JP4481418B2 - Electric deionized water production equipment - Google Patents

Electric deionized water production equipment Download PDF

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Publication number
JP4481418B2
JP4481418B2 JP2000082074A JP2000082074A JP4481418B2 JP 4481418 B2 JP4481418 B2 JP 4481418B2 JP 2000082074 A JP2000082074 A JP 2000082074A JP 2000082074 A JP2000082074 A JP 2000082074A JP 4481418 B2 JP4481418 B2 JP 4481418B2
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chamber
exchange membrane
water
desalting
cathode
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JP2001259646A (en
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真生 日高
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Organo Corp
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Organo Corp
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A20/00Water conservation; Efficient water supply; Efficient water use
    • Y02A20/124Water desalination

Description

【0001】
【発明の属する技術分野】
本発明は、半導体製造分野、医薬製造分野、原子力や火力などの発電分野、食品工業などの各種の産業又は研究所施設において使用される省電力型電気式脱イオン水製造装置及び脱イオン水の製造方法に関するものである。
【0002】
【従来の技術】
脱イオン水を製造する方法として、従来からイオン交換樹脂に被処理水を通して脱イオンを行う方法が知られているが、この方法ではイオン交換樹脂がイオンで飽和されたときに薬剤によって再生を行う必要があり、このような処理操作上の不利な点を解消するため、近年、薬剤による再生が全く不要な電気式脱イオン法による脱イオン水製造方法が確立され、実用化に至っている。
【0003】
図2は、その従来の典型的な電気式脱イオン水製造装置の模式断面図を示す。図2に示すように、カチオン交換膜101及びアニオン交換膜102を離間して交互に配置し、カチオン交換膜101とアニオン交換膜102で形成される空間内に一つおきにイオン交換体103を充填して脱塩室とする。脱塩室の被処理水流入側(前段)にはアニオン交換樹脂103aが充填され、脱塩室の被処理水流出側(後段)にはカチオン交換樹脂とアニオン交換樹脂の混合イオン交換樹脂103bが充填されている。また、脱塩室104のそれぞれ隣に位置するアニオン交換膜102とカチオン交換膜101で形成されるイオン交換体103を充填していない部分は濃縮水を流すための濃縮室105とする。
【0004】
また、カチオン交換膜101とアニオン交換膜102と、その内部に充填するイオン交換体103とで脱イオンモジュールを形成する。すなわち、図では省略する内部がくり抜かれた枠体の一方の側にカチオン交換膜を封着し、枠体のくり抜かれた部分の上方部(前段)にアニオン交換樹脂を、下方部(後段)に混合イオン交換樹脂をそれぞれ充填し、次いで、枠体の他方の部分にアニオン交換膜を封着する。なお、イオン交換膜は比較的柔らかいものであり、枠体内部にイオン交換体を充填してその両面をイオン交換膜で封着した時、イオン交換膜が湾曲してイオン交換体の充填層が不均一となるのを防止するため、枠体の空間部に複数のリブを縦設するのが一般的である。
【0005】
このような脱イオンモジュールの複数個をその間に図では省略するスペーサーを挟んで、並設した状態が図2に示されたものであり、並設した脱イオンモジュールの一側に陰極109を配設すると共に、他端側に陽極110を配設する。なお、前述したスペーサーを挟んだ位置が濃縮室105であり、また両端の濃縮室105の両外側に必要に応じカチオン交換膜101、アニオン交換膜102、あるいはイオン交換性のない単なる隔膜等の仕切り膜を配設し、仕切り膜で仕切られた両電極109、110が接触する部分をそれぞれ陰極室112及び陽極室113とする。このように、従来の電気式脱イオン水製造装置においては、濃縮室の数は脱塩室の数より1つ多い形態のものであるか、あるいは両端の濃縮室を仕切り膜無しで電極室とした場合1つ少ないものであった。
【0006】
このような電気式脱イオン水製造装置によって脱イオン水を製造する場合を図2を参照して説明する。すなわち、陰極109と陽極110間に直流電流を通じ、また、被処理水流入ライン111から被処理水が流入すると共に、濃縮水流入ライン115から濃縮水が流入し、且つ電極水流入ライン117、117からそれぞれ電極水が流入する。被処理水流入ライン111から流入した被処理水は脱塩室104を流下し、先ず、前段のアニオン交換樹脂103a、次いで混合イオン交換樹脂103bを通過する際、塩酸イオンや硫酸イオン、MgとCaなどのカチオン成分などが除去される。濃縮水流入ライン115から流入した濃縮水は各濃縮室105を上昇し、カチオン交換膜101及びアニオン交換膜102を介して移動してくる不純物イオンを受け取り、不純物イオンを濃縮した濃縮水として濃縮水流出ライン116から流出され、さらに電極水流入ライン117、117から流入した電極水は電極水流出ライン118、118から流出される。従って、脱イオン水流出ライン114から脱塩水が得られる。
【0007】
一方、このような電気式脱イオン水製造装置を使用して被処理水中の不純物イオンを省電力で除去するために、電気式脱イオン水製造装置の電気抵抗を低減する種々の試みがなされている。この場合、脱塩室においては、脱塩室に使用されるイオン交換体の充填方法や充填量が要求される処理水の水質によって決定されるため、脱塩室の電気抵抗を低減させるには限界がある。そこで、濃縮水の循環によって導電率の上昇を促進し、濃縮室の電気抵抗を低減する方法が採られることが多い。この方法は濃縮室の電気抵抗を低減するという点では極めて効果的である。
【0008】
しかし、例えば、被処理水である逆浸透膜透過水の一部を濃縮水として使用する場合、濃縮水中に当初は微量に存在するCa、Mgなどの硬度成分が、長期間の循環使用により濃縮されて濃縮室にスケールとして析出しやすくなる。スケールが発生すると、その部分での電気抵抗が上昇し、電流が流れにくくなる。すなわち、スケール発生が無い場合と同一の電流値を流すためには電圧を上昇させる必要があり、消費電力が増加する。また、スケールの付着場所次第では濃縮室内で電流密度が異なり、脱塩室内において電流の不均一化が生じる。また、スケール付着量が更に増加すると通水差圧が生じると共に、電圧が更に上昇し、装置の最大電圧値を越えた場合は電流値が低下することとなる。この場合、イオン除去に必要な電流値が流せなくなり、処理水質の低下を招く。この問題を回避するには、濃縮水として何の対策をすることなく、不純物の少ない比較的きれいな水を使用することも考えられる。
【0009】
【発明の解決しようとする課題】
しかしながら、濃縮室を流れる電流は水の導電性を介しており、濃縮水として比較的きれいな水を使用すると、導電性はほとんどなく、やはり高い電気抵抗となる。また、このように濃縮室での電気抵抗は水の導電性のみで決定されるため濃縮室入口側と濃縮室出口側では電流密度が異なり、ある部分では電流が流れ、ある部分では電流が流れにくいという電流の不均一化あるいは偏りが生じてしまう。この場合、電流が流れにくい箇所が被処理水の下流側、すなわち処理水側にあると処理水の水質低下を招くという致命的な問題もある。
【0010】
従って、本発明の目的は、電気式脱イオン水製造装置の構造面からの抜本的な改善に加えて、電極室や濃縮室の電気抵抗を低減し、従来のものに比べて消費電力が格段に少ない電気式脱イオン水製造装置及びこれを用いる脱イオン水の製造方法を提供することにある。
【0011】
【課題を解決するための手段】
かかる実情において、本発明者らは鋭意検討を行った結果、(1)一側のカチオン交換膜、他側のアニオン交換膜及び当該両膜の間に位置する中間イオン交換膜で区画される2つの小脱塩室にイオン交換体を充填して脱塩室を構成し、前記カチオン交換膜、アニオン交換膜を介して脱塩室の両側に濃縮室を設け、これらの脱塩室及び濃縮室を陽極を備えた陽極室と陰極を備えた陰極室の間に配置する構造の電気式脱イオン水製造装置を使用すれば、2つの小脱塩室のうち、少なくとも1つの脱塩室に充填されるイオン交換体を例えばアニオン交換体のみ、又はカチオン交換体のみ等の単一イオン交換体もしくはアニオン交換体とカチオン交換体の混合交換体とすることができ、イオン交換体の種類毎に電気抵抗を低減し、且つ高い性能を得るための最適な厚さに設定することができること、(2)上記構造の電極室又は濃縮室にイオン交換体を均一に充填し、当該室を形成する両側のイオン交換膜を電気的に導通させれば、当該室の導電性が高まり、脱塩室の入口側から出口側の全体に渡り電流密度を均一化でき、従来のものに比べて消費電力を格段に低減できること、などを見出し、本発明を完成するに至った。
【0012】
すなわち、請求項1の発明(1)は、一側のカチオン交換膜、他側のアニオン交換膜及び当該カチオン交換膜と当該アニオン交換膜の間に位置する単一膜又は複式膜である中間イオン交換膜で区画される2つの小脱塩室にイオン交換体を充填して脱塩室を構成し、前記カチオン交換膜、アニオン交換膜を介して脱塩室の両側に濃縮室を設け、これらの脱塩室及び濃縮室を陽極を備えた陽極室と陰極を備えた陰極室の間に配置し、且つ前記濃縮室、陰極室及び陽極室のうち、少なくとも一つにイオン交換体を充填して形成されることを特徴とする電気式脱イオン水製造装置を提供するものである。かかる構成を採ることにより、2つの小脱塩室のうち、少なくとも1つの脱塩室に充填されるイオン交換体を例えばアニオン交換体のみ、又はカチオン交換体のみ等の単一イオン交換体もしくはアニオン交換体とカチオン交換体の混合交換体とすることができ、イオン交換体の種類毎に電気抵抗を低減し、且つ高性能を得るための最適な厚さに設定することができる。また、濃縮室や電極室はより導電性が高まり、脱塩室の入口側から出口側の全体に渡り電流密度を均一化でき、消費電力を更に低減できる。この濃縮室などへのイオン交換体の充填は、ひとつの脱塩室が2つの小脱塩室からなる該電気式脱イオン水製造装置においては特に有効である。すなわち、該装置においては2つの小脱塩室、濃縮室などで水の流れがそれぞれに存在し、電流の流れやすい箇所、流れ難い箇所もそれぞれに存在するので電流の偏りが生じ易く、処理水の水質を低下させる場合もあるが、濃縮室などへのイオン交換体の均一充填によりこれらの問題が解決できる。
【0013】
請求項2の発明(2)は、一側のカチオン交換膜、他側のアニオン交換膜及び当該カチオン交換膜と当該アニオン交換膜の間に位置する中間イオン交換膜で区画される2つの小脱塩室にイオン交換体を充填して脱塩室を構成し、前記カチオン交換膜、アニオン交換膜を介して脱塩室の両側に濃縮室を設け、これらの脱塩室及び濃縮室を陽極を備えた陽極室と陰極を備えた陰極室の間に配置し、且つ前記濃縮室、陰極室及び陽極室のうち、少なくとも一つにイオン交換体を充填して形成されるものであり、前記中間イオン交換膜と前記他側のアニオン交換膜で区画される一方の小脱塩室に充填されるイオン交換体は、アニオン交換体であり、前記一側のカチオン交換膜と前記中間イオン交換膜で区画される他方の小脱塩室に充填されるイオン交換体は、カチオン交換体とアニオン交換体の混合体であることを特徴とする気式脱イオン水製造装置を提供するものである。かかる構成を採ることにより、前記発明と同様の効果を奏するほか、アニオン成分を多く含む被処理水、特にシリカ、炭酸等の弱酸性成分を多く含む被処理水を十分に処理することが可能となる。
【0014】
請求項3の発明(3)は、前記濃縮室、陰極室及び陽極室のうち、少なくとも一つに充填されるイオン交換体が、カチオン交換体であることを特徴とする前記(1)又は(2)記載の電気式脱イオン水製造装置を提供するものである。かかる構成を採ることにより、前記発明と同様の効果を奏するほか、アニオン成分を多く含む被処理水、特にシリカを多く含む被処理水を濃縮水として使用してもイオン交換が起こらず、吸着形態がシリカ型を採ることによる通水抵抗の上昇を回避できる。
【0015】
請求項4の発明(4)は、一側のカチオン交換膜、他側のアニオン交換膜及び当該カチオン交換膜と当該アニオン交換膜の間に位置する単一膜又は複式膜である中間イオン交換膜で区画される2つの小脱塩室にイオン交換体を充填して脱塩室を構成し、前記カチオン交換膜、アニオン交換膜を介して脱塩室の両側に濃縮室を設け、これらの脱塩室及び濃縮室を陽極を備えた陽極室と陰極を備えた陰極室の間に配置し、且つ前記濃縮室、陰極室及び陽極室のうち、少なくとも一つにイオン交換体を充填し、電圧を印加しながら一方の小脱塩室に被処理水を流入し、次いで、該小脱塩室の流出水を他方の小脱塩室に流入すると共に、濃縮室に濃縮水を流入して被処理水中の不純物イオンを除去し、脱イオン水を得ることを特徴とする脱イオン水の製造方法を提供するものである。かかる構成を採ることにより、前記(1)と同様の効果を奏する。
【0016】
【発明の実施の形態】
本発明の実施の形態における電気式脱イオン水製造装置について図1を参照して説明する。図1は電気式脱イオン水製造装置の1例を示す模式図である。図1に示すように、カチオン交換膜3、中間イオン交換膜5及びアニオン交換膜4を離間して交互に配置し、カチオン交換膜3と中間イオン交換膜5で形成される空間内にイオン交換体8を充填して第1小脱塩室d1 、d3 、d5 、d7 を形成し、中間イオン交換膜5とアニオン交換膜4で形成される空間内にイオン交換体8を充填して第2小脱塩室d2 、d4 、d6 、d8 を形成し、第1小脱塩室d1 と第2小脱塩室d2 で脱塩室D1 、第1小脱塩室d3 と第2小脱塩室d4 で脱塩室D2 、第1小脱塩室d5 と第2小脱塩室d6 で脱塩室D3 、第1小脱塩室d7 と第2小脱塩室d8 で脱塩室D4 とする。また、脱塩室D2 、D3 のそれぞれ隣に位置するアニオン交換膜4とカチオン交換膜3で形成されるイオン交換体8aを充填した部分は濃縮水を流すための濃縮室1とする。これを順次併設して図中、左より脱塩室D1 ,濃縮室1、脱塩室D2 ,濃縮室1、脱塩室D3 、濃縮室1、脱塩室D4 を形成する。また、脱塩室D1 の左にカチオン交換膜3を経て陰極室2aを、脱塩室D4 の右にアニオン交換膜4を経て陽極室2bをそれぞれ設け、陰極室2a及び陽極室2bにもイオン交換体8aをそれぞれ充填する。また、中間イオン交換膜5を介して隣合う2つの小脱塩室において、第2小脱塩室の処理水流出ライン12は第1小脱塩室の被処理水流入ライン13に連接されている。
【0017】
このような脱塩室は2つの内部がくり抜かれた枠体と3つのイオン交換膜によって形成される脱イオンモジュールからなる。すなわち、図では省略する第1枠体の一側にカチオン交換膜を封着し、第1枠体のくり抜かれた部分にイオン交換体を充填し、次いで、第1枠体の他方の部分に中間イオン交換膜を封着して第1小脱塩室を形成する。次に中間イオン交換膜を挟み込むように第2枠体を封着し、第2枠体のくり抜かれた部分にイオン交換体を充填し、次いで、第2枠体の他方の部分にアニオン交換膜を封着して第2小脱塩室を形成する。
【0018】
前記電気式脱イオン水製造装置は、通常、以下のように運転される。すなわち、陰極6と陽極7間に直流電流を通じ、また被処理水流入ライン11から被処理水が流入すると共に、濃縮水流入ライン15から濃縮水が流入し、かつ陰極水流入ライン17a、陽極水流入ライン17bからそれぞれ陰極水、陽極水が流入する。被処理水流入ライン11から流入した被処理水は第2小脱塩室d2 、d4 、d6 、d8 を流下し、イオン交換体8の充填層を通過する際に不純物イオンが除去される。更に、第2小脱塩室の処理水流出ライン12を通った流出水は、第1小脱塩室の被処理水流入ライン13を通って第1小脱塩室d1 、d3 、d5 、d7 を流下し、ここでもイオン交換体8の充填層を通過する際に不純物イオンが除去され脱イオン水が脱イオン水流出ライン14から得られる。また、濃縮水流入ライン15から流入した濃縮水は各濃縮室1を上昇し、カチオン交換膜3及びアニオン交換膜4を介して移動してくる不純物イオンを受け取り、不純物イオンを濃縮した濃縮水として濃縮室流出ライン16から流出され、さらに陰極水流入ライン17aから流入した陰極水は陰極水流出ライン18aから流出され、陽極水流入ライン17bから流入した陽極水は、陽極水流出ライン18bから流出される。上述の操作によって、被処理水中の不純物イオンは電気的に除去される。また、濃縮室1や電極室2a、2bはイオン交換体8aの均一充填により両側に位置するカチオン交換膜3とアニオン交換膜4を電気的に導通するため、導電性が高まり、脱塩室の入口側から出口側の全体に渡り電流密度を均一化でき、消費電力を更に低減できる。
【0019】
被処理水の第1小脱塩室及び第2小脱塩室での流れ方向は、特に制限されず、上記実施の形態の他、第1小脱塩室と第2小脱塩室での流れ方向が異なっていてもよい。また、被処理水が流入する小脱塩室は、上記実施の形態例の他、先ず、被処理水を第1小脱塩室に流入させ、流下した後、第1小脱塩室の流出水を第2小脱塩室に流入させてもよい。また、濃縮水の流れ方向も適宜決定される。
【0020】
本実施の形態例における電気式脱イオン水製造装置は、濃縮室1、陰極室2a、陽極室2bのうち、少なくとも一つ以上にイオン交換体を充填するが、少なくとも濃縮室1には充填することが好ましく、特に濃縮室1、陰極室2a及び陽極室2bの全てに充填することが、電気式脱イオン水製造装置の電気抵抗を低減する点から好ましい。
【0021】
濃縮室、陰極室及び陽極室に充填するイオン交換体としては、特に制限されず、イオン交換樹脂、イオン交換繊維などイオン交換基を有するものであればよい。すなわち、イオン交換体はカチオン交換体又はアニオン交換体を単独で使用しても、アニオン交換体とカチオン交換体の混合イオン交換体として使用してもよい。また、アニオン成分を多く含む被処理水、特にシリカを多く含む被処理水を濃縮水や電極水として使用する場合、カチオン交換体を使用することが、イオン交換が起こらず、吸着形態がシリカ型を採ることによる通水抵抗の上昇を回避できる点で好適である。カチオン交換体としては、IR116 、IR118 、IR120B、IR122 、IR124(いずれも、ロームアンドハース社製アンバーライトである) が挙げられ、このうち、IR124 が好ましい。濃縮室、陰極室及び陽極室に充填するイオン交換体は、脱塩室に充填するイオン交換体と同じであっても、異なっていてもよい。また、該イオン交換体はイオン交換基を有しているものであれば、再生品や使用済のものであってもよい。また、イオン交換体に導電性物質を添加することにより、さらに濃縮室や電極室の導電性を高めることができる。添加する導電性物質の形状としては、特に制限されず、繊維でも粒状のものでもよい。導電性繊維としては、例えば、炭素繊維あるいはナイロン系、アクリル系、ポリエステル系などの合成繊維を単独で又は練り込んで複合繊維として、表面をカーボンブラックでコーティングしたものが挙げられる。また、粒状の導電性物質としては、小粒の黒鉛、小粒の活性炭などが挙げられる。
【0022】
濃縮室、陰極室又は陽極室へのイオン交換体の充填量としては、特に制限されないが、各室に適度な密度で且つ均一に充填できる量が好ましい。充填密度が低すぎると、当該室を区画する両側のイオン交換膜同士の電気的導通が得られず、導電性を高めることができず、充填が不均一であると電流の偏りが発生する。一方、充填密度が高すぎると、濃縮水の通水差圧が許容以上に上昇する。
【0023】
本発明の脱イオン水製造方法に用いる被処理水としては、特に制限されず、例えば井水、水道水、下水、工業用水、河川水、半導体製造工場の半導体デバイスなどの洗浄排水又は濃縮室からの回収水などを逆浸透膜処理した透過水が挙げられる。このように前処理として逆浸透膜処理を行い、透過水の一部を濃縮水としても使用する場合、脱塩室に供給される被処理水及び濃縮室に供給される濃縮水を軟化後、使用することがスケール発生を抑制できる点で好ましい。軟化の方法は、特に限定されないが、ナトリウム形のイオン交換樹脂等を用いた軟化器が好適である。
【0024】
本発明で使用する電気式脱イオン水製造装置において、中間イオン交換膜としては、カチオン交換膜又はアニオン交換膜の単一膜、あるいはアニオン交換膜、カチオン交換膜の両方を配置した複式膜のいずれであってもよい。装置上部又は装置下部にアニオン交換膜、カチオン交換膜の両方を配置した複式膜とする場合、アニオン交換膜及びカチオン交換膜のそれぞれの高さ(面積)は被処理水の水質又は処理目的などによって適宜決定される。また、単一膜を使用する場合、被処理水中から除去したいイオン種に応じてイオン膜が決定される。
【0025】
脱塩室に充填されるイオン交換体は、特に制限されず、アニオン交換体単床、カチオン交換体単床及びアニオン交換体とカチオン交換体の混床又はこれらの組み合わせのものが挙げられる。また、イオン交換体としては、イオン交換樹脂、イオン交換繊維などイオン交換機能を有する物質であればいずれでもよく、また、それらを組み合わせたものであってもよい。また、濃縮室に充填されるイオン交換体と同様、該イオン交換体に導電性物質を添加してもよい。これら導電性物質は前述のものと同様のものが使用できる。
【0026】
【実施例】
実施例1
下記装置仕様及び運転条件において、図1と同様の構成で3個の脱イオンモジュール(6個の小脱塩室)を並設して構成される電気式脱イオン水製造装置を使用した。被処理水は、工業用水の逆浸透膜透過水を用い、その導電率は、3.0μS/cmであった。また、被処理水の一部を濃縮水及び電極水として使用した。運転時間は5000時間であった。5000時間後の濃縮室の通水差圧も同様に計測した。また、同時間における抵抗率17.9MΩ-cm の処理水を得るための運転条件を表1に示す。
【0027】
(運転の条件)
・電気式脱イオン水製造装置;試作EDI
・第1小脱塩室;幅300mm、高さ600mm、厚さ3mm
・第1小脱塩室に充填したイオン交換樹脂;アニオン交換樹脂(A)とカチオン交換樹脂(K)の混合イオン交換樹脂(混合比は体積比でA:K=1:1)
・第2小脱塩室;幅300mm、高さ600mm、厚さ8mm
・第2小脱塩室充填イオン交換樹脂;アニオン交換樹脂
・濃縮室;幅300mm、高さ600mm、厚さ2mm
・濃縮室充填イオン交換樹脂;カチオン交換樹脂(IR124 )
・電極室;イオン交換樹脂を充填せず
・装置全体の流量;1m3 /h
【0028】
比較例1
下記装置仕様及び運転条件において、図2と同様の構成で、6個の脱イオンモジュールを並設して構成される電気式脱イオン水製造装置を使用した。但し、濃縮水及び電極水は被処理水の一部を分岐して使用し、濃縮水は逆浸透膜装置の被処理水側に返送した。また、被処理水は、実施例1と同様のものを使用した。運転時間は5000時間であった。5000時間後の濃縮室の通水差圧も同様に計測した。また、同時間における抵抗率17.9MΩ-cm の処理水を得るための運転条件を表1に示す。
【0029】
(運転の条件)
・電気式脱イオン水製造装置;EDI(オルガノ社製)
・脱塩室;幅300mm、高さ600mm、厚さ8mm
・脱塩室の下流側に充填したイオン交換樹脂;アニオン交換樹脂(A)とカチオン交換樹脂(K)の混合物(混合比は体積比でA:K=1:1)
・濃縮室及び電極室;イオン交換樹脂を充填せず
・装置全体の流量;1m3 /h
【0030】
【表1】

Figure 0004481418
【0031】
【発明の効果】
本発明によれば、濃縮室や電極室はより導電性が高まり、脱塩室の入口側から出口側の全体に渡り電流密度を均一化でき、消費電力を更に低減できる。この濃縮室などへのイオン交換体の充填は、ひとつの脱塩室が2つの小脱塩室からなる当該電気式脱イオン水製造装置においては特に有効である。すなわち、当該装置においては2つの小脱塩室、濃縮室などで水の流れがそれぞれに存在し、電流の流れやすい箇所、流れ難い箇所もそれぞれに存在するので電流の偏りが生じる恐れがあり、処理水の水質を低下させる場合もあり得るが、濃縮室などへのイオン交換体の均一充填によりこれらの問題を未然に解決できる。
【図面の簡単な説明】
【図1】本発明の実施の形態における電気式脱イオン水製造装置を示す模式図である。
【図2】従来の電気式脱イオン水製造装置の模式図である。
【符号の説明】
D、D1 〜D4 、104 脱塩室
1 、d3 、d5 、d7 第1小脱塩室
2 、d4 、d6 、d8 第2小脱塩室
1、105 濃縮室
2、112、113 電極室
3、101 カチオン膜
4、102 アニオン膜
5 中間イオン交換膜
6、109 陰極
7、110 陽極
8、8a、103 イオン交換体
10、100 電気式脱イオン水製造装置
11、111 被処理水流入ライン
12 第2小脱塩室の処理水流出ライン
13 第1小脱塩室の被処理水流入ライン
14、114 脱イオン水流出ライン
15、115 濃縮水流入ライン
16、116 濃縮水流出ライン
17a、17b、117 電極水流入ライン
18a、18b、118 電極水流出ライン[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a power-saving electric deionized water production apparatus and deionized water used in various industries such as semiconductor manufacturing field, pharmaceutical manufacturing field, power generation field such as nuclear power and thermal power, food industry, etc. It relates to a manufacturing method.
[0002]
[Prior art]
As a method for producing deionized water, there is conventionally known a method in which deionized water is passed through an ion exchange resin to be treated. In this method, regeneration is performed with a drug when the ion exchange resin is saturated with ions. In order to eliminate such disadvantages in processing operations, recently, a method for producing deionized water by an electric deionization method which does not require any regeneration by a chemical agent has been established and has been put into practical use.
[0003]
FIG. 2 is a schematic sectional view of the conventional typical electric deionized water production apparatus. As shown in FIG. 2, the cation exchange membrane 101 and the anion exchange membrane 102 are alternately arranged apart from each other, and every other ion exchanger 103 is placed in the space formed by the cation exchange membrane 101 and the anion exchange membrane 102. Fill with desalination chamber. The treated water inflow side (front stage) of the desalting chamber is filled with anion exchange resin 103a, and the treated water outflow side (rear stage) of the desalting chamber is filled with a mixed ion exchange resin 103b of a cation exchange resin and an anion exchange resin. Filled. Further, a portion not filled with the ion exchanger 103 formed by the anion exchange membrane 102 and the cation exchange membrane 101 located adjacent to each of the desalting chambers 104 is a concentration chamber 105 for flowing concentrated water.
[0004]
Further, a deionization module is formed by the cation exchange membrane 101, the anion exchange membrane 102, and the ion exchanger 103 filled therein. That is, a cation exchange membrane is sealed on one side of a frame body whose interior is omitted in the figure, an anion exchange resin is placed on the upper part (front stage) of the hollowed part of the frame body, and the lower part (rear stage). Each is mixed with a mixed ion exchange resin, and then an anion exchange membrane is sealed to the other part of the frame. The ion exchange membrane is relatively soft, and when the ion exchanger is filled inside the frame and sealed on both sides with the ion exchange membrane, the ion exchange membrane is curved and the packed layer of the ion exchanger becomes In order to prevent non-uniformity, a plurality of ribs are generally provided vertically in the space of the frame.
[0005]
FIG. 2 shows a state in which a plurality of such deionization modules are sandwiched between them with a spacer not shown in the figure interposed therebetween. A cathode 109 is arranged on one side of the deionization modules arranged side by side. And an anode 110 is disposed on the other end side. In addition, the position where the above-mentioned spacer is sandwiched is the concentrating chamber 105, and on both outer sides of the concentrating chamber 105 at both ends, if necessary, a partition such as a cation exchange membrane 101, an anion exchange membrane 102, or a simple membrane having no ion exchange properties. The portions where the membranes are arranged and the electrodes 109 and 110 that are partitioned by the partition membrane are in contact with each other are referred to as a cathode chamber 112 and an anode chamber 113, respectively. Thus, in the conventional electric deionized water production apparatus, the number of concentration chambers is one more than the number of demineralization chambers, or the concentration chambers at both ends are separated from the electrode chamber without a partition membrane. In that case, it was one less.
[0006]
The case where deionized water is manufactured by such an electric deionized water manufacturing apparatus will be described with reference to FIG. That is, a direct current is passed between the cathode 109 and the anode 110, water to be treated flows from the water to be treated inflow line 111, concentrated water from the concentrated water inflow line 115, and electrode water inflow lines 117 and 117. Electrode water flows from each. To-be-treated water flowing from the to-be-treated water inflow line 111 flows down the desalting chamber 104, and first passes through the anion exchange resin 103a in the previous stage and then the mixed ion exchange resin 103b, and then, hydrochloric acid ions, sulfate ions, Mg and Ca. Cation components such as are removed. Concentrated water flowing in from the concentrated water inflow line 115 rises in each concentration chamber 105, receives impurity ions moving through the cation exchange membrane 101 and the anion exchange membrane 102, and concentrates as concentrated water in which impurity ions are concentrated. The electrode water flowing out from the outflow line 116 and further flowing in from the electrode water inflow lines 117 and 117 flows out from the electrode water outflow lines 118 and 118. Accordingly, demineralized water is obtained from the deionized water outflow line 114.
[0007]
On the other hand, various attempts have been made to reduce the electrical resistance of the electrical deionized water production apparatus in order to remove the impurity ions in the water to be treated with power saving using such an electrical deionized water production apparatus. Yes. In this case, in the desalting chamber, since the filling method of the ion exchanger used in the desalting chamber and the quality of the treated water required are determined, the electric resistance of the desalting chamber can be reduced. There is a limit. Therefore, in many cases, a method is adopted in which the increase in the conductivity is promoted by the circulation of the concentrated water and the electric resistance of the concentration chamber is reduced. This method is extremely effective in reducing the electric resistance of the concentrating chamber.
[0008]
However, for example, when a part of the reverse osmosis membrane permeated water that is the treated water is used as the concentrated water, hardness components such as Ca and Mg that are initially present in a minute amount in the concentrated water are concentrated by long-term circulation use. As a result, it tends to deposit as a scale in the concentration chamber. When the scale occurs, the electrical resistance at that portion increases, and current does not flow easily. That is, in order to pass the same current value as when no scale is generated, it is necessary to increase the voltage, which increases power consumption. In addition, the current density differs in the concentration chamber depending on the place where the scale is attached, and the current becomes non-uniform in the desalting chamber. Further, when the scale adhesion amount further increases, a water flow differential pressure is generated and the voltage further increases. When the maximum voltage value of the apparatus is exceeded, the current value decreases. In this case, the current value necessary for ion removal cannot flow, and the quality of the treated water is deteriorated. To avoid this problem, it is conceivable to use relatively clean water with few impurities without taking any countermeasures as concentrated water.
[0009]
[Problem to be Solved by the Invention]
However, the current flowing through the concentrating chamber is mediated by the conductivity of water, and when relatively clean water is used as the concentrated water, there is almost no conductivity, and the electric resistance is still high. In addition, since the electrical resistance in the concentrating chamber is determined only by the conductivity of water in this way, the current density is different between the concentrating chamber inlet side and the concentrating chamber outlet side, current flows in a certain part, and current flows in a certain part. The current becomes non-uniform or uneven. In this case, there is a fatal problem that the quality of the treated water is deteriorated if the portion where the current is difficult to flow is on the downstream side of the treated water, that is, the treated water side.
[0010]
Accordingly, an object of the present invention is to drastically improve the structure of the electric deionized water production apparatus, reduce the electric resistance of the electrode chamber and the concentration chamber, and consume much more power than the conventional one. An object of the present invention is to provide an electrical deionized water production apparatus and a deionized water production method using the same.
[0011]
[Means for Solving the Problems]
In this situation, the present inventors have conducted intensive studies, and as a result, (1) partitioned by a cation exchange membrane on one side, an anion exchange membrane on the other side, and an intermediate ion exchange membrane located between the two membranes 2 A small desalting chamber is filled with an ion exchanger to form a desalting chamber, and a concentration chamber is provided on both sides of the desalting chamber via the cation exchange membrane and anion exchange membrane. If an electric deionized water production apparatus having a structure in which an anode chamber having an anode and a cathode chamber having a cathode are used is used, at least one of the two small desalting chambers is filled. The ion exchanger can be a single ion exchanger such as only an anion exchanger, or only a cation exchanger, or a mixed exchanger of an anion exchanger and a cation exchanger. Reduce resistance and get high performance (2) The electrode chamber or the concentration chamber having the above structure is uniformly filled with an ion exchanger, and the ion exchange membranes on both sides forming the chamber are electrically connected. In this case, the conductivity of the chamber is increased, the current density can be made uniform from the inlet side to the outlet side of the desalting chamber, and the power consumption can be significantly reduced compared to the conventional one. The invention has been completed.
[0012]
That is, the invention (1) of claim 1 is directed to a cation exchange membrane on one side, an anion exchange membrane on the other side, and an intermediate ion that is a single membrane or a dual membrane located between the cation exchange membrane and the anion exchange membrane. Two small desalting chambers partitioned by an exchange membrane are filled with ion exchangers to form a desalting chamber, and concentration chambers are provided on both sides of the desalting chamber via the cation exchange membrane and anion exchange membrane. The desalting chamber and the concentration chamber are disposed between an anode chamber having an anode and a cathode chamber having a cathode, and at least one of the concentration chamber, the cathode chamber and the anode chamber is filled with an ion exchanger. An electrical deionized water production apparatus is provided. By adopting such a configuration, the ion exchanger filled in at least one of the two small desalting chambers is, for example, only an anion exchanger or a single ion exchanger or anion such as only a cation exchanger. It can be a mixed exchanger of an exchanger and a cation exchanger, and can be set to an optimum thickness for reducing the electric resistance and obtaining high performance for each type of ion exchanger. Further, the conductivity of the concentrating chamber and the electrode chamber is further increased, the current density can be made uniform from the inlet side to the outlet side of the desalting chamber, and the power consumption can be further reduced. The filling of the ion exchanger into the concentrating chamber or the like is particularly effective in the electric deionized water production apparatus in which one desalting chamber is composed of two small desalting chambers. That is, in this apparatus, water flows in two small desalination chambers, concentration chambers, etc., and there are locations where current easily flows and locations where current does not flow easily. However, these problems can be solved by uniform filling of the ion exchanger into the concentration chamber or the like.
[0013]
The invention (2) of claim 2 is characterized in that the cation exchange membrane on one side, the anion exchange membrane on the other side, and two small detachments partitioned by the intermediate ion exchange membrane located between the cation exchange membrane and the anion exchange membrane. A salt chamber is filled with an ion exchanger to form a desalting chamber. Concentration chambers are provided on both sides of the desalting chamber via the cation exchange membrane and anion exchange membrane, and the desalting chamber and the concentration chamber are connected to an anode. The intermediate chamber is disposed between an anode chamber having a cathode and a cathode chamber having a cathode, and at least one of the concentration chamber, the cathode chamber, and the anode chamber is filled with an ion exchanger, and the intermediate chamber The ion exchanger filled in one small desalting chamber partitioned by the ion exchange membrane and the other side anion exchange membrane is an anion exchanger, and the one side cation exchange membrane and the intermediate ion exchange membrane Ion exchange filled in the other small desalination chamber Body, there is provided a electric water producing apparatus which is a mixture of cation exchanger and anion exchanger. By adopting such a configuration, it is possible to sufficiently treat the water to be treated containing a large amount of anionic components, particularly water to be treated containing a large amount of weakly acidic components such as silica and carbonic acid, in addition to the same effects as the above invention. Become.
[0014]
Invention (3) of claim 3 is characterized in that the ion exchanger filled in at least one of the concentration chamber, the cathode chamber, and the anode chamber is a cation exchanger. 2) The electric deionized water production apparatus according to 2) is provided. By adopting such a configuration, in addition to the same effects as the above invention, water to be treated containing a large amount of anionic components, particularly water to be treated containing a large amount of silica, can be used as concentrated water, so that ion exchange does not occur, and the adsorption form Can avoid the increase in water resistance due to the silica type.
[0015]
Invention (4) of claim 4 is a cation exchange membrane on one side, an anion exchange membrane on the other side, and an intermediate ion exchange membrane which is a single membrane or a multiple membrane located between the cation exchange membrane and the anion exchange membrane. The two small desalting chambers are filled with ion exchangers to form a desalting chamber, and concentration chambers are provided on both sides of the desalting chamber via the cation exchange membrane and anion exchange membrane. A salt chamber and a concentration chamber are arranged between an anode chamber having an anode and a cathode chamber having a cathode, and at least one of the concentration chamber, the cathode chamber and the anode chamber is filled with an ion exchanger, The water to be treated flows into one of the small desalting chambers, and then the effluent water from the small desalting chamber flows into the other small desalting chamber and the concentrated water flows into the concentrating chamber. Deionized water characterized by removing deionized water from treated water to obtain deionized water There is provided a production method. By adopting such a configuration, the same effect as the above (1) can be obtained.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
An electric deionized water production apparatus according to an embodiment of the present invention will be described with reference to FIG. FIG. 1 is a schematic view showing an example of an electric deionized water production apparatus. As shown in FIG. 1, the cation exchange membrane 3, the intermediate ion exchange membrane 5 and the anion exchange membrane 4 are alternately arranged apart from each other, and ion exchange is performed in the space formed by the cation exchange membrane 3 and the intermediate ion exchange membrane 5. The body 8 is filled to form the first small desalting chambers d 1 , d 3 , d 5 , d 7 and the space formed by the intermediate ion exchange membrane 5 and the anion exchange membrane 4 is filled with the ion exchanger 8. The second small desalting chambers d 2 , d 4 , d 6 , and d 8 are formed, and the first small desalting chamber d 1 and the second small desalting chamber d 2 form the desalting chamber D 1 and the first small desalting chamber d 2. The desalting chamber D 3 and the second small desalting chamber d 4 are the desalting chamber D 2 , and the first small desalting chamber d 5 and the second small desalting chamber d 6 are the desalting chamber D 3 and the first small desalting chamber. The chamber d 7 and the second small desalting chamber d 8 are referred to as a desalting chamber D 4 . Further, the portion filled with the ion exchanger 8a formed by the anion exchange membrane 4 and the cation exchange membrane 3 located adjacent to the desalting chambers D 2 and D 3 is a concentration chamber 1 for flowing concentrated water. Drawing sequentially features this depletion chamber D 1 from the left, concentrating chamber 1, desalting D 2, concentrating chamber 1, depletion chamber D 3, concentrating chamber 1, to form a depletion chamber D 4. Further, the cathode chamber 2a through the cation exchange membrane 3 to the left of the depletion chamber D 1, the anode chamber 2b respectively provided via the anion exchange membrane 4 to the right of the desalting chamber D 4, to the cathode chamber 2a and the anode chamber 2b Are also filled with the ion exchanger 8a. Further, in two small desalination chambers adjacent via the intermediate ion exchange membrane 5, the treated water outflow line 12 of the second small desalination chamber is connected to the treated water inflow line 13 of the first small desalination chamber. Yes.
[0017]
Such a desalting chamber is composed of a deionization module formed by two framed hollow bodies and three ion exchange membranes. That is, a cation exchange membrane is sealed on one side of the first frame that is not shown in the figure, the hollowed portion of the first frame is filled with the ion exchanger, and then the other portion of the first frame is filled. An intermediate ion exchange membrane is sealed to form a first small desalting chamber. Next, the second frame is sealed so as to sandwich the intermediate ion exchange membrane, and the hollowed portion of the second frame is filled with the ion exchanger, and then the other portion of the second frame is filled with the anion exchange membrane. To form a second small desalting chamber.
[0018]
The electric deionized water production apparatus is usually operated as follows. That is, a direct current is passed between the cathode 6 and the anode 7, and water to be treated flows from the treated water inflow line 11, and concentrated water flows from the concentrated water inflow line 15, and the cathode water inflow line 17 a and the anode water Cathode water and anode water flow in from the inflow line 17b, respectively. To-be-treated water flowing from the to-be-treated water inflow line 11 flows down the second small desalination chambers d 2 , d 4 , d 6 , and d 8 , and impurity ions are removed when passing through the packed bed of the ion exchanger 8. Is done. Furthermore, the effluent that has passed through the treated water outflow line 12 of the second small desalination chamber passes through the treated water inflow line 13 of the first small desalination chamber, and the first small desalination chambers d 1 , d 3 , d. 5 and d 7 flow down, and again, when passing through the packed bed of the ion exchanger 8, impurity ions are removed and deionized water is obtained from the deionized water outflow line 14. Further, the concentrated water flowing in from the concentrated water inflow line 15 rises in each concentration chamber 1, receives impurity ions moving through the cation exchange membrane 3 and the anion exchange membrane 4, and concentrates the impurity ions as concentrated water. Cathode water flowing out from the concentrating chamber outflow line 16 and further flowing in from the cathode water inflow line 17a flows out from the cathode water outflow line 18a, and anode water flowing in from the anode water inflow line 17b flows out from the anode water outflow line 18b. The By the above operation, impurity ions in the water to be treated are electrically removed. Further, since the concentration chamber 1 and the electrode chambers 2a and 2b are electrically connected to the cation exchange membrane 3 and the anion exchange membrane 4 located on both sides by uniform filling of the ion exchanger 8a, the conductivity increases, The current density can be made uniform from the inlet side to the entire outlet side, and the power consumption can be further reduced.
[0019]
The flow direction in the first small desalination chamber and the second small desalination chamber of the water to be treated is not particularly limited, and in addition to the above embodiment, in the first small desalination chamber and the second small desalination chamber. The flow direction may be different. In addition to the above embodiment, the small desalination chamber into which the water to be treated flows first flows the water to be treated into the first small desalination chamber and then flows down, and then flows out of the first small desalination chamber. Water may flow into the second small desalting chamber. Further, the flow direction of the concentrated water is also appropriately determined.
[0020]
In the electric deionized water production apparatus according to the present embodiment, at least one of the concentration chamber 1, the cathode chamber 2a, and the anode chamber 2b is filled with an ion exchanger, but at least the concentration chamber 1 is filled. In particular, it is preferable to fill all of the concentration chamber 1, the cathode chamber 2a, and the anode chamber 2b from the viewpoint of reducing the electric resistance of the electric deionized water production apparatus.
[0021]
The ion exchanger filled in the concentration chamber, the cathode chamber, and the anode chamber is not particularly limited as long as it has an ion exchange group such as an ion exchange resin or an ion exchange fiber. That is, as the ion exchanger, a cation exchanger or an anion exchanger may be used alone, or a mixed ion exchanger of an anion exchanger and a cation exchanger may be used. In addition, when water to be treated containing a large amount of anion components, particularly water to be treated containing a large amount of silica, is used as concentrated water or electrode water, the use of a cation exchanger does not cause ion exchange, and the adsorption form is silica type. This is preferable in that an increase in water flow resistance due to the use of water vapor can be avoided. Examples of the cation exchanger include IR116, IR118, IR120B, IR122, and IR124 (all are Amberlite manufactured by Rohm and Haas), and among these, IR124 is preferable. The ion exchanger filled in the concentration chamber, the cathode chamber, and the anode chamber may be the same as or different from the ion exchanger filled in the desalting chamber. Further, the ion exchanger may be a regenerated product or a used one as long as it has an ion exchange group. Further, by adding a conductive substance to the ion exchanger, the conductivity of the concentrating chamber and the electrode chamber can be further increased. The shape of the conductive material to be added is not particularly limited, and may be a fiber or a granular material. Examples of the conductive fibers include carbon fibers or nylon-based, acrylic-based, polyester-based or other synthetic fibers that are singly or kneaded and coated with carbon black as a composite fiber. Examples of the granular conductive material include small graphite and small activated carbon.
[0022]
The filling amount of the ion exchanger into the concentrating chamber, the cathode chamber, or the anode chamber is not particularly limited, but is preferably an amount that can uniformly fill each chamber with an appropriate density. If the packing density is too low, electrical conduction between the ion exchange membranes on both sides that define the chamber cannot be obtained, the conductivity cannot be increased, and if the packing is not uniform, current bias occurs. On the other hand, if the packing density is too high, the water flow differential pressure of the concentrated water rises more than allowable.
[0023]
The treated water used in the deionized water production method of the present invention is not particularly limited. For example, from well water, tap water, sewage, industrial water, river water, washing waste water or concentration chambers such as semiconductor devices in semiconductor manufacturing plants. Permeated water obtained by treating the recovered water with a reverse osmosis membrane. In this way, the reverse osmosis membrane treatment is performed as a pretreatment, and when using a part of the permeated water as the concentrated water, the treated water supplied to the desalting chamber and the concentrated water supplied to the concentration chamber are softened, It is preferable to use it in that scale generation can be suppressed. The softening method is not particularly limited, but a softener using a sodium ion exchange resin or the like is suitable.
[0024]
In the electric deionized water production apparatus used in the present invention, as the intermediate ion exchange membrane, any of a single membrane of a cation exchange membrane or an anion exchange membrane, or a multiple membrane in which both an anion exchange membrane and a cation exchange membrane are arranged It may be. In case of a dual membrane in which both an anion exchange membrane and a cation exchange membrane are arranged in the upper part or lower part of the device, the height (area) of each of the anion exchange membrane and the cation exchange membrane depends on the quality of the water to be treated or the purpose of treatment. It is determined appropriately. Moreover, when using a single membrane, an ion membrane is determined according to the ion species to be removed from the water to be treated.
[0025]
The ion exchanger filled in the desalting chamber is not particularly limited, and examples thereof include an anion exchanger single bed, a cation exchanger single bed, a mixed bed of an anion exchanger and a cation exchanger, or a combination thereof. The ion exchanger may be any substance having an ion exchange function, such as an ion exchange resin or an ion exchange fiber, or may be a combination thereof. Moreover, you may add an electroconductive substance to this ion exchanger similarly to the ion exchanger with which a concentration chamber is filled. These conductive materials can be the same as those described above.
[0026]
【Example】
Example 1
In the following apparatus specifications and operating conditions, an electric deionized water production apparatus constituted by arranging three deionization modules (six small demineralization chambers) in parallel with the same configuration as in FIG. 1 was used. As the water to be treated, reverse osmosis membrane permeated water for industrial water was used, and its conductivity was 3.0 μS / cm. Moreover, some treated water was used as concentrated water and electrode water. The operation time was 5000 hours. The water flow differential pressure in the concentration chamber after 5000 hours was measured in the same manner. Table 1 shows the operating conditions for obtaining treated water having a resistivity of 17.9 MΩ-cm at the same time.
[0027]
(Operating conditions)
・ Electric deionized water production equipment; prototype EDI
・ First small desalination chamber: width 300mm, height 600mm, thickness 3mm
-Ion exchange resin filled in the first small desalting chamber; mixed ion exchange resin of anion exchange resin (A) and cation exchange resin (K) (mixing ratio is A: K = 1: 1 by volume)
・ Second small desalination chamber; width 300mm, height 600mm, thickness 8mm
・ Second small desalination chamber filled ion exchange resin; anion exchange resin ・ concentration chamber; width 300 mm, height 600 mm, thickness 2 mm
・ Condensation chamber filling ion exchange resin; cation exchange resin (IR124)
・ Electrode chamber: not filled with ion exchange resin ・ Flow rate of the entire apparatus: 1 m 3 / h
[0028]
Comparative Example 1
In the following apparatus specifications and operating conditions, an electric deionized water production apparatus configured by arranging six deionization modules in parallel with the same configuration as in FIG. 2 was used. However, the concentrated water and the electrode water were used by branching a part of the treated water, and the concentrated water was returned to the treated water side of the reverse osmosis membrane device. Moreover, the thing similar to Example 1 was used for to-be-processed water. The operation time was 5000 hours. The water flow differential pressure in the concentration chamber after 5000 hours was measured in the same manner. Table 1 shows the operating conditions for obtaining treated water having a resistivity of 17.9 MΩ-cm at the same time.
[0029]
(Operating conditions)
-Electric deionized water production equipment; EDI (manufactured by Organo)
・ Desalination chamber: width 300mm, height 600mm, thickness 8mm
-Ion exchange resin packed downstream of the desalting chamber; mixture of anion exchange resin (A) and cation exchange resin (K) (mixing ratio is A: K = 1: 1 by volume)
・ Concentration chamber and electrode chamber; not filled with ion exchange resin ・ Flow rate of entire apparatus: 1 m 3 / h
[0030]
[Table 1]
Figure 0004481418
[0031]
【The invention's effect】
According to the present invention, the concentrating chamber and the electrode chamber are more conductive, the current density can be made uniform from the inlet side to the outlet side of the desalting chamber, and the power consumption can be further reduced. The filling of the ion exchanger into the concentrating chamber or the like is particularly effective in the electric deionized water production apparatus in which one desalting chamber is composed of two small desalting chambers. That is, in the apparatus, there are two small desalination chambers, a concentration chamber, etc., each of which has a flow of water. Although the quality of treated water may be reduced, these problems can be solved in advance by uniform filling of the ion exchanger into the concentration chamber or the like.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing an electric deionized water production apparatus according to an embodiment of the present invention.
FIG. 2 is a schematic view of a conventional electric deionized water production apparatus.
[Explanation of symbols]
D, D 1 to D 4 , 104 Desalination chamber d 1 , d 3 , d 5 , d 7 1st small desalination chamber d 2 , d 4 , d 6 , d 8 2nd small desalination chamber 1 , 105 Concentration Chamber 2, 112, 113 Electrode chamber 3, 101 Cationic membrane 4, 102 Anion membrane 5 Intermediate ion exchange membrane 6, 109 Cathode 7, 110 Anode 8, 8a, 103 Ion exchanger 10, 100 Electric deionized water production apparatus 11 , 111 To-be-treated water inflow line 12 To-be-treated water outflow line 13 in the second small demineralization chamber 13 To-be-treated water inflow lines 14, 114 in the first small desalting chamber 15, 115 Deionized water outflow lines 16, 116 Concentrated water outflow lines 17a, 17b, 117 Electrode water inflow lines 18a, 18b, 118 Electrode water outflow lines

Claims (4)

一側のカチオン交換膜、他側のアニオン交換膜及び当該カチオン交換膜と当該アニオン交換膜の間に位置する単一膜又は複式膜である中間イオン交換膜で区画される2つの小脱塩室にイオン交換体を充填して脱塩室を構成し、前記カチオン交換膜、アニオン交換膜を介して脱塩室の両側に濃縮室を設け、これらの脱塩室及び濃縮室を陽極を備えた陽極室と陰極を備えた陰極室の間に配置し、且つ前記濃縮室、陰極室及び陽極室のうち、少なくとも一つにイオン交換体を充填して形成されることを特徴とする電気式脱イオン水製造装置。Two small desalting chambers defined by a cation exchange membrane on one side, an anion exchange membrane on the other side, and an intermediate ion exchange membrane that is a single membrane or a multiple membrane located between the cation exchange membrane and the anion exchange membrane An ion exchanger is filled to form a desalting chamber. Concentration chambers are provided on both sides of the desalting chamber via the cation exchange membrane and anion exchange membrane, and the desalting chamber and the concentration chamber are provided with an anode. An electric desorption is provided between an anode chamber and a cathode chamber provided with a cathode, and is formed by filling at least one of the concentration chamber, the cathode chamber and the anode chamber with an ion exchanger. Ionized water production equipment. 一側のカチオン交換膜、他側のアニオン交換膜及び当該カチオン交換膜と当該アニオン交換膜の間に位置する中間イオン交換膜で区画される2つの小脱塩室にイオン交換体を充填して脱塩室を構成し、前記カチオン交換膜、アニオン交換膜を介して脱塩室の両側に濃縮室を設け、これらの脱塩室及び濃縮室を陽極を備えた陽極室と陰極を備えた陰極室の間に配置し、且つ前記濃縮室、陰極室及び陽極室のうち、少なくとも一つにイオン交換体を充填して形成されるものであり、前記中間イオン交換膜と前記他側のアニオン交換膜で区画される一方の小脱塩室に充填されるイオン交換体は、アニオン交換体であり、前記一側のカチオン交換膜と前記中間イオン交換膜で区画される他方の小脱塩室に充填されるイオン交換体は、カチオン交換体とアニオン交換体の混合体であることを特徴とする気式脱イオン水製造装置。An ion exchanger is filled in two small desalting chambers defined by a cation exchange membrane on one side, an anion exchange membrane on the other side, and an intermediate ion exchange membrane located between the cation exchange membrane and the anion exchange membrane. A desalination chamber is configured, and concentration chambers are provided on both sides of the desalination chamber via the cation exchange membrane and the anion exchange membrane, and these desalination chambers and the concentration chamber are provided with an anode chamber having an anode and a cathode having a cathode. And is formed by filling at least one of the concentration chamber, the cathode chamber, and the anode chamber with an ion exchanger , and the intermediate ion exchange membrane and the other side anion exchange The ion exchanger filled in one small desalting chamber partitioned by a membrane is an anion exchanger, and the other small desalting chamber partitioned by the one side cation exchange membrane and the intermediate ion exchange membrane The ion exchanger to be filled is a cation exchanger and Electric water producing apparatus which is a mixture of anion exchangers. 前記濃縮室、陰極室及び陽極室のうち、少なくとも一つに充填されるイオン交換体が、カチオン交換体であることを特徴とする請求項1又は2記載の電気式脱イオン水製造装置。  3. The electric deionized water production apparatus according to claim 1, wherein the ion exchanger filled in at least one of the concentration chamber, the cathode chamber, and the anode chamber is a cation exchanger. 一側のカチオン交換膜、他側のアニオン交換膜及び当該カチオン交換膜と当該アニオン交換膜の間に位置する単一膜又は複式膜である中間イオン交換膜で区画される2つの小脱塩室にイオン交換体を充填して脱塩室を構成し、前記カチオン交換膜、アニオン交換膜を介して脱塩室の両側に濃縮室を設け、これらの脱塩室及び濃縮室を陽極を備えた陽極室と陰極を備えた陰極室の間に配置し、且つ前記濃縮室、陰極室及び陽極室のうち、少なくとも一つにイオン交換体を充填し、電圧を印加しながら一方の小脱塩室に被処理水を流入し、次いで、該小脱塩室の流出水を他方の小脱塩室に流入すると共に、濃縮室に濃縮水を流入して被処理水中の不純物イオンを除去し、脱イオン水を得ることを特徴とする脱イオン水の製造方法。Two small desalting chambers defined by a cation exchange membrane on one side, an anion exchange membrane on the other side, and an intermediate ion exchange membrane that is a single membrane or a multiple membrane located between the cation exchange membrane and the anion exchange membrane An ion exchanger is filled to form a desalting chamber. Concentration chambers are provided on both sides of the desalting chamber via the cation exchange membrane and anion exchange membrane, and the desalting chamber and the concentration chamber are provided with an anode. One small desalination chamber is disposed between an anode chamber and a cathode chamber having a cathode, and at least one of the concentration chamber, the cathode chamber, and the anode chamber is filled with an ion exchanger and a voltage is applied. Then, the effluent from the small desalting chamber flows into the other small desalting chamber, and the concentrated water flows into the concentrating chamber to remove impurity ions from the treated water. A method for producing deionized water, comprising obtaining ionic water.
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JP2007245120A (en) * 2006-03-20 2007-09-27 Japan Organo Co Ltd Electrically operated apparatus for producing deionized water
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01151911A (en) * 1987-12-10 1989-06-14 Tokuyama Soda Co Ltd Electrodialysis tank
JPH0663365A (en) * 1992-08-24 1994-03-08 Asahi Chem Ind Co Ltd Method and device for electrodialysis
JPH07265865A (en) * 1994-03-29 1995-10-17 Japan Organo Co Ltd Electrolytic deionized water producing device
JPH1043554A (en) * 1996-04-26 1998-02-17 Millipore Corp Electric deionizing method to refine liquid
JPH1190428A (en) * 1997-09-18 1999-04-06 Japan Organo Co Ltd Method for operating electric desalting apparatus and electric desalting apparatus used for implementing method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07328395A (en) * 1994-06-15 1995-12-19 Japan Organo Co Ltd Electrodialytic apparatus
JPH08155272A (en) * 1994-11-30 1996-06-18 Asahi Glass Co Ltd Pure water making apparatus
JP4197380B2 (en) * 1999-09-17 2008-12-17 オルガノ株式会社 Electrodeionization equipment

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01151911A (en) * 1987-12-10 1989-06-14 Tokuyama Soda Co Ltd Electrodialysis tank
JPH0663365A (en) * 1992-08-24 1994-03-08 Asahi Chem Ind Co Ltd Method and device for electrodialysis
JPH07265865A (en) * 1994-03-29 1995-10-17 Japan Organo Co Ltd Electrolytic deionized water producing device
JPH1043554A (en) * 1996-04-26 1998-02-17 Millipore Corp Electric deionizing method to refine liquid
JPH1190428A (en) * 1997-09-18 1999-04-06 Japan Organo Co Ltd Method for operating electric desalting apparatus and electric desalting apparatus used for implementing method

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