JP4431479B2 - 2D coordinate measuring machine - Google Patents

Description

  The present invention relates to a two-dimensional coordinate measuring machine configured to take an image of a measurement object as a subject and process an image obtained by the imaging to measure the dimension of the measurement object.

  As a two-dimensional coordinate measuring machine, an X-axis frame arranged on a Y-axis guide rail extending in parallel and slidably perpendicular to the Y-axis guide rail, and the X-axis frame along the guide rail. A Y-axis drive unit that moves in the Y-axis direction, a detection unit that is slidably moved along the longitudinal direction of the X-axis frame, and an X-axis that moves the detection unit in the X-axis direction along the X-axis frame A drive unit and a light source unit that irradiates the object to be measured from below or above the detection unit, and moves the detection unit in a two-dimensional direction so as to measure dimensions, coordinates, etc. of the pattern on the object to be measured What was made is known (refer patent document 1).

  On the other hand, in recent years, a screen plate for forming a display screen of a thin plasma television is often used as an object to be measured by a two-dimensional coordinate measuring machine. As this screen plate, for example, there is one having an outer dimension of about 1600 mm square, and a pattern for forming a plurality of display screens is printed on this screen plate. By measuring the line width of the pattern with a two-dimensional coordinate measuring machine, the accuracy of the pattern can be inspected.

  In addition, as a screen plate, a screen having an outer dimension of about 2500 mm square is manufactured with the increase in size of a thin plasma television. In order to measure this type of screen plate (medium screen plate). In addition, the size of the two-dimensional coordinate measuring machine is increased in accordance with the shape of the screen plate.

Japanese Patent Laid-Open No. 7-12512 (2nd to 4th pages, FIG. 1)

  By the way, with the further increase in size of thin plasma televisions in the future, it is expected that a screen plate having an outer dimension of about 3500 mm square, for example, will appear. In order to measure this type of screen plate (large screen plate), if a two-dimensional coordinate measuring machine is configured to match the shape of the screen plate, the size of the measuring machine body becomes too large, and the setting space increases and the measuring machine increases. Weight increases.

  That is, the two-dimensional coordinate measuring machine has a glass measuring table placed on the upper part of the measuring machine body, Y-axis guide rails are placed on both sides of the glass table, and the X-axis frame can slide freely on the Y-axis guide rails. The detection unit as a measuring head is fixed to the X-axis frame, the detection unit is moved along the X-axis frame in the X-axis direction, and the X-axis frame is moved along the Y-axis guide rail along the Y-axis direction. Therefore, if the measurement table is simply enlarged along with the increase in the size of the screen plate, the dimensions of the measurement instrument main body increase, the installation space increases, and the measurement instrument weight increases. As a result, the manufacturing cost increases and it becomes difficult to transport the measuring machine.

The present invention has been made in view of the problems of the prior art described above, and its purpose is to determine the coordinates or dimensions of the measurement object on each measurement object with a plurality of measurement objects having different sizes as imaging objects. It is to measure.

In order to achieve the above object, in the two-dimensional coordinate measuring machine according to the first aspect of the present invention, a first support member that supports a measurement object, and the first support member that uses the measurement object as an imaging target. A head that is movably installed above the first support member, and a two-dimensional head movement region that is connected to the first support member and that is above the first support member, and the head extends over the head movement region. driving means for moving the, comprising control means for controlling driving of said driving means, and an image processing means for measuring the coordinates of the measurement object on the respective object to be measured by processing the image by the imaging of the head 2 In the coordinate measuring machine, a second support member capable of supporting an object to be measured larger than the object to be measured supported by the first support member is provided above the head, and the head is moved to the second coordinate measuring machine. Supported by support member DUT that were also capable of imaging configured.

(Operation) Of a plurality of objects to be measured having different sizes , a small object to be measured can be supported by the first support member, and a large object to be measured can be supported by the second support member. Since the head can image both the measurement object supported by the first support member and the measurement object supported by the second support member, a plurality of measurement objects of different sizes can be imaged. The dimensions or coordinates of the measurement object on each object to be measured can be measured by one measuring machine . Further, since the second support member for supporting the measurement object larger than the measurement object supported by the first support member is provided, the measurement object can be measured rather than configuring the measuring machine main body according to the large measurement object. It is possible to suppress an increase in installation space or an increase in the weight of the measuring instrument with an increase in size of an object.

In the two-dimensional coordinate measuring machine according to a second aspect of the present invention, in the two-dimensional coordinate measuring machine according to the first aspect, the head images a first object to be measured that is supported by the first support member . Imaging means, and second imaging means for imaging the object to be measured supported by the second support member .

(Operation) Since the first imaging means for imaging the measurement object supported by the first support member and the second imaging means for imaging the measurement object supported by the second support member, Any object on either support member can be imaged by each imaging means.

In the two-dimensional coordinate measuring machine according to a third aspect of the invention, in the two-dimensional coordinate measuring machine according to the first aspect , the head supports an imaging means for imaging the measurement object and the imaging means so as to be rotatable. And switching means for switching the imaging direction of the imaging means to either the upper or lower direction.

(Operation) An imaging unit and a switching unit that switches an imaging direction of the imaging unit are arranged in the head, and a plurality of objects to be measured can be captured by one imaging unit by switching the imaging direction to either the upper or lower direction. it can.

According to the two-dimensional coordinate measuring machine of the invention according to claim 1, it is possible to measure the dimensions or coordinates for a plurality of different object to be measured having a large can of the one measuring machine. In addition, the present invention increases the installation space and increases the weight of the measuring instrument as the measuring object increases in size, compared with the case where the measuring instrument body is configured for a large measuring object. Can be suppressed.

According to the two-dimensional coordinate measuring machine of the invention according to claim 2, it is possible to pick up an image of each object to be measured supported by either the first support member or the second support member by the respective image pickup means.

According to the two-dimensional coordinate measuring machine of the invention according to claim 3, in the object to be measured which is supported on either the first support member and the second support member, to an image shooting by the single image pickup means Can do.

  Next, embodiments of the present invention will be described based on examples. 1 is a perspective view showing an embodiment of a two-dimensional coordinate measuring machine according to the present invention, FIG. 2 is a cross-sectional view taken along line AA in FIG. 1, and FIG. 3 is taken along line BB in FIG. FIG. 4 is a perspective view of the screen plate, and FIG. 5 is a cross-sectional view of the head.

As shown in these figures, the two-dimensional coordinate measuring machine 10 includes a measuring unit 12 which is formed into a substantially box-shaped, measuring unit 12 mainly constitute the first supporting member element As shown, the base 14 and the base 16 (26) are provided. The base 14 is configured using a plurality of frames, and the periphery thereof is covered with a decorative board 15. A plurality of horizontal adjustment screws 18 for adjusting the inclination of the base 14 and the installation surface are fixed to the bottom of the base 14, and the inclination of the base 14 and the base 16 (26) is inclined to the top of the base 14. A plurality of horizontal adjustment screws 20 for adjustment are fixed, and a plurality of horizontal adjustment screws 20 for adjusting the inclination between the base 14 and the Y-axis frame 26 (16) are fixed. A Y-axis frame 26 (16) is placed on the base 14 via the horizontal adjustment screw 20. That is, the level of the base 14 is adjusted by the horizontal adjustment screw 18, and the level of the Y-axis frame 26 (16) is adjusted by the horizontal adjustment screw 20.

  A pair of convex portions 16a are formed opposite to each other on the upper side of the base 16 (26), and a central drive feed screw 17, a measurement table 24, a Y-axis moving table (in the region between the convex portions 16a) X-axis frame) 46 and the like are arranged. The central drive feed screw 17 is disposed in a region below the measurement table 24 as an element of a Y-axis drive unit that drives the head 48 in the Y-axis direction, and one end in the axial direction is a bearing (not shown) in the convex portion 16a. And the other axial end is connected to a Y-axis drive motor (not shown). The center drive feed screw 17 is connected to a thread portion (not shown) of a Y-axis moving table (X-axis frame) 46, and the center drive feed screw 17 is rotated by the rotational drive of the Y-axis drive motor. The Y-axis moving table (X-axis frame) 46 moves along the Y-axis direction while meshing with the center drive feed screw 17. In this case, the amount of movement of the Y-axis moving base (X-axis frame) 46 is measured by the linear scale 21, and the drive of the Y-axis drive motor is controlled according to the measurement result, and the Y-axis movement is based on the control for the Y-axis drive motor. A table (X-axis frame) 46 is positioned.

  On the other hand, a pair of convex portions 26a are formed opposite to each other on the upper side of the Y-axis frame 26 (16), and a Y-axis guide rail 19 is arranged on each convex portion 26a on the Y-axis (in the measuring machine main body 12). It is arranged in parallel with the Y axis of the XY coordinates (machine coordinates). On the Y-axis guide rail 19, a sliding portion 44 of a Y-axis moving base (X-axis frame) 46 is disposed so as to be movable along the Y-axis direction. In the Y-axis moving table (X-axis frame) 46, the X-axis drive feed screw 23 and the X-axis guide rail 25 are arranged in parallel with the X-axis (X-axis of the XY coordinates in the measuring machine body 12). ing. The X-axis drive feed screw 23 is disposed in a region above the measurement table 24 as one element of the X-axis drive unit that drives the head 48 in the X-axis direction, and one end side in the axial direction rotates to a bearing (not shown). The other end in the axial direction is connected to the X-axis drive motor 27. The X-axis drive feed screw 23 is connected to a screw portion (not shown) of an X-axis moving base (head main body) 48 a, and the X-axis drive feed screw 23 is rotated by the X-axis drive motor 27. When rotated, the X-axis moving base (head main body) 48 a moves along the X-axis guide rail 25 while meshing with the X-axis drive feed screw 23. In this case, the movement amount of the X-axis moving table (head main body) 48 a is measured by the linear scale 29, and the drive of the X-axis drive motor 27 is controlled according to the measurement result, and the X-axis is based on the control for the X-axis drive motor 27. A movable table (head main body) 48a is positioned. Although the Y-axis guide rail 19 is provided on both sides of the Y-axis frame 26, the Y-axis guide rail 19 can also be provided near the center of the Y-axis frame 26, and the number of Y-axis guide rails 19 can be three. It is. Further, a linear motor or an air bearing can be used instead of the X-axis guide rail 25. Furthermore, as the linear scales 21 and 29, optical ones can be used.

  The measurement table 24 is formed in a substantially square shape using transparent glass, and is fixed to the convex portion 16 a of the base 16. On the measurement table 24, a medium screen plate 28a shown in FIG. 4 is arranged. The medium-size screen plate 28a includes a screen frame 30a formed in a rectangular shape using aluminum, and a silk screen 32a. The screen 32b includes, for example, a thin plasma. A pattern constituting the display screen of the television is formed in almost the center for three screens. As the screen plate 28a disposed on the measurement table 24, a screen frame 30a having a size of, for example, 2500 mm × 2500 mm is used.

  Further, as the large screen plate 28b, for example, a screen frame 30b having a size of 3500 mm × 3500 mm is used, and the screen (bowl) 32b constitutes a display screen of a thin plasma television, for example. 6 patterns are formed. The large screen plate 28b is arranged above the measurement table 24, leaving a space between the medium screen plate 28a.

  Specifically, four columns 34 are provided on both side surfaces of the measuring machine main body 12 so that the area above the measuring machine main body 12 is a large screen plate arrangement area 11 for arranging the large screen plate 28b. The three columns 34 are arranged along the vertical direction along the vertical direction, and the bottom side of each column 34 is fixed to the side surface of the base 16. Frames 36 and 38 arranged along the horizontal direction are fixed to the upper side of each column 34. Each frame 36 is disposed opposite to each other, each frame 38 is disposed opposite to each other, and both ends of each frame 36 are connected to both ends of each frame 38. That is, the ends of the two frames 36 and the two frames 38 are connected to each other to form a substantially square frame, and loaders are provided on each frame 36 and on both ends of each frame 38, respectively. 40 is slidably fixed. The loader 40 is configured as a frame having a substantially L-shaped cross section, and a pin 41 protruding from the bottom of the loader 40 is detachably inserted into a pin hole 42 of the frame 38. A plurality of pin holes 42 are formed in each frame 38 at a predetermined interval, and a pin hole 42 for inserting a pin 41 protruding from each loader 40 is selected from the plurality of pin holes 42. The position of the loader 40 in the frame 38 can be selected by inserting the pin 41 at the bottom of the loader 40 into the selected pin hole 42. That is, when the large screen plate 28b is arranged on the loader 40, the position of the loader 40 can be selected according to the size of the large screen plate 28b. When the loader 40 is disposed at the extreme end of the frame 38, a large screen plate 28b having a size of 3500 mm × 3500 mm is disposed on the loader 40.

In this case, for example, when measuring screen plates 28a and 28b having different sizes as a plurality of objects to be measured, the measuring machine main body 12 includes a medium size screen plate (of a size) together with the measurement table 24. A column 34 (frames 36 and 38) and a loader 40 which constitute a first support member for supporting the smaller screen plate 28a and are connected to the main body 12 of the measuring machine are large screen plates (the larger one). A second support member for supporting the screen plate) 28b.

  On the other hand, the head 48 is referred to as a personal computer (hereinafter referred to as a PC) that performs calculations for controlling driving of the X-axis drive unit including the X-axis drive motor 27 and the like and the Y-axis drive unit including the Y-axis drive motor. ) 50 through a cable (not shown), and the PC 50 is connected to a display device 52 for displaying the processing results of the PC 50 and a keyboard 54 for inputting various information to the PC 50. . In this case, by controlling the drive amount and drive direction for the X-axis drive motor 27 and the Y-axis drive motor by the PC 50, the Y-axis moving base (X-axis frame) 46 is moved along the Y-axis direction, The movable table (head main body) 48a can be moved along the X-axis direction.

  That is, the head 48 spans the head moving area by using the space between the medium-sized screen plate 28a and the large screen plate 28b as a two-dimensional head moving area by driving the X-axis driving unit and the Y-axis driving unit. Can move. In this case, the X-axis driving unit and the Y-axis driving unit constitute driving means for driving the head 48, and the PC 50 constitutes control means for controlling driving of the driving means.

  Further, as shown in FIG. 5, the head 48 includes three types of downward camera units 56, 58, and 60 as a first imaging unit that uses the medium-sized screen plate 28 a as a measurement target and an imaging target. As a second imaging means that uses the large screen plate 28b as a measurement object and imaging, an upward camera unit 62 is provided. The camera unit 56 includes a wide-field microscope 56a and a CCD camera 56b. The camera unit 58 includes a medium-magnification microscope 58a and a CCD camera 58b. The camera unit 60 uses a high-magnification microscope. The microscope 60a and the CCD camera 60b are provided. On the other hand, the camera unit 62 includes, for example, a medium magnification microscope 62a and a CCD camera 62b.

  Then, images (image data) captured by the camera units 56, 58, 60, and 62 are transferred to the PC 50 via a cable (not shown), the images are processed in the PC 50, and the medium-size screen plate is based on the processing result. The measurement object on the 28a or the large screen plate 28b, for example, the dimension (coordinates) of the pattern is measured, and the measurement result is displayed on the screen of the display device 52. That is, the PC 50 constitutes an image processing means.

  In the above configuration, when the medium-sized screen plate 28 a is placed on the measurement table 24, the head 48 moves the head movement area above the screen plate 28 a to the Y-axis frame 26 together with the X-axis frame 46 based on the control of the PC 50. When the head 48 moves along the X-axis frame 46 and positioning is performed, one of the camera units 56, 58, and 60 is selected, and the selected camera unit Imaging is performed on the screen plate 28 a on the measurement table 24, an image obtained by the imaging is processed by the PC 50, and the processing result is displayed on the screen of the display device 52. By repeating such processing and moving the head 48 over the head movement region, the measurement target on the medium-size screen slab 28a is, for example, a long dimension for measuring a minute dimension of a pattern or a length between pitches. Etc. can be measured sequentially.

  That is, the measurement target (pattern) existing area on the medium-sized screen plate 28a is narrower than the maximum head movement area in which the head 48 can move, and therefore the head 48 is moved over the head movement area. Thus, the minute dimensions of the pattern on the medium-size screen plate 28a can be sequentially measured.

  On the other hand, when a large screen plate 28b is carried in as an object to be measured instead of the medium screen plate 28a and the large screen plate 28b is fixed on the loader 40, the large screen screen 28b is controlled based on the control of the PC 50. When the head 48 moves in the area below the plate 28b and positioning is performed, the camera unit 62 takes an image of the large screen plate 28b. When an image captured by the camera unit 62 is processed by the PC 50, the processing result is displayed on the screen of the display device 52. By repeating such processing and moving the head 48 over the head movement region, for example, the minute dimensions of the pattern can be sequentially measured as the measurement target on the large screen plate 28b.

  In this case, since the measurement target (pattern) on the large screen plate 28b exists over a wider area than the measurement target (pattern) on the medium screen plate 28a, the head 48 has the medium screen plate. A two-dimensional movement area wider than the movement area with respect to 28a is set as a head movement area, and the head movement area is moved. When the measurement target (pattern) existing area on the large screen plate 28b corresponds to the maximum head moving area where the head 48 can move, the head 48 is moved over the head moving area. By doing so, it is possible to sequentially measure the minute dimensions of the measurement target on the large screen plate 28b.

  According to the present embodiment, a two-dimensional area that is a space between the medium-size screen plate 28a and the large-size screen plate 28b and that is wider than the measurement target existing area on the medium-size screen plate 28a is set as the head movement area. Since the head 48 is moved over the head moving region, the dimensions of the measurement target on the screen plates 28a and 28b can be measured even when a plurality of screen plates 28a and 28b having different sizes are taken as imaging targets. Can do. Further, the size of the measurement object on the plurality of screen plates 28a and 28b having different sizes can be measured by one two-dimensional coordinate measuring machine 10. That is, although the dimensions of the measurement object on the plurality of screen plates 28a and 28b having different sizes cannot be measured at the same time, the screen plates 28a and 28b are carried in separately, and the measurement time for the screen plates 28a and 28b is measured. By changing the above, it is possible to perform the measurement on each of the screen plates 28a and 28b even with one two-dimensional coordinate measuring machine 10.

  Further, according to the present embodiment, the first support member is constituted by the measuring machine main body 12 that supports the medium-sized screen plate 28 a together with the measurement table 24, and the column 34 and the frames 36, 38 connected to the measuring machine main body 12. And the loader 40 constitutes a second support member that supports the large screen plate 28b, and the first support member and the second support member are arranged to face each other with the head moving region in between. Compared to configuring the measuring machine body 12 according to the size of the screen plate 28b, it is possible to suppress an increase in installation space and an increase in the weight of the measuring machine, thereby suppressing an increase in manufacturing costs. In addition, the measuring instrument can be easily transported.

  In the above-described embodiment, the medium-size screen plate 28a is imaged by the camera units 56, 58, and 60, and the large-size screen plate 28b is imaged by the camera unit 62. However, instead of providing the camera unit 62, For example, camera units 56, 58, 60 are used as camera units, and the camera units 56, 58, 60 are rotatably supported, and the imaging directions of the camera units 56, 58, 60 are selected from the screen plates 28a, 28b. It is also possible to employ a configuration in which switching means for switching in any direction is provided and the camera units 56, 58, 60 are used as an upward camera unit or a downward camera unit.

It is a perspective view which shows one Example of the two-dimensional coordinate measuring machine which concerns on this invention. It is sectional drawing which follows the AA line of FIG. It is sectional drawing which follows the BB line of FIG. It is a perspective view of a screen version. It is sectional drawing of a head.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Two-dimensional coordinate measuring machine 12 Measuring machine main body 14 Base 16 Base 24 Measurement table 26 Y axis frame 28a Medium size screen plate 28b Large size screen plate 34 Support | pillar 36, 38 frame 40 Loader 42 Pin hole 44 Sliding part 46 Y axis Moving table (X-axis frame)
48 head 48a X-axis moving base (head body)
50 pcs
56, 58, 60, 62 Camera unit

Claims (3)

A first support member for supporting the object to be measured, the head that is installed movably above the first support member measured object as an imaging target, the being coupled to the first support member A drive means for moving the head over the head movement area, a control means for controlling the drive of the drive means, and an image obtained by imaging the head, with the upper part of the first support member as a two-dimensional head movement area A two-dimensional coordinate measuring machine comprising image processing means for measuring the coordinates of the measurement object on each object to be measured ,
A second support member capable of supporting a measurement object larger than the measurement object supported by the first support member is provided above the head, and the head is supported by the second support member. A two-dimensional coordinate measuring machine characterized in that an object to be measured can be imaged . 2. The two-dimensional coordinate measuring machine according to claim 1, wherein the head is supported by a first imaging unit that images a measurement object supported by the first support member, and the second support member. A two-dimensional coordinate measuring machine comprising: a second imaging unit that images a measurement object. 2. The two-dimensional coordinate measuring machine according to claim 1, wherein the head is an imaging unit that images the object to be measured, and supports the imaging unit rotatably, and the imaging direction of the imaging unit is one of up and down directions. A two-dimensional coordinate measuring machine comprising switching means for switching to

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