JP4366224B2 - 酸化亜鉛結晶の成長方法 - Google Patents
酸化亜鉛結晶の成長方法 Download PDFInfo
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- JP4366224B2 JP4366224B2 JP2004092467A JP2004092467A JP4366224B2 JP 4366224 B2 JP4366224 B2 JP 4366224B2 JP 2004092467 A JP2004092467 A JP 2004092467A JP 2004092467 A JP2004092467 A JP 2004092467A JP 4366224 B2 JP4366224 B2 JP 4366224B2
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- JP
- Japan
- Prior art keywords
- zinc oxide
- crystal
- carbon dioxide
- zinc
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 title claims description 220
- 239000011787 zinc oxide Substances 0.000 title claims description 111
- 239000013078 crystal Substances 0.000 title claims description 94
- 238000000034 method Methods 0.000 title claims description 41
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 92
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 46
- 239000001569 carbon dioxide Substances 0.000 claims description 46
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 36
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 36
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 31
- 239000011701 zinc Substances 0.000 claims description 27
- 229910052725 zinc Inorganic materials 0.000 claims description 25
- 239000003795 chemical substances by application Substances 0.000 claims description 24
- 238000002156 mixing Methods 0.000 claims description 7
- 229960001296 zinc oxide Drugs 0.000 description 96
- 229960004424 carbon dioxide Drugs 0.000 description 42
- 239000007789 gas Substances 0.000 description 26
- 239000002994 raw material Substances 0.000 description 22
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 19
- 238000006243 chemical reaction Methods 0.000 description 17
- 239000010453 quartz Substances 0.000 description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 17
- 239000000203 mixture Substances 0.000 description 16
- 229910052799 carbon Inorganic materials 0.000 description 15
- 239000000758 substrate Substances 0.000 description 13
- 239000010409 thin film Substances 0.000 description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 11
- 229910052760 oxygen Inorganic materials 0.000 description 11
- 239000001301 oxygen Substances 0.000 description 11
- 239000012071 phase Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- 239000012535 impurity Substances 0.000 description 5
- 238000004040 coloring Methods 0.000 description 4
- 229910002090 carbon oxide Inorganic materials 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 239000002244 precipitate Substances 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000012808 vapor phase Substances 0.000 description 3
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- RCTYPNKXASFOBE-UHFFFAOYSA-M chloromercury Chemical compound [Hg]Cl RCTYPNKXASFOBE-UHFFFAOYSA-M 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001027 hydrothermal synthesis Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Description
気相輸送法で酸化亜鉛結晶を得る酸化亜鉛結晶の成長方法を前提とし、
輸送剤として一酸化炭素と二酸化炭素を用いると共に、上記一酸化炭素と二酸化炭素の混合ガスの混合比を調整して、無色透明の酸化亜鉛結晶を得ることを特徴とする。
気相輸送法で酸化亜鉛結晶を得る酸化亜鉛結晶の成長方法を前提とし、
輸送剤として二酸化炭素と、二酸化炭素と反応して一酸化炭素を生成する金属亜鉛を用いると共に、金属亜鉛量を調整することにより一酸化炭素と二酸化炭素との量を調整して、無色透明の酸化亜鉛結晶を得ることを特徴とする。
ZnO(s)+CO(g)→ Zn(g)+ CO2(g) (2)
低温側での反応
Zn(g)+CO2(g)→ ZnO(s)+CO(g) (3)
即ち、高温側では、原料の酸化亜鉛と封入された一酸化炭素とが反応し、亜鉛蒸気と二酸化炭素とが生成する。生成した亜鉛蒸気は低温側で二酸化炭素と反応して酸化亜鉛と一酸化炭素が生成する。そして、酸化亜鉛は結晶として析出することになる。
[参考例2]
[参考例3]
[参考例5]
[参考例6]
[参考例7]
[比較例]
この比較例は炭素を輸送剤として原料に加えた具体例である。
Claims (2)
- 気相輸送法で酸化亜鉛結晶を得る酸化亜鉛結晶の成長方法において、
輸送剤として一酸化炭素と二酸化炭素を用いると共に、上記一酸化炭素と二酸化炭素の混合ガスの混合比を調整して、無色透明の酸化亜鉛結晶を得ることを特徴とする酸化亜鉛結晶の成長方法。 - 気相輸送法で酸化亜鉛結晶を得る酸化亜鉛結晶の成長方法において、
輸送剤として二酸化炭素と、二酸化炭素と反応して一酸化炭素を生成する金属亜鉛を用いると共に、金属亜鉛量を調整することにより一酸化炭素と二酸化炭素との量を調整して、無色透明の酸化亜鉛結晶を得ることを特徴とする酸化亜鉛結晶の成長方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004092467A JP4366224B2 (ja) | 2004-03-26 | 2004-03-26 | 酸化亜鉛結晶の成長方法 |
Applications Claiming Priority (1)
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JP2004092467A JP4366224B2 (ja) | 2004-03-26 | 2004-03-26 | 酸化亜鉛結晶の成長方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005272282A JP2005272282A (ja) | 2005-10-06 |
JP4366224B2 true JP4366224B2 (ja) | 2009-11-18 |
Family
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Family Applications (1)
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JP2004092467A Expired - Lifetime JP4366224B2 (ja) | 2004-03-26 | 2004-03-26 | 酸化亜鉛結晶の成長方法 |
Country Status (1)
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JP (1) | JP4366224B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2929959B1 (fr) * | 2008-04-10 | 2010-08-27 | Commissariat Energie Atomique | Procede de preparation de polycristaux et de monocristaux d'oxyde de zinc (zno) sur un germe par sublimation activee chimiquement a haute temperature |
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2004
- 2004-03-26 JP JP2004092467A patent/JP4366224B2/ja not_active Expired - Lifetime
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