JP4424480B2 - COATING UNIT, COATING APPARATUS PROVIDED WITH THE COATING UNIT, AND METHOD OF PACKING THE COATING UNIT - Google Patents

Description

  The present invention relates to a piston-type coating unit, a coating apparatus including the coating unit, and a filling method for filling the coating unit with a fluid material such as a resin.

  There are many processes for applying a resin or liquid in the semiconductor manufacturing process, such as a process of pouring resin between flip-mounted chips, a process of applying an adhesive to bond substrates together, etc. It is done.

  FIG. 7 shows an example of a method for supplying resin to the piston-type coating unit 101. When the resin is supplied to a general application unit 101 having a syringe 122 and a nozzle 124 attached to the distal end side of the syringe 122, as shown in the drawing, the application unit 101 is placed below the supply unit 110 storing the resin. The resin is supplied into the syringe 122 by being positioned and dropping the resin from the supply unit 110. Thereafter, the inside of the syringe 122 is sealed by inserting a piston (not shown) from the opening side of the syringe 122, and the resin is pushed out from the nozzle 124 by pushing the piston into the syringe 122 as necessary.

  However, in such a supply method, since the resin comes into contact with the outside air when falling, bubbles are mixed in the resin in the syringe 122. In this type of coating unit, the mixing of bubbles in the resin causes a problem that a desired amount of resin cannot be extruded, for example.

  FIG. 8 is a diagram for explaining a conventional filling method described in Patent Document 1. In FIG. The coating unit 201 illustrated includes a syringe 222 filled with resin, a nozzle 224 attached to the syringe 222, and a piston 231 for pressing the resin in the syringe 222. The peripheral wall of the syringe 222 is provided with a resin discharge port 222a for discharging excess resin when filling the syringe 222 with resin. Further, a communication pipe 225 for supplying resin from the supply unit 210 is connected to an intermediate position of the nozzle 224. A valve 236 is provided at the connection portion between the nozzle 224 and the communication tube 225, so that when the resin is filled in the syringe 222, the tip side of the nozzle 224 is closed so that the resin does not leak from the nozzle tip. It has become.

  An operation of filling the syringe 222 with the resin in the supply unit 210 will be described. First, when air pressure is applied to the supply unit 210 with the piston 231 in the illustrated position, the resin in the supply unit 210 is supplied to the syringe 222 via the communication pipe 225 and the nozzle 224. This resin supply operation is performed until the resin overflows from the resin discharge port 222a. Thereby, the air in the syringe 222 is pushed out from the resin discharge port 222a, and the syringe 222 is filled with the resin.

  FIG. 9 is a diagram for explaining a conventional method described in Patent Document 2 for removing bubbles in a resin. In this method, the resin in the tank 310 is degassed by applying a negative pressure to the tank 310 storing the resin with a vacuum pump 341. The resin deaerated by this method is then supplied from the tank 310 to the coating device 301.

FIG. 10 shows a conventional coating apparatus described in Patent Document 3. The coating device 401 shown in the figure is for applying a solder paste supplied from a supply unit 410 into a container 422 to a printed circuit board or the like by pushing it out from a nozzle 424. A vacuum pump 441 is connected to the container 422. By driving the vacuum pump 441 after supplying the solder paste into the container 422, the inside of the container 422 becomes negative pressure, and bubbles in the solder paste are removed. Can be done. Since the coating device 401 is a device for mainly applying solder paste, a fluid device 426 for stirring the solder paste is provided in the container 422. This flow device 426 also functions as a solder paste extrusion mechanism, and as shown in the figure, by simultaneously rotating the two rollers clockwise, the solder paste gradually moves downward from the nozzle. Extruded.
JP 2001-281042 A (FIG. 1) JP 61-213382 A (FIG. 1) Japanese Patent Laid-Open No. 2001-77521 (FIG. 1)

  In the configuration of Patent Document 1 shown in FIG. 8, the supply operation is performed until the resin overflows from the resin discharge port 222a in order to remove the air in the syringe 222. For example, as shown in FIG. If air remains, it is difficult to remove it. In addition, when the resin is supplied, air existing in the valve 236 and the communication pipe 225 may be mixed as bubbles, and it is difficult to remove the mixed bubbles in the configuration of Patent Document 1. . Further, unless a mechanism for collecting and reusing the resin overflowing from the resin outlet 222a is provided, the overflowed resin is discarded as it is, and as a result, useless resin is consumed.

  In the configuration of Patent Document 2 shown in FIG. 9, it is possible to remove bubbles from the resin in the tank 310, but the detailed configuration of the coating apparatus 301 is not described in the same document. Even if the degassed resin is filled in the supply unit 110 as shown in FIG. 7 and then the resin is supplied into the syringe 122 by the method shown in FIG. Bubbles are mixed in when the resin is dropped. In general, in a general cylindrical syringe 122 as shown in FIG. 7, air is taken in when a piston (not shown) is set in the syringe 122, and the piston is set without mixing bubbles. It is difficult.

  In the configuration of Patent Document 3 shown in FIG. 10, it is possible to remove bubbles from the solder paste to be applied, but since the solder paste is pushed out by the flow device 426, a piston type application unit ( Compared with, for example, FIG. 8), it is difficult to apply a small amount by finely controlling the amount of resin applied. Further, with this configuration, it is difficult to apply a low-viscosity resin or to apply it quantitatively while suppressing variations. Furthermore, since the coating device 401 includes the flow device 426 in the container 422, the overall size of the coating device 401 is relatively large, and the number of parts is relatively large.

  In addition, when air bubbles are mixed in the resin, specifically, the following various problems occur.

  First, when bubbles are mixed, the responsiveness when extruding resin from the nozzle is lowered. Normally, in a piston-type application unit, when the piston is pressed and displaced, the resin in the syringe is pressurized, and as a result, an amount of resin corresponding to the displacement of the piston is pushed out from the nozzle. However, when air bubbles are mixed in the resin, the pressing force by the piston is absorbed by the air bubbles, so that the response is lowered such that there is a delay before the resin is pushed out from the nozzle. This decrease in responsiveness causes a problem that the resin is not applied at a desired position and a problem that the amount of the applied resin is less than the desired amount.

  In addition, the air bubbles that have been pressurized when the piston is pressed are subsequently restored, so that the resin is pushed out from the nozzles and “drip” may occur. If dripping occurs, the resin may adhere to an unexpected position. For example, the resin may adhere to the chip or its periphery and cause an electrical failure of the chip.

  Further, when bubbles are present in the vicinity of the nozzle, even if the piston is displaced, not the resin but the bubbles are pushed out, so the resin may not be pushed out.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a coating unit and a coating unit filling method capable of filling a fluid material without mixing bubbles in a syringe of a piston type coating unit capable of applying a small amount. It is in. Another object of the present invention is to provide a coating apparatus that is equipped with such a coating unit and that can apply a fluid resin without problems caused by mixing of bubbles. .

  In order to achieve the above object, the application unit according to the present invention is an application unit that presses and extrudes a fluid material filled in a syringe with a piston, and is formed on the inner wall surface of the syringe on the distal end side of the syringe. Has a first part that slides while maintaining hermeticity, and a second inner diameter that is larger than the first part and is formed on the rear end side of the syringe continuously to the first part. And a region.

  In addition, the coating unit according to the present invention slidably supports the piston and is attached to an end of the second part to seal the inside of the syringe, and the sealed inside of the syringe It may further have a discharge port for degassing. The piston preferably includes an O-ring for maintaining a sealing property between the piston and the first portion, and the sealing lid is provided between the sealing lid and the piston. It is preferable to provide an O-ring for maintaining hermeticity.

  The application unit of the present invention configured as described above arranges the syringe so that the first portion formed in the stepped shape and having a relatively small inner diameter is downward before inserting the piston into the syringe. The fluid material is filled in the syringe, and then the piston is inserted into the first portion, whereby the fluid material is filled into the internal space sealed by the first portion and the piston.

  According to the coating unit of the present invention, the amount of the flowable material filled in the syringe is set to such an extent that the liquid surface of the flowable material exceeds the first portion, so that the lower end side of the piston flows in the subsequent process Even if air is taken into the lower end surface of the piston when immersed in a functional material, if the lower end surface of the piston is not yet inserted into the first part, the bubbles are moved outside the piston to escape. be able to. Therefore, the amount of bubbles taken in when the piston is inserted into the syringe can be minimized as compared with a conventional general cylindrical syringe.

  The coating apparatus according to the present invention includes a coating unit according to the present invention, a positioning unit that relatively positions the coating unit and a coating object, and a driving unit that moves the piston of the coating unit in the axial direction thereof. And have. The coating apparatus of the present invention may further include a pump unit for degassing the inside of the syringe of the coating unit of the present invention.

  The coating apparatus of the present invention configured as described above is to perform coating using the coating unit according to the present invention, and it is difficult for bubbles to be mixed in the flowable material filled in the coating unit. Application is carried out satisfactorily without the problems that occur due to the mixing of bubbles. In addition, since a piston-type application unit is used, a small amount of fluid material can be applied relatively easily by displacing the piston with high precision using the piston drive means.

  In addition, the filling method of the coating unit according to the present invention includes a first part formed on the distal end side of the syringe and sliding while maintaining a sealing property, an inner diameter larger than the first part, A step of disposing a syringe provided with a second part formed on the rear end side of the syringe continuously to the part of 1 so that the first part is downward; Supplying the flowable material to a height exceeding the first portion; and attaching a sealing lid that slidably supports the piston to the syringe to which the flowable material is supplied. A step of sealing, a step of degassing the flowable material with a negative pressure in the sealed syringe without inserting the piston into the first portion, and after the flowable material is degassed The pis And a step of inserting in to the first site.

  According to the filling method of the present invention, first, the flowable resin is supplied into the syringe, then the inside of the syringe is sealed to degas the flowable resin, and then the piston is placed above the supplied flowable material. It is inserted into the first part so as to be pushed down. Therefore, the degassable flowable resin can be filled in the syringe, and the inner wall surface of the syringe has a stepped shape, so that the same effect as the application unit of the present invention as described above can be obtained. Contamination is also minimized.

  In particular, in the filling method of the present invention, the degassing step is preferably performed in a state where the lower end surface of the piston is above the liquid surface of the flowable material. In this case, since the inside of the syringe has already been deaerated when the piston is inserted into the flowable material, there is almost no air in the syringe. Therefore, air is not taken into the lower surface of the piston when the piston is inserted into the resin material.

  Further, the step of inserting the piston in the first part may be performed while performing the deaeration step. Further, the deaeration step may be performed in a state where a nozzle attached to the distal end side of the syringe is closed.

  As described above, according to the coating unit of the present invention, when the inner wall surface of the syringe has a stepped shape, the piston is inserted into the syringe as compared with a conventional general cylindrical syringe. The amount of air bubbles taken into can be minimized. Moreover, according to the coating apparatus of the present invention, the flowable resin can be applied without using the problem caused by the mixing of bubbles by using the coating unit according to the present invention. Further, according to the filling method of the coating unit according to the present invention, the degassed fluid material can be filled into the coating unit while suppressing the mixing of bubbles.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(First embodiment)
FIG. 1 is a diagram showing a configuration of a coating unit according to the first embodiment of the present invention.

  As shown in the figure, the coating unit 1 has a nozzle 24 for discharging resin, a syringe 2 for storing the resin supplied to the nozzle 24, and a piston 11 for pressing and extruding the resin in the syringe 2. is doing.

  The coating unit 1 is used by being mounted on a coating apparatus (not shown) used in a semiconductor manufacturing process, for example. The coating apparatus (not shown) includes a holding mechanism that holds the coating unit 1, a positioning mechanism that relatively positions the nozzle tip of the held coating unit 1 with respect to an application target (for example, a substrate), and the coating unit 1. A piston drive mechanism that moves the piston 11 in the axial direction thereof, and the piston of the application unit 1 that is positioned at a desired position on the application object using the positioning mechanism is moved by the piston drive mechanism. Resin is extruded from the tip of the nozzle 24 to apply the resin onto the object to be applied. In addition, the vacuum pump 41 shown by FIG. 1 may be prepared as one of the components of a coating device (not shown).

  The nozzle 24 is a general purpose made of an elongated cylindrical member, and has a distal end side (lower side in the drawing) tapered and an opposite end attached to the syringe 2. In addition, the attachment method of the nozzle 24 with respect to the syringe 2 forms an internal thread part in the inner wall of the nozzle connection port 12, forms an external thread part in the edge part of the attachment side of the nozzle 24, and makes both members fit. May be attached.

  The syringe 2 is composed of a cylindrical member that is open only at one end. As shown in the drawing, an application path 6 and a supply path 7 are formed on the inner peripheral surface of the syringe 2 and has a stepped shape. The application path 6 formed on the distal end side (the lower side of the drawing) of the syringe 2 is a structural portion in which the piston 11 slides while maintaining hermeticity, and has an inner diameter slightly larger than the outer shape of the piston 11. . On the other hand, the supply path 7 formed continuously above the application path 6 has an inner diameter larger than the inner diameter of the application path 6 and is formed up to the upper end opening of the syringe 2. In the present embodiment, the boundary between the application path 6 and the supply path 7 is a stepped stepped portion 9 as shown in the figure, but not limited to this, the application path 6 and the supply path 7 A shape in which the inner diameter of the boundary portion gradually changes over the moving direction of the piston 11 may be employed.

  In the supply path 7, one discharge port 2 a that communicates the inside and outside of the syringe 2 is formed, and this discharge port 2 a is located slightly above the intermediate position of the supply path 7 in the longitudinal direction of the syringe 2. . A vacuum pump 41 is connected to the discharge port 2a, and the inside of the syringe 2 is configured to have a negative pressure by driving the vacuum pump 41.

  The sealing lid 4 slidably supports the piston 11 and is detachably attached to the syringe 2. After the resin is supplied into the syringe 2, the upper end opening of the syringe 2 is closed. Attached to. A sealing O-ring 8 b is attached to the inner peripheral wall of the insertion hole of the sealing lid 4.

  The piston 11 is made of a substantially columnar member, and has an outer diameter slightly smaller than the inner diameter of the application path 6. An O-ring 8 a is attached to the distal end side of the piston 11, so that the resin filled in the application path 6 of the syringe 2 can be reliably pressurized.

  Note that the output of the vacuum pump 41 is selected according to the characteristics of the resin material and the like so that air bubbles can be reliably removed from the resin supplied into the syringe 2. In addition, the syringe 2 and the sealing lid 4 are designed to have sufficient strength so as not to be deformed by the negative pressure when the inside of the syringe 2 is set to a negative pressure by the vacuum pump 41.

  The application unit 1 of the present embodiment configured as described above is mainly characterized in that the supply path 7 and the application path 6 are formed on the inner wall surface of the syringe 2. In the syringe 2 formed in this way, before the piston 11 is inserted, the resin is supplied into the syringe 2 to a height exceeding the stepped portion 9, and then the piston 11 is inserted into the application path 6 to apply the resin. A resin is filled in the internal space sealed by the path 6 and the piston 11.

  Here, since the liquid level of the resin is supplied to a height exceeding the stepped portion 9, when the piston 11 is pushed down, the tip end side of the piston 11 is first immersed in the resin. In a state where the lower end surface of the piston 11 is above the stepped portion 9, the O-ring 8 a has not yet been pushed into the application path 6, so even if air is taken into the lower end surface of the piston 11, Air bubbles can be moved outside the piston 11 to escape. Therefore, at the time of inserting the piston 11 into the application path 6, almost no bubbles remain on the lower end surface of the piston 11, compared with that of a general cylindrical syringe 122 as shown in FIG. The amount of bubbles taken in due to the operation of inserting the piston 11 into the application path 6 can be minimized.

  In order to positively escape the air bubbles taken into the lower end surface of the piston 11, the entire application unit 1 may be inclined with respect to the vertical direction to perform the insertion operation of the piston 11. Alternatively, the lower end surface of the piston 11 may be a conical shape that is pointed downward rather than in a horizontal plane.

  As described above, in the coating unit 1 of the present embodiment, the inner wall surface of the syringe 2 has a stepped shape, so that air bubbles may be mixed into the resin separately from the deaeration using the vacuum pump 41. Is prevented.

  The operation | movement which fills the resin in the syringe 2 of the coating unit 1 comprised as mentioned above is demonstrated below with reference to FIG.

  First, as shown to Fig.2 (a), the syringe 2 with which the nozzle 24 was attached is prepared, and it arrange | positions so that the opening part of the syringe 2 may become upper. Further, the tip of the nozzle 24 is pressed against the sheet 6 so that the resin does not leak from the nozzle 24 when the resin is supplied into the syringe 2. Then, the resin is supplied by dropping into the syringe 2 using a general supply unit 10. This resin supply operation is performed until the liquid level of the resin reaches an intermediate position between the stepped portion 9 and the discharge port 2a.

  Note that the timing of connecting the vacuum pump 41 is not particularly limited, and it may be connected in advance in the step shown in FIG. 2A as in the present embodiment, or immediately before evacuation (FIG. 2 ( You may connect to the process b). Further, when the resin does not leak from the tip of the nozzle 24 when the resin is supplied into the syringe 2, the step of closing the tip of the nozzle 24 with the sheet 6 is not necessarily required.

  Next, as shown in FIG. 2B, the sealing lid 4 to which the piston 11 is attached in advance is fixed to the syringe 2, and the inside of the syringe 2 is sealed. Here, the piston 11 is at a position where the lower end surface is higher than the resin liquid level. In this state, when driving of the vacuum pump 41 is started, the inside of the syringe 2 gradually becomes a negative pressure, and bubbles in the resin are removed. In addition, this deaeration process is performed by the negative pressure of about 50 Pa with respect to the inside of the syringe 2, for example, and the bubble in resin is removed in about 10 seconds in this case.

  The phenomenon that bubbles are removed in this way will be described in more detail. When the inside of the syringe 2 is set to a negative pressure with the vacuum pump 41, the bubbles rise toward the resin liquid surface because the specific gravity of the bubbles is smaller than the specific gravity of the resin. The air bubbles that have risen burst almost simultaneously when they reach the resin liquid level, and the gas that has become the air bubble source is sucked into the vacuum pump 41 through the discharge port 2a. In this way, the bubbles mixed in the resin are removed one after another.

  Next, as shown in FIG. 2C, the piston 11 is moved downward until the O-ring 8 a on the piston tip side is pushed into the application path 6 of the syringe 2. Thereby, the degassed resin is filled in the internal space formed by the application path 6 and the lower end surface of the piston 11. In this case, since air is hardly present in the sealed syringe 2 in the previous step, air is taken into the lower end surface of the piston 11 when the piston 11 is immersed in the resin. There is no. Moreover, even if some air is taken in, the air bubbles at the lower end surface of the syringe 11 can be released by the action of the application unit 1 itself, and thus the internal space sealed by the application path 6 and the piston 11. The amount of bubbles mixed into the resin finally filled in is minimized.

  The piston 11 may be inserted while the vacuum pump 4 is being driven. In this case, after the piston 11 is inserted and the O-ring 8a is pushed into the coating path 6, the driving of the vacuum pump 4 is stopped. do it. Moreover, what is necessary is just to cancel | release the obstruction | occlusion of the nozzle 24 front-end | tip by the sheet | seat 6 after stopping the drive of this vacuum pump 4, for example.

  By the series of steps described above, the resin degassed by evacuation is satisfactorily filled into the syringe 2 without mixing bubbles.

  The reason why evacuation is performed with the lower end surface of the piston 11 positioned higher than the resin liquid surface in the step of FIG. If the lower end surface of the piston 11 is immersed in the resin as shown in FIG. 3 before evacuation, air remains in the syringe 2, so when the piston 11 is immersed in the resin. Air may be taken in, and the bubbles may remain on the lower end surface of the piston 11. In this state, there is a possibility that the remaining bubbles cannot be completely removed even if the inside of the syringe 2 is evacuated to a negative pressure. In this embodiment, in order to prevent this phenomenon, as described above, evacuation is performed before the piston 11 is immersed in resin, and then the piston 11 is pushed down.

  Moreover, it is preferable that the amount of resin supplied into the syringe 2 in the step of FIG. 2A is such that the liquid level is about the middle position between the stepped portion 9 and the discharge port 2a. The reason for this is that when the amount of resin to be supplied is too large, the resin liquid level becomes high and is close to the discharge port 2a. This is because if vacuuming is performed in this state, the resin may be sucked from the discharge port 2a. On the other hand, when the amount of resin supplied is too small, the resin liquid level becomes lower and approaches the stepped portion 9 as shown in FIG. In this state, by performing evacuation with the piston 11 at a high position, the resin deaeration process itself can be carried out satisfactorily (see FIG. 2B), but thereafter, as shown in FIG. 4B. Thus, when the piston 11 is pushed down, air may be taken into the lower end surface of the piston 11. This is due to the fact that the action of the stepped portion 9 as described above cannot be obtained because the resin liquid surface is close to the stepped portion 9, and in this case, as shown in FIG. This is because air may be taken in in the same manner as when the piston 11 is inserted into a general cylindrical syringe 122.

As described above, according to the coating unit 1 of the present embodiment and the coating apparatus on which the coating unit 1 is mounted, the resin can be filled into the syringe 2 without mixing bubbles. Since air bubbles are prevented from being mixed in this way, the pressing force of the piston 11 is directly transmitted to the resin in the syringe 2, so that a desired amount of resin is extruded with good responsiveness in response to the pushing of the piston 11. It can be performed. Further, “drip” does not occur, and the movement of the piston 11 is stopped and the extrusion of the resin is stopped at the same time. Further, the piston-type coating unit 1 as in the present embodiment has a configuration of Patent Document 3 shown in FIG. 10 by displacing the piston 11 with high accuracy using a piston drive mechanism of a coating device (not shown). Compared to the above, a small amount of coating can be easily performed.
(Second Embodiment)
FIG. 5 is a diagram showing a configuration of a coating unit according to the second embodiment of the present invention.

  In the coating unit 51 of the second embodiment, an exhaust port for degassing the inside of the syringe 22 is provided not on the peripheral wall of the syringe 22 but on the piston 21 side. The illustrated sheet 16, nozzle 24, and syringe 22 are the same as those of the coating unit 1 in FIG.

  The application unit 51 includes an exhaust pipe member 23 and a piston 21 that is slidably supported by the sealing lid 4. The outer shape of the piston 21 is the same as that of the piston 11 in FIG. 1. .

  The exhaust pipe member 23 is disposed along the axial direction so as to penetrate the center of the piston 21, and communicates the inside and outside of the syringe 22 sealed by the sealing lid 4. In order from the exhaust port 23 a side, a vacuum pump 41 that makes the inside of the syringe 22 a negative pressure and a valve 36 that opens and closes the exhaust tube member 23 are attached to the exhaust tube member 23. Thereby, the inside of the syringe 22 is deaerated by driving the vacuum pump 41 with the valve 36 opened.

  A method for filling the coating unit 51 with resin will be described below.

  First, as in the step of FIG. 2A, the resin is supplied into the syringe 22 with the sealing lid 4 removed. The supply amount at this time may be such that the resin liquid level exceeds the stepped portion 9 of the syringe 22. 2B, the sealing lid 4 is attached to the syringe 22 so that the lower end surface of the piston 21 is higher than the resin liquid level. Then, evacuation is performed by driving the vacuum pump 41 with the valve 36 opened, and the sealed syringe 22 is set to a negative pressure. Thereby, the air in the syringe 22 and the air bubbles mixed in the resin are degassed.

  Next, while the vacuum pump 41 is driven, the piston 21 is pushed downward as in the process of FIG. Then, when the lower end surface of the piston 21 is immersed in the resin, the resin in the syringe 22 is discharged to the outside through the exhaust pipe member 23 by the action of the vacuum pump 41. Thus, after confirming that the resin has been discharged from the discharge port 23a, the driving of the vacuum pump 41 is stopped and the evacuation is finished. It is more preferable to stop the vacuum pump 41 immediately after confirming that the resin is discharged from the discharge port 23a so that unnecessary resin is not discharged. Further, this confirmation operation can be performed by providing a known sensor capable of detecting the discharge of the resin in the vicinity of the discharge port 23a.

  Next, the exhaust pipe member 23 is closed by closing the valve 36. Thereby, outside air is prevented from being taken into the syringe 22 having a negative pressure from the discharge port 23a. Thereafter, the piston 21 whose tip side is immersed in the resin is further moved downward until the O-ring 8 a is pushed into the coating path 6. As a result, the degassed resin is satisfactorily filled into the internal space formed by the application path 6 and the lower end surface of the piston 21 without introducing bubbles.

  Note that the sheet 16 (see FIG. 2) described in the first embodiment is preferably made of an elastic member so as to be able to reliably contact and close the tip of the nozzle 24, for example, a resin. It may be a sheet or the like. Further, as shown in FIG. 6, for example, the nozzle 24 may be closed. In the coating unit of FIG. 6A, a valve 46 is provided on the nozzle 34, and the nozzle 34 is thereby opened and closed. The valve 46 may be, for example, a hand valve, an electromagnetic valve, or a pneumatic valve. In addition to the valve, a check valve that prevents air bubbles from being taken in from the tip of the nozzle may be used. The coating unit in FIG. 6B shows a state during the deaeration process, and the tip of the nozzle 24 is immersed in the resin in the container. The resin in the container is the same as the resin filled in the syringe 2. The illustrated closing method is only for closing the nozzle 24, and the vacuum pump 41 is driven to make the inside of the syringe 2 have a negative pressure so that the resin in the container can be removed from the syringe 2 through the nozzle 24. It is not intended to be introduced within. Therefore, when this method is used, it is preferable to select the vacuum pump 41 having an output that does not suck the resin in the container from the nozzle 24.

  In addition to the vacuum pump 41, the vacuum in the syringe 2 may be a vacuum ejector, a vacuum unit, or the like. When using a vacuum ejector, evacuation is performed by connecting an air source previously installed in a factory or the like to an ejector portion of the vacuum ejector and moving the ejector portion forward and backward.

  The application unit of the present invention is, for example, an underfill agent application unit for applying rigidity in order to provide rigidity between flip mounted chips, or cream solder application for applying adhesion between substrates. Can be used as a unit.

It is a figure which shows the structure of the coating unit by the 1st Embodiment of this invention. It is a figure for demonstrating the operation | movement which fills resin in the syringe of the application unit shown in FIG. It is a figure for demonstrating the problem at the time of pushing down a piston before deaeration. It is a figure for demonstrating a problem in case the quantity of resin supplied in a syringe is too small. It is a figure which shows the structure of the coating unit by the 2nd Embodiment of this invention. It is a figure which shows the various methods which obstruct | occlude a nozzle when performing deaeration. It is a figure for demonstrating an example of the method of supplying resin to a piston type application unit. It is a figure for demonstrating the conventional filling method with which resin is filled to a piston type application unit. It is a figure for demonstrating the conventional method of removing the bubble in resin. It is a figure which shows the conventional coating device apply | coated after deaerating solder paste.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,51 Application | coating unit 2,22 Syringe 2a Outlet 4 Sealing lid 6 Application path 7 Supply path 8a, 8b O-ring 9 Step part 10 Supply unit 11, 21 Piston 12 Nozzle connection port 16 Sheet 23 Exhaust pipe member 23a Discharge port 24, 34 Nozzle 36, 46 Valve 41 Vacuum pump

Claims (8)

In the coating unit for extruding a liquidity material is pressed by the piston,
A first portion where the piston slides while maintaining hermeticity is formed on the front end side, has a larger inner diameter than the first portion, and a second portion continuous with the first portion is a rear end A syringe that is formed on the side and that forms an internal space sealed by the piston and an inner wall surface on which the piston slides when the piston is in the first portion;
A lid for sealing, which slidably supports the piston, and is attached to an end of the second part to seal the inside of the syringe;
An exhaust port that is formed in the second part of the syringe and communicates with the inside and outside of the syringe sealed by the sealing lid;
An application unit comprising: a pump unit connected to the exhaust port and configured to deaerate the inside of the syringe when the piston is located on the rear end side of the first part of the syringe . Said piston, said piston and said piston is provided with an O-ring for maintaining airtightness between the inner wall surface of the syringe to slide, coating unit according to claim 1. The sealing lid is provided with an O-ring for maintaining airtightness between said piston and said sealing cover, the coating unit according to claim 1 or 2. The coating unit according to any one of claims 1 to 3 ,
Positioning means for relatively positioning the application unit and the application object;
And a driving unit that moves the piston of the coating unit in an axial direction thereof. A first part formed on the front end side of the syringe and sliding while the piston maintains hermeticity, and has a larger inner diameter than the first part, and a rear end of the syringe continuously to the first part Disposing the syringe provided with the second part formed on the side so that the first part is downward;
Supplying the flowable material into the syringe to a height exceeding the first portion;
Sealing the inside of the syringe by attaching a sealing lid that slidably supports the piston to the syringe supplied with the flowable material;
Degassing the flowable material with a negative pressure in the sealed syringe without inserting the piston into the first part;
And a step of inserting the piston into the first part after the flowable material is degassed. The said deaeration process is a filling method of the coating unit of Claim 5 performed in the state which has the lower end surface of the said piston above the liquid level of the said fluid material. The method of filling the coating unit according to claim 5 or 6 , wherein the step of inserting the piston into the first part is performed while performing the deaeration step. The filling method of the coating unit according to any one of claims 5 to 7 , wherein the deaeration step is performed in a state where a nozzle attached to a distal end side of the syringe is closed.

Images