PT118063A - Microscópio híbrido de varrimento por micro-ondas de campo próximo - Google Patents

Microscópio híbrido de varrimento por micro-ondas de campo próximo

Info

Publication number
PT118063A
PT118063A PT118063A PT11806322A PT118063A PT 118063 A PT118063 A PT 118063A PT 118063 A PT118063 A PT 118063A PT 11806322 A PT11806322 A PT 11806322A PT 118063 A PT118063 A PT 118063A
Authority
PT
Portugal
Prior art keywords
probe
sample
tip
microwave
distance
Prior art date
Application number
PT118063A
Other languages
English (en)
Inventor
Tselev Alexander
Vyshatko Nikolai
Manuel Santos Da Rocha Cupido Luis
Original Assignee
Univ Aveiro
Lc Tech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Aveiro, Lc Tech filed Critical Univ Aveiro
Priority to PT118063A priority Critical patent/PT118063A/pt
Priority to PCT/IB2022/055997 priority patent/WO2023248000A1/en
Publication of PT118063A publication Critical patent/PT118063A/pt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
    • G01Q60/06—SNOM [Scanning Near-field Optical Microscopy] combined with AFM [Atomic Force Microscopy]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

A INVENÇÃO DESCREVE UM SISTEMA DE IMAGIOLOGIA POR SONDA DE VARRIMENTO COM A SONDA MANTIDA A UMA PEQUENA DISTÂNCIA DA AMOSTRA (7) DURANTE A AQUISIÇÃO DE IMAGENS DE VARRIMENTO RASTER COM A SONDA TENDO O BRAÇO CANTILEVER (17') E A PONTA (18). A INTERAÇÃO ENTRE A AMOSTRA E A SONDA É CONSEGUIDA ATRAVÉS DE CAMPOS PRÓXIMOS DE MICRO-ONDAS NA PONTA DA SONDA. DEVIDO AOS CAMPOS PRÓXIMOS, A IMPEDÂNCIA ELÉTRICA DA SONDA DEPENDE DA DISTÂNCIA SONDA-AMOSTRA E DAS PROPRIEDADES ELÉTRICAS DA AMOSTRA, AMBAS NA VIZINHANÇA IMEDIATA DA PONTA DA SONDA. O SISTEMA DE DETEÇÃO DE MICRO-ONDAS DETETA A IMPEDÂNCIA ELÉTRICA DA SONDA A UMA FREQUÊNCIA DE MICRO-ONDAS DEFINIDA. A DISTÂNCIA SONDA-AMOSTRA É CONTROLADA COM A UTILIZAÇÃO DE UM SENSOR DE DESLOCAMENTO CONFOCAL CROMÁTICO ÓTICO (1) COM O PONTO DE LUZ (20) DIVIDIDO ENTRE A SONDA E O SUBSTRATO, BEM COMO COM OS SINAIS DO SISTEMA DE DETEÇÃO DE MICRO-ONDAS.
PT118063A 2022-06-22 2022-06-22 Microscópio híbrido de varrimento por micro-ondas de campo próximo PT118063A (pt)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PT118063A PT118063A (pt) 2022-06-22 2022-06-22 Microscópio híbrido de varrimento por micro-ondas de campo próximo
PCT/IB2022/055997 WO2023248000A1 (en) 2022-06-22 2022-06-28 Hybrid near-field scanning microwave microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PT118063A PT118063A (pt) 2022-06-22 2022-06-22 Microscópio híbrido de varrimento por micro-ondas de campo próximo

Publications (1)

Publication Number Publication Date
PT118063A true PT118063A (pt) 2023-12-22

Family

ID=82595138

Family Applications (1)

Application Number Title Priority Date Filing Date
PT118063A PT118063A (pt) 2022-06-22 2022-06-22 Microscópio híbrido de varrimento por micro-ondas de campo próximo

Country Status (2)

Country Link
PT (1) PT118063A (pt)
WO (1) WO2023248000A1 (pt)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999016102A1 (en) 1997-09-22 1999-04-01 The Regents Of The University Of California Scanning evanescent electro-magnetic microscope
US6597185B1 (en) 2000-09-20 2003-07-22 Neocera, Inc. Apparatus for localized measurements of complex permittivity of a material
JP2002168801A (ja) 2000-12-04 2002-06-14 Nec Corp 走査型マイクロ波顕微鏡及びマイクロ波共振器
DE10314560B4 (de) 2003-03-31 2005-09-08 Siemens Ag Vorrichtung und Verfahren zum Bestimmen einer elektrischen Eigenschaft einer Probe
US7190175B1 (en) 2005-05-27 2007-03-13 Stanford University Orthogonal microwave imaging probe
US8266718B2 (en) 2009-02-20 2012-09-11 The Board Of Trustees Of Leland Stanford Junior University Modulated microwave microscopy and probes used therewith
WO2020075173A1 (en) * 2018-10-11 2020-04-16 Ramot At Tel-Aviv University Ltd. Meniscus-confined three-dimensional electrodeposition

Also Published As

Publication number Publication date
WO2023248000A1 (en) 2023-12-28

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Date Code Title Description
BB1A Laying open of patent application

Effective date: 20230823