JP4408891B2 - 炭素膜および炭素膜構造 - Google Patents
炭素膜および炭素膜構造 Download PDFInfo
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- JP4408891B2 JP4408891B2 JP2006341254A JP2006341254A JP4408891B2 JP 4408891 B2 JP4408891 B2 JP 4408891B2 JP 2006341254 A JP2006341254 A JP 2006341254A JP 2006341254 A JP2006341254 A JP 2006341254A JP 4408891 B2 JP4408891 B2 JP 4408891B2
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- carbon film
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims description 152
- 229910052799 carbon Inorganic materials 0.000 title claims description 133
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 230000007423 decrease Effects 0.000 claims description 8
- 229910021389 graphene Inorganic materials 0.000 claims description 5
- 239000012528 membrane Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 description 15
- 239000002041 carbon nanotube Substances 0.000 description 14
- 229910021393 carbon nanotube Inorganic materials 0.000 description 14
- 239000007789 gas Substances 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 8
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 8
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 7
- 230000005684 electric field Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
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- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
- Cold Cathode And The Manufacture (AREA)
Description
上記「筋状」とはその連続方向の幅や形状を特定して限定するものではなく、TEM写真で観察した場合の表現の一例であり、少なくとも段差部に電界放射に有効な角張ったエミッションサイトとなる部分を有する。
図2から図9までに実施の形態の炭素膜を撮影した一連のSEM(走査型電子顕微鏡)写真像、図10にTEM(透過型電子顕微鏡)写真像を示す。
図12は上記炭素膜のIV特性を示す図である。図12においてAは従来のカーボンナノチューブによるIV特性曲線、Bは筋状段差部が無い針状炭素膜によるIV特性曲線、Cは実施の形態の上記螺旋状の筋状段差部付きの炭素膜によるIV特性曲線である。これらIV特性曲線を比較して明らかであるように、いずれのIV特性曲線も電界放射を開始する電圧(閾値)はさほど相違しないが、IV特性曲線の傾きや形状が大きく相違している。すなわち、カーボンナノチューブのIV特性曲線Aでは所望するエミッション電流を得るための印加電圧が大きい曲線であり、筋状段差部が無い針状炭素膜によるIV特性曲線Bでは所望のエミッション電流を得る印加電圧はカーボンナノチューブの場合よりも低くなる曲線であり、実施の形態の上記螺旋状の筋状段差部付きの炭素膜によるIV特性曲線Cでは所望するエミッション電流を得るための印加電圧が最も低く済む曲線である。したがって、IV特性曲線は実施の形態の炭素膜が最も良く、そのIV特性が大きく向上した炭素膜であることが明らかである。
図13を参照して炭素膜の製造例を説明する。図13は成膜装置の概略構成図である。
12 炭素膜集合単位
14 幹状炭素膜
16 枝状炭素膜群
18 筋状段差部
Claims (3)
- グラフェンシートが多層に重なって内部中空となっていて、かつ、先端に向けて半径が小さくなる針状炭素膜を備える炭素膜であって、前記針状炭素膜の先端近傍の外周面周りに当該先端に向けて連続した筋状段差部を有し、この筋状段差部は当該先端に向けて螺旋状になって連続していることを特徴とする炭素膜。
- 前記筋状段差部はグラフェンシートが複数層重なって螺旋状となった内部中空の針状炭素膜単位が先端に向けて多数段に積み重なって構成され、各針状炭素膜単位の境界で螺旋状に形成されているものであることを特徴とする請求項1に記載の炭素膜。
- 前記筋状段差部にシート状、ウォール状、針状等の炭素膜が成膜されている、ことを特徴とする請求項1または2に記載の炭素膜。
Priority Applications (1)
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JP2006341254A JP4408891B2 (ja) | 2006-12-19 | 2006-12-19 | 炭素膜および炭素膜構造 |
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JP2006341254A JP4408891B2 (ja) | 2006-12-19 | 2006-12-19 | 炭素膜および炭素膜構造 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009174129A Division JP5121791B2 (ja) | 2009-07-27 | 2009-07-27 | 炭素膜構造 |
Publications (2)
Publication Number | Publication Date |
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JP2008150253A JP2008150253A (ja) | 2008-07-03 |
JP4408891B2 true JP4408891B2 (ja) | 2010-02-03 |
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JP2006341254A Active JP4408891B2 (ja) | 2006-12-19 | 2006-12-19 | 炭素膜および炭素膜構造 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10804062B2 (en) | 2019-01-31 | 2020-10-13 | Electronics And Telecommunications Research Institute | Field emission device |
US11776785B2 (en) | 2020-06-05 | 2023-10-03 | Meidensha Corporation | Field emission device and field emission method |
US11990308B2 (en) | 2020-06-05 | 2024-05-21 | Meidensha Corporation | Field emission device, field emission method and positioning and fixing method |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4390847B1 (ja) | 2008-07-31 | 2009-12-24 | 株式会社ライフ技術研究所 | 電子放出体および電子放出体を備えた電界放射装置 |
JP5424098B2 (ja) * | 2009-06-24 | 2014-02-26 | 独立行政法人産業技術総合研究所 | 電子放出体およびx線放射装置 |
JP5044005B2 (ja) | 2010-11-08 | 2012-10-10 | マイクロXジャパン株式会社 | 電界放射装置 |
JP6206541B1 (ja) | 2016-06-13 | 2017-10-04 | 株式会社明電舎 | 電界放射装置および改質処理方法 |
JP6206546B1 (ja) | 2016-06-23 | 2017-10-04 | 株式会社明電舎 | 電界放射装置および改質処理方法 |
JP6226033B1 (ja) | 2016-06-24 | 2017-11-08 | 株式会社明電舎 | 電界放射装置および電界放射方法 |
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2006
- 2006-12-19 JP JP2006341254A patent/JP4408891B2/ja active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10804062B2 (en) | 2019-01-31 | 2020-10-13 | Electronics And Telecommunications Research Institute | Field emission device |
US11776785B2 (en) | 2020-06-05 | 2023-10-03 | Meidensha Corporation | Field emission device and field emission method |
US11990308B2 (en) | 2020-06-05 | 2024-05-21 | Meidensha Corporation | Field emission device, field emission method and positioning and fixing method |
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