DE602004015591D1 - Bistabile mikroelektromechanische Schalter und Verfahren zu deren Herstellung - Google Patents

Bistabile mikroelektromechanische Schalter und Verfahren zu deren Herstellung

Info

Publication number
DE602004015591D1
DE602004015591D1 DE602004015591T DE602004015591T DE602004015591D1 DE 602004015591 D1 DE602004015591 D1 DE 602004015591D1 DE 602004015591 T DE602004015591 T DE 602004015591T DE 602004015591 T DE602004015591 T DE 602004015591T DE 602004015591 D1 DE602004015591 D1 DE 602004015591D1
Authority
DE
Germany
Prior art keywords
making
methods
same
microelectromechanical switches
bistable microelectromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004015591T
Other languages
English (en)
Inventor
Rogier Receveur
Philippe Habets
Ralph B Danzl
Richard P M Houben
Michael F Mattes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Medtronic Inc
Original Assignee
Medtronic Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Medtronic Inc filed Critical Medtronic Inc
Publication of DE602004015591D1 publication Critical patent/DE602004015591D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0054—For holding or placing an element in a given position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/01—Switches
    • B81B2201/012—Switches characterised by the shape
    • B81B2201/018—Switches not provided for in B81B2201/014 - B81B2201/016
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/051—Translation according to an axis parallel to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0078—Switches making use of microelectromechanical systems [MEMS] with parallel movement of the movable contact relative to the substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49105—Switch making

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Materials For Medical Uses (AREA)
  • Keying Circuit Devices (AREA)
DE602004015591T 2003-04-29 2004-04-16 Bistabile mikroelektromechanische Schalter und Verfahren zu deren Herstellung Expired - Lifetime DE602004015591D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/425,861 US7190245B2 (en) 2003-04-29 2003-04-29 Multi-stable micro electromechanical switches and methods of fabricating same
PCT/US2004/011737 WO2004097910A2 (en) 2003-04-29 2004-04-16 Multi-stable micro electromechanical switches and methods of fabricating same

Publications (1)

Publication Number Publication Date
DE602004015591D1 true DE602004015591D1 (de) 2008-09-18

Family

ID=33309766

Family Applications (2)

Application Number Title Priority Date Filing Date
DE602004015591T Expired - Lifetime DE602004015591D1 (de) 2003-04-29 2004-04-16 Bistabile mikroelektromechanische Schalter und Verfahren zu deren Herstellung
DE602004024599T Expired - Lifetime DE602004024599D1 (de) 2003-04-29 2004-04-16 Multistabile elektromechanische Schalter und deren Herstellungsverfahren

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE602004024599T Expired - Lifetime DE602004024599D1 (de) 2003-04-29 2004-04-16 Multistabile elektromechanische Schalter und deren Herstellungsverfahren

Country Status (6)

Country Link
US (3) US7190245B2 (de)
EP (2) EP1620352B1 (de)
JP (1) JP4418465B2 (de)
CA (1) CA2524388A1 (de)
DE (2) DE602004015591D1 (de)
WO (1) WO2004097910A2 (de)

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US9093975B2 (en) 2013-08-19 2015-07-28 Harris Corporation Microelectromechanical systems comprising differential inductors and methods for making the same
US9123493B2 (en) 2014-01-23 2015-09-01 Harris Corporation Microelectromechanical switches for steering of RF signals
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JP2017073229A (ja) * 2015-10-05 2017-04-13 アルプス電気株式会社 磁気リードスイッチ
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DE102021202238A1 (de) 2021-03-09 2022-09-15 Robert Bosch Gesellschaft mit beschränkter Haftung Elektrisch betätigbarer MEMS-Schalter
DE102021203566A1 (de) * 2021-04-12 2022-10-13 Robert Bosch Gesellschaft mit beschränkter Haftung MEMS Schalter mit eingebettetem Metallkontakt
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Also Published As

Publication number Publication date
DE602004024599D1 (de) 2010-01-21
EP1620352A2 (de) 2006-02-01
US8111118B2 (en) 2012-02-07
WO2004097910A2 (en) 2004-11-11
EP1785391A2 (de) 2007-05-16
JP4418465B2 (ja) 2010-02-17
EP1620352B1 (de) 2008-08-06
US7190245B2 (en) 2007-03-13
US7688166B2 (en) 2010-03-30
US20040216988A1 (en) 2004-11-04
EP1785391A3 (de) 2008-06-11
US20100155204A1 (en) 2010-06-24
JP2006526267A (ja) 2006-11-16
WO2004097910A3 (en) 2005-03-24
US20070009203A1 (en) 2007-01-11
EP1785391B1 (de) 2009-12-09
CA2524388A1 (en) 2004-11-11

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Representative=s name: KUDLEK & GRUNERT PATENTANWAELTE PARTNERSCHAFT, 803