JP4428228B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP4428228B2 JP4428228B2 JP2004373236A JP2004373236A JP4428228B2 JP 4428228 B2 JP4428228 B2 JP 4428228B2 JP 2004373236 A JP2004373236 A JP 2004373236A JP 2004373236 A JP2004373236 A JP 2004373236A JP 4428228 B2 JP4428228 B2 JP 4428228B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- phase change
- film
- contact
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/30—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/061—Patterning of the switching material
- H10N70/066—Patterning of the switching material by filling of openings, e.g. damascene method
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/841—Electrodes
- H10N70/8413—Electrodes adapted for resistive heating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
- H10N70/8828—Tellurides, e.g. GeSbTe
Description
11…不純物拡散領域
12…素子分離領域
13…絶縁膜
14…多結晶シリコン膜
15…タングステン膜
16…シリコン窒化膜
17…拡散層
18…サイドウォール
19…絶縁膜
20…第1のコンタクトプラグ
21…導電膜
22…層間絶縁膜
23…第2のコンタクトプラグ
24…第3のコンタクトプラグ
25…シリコン窒化膜
26…カルコゲナイド膜
27…上部電極
30…シリコン窒化膜
31…層間絶縁膜
40…カルコゲナイド膜
41…上部電極
100…半導体基板
101…シリコン酸化膜
102…シリコン窒化膜
103…カルコゲナイド膜
104…プラグ
105…上部電極
Claims (8)
- MOSトランジスタが形成された半導体基板を覆う第1絶縁膜と、
この第1絶縁膜に選択的に設けられて前記MOSトランジスタの拡散層に接続されるコンタクトプラグと、
前記第1絶縁膜および前記コンタクトプラグを覆う第2絶縁膜と、
この第2絶縁膜に選択的に設けられて前記コンタクトプラグに接続されるヒータであって前記コンタクトプラグの上表面よりも小さい大きさを有するヒータと、
前記ヒータの上表面よりも大きい大きさを有する相変化素子であって一部が前記ヒータの上表面に接し残部が前記第2絶縁膜の表面に接して設けられた相変化素子と、
この相変化素子の側面および前記第2絶縁膜の表面の少なくとも一部と接して形成された第3絶縁膜と、
前記相変化素子の上表面に接して形成された電極層と、
を備え、前記第3絶縁膜は前記第2絶縁膜と異なる材料であって前記相変化素子の前記第2絶縁膜からの剥離を抑制する材料でなることを特徴とする半導体装置。 - 前記第3絶縁膜は、シリコン窒化膜でなることを特徴とする請求項1に記載の半導体装置。
- 前記第3絶縁膜は、前記第2絶縁膜の表面上に延在形成されていることを特徴とする請求項1又は2に記載の半導体装置。
- 前記第3絶縁膜を取り囲み前記第2絶縁膜の表面上に形成された第4絶縁膜を更に備え、前記第4絶縁膜は前記第3絶縁膜と異なる材料でなることを特徴とする請求項1又は2に記載の半導体装置。
- 前記相変化素子は、前記第3絶縁膜よりも薄く形成されていることを特徴とする請求項1乃至3のいずれかに記載の半導体装置。
- 複数のMOSトランジスタが形成された半導体基板を覆う第1絶縁膜と、
この第1絶縁膜に選択的に設けられて前記複数のMOSトランジスタの拡散層にそれぞれ接続される複数のコンタクトプラグと、
前記第1絶縁膜および前記複数のコンタクトプラグを覆う第2絶縁膜と、
この第2絶縁膜に選択的に設けられて前記複数のコンタクトプラグにそれぞれ接続される複数のヒータであって各々が対応する前記コンタクトプラグの上表面よりも小さい大きさを有する複数のヒータと、
各々が対応する前記ヒータの上表面よりも大きい大きさを有する複数の相変化素子であって各々の一部が対応する前記ヒータの上表面に接し各々の残部が前記第2絶縁膜の表面に接して設けられた複数の相変化素子と、
これら相変化素子のそれぞれの側面および前記第2絶縁膜の表面の少なくとも一部と接して形成された第3絶縁膜と、
前記複数の相変化素子のそれぞれの上表面に接して形成された電極層と、
を備え、前記第3絶縁膜は前記第2絶縁膜と異なる材料であってシリコン窒化膜でなることを特徴とする半導体装置。 - 前記第3絶縁膜は前記複数の相変化素子の間を埋めることにより前記複数の相変化素子のそれぞれの側面に接していることを特徴とする請求項6に記載の半導体装置。
- 前記複数の相変化素子のそれぞれの側面に接して形成された前記第3絶縁膜の間を埋める第4絶縁膜をさらに備え、前記第4絶縁膜は前記第3絶縁膜と異なる材料でなることを特徴とする請求項6に記載の半導体装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004373236A JP4428228B2 (ja) | 2004-12-24 | 2004-12-24 | 半導体装置 |
US11/313,742 US20060138473A1 (en) | 2004-12-24 | 2005-12-22 | Semiconductor device and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004373236A JP4428228B2 (ja) | 2004-12-24 | 2004-12-24 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006179778A JP2006179778A (ja) | 2006-07-06 |
JP4428228B2 true JP4428228B2 (ja) | 2010-03-10 |
Family
ID=36610394
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004373236A Expired - Fee Related JP4428228B2 (ja) | 2004-12-24 | 2004-12-24 | 半導体装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US20060138473A1 (ja) |
JP (1) | JP4428228B2 (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8232175B2 (en) * | 2006-09-14 | 2012-07-31 | Spansion Llc | Damascene metal-insulator-metal (MIM) device with improved scaleability |
KR100873878B1 (ko) * | 2006-09-27 | 2008-12-15 | 삼성전자주식회사 | 상변화 메모리 유닛의 제조 방법 및 이를 이용한 상변화메모리 장치의 제조 방법 |
US20080090400A1 (en) * | 2006-10-17 | 2008-04-17 | Cheek Roger W | Self-aligned in-contact phase change memory device |
JP2008103541A (ja) * | 2006-10-19 | 2008-05-01 | Renesas Technology Corp | 相変化メモリおよびその製造方法 |
US20080124833A1 (en) * | 2006-11-03 | 2008-05-29 | International Business Machines Corporation | Method for filling holes with metal chalcogenide material |
KR100819560B1 (ko) | 2007-03-26 | 2008-04-08 | 삼성전자주식회사 | 상전이 메모리소자 및 그 제조방법 |
US7704788B2 (en) | 2007-04-06 | 2010-04-27 | Samsung Electronics Co., Ltd. | Methods of fabricating multi-bit phase-change memory devices and devices formed thereby |
US7932167B2 (en) * | 2007-06-29 | 2011-04-26 | International Business Machines Corporation | Phase change memory cell with vertical transistor |
KR101148217B1 (ko) * | 2007-10-02 | 2012-05-25 | 가부시키가이샤 아루박 | 칼코게나이드 막 및 그 제조 방법 |
JP2009212202A (ja) | 2008-03-03 | 2009-09-17 | Elpida Memory Inc | 相変化メモリ装置およびその製造方法 |
JP5648406B2 (ja) | 2010-10-13 | 2015-01-07 | ソニー株式会社 | 不揮発性メモリ素子及び不揮発性メモリ素子群、並びに、これらの製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6031287A (en) * | 1997-06-18 | 2000-02-29 | Micron Technology, Inc. | Contact structure and memory element incorporating the same |
US6590807B2 (en) * | 2001-08-02 | 2003-07-08 | Intel Corporation | Method for reading a structural phase-change memory |
US6545287B2 (en) * | 2001-09-07 | 2003-04-08 | Intel Corporation | Using selective deposition to form phase-change memory cells |
US6861267B2 (en) * | 2001-09-17 | 2005-03-01 | Intel Corporation | Reducing shunts in memories with phase-change material |
US6567296B1 (en) * | 2001-10-24 | 2003-05-20 | Stmicroelectronics S.R.L. | Memory device |
US6670628B2 (en) * | 2002-04-04 | 2003-12-30 | Hewlett-Packard Company, L.P. | Low heat loss and small contact area composite electrode for a phase change media memory device |
JP4634014B2 (ja) * | 2003-05-22 | 2011-02-16 | 株式会社日立製作所 | 半導体記憶装置 |
-
2004
- 2004-12-24 JP JP2004373236A patent/JP4428228B2/ja not_active Expired - Fee Related
-
2005
- 2005-12-22 US US11/313,742 patent/US20060138473A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP2006179778A (ja) | 2006-07-06 |
US20060138473A1 (en) | 2006-06-29 |
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