CN114384083A

CN114384083A - Panel visual detection device and panel detection equipment

Info

Publication number: CN114384083A
Application number: CN202111545226.6A
Authority: CN
Inventors: 殷亚男; 朱小明; 匡梦良; 许超; 张鑫
Original assignee: Suzhou Mega Technology Co Ltd
Current assignee: Suzhou Mega Technology Co Ltd
Priority date: 2021-12-16
Filing date: 2021-12-16
Publication date: 2022-04-22

Abstract

The invention provides a panel visual detection device and panel detection equipment, wherein the panel detection device comprises a seat body, and a particle detection module, an edge inspection module and an appearance detection module which are arranged on the seat body, wherein the appearance detection module is positioned above a detection area, and the particle detection module and the edge inspection module are positioned below the detection area, wherein the particle detection module comprises a particle detection camera and a particle detection camera adjusting component for adjusting the posture of the particle detection camera; the edge inspection module comprises an edge inspection camera and an edge inspection camera adjusting component for adjusting the posture of the edge inspection camera; and the appearance detection module comprises an appearance detection camera and an appearance detection camera adjusting component used for adjusting the posture of the appearance detection camera. The panel visual detection device realizes the multifunctional detection purpose of the panel visual detection device. And for the production of the display panel, the cost invested for the panel inspection can be reduced.

Description

Panel visual detection device and panel detection equipment

Technical Field

The invention relates to the technical field of display panel detection, in particular to a panel visual detection device and panel detection equipment.

Background

In the production process of the display panel, the appearance of the display panel and the binding of the Integrated Circuit (IC) and the substrate are usually detected by a panel vision inspection device. For different types of display panels, for example, products using technologies such as Chip On Glass (COG), Film On Glass (FOG), and IC on glass (COF), the differences between detection items and detection parameters are large, and thus the panel vision inspection apparatus usually includes a plurality of inspection modules. Every kind detects the module and can detect single project, to different kinds of display panel, then needs different detection module to detect it.

However, at present, the detection of the display panel is performed on a production line, and the variety of the display panel is wide, and it is not only costly but also impractical to provide a production line suitable for each type of display panel. Therefore, a panel visual inspection apparatus is needed, which can be used for inspecting various types of display panels.

Disclosure of Invention

In order to at least partially solve the problems in the prior art, according to an aspect of the present invention, there is provided a panel vision inspection apparatus, including a base, and a particle detection module, an edge inspection module and an appearance detection module, which are disposed on the base, wherein the appearance detection module is located above a detection area, and the particle detection module and the edge inspection module are located below the detection area, and the particle detection module includes a particle detection camera and a particle detection camera adjustment assembly for adjusting a posture of the particle detection camera; the edge inspection module comprises an edge inspection camera and an edge inspection camera adjusting component for adjusting the posture of the edge inspection camera; and the appearance detection module comprises an appearance detection camera and an appearance detection camera adjusting component used for adjusting the posture of the appearance detection camera.

Exemplarily, the panel visual inspection device further comprises a first guide rail extending along the transverse direction, and the base is slidably connected with the first guide rail, so that the particle detection module, the edge inspection module and the appearance detection module move synchronously when performing the visual inspection.

Illustratively, the housing comprises: the particle detection module and the edge inspection module are arranged on the first support; and the second support is fixed to the first support, and the appearance detection module is arranged on the second support.

Illustratively, the panel visual inspection device further comprises a second guide rail parallel to the first guide rail, and the second support is connected with the second guide rail in a sliding manner.

Exemplarily, the particle inspection camera and the edge inspection camera are sequentially arranged along the transverse direction, and the panel visual inspection device further comprises a controller, wherein the controller is used for controlling the base to move to a preset position along the transverse direction after the particle inspection camera finishes the inspection, so that the edge inspection camera performs the inspection.

Illustratively, the particle detection camera comprises a fixed frame, a lens module and a camera module, wherein the lens module is mounted on the fixed frame, the particle detection camera adjusting assembly comprises a first adjusting unit, the first adjusting unit is fixed on the fixed frame, and the first adjusting unit is used for adjusting the angle of the camera module relative to the lens module.

Exemplarily, the particle detection camera adjusting assembly further comprises a second adjusting unit disposed between the lens module and the fixing frame for adjusting an angle of the lens module relative to the fixing frame, so that an optical axis of the lens module is perpendicular to the panel to be detected in the detection area.

Illustratively, the edge inspection camera adjustment assembly includes: fix the first displacement platform on the pedestal, the camera setting is examined on patrolling the limit on first displacement platform, wherein, first displacement platform is used for along the transverse direction, the position of camera is examined on patrolling the limit is adjusted to two directions in longitudinal direction and the vertical direction, the transverse direction is on a parallel with the particle and detects the module, module and outward appearance detection module synchronous motion's when carrying out visual detection direction is examined in the patrol limit, the panel of waiting to detect in the vertical direction perpendicular to detection zone, longitudinal direction perpendicular to transverse direction and vertical direction.

Illustratively, the patrol camera adjusting assembly further includes a third adjusting unit for adjusting a position of the patrol camera in a third one of the lateral direction, the longitudinal direction, and the vertical direction.

Illustratively, the appearance inspection camera adjustment assembly includes: fix the second displacement platform on the pedestal, outward appearance detection camera sets up on the second displacement platform, wherein, the second displacement platform is used for along the transverse direction, the position of outward appearance detection camera is adjusted to two directions in longitudinal direction and the vertical direction, the transverse direction is on a parallel with the particle detection module, the module is examined on patrol and the direction of outward appearance detection module simultaneous movement when carrying out visual detection, the panel of waiting to detect in the vertical direction perpendicular to detection zone, longitudinal direction perpendicular to transverse direction and vertical direction.

Illustratively, the appearance detecting camera adjusting assembly further includes a fourth adjusting unit for adjusting a position of the appearance detecting camera in a third direction among the lateral direction, the longitudinal direction, and the vertical direction.

According to another aspect of the present invention, there is also provided a panel inspection apparatus. The panel detection device comprises the panel visual detection device.

The panel visual detection device provided by the invention comprises a particle detection module, an edge inspection module and an IC appearance detection module, wherein the detection modules can be adjusted in the moving range according to requirements, so that the panel visual detection device not only can be used for detecting display panels of the same type but different sizes, but also can be used for detecting different items in the display panels of different types, and the multifunctional detection purpose of the panel visual detection device is realized. For the production of display panels, the cost invested for panel inspection can be reduced.

A series of concepts in a simplified form are introduced in the summary of the invention, which is described in further detail in the detailed description section. This summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter.

The advantages and features of the present invention are described in detail below with reference to the accompanying drawings.

Drawings

The following drawings of the invention are included to provide a further understanding of the invention. The drawings illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention. In the drawings, there is shown in the drawings,

FIG. 1 is a schematic view of a panel inspection apparatus according to an exemplary embodiment of the present invention

FIG. 2 is a perspective view of a panel visual inspection device according to an exemplary embodiment of the present invention;

FIG. 3 is a perspective view of the panel vision inspection device and peripheral components of FIG. 2 at another angle;

FIG. 4 is a perspective view of a particle detection module according to an exemplary embodiment of the present invention;

FIG. 5 is an exploded view of the particle detection module of FIG. 4;

FIG. 6 is a perspective view of a module for edge inspection according to an exemplary embodiment of the present invention;

FIG. 7 is an exploded view of the edge patrol module of FIG. 6;

FIG. 8 is a perspective view of a module for edge tracking according to an exemplary embodiment of the present invention; and

fig. 9 is an exploded view of the edge patrol module shown in fig. 8.

Wherein the figures include the following reference numerals:

10. a panel vision inspection device; 20. a detection platform; 22. detecting a platform guide rail; 30. a feeding module; 32. carrying the guide rail; 40. a blanking module; 100. a particle detection module; 1200. a particle detection camera; 1210. a lens module; 1220. a camera module; 1230. a fixed mount; 1231. a lens fixing seat; 1232. a carrier base; 1300. a first adjusting unit; 1310. an adjustment mechanism stator; 1320. an adjusting mechanism rotor; 1312. a bump; 1322. a mounting seat; 1324 and 1326, adjustment holes; 1112a, 1112b, 1112c, and 1112d, mounting holes; 200. a border inspection module; 2200. a border inspection camera; 2210. a first displacement stage; 2212. a first longitudinal adjustment knob; 2214. a first vertical adjustment knob; 2220. a first border inspection fixing frame; 2230. a second border inspection fixing frame; 300. an appearance detection module; 3200. an appearance detection camera; 3210. a second displacement stage; 3212. a second lateral adjustment knob; 3214. a second vertical adjustment knob; 3220. a first appearance detection fixing frame; 3230. a second appearance detection fixing frame; 400. a base body; 410. a first support; 420. a second support; 500. detecting a region; 610. a first guide rail; 620. a second guide rail.

Detailed Description

In the following description, numerous details are provided to provide a thorough understanding of the present invention. One skilled in the art will recognize, however, that the following description is merely illustrative of a preferred embodiment of the invention and that the invention may be practiced without one or more of these specific details. In addition, some technical features that are well known in the art are not described in order to avoid confusion with the present invention.

According to one aspect of the present invention, a panel visual inspection device is provided. According to another aspect of the present invention, there is provided a panel inspection apparatus including any one of the panel visual inspection devices. Fig. 1 shows a panel inspection apparatus according to an exemplary embodiment of the present invention, which may include a handling module and/or an inspection platform 20 in addition to a panel visual inspection device 10. The carrying module is used for carrying the panel to be detected. Illustratively, the handling module may include two modules, namely a loading module 30 and a unloading module 40. The loading module 30 is used for transporting the panel to be detected from the loading position to the detection platform 20. The blanking module 40 is used for transporting the panel to be detected from the detection platform 20 to a blanking position. It is understood that the feeding module 30 and the blanking module 40 may not be distinguished, i.e. the handling module may also comprise only one module, and the feeding and blanking operations are performed by the module. The inspection platform 20 is movable. The movement of the inspection platform 20 includes translation and/or rotation of the inspection platform 20 in a horizontal plane. The inspection platform 20 moves mainly to transport the panel to be inspected thereon to the inspection area of the panel visual inspection device 10. The panel visual inspection device 10 is used for performing visual inspection on a panel to be inspected.

Illustratively, as shown in fig. 1, the feeding module 30 may grasp the panel to be inspected from an upstream feeding position. The loading module 30 may be movably disposed on the carrying rails 32. The conveyance rail 32 extends in the lateral direction (i.e., the X-axis direction). The loading module 30 can transport the grabbed panel to be detected to the detection platform 20 along the transport rail 32. The inspection platform 20 may be movably disposed on an inspection platform rail 22. The inspection platform rail 22 may extend along a longitudinal direction (i.e., Y-axis direction) perpendicular to the lateral direction within the horizontal plane. The inspection platform 20 may transport the panel to be inspected along the inspection platform rail 22 to the visual inspection area of the panel visual inspection device 10. The panel visual inspection device 10 may be disposed rearward and below the conveyance rail 32. After inspection is complete, inspection platform 20 may be returned along inspection platform rails 22 and the panel may be transported by blanking module 40 to a blanking station 920. The blanking module 40 can also be moved along the transport rail 32.

As shown in fig. 2-3, the panel vision inspection apparatus 10 may include a base 400, and a particle detection module 100, a border detection module 200, and an appearance detection module 300 disposed on the base 400. The appearance inspection module 300 is located above the inspection area 500, and as shown in fig. 3, the particle inspection module 100 and the edge inspecting module 200 are located below the inspection area 500. The particle detection module 100 may include a particle detection camera 1200 and a particle detection camera adjustment assembly. The particle detection camera adjustment component is used to adjust the pose of the particle detection camera 1200. The "pose" includes the position and angle of the camera. The particle detection camera 1200 includes, for example, a DIC detection camera for detecting particle distribution, particle offset, bubble detection, foreign object detection, and the like. The edge inspection module 200 includes an edge inspection camera 2200 and an edge inspection camera adjustment assembly. The patrol camera adjusting component is used to adjust the posture of the patrol camera 2200. The edge inspecting camera 2200 is used for inspecting the appearance of the substrate, such as the presence or absence of cracks, scratches, or edge chipping. The appearance inspection module 300 includes an appearance inspection camera 3200 and an appearance inspection camera adjustment assembly. The appearance detection camera adjustment assembly is used to adjust the pose of the appearance detection camera 3200. The appearance inspection camera 3200 is used to inspect the appearance of the integrated circuit, particularly edge chipping, corner chipping, and the like.

The panel visual inspection device 10 provided by the invention comprises a particle detection module 100, a border inspection module 200 and an IC appearance detection module 300, and the detection modules can be adjusted in the moving range according to requirements, so that the panel visual inspection device 10 can be used for detecting the display panels of the same type but different sizes and detecting different items in the display panels of different types, and the multifunctional detection purpose of the panel visual inspection device 10 is realized. For the production of display panels, the cost invested for panel inspection can be reduced.

Illustratively, the panel visual inspection device 10 may further include a first guide rail 610 extending in a lateral direction (i.e., an X-axis direction). The base 400 is slidably connected to the first guide rail 610, so that the particle detecting module 100, the edge inspecting module 200, and the IC appearance detecting module 300 move synchronously during the visual inspection. The particle inspection module 100, the edge inspection module 200, and the IC appearance inspection module 300 can scan along the edge of the panel to be inspected and perform corresponding visual inspection on the edge. In some cases, some types of panels to be inspected may not need to be subjected to one or more inspections, and thus one or more of the particle inspection module 100, the edge inspection module 200, and the IC appearance inspection module 300 may not need to be operated in each scan. Of course, the particle inspection module 100, the edge inspecting module 200, and the IC appearance inspecting module 300 may also operate simultaneously.

Illustratively, the particle detection module 100 and the edge patrol module 200 are sequentially disposed in the transverse direction. Because particle detection module 100 and module 200 are examined to patrol and limit to set gradually along the transverse direction in the below of detection area 500, consequently at the in-process of scanning along the transverse direction at every turn, can only guarantee that particle detection module 100 and module 200 is examined to patrol and limit to examine from waiting to wait to examine the one end of panel and scan the other end, consequently, if there is the requirement to particle detection module 100 and module 200 is examined to patrol and limit to examine detection area 500, particle detection module 100 and module 200 can work respectively along the scanning process of transverse direction twice. The panel vision inspection apparatus 10 may further include a controller for controlling the base 400 to move to a predetermined position in the transverse direction after the particle inspection camera 1200 completes the inspection, so that the edge inspection camera 2200 performs the inspection. The predetermined position may be a start position of the scanning by the roving camera 2200.

Illustratively, the housing 400 may include a first seat 410 and a second seat 420. The first support 410 is slidably coupled to the first rail 610. The particle detection module 100 and the edge inspection module 200 are both disposed on the first support 410. The second mount 420 is fixed to the first mount 410. The appearance inspection module 300 is disposed on the second support 420. The first support 410 and the second support 420 are required to have sufficient rigidity to ensure the stability of the movement of the particle detecting module 100, the edge inspecting module 200, and the appearance inspecting module 300. The first support 410 may be substantially plate-shaped. The particle detection module 100 and the edge inspection module 200 are fixed to the front side of the plate-shaped structure, and the rear side of the plate-shaped structure is slidably connected to the first guide rail 610. The second support 420 may have an L-shape, the appearance inspection module 300 may be fixed to a front side of the L-shaped structure, and a bottom of the L-shaped structure may be fixed to a top of the first support 410. Also, in order to improve the stability of the second support 420, a triangle may be provided on the rear surface of the L-shaped structure. The L-shaped second bracket 420 may half-enclose the first guide rail 610 together with the first bracket 410.

Illustratively, the panel visual inspection device 10 may further include a second guide rail 620 parallel to the first guide rail 610. The second bracket 420 is slidably coupled to the second guide rail 620. The second guide rail 620 may play a role in stabilizing the movement of the seat body 400. The first guide rail 610 may also play a supporting role in addition to guiding. The second guide rail 620 may mainly play a role of stabilizing movement. Thus, the second rail 620 may be relatively thin compared to the first rail 610. The second guide rail 620 may be disposed rearward of the first guide rail 610. The rear end of the L-shaped second bracket 420 may be slidably coupled to the second guide rail 620.

Because the indentation detection needs to shoot images under high-speed movement, the resolution ratio is 0.7 mu m, in order to ensure the definition, the movement distance in the exposure time can not exceed 1 pixel, and the calculation is carried out according to the fastest 100KHz line frequency of a camera,

the scanning speed is resolution x line frequency,

the maximum scan speed can be calculated to be 70mm/s and the exposure time to be 10 mus. Generally, under the indoor fluorescent lamp illumination condition, the exposure time of a camera is required to be about 30ms, and the duration of the camera is 3000 times, so that the imaging environment is poor.

The imaging environment of the particle detection camera 1200 can be improved to some extent by adjusting the degree of righting of the particle detection camera 1200. Illustratively, the particle detection camera 1200 includes a mount 1230, a lens module 1210, and a camera module 1220. The lens module 1210 is mounted on the holder 1230. The camera module 1220 may be rotatably connected to the lens module 1210 about an optical axis of the lens module 1210. Illustratively, the lens module 1210 and the camera module 1220 may be screw-coupled to facilitate adjustment of the respective angles. The particle detection camera adjustment assembly includes a first adjustment unit 1300, and the first adjustment unit 1300 is fixed on a fixing frame 1230. The first adjustment unit 1300 is used to adjust the angle of the camera module 1220 with respect to the lens module 1210.

The fixing frame 1230 can be fixed on the housing 400 or be integrated with the housing 400. In order to avoid the deterioration of the detection accuracy caused by the vibration of the particle detecting camera 1200 during the movement, the fixing frame 1230 and the base 400 should have sufficient rigidity and stability. In the illustrated embodiment, the fixing frame 1230 may include a lens fixing base 1231 and a carrying base 1232. The lens holder 1231 and the mount 1232 may be separately provided. However, in other embodiments not shown, the lens holder 1231 and the carrier holder 1232 may be integrated. The carrier 1232 is fixed to the base 400. The lens module 1210 may be mounted on a holder 1230, for example, a lens holder 1231.

As mentioned above, the imaging environment for detecting the indentation is severe, and the Time Delay Integration (TDI) imaging mode can improve the shooting effect to a certain extent. Taking 8-stage TDI imaging as an example, when a camera moves one pixel size along a time delay integration direction (TDI integration direction for short), one exposure is triggered, the camera is exposed for 8 times in total, induced charges generated by each exposure are also gradually moved backwards, and finally all charges are output after the 8 th exposure to acquire an image.

In the case where the particle detection camera 1200 employs time delay integration imaging, the first adjustment unit 1300 is configured to adjust the angle of the camera module 1220 with respect to the lens module 1210 such that the time delay integration direction of the camera module 1220 is perpendicular to the pixel arrangement direction. This ensures the sharpness of the captured image, which otherwise would be blurred or ghosted. The pixel arrangement direction is the direction of one or more columns of pixels exposed each time.

Illustratively, as shown in fig. 4-5, the first adjustment unit 1300 may include an adjustment mechanism stator 1310, an adjustment mechanism mover 1320, and an adjustment assembly. The adjustment mechanism stator 1310 is fixed to a mount 1230, such as to a carrier 1232 of the mount 1230. The adjustment mechanism mover 1320 is fixed to the camera module 1220. The lens module 1210 and the camera module 1220 may be threaded such that the lens module 1210 and the camera module 1220 may be fine-tuned within a small angle (e.g., 5 degrees). The adjustment assembly is position adjustably disposed on one of the adjustment mechanism stator 1310 and the adjustment mechanism mover 1320, and the adjustment assembly abuts against the other of the adjustment mechanism stator 1310 and the adjustment mechanism mover 1320. The adjustment assembly changes the position of the adjustment mechanism stator 1310 relative to the adjustment mechanism mover 1320 during this adjustment to adjust the angle of the camera module 1220 relative to the lens module 1210. Illustratively, one end of the adjustment assembly may abut against one of the adjustment mechanism stator 1310 and the adjustment mechanism mover 1320 (referred to simply as the first), while the other end may be adjustably disposed on the other of the adjustment mechanism stator 1310 and the adjustment mechanism mover 1320 (referred to simply as the second). Thus, when the adjustment assembly is repositioned on the second, the first can be repositioned relative to the second, thereby changing the relative positions of the adjustment mechanism stator 1310 and the adjustment mechanism mover 1320, and thus changing the angle of the camera module 1220 relative to the lens module 1210.

For example, the adjustment assembly may include a positioning post along which a plurality of first pin holes may be disposed. One end of the positioning column can be abutted against the first one, and the second one can be provided with a second pin hole. The adjustment assembly may also include a locating pin. The relative positions of the adjustment mechanism stator 1310 and the adjustment mechanism mover 1320 may be changed by aligning the second pin hole with a different first pin hole and passing a locating pin through the aligned first and second pin holes.

Illustratively, a boss 1312 is provided on one of the adjustment mechanism stator 1310 and the adjustment mechanism mover 1320, and a mount 1322 is provided on the other of the adjustment mechanism stator 1310 and the adjustment mechanism mover 1320. The adjustment assembly is adjustably positioned on the mount 1322 and abuts the boss 1312. In the illustrated embodiment, the nub 1312 is fixed to the adjustment mechanism stator 1310. The protrusion 1312 and the adjustment mechanism stator 1310 may be integrally formed, or may be separately formed and then connected by any suitable connection. The mounting seat 1322 is fixed to the adjustment mechanism mover 1320. The mounting seat 1322 and the adjustment mechanism mover 1320 may be integrally formed, or may be separately formed and then connected by any suitable connection method. Conversely, it is also possible that the protrusion 1312 is fixed to the adjustment mechanism mover 1320 and the mounting seat 1322 is fixed to the adjustment mechanism stator 1310. So set up, can be convenient for set up the adjusting part.

Illustratively, the mount 1322 surrounds the boss 1312. The mounting seat 1322 may have a ring shape, and the mounting seat 1322 surrounds the protrusion 1312 to prevent the protrusion 1312 from being collided, thereby preventing the relative position of the two from being changed. Alternatively, the mounting seat 1322 may have a hollow structure, and the protrusion 1312 may be disposed in the hollow structure. The adjustment assembly may include a first adjustment member and a second adjustment member. Illustratively, the first adjustment member may comprise an adjustment pin or a threaded adjustment member. Illustratively, the second adjustment member may comprise an adjustment pin or a threaded adjustment member. The mounting seat 1322 may be provided with

adjustment holes

1324 and 1326, and the adjustment holes 1324 and 1326 may be respectively located at both sides of the protrusion 1312. An adjustment pin or threaded adjustment may be passed through the adjustment hole to abut the boss 1312 and also to hold the adjusted position stationary relative to the mount 1322. The first and second adjusting members are adjustably positioned on the mounting seat 1322 on both sides of the protrusion 1312, respectively, and abut against the protrusion 1312 from both sides of the protrusion 1312, respectively. The first and second adjusting members abut against the protrusion 1312 from both sides to prevent the protrusion 1312 from being shifted in position, so that the protrusion 1312 is stably maintained at the adjusted position.

Illustratively, the adjustment assembly may be a threaded adjustment assembly. The adjustment assembly is threadedly coupled with one of the adjustment mechanism stator 1310 and the adjustment mechanism mover 1320 such that the adjustment assembly is positionally adjustably disposed on the one of the adjustment mechanism stator 1310 and the adjustment mechanism mover 1320. The relative position between the adjusting mechanism stator 1310 and the adjusting mechanism rotor 1320 can be finely adjusted by adopting the threaded adjusting component, so that the angle of the camera module 1220 is accurately controlled, and the imaging quality is ensured. And the adjustment operation of the thread adjusting component is more convenient.

In the above description, the first adjustment unit 1300 is mainly used to adjust the angle of the camera module 1220. Illustratively, the particle detection camera adjustment assembly further includes a second adjustment unit disposed between the lens module 1210 and the fixing frame 1230, for adjusting an angle of the lens module 1210 relative to the fixing frame 1230, so that an optical axis of the lens module 1210 is perpendicular to the panel to be detected in the detection area 500.

In other embodiments, the adjustment mechanism may include a second adjustment unit. The second adjusting unit is disposed between the lens module 1210 and the fixing frame 1230, and is used for adjusting an angle of the lens module 1210 relative to the fixing frame 1230, so that an optical axis of the lens module 1210 is perpendicular to the panel to be detected in the detection area 500. By making the lens module 1210 perpendicular to the panel to be detected, the brightness index of the lens module 1210 can be improved, and the imaging quality is improved.

In one embodiment, the lens module 1210 can be coupled to the holder 1230, such as to the lens holder 1231, by a plurality of fasteners. The lens holder 1231 is provided with a plurality of mounting

holes

1112a, 1112b, 1112c, and 1112 d. The lens module 1210 is also correspondingly provided with a plurality of mounting holes (not shown). A plurality of fasteners (e.g., threaded fasteners) may pass through the corresponding two mounting holes to fix the lens module 1210 to the lens holder 1231. The plurality of fasteners may be non-linearly arranged. That is, at least three fasteners are required. They may be arranged at the vertices of any polygon. As shown, four mounting

holes

1112a, 1112b, 1112c, and 1112d illustrate the location of multiple fasteners. These mounting

holes

1112a, 1112b, 1112c, and 1112d are arranged at four vertices of a rectangle. Based on this, the second adjusting unit may include a step-up member fitted over one or more of the plurality of fastening members. The raising member is, for example, a spacer. As shown in fig. 2, adding the step-up member at the mounting

holes

1112a and 1112d on the left side or the mounting

holes

1112c and 1112b on the right side can rotate the lens module 1210 left and right substantially about the axis of the lens module 1210. Adding a padding at the mounting

holes

1112a and 1112b on the upper side or 1112c and 1112d on the lower side can adjust the pitch angle of the lens module 1210. Of course, the step-up member may be added only at one of the left-side mounting holes or one of the right-side mounting holes. Similarly, it is also possible to add a step-up member only at one of the upper side mounting holes, or one of the lower side mounting holes. But also can realize the adjustment of different angles by changing the height of the padding member. The person skilled in the art can choose where to add the padding elements according to the actual situation.

The angle of the lens module 1210 is adjusted by selectively arranging the heightening members on the plurality of fasteners connecting the lens module 1210 and the fixing frame 1230, and the adjustable angle range is large, the adjusting dimension is large, so that the adjustment is more convenient, the cost of the whole device is not increased, and the adjustment is economical and effective.

Illustratively, the number of the plurality of fasteners is four, and the plurality of fasteners are distributed at four vertices of a rectangle. Four fasteners increase the adjustment angle and increase the adjustment dimension compared to three fasteners. Compared with five or more fasteners, the four fasteners do not significantly affect the adjusting effect, and the structure is simpler.

For example, as shown in fig. 6-7, the roving camera adjustment assembly may include a first displacement platform 2210. First displacement platform 2210 is fixed to housing 400. The roving camera 2200 is disposed on a first displacement platform 2210. The first displacement stage 2210 is used to adjust the position of the edge inspection camera 2200 in two directions of a lateral direction (i.e., an X-axis direction), a longitudinal direction (i.e., a Y-axis direction), and a vertical direction (i.e., a Z-axis direction). The transverse direction is parallel to the direction in which the particle detection module 100, the edge inspection module 200, and the appearance detection module 300 move synchronously when performing the visual inspection. The vertical direction is perpendicular to the panel to be detected in the detection area. The longitudinal direction is perpendicular to the transverse direction and the vertical direction.

In the illustrated embodiment, the first displacement platform 2210 may include a first longitudinal adjustment knob 2212 that adjusts the position in the longitudinal direction and a first vertical adjustment knob 2214 that adjusts the position in the vertical direction. By the first displacement platform 2210, the position of the edge finder camera 2200 can be changed in the longitudinal direction and the vertical direction. The module 200 may further include a first polling fixing frame 2220. The first displacement platform 2210 can be installed on a first scanning fixture 2220, and the first scanning fixture 2220 is installed on the base 400. By providing the first displacement platform 2210, the position of the edge inspection camera 2200 can be adjusted conveniently and accurately. In other embodiments, the adjustment direction of the first displacement platform 2210 may be changed by changing the mounting orientation of the first displacement platform 2210.

Illustratively, the patrol camera adjusting assembly may further include a third adjusting unit for adjusting a position of the patrol camera 2200 in a third direction among the lateral direction, the longitudinal direction, and the vertical direction. The third adjustment unit may supplement the unadjusted orientation of the first displacement table 2210. The third adjustment unit in cooperation with the first displacement platform 2210 allows the position of the edge inspection camera 2200 to be adjusted in three directions, X, Y and Z-axis. Illustratively, the third adjusting unit may include a slide rail and a slider, and the slider may be slidably coupled to the slide rail to adjust the relative position.

In the illustrated embodiment, the edge patrol module 200 may further include a second edge patrol fixture 2230, where the second edge patrol fixture 2230 is connected between the first displacement platform 2210 and the edge patrol camera 2200. Alternatively, the edge patrol camera 2200 may be fixedly coupled to the second edge patrol fixing frame 2230, the aforementioned slide rail and the slider may be respectively disposed on the second edge patrol fixing frame 2230 and the first displacement platform 2210, and the slide rail may extend in the X-axis direction, thereby changing the relative positions of the second edge patrol fixing frame 2230 and the first displacement platform 2210 in the X-axis direction. Illustratively, the slide rail may be a U-shaped slot. Of course, the positions of the slide rails and the slide blocks on the second routing fixture 2230 and the first displacement platform 2210 can be interchanged. For example, one of a slide rail and a slider extending along the X-axis may be provided on the first routing fixture 2220 and the other may be provided on the first displacement platform 2210. For example, one of a slide rail and a slider extending along the X axis may be provided on the endscan camera 2200 and the other may be provided on the second endscan mount 2230.

Illustratively, as shown in fig. 8-9, the appearance inspection camera adjustment assembly can include a second displacement platform 3210. The second displacement platform 3210 is fixed to the base 400. The appearance detecting camera 3200 is provided on the second displacement stage 3210. The second displacement stage 3210 is used to adjust the position of the appearance detecting camera 3200 in two directions of a lateral direction, a longitudinal direction, and a vertical direction.

In the illustrated embodiment, the second displacement platform 3210 may include a second lateral adjustment knob 3212 to adjust the lateral position and a second vertical adjustment knob 3214 to adjust the vertical position. By the second displacement stage 3210, the position of the appearance detecting camera 3200 can be changed in the lateral direction and the vertical direction. The appearance detection module 300 may further include a first appearance detection fixing frame 3220. The second displacement platform 3210 may be installed on the first appearance detection fixing frame 3220, and the first appearance detection fixing frame 3220 is installed on the seat 400. By providing the second displacement platform 3210, the position of the appearance detection camera 3200 can be conveniently and accurately adjusted. In other embodiments, the direction of adjustment of the second displacement platform 3210 may be changed by changing the mounting orientation of the second displacement platform 3210.

Illustratively, the appearance detecting camera adjusting assembly may further include a fourth adjusting unit for adjusting a position of the appearance detecting camera 3200 in a third direction of the transverse direction, the longitudinal direction and the vertical direction. The fourth adjustment unit may supplement the unadjusted orientation of the second displacement stage 3210. The position of the appearance detecting camera 3200 can be adjusted along three directions of X, Y and the Z-axis by the fourth adjusting unit in cooperation with the second displacement stage 3210. Illustratively, the fourth adjusting unit may include a slide rail and a slider, and the slider may be slidably coupled to the slide rail to adjust the relative position.

In the illustrated embodiment, the appearance inspection module 300 may further include a second appearance inspection holder 3230, and the second appearance inspection holder 3230 is connected between the second displacement stage 3210 and the appearance inspection camera 3200. Alternatively, the appearance detecting camera 3200 may be fixedly connected to the second appearance detecting holder 3230, the aforementioned slide rail and the slider may be respectively disposed on the second appearance detecting holder 3230 and the second displacement platform 3210, and the slide rail may extend along the Y-axis direction, so that the relative positions of the second appearance detecting holder 3230 and the second displacement platform 3210 may be changed along the Y-axis direction. Illustratively, the slide rail may be a U-shaped slot. Of course, the positions of the slide rails and the slide blocks on the second appearance detecting fixing frame 3230 and the second displacement platform 3210 can be interchanged. For example, one of a slide rail and a slider extending along the Y axis may be provided on the first appearance detecting mount 3220 and the other may be provided on the second displacement platform 3210. Illustratively, one of a slide rail and a slider extending along the Y-axis may be provided on the appearance inspection camera 3200 and the other may be provided on the second appearance inspection holder 3230.

In the description of the present invention, it is to be understood that the directions or positional relationships indicated by the directional terms such as "front", "rear", "upper", "lower", "left", "right", "lateral", "vertical", "horizontal" and "top", "bottom", etc., are generally based on the directions or positional relationships shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, and in the case of not making a reverse explanation, these directional terms do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore, should not be construed as limiting the scope of the present invention; the terms "inner" and "outer" refer to the interior and exterior relative to the contours of the components themselves.

For ease of description, relative terms of regions such as "above … …", "above … …", "above … …", "above", and the like may be used herein to describe the regional positional relationship of one or more components or features with other components or features as illustrated in the figures. It is to be understood that the relative terms of the regions are intended to encompass not only the orientation of the element as depicted in the figures, but also different orientations in use or operation. For example, if an element in the drawings is turned over in its entirety, the articles "over" or "on" other elements or features will include the articles "under" or "beneath" the other elements or features. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". Further, these components or features may also be positioned at various other angles (e.g., rotated 90 degrees or other angles), all of which are intended to be encompassed herein.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, elements, components, and/or combinations thereof, unless the context clearly indicates otherwise.

It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are capable of operation in sequences other than those illustrated or described herein.

The present invention has been illustrated by the above embodiments, but it should be understood that the above embodiments are for illustrative and descriptive purposes only and are not intended to limit the invention to the scope of the described embodiments. Furthermore, it will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that many variations and modifications may be made in accordance with the teachings of the present invention, which variations and modifications are within the scope of the present invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides a panel visual detection device, its characterized in that is in including pedestal and setting particle detection module on the pedestal, patrol and examine module and outward appearance and detect the module, the outward appearance detects the module and is located detection area's top, the particle detection module with patrol and examine the module and be located detection area's below, wherein

The particle detection module comprises a particle detection camera and a particle detection camera adjusting component for adjusting the gesture of the particle detection camera; the side patrol inspection module comprises a side patrol inspection camera and a side patrol inspection camera adjusting component for adjusting the posture of the side patrol inspection camera; and the appearance detection module comprises an appearance detection camera and an appearance detection camera adjusting component used for adjusting the posture of the appearance detection camera.

2. The visual inspection device for panels as claimed in claim 1, further comprising a first guide rail extending in a transverse direction, wherein the base is slidably connected to the first guide rail so that the particle inspection module, the edge inspecting module and the appearance inspecting module move synchronously when performing the visual inspection.

3. The visual inspection device of claim 2, wherein the housing comprises:

the first support is connected with the first guide rail in a sliding mode, and the particle detection module and the edge inspection module are arranged on the first support; and

the second support is fixed to the first support, and the appearance detection module is arranged on the second support.

4. The visual panel inspection device of claim 3, further comprising a second rail parallel to the first rail, the second mount being slidably coupled to the second rail.

5. The visual inspection device of claim 2, wherein the particle inspection camera and the edge inspection camera are sequentially disposed along the transverse direction, the visual inspection device further comprising a controller for controlling the base to move to a predetermined position along the transverse direction after the particle inspection camera completes the inspection, so that the edge inspection camera performs the inspection.

6. The panel vision inspection device of claim 1, wherein the particle inspection camera includes a holder, a lens module and a camera module, the lens module being mounted on the holder, the particle inspection camera adjustment assembly including a first adjustment unit, the first adjustment unit being fixed on the holder, the first adjustment unit being used to adjust an angle of the camera module relative to the lens module.

7. The panel vision inspection device of claim 6, wherein the particle detection camera adjustment assembly further comprises a second adjustment unit disposed between the lens module and the mount for adjusting an angle of the lens module relative to the mount such that an optical axis of the lens module is perpendicular to the panel to be inspected in the inspection area.

8. The panel vision inspection device of claim 1, wherein the cruise inspection camera adjustment assembly includes:

fix first displacement platform on the pedestal, it is in to patrol and examine the camera setting on the first displacement platform, wherein, first displacement platform is arranged in adjusting along two directions in transverse direction, longitudinal direction and the vertical direction patrol and examine the position of camera, transverse direction is on a parallel with the particle detects the module patrol and examine the module with outward appearance detection module synchronous motion's when carrying out visual detection direction, the vertical direction perpendicular to the panel of waiting to detect in the detection zone, the longitudinal direction perpendicular to transverse direction with the vertical direction.

9. The panel visual inspection device of claim 8, wherein the patrol camera adjustment assembly further includes a third adjustment unit for adjusting a position of the patrol camera in a third one of the lateral direction, the longitudinal direction, and the vertical direction.

10. The panel vision inspection device of claim 1, wherein the appearance inspection camera adjustment assembly includes:

fix second displacement platform on the pedestal, outward appearance detection camera sets up on the second displacement platform, wherein, second displacement platform is arranged in adjusting along two directions in transverse direction, longitudinal direction and the vertical direction outward appearance detection camera's position, transverse direction is on a parallel with the particle detection module patrols the limit and examines the module and outward appearance detection module synchronous motion's when carrying out visual detection direction, vertical direction perpendicular to the panel of waiting to detect in the detection zone, longitudinal direction perpendicular to transverse direction with the vertical direction.

11. The panel visual inspection device of claim 10, wherein the appearance inspection camera adjustment assembly further comprises a fourth adjustment unit for adjusting the position of the appearance inspection camera in a third one of the lateral direction, the longitudinal direction, and the vertical direction.

12. A panel inspection apparatus comprising a panel visual inspection device according to any one of claims 1 to 11.