases. Also, if Δf is too large for each frequency, the CI value tends to increase. This indicates that vibration is hard to be excited due to the added mass.
また第２図（ｂ）は、周波数を変更した場合の△f/f
とCIとの相関図である。同図を見ると周波数に関係なく
△f/fが大きくなるとCIは低下し、△f/fが大きくなりす
ぎるとCI値が高くなる傾向にあるがこれは先ほど述べた
理由である。FIG. 2 (b) shows the Δf / f when the frequency is changed.
FIG. 6 is a correlation diagram between the data and CI. Referring to the figure, the CI decreases as Δf / f increases irrespective of the frequency, and the CI value tends to increase as Δf / f becomes too large. This is the reason described above.
故に 370＜△f/f＜670 であればCI値は低くなっていることが分かる。 Therefore, if 370 <Δf / f <670, it can be seen that the CI value is low.
特に△f/f＝520付近でCI値が最低となっていることが
分かる。In particular, it can be seen that the CI value is lowest around Δf / f = 520.
第３図は、３次オーバートーンの主振動の周波数（以
後F0と略す。）とスプリアスの周波数（以後Ｆと略す）
との比F/F0とw/tとの関係を示した図である。Figure 3 is a (hereafter, F 0.) 3 overtone of the main vibration frequency as (hereafter, F) frequency of the spurious
FIG. 4 is a diagram showing a relationship between the ratio F / F 0 and w / t.
実線で、前記オーバートーン用矩形状AT振動片だけの
F/F0とw/tとの関係であり、破線は、前記電極２が前記
オーバートーン用矩形状AT振動片１の主面上に形成され
た場合のF/F0とw/tとの関係である。The solid line shows only the overtone rectangular AT vibrating piece.
A relationship between the F / F 0 and w / t, broken lines, and the w / t F / F 0 in the case of the electrode 2 is formed on the overtone for rectangular AT vibrating reed 1 on the main surface The relationship is
同図を見れば分かるように、電動がオーバートーン用
矩形状AT振動片の主面上に形成された場合のF/F0と、オ
ーバートーン用矩形状AT振動片のみのF/F0の位置関係が
変化していることが分かる。As can be seen from the figure, F / F 0 when electric power is formed on the main surface of the rectangular AT vibrating piece for overtone and F / F 0 of only the rectangular AT vibrating piece for overtone are used. It can be seen that the positional relationship has changed.
これは電極の質量に対する周波数低下量が３次オーバ
ートーンの主振動とスリアスで異なるためであり、電極
の同一質量に対する周波数低下量は３次オーバートンの
主振動の方が大きいからである。This is because the amount of frequency reduction with respect to the mass of the electrode is different between the main vibration of the third overtone and the thrust, and the amount of frequency reduction with respect to the same mass of the electrode is greater in the third vibration of the overtone.
第３図より分かるように蒸着前後でのスプリアスのな
い最適辺比の値はずれることが分かる。As can be seen from FIG. 3, it can be seen that the value of the optimum side ratio without spurious before and after the deposition is shifted.
第４図は、辺比w/tを変更した時の温度特性（以後温
特と略記する）を示した図である。FIG. 4 is a diagram showing temperature characteristics (hereinafter abbreviated as temperature characteristics) when the side ratio w / t is changed.
第４図（ａ）は、辺比w/tを w/t＝8.4−0.2 とした場合の温特を示しており、温度の低温側の方にス
プリアスの影響からリップスルが生じはじめていること
が分かる。FIG. 4 (a) shows the temperature characteristics when the side ratio w / t is set to w / t = 8.4−0.2. It can be seen that the lip-sulfur starts to be generated on the lower temperature side due to the influence of spurious. I understand.
また第４図（ｂ）は、辺比w/tを w/t＝8.4 とした場合の温特を示しており、スプリアスの影響がな
くリップルが生じていない事が分かる。FIG. 4 (b) shows the temperature characteristics when the side ratio w / t is set to w / t = 8.4, and it can be seen that there is no influence of spurious and no ripple occurs.
第４図（ｃ）は、辺比w/tを w/t＝8.4＋0.2 とした場合の温特を示しており、温度の高温側の方にス
プリアスの影響からリップルが生じはじめていることが
分かる。FIG. 4 (c) shows the temperature characteristics when the side ratio w / t is set to w / t = 8.4 + 0.2, and the ripples are starting to occur on the high temperature side due to the influence of spurious. I understand.
故に、辺比w/tを w/t＝8.4±0.2 に設定することにより、３次オーバートーンの主振動の
周波数の近傍にスプリアス振動が存在し、温特に悪影響
を及ぼすという欠点を抑制することができる。Therefore, by setting the side ratio w / t to w / t = 8.4 ± 0.2, it is possible to suppress the disadvantage that spurious vibrations exist near the frequency of the main vibration of the third overtone, which adversely affects temperature. Can be.
また本発明の他の辺比w/tについても同様の効果があ
り、辺比を次の範囲 w/t＝10.64±0.2 w/t＝11.85±0.15 w/t＝13.45±0.15 w/t＝14.8 ±0.2 w/t＝17.6 ±0.2 w/t＝19.8 ±0.2 w/t＝20.9 ±0.2 に設定することにより、３次オーバートーンの主振動の
周波数の近傍にスプリアス振動が存在し、温特に悪影響
を及ぼすという欠点を抑制することができる。The same effect is obtained with respect to the other side ratio w / t of the present invention, and the side ratio is set in the following range: w / t = 10.64 ± 0.2 w / t = 11.85 ± 0.15 w / t = 13.45 ± 0.15 w / t = By setting 14.8 ± 0.2 w / t = 17.6 ± 0.2 w / t = 19.8 ± 0.2 w / t = 20.9 ± 0.2, spurious vibration exists near the frequency of the main vibration of the third overtone, The disadvantage of having an adverse effect can be suppressed.
また、これまでオーバートーン用矩形状AT振動片は、
直方体だけで説明してきたが、第５図（ａ）、第５図
（ｂ）に示すような、オーバートーン用矩形状AT振動片
をコンベックス加工したり、ベベル加工した場合でも厚
みｔを一番厚い中心部分で測定することにより同一の結
果が得られる。Until now, the rectangular AT vibrating reed for overtone
Although only a rectangular parallelepiped has been described, even when the overtone rectangular AT vibrating reed is convex-processed or beveled as shown in FIGS. 5 (a) and 5 (b), the thickness t is the highest. The same result is obtained by measuring at the thick center.
故に、第５図（ａ）、第５図（ｂ）に示すような、オ
ーバートーン用矩形状AT振動片をコンベックス加工した
り、ベベル加工したりしても本発明は有効である。Therefore, the present invention is effective even when the rectangular AT vibrating piece for overtone is subjected to the convex processing or the bevel processing as shown in FIGS. 5 (a) and 5 (b).
以上述べたように本発明によれば、 370＜△f/f＜670 となるように、△ｆを適当に選択することにより、CI値
を低くすることができ、また同時にオーバートーン用矩
形状AT振動片の幅ｗと厚みｔを適当に選択することによ
り、スプリアス振動による影響を防止することができる
という効果を有する。また、種々の周波数の異なる振動
子を設計する場合に、電極形成による周波数変化量△ｆ
とCI値との関係をいちいち実験により求める必要がな
く、設計の合理化と実験のためのコストを低減できると
いう効果がある。さらに、所定の辺比と所定の蒸着量と
を組み合わせることにより試験量を格段に少なくできる
という効果がある。As described above, according to the present invention, the CI value can be reduced by appropriately selecting △ f so that 370 <△ f / f <670, and at the same time, the overtone rectangular shape can be obtained. By appropriately selecting the width w and the thickness t of the AT vibrating piece, there is an effect that the influence of spurious vibration can be prevented. Further, when designing vibrators having various frequencies, the amount of change in frequency due to electrode formation Δf
And the CI value need not be obtained by experiments, which has the effect of rationalizing the design and reducing the costs for experiments. Furthermore, there is an effect that the test amount can be significantly reduced by combining the predetermined side ratio and the predetermined vapor deposition amount.
第１図は本発明のオーバートーン用矩形状AT振動子を示
す斜視図。 第２図（ａ）（ｂ）は、△ｆとCI、または△f/fとCIと
の関係図。 第３図は、F/F0とw/tとの関係を示す図。 第４図（ａ）〜（ｃ）は、辺比w/tを変更した時の温特
を示した図。 第５図（ａ）、（ｂ）は、本発明のオーバートーン用矩
形状AT振動片のその他の実施例を示す斜視図。 １……オーバートーン用矩形状AT振動片 ２……電極 ３……気密端子 ４……リード端子 ５……インナーリード ６……半田 ７……ケースFIG. 1 is a perspective view showing a rectangular AT vibrator for overtone according to the present invention. FIGS. 2A and 2B are diagrams showing the relationship between Δf and CI or Δf / f and CI. FIG. 3 is a diagram showing a relationship between F / F 0 and w / t. FIGS. 4A to 4C are diagrams showing temperature characteristics when the side ratio w / t is changed. FIGS. 5 (a) and 5 (b) are perspective views showing another embodiment of the rectangular AT vibrating piece for overtone of the present invention. DESCRIPTION OF SYMBOLS 1 ... Overtone rectangular AT vibrating piece 2 ... Electrode 3 ... Airtight terminal 4 ... Lead terminal 5 ... Inner lead 6 ... Solder 7 ... Case
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) H03H 3/02 - 3/04 H03H 9/00 - 9/13 H03H 9/15 - 9/215 H03H 9/54 - 9/60 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 6 , DB name) H03H 3/02-3/04 H03H 9/00-9/13 H03H 9/15-9/215 H03H 9 / 54-9/60
Claims (2)
軸とし光軸をＺ軸とし、Ｘ軸回りに回転されたＹ軸及び
Ｚ軸をそれぞれＹ′軸及びＺ′軸としたとき、矩形状AT
カット振動片のＸ軸方向の寸法を8mm以下としＺ′軸方
向の寸法を3mm以下としＹ′軸方向の寸法を0.5mm以下と
して形成し、 前記矩形状ATカット振動片の主面上に電極を形成する前
後の周波数変化量を△ｆ（単位をppmとする。）とし３
次オーバートーンの周波数をｆ（単位をMHzとする。）
としたとき、△f/fが370＜△f/f＜670となるように前記
電極を形成したことを特徴とするオーバートーン用矩形
状ATカット水晶振動子の製造方法。An electric axis of a quartz single crystal is an X axis and a mechanical axis is a Y axis.
When the optical axis is the Z axis, the Y axis and the Z axis rotated about the X axis are the Y ′ axis and the Z ′ axis, respectively, a rectangular AT
The cut vibrating piece is formed so that the dimension in the X-axis direction is 8 mm or less, the dimension in the Z'-axis direction is 3 mm or less, and the dimension in the Y'-axis direction is 0.5 mm or less. Electrodes are formed on the main surface of the rectangular AT-cut vibrating piece. Is defined as Δf (unit is ppm) before and after the formation of
The frequency of the next overtone is f (the unit is MHz).
Wherein the electrode is formed such that Δf / f satisfies 370 <Δf / f <670.
寸法を幅ｗとしＹ′軸方向の寸法を厚みｔとしたとき、
幅ｗと厚みｔとの辺比w/tを、 w/t＝8.4±0.2、 w/t＝10.64±0.2、 w/t＝11.85±0.15、 w/t＝13.45±0.15、 w/t＝14.8±0.2、 w/t＝17.6±0.2、 w/t＝19.8±0.2又は w/t＝20.9±0.2 としたことを特徴とする請求項１記載のオーバートーン
用矩形状ATカット水晶振動子の製造方法。2. When the dimension of the rectangular AT-cut vibrating piece in the Z 'axis direction is width w and the dimension in the Y' axis direction is thickness t,
The side ratio w / t between the width w and the thickness t is defined as w / t = 8.4 ± 0.2, w / t = 10.64 ± 0.2, w / t = 11.85 ± 0.15, w / t = 13.45 ± 0.15, w / t = The rectangular AT-cut quartz resonator for overtone according to claim 1, wherein 14.8 ± 0.2, w / t = 17.6 ± 0.2, w / t = 19.8 ± 0.2 or w / t = 20.9 ± 0.2. Production method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63088478A JP2884569B2 (en) | 1988-04-11 | 1988-04-11 | Method of manufacturing rectangular AT-cut quartz resonator for overtone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63088478A JP2884569B2 (en) | 1988-04-11 | 1988-04-11 | Method of manufacturing rectangular AT-cut quartz resonator for overtone |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02198213A JPH02198213A (en) | 1990-08-06 |
| JP2884569B2 true JP2884569B2 (en) | 1999-04-19 |
Family
ID=13943894
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63088478A Expired - Lifetime JP2884569B2 (en) | 1988-04-11 | 1988-04-11 | Method of manufacturing rectangular AT-cut quartz resonator for overtone |
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| Country | Link |
|---|---|
| JP (1) | JP2884569B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6469423B2 (en) | 1993-10-18 | 2002-10-22 | Seiko Epson Corporation | Rectangular at-cut quartz element, quartz resonator, quartz resonator unit and quartz oscillator, and method of producing quartz element |
| WO1995011548A1 (en) * | 1993-10-18 | 1995-04-27 | Seiko Epson Corporation | Rectangular at-cut quartz crystal plate, quartz crystal unit, and quartz oscillator and manufacture of quartz crystal plate |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2424636A1 (en) * | 1978-04-28 | 1979-11-23 | Ebauches Sa | Rectangular piezoelectric resonator - has AT cut form with thickness dependent on required frequency |
| JPS5599814A (en) * | 1979-01-25 | 1980-07-30 | Miyota Seimitsu Kk | Manufacture for at cut crystal oscillation chip |
| JPS6238016A (en) * | 1985-08-12 | 1987-02-19 | Miyota Seimitsu Kk | Rectangular at-cut crystal reonator |
| JPS6238017A (en) * | 1985-08-12 | 1987-02-19 | Miyota Seimitsu Kk | Rectangular at-cut crystal resonator |
| JPS62183208A (en) * | 1986-02-06 | 1987-08-11 | Nippon Dempa Kogyo Co Ltd | Crystal resonator for overtone |
| JP2864242B2 (en) * | 1986-07-08 | 1999-03-03 | 日本電波工業株式会社 | Crystal oscillator |
-
1988
- 1988-04-11 JP JP63088478A patent/JP2884569B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02198213A (en) | 1990-08-06 |
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