KR20060047748A - Second-dimensional coordinate measuring instrument - Google Patents

Abstract

When the medium screen plate 28a is to be measured, the medium screen plate 28a is disposed on the measurement table 24 on the upper portion of the measuring base 12, and the Y axis moving table 46 is placed on the Y axis frame 26. To move the head 48 along the Y-axis moving table 46 to pick up the pattern on the medium screen plate 28a by any of the camera units 56, 58 and 60, When the large screen plate 28b is to be measured, the large screen plate 28b is disposed on the frame 38 and the loader 40, and the Y-axis moving table 46 is moved along the Y-axis frame 26. At the same time, the head 48 is moved along the Y-axis moving table 46 to capture the pattern on the large screen plate 28b with the upward camera unit 62, and the respective imaging results are transferred to the PC 50. The processing results in a display on the screen of the display device 52.

Description

Second-dimensional Coordinate Measuring Instrument {Second-dimensional Coordinate Measuring Instrument}

1 is a perspective view showing an embodiment of a two-dimensional coordinate measuring machine according to the present invention

2 is a cross-sectional view taken along the line A-A of FIG.

3 is a cross-sectional view taken along the line B-B of FIG.

4 is a perspective view of a screen plate;

5 is a cross-sectional view of the head

Main code

10 2-D Coordinate Measuring Machine

12 Meter Body

14 base

16 Expectation

24 measurement table

26 Y-axis frame

28a medium screen board

28b large screen board

34 holding

36, 38 frames

40 loaders

42 pin ball

44 sliding parts

46 Y-axis moving table (X-axis frame)

48 head

48a X-axis moving table (head body)

50 pcs

56,58,60,62 camera unit

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a two-dimensional coordinate measuring device configured to image an object to be measured and to process an image obtained by the imaging to measure a dimension of the object to be measured.

As a two-dimensional coordinate measuring machine, an X axis frame in which slide movement is freely arranged orthogonally to the Y axis guide rail on a Y axis guide rail that is installed in parallel with each other, and the X axis frame is moved along the guide rail in the Y axis direction. A Y-axis drive unit for moving the lens, a detection unit arranged freely to slide in the longitudinal direction of the X-axis frame, an X-axis drive unit for moving the detection unit along the X-axis frame in the X-axis direction, and a detection unit It is known to include a light source unit for irradiating an object to be measured from below or above, and to move the detection unit in a two-dimensional direction so as to measure dimensions, coordinates, and the like of patterns on the object to be measured. (Japanese Patent Application Laid-Open No. 7-12512, pages 2 to 4, FIG. 1)]

On the other hand, as a measurement target of a two-dimensional coordinate measuring machine, a screen plate for forming a display screen of a thin thin plasma television has been widely used in recent years. The screen plate has, for example, an external dimension having an angle of about 1600 mm, and a pattern for forming a plurality of display screens is printed on the screen plate. The line width of this pattern

The accuracy of patterns can be inspected by measuring a line with a two-dimensional coordinate measuring instrument.

In addition, as a screen plate, with the increase of the size of a thin plasma television, the thing which has an external dimension of about 2500 mm square is produced, and it measures this kind of screen plate (medium screen plate). For this purpose, the size of the two-dimensional coordinate measuring instrument is increased in accordance with the shape of the screen plate.

As thinner thin-film plasma TVs become larger in the future, it is expected that a screen dimension having an approximate dimension of about 3500 mm, for example, will appear. As a result, two-dimensional coordinates for measuring this kind of screen panel (large screen panel) are required. When the measuring device is configured in accordance with the shape of the screen plate, the dimensions of the measuring body become excessively large, and the weight of the measuring device increases with an increase in the setting space.

In other words, the two-dimensional coordinate measuring machine arranges the glass measuring table on the upper part of the measuring body, arranges the Y-axis guide rails on both sides of the glass table, and freely arranges the X-axis frame on the Y-axis guide rail, The detection part as a measuring head is fixed to an axial frame. In addition, since the detector is moved along the X-axis frame in the X-axis direction and the X-axis frame is moved in the Y-axis direction along the Y-axis guide rail, when the screen plate is enlarged, As the dimension of the measuring instrument main body becomes large, the installation space increases and the measuring weight increases. As a result, the manufacturing cost is boiled and it becomes difficult to transport the measuring instrument.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-described problems in the prior art, and its object is to measure the dimensions of the measurement target on each measurement target by using a plurality of measurement targets having different specifications as an imaging target.

(Technical means to solve the problem)

In order to achieve the above object, in the two-dimensional coordinate measuring apparatus according to claim 1 of the present application, the first support member for supporting one of the plurality of objects to be measured, the one to be measured and A second supporting member for supporting the other to-be-measured object which is arranged to face each other with the one-to-be-measured object, leaving a space between them, and movably arranged to the space-measured object as the plurality of objects to be imaged; A head, which is connected to one of the supporting members, drive means for moving the space as a two-dimensional head moving area, the head over the head moving area, control means for controlling the driving of the driving means, and Image processing means for processing an image according to imaging of a head to measure a measurement target dimension (coordinate) on each of the objects to be measured, wherein the head is a side above the various objects to be measured. It was set as the structure which image | photographs the measurement object which exists in the area | region corresponding to the said head movement area | region among the static objects.

One of the measured objects having different specifications is supported by the first support member, and the other measured object is supported by the second support member connected to the first support member. Since the head portion is moved as the two-dimensional head moving area over the head moving area as the space part between the other measured objects, even if several measured objects having different specifications are used as the imaging target, each measured object is measured. By imaging the measurement object on the water with the head, it is possible to measure the dimensions (coordinates) of the measurement object on each measurement object with various measurement objects having different specifications. In addition, the measurement about several to-be-measured objects with different specifications can be performed with one measuring instrument.

In the two-dimensional coordinate measuring apparatus according to claim 2, a space portion is provided between the first support member for supporting one of the small objects to be measured and the one to be measured. A second support member for supporting the other to-be-measured object which is arranged to face each other with the one-to-be-measured object; Drive means connected to the support member to move the head over the head moving area, using a two-dimensional area larger than the existing area of the object to be measured on one of the spaces as the head moving area; Control means for controlling the driving of the driving means, and an image processing number for measuring the dimensions (coordinates) of the measurement targets on the objects to be measured by processing an image according to the imaging of the head; The provided, and the head of the first configuration the measuring unit to the support member, and was a structure comprising hayeoseo imaging the object to be measured present in the region corresponding to the head moving area of the object to be measured on said multiple object to be measured.

One of the smaller measuring objects of different sizes is supported by the first supporting member, and the other measuring object is supported by the second supporting member connected to the first supporting member. A space portion between the object under test and the other object under test, wherein the two-dimensional area wider than the existing region of the measurement object on one object is used as the head moving area, and the head is moved over the head moving area. Therefore, even if a plurality of measured objects of different sizes are used as the imaging target, the heads of the measured objects on the measured objects can be captured by the head. The dimensions (coordinates) of the above measurement object can be measured.

In addition, it is possible to measure a plurality of objects to be measured with different sizes with one measuring device. Further, a head moving region is provided with a first support member for supporting one of the smaller objects, and a second support member for supporting the other larger object, among a plurality of objects of different sizes. Since the measuring body is configured with the first supporting member, the installation space may be increased and the weight of the measuring instrument may be increased by increasing the size of the measuring object than when the measuring body is configured for a large measuring object. Can be suppressed.

The two-dimensional coordinate measuring apparatus according to claim 3 is the two-dimensional coordinate measuring apparatus according to claim 1 or 2, wherein the head includes first imaging means for imaging a measurement object on the one object to be measured, and the other side. It comprised by the 2nd imaging means which image | photographs the measurement object on a to-be-measured object.

The first image pickup means and the second image pickup means are arranged in the measurement head, and the image pickup object on each measurement object can be picked up by each image pickup means.

In the two-dimensional coordinate measuring apparatus according to claim 4, in the two-dimensional coordinate measuring apparatus according to claim 1 or 2, the head includes: imaging means for picking up a measurement target on any one of the objects to be measured; And a means for freely supporting the imaging means and for changing the imaging direction of the imaging means to the direction of any object to be measured.

By arranging the imaging means and the means for changing the imaging direction of the imaging means in the head, and changing the imaging object of the imaging means to which of the various objects to be measured, a plurality of objects to be measured by one imaging means Image can be taken.

As can be seen from the above description, according to the two-dimensional coordinate measuring apparatus of claim 1, it is possible to measure the dimensions (coordinates) of the measurement target on each measurement target by using a plurality of measurement targets having different specifications as the imaging target. It is possible to measure the dimension (coordinate) about the several to-be-measured object with a different specification with one measuring instrument.

In the two-dimensional coordinate measuring apparatus according to claim 2, it is possible to measure the dimensions (coordinates) of the measurement target on each measurement object by using a plurality of measurement objects having different sizes as the imaging target, and at the same time, It became possible to measure the dimension (coordinate) about several to-be-measured objects with one measuring instrument. Moreover, it is possible to suppress an increase in the installation space or increase in the weight of the measuring instrument with the increase in the size of the measuring object, rather than the configuration of the measuring instrument main body according to the large measuring object.

In Claim 3, it is possible to image the measurement object on each to-be-measured object by each imaging means.

In Claim 4, it is possible to image several to-be-measured objects with one imaging means.

(The best form to carry out invention)

Next, embodiment of this invention is described using an Example. 1 is a perspective view showing an embodiment of a two-dimensional coordinate measuring apparatus according to the present invention, Figure 2 is a cross-sectional view taken along the line AA of Figure 1, Figure 3 is a cross-sectional view taken along the line BB of Figure 1, Figure 4 is a perspective view of the screen plate, Figure 5 Is a cross-sectional view of the head.

In these figures, the two-dimensional coordinate measuring machine 10 has a measuring body 12 formed in a substantially box shape, and the two-dimensional coordinate measuring machine 10 is a main element constituting the first supporting member, The base 16, 26, etc. are provided and comprised. The base 14 is comprised using several frames, and the circumference | surroundings are covered with the board | plate 15. A plurality of horizontal adjustment screws 18 are fixed to the bottom of the base 14 to adjust the inclination between the base 14 and the mounting surface, and the base 14 and the base 16 and 26 on the top of the base 14. At the same time, several horizontal adjustment screws 20 are fixed to adjust the inclination between the base 14 and the Y-axis frames 26 and 16. have. Then, on the base 14, the Y-axis frames 26 and 16 are provided with the horizontal adjustment screw 20 inserted therein. That is, the base 14 adjusts the horizontal degree by the horizontal adjusting screw 18, and the Y-axis frames 26 and 16 adjust the horizontal degree by the horizontal adjusting screw 20.

On the upper side of the base 16, 26, a pair of convex portions 16a are formed to face each other, and a center drive feed screw 17 is formed in the region between the convex portions 16a. ), A measurement table 24, a Y-axis moving table (X-axis frame) 46, and the like are arranged. The center drive feed screw 17 is one element of the Y-axis drive unit for driving the head 48 in the Y-axis direction, and is disposed in the lower region of the measurement table 24, and one end in the axial direction is convex. Rotation is freely supported by the bearing (not shown) in the 16a), and the axial end side is connected to the Y-axis drive motor (not shown). Then, the screw portion (not shown) of the Y-axis moving table (X-axis frame) 46 is connected to the center drive feed screw 17, and the center drive feed screw 17 is rotated by the rotational drive of the Y-axis drive motor. When rotated, the Y-axis moving table (X-axis frame) 46 is engaged with the center drive feed screw 17 to move along the Y-axis direction. In this case, the amount of movement of the Y-axis moving table (X-axis frame) 46 is measured by the linia scale 21, and the driving of the Y-axis driving motor is controlled according to the measurement result, and the control of the Y-axis driving motor is controlled. The position of the Y-axis moving table (X-axis frame) 46 is determined on the basis.

On the other hand, a pair of convex portions 26a are formed to face each other on the upper side of the Y-axis frames 26 and 16, and the Y-axis guide rails 19 are formed on the convex portions 26a on the Y-axis (measurement main body). In (12), it is arrange | positioned in parallel with the Y-axis of XY coordinate (machine coordinate). On the Y-axis guide rail 19, the sliding part 44 of the Y-axis moving stand (X-axis frame) 46 is arrange | positioned freely along a Y-axis direction. In the Y-axis moving table (X-axis frame) 46, the X-axis drive feed screw 23 and the X-axis guide rail 25 are arranged in parallel with the X-axis (the X-axis of the XY coordinates of the measuring body 12). It is. The X-axis drive feed screw 23 is an element of the X-axis drive unit for driving the head 48 in the X-axis direction, and is disposed in an upper region of the measurement table 24 so that one end of the axis in the axial direction is illustrated (not shown). ) Is rotatably supported, and the other end side in the axial direction is connected to the X-axis drive motor 27. The screw portion (not shown) of the X-axis moving table (head body) 48a is connected to the X-axis driving feed screw 23, and the X-axis driving feed is driven by the rotational drive of the X-axis driving motor 27. When the screw 23 rotates, the X-axis moving table (head main body) 48a is engaged with the X-axis driving feed screw 23 and moves along the X-axis guide rail 25. In this case, the movement amount of the X-axis moving table (head main body) 48a is measured by the linia scale 29, and the driving of the X-axis driving motor 27 is controlled according to the measurement result, and the X-axis driving motor 27 The position of the X-axis moving stage (head main body) 48a is determined based on the control of (). Further, the Y-axis guide rails 19 are installed on both sides of the Y-axis frame 26, but the Y-axis guide rails 19 are also installed near the center of the Y-axis frame 26, and the Y-axis guide rails 19 are installed. It is also possible to make three. In addition, instead of the X-axis guide rail 25, it is also possible to use a linia motor or an air bearing. In addition, the nia scales 21 and 28 can also be made optical.

The measurement table 24 is formed in a substantially square shape with transparent glass, and is fixed to the convex part 16a of the base 16. As shown in FIG. On the measurement table 24, the medium screen plate 28a shown in FIG. 4 is arranged. The medium screen plate 28a is comprised of the screen frame 30a formed in the substantially rectangular shape using aluminum, and the screen 32a of silk material, and is comprised in the screen 32a, For example, the pattern constituting the display screen of a thin plasma television is divided into three sides and is formed approximately in the center. As the screen plate 28a disposed on the measurement table 24, a screen frame 30a having a size of, for example, 2500 mm × 2500 mm is used.

In addition, the large screen plate 28b is such that the size of the screen frame 30b is 3500 mm x 3500 mm, and the screen 32b is, for example, forming a display screen of a thin plasma television. The pattern is divided into six sides. And this large screen plate 28b is arrange | positioned above the measurement table 24, leaving a space part between the middle screen plate 28a.

Specifically, in order to make the upper area of the measuring device main body 12 a large screen plate placing area 11 for arranging the large screen plate 28b, four posts are formed on both sides of the measuring device main body 12 ( 34 is disposed along the vertical direction, and three pillars 34 are disposed along the vertical direction on the back side, and the bottom side of each pillar 34 is fixed to the side of the base 16. Frames 36 and 38 arranged along the horizontal direction are fixed to the upper side of each strut 34. Each frame 36 is arranged in a direction facing each other, each frame 38 is disposed in a direction facing each other, both ends of each frame 36 is connected to both ends of each frame 38. That is, the two frames 36 and the two ends of the two frames 38 are connected to each other to form a substantially square frame, and the loader 40 on each frame 36 and on both ends of each frame 38, respectively. Is fixed freely. The loader 40 has a substantially L-shaped cross section, and the pin 41 protruding from the bottom of the loader 40 is freely inserted into and detached from the pin hole 42 of the frame 38. . A plurality of pin holes 42 are formed in each frame 38 while maintaining a predetermined interval, and in the center of the plurality of pin holes 42, pin holes 42 for inserting the pins 41 protruding from each loader 40 are provided. ) And by inserting the pin 41 of the bottom of the loader 40 into the selected pin hole 42, the position of the frame 38 of the loader 40 can be selected. That is, when arranging the large screen plate 28b on the loader 40, the position of the loader 40 is selected to match the size of the large screen plate 28b. And when the loader 40 is arrange | positioned at the shortest part of the frame 38, a thing of 3500 mm x 3500 mm is arrange | positioned to the loader 40 by the large screen plate 28b.

In this case, when the measurement targets are screens 28a and 28b having different sizes, for example, as a measurement object having different specifications, the measuring instrument main body 12 together with the measurement table 24 is a medium screen board. (Small screen plate) The strut 34, frame 36, 38, and loader 40, which constitute the first support member for supporting 28a and are connected to the measuring instrument main body 12, are the large screen plate. The second supporting member for supporting the larger screen plate 28b is configured.

On the other hand, the head 48 is a personal computer (hereinafter referred to as a PC) that performs calculations for controlling driving of the X-axis drive unit including the X-axis drive motor 27 and the like and the Y-axis drive unit including the Y-axis drive motor. (50) is connected to the cable (not shown), the display device 52 for displaying the processing result of the PC 50, etc., the PC board for inputting various information into the PC (50) In this case, by controlling the amount and drive direction of the drive for the X-axis drive motor 27 and the Y-axis drive motor by the PC 50, the Y-axis moving table (X-axis frame) ( 46 can be moved along the Y-axis direction, or the X-axis moving table (head body) 48a can be moved along the X-axis direction.

In other words, the head 48 is a two-dimensional head moving area as a space between the medium screen plate 28a and the large screen plate 28b by driving the X-axis drive unit and the Y-axis drive unit. It is designed to move across. In this case, the X-axis drive unit and the Y-axis drive unit constitute drive means for driving the head 48, and the PC 50 constitutes control means for controlling the drive of the drive means.

In addition, as shown in Fig. 5, the head 48 is a first imaging means which uses the medium screen plate 28a as the measurement target and the imaging target, and includes three types of downward-facing camera units 56; (58) and (60), the second imaging means which uses the large screen plate 28b as a measurement object and an imaging object is comprised by the upward camera unit 62. The camera unit 56 includes a wide field microscope 56a and a CCD camera 56b, and the camera unit 58 includes a medium magnification microscope 58a and a CCD camera 58b. The camera unit 60 is comprised with the high magnification microscope 60a and the CCD camera 60b. On the other hand, the camera unit 62 is comprised, for example with the medium magnification microscope 62a and the CCD camera 62b.

And the image (image data) by the imaging of the camera units 56, 58, 60, 62 is transmitted to the PC 50 which inserted the cable (not shown), and the image is processed by the PC 50, Based on the processing result, the measurement object (e.g., pattern) on the medium screen board 28a or the large screen board 28b is measured, and the measurement result is displayed on the screen of the display device 52. In other words, the PC 50 is configured to constitute image processing means.

With the above configuration, when the medium screen plate 28a is disposed on the measurement table 24, the head 48 moves the upper head moving area of the screen plate 28a to the X-axis frame 46 based on the control of the PC 50. And move along the Y-axis frame 26 and then the head 48 moves along the X-axis frame 46 to position the camera unit among the camera units 56, 58 and 60. The selected and selected camera unit is used for imaging the screen plate 28a on the measurement table 24, and the image by the imaging is processed by the PC 50, and the processing result is displayed on the display device 52. Is displayed on the screen. By repeating this process, the head 48 is moved over the head moving area, thereby measuring the length of the measurement target on the medium screen plate 28a, for example, the smallest dimension or the pitch of the pattern. It is possible to measure the back sequentially.

That is, since the area of the measurement object (pattern) existing on the medium screen plate 28a is narrower than the maximum head moving area where the head 48 can move, the head 48 is moved over the head moving area. It is possible to sequentially measure a very small dimension of the pattern on the medium screen plate 28a.

On the other hand, when the large screen plate 28b is carried in instead of the medium screen plate 28a as the object to be measured and the large screen plate 28b is fixed on the loader 40, on the basis of the control of the PC 50. When the head 48 moves to the lower area of the large screen plate 28b, and positioning is performed, imaging of the large screen plate 28b is performed by the camera unit 62. When the image by the imaging of the camera unit 62 is processed by the PC 50, this processing result is displayed on the screen of the display device 52. By repeating this process, by moving the head 48 over the head moving area, it is possible to sequentially measure, for example, very small dimensions of the pattern as a measurement target on the large screen plate 28b.

In this case, since the measurement object (pattern) on the large screen plate 28b exists over an area larger than the measurement object (pattern) on the medium screen plate 28a, the head 48 has a medium screen plate ( The two-dimensional moving area wider than the moving area for 28a) is moved as the head moving area over the head moving area. Then, when the existence area of the measurement object (pattern) existing on the large screen plate 28b and the maximum head moving area in which the head 48 is movable correspond, the head 48 is moved by moving the head 48 over the head moving area. Even the smallest dimension of the measurement object on the screen plate 28b can be measured sequentially.

According to the present invention, as shown in one embodiment, in the space portion between the medium screen plate 28a and the large screen plate 28b, a two-dimensional area wider than the existing area of the measurement target on the medium screen plate 28a. Since the head 48 is moved as the head moving area over the head moving area, the screen plates 28a and 28b can be used even if several screen plates 28a and 28b having different sizes are used as the imaging target. ) It is possible to measure the dimensions of the measurement object. In addition, it is possible to measure the dimension of the measurement object on the plurality of screen plates 28a and 28b having different sizes by one two-dimensional coordinate measuring instrument 10. That is, although it is impossible to simultaneously measure the dimensions of the measurement object on the plurality of screen plates 28a and 28b having different sizes, each screen plate 28a and 28b is carried in, and each screen plate is carried out. By changing the measurement time for (28a) and (28b), it is possible to measure for each screen plate 28a (28b) even with one two-dimensional coordinate measuring machine (10).

In addition, the present invention constitutes the first support member in the measuring base body 12 supporting the medium screen plate 28a together with the measuring table 24, as in the above embodiment, and is connected to the measuring base body 12. (Iii) a second support member for supporting the large screen plate 28b in the frame 34, the frame 36, 38 and the loader 40, and the first support member and the second support member in the head moving area. By placing them face to face with each other, it is possible to suppress the increase in the installation space or increase the weight of the measuring instrument, and increase the manufacturing cost than when the measuring body 12 is configured in accordance with the size of the large screen panel 28b. It is possible to suppress and to facilitate the transport of the measuring instrument.

In addition, the present invention has been described with respect to the imaging the medium screen plate 28a with the camera units 56, 58, 60, and the large screen plate 28b with the camera unit 62 as described above. Instead of installing the camera unit 62 according to the present invention, for example, the camera units 56, 58, 60 are used as the camera units, and the camera units 56, 58, 60 are freely supported. At the same time, a switching means for changing the imaging direction of the camera units 56, 58, 60 in one of the screen plates 28a, 28b is provided to replace the camera units 56, 58, 60. It is also possible to adopt a configuration for use as an upward camera unit or a downward camera unit.

Claims (4)

A space between the first support member for supporting one of the objects to be measured and the one to be measured, and the other of the ones being arranged to face each other A second support member for supporting the object to be measured, a head disposed to move the plurality of objects to be imaged as the object to be moved into the space portion, and the one space supported by the one support member to move the head in two dimensions. As an area, drive means for moving the head over the head moving area, control means for controlling the driving of the drive means, and an image by imaging of the head are processed to provide an object to be measured on each of the measured objects. An image processing means for measuring dimensions (coordinates) is provided, and the head captures a measurement object existing in an area corresponding to the head moving area among the measurement objects on the plurality of objects to be measured. Two-dimensional coordinate measuring machine (2 次 元 座標 測定 機) A first support member for supporting one of the smallest measured objects, and a space between the one to be measured, and facing each other. A second support member for supporting the other to-be-measured object, a head arranged to move the plurality of objects to be imaged to the space part as an object to be imaged, and the space part connected to the one support member. A driving means for moving the head over the head moving area, with a two-dimensional area wider than an existing area of the object to be measured on one object to be measured, and control means for controlling the driving of the driving means; And image processing means for processing an image by imaging of the head to measure the dimensions (coordinates) of the measurement target on each of the objects to be measured, and measuring basic with the first supporting member. A two-dimensional coordinate measuring device configured to capture a measuring object existing in an area corresponding to the head moving area among the measuring objects on the plurality of objects to be measured. The method according to claim 1 or 2, The head includes a first imaging means for imaging the measurement object on the one object to be measured, and a second imaging means for imaging the measurement object on the other object to be measured. The method according to claim 1 or 2, The head may be any one of a plurality of objects to be picked up to pick up an image to be measured on the object to be measured, and freely support the image pick-up means, and the imaging direction of the image pickup means may be measured. Two-dimensional coordinate measuring device comprising a switching means for changing the direction of water

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