JP4472403B2 - 露光装置及び露光方法 - Google Patents

露光装置及び露光方法 Download PDF

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Publication number
JP4472403B2
JP4472403B2 JP2004096564A JP2004096564A JP4472403B2 JP 4472403 B2 JP4472403 B2 JP 4472403B2 JP 2004096564 A JP2004096564 A JP 2004096564A JP 2004096564 A JP2004096564 A JP 2004096564A JP 4472403 B2 JP4472403 B2 JP 4472403B2
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Japan
Prior art keywords
recording
exposure
stage
recording medium
timing
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Expired - Fee Related
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JP2004096564A
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English (en)
Japanese (ja)
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JP2005283896A5 (cg-RX-API-DMAC10.html
JP2005283896A (ja
Inventor
徹 片山
大輔 中谷
尚純 城後
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Fujifilm Corp
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Fujifilm Corp
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Priority to JP2004096564A priority Critical patent/JP4472403B2/ja
Priority to KR1020050025427A priority patent/KR100696968B1/ko
Priority to US11/090,070 priority patent/US20050225788A1/en
Publication of JP2005283896A publication Critical patent/JP2005283896A/ja
Publication of JP2005283896A5 publication Critical patent/JP2005283896A5/ja
Application granted granted Critical
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K35/00—Means to prevent accidental or unauthorised actuation
    • F16K35/10—Means to prevent accidental or unauthorised actuation with locking caps or locking bars
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/047—Detection, control or error compensation of scanning velocity or position
    • H04N1/053—Detection, control or error compensation of scanning velocity or position in main scanning direction, e.g. synchronisation of line start or picture elements in a line
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/60—Handles
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
    • H04N1/00007—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for relating to particular apparatus or devices
    • H04N1/00018—Scanning arrangements
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
    • H04N1/00026—Methods therefor
    • H04N1/0005—Methods therefor in service, i.e. during normal operation
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
    • H04N1/00071—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for characterised by the action taken
    • H04N1/00082—Adjusting or controlling
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
    • H04N1/00071—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for characterised by the action taken
    • H04N1/00082—Adjusting or controlling
    • H04N1/00087—Setting or calibrating
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
    • H04N1/00071—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for characterised by the action taken
    • H04N1/0009—Storage
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
    • H04N1/00092—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for relating to the original or to the reproducing medium, e.g. imperfections or dirt
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/10—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using flat picture-bearing surfaces
    • H04N1/1013—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using flat picture-bearing surfaces with sub-scanning by translatory movement of at least a part of the main-scanning components
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701—Detection of scanning velocity or position
    • H04N2201/04734—Detecting at frequent intervals, e.g. once per line for sub-scan control
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04701—Detection of scanning velocity or position
    • H04N2201/04739—Detection of scanning velocity or position by detecting the scanning head or scanning carriage
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753—Control or error compensation of scanning position or velocity
    • H04N2201/04755—Control or error compensation of scanning position or velocity by controlling the position or movement of a scanning element or carriage, e.g. of a polygonal mirror, of a drive motor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753—Control or error compensation of scanning position or velocity
    • H04N2201/04758—Control or error compensation of scanning position or velocity by controlling the position of the scanned image area
    • H04N2201/04767—Control or error compensation of scanning position or velocity by controlling the position of the scanned image area by controlling the timing of the signals, e.g. by controlling the frequency o phase of the pixel clock
    • H04N2201/04768—Controlling the frequency of the signals
    • H04N2201/04774—Controlling the frequency of the signals using a reference clock or oscillator

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  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • General Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Toxicology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Atmospheric Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2004096564A 2004-03-29 2004-03-29 露光装置及び露光方法 Expired - Fee Related JP4472403B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004096564A JP4472403B2 (ja) 2004-03-29 2004-03-29 露光装置及び露光方法
KR1020050025427A KR100696968B1 (ko) 2004-03-29 2005-03-28 노광 장치 및 방법
US11/090,070 US20050225788A1 (en) 2004-03-29 2005-03-28 Exposure apparatus and exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004096564A JP4472403B2 (ja) 2004-03-29 2004-03-29 露光装置及び露光方法

Publications (3)

Publication Number Publication Date
JP2005283896A JP2005283896A (ja) 2005-10-13
JP2005283896A5 JP2005283896A5 (cg-RX-API-DMAC10.html) 2007-02-01
JP4472403B2 true JP4472403B2 (ja) 2010-06-02

Family

ID=35060218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004096564A Expired - Fee Related JP4472403B2 (ja) 2004-03-29 2004-03-29 露光装置及び露光方法

Country Status (3)

Country Link
US (1) US20050225788A1 (cg-RX-API-DMAC10.html)
JP (1) JP4472403B2 (cg-RX-API-DMAC10.html)
KR (1) KR100696968B1 (cg-RX-API-DMAC10.html)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4752286B2 (ja) * 2004-12-28 2011-08-17 株式会社ニコン 位置調整装置の制御方法、位置調整装置、及び露光装置
JP4606992B2 (ja) * 2005-10-20 2011-01-05 富士フイルム株式会社 描画装置及び描画方法
US7847938B2 (en) * 2007-10-01 2010-12-07 Maskless Lithography, Inc. Alignment system for optical lithography
US8482732B2 (en) * 2007-10-01 2013-07-09 Maskless Lithography, Inc. Alignment system for various materials and material flows
US8335999B2 (en) 2010-06-11 2012-12-18 Orbotech Ltd. System and method for optical shearing
JP5424271B2 (ja) 2010-11-08 2014-02-26 株式会社ブイ・テクノロジー 露光装置
JP5685756B2 (ja) 2010-11-10 2015-03-18 株式会社ブイ・テクノロジー フィルム露光方法
CN115380249B (zh) * 2020-04-29 2025-09-16 应用材料公司 用于数字光刻的图像稳定化
US11878520B2 (en) * 2020-05-13 2024-01-23 Kateeva, Inc. Droplet measurement using strobed LED source
TWI765567B (zh) 2021-02-08 2022-05-21 上銀科技股份有限公司 量測進給系統的位置誤差的方法
CN113960890B (zh) * 2021-10-22 2023-12-15 深圳市先地图像科技有限公司 一种激光成像设备中的运动组件控制方法及相关设备
WO2026098901A1 (en) * 2024-11-07 2026-05-15 Asml Netherlands B.V. Optical metrology method and system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5002364A (en) * 1986-03-04 1991-03-26 Georgia Tech Research Corp. Stereoscopic process and apparatus using different deviations of different colors
JPH07302748A (ja) * 1994-05-02 1995-11-14 Canon Inc 半導体露光装置
JP2004012903A (ja) * 2002-06-07 2004-01-15 Fuji Photo Film Co Ltd 露光装置

Also Published As

Publication number Publication date
US20050225788A1 (en) 2005-10-13
JP2005283896A (ja) 2005-10-13
KR100696968B1 (ko) 2007-03-20
KR20060044837A (ko) 2006-05-16

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