JP4500729B2 - 表面形状測定装置 - Google Patents

表面形状測定装置 Download PDF

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Publication number
JP4500729B2
JP4500729B2 JP2005137970A JP2005137970A JP4500729B2 JP 4500729 B2 JP4500729 B2 JP 4500729B2 JP 2005137970 A JP2005137970 A JP 2005137970A JP 2005137970 A JP2005137970 A JP 2005137970A JP 4500729 B2 JP4500729 B2 JP 4500729B2
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Japan
Prior art keywords
sphere
optical
measured
position mark
light
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Expired - Fee Related
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JP2005137970A
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Japanese (ja)
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JP2006317200A5 (enExample
JP2006317200A (ja
Inventor
真人 根岸
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Canon Inc
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Canon Inc
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Priority to JP2005137970A priority Critical patent/JP4500729B2/ja
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  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2005137970A 2005-05-11 2005-05-11 表面形状測定装置 Expired - Fee Related JP4500729B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005137970A JP4500729B2 (ja) 2005-05-11 2005-05-11 表面形状測定装置

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Application Number Priority Date Filing Date Title
JP2005137970A JP4500729B2 (ja) 2005-05-11 2005-05-11 表面形状測定装置

Publications (3)

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JP2006317200A JP2006317200A (ja) 2006-11-24
JP2006317200A5 JP2006317200A5 (enExample) 2008-06-26
JP4500729B2 true JP4500729B2 (ja) 2010-07-14

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JP2005137970A Expired - Fee Related JP4500729B2 (ja) 2005-05-11 2005-05-11 表面形状測定装置

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104677271A (zh) * 2013-11-29 2015-06-03 上海微电子装备有限公司 一种零位传感器调节装置及方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5168985B2 (ja) * 2007-03-30 2013-03-27 株式会社東京精密 測定ヘッド調整装置
JP5424832B2 (ja) * 2009-11-20 2014-02-26 オリンパス株式会社 スタイラス及び接触式変位センサ
CN102455169B (zh) * 2010-11-03 2014-02-19 上海微电子装备有限公司 零位传感器
JP2012192775A (ja) * 2011-03-15 2012-10-11 Denso Corp 物体検出装置
CN103913601B (zh) * 2014-03-25 2017-02-08 西安交通大学 一种水凝胶微孔阵列形貌表征的方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63127103A (ja) * 1986-11-17 1988-05-31 Nissan Motor Co Ltd 位置測定装置
DE4327250C5 (de) * 1992-09-25 2008-11-20 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zur Koordinatenmessung an Werkstücken
JP3401979B2 (ja) * 1995-03-17 2003-04-28 日産自動車株式会社 三角測量式測距装置及び障害物検知装置
JPH09170918A (ja) * 1995-12-20 1997-06-30 Ricoh Co Ltd 形状測定装置
JP2001099641A (ja) * 1999-09-30 2001-04-13 Pentel Corp 表面形状測定方法
JP4434431B2 (ja) * 2000-05-15 2010-03-17 キヤノン株式会社 三次元形状測定装置
JP4047096B2 (ja) * 2002-08-09 2008-02-13 キヤノン株式会社 表面形状測定装置および方法
JP2005077295A (ja) * 2003-09-02 2005-03-24 Canon Inc 光学式３次元位置測定装置および位置測定方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104677271A (zh) * 2013-11-29 2015-06-03 上海微电子装备有限公司 一种零位传感器调节装置及方法
CN104677271B (zh) * 2013-11-29 2017-12-29 上海微电子装备（集团）股份有限公司 一种零位传感器调节装置及方法

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Publication number Publication date
JP2006317200A (ja) 2006-11-24

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