JP4431273B2 - 走査型エバネッセント電磁顕微鏡 - Google Patents

走査型エバネッセント電磁顕微鏡 Download PDF

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Publication number
JP4431273B2
JP4431273B2 JP2000513305A JP2000513305A JP4431273B2 JP 4431273 B2 JP4431273 B2 JP 4431273B2 JP 2000513305 A JP2000513305 A JP 2000513305A JP 2000513305 A JP2000513305 A JP 2000513305A JP 4431273 B2 JP4431273 B2 JP 4431273B2
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Japan
Prior art keywords
sample
frequency
probe
tip
distance
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JP2000513305A
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Japanese (ja)
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JP2001517804A (ja
JP2001517804A5 (https=
Inventor
シャオ ドン シャン
チェン ガオ
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University of California
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University of California
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2000513305A 1997-09-22 1998-09-22 走査型エバネッセント電磁顕微鏡 Expired - Fee Related JP4431273B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US5947197P 1997-09-22 1997-09-22
US60/059,471 1997-09-22
PCT/US1998/019764 WO1999016102A1 (en) 1997-09-22 1998-09-22 Scanning evanescent electro-magnetic microscope

Publications (3)

Publication Number Publication Date
JP2001517804A JP2001517804A (ja) 2001-10-09
JP2001517804A5 JP2001517804A5 (https=) 2006-01-05
JP4431273B2 true JP4431273B2 (ja) 2010-03-10

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JP2000513305A Expired - Fee Related JP4431273B2 (ja) 1997-09-22 1998-09-22 走査型エバネッセント電磁顕微鏡

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EP (1) EP1018138A4 (https=)
JP (1) JP4431273B2 (https=)
AU (1) AU1061599A (https=)
WO (1) WO1999016102A1 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7550963B1 (en) 1996-09-20 2009-06-23 The Regents Of The University Of California Analytical scanning evanescent microwave microscope and control stage
US6173604B1 (en) 1996-09-20 2001-01-16 The Regents Of The University Of California Scanning evanescent electro-magnetic microscope
JP3478955B2 (ja) 1997-09-29 2003-12-15 日本電子株式会社 トンネル電流検出装置における疑似電流防止装置
EP1212625A1 (en) * 1999-09-10 2002-06-12 University of Maryland, College Park Quantitative imaging of dielectric permittivity and tunability
JP3536973B2 (ja) 2000-04-20 2004-06-14 日本電気株式会社 同軸プローブおよび該同軸プローブを用いた走査型マイクロ波顕微鏡
CN100370263C (zh) * 2005-06-23 2008-02-20 中国科学技术大学 用扫描近场微波显微镜测量材料压电系数的方法及装置
JP4732201B2 (ja) * 2006-03-17 2011-07-27 キヤノン株式会社 電磁波を用いたセンシング装置
JP2009229423A (ja) * 2008-03-25 2009-10-08 Kobe Steel Ltd 近接場プローブ及びこの近接場プローブを備えた電気的特性測定装置
CN111351807A (zh) * 2020-04-18 2020-06-30 李赞 使用近场微波的介电谱显微测量
PT118063A (pt) 2022-06-22 2023-12-22 Univ Aveiro Microscópio híbrido de varrimento por micro-ondas de campo próximo

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5821410A (en) * 1996-09-20 1998-10-13 Regents Of The University Of California Scanning tip microwave near field microscope

Also Published As

Publication number Publication date
WO1999016102A1 (en) 1999-04-01
JP2001517804A (ja) 2001-10-09
EP1018138A4 (en) 2000-12-20
AU1061599A (en) 1999-04-12
EP1018138A1 (en) 2000-07-12

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