JP4442167B2 - フィルタ装置 - Google Patents

フィルタ装置 Download PDF

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Publication number
JP4442167B2
JP4442167B2 JP2003316248A JP2003316248A JP4442167B2 JP 4442167 B2 JP4442167 B2 JP 4442167B2 JP 2003316248 A JP2003316248 A JP 2003316248A JP 2003316248 A JP2003316248 A JP 2003316248A JP 4442167 B2 JP4442167 B2 JP 4442167B2
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Japan
Prior art keywords
vibrator
group
transducer
filter device
frequency
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Expired - Fee Related
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JP2003316248A
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Japanese (ja)
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JP2005086469A5 (enExample
JP2005086469A (ja
Inventor
和弘 松久
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Sony Corp
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Sony Corp
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Priority to JP2003316248A priority Critical patent/JP4442167B2/ja
Publication of JP2005086469A publication Critical patent/JP2005086469A/ja
Publication of JP2005086469A5 publication Critical patent/JP2005086469A5/ja
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  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2003316248A 2003-09-09 2003-09-09 フィルタ装置 Expired - Fee Related JP4442167B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003316248A JP4442167B2 (ja) 2003-09-09 2003-09-09 フィルタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003316248A JP4442167B2 (ja) 2003-09-09 2003-09-09 フィルタ装置

Publications (3)

Publication Number Publication Date
JP2005086469A JP2005086469A (ja) 2005-03-31
JP2005086469A5 JP2005086469A5 (enExample) 2006-06-29
JP4442167B2 true JP4442167B2 (ja) 2010-03-31

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ID=34416206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003316248A Expired - Fee Related JP4442167B2 (ja) 2003-09-09 2003-09-09 フィルタ装置

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JP (1) JP4442167B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007174438A (ja) * 2005-12-23 2007-07-05 Toshiba Corp フィルタ回路及びフィルタを備えた無線通信システム
CN101168434B (zh) * 2006-10-24 2011-06-15 精工爱普生株式会社 Mems器件
JP2008132583A (ja) * 2006-10-24 2008-06-12 Seiko Epson Corp Ｍｅｍｓデバイス
JP5169518B2 (ja) * 2008-06-18 2013-03-27 セイコーエプソン株式会社 共振回路及びその製造方法並びに電子装置
JP5505596B2 (ja) * 2008-06-18 2014-05-28 セイコーエプソン株式会社 共振回路、発振回路、フィルタ回路及び電子装置
JP2012195829A (ja) 2011-03-17 2012-10-11 Seiko Epson Corp 発振回路
JP2012222718A (ja) 2011-04-13 2012-11-12 Seiko Epson Corp 発振器

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Publication number Publication date
JP2005086469A (ja) 2005-03-31

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