JP4386555B2 - 放電灯およびその冷却方法 - Google Patents
放電灯およびその冷却方法 Download PDFInfo
- Publication number
- JP4386555B2 JP4386555B2 JP2000260800A JP2000260800A JP4386555B2 JP 4386555 B2 JP4386555 B2 JP 4386555B2 JP 2000260800 A JP2000260800 A JP 2000260800A JP 2000260800 A JP2000260800 A JP 2000260800A JP 4386555 B2 JP4386555 B2 JP 4386555B2
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- cooling gas
- discharge lamp
- current
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001816 cooling Methods 0.000 title claims description 40
- 239000000112 cooling gas Substances 0.000 claims description 59
- 238000007789 sealing Methods 0.000 claims description 44
- 229910052751 metal Inorganic materials 0.000 claims description 29
- 239000002184 metal Substances 0.000 claims description 29
- 239000011888 foil Substances 0.000 claims description 16
- 230000002093 peripheral effect Effects 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 6
- 230000001902 propagating effect Effects 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 238000005259 measurement Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 5
- 229910052753 mercury Inorganic materials 0.000 description 5
- 239000011324 bead Substances 0.000 description 4
- 238000004880 explosion Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Discharge Lamps And Accessories Thereof (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000260800A JP4386555B2 (ja) | 2000-08-30 | 2000-08-30 | 放電灯およびその冷却方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000260800A JP4386555B2 (ja) | 2000-08-30 | 2000-08-30 | 放電灯およびその冷却方法 |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007216613A Division JP4401405B2 (ja) | 2007-08-23 | 2007-08-23 | 放電灯 |
| JP2007216614A Division JP4401406B2 (ja) | 2007-08-23 | 2007-08-23 | 光源装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002075282A JP2002075282A (ja) | 2002-03-15 |
| JP2002075282A5 JP2002075282A5 (enExample) | 2007-10-11 |
| JP4386555B2 true JP4386555B2 (ja) | 2009-12-16 |
Family
ID=18748754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000260800A Expired - Lifetime JP4386555B2 (ja) | 2000-08-30 | 2000-08-30 | 放電灯およびその冷却方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4386555B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008026709A1 (en) * | 2006-09-01 | 2008-03-06 | Nikon Corporation | Discharge lamp, light source apparatus, exposure apparatus and exposure apparatus manufacturing method |
| JP4356776B2 (ja) | 2007-06-15 | 2009-11-04 | ウシオ電機株式会社 | 紫外線放電ランプ |
| KR20090101436A (ko) * | 2007-12-26 | 2009-09-28 | 파나소닉 주식회사 | 급전단자, 당해 급전단자부 냉음극 방전램프, 당해 냉음극 방전램프를 구비한 백라이트 유닛, 및 당해 백라이트 유닛을 구비한 액정표시장치 |
-
2000
- 2000-08-30 JP JP2000260800A patent/JP4386555B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002075282A (ja) | 2002-03-15 |
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