JP4418465B2 - マルチステブルマイクロ電子機械スイッチスイッチ及びその製造方法 - Google Patents
マルチステブルマイクロ電子機械スイッチスイッチ及びその製造方法 Download PDFInfo
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- JP4418465B2 JP4418465B2 JP2006510109A JP2006510109A JP4418465B2 JP 4418465 B2 JP4418465 B2 JP 4418465B2 JP 2006510109 A JP2006510109 A JP 2006510109A JP 2006510109 A JP2006510109 A JP 2006510109A JP 4418465 B2 JP4418465 B2 JP 4418465B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/0054—For holding or placing an element in a given position
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/01—Switches
- B81B2201/012—Switches characterised by the shape
- B81B2201/018—Switches not provided for in B81B2201/014 - B81B2201/016
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/051—Translation according to an axis parallel to the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0078—Switches making use of microelectromechanical systems [MEMS] with parallel movement of the movable contact relative to the substrate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49105—Switch making
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Keying Circuit Devices (AREA)
- Materials For Medical Uses (AREA)
Description
以下の詳細な説明は、性質上、単に一例であり、本発明又は本発明の用途又は使用を限定することを意図するものではない。更に、上記の技術分野、背景、簡単な概要又は以下の詳細な説明に記載された何らの明示的又は暗示的な理論に制限することを意図するものではない。
Claims (16)
- マイクロ電子機械スイッチ(300)において、
基板(104)と、
可動部材(101)を有するスイッチ装置(101、102)であって、該可動部材(101)は該基板(104)から少なくとも部分的に分離されることにより、該可動部材(101)が該基板に沿って横方向移動するのを許容され、該横方向移動により該可動部材(101)が受容端子(102)と電気的に係合及び非係合とされる前記スイッチ装置(101、102)とを備え、該可動部材(101)及び受容端子(102)の各々は、
該基板(104)上に形成された基板部分(104A、104B)と、
該基板部分(104A、104B)に近接する絶縁層(106A、106B)と、
絶縁層(106A、106B)に近接した伝導層(108A、108B)であって、絶縁層(106A、106B)は該伝導層(108A、108B)と該基板部分(104A、104B)との間に位置し、且つ該伝導層(108A、108B)は、隅部と該隅部に形成された突出領域(116)とを有し、該突出領域(116)は前記隅部から横方向外方へ伸びる前記伝導層(108A、108B)とを備え、
可動部材(101)は更に、作動指令に応答する作動部分(308A−308D)を有し、該作動部分により、前記基板部分(104A、104B)どうしの分離が保持される間に該可動部材(101)の突出領域(116)を横方向へ移動させて、受容端子(102)の突出領域(116)と切り換え可能に係合させ、且つ非係合状態とさせ、これによりマイクロ電子機械スイッチを開放状態と接続状態との間にて動作させる形態とされた、マイクロ電子機械スイッチ。 - 請求項1に記載のマイクロ電子機械スイッチにおいて、
伝導層は、絶縁層(106)に近接する第一の伝導層(108)と、絶縁層に対向した第一の伝導層に近接する第二の伝導層(110)とを備える、マイクロ電子機械スイッチ。 - 請求項2に記載のマイクロ電子機械スイッチにおいて、
第二の伝導層(110)は第一の伝導層(108)上に形成され、
第二の伝導層(110)は突出領域(116A、116B)を備える、マイクロ電子機械スイッチ。 - 請求項3に記載のマイクロ電子機械スイッチにおいて、
第二の伝導層は貴金属を備える、マイクロ電子機械スイッチ。 - 請求項4に記載のマイクロ電子機械スイッチにおいて、
貴金属は金である、マイクロ電子機械スイッチ。 - 請求項3に記載のマイクロ電子機械スイッチにおいて、
第一の伝導層(108A、108B)は、スイッチ装置の導電性部分に相応するパターンを有する、マイクロ電子機械スイッチ。 - 請求項6に記載のマイクロ電子機械スイッチにおいて、
パターンは、スイッチの導電性部分と電気的に導通する接点領域を備える、マイクロ電子機械スイッチ。 - マイクロ電子機械スイッチ(300)において、
基板(104)と、
可動部材(101)を有するスイッチ装置(101、102)であって、該可動部材(101)は該基板(104)から少なくとも部分的に分離されることにより、該可動部材(101)が該基板(104)に沿って横方向移動するのを許容され、該横方向移動により該可動部材(101)が受容端子(102)と電気的に係合及び非係合とされる前記スイッチ装置(101、102)とを備え、該受容端子(102)は、
基板部分(104B)と、
該基板部分(104B)に近接する絶縁層(106B)と、
絶縁層(106B)に近接した伝導層(108B)であって、絶縁層(106B)は該伝導層(108B)と該基板部分(104B)との間に位置し、且つ該伝導層(108B)は、隅部と該隅部に形成された突出領域(116)とを有し、該突出領域(116)は前記隅部から横方向外方へ伸びる前記伝導層(108B)とを備え、
可動部材(101)は更に、伝導性部分(108A)と、作動指令に応答する作動部分(308A−308D)とを有し、該作動部分により、該可動部材の伝導性部分(108A)を横方向へ受容端子の突出領域(116)と切り換え可能に係合させ且つ非係合とさせ、これによりマイクロ電子機械スイッチを開放状態と接続状態との間にて動作させる形態とされた、マイクロ電子機械スイッチ。 - 請求項8に記載スイッチにおいて、
可動部材の伝導性部分は、受容端子の突出領域と電気的に合わさる(matewith)形態とされた第二の突出領域を備える、スイッチ。 - マイクロ電子機械スイッチ(300)において、
基板(104)と、
可動部材(101)を有するスイッチ装置(101、102)であって、該可動部材(101)は該基板(104)から少なくとも部分的に分離されることにより、該可動部材(101)が該基板(104)に沿って横方向移動するのを許容され、該横方向移動により該可動部材(101)が受容端子(102)と電気的に係合及び非係合とされる前記スイッチ装置(101、102)とを備え、該受容端子(102)は、
基板部分(104B)と、
該基板部分に近接する絶縁層(106B)と、
伝導性部分(108B)とを備え、
前記可動部材(101)は、
他の基板部分(104A)と、
該他の基板部分(104A)に近接する絶縁層(106A)と、
絶縁層(106A)に近接した伝導層(108A)であって、絶縁層(106A)は該伝導層(108A)と該他の基板部分(104A)との間に位置し、且つ該伝導層(108A)は、隅部と該隅部に形成された突出領域(116)とを有し、該突出領域(116)は前記隅部から横方向外方へ伸びる前記伝導層(108A)と、
作動指令に応答する作動部分(308A−308D)であって、該作動部分により、該可動部材(101)の突出領域(116)を受容端子(102)の伝導性部分(108B)と切り換え可能に係合させ且つ非係合とさせ、これによりマイクロ電子機械スイッチを開放状態と接続状態との間にて動作させる形態とされた前記作動部分とを備える、マイクロ電子機械スイッチ。 - 請求項10に記載スイッチにおいて、
受容端子の伝導性部分は、可動部材の突出領域と電気的に合わさる形態とされた第二の突出領域を備える、スイッチ。 - マイクロ電子機械スイッチ(300)を形成する方法において、
基板(104)上に絶縁層(106)を形成するステップと、
絶縁層(106)上に伝導層(108)を形成するステップと、
スイッチの少なくとも1つの可動部材(101)と少なくとも1つの受容端子(102)とを隔離することにより、少なくとも一つの前記可動部材の隅部と少なくとも一つの前記受容端子の隅部とを形成するステップと、
伝導性被覆(110)を施して伝導層(108)を実質的に封入し且つ、基板(104)及び少なくとも1つの可動部材(101)及び少なくとも1つの受容端子(102)の隅部から外方に伸びる突出領域(116)を形成するステップであって、少なくとも一つの可動部材(101)を形成する少なくとも一つの基板部分(104)と少なくとも一つの受容端子を形成する少なくとも一つの基板部分(104)とを分離状態に保持して該基板部分(104)どうしの間に電気的隔離を提供している間に、作動指令に応答する作動部分(308A−308D)により、少なくとも一つの該可動部材(101)の突出領域(116)を横方向へ移動させて、受容端子の突出領域(116)と切り換え可能に係合させる前記ステップとを備える、マイクロ電子機械スイッチを形成する方法。 - 請求項12に記載の方法において、
少なくとも1つの可動部材の底側部をエッチングするステップを更に備える、方法。 - 請求項12に記載の方法において、
伝導層のパターンを形成するステップを更に備える、方法。 - 請求項14に記載の方法において、
被覆を施すステップは、伝導層に電流を提供し、これにより、伝導層の伝導被覆を電気めっきするステップを備える、方法。 - 請求項12に記載の方法において、
被覆を施すステップは無電解金を施すステップを備える、方法。
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US10/425,861 US7190245B2 (en) | 2003-04-29 | 2003-04-29 | Multi-stable micro electromechanical switches and methods of fabricating same |
PCT/US2004/011737 WO2004097910A2 (en) | 2003-04-29 | 2004-04-16 | Multi-stable micro electromechanical switches and methods of fabricating same |
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JP2006526267A JP2006526267A (ja) | 2006-11-16 |
JP4418465B2 true JP4418465B2 (ja) | 2010-02-17 |
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EP (2) | EP1785391B1 (ja) |
JP (1) | JP4418465B2 (ja) |
CA (1) | CA2524388A1 (ja) |
DE (2) | DE602004015591D1 (ja) |
WO (1) | WO2004097910A2 (ja) |
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-
2003
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2004
- 2004-04-16 WO PCT/US2004/011737 patent/WO2004097910A2/en active Application Filing
- 2004-04-16 EP EP07002339A patent/EP1785391B1/en not_active Expired - Fee Related
- 2004-04-16 EP EP04750192A patent/EP1620352B1/en not_active Expired - Lifetime
- 2004-04-16 CA CA002524388A patent/CA2524388A1/en not_active Abandoned
- 2004-04-16 DE DE602004015591T patent/DE602004015591D1/de not_active Expired - Lifetime
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- 2004-04-16 JP JP2006510109A patent/JP4418465B2/ja not_active Expired - Fee Related
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Also Published As
Publication number | Publication date |
---|---|
US20100155204A1 (en) | 2010-06-24 |
US20070009203A1 (en) | 2007-01-11 |
CA2524388A1 (en) | 2004-11-11 |
EP1785391A2 (en) | 2007-05-16 |
EP1620352B1 (en) | 2008-08-06 |
DE602004015591D1 (de) | 2008-09-18 |
US7190245B2 (en) | 2007-03-13 |
US7688166B2 (en) | 2010-03-30 |
JP2006526267A (ja) | 2006-11-16 |
WO2004097910A3 (en) | 2005-03-24 |
US20040216988A1 (en) | 2004-11-04 |
EP1785391B1 (en) | 2009-12-09 |
EP1785391A3 (en) | 2008-06-11 |
US8111118B2 (en) | 2012-02-07 |
DE602004024599D1 (de) | 2010-01-21 |
EP1620352A2 (en) | 2006-02-01 |
WO2004097910A2 (en) | 2004-11-11 |
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