JP2005114393A - Contact probe with lead wire, and manufacturing method therefor - Google Patents

Contact probe with lead wire, and manufacturing method therefor Download PDF

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Publication number
JP2005114393A
JP2005114393A JP2003345387A JP2003345387A JP2005114393A JP 2005114393 A JP2005114393 A JP 2005114393A JP 2003345387 A JP2003345387 A JP 2003345387A JP 2003345387 A JP2003345387 A JP 2003345387A JP 2005114393 A JP2005114393 A JP 2005114393A
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probe
tip
lead wire
metal spring
wire
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Yoichi Okada
洋一 岡田
Yutaka Kuriya
豊 栗屋
Hirokazu Ishimura
宏和 石村
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Totoku Electric Co Ltd
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Totoku Electric Co Ltd
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Priority to JP2003345387A priority Critical patent/JP2005114393A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a low-cost contact probe capable of eliminating contact resistance caused by connecting the probe to a lead wire and uncertainty thereof, capable of reducing inspection jig assembling man-hours, allowing stopping in passing-through into a jig hole, when assembling an inspection jig, and which is superior in assembling workability. <P>SOLUTION: An insulation coating 6 is applied to an outer circumference of a metal spring wire 5, superior in conductivity and spring property, to serve as an insulation metal spring w, a tip thereof, is worked into a semi-circular shape by grinding work to form a tip ground part 7; then a plated layer m is provided in the tip ground part 7, by plating treatment to form a tip plated part 7; and two portions are thereafter folded in a prescribed length of position from the tip to provide a stopper part 4. The insulation metal spring w, extending from the stopper part 4 to the tip plated part 7, is set as a probe part 2, and the insulation metal spring w in the rear side of the stopper part 4 is set as a lead wire part 3, so as to form this contact probe 1 with the lead wire. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、主に電子部品および基板などの導通検査に用いる検査用のコンタクトプローブに関するものであり、更に詳しくは、ピン形状のプローブを座屈させる(押し縮める)ことにより接触圧力を得る方式のコンタクトプローブに関するものである。   The present invention relates to a contact probe for inspection mainly used for continuity inspection of electronic parts and substrates, and more specifically, a method of obtaining a contact pressure by buckling (pushing) a pin-shaped probe. It relates to contact probes.

従来のピン形状コンタクトプローブについて図4を用いて説明する。なお図4では従来のピン形状コンタクトプローブを検査治具にアッセンブリした状態と検査時のプローブ座屈状態を示している。
従来のピン形状コンタクトプローブは、検査治具110,113(プローブガイド用穴明き板)、検査治具111(リード線固定用穴明き板)内にアッセンブリされたプローブ101とこれを検査装置の電極(図示せず)へ接続するリード線103に分かれており、プローブ101とリード線103間の接続は、検査対象(電子部品などの電極)112へプローブが接触した時の接触圧力により座屈したプローブ101(b)がリード線103の端面へ接触することにより接続される構造となっていた。例えば下記特許文献1にこのような構造のコンタクトプローブが記載されている。
特開2003−130888
A conventional pin-shaped contact probe will be described with reference to FIG. FIG. 4 shows a state where a conventional pin-shaped contact probe is assembled in an inspection jig and a probe buckling state during inspection.
The conventional pin-shaped contact probe includes inspection jigs 110 and 113 (probe guide hole plate), an inspection jig 111 (lead wire fixing hole plate) and a probe 101 assembled therewith. The lead wire 103 is connected to an electrode (not shown), and the connection between the probe 101 and the lead wire 103 is based on the contact pressure when the probe contacts the inspection object (electrode such as an electronic component) 112. The bent probe 101 (b) is connected by contacting the end surface of the lead wire 103. For example, Patent Document 1 below discloses a contact probe having such a structure.
JP2003-130888

従来のピン形状コンタクトプローブはプローブとリード線の接続による接触抵抗とその不確かさにより、検査対象の正確な電気抵抗を測定することが困難であるという問題があり、測定精度上好ましくなかった。更に、プローブとリード線部に分かれていたため、部品点数が多く、コストアップの原因となるという問題があった。
本発明は、上記従来技術が有する各種問題点を解決するためになされたものであり、プローブとリード線の接続による接触抵抗とその不確かさを無くし、また、検査治具アッセンブリ工数を削減することができ、更に、検査治具アッセンブリ時に治具穴へ通過させることも、ストップさせることも可能とし、アッセンブリ作業性に優れ、また低コストとなるリード線付きコンタクトプローブを提供することを目的とする。
The conventional pin-shaped contact probe has a problem that it is difficult to measure the accurate electrical resistance of the inspection object due to the contact resistance due to the connection between the probe and the lead wire and its uncertainty, which is not preferable in terms of measurement accuracy. Further, since the probe and the lead wire portion are separated, there is a problem that the number of parts is large and the cost is increased.
The present invention has been made to solve the various problems of the prior art described above, and eliminates the contact resistance and the uncertainty due to the connection between the probe and the lead wire, and reduces the number of inspection jig assembly man-hours. Furthermore, it is possible to provide a contact probe with a lead wire that can be passed through a jig hole during inspection jig assembly and can be stopped, has excellent assembly workability, and is low in cost. .

第1の観点として本発明は、ピン形状のプローブを座屈することにより接触圧力を得る方式のコンタクトプローブにおいて、プローブ部と、該プローブ部を検査装置に接続するリード線部が、ばね性と導電性を有する金属ばね線の外周に絶縁被覆を施した絶縁金属ばね線の一本で形成されており、また前記プローブ部の先端部が半球形状、針状または平坦形状に加工されており、また先端加工部にはめっき処理が施されており、またプローブ部とリード線部の境界には、前記絶縁金属ばね線を2箇所以上折り曲げ加工した構造のストッパー部が設けられていることを特徴とするリード線付きコンタクトプローブにある。
上記第1観点のコンタクトプローブでは、ばね性を有するプローブ部とこれを検査装置へ接続するリード線部が絶縁金属ばね線一本で形成されていることにより、プローブとリード線の接続による接触抵抗とその不確かさを無くし、検査時の電気抵抗を安定化させる作用がある。また、プローブとリード線の配線接続が同時にできるため、検査治具アッセンブリ工数を削減することができる。また前記プローブ部の先端部が半球形状等に加工されており、また先端加工部にはめっき処理が施されているので、先端加工部は防錆され、また検査対象(電子部品などの電極)との接触抵抗が低くなり検査が良好に行われる。更に、ストッパー構造に折り曲げ加工形状を採用したことにより、検査治具アッセンブリ時に治具穴へ通過させることも、ストップさせることも可能となり、アッセンブリ作業性を改善する作用がある。また、部品点数が減ることにより、コストを低減する効果がある。
As a first aspect, the present invention relates to a contact probe that obtains a contact pressure by buckling a pin-shaped probe, wherein the probe part and the lead wire part that connects the probe part to the inspection device have springiness and conductivity. Formed of a single insulated metal spring wire having an insulating coating on the outer periphery of the metal spring wire, and the tip of the probe portion is processed into a hemispherical shape, a needle shape, or a flat shape, and The tip processed portion is plated, and the insulating metal spring wire is bent at two or more locations at the boundary between the probe portion and the lead wire portion. It is in the contact probe with lead wire.
In the contact probe according to the first aspect, the probe portion having the spring property and the lead wire portion for connecting the probe portion to the inspection device are formed of one insulated metal spring wire, so that the contact resistance due to the connection between the probe and the lead wire is achieved. And has the effect of stabilizing the electrical resistance during inspection. Further, since the probe and the lead wire can be connected at the same time, the number of inspection jig assembly steps can be reduced. The tip of the probe is processed into a hemispherical shape, and the tip processed portion is plated, so that the tip processed portion is rust-proof and is subject to inspection (electrodes for electronic components, etc.) The contact resistance is low and the inspection is performed well. Further, by adopting a bent shape in the stopper structure, it is possible to pass through the jig hole during the inspection jig assembly, or to stop it, thereby improving the assembly workability. Moreover, there is an effect of reducing the cost by reducing the number of parts.

第2の観点として本発明は、前記金属ばね線が真直であり、また金属ばね線の材質が銅合金またはタングステンであることを特徴とするリード線付きコンタクトプローブにある。
上記第2観点のコンタクトプローブでは、第1の観点の作用効果に加え、前記金属ばね線が真直であるのでばね性が良好となる。また金属ばね線の材質が銅合金およびタングステンなので電気抵抗値を低減することができる。
As a second aspect, the present invention provides a contact probe with a lead wire, wherein the metal spring wire is straight and the material of the metal spring wire is copper alloy or tungsten.
In the contact probe of the second aspect, in addition to the effects of the first aspect, the metal spring wire is straight, so that the spring property is good. Further, since the metal spring wire is made of copper alloy and tungsten, the electric resistance value can be reduced.

第3の観点として本発明は、上記第1または第2観点記載のリード線付きコンタクトプローブの製造方法であって、金属ばね線の外周に絶縁被覆を施して絶縁金属ばね線とする絶縁被覆加工工程と、前記絶縁金属ばね線を所定の長さに切断する定尺切断加工工程と、定尺切断された絶縁金属ばね線の先端を研削加工により半球形状、針状または平坦形状に加工する先端部研削加工工程と、研削加工した先端部へめっき処理を施す先端部めっき処理工程と、めっき処理先端部から所定の長さ位置に2箇所以上の折り曲げ加工を施してストッパー部とするとともに、プローブ部とリード線部の境界とするストッパー部折り曲げ加工工程と、を有することを特徴とするリード線付きコンタクトプローブの製造方法にある。
上記第3観点のコンタクトプローブの製造方法では、上記第1または第2観点のリード線付きコンタクトプローブを好適に製造することができる。
According to a third aspect of the present invention, there is provided a method for manufacturing a contact probe with a lead wire according to the first or second aspect, wherein an insulating coating is provided on the outer periphery of the metal spring wire to form an insulating metal spring wire. A step of cutting the insulating metal spring wire into a predetermined length, and a tip of the insulating metal spring wire that has been cut into a hemispherical shape, a needle shape, or a flat shape by grinding. A part grinding process, a tip plating process for plating the ground tip, and a bending process at two or more locations from the plating tip to a predetermined length position to form a stopper, and a probe A method of manufacturing a contact probe with a lead wire, comprising: a step of bending a stopper portion as a boundary between the lead portion and the lead wire portion.
In the contact probe manufacturing method according to the third aspect, the contact probe with lead wires according to the first or second aspect can be preferably manufactured.

本発明のリード線付きコンタクトプローブによれば、プローブとリード線を絶縁金属ばね線一本で形成することにより、プローブとリード線の接続による接触抵抗とその不確かさを無くすことができ、検査時の電気抵抗を安定化させることができる。また、プローブとリード線の配線接続が同時にできるため、検査治具アッセンブリ工数を削減することができる。また前記プローブ部の先端部が半球形状等に加工されており、また先端加工部にはめっき処理が施されているので、先端加工部は防錆され、また検査対象との接触が良好に行われる。更に、ストッパー構造に折り曲げ加工形状を採用することにより、検査治具アッセンブリ時に治具穴へ通過させることも、ストップさせることも可能となり、検査治具アッセンブリ作業性を改善することができる。従って、本発明は産業上に寄与する効果が極めて大である。   According to the contact probe with a lead wire of the present invention, the contact resistance and the uncertainty due to the connection between the probe and the lead wire can be eliminated by forming the probe and the lead wire with a single insulated metal spring wire. Can be stabilized. In addition, since the probe and the lead wire can be connected simultaneously, the number of inspection jig assembly steps can be reduced. In addition, the tip of the probe is processed into a hemispherical shape, etc., and the tip processed part is plated, so the tip processed part is rust-proof and makes good contact with the inspection object. Is called. Further, by adopting the bent shape in the stopper structure, it is possible to pass through the jig hole during the inspection jig assembly or to stop the inspection jig assembly, thereby improving the workability of the inspection jig assembly. Therefore, the present invention has an extremely large effect contributing to the industry.

以下、本発明の内容を、図に示す実施の形態により更に詳細に説明する。なお、これにより本発明が限定されるものではない。
図1は、本発明のリード線付きコンタクトプローブの一例を示す略図であり、同図(a)は略正面図、また同図(b)は同図(a)のb部の拡大図である。図2は本発明のコンタクトプローブを検査治具へアッセンブリした状態と検査時のプローブ座屈状態を示す略図である。また図3は、本発明のコンタクトプローブの製造実施態様を示す製造工程図である。
これらの図において、1はリード線付きコンタクトプローブ、1(a)はリード線付きコンタクトプローブを検査治具へアッセンブリした状態、1(b)はリード線付きコンタクトプローブのプローブ部が検査時に座屈した状態、2はプローブ部、3はリード線部、3tはリード線部端末、4は折り曲げ加工部(ストッパー部)、5は金属ばね線(真直ベリリウム銅線)、6は絶縁被覆(ポリウレタン皮膜)、7は先端研削加工部と先端めっき加工部、10は検査治具(プローブガイド用穴明き板)、11は検査治具(プローブストップ用穴明き板)、12は検査対象(電子部品などの電極)、mはめっき層(ニッケルめっき層)、またwは絶縁金属ばね線(絶縁真直ベリリウム銅線)である。
Hereinafter, the contents of the present invention will be described in more detail with reference to embodiments shown in the drawings. Note that the present invention is not limited thereby.
FIG. 1 is a schematic view showing an example of a contact probe with a lead wire according to the present invention, where FIG. 1 (a) is a schematic front view, and FIG. 1 (b) is an enlarged view of part b of FIG. 1 (a). . FIG. 2 is a schematic view showing a state in which the contact probe of the present invention is assembled to an inspection jig and a probe buckling state at the time of inspection. FIG. 3 is a manufacturing process diagram showing an embodiment of manufacturing the contact probe of the present invention.
In these figures, 1 is a contact probe with a lead wire, 1 (a) is a state in which the contact probe with a lead wire is assembled into an inspection jig, and 1 (b) is a probe portion of the contact probe with a lead wire during buckling. 2 is the probe part, 3 is the lead wire part, 3t is the lead wire part terminal, 4 is the bent part (stopper part), 5 is the metal spring wire (straight beryllium copper wire), 6 is the insulation coating (polyurethane film) ), 7 is the tip grinding part and tip plating part, 10 is the inspection jig (hole plate for probe guide), 11 is the inspection jig (hole plate for probe stop), 12 is the inspection object (electronic Electrodes of components), m is a plating layer (nickel plating layer), and w is an insulated metal spring wire (insulated straight beryllium copper wire).

本発明のリード線付きコンタクトプローブの一例について図1を用いて説明する。
本発明のコンタクトプローブ1は、銅合金あるいはタングステン等、導電性とばね性に優れた金属ばね線5の外周に絶縁被覆6を施して絶縁金属ばね線wとし、その先端を研削加工により半球形状に加工して先端研削加工部7とし、次いで、先端研削加工部7にめっき処理によりめっき層mを設けて先端めっき加工部7とした後、先端から所定長さの位置へ2箇所の折り曲げ加工を施して折り曲げ加工部(ストッパー部)4を設けた構造である。そして、ストッパー部4から先端めっき加工部7までの絶縁金属ばね線wをプローブ部2とし、またストッパー部4以降の絶縁金属ばね線wをリード線部3としている。
An example of a contact probe with a lead wire according to the present invention will be described with reference to FIG.
The contact probe 1 of the present invention is an insulating metal spring wire w by applying an insulating coating 6 to the outer periphery of a metal spring wire 5 such as copper alloy or tungsten, which is excellent in conductivity and springiness, and the tip thereof is hemispherically shaped by grinding. Then, a tip grinding portion 7 is formed, and then the tip grinding portion 7 is provided with a plating layer m by plating so that the tip plating portion 7 is formed, and then bent at two positions from the tip to a predetermined length. And a bent portion (stopper portion) 4 is provided. The insulating metal spring wire w from the stopper portion 4 to the tip plating portion 7 is the probe portion 2, and the insulating metal spring wire w after the stopper portion 4 is the lead wire portion 3.

次に本発明のリード線付きコンタクトプローブを検査治具へアッセンブリする方法について図2を用いて説明する。
先ず、リード線付きコンタクトプローブ1を、検査治具の所定長さ間隔、例えば15mm間隔に固定した穴明きの2枚板(プローブガイド用穴明き板10、プローブストップ用穴明き板11)の1枚目板10の治具穴へリード線部端末3t側から挿入する。そして、ストッパー部となる折り曲げ加工部4を1枚目板10の穴へ弾性変形させながらリード線部3を引っ張って通過させ、2枚目板11の治具穴へは折り曲げ加工部4を止めるのみとし、検査治具へのアッセンブリを完了する。この状態が1(a)である。続いてリード線部端末3tを検査装置端子へはんだ付けなどにより接続し、検査装置への接続を完了する(図示せず)。
また本発明のコンタクトプローブ1のプローブ部2が検査時に検査対象(電子部品などの電極)12に接触する(例えば接触圧5g)と、1(b)に示すように座屈した状態となる。
Next, a method for assembling the contact probe with a lead wire of the present invention into an inspection jig will be described with reference to FIG.
First, the perforated two plates (probe guide drilling plate 10, probe stop drilling plate 11) in which the contact probe 1 with lead wire is fixed at a predetermined length interval of the inspection jig, for example, 15 mm interval. ) Is inserted into the jig hole of the first plate 10 from the lead wire end 3t side. Then, the bending portion 4 serving as a stopper portion is elastically deformed into the hole of the first plate 10 while the lead wire portion 3 is pulled and passed, and the bending portion 4 is stopped in the jig hole of the second plate 11. And complete the assembly to the inspection jig. This state is 1 (a). Subsequently, the lead wire portion terminal 3t is connected to the inspection device terminal by soldering or the like, and the connection to the inspection device is completed (not shown).
Further, when the probe portion 2 of the contact probe 1 of the present invention comes into contact with an inspection object (electrode such as an electronic component) 12 at the time of inspection (for example, a contact pressure of 5 g), it is in a buckled state as shown in 1 (b).

本発明のリード線付きコンタクトプローブの製造方法を図3の製造工程図に沿って説明する。
本発明のコンタクトプローブの製造工程は、金属ばね線の外周に絶縁被覆を施して絶縁金属ばね線とする絶縁被覆加工工程と、前記絶縁金属ばね線を所定の長さに切断する定尺切断加工工程と、定尺切断された絶縁金属ばね線の先端を研削加工により半球形状、針状または平坦形状に加工する先端部研削加工工程と、研削加工した先端部へめっき処理を施す先端部めっき処理工程と、めっき処理先端部から所定の長さ位置に2箇所以上の折り曲げ加工を施してストッパー部とするとともに、プローブ部とリード線部の境界とするストッパー部折り曲げ加工工程と、からなる。
A method for manufacturing a contact probe with a lead wire according to the present invention will be described with reference to the manufacturing process diagram of FIG.
The manufacturing process of the contact probe of the present invention includes an insulating coating process for forming an insulating metal spring wire by applying an insulating coating to the outer periphery of the metal spring wire, and a regular cutting process for cutting the insulating metal spring wire to a predetermined length. Process, the tip grinding process that grinds the tip of the insulated metal spring wire that has been cut into a regular shape into a hemispherical shape, needle shape, or flat shape by grinding, and the tip plating process that performs plating on the ground tip And a stopper part bending process for forming a stopper part by bending two or more places at a predetermined length position from the front end of the plating process, and forming a boundary between the probe part and the lead wire part.

本発明のリード線付きコンタクトプローブの具体的な製造実施態様について図1、図3を用いて説明する。
先ず金属ばね線5として、ばね性と直線性に優れたφ0.10mmの真直ベリリウム銅線を用い、絶縁皮膜焼付装置(図示せず)により0.05mm厚さのポリウレタン皮膜6を連続的に焼付けることにより、絶縁皮膜付き真直ベリリウム銅線(以下、絶縁真直ベリリウム銅線と略記する)wを製造した。(絶縁被覆加工工程f1)
次に、切断装置で前記絶縁真直ベリリウム銅線を500mm長さに切断した。(定尺切断加工工程f2)
次に、定尺切断した絶縁真直ベリリウム銅線の先端部を研削加工装置により半球形状に研削加工し先端研削加工部7を設けた。(先端部研削加工工程f3)
次に、半球形状に研削加工した先端研削加工部7へニッケルめっき処理を施してニッケルめっき層mを設け、先端めっき加工部7とした。(先端部めっき処理工程f4)
次に、折り曲げ治具にて先端めっき加工部7から所定の長さ部分に、間隔が0.2mmで角度が150°の2箇所の折り曲げ加工部4を有する折り曲げ形状に加工し(ストッパー部折り曲げ加工工程f5)リード線付きコンタクトプローブ1を得た。
上記実施態様では、金属ばね線5に真直ベリリウム銅線を用い、この外周に絶縁被覆6としてポリウレタン皮膜を設けて絶縁真直ベリリウム銅線wとし、次いで定尺切断加工を行い、次いで先端形状を半球形状とした後ニッケルめっき処理を行い、次いで間隔が0.2mmで角度が150°の2箇所の折り曲げ加工による折り曲げ加工部4を有しているが、金属ばね線5の材質は他の銅合金、例えばりん青銅、銅銀合金、またはタングステンであってもよい。また金属ばね線5のサイズは、検査対象の電極の間隔等により選定されるが、例えばφ0.05mm〜φ0.10mmである。また絶縁被覆6は、ポリウレタン皮膜がはんだ付け性を有するので好ましいが、ポリエステル、ポリエステルイミド等、各種のエナメル皮膜が用いられる。また先端研削加工部7の形状は針状または平坦形状(台形等も含む)であってもよい。また、先端めっき加工部7のめっき層mはニッケル以外のめっき材質、例えばニッケル-リン、ニッケル-ボロン、パラジウム、ロジウム等であってもよい。また、折り曲げ加工部4は2箇所以上、例えば3箇所、4箇所であってもよく、また折り曲げ角度および折り曲げ間隔が如何様であっても、何ら本発明を逸脱するものでないことは勿論である。
A specific manufacturing embodiment of the contact probe with a lead wire according to the present invention will be described with reference to FIGS.
First, as the metal spring wire 5, a straight beryllium copper wire of φ0.10 mm excellent in springiness and linearity is used, and a polyurethane film 6 having a thickness of 0.05 mm is continuously baked by an insulating film baking apparatus (not shown). Thus, a straight beryllium copper wire with an insulating film (hereinafter abbreviated as an insulating straight beryllium copper wire) w was manufactured. (Insulation coating process f1)
Next, the insulating straight beryllium copper wire was cut to a length of 500 mm with a cutting device. (Standard cutting process f2)
Next, the front end portion of the insulated straight beryllium copper wire cut into a regular length was ground into a hemispherical shape by a grinding device to provide a front end grinding portion 7. (Tip grinding process f3)
Next, the tip grinding portion 7 that had been ground into a hemispherical shape was subjected to nickel plating to provide a nickel plating layer m, thereby forming the tip plating portion 7. (Tip plating process f4)
Next, it is processed into a bent shape having two bent portions 4 with a distance of 0.2 mm and an angle of 150 ° from the tip plating portion 7 with a bending jig (stopper portion bending processing). Step f5) A contact probe 1 with a lead wire was obtained.
In the above embodiment, a straight beryllium copper wire is used for the metal spring wire 5, a polyurethane film is provided as an insulating coating 6 on the outer periphery to form an insulated straight beryllium copper wire w, then a regular cutting process is performed, and then the tip shape is a hemisphere After forming the shape, nickel plating treatment is performed, and then the bent portion 4 is formed by bending at two locations with an interval of 0.2 mm and an angle of 150 °, but the metal spring wire 5 is made of other copper alloy, For example, phosphor bronze, copper silver alloy, or tungsten may be used. The size of the metal spring wire 5 is selected depending on the interval between the electrodes to be inspected, and is, for example, φ0.05 mm to φ0.10 mm. The insulating coating 6 is preferable because a polyurethane film has solderability, but various enamel films such as polyester and polyesterimide are used. The shape of the tip grinding portion 7 may be a needle shape or a flat shape (including a trapezoid). Further, the plating layer m of the tip plating portion 7 may be a plating material other than nickel, for example, nickel-phosphorus, nickel-boron, palladium, rhodium or the like. Further, the bending portion 4 may be two or more, for example, three or four, and it goes without saying that it does not depart from the present invention whatever the folding angle and the folding interval. .

コンタクトプローブのプローブ部とリード線部を絶縁金属ばね線の一本で形成することにより、プローブとリード線の接続による接触抵抗とその不確かさを無くすことができる。また、プローブとリード線の配線接続が同時にできるため、検査治具アッセンブリ工数を削減することができる。更に、ストッパー構造に折り曲げ加工形状を採用することにより、検査治具アッセンブリ時に治具穴へ通過させることも、ストップさせることも可能となり、アッセンブリ作業性に優れ、低コストのリード線付きコンタクトプローブを提供できる。   By forming the probe portion and the lead wire portion of the contact probe with a single insulated metal spring wire, the contact resistance and the uncertainty due to the connection between the probe and the lead wire can be eliminated. In addition, since the probe and the lead wire can be connected simultaneously, the number of inspection jig assembly steps can be reduced. Furthermore, by adopting a bent shape in the stopper structure, it is possible to pass through the jig hole during the inspection jig assembly, or to stop it. Can be provided.

本発明のリード線付きコンタクトプローブの一例を示す略図であり、同図(a)は略正面図、また同図(b)は同図(a)のb部の縦断面拡大図である。It is the schematic which shows an example of the contact probe with a lead wire of this invention, the figure (a) is a schematic front view, and the figure (b) is the longitudinal cross-sectional enlarged view of the b section of the figure (a). 本発明のコンタクトプローブを検査治具へアッセンブリした状態と検査時のプローブ座屈状態を示す略図である。It is the schematic which shows the state which assembled the contact probe of this invention to the test | inspection jig | tool, and the probe buckling state at the time of a test | inspection. 本発明のリード線付きコンタクトプローブの製造実施態様を示す製造工程図である。It is a manufacturing-process figure which shows the manufacture embodiment of the contact probe with a lead wire of this invention. 従来のピン形状コンタクトプローブを検査治具へアッセンブリした状態と検査時のプローブ座屈状態を示す略図である。It is the schematic which shows the state which assembled the conventional pin-shaped contact probe to the test | inspection jig | tool, and the probe buckling state at the time of a test | inspection.

符号の説明Explanation of symbols

1 リード線付きコンタクトプローブ
1(a) リード線付きコンタクトプローブを検査治具へアッセンブリした状態
1(b) リード線付きコンタクトプローブのプローブ部が検査時に座屈した状態
2 プローブ部
3 リード線部
3t リード線部端末
4 折り曲げ加工部(ストッパー部)
5 金属ばね線(真直ベリリウム銅線)
6 絶縁被覆(ポリウレタン皮膜)
7 先端研削加工部と先端めっき加工部
10 検査治具(プローブガイド用穴明き板)
11 検査治具(プローブストップ用穴明き板)
12 検査対象(電子部品などの電極)
101 従来のプローブ(ピン形状)
101(b) 従来のプローブが検査時に座屈した状態
103 従来のリード線
110 従来の検査治具(プローブガイド用穴明き板)
111 従来の検査治具(リード線固定用穴明き板)
112 検査対象(電子部品などの電極)
113 従来の検査治具(プローブガイド用穴明き板)
m めっき層(ニッケルめっき層)
w 絶縁金属ばね線(絶縁真直ベリリウム銅線)
1 Contact probe with lead wire
1 (a) When the contact probe with lead wire is assembled to the inspection jig
1 (b) The probe part of the contact probe with lead wire is buckled during inspection
2 Probe section
3 Lead wire
3t Lead wire terminal
4 Bending part (stopper part)
5 Metal spring wire (straight beryllium copper wire)
6 Insulation coating (polyurethane film)
7 Tip grinding and tip plating
10 Inspection jig (Hole board for probe guide)
11 Inspection jig (perforated plate for probe stop)
12 Inspection target (Electrodes of electronic parts, etc.)
101 Conventional probe (pin shape)
101 (b) Conventional probe buckled during inspection
103 Conventional lead wire
110 Conventional inspection jigs (probe guide holes)
111 Conventional inspection jig (perforated plate for fixing lead wires)
112 Inspection target (Electrodes of electronic parts, etc.)
113 Conventional inspection jig (probe guide hole plate)
m Plating layer (nickel plating layer)
w Insulated metal spring wire (insulated straight beryllium copper wire)

Claims (3)

ピン形状のプローブを座屈することにより接触圧力を得る方式のコンタクトプローブにおいて、
プローブ部と、該プローブ部を検査装置に接続するリード線部が、ばね性と導電性を有する金属ばね線の外周に絶縁被覆を施した絶縁金属ばね線の一本で形成されており、また前記プローブ部の先端部が半球形状、針状または平坦形状に加工されており、また先端加工部にはめっき処理が施されており、またプローブ部とリード線部の境界には、前記絶縁金属ばね線を2箇所以上折り曲げ加工した構造のストッパー部が設けられていることを特徴とするリード線付きコンタクトプローブ。
In a contact probe of a type that obtains contact pressure by buckling a pin-shaped probe,
The probe portion and the lead wire portion connecting the probe portion to the inspection device are formed of a single insulated metal spring wire having an insulating coating on the outer periphery of a metal spring wire having springiness and conductivity. The tip portion of the probe portion is processed into a hemispherical shape, a needle shape, or a flat shape, the tip processing portion is plated, and the insulating metal is provided at the boundary between the probe portion and the lead wire portion. A contact probe with a lead wire, characterized by being provided with a stopper portion having a structure in which two or more spring wires are bent.
前記金属ばね線が真直であり、また金属ばね線の材質が銅合金またはタングステンであることを特徴とする請求項1記載のリード線付きコンタクトプローブ。   2. The contact probe with lead wire according to claim 1, wherein the metal spring wire is straight and the material of the metal spring wire is copper alloy or tungsten. 請求項1または2記載のリード線付きコンタクトプローブの製造方法であって、
金属ばね線の外周に絶縁被覆を施して絶縁金属ばね線とする絶縁被覆加工工程と、前記絶縁金属ばね線を所定の長さに切断する定尺切断加工工程と、定尺切断された絶縁金属ばね線の先端を研削加工により半球形状、針状または平坦形状に加工する先端部研削加工工程と、研削加工した先端部へめっき処理を施す先端部めっき処理工程と、めっき処理先端部から所定の長さ位置に2箇所以上の折り曲げ加工を施してストッパー部とするとともに、プローブ部とリード線部の境界とするストッパー部折り曲げ加工工程と、を有することを特徴とするリード線付きコンタクトプローブの製造方法。
A method of manufacturing a contact probe with a lead wire according to claim 1 or 2,
Insulating coating process for forming an insulating metal spring wire by applying an insulating coating to the outer periphery of the metal spring wire, a regular cutting process for cutting the insulating metal spring wire to a predetermined length, and a fixed-cut insulating metal A tip grinding process for grinding the tip of the spring wire into a hemispherical shape, a needle shape, or a flat shape by grinding, a tip plating process for plating the ground tip, and a predetermined treatment from the plating tip A manufacturing method of a contact probe with a lead wire, characterized in that the stopper portion is bent at two or more places in the length position to form a stopper portion, and a stopper portion bending step is used as a boundary between the probe portion and the lead wire portion. Method.
JP2003345387A 2003-10-03 2003-10-03 Contact probe with lead wire, and manufacturing method therefor Pending JP2005114393A (en)

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JP2006317412A (en) * 2005-05-16 2006-11-24 Totoku Electric Co Ltd Probing stylus having insulating film, and manufacturing method thereof
JP2007017219A (en) * 2005-07-06 2007-01-25 Totoku Electric Co Ltd Probe needle with insulating coating, and its manufacturing method
JP2007333542A (en) * 2006-06-14 2007-12-27 Nhk Spring Co Ltd Probe and probe unit
JP2008196905A (en) * 2007-02-09 2008-08-28 Totoku Electric Co Ltd Contact probe, its using method, and its manufacturing method
CN101968497A (en) * 2010-06-18 2011-02-09 常州亿晶光电科技有限公司 Probe positioning structure of four-probe instrument
CN114088997A (en) * 2020-08-24 2022-02-25 日本麦可罗尼克斯股份有限公司 Electrical contact structure of electrical contact and electrical connection device
CN116558770A (en) * 2023-07-12 2023-08-08 中国空气动力研究与发展中心高速空气动力研究所 Five-hole probe measurement uncertainty evaluation method considering compressibility

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006317412A (en) * 2005-05-16 2006-11-24 Totoku Electric Co Ltd Probing stylus having insulating film, and manufacturing method thereof
JP2007017219A (en) * 2005-07-06 2007-01-25 Totoku Electric Co Ltd Probe needle with insulating coating, and its manufacturing method
JP4611822B2 (en) * 2005-07-06 2011-01-12 東京特殊電線株式会社 Probe needle with insulating coating and method for manufacturing the same
JP2007333542A (en) * 2006-06-14 2007-12-27 Nhk Spring Co Ltd Probe and probe unit
JP2008196905A (en) * 2007-02-09 2008-08-28 Totoku Electric Co Ltd Contact probe, its using method, and its manufacturing method
CN101968497A (en) * 2010-06-18 2011-02-09 常州亿晶光电科技有限公司 Probe positioning structure of four-probe instrument
CN101968497B (en) * 2010-06-18 2014-07-23 常州亿晶光电科技有限公司 Probe positioning structure of four-probe instrument
CN114088997A (en) * 2020-08-24 2022-02-25 日本麦可罗尼克斯股份有限公司 Electrical contact structure of electrical contact and electrical connection device
CN116558770A (en) * 2023-07-12 2023-08-08 中国空气动力研究与发展中心高速空气动力研究所 Five-hole probe measurement uncertainty evaluation method considering compressibility
CN116558770B (en) * 2023-07-12 2023-09-01 中国空气动力研究与发展中心高速空气动力研究所 Five-hole probe measurement uncertainty evaluation method considering compressibility

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