JP4410734B2 - 酸化亜鉛結晶の成長方法 - Google Patents
酸化亜鉛結晶の成長方法 Download PDFInfo
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- JP4410734B2 JP4410734B2 JP2005230437A JP2005230437A JP4410734B2 JP 4410734 B2 JP4410734 B2 JP 4410734B2 JP 2005230437 A JP2005230437 A JP 2005230437A JP 2005230437 A JP2005230437 A JP 2005230437A JP 4410734 B2 JP4410734 B2 JP 4410734B2
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- zinc oxide
- crystal
- growth
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- raw material
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- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 title claims description 117
- 239000013078 crystal Substances 0.000 title claims description 74
- 239000011787 zinc oxide Substances 0.000 title claims description 58
- 238000000034 method Methods 0.000 title claims description 40
- 239000002994 raw material Substances 0.000 claims description 28
- 238000005192 partition Methods 0.000 claims description 18
- 238000001556 precipitation Methods 0.000 claims description 13
- 239000012808 vapor phase Substances 0.000 claims description 9
- 239000003795 chemical substances by application Substances 0.000 description 15
- 239000010409 thin film Substances 0.000 description 12
- 239000000463 material Substances 0.000 description 10
- 239000000758 substrate Substances 0.000 description 9
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 8
- 239000007789 gas Substances 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 7
- 239000010453 quartz Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- 239000012535 impurity Substances 0.000 description 5
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 4
- 229910002092 carbon dioxide Inorganic materials 0.000 description 4
- 239000001569 carbon dioxide Substances 0.000 description 4
- 229910002091 carbon monoxide Inorganic materials 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000012071 phase Substances 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- RCTYPNKXASFOBE-UHFFFAOYSA-M chloromercury Chemical compound [Hg]Cl RCTYPNKXASFOBE-UHFFFAOYSA-M 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001027 hydrothermal synthesis Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Description
真空封止された成長容器の長さ方向一端側から他端側に亘り温度勾配を有し、かつ、成長容器の高温部に原料部が配置され、成長容器の低温部に結晶析出部が配置されて成る気相輸送法により酸化亜鉛結晶を得る酸化亜鉛結晶の成長方法において、
成長容器の内部に、上記高温部と上記低温部との間を遮断しかつ上記高温部より更に高温側の少なくとも一部に開口を有する仕切り空間を設け、この仕切り空間内の上記高温部に対応する部位に原料部を配置すると共に、仕切り空間の上記開口を介し原料部と結晶析出部間の気相輸送を行うことを特徴とする。
請求項1に記載の酸化亜鉛結晶の成長方法において、
仕切り空間の上記開口の位置を調整して気相輸送の速度を制御することを特徴とする。
成長容器の内部に、高温部と低温部との間を遮断しかつ上記高温部より更に高温側の少なくとも一部に開口を有する仕切り空間を設け、この仕切り空間内の上記高温部に対応する部位に原料部を配置すると共に、仕切り空間の上記開口を介し原料部と結晶析出部間の気相輸送を行うため、気相輸送法において輸送速度が速過ぎるために生じていた多結晶化の問題を抑制することが可能となり、更に、仕切り空間の上記開口の位置を調整することによって輸送速度を精密に制御することができ、その結果、多結晶化の抑制と結晶成長の再現性をより向上させることが可能となる。
[参考例]
位置調整により開口13の温度を1017℃とし、上記原料部(高温部)との温度差をゼロとし、その他の条件は実施例1と同様にして酸化亜鉛結晶を得た。
11 原料
12 輸送剤
13 開口
14 原料保持用石英管(仕切り空間)
15 結晶析出部(低温部)
16 温度分布
Claims (2)
- 真空封止された成長容器の長さ方向一端側から他端側に亘り温度勾配を有し、かつ、成長容器の高温部に原料部が配置され、成長容器の低温部に結晶析出部が配置されて成る気相輸送法により酸化亜鉛結晶を得る酸化亜鉛結晶の成長方法において、
成長容器の内部に、上記高温部と上記低温部との間を遮断しかつ上記高温部より更に高温側の少なくとも一部に開口を有する仕切り空間を設け、この仕切り空間内の上記高温部に対応する部位に原料部を配置すると共に、仕切り空間の上記開口を介し原料部と結晶析出部間の気相輸送を行うことを特徴とする酸化亜鉛結晶の成長方法。 - 仕切り空間の上記開口の位置を調整して気相輸送の速度を制御することを特徴とする請求項1に記載の酸化亜鉛結晶の成長方法。
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Publications (2)
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JP2007045653A JP2007045653A (ja) | 2007-02-22 |
JP4410734B2 true JP4410734B2 (ja) | 2010-02-03 |
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Families Citing this family (1)
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JP5248452B2 (ja) * | 2009-09-07 | 2013-07-31 | 国立大学法人東北大学 | 酸化亜鉛単結晶の成長方法 |
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