JP4421270B2 - probe - Google Patents

Description

  The present invention relates to a probe used for an energization test of an integrated circuit.

  An energization test (that is, inspection) of an integrated circuit (IC) is one of important processes as a technique for determining whether a desired product can be obtained by a certain design or a certain manufacturing method. This type of energization test is performed by using at least one probe and applying overdrive to the probe.

  As one of this type of probe, a core wire using a thin metal wire, an electrical insulator such as an electrical insulator disposed around the core wire, and a cylindrical metal exterior disposed around the electrical insulator There is one using a so-called semi-rigid cable having a jacket (Patent Document 1).

Japanese National Patent Publication No. 8-510553

  In the above conventional probe, one end portion of the core wire is projected from one end portion of the electrical insulator and the metal sheath to form a signal needle tip portion, and a pair of long conductors (spring plate extension portions) are connected to the core wire. Is attached to the metal jacket with a gap in the diameter direction of the metal jacket with one end portion therebetween, and is used as a ground needle tip.

  However, in the above-described conventional probe, since the conductor must be bonded to the metal sheath to form the ground needle tip, the relative positional relationship between the signal needle tip and the tip of the ground needle tip is predetermined. It is difficult to bond the conductor to the metal jacket so that the state becomes.

  As another probe using a semi-rigid cable, a first metal piece that acts as a signal needle tip and a pair of second metal pieces that act as a ground needle tip are respectively connected to the tips of a core wire and a metal jacket. There are some which are bonded by an adhesive such as solder.

  However, since the other probes also attach the first and second metal pieces to the core wire and the metal jacket, the metal pieces are attached so that the positional relationship between the tips of the metal pieces is in a predetermined state. It is difficult.

  Further, in the other probe, since each metal piece absorbs the load applied at the time of overdrive, the effective length of the metal piece, particularly the second metal piece must be shortened to increase the stress, As a result, the overdrive tolerance is low.

  An object of the present invention is to achieve both high mechanical durability and high-frequency characteristics and facilitate the manufacture of a probe.

  A probe according to the present invention includes a core wire, an electrical insulator disposed around the core wire, a cylindrical conductive metal sheath disposed around the electrical insulator, and one end portion of the sheath. It includes a sleeve disposed around and a pair of long conductors disposed on the sleeve, and one end portion of the core wire projects from one end side of the electrical insulator.

  The sleeve has a pair of first slits extending from one end portion in the longitudinal direction of the sleeve to a middle portion at a position spaced in the diameter direction of the sleeve, and a pair of second slits individually following the first slit. With. Each of the first slits has a larger width dimension than the second slit. Each conductor has one end projecting from the first slit and the other end positioned in the second slit.

  One end of the core wire is used as a signal needle tip, and one end of each conductor is used as a ground needle tip. When the overdrive acts on the probe in a state where the needle tips are in contact with the electrodes of the integrated circuit, the load is absorbed by the elastic bending of the probe.

  In particular, since the first slit has a width dimension larger than that of the second slit, each conductor has an effective length dimension in the region on the side of the ground needle tip than the second slit. And has high mechanical durability.

  In addition, since the ground needle tips are located on both sides of the signal needle tip, the mixing of noise into the signal needle tips is reduced by the ground needle tip, and high frequency characteristics are improved.

  Further, since each conductor is disposed in the first and second slits, the conductor and the sleeve can be unitized by attaching the conductor to the sleeve before attaching the sleeve to the jacket. . As a result, the manufacture of the probe is facilitated.

  The one end portion of the core wire may be a first needle tip, and the one end portion of each conductor may be a second needle tip.

  Each of the conductors may be a plate electrode having a thickness dimension smaller than the width dimension of the first slit. By doing so, the conductor does not come into contact with one end of the sleeve forming the first slit when the electrode is not pressed against the electrode of the integrated circuit in the region on the one end side from the second slit. However, the probe first bends and contacts one end of the sleeve forming the first slit, as it is pressed against the electrode of the integrated circuit. As a result, a preload is applied to the conductor. Next, when the overdrive acts on the probe, the entire probe is elastically deformed. As a result, the length from one end of the sleeve to one end of the conductor is reduced, and the probe has higher high-frequency characteristics, and the pressing force (needle pressure) between the core wire and the conductor against the electrode of the integrated circuit is substantially reduced. Be the same.

  The thickness direction of each of the conductors may be the width direction of the first and second slits.

  The other end of each conductor may be inserted into the second slit and adhered to the sleeve. By doing so, it becomes easier to unitize the conductor and the sleeve, and the manufacture of the probe becomes easier.

  Each of the conductors may be inclined with respect to a plane including the axis of the sleeve and the diametrical direction so that one end of the conductor is positioned below the one end of the core wire. By doing so, the conductor does not contact one end of the sleeve forming the first slit in the region on the one end side from the second slit when the electrode is not pressed to the electrode of the integrated circuit. By being pressed by the electrode, it is bent and comes into contact with one end of the sleeve forming the first slit.

  The sleeve may receive one end of the outer cover and be bonded to the outer cover. By doing so, the sleeve and the outer cover are firmly coupled.

  1 to 4, the probe 10 includes a core wire 12 using a conductive thin metal wire, an electric insulator 14 arranged around the core wire 12, and an electric insulator 14 arranged around the electric insulator 14. It includes a jacket 16, a sleeve 18 disposed around one end of the jacket 16, and a pair of long plate-like conductors 20 disposed on the sleeve 18. The core wire 12, the electrical insulator 14, the jacket 16 and the sleeve 18 are arranged coaxially.

  One end portion of the core wire 12 protrudes from one end side of the electrical insulator 14 to form a sharp needle tip 22 for signals. The electrical insulator 14 is made of a dielectric material such as rubber so as to form an electrical insulation layer around the core wire 12. The jacket 16 is formed of a conductive metal in a cylindrical shape.

  The core wire 12, the electrical insulator 14, and the jacket 16 jointly form a semi-rigid cable. For this reason, the core wire 12, the electrical insulator 14, and the jacket 16 can be manufactured using a commercially available semi-rigid cable.

  The sleeve 18 is formed in a cylindrical shape from a conductive metal, and receives one end of the outer cover 16 and is bonded to the outer cover 16 by a conductive adhesive such as solder. As a result, the sleeve 18 is firmly fixed to the outer cover 16.

  The sleeve 18 has a pair of first slits 24 extending from one end portion in the longitudinal direction of the sleeve 18 to the middle at a portion spaced in the diameter direction of the sleeve 18 and a pair continuing individually to the other end side of the first slit 24. The second slit 26 is provided.

  Each first slit 24 has a width dimension larger than the width dimension of the second slit 26 and the thickness dimension of the conductor 20. The first and second slits 24 and 26 have substantially the same length.

  Each conductor 20 has a thickness direction in the width direction of the first and second slits 24 and 26, and one end of the conductor 20 protrudes from the first slit 24 to the first slit 24. It is received and inserted into the second slit 26.

  Each conductor 20 is bonded to the sleeve 18 at the other end with a conductive adhesive such as solder. Thereby, coupled with the fact that the sleeve 18 is bonded to the jacket 16, each conductor 20 is fixed to the jacket 16 so as not to move.

  Each conductor 20 is inclined by an angle θ with respect to the axis of the probe 10, particularly the sleeve 18, so that one end of the conductor 20 is displaced with respect to one end of the core wire 12. The tip of each conductor 20 protrudes by the same length as that of the signal needle tip 22 to form a sharp needle tip 28 for ground.

  The probe 10 has a connector attached to the other end and is attached to the base 30 by this connector. The connector is electrically connected to the other ends of the core wire 12 and the jacket 16, and is used for electrically connecting the core wire 12 and the jacket 16 to the tester.

  The base 30 is used for attaching the probe 10 to an inspection apparatus including a tester. At least one probe 10 is attached to and supported by the base 30.

  When not in use, each probe 20 has an angle θ with respect to the axis of the probe 10 so that the probe tip 28 is displaced slightly below the probe tip 22 as shown by the dotted line in FIG. Has been. However, each conductor 20 is not in contact with one end of the sleeve forming the first slit in the region on the tip side of the second slit 26 when the overdrive is not operated.

  The probe 10 is pressed against the electrode of the integrated circuit in a state where the needle tip 28 is in contact with the electrode of the integrated circuit. At this time, as indicated by a solid line in FIG. 1, each conductor 20 is first elastically deformed in the region on the tip side from the second slit 26, and in the region on the tip side from the second slit 26, It contacts one end 32 of the sleeve 18 forming the slit 24.

  As a result, the conductor 20 has a high mechanical durability because its effective length dimension is an area closer to the tip than the second slit 26. The conductor 20 is preloaded by the elastic deformation described above. The needle tip 22 is brought into contact with the electrode of the integrated circuit when the conductor 20 comes into contact with the one end 32 of the sleeve 18. Thereby, the effective length dimension of the conductor 20, particularly the length dimension of the needle tip 28, is the length dimension from the one end 32 of the sleeve 18 to one end of the conductor 20 (the length dimension of the needle tip region 28). And the high frequency characteristics of the probe 10 are improved.

  Then, the overdrive OD acts on the probe 10 as shown in FIG. 1 by further pressing against the integrated circuit and the probe 10. Thereby, the probe 10 is elastically deformed in the whole part of a semi-rigid cable. As a result, coupled with the fact that the conductor 20 is preloaded, the needle tip 22 and the needle tip 28 are pressed against the electrode of the integrated circuit with substantially the same needle pressure, and the probe 10 contacts the electrode of the integrated circuit with a predetermined needle. Pressed with pressure.

  In the probe 10, since the ground needle tip 28 is located on both sides of the signal needle tip 22, the mixing of noise into the signal needle tip 22 is reduced by the ground needle tip 28, and high frequency characteristics are maintained. Is done. Further, the movements of the signal needle tip 22 and the ground needle tip 28 do not affect the other party.

  In the probe 10, the sleeve 18 and the conductor 20 can be unitized by attaching the conductor 20 to the sleeve 18 before attaching the sleeve 18 to the jacket 16. For this reason, the processing of the one end side of the core wire 12, the electrical insulator 14, and the jacket 16 and the processing of the sleeve 18 and the conductor 20 may be performed separately, and finally both may be combined. Manufacture of the probe 10 becomes easy.

  In particular, by bonding the other end of each conductor 20 to the sleeve 18 with the second slit 26 inserted into the second slit 26, unitization of the conductor 20 and the sleeve 18 becomes easier, and the probe 10 Manufacturing is easier.

  The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the present invention.

It is a front view of the front-end | tip part which shows one Example of the probe which concerns on this invention. It is a longitudinal cross-sectional view of the probe shown in FIG. It is sectional drawing obtained along the 3-3 line in FIG. It is a figure which shows one Example of the relationship between a probe and the base which mounts this.

DESCRIPTION OF SYMBOLS 10 Probe 12 Core wire 14 Electrical insulator 16 Outer casing 18 Sleeve 20 Conductor 22, 28 Needle tip 24, 26 1st and 2nd slit

Claims (7)

A core wire, an electrical insulator disposed around the core wire, a cylindrical conductive metal sheath disposed around the electrical insulator, and a sleeve disposed around one end of the sheath; A pair of long conductors disposed on the sleeve,
One end portion of the core wire protrudes from one end side of the electrical insulator,
The sleeve has a pair of first slits extending from one end portion in the longitudinal direction of the sleeve to a middle portion of the sleeve at a diametrically spaced portion, and a pair of second slits individually following the first slit. And
Each of the first slits has a larger width dimension than the second slit,
Each conductor is a probe in which one end side thereof protrudes from the first slit and the other end is positioned in the second slit.   The probe according to claim 1, wherein the one end portion of the core wire is a first needle tip, and the one end portion of each conductor is a second needle tip.   The probe according to claim 1 or 2, wherein each of the conductors is a plate-like electrode having a thickness dimension smaller than the width dimension of the first slit.   The probe according to claim 3, wherein the thickness direction of each of the conductors is the width direction of the first and second slits.   5. The probe according to claim 1, wherein the other end of each conductor is inserted into the second slit and bonded to the sleeve.   6. The device according to claim 1, wherein each of the conductors is inclined with respect to a plane including the axis of the sleeve and the diametrical direction so that one end of the conductor is positioned below the one end of the core wire. The probe according to claim 1.   The probe according to claim 1, wherein the sleeve receives one end of the outer cover and is bonded to the outer cover.

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