JP4386295B2 - 湿度センサ - Google Patents

湿度センサ Download PDF

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Publication number
JP4386295B2
JP4386295B2 JP2007112136A JP2007112136A JP4386295B2 JP 4386295 B2 JP4386295 B2 JP 4386295B2 JP 2007112136 A JP2007112136 A JP 2007112136A JP 2007112136 A JP2007112136 A JP 2007112136A JP 4386295 B2 JP4386295 B2 JP 4386295B2
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JP
Japan
Prior art keywords
relative humidity
humidity
moisture
atmosphere
humidity sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007112136A
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English (en)
Japanese (ja)
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JP2008268025A (ja
JP2008268025A5 (https=
Inventor
俊樹 磯貝
敏和 板倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Soken Inc
Original Assignee
Denso Corp
Nippon Soken Inc
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Filing date
Publication date
Application filed by Denso Corp, Nippon Soken Inc filed Critical Denso Corp
Priority to JP2007112136A priority Critical patent/JP4386295B2/ja
Priority to US12/081,513 priority patent/US7971482B2/en
Publication of JP2008268025A publication Critical patent/JP2008268025A/ja
Publication of JP2008268025A5 publication Critical patent/JP2008268025A5/ja
Application granted granted Critical
Publication of JP4386295B2 publication Critical patent/JP4386295B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2007112136A 2007-04-20 2007-04-20 湿度センサ Expired - Fee Related JP4386295B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007112136A JP4386295B2 (ja) 2007-04-20 2007-04-20 湿度センサ
US12/081,513 US7971482B2 (en) 2007-04-20 2008-04-17 Humidity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007112136A JP4386295B2 (ja) 2007-04-20 2007-04-20 湿度センサ

Publications (3)

Publication Number Publication Date
JP2008268025A JP2008268025A (ja) 2008-11-06
JP2008268025A5 JP2008268025A5 (https=) 2009-03-19
JP4386295B2 true JP4386295B2 (ja) 2009-12-16

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ID=39870875

Family Applications (1)

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JP2007112136A Expired - Fee Related JP4386295B2 (ja) 2007-04-20 2007-04-20 湿度センサ

Country Status (2)

Country Link
US (1) US7971482B2 (https=)
JP (1) JP4386295B2 (https=)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101738422B (zh) * 2009-12-23 2012-09-05 北京宝力马传感技术有限公司 一种湿度测量装置及方法
CN102725643A (zh) * 2010-01-15 2012-10-10 丰田自动车株式会社 电压检测装置
US9063067B1 (en) 2010-11-17 2015-06-23 Alvin P. Schmitt Moisture sensing devices
JP2012198120A (ja) 2011-03-22 2012-10-18 Seiko Epson Corp センサー装置
JP2012198121A (ja) 2011-03-22 2012-10-18 Seiko Epson Corp センサー装置および測定方法
MY154211A (en) * 2011-04-26 2015-05-15 Mimos Berhad A humidity sensor device
US9182295B1 (en) * 2011-09-09 2015-11-10 Sitime Corporation Circuitry and techniques for resistor-based temperature sensing
US9304098B2 (en) * 2013-02-04 2016-04-05 Veris Industries, Llc Capacitive humidity sensor with hysteresis compensation
US9746438B2 (en) * 2013-02-06 2017-08-29 Veris Industries, Llc Humidity sensor with temperature compensation
US9234859B2 (en) * 2013-03-28 2016-01-12 Stmicroelectronics S.R.L. Integrated device of a capacitive type for detecting humidity, in particular manufactured using a CMOS technology
CN103792267B (zh) * 2014-02-19 2015-12-02 苏州能斯达电子科技有限公司 一种差分电容式湿度传感器
CN103792268B (zh) * 2014-02-19 2015-12-09 苏州能斯达电子科技有限公司 一种差分电容式氢气传感器
CN104198545B (zh) * 2014-08-20 2016-09-07 云南师范大学 探空仪用加热式湿度传感器及其制备方法及一种湿度检测电路
KR101781687B1 (ko) * 2015-07-23 2017-09-25 한양대학교 산학협력단 전도성 복합재료 구조물의 손상 감지 및 손상 이력 기록 장치 및 그 제조방법
CN105527325B (zh) * 2016-01-20 2024-05-17 中国石油大学(华东) 一种基于二氧化锡/类石墨烯二硫化钼薄膜的湿度传感器
RU2647168C2 (ru) * 2016-07-19 2018-03-14 Федеральное государственное бюджетное образовательное учреждение высшего образования "Чувашский государственный университет имени И.Н. Ульянова" Датчик влажности
CN106198651A (zh) * 2016-08-31 2016-12-07 成都市和平科技有限责任公司 一种高精度湿度传感器
US10364926B2 (en) 2016-09-02 2019-07-30 Veris Industries, Llc Endcap for dry pressure insertion probe
JP2018147117A (ja) * 2017-03-02 2018-09-20 パナソニックＩｐマネジメント株式会社 センサ回路、及びそれを備えるセンサ装置
CN110006960A (zh) * 2018-01-05 2019-07-12 张家港万众一芯生物科技有限公司 基于柔性自适应型叉指电容的危险液体检测装置及检测方法
CN108872321B (zh) * 2018-08-14 2021-03-19 天津大学 基于插入式电导传感器的含水率测量装置
US11313824B2 (en) * 2018-11-16 2022-04-26 Minebea Mitsumi Inc. Detecting device
JP7234843B2 (ja) * 2018-11-16 2023-03-08 ミネベアミツミ株式会社 検出装置及び電荷電圧変換回路
CN209326840U (zh) 2018-12-27 2019-08-30 热敏碟公司 压力传感器及压力变送器
WO2020152501A1 (en) * 2019-01-23 2020-07-30 Twtg R&D B.V. Electrical impedance spectrography using a capacitive voltage divider
CN110133055A (zh) * 2019-06-25 2019-08-16 国电龙源电气有限公司 一种凝露检测设备及凝露的检测方法
EP3812754A1 (en) 2019-10-25 2021-04-28 MEAS France Inorganic humidity sensor device
WO2021261161A1 (ja) * 2020-06-25 2021-12-30 株式会社村田製作所 吸湿センサ、ｒｆｉｄタグ、および吸湿量測定システム
JP2022069317A (ja) 2020-10-23 2022-05-11 トライポッド・デザイン株式会社 装置、センサ、センシング方法、センサシステム、及び発電方法
EP4159992A1 (en) * 2021-09-30 2023-04-05 MEAS France Turbine device
CN114441607B (zh) * 2021-12-31 2024-04-16 深圳市壹号能源科技有限公司 一种后备式储能系统的湿度监测系统及方法
CN115588844A (zh) * 2022-11-10 2023-01-10 天津理工大学 一种基于ebg结构和二氧化硅膜的天线传感器及其应用

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59179366A (ja) 1983-03-31 1984-10-11 Naoto Ootsuki 文字・点字用タイプライタ
JPH0781974B2 (ja) 1988-05-19 1995-09-06 横河電機株式会社 セラミックス湿度センサ
EP0545647B1 (en) 1991-12-02 2001-10-24 Canon Kabushiki Kaisha Measuring apparatus
JP3398761B2 (ja) 2000-08-09 2003-04-21 独立行政法人産業技術総合研究所 高湿度条件下において優れた吸水挙動を示す調湿材料
US6580600B2 (en) 2001-02-20 2003-06-17 Nippon Soken, Inc. Capacitance type humidity sensor and manufacturing method of the same
JP2002243690A (ja) 2001-02-20 2002-08-28 Denso Corp 容量式湿度センサおよびその製造方法
JP3803862B2 (ja) 2001-10-23 2006-08-02 三菱マテリアル株式会社 湿度センサー及びその製造方法
JP3855950B2 (ja) * 2003-03-19 2006-12-13 株式会社デンソー 容量式湿度センサ
JP4455286B2 (ja) * 2004-11-09 2010-04-21 株式会社日本自動車部品総合研究所 静電容量式湿度センサ

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Publication number Publication date
JP2008268025A (ja) 2008-11-06
US20080257037A1 (en) 2008-10-23
US7971482B2 (en) 2011-07-05

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