JP4378387B2 - Semiconductor package and manufacturing method thereof - Google Patents

Semiconductor package and manufacturing method thereof Download PDF

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JP4378387B2
JP4378387B2 JP2007047847A JP2007047847A JP4378387B2 JP 4378387 B2 JP4378387 B2 JP 4378387B2 JP 2007047847 A JP2007047847 A JP 2007047847A JP 2007047847 A JP2007047847 A JP 2007047847A JP 4378387 B2 JP4378387 B2 JP 4378387B2
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semiconductor chip
dummy pattern
main surface
semiconductor
inner lead
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JP2008211073A (en
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高橋　　義和
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Lapis Semiconductor Co Ltd
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Oki Semiconductor Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/563—Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/4985—Flexible insulating substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
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    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54433—Marks applied to semiconductor devices or parts containing identification or tracking information
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73201—Location after the connecting process on the same surface
    • H01L2224/73203—Bump and layer connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73201—Location after the connecting process on the same surface
    • H01L2224/73203—Bump and layer connectors
    • H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
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    • H01—ELECTRIC ELEMENTS
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    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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    • H01L2924/00011—Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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  • Engineering & Computer Science (AREA)
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  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
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  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Wire Bonding (AREA)

Description

本発明は、半導体集積回路（以下「ＩＣ」という。）チップ等の半導体チップを搭載した半導体パッケージ及びその製造方法、特に、ベースフィルム上に半導体チップがフリップチップボンディング（以下「Ｆ／Ｃ」という。）技術により実装されたチップオンフィルム（Chip On Film、以下「ＣＯＦ」という。）パッケージと、その製造方法に関するものである。   The present invention relates to a semiconductor package in which a semiconductor chip such as a semiconductor integrated circuit (hereinafter referred to as “IC”) chip is mounted and a method for manufacturing the same, and in particular, the semiconductor chip is flip-chip bonded (hereinafter referred to as “F / C”) on a base film. The present invention relates to a chip on film (hereinafter referred to as “COF”) package mounted by technology and a manufacturing method thereof.

図８（ａ）、（ｂ）は、従来の半導体パッケージ（例えば、ＣＯＦパッケージ）の構造を示す概略の構成図であり、同図（ａ）は縦断面図、及び同図（ｂ）は一部を透視した平面図である。   8A and 8B are schematic configuration diagrams showing the structure of a conventional semiconductor package (for example, a COF package). FIG. 8A is a longitudinal sectional view, and FIG. It is the top view which saw through the part.

このＣＯＦパッケージは、帯状のフレキシブルな（即ち、可撓性のある。）ベースフィルム１を有し、このベースフィルム１の両側に、フィルム送り用のスプロケット１ａ，１ｂが所定間隔に形成されている。なお、図８では、帯状のベースフィルム１の内の１個のＣＯＦパッケージ分のみが示されている。   This COF package has a strip-like flexible (that is, flexible) base film 1, and film feed sprockets 1 a and 1 b are formed at predetermined intervals on both sides of the base film 1. . In FIG. 8, only one COF package of the strip-shaped base film 1 is shown.

両側のスプロケット１ａ，１ｂ間のほぼ中央部には、半導体チップ搭載予定箇所２が設けられている。半導体チップ搭載予定箇所２の周縁には、金属製の厚さｄ１の複数のインナリード３が配置され、これらのインナリード３の先端部が、半導体チップ搭載予定箇所２内へ突設されている。各インナリード３の後端部には、金属製の導体リード４がそれぞれ延設され、これらの導体リード４を介して、一辺側に配置された複数の入力端子５が接続されると共に、他辺側に配置された複数の出力端子６に接続されている。複数の導体リード４を保護するために、これらの導体リード４の上にソルダレジスト７が被覆されている。   A semiconductor chip mounting planned location 2 is provided at a substantially central portion between the sprockets 1a and 1b on both sides. A plurality of inner leads 3 having a metal thickness d1 are disposed on the periphery of the planned semiconductor chip mounting location 2, and the leading ends of these inner leads 3 project into the planned semiconductor chip mounting location 2. . A metal conductor lead 4 is extended to the rear end portion of each inner lead 3, and a plurality of input terminals 5 arranged on one side are connected through these conductor leads 4, and others It is connected to a plurality of output terminals 6 arranged on the side. In order to protect the plurality of conductor leads 4, a solder resist 7 is coated on the conductor leads 4.

半導体チップ搭載予定箇所２上には、半導体チップ１０がＦ／Ｃ技術により実装されている。即ち、半導体チップ１０は、この主表面に厚さｄ３（＞ｄ１）の複数のバンプ電極１１が突設され、これらのバンプ電極１１が位置合わせされ、熱、荷重が加えられてインナリード３に接合されている。半導体チップ１０の側面側から、半導体チップ搭載予定箇所２と半導体チップ主表面との間へ、溶融された封止樹脂１２が注入され、半導体チップ搭載予定箇所２と半導体チップ主表面との間が封止されて保護されると共に、半導体チップ１０の側面にも被覆されて保護されている。その後、溶融された封止樹脂１２が固化される。   A semiconductor chip 10 is mounted on the semiconductor chip mounting location 2 by F / C technology. That is, the semiconductor chip 10 has a plurality of bump electrodes 11 having a thickness d3 (> d1) projecting from the main surface, the bump electrodes 11 are aligned, and heat and a load are applied to the inner leads 3. It is joined. The molten sealing resin 12 is injected from the side surface side of the semiconductor chip 10 between the planned semiconductor chip mounting location 2 and the main surface of the semiconductor chip, and between the planned semiconductor chip mounting location 2 and the main surface of the semiconductor chip. While being sealed and protected, the side surface of the semiconductor chip 10 is also covered and protected. Thereafter, the molten sealing resin 12 is solidified.

この種のＣＯＦパッケージでは、小型化、薄型化、高精度化、高容量化等に適しているが、例えば、図９に示すような不具合を有している。   This type of COF package is suitable for downsizing, thinning, high accuracy, high capacity, etc., but has a defect as shown in FIG. 9, for example.

図９は、図８（ａ）においてベースフィルム１に歪みが生じた時の縦断面図である。
図８（ａ）、（ｂ）に示すＣＯＦパッケージでは、材料ロットや製造条件のばらつき等により、例えば、図９に示すように、ベースフィルム１の中央部が上方へ撓み、これが半導体チップ１０の主表面に貼り付き、封止樹脂１２が確実に充填されずに未充填不良が発生する場合があった。 FIG. 9 is a longitudinal sectional view when the base film 1 is distorted in FIG.
In the COF package shown in FIGS. 8A and 8B, due to variations in material lots and manufacturing conditions, for example, as shown in FIG. There is a case where the main surface is stuck and the sealing resin 12 is not reliably filled and an unfilled defect occurs.

このような未充填不良を防止するために、例えば、下記のような文献に記載された技術を適用することが考えられる。   In order to prevent such unfilling failure, for example, it is conceivable to apply a technique described in the following literature.

特許第３４９０９８７号公報Japanese Patent No. 3490987

この特許文献１の図９〜図１２には、例えば、本願の図８において、導体リード４を保護するためにソルダレジスタ７（特許文献１ではレジスト樹脂を使用している。）を塗布すると同時に、ベースフィルム１における半導体チップ搭載予定箇所２の中央に、ソルダレジスタ７と同一の材料を用いた厚さ（ｄ１＋ｄ３）の角柱状の１つのレジスト支持体を形成した半導体パッケージの技術が記載されている。   9 to 12 of Patent Document 1, for example, in FIG. 8 of the present application, a solder resistor 7 (resist resin is used in Patent Document 1) is applied to protect the conductor lead 4 at the same time. The technology of a semiconductor package in which a resist support having a prism shape with a thickness (d1 + d3) using the same material as the solder resistor 7 is formed in the center of the semiconductor chip mounting place 2 in the base film 1 is described. Yes.

そこで、例えば、本願の図９において、レジスト樹脂を用いたレジスト支持体をベースフィルム１上に形成しておけば、その後、半導体チップ１０を搭載し、溶融した封止樹脂１２を、半導体チップ側面から半導体チップ搭載予定箇所２と半導体チップ主表面との間へ注入する際に、ベースフィルム１の中央部が上方へ歪んだ場合でも、レジスト支持体により、ベースフィルム１の中央部と半導体チップ主表面との貼り付きを防止することができ、封止樹脂１２の未充填不良を防止することができると考えられる。   Therefore, for example, in FIG. 9 of the present application, if a resist support using a resist resin is formed on the base film 1, then the semiconductor chip 10 is mounted and the molten sealing resin 12 is attached to the side surface of the semiconductor chip. Even when the central portion of the base film 1 is distorted upward when it is injected between the semiconductor chip mounting planned location 2 and the main surface of the semiconductor chip, the resist support supports the central portion of the base film 1 and the main portion of the semiconductor chip. It is considered that sticking to the surface can be prevented, and unfilling failure of the sealing resin 12 can be prevented.

しかしながら、従来の図８のＣＯＦパッケージにおいて、例えば、特許文献１に記載されたレジスト樹脂を用いたレジスト支持体を、半導体チップ搭載予定箇所２の中央に設けた場合でも、以下の（Ａ）〜（Ｃ）のような課題が生じる。   However, in the conventional COF package of FIG. 8, for example, even when a resist support using a resist resin described in Patent Document 1 is provided in the center of the semiconductor chip mounting location 2, the following (A) to (A) to A problem such as (C) occurs.

（Ａ） レジスト樹脂を用いたレジスト支持体を半導体チップ搭載予定箇所２の中央に形成した場合、溶融した封止樹脂１２を、半導体チップ側面から半導体チップ搭載予定箇所２と半導体チップ主表面との間へ注入する際に、ベースフィルム１の中央部が上方向へ歪んだ時、レジスト支持体も横方向へ湾曲しつつ上方向へ押し上げられて、このレジスト支持体の上端が半導体チップ主表面に接着し、その後、注入された溶融状態の封止樹脂１２、及び湾曲したレジスト支持体が固化する。そのため、フレキシブルなベースフィルム１は、その弾性復元力によってそれが元の平らな状態に戻らず、そのまま歪んだ状態のＣＯＦパッケージ製品となってしまい、その後の実装上の不具合等が生じる虞がある。   (A) When a resist support using a resist resin is formed at the center of the semiconductor chip mounting place 2, the molten sealing resin 12 is moved from the semiconductor chip side surface to the semiconductor chip mounting place 2 and the semiconductor chip main surface. When the central portion of the base film 1 is distorted upward during the injection, the resist support is also pushed upward while curving in the lateral direction, and the upper end of the resist support is brought to the main surface of the semiconductor chip. Then, the injected sealing resin 12 in the molten state and the curved resist support are solidified. For this reason, the flexible base film 1 does not return to its original flat state due to its elastic restoring force, and becomes a distorted COF package product as it is, which may cause problems in subsequent mounting. .

（Ｂ） ソルダレジスト７を塗布する時に、同時にレジスト支持体を形成しなければならないので、製造工程数が増加したり、製造工程上の制約を受ける等の不都合が生じる虞がある。   (B) Since the resist support must be formed at the same time as the solder resist 7 is applied, there is a possibility that the number of manufacturing steps increases or that there are problems such as restrictions on the manufacturing steps.

（Ｃ） レジスト支持体の厚さは、（インナリード３の厚さｄ１＋バンプ電極１１のｄ３）と等しいため、レジスト支持体の上端は、半導体チップ１０の主表面に接触した状態となっている。そのため、溶融した封止樹脂１２を、半導体チップ側面から半導体チップ搭載予定箇所２と半導体チップ主表面との間へ注入する際に、溶融した封止樹脂１２が、レジスト支持体上端と半導体チップ主表面との間を通過することができず、溶融した封止樹脂１２の流入が阻害され、充填不良が生じる虞がある。ＣＯＦパッケージの薄型化の要求に応じて、半導体チップ搭載予定箇所２と半導体チップ主表面との間が更に短縮化されると、溶融した封止樹脂１２の流入阻害が益々問題となる。特に、ベースフィルム１の歪みを防止するために、レジスト支持体を複数形成した場合には、溶融した封止樹脂１２の流入阻害による未充填不良等の問題が益々問題になる。   (C) Since the thickness of the resist support is equal to (the thickness d1 of the inner lead 3 + d3 of the bump electrode 11), the upper end of the resist support is in contact with the main surface of the semiconductor chip 10. . Therefore, when the molten sealing resin 12 is injected from the side surface of the semiconductor chip between the semiconductor chip mounting planned location 2 and the main surface of the semiconductor chip, the molten sealing resin 12 is added to the upper end of the resist support and the main portion of the semiconductor chip. Inability to pass between the surfaces, the inflow of the molten sealing resin 12 is hindered, and there is a possibility that poor filling occurs. If the space between the semiconductor chip mounting location 2 and the main surface of the semiconductor chip is further shortened in response to a request for thinning the COF package, the inflow inhibition of the molten sealing resin 12 becomes more and more problematic. In particular, when a plurality of resist supports are formed in order to prevent the base film 1 from being distorted, problems such as unfilled defects due to the inflow inhibition of the molten sealing resin 12 become increasingly problematic.

本発明の半導体パッケージは、ベースフィルムと、前記ベースフィルム上における半導体チップ搭載予定箇所の周縁に配置され、前記半導体チップ搭載予定箇所内へ突設された金属製の厚さｄ１の複数のインナリードと、前記厚さｄ１とバンプ電極の厚さｄ３とを加算した厚さｄ１＋ｄ３よりも薄い、前記インナリードに対して電気的に分離された金属製の厚さｄ２を有し、前記半導体チップ搭載予定箇所内の所定の位置に配設されたダミーパターンと、主表面に突設された複数の前記バンプ電極を有し、前記半導体チップ搭載予定箇所上に配置され、前記バンプ電極が前記インナリードに接合された半導体チップと、前記半導体チップ搭載予定箇所と前記半導体チップの主表面との間に充填された封止樹脂とを備え、前記ダミーパターンは、前記半導体チップ搭載予定箇所内に突出した前記複数のインナリード先端部の内側において、特定の機能を持った前記インナリードの前に、前記インナリードのピン番号を特定できるように配置されて形成されていることを特徴とする半導体パッケージ。 The semiconductor package according to the present invention includes a base film and a plurality of inner leads having a metal thickness d1 that are disposed on the periphery of the semiconductor chip mounting planned location on the base film and project into the semiconductor chip mounting planned location. And a thickness d2 made of metal that is electrically separated from the inner lead and is smaller than a thickness d1 + d3 obtained by adding the thickness d1 and the thickness d3 of the bump electrode, and mounted on the semiconductor chip. A dummy pattern disposed at a predetermined position in a predetermined location and a plurality of the bump electrodes protruding from the main surface, and disposed on the semiconductor chip mounting planned location, the bump electrode being the inner lead A semiconductor chip bonded to the semiconductor chip, and a sealing resin filled between the semiconductor chip mounting planned portion and the main surface of the semiconductor chip, and the dummy pattern is In the inside of the semiconductor chip of the plurality of inner lead tip portion protruding mounting scheduled in place, prior to the inner leads having a specific function, the are formed disposed so as to be able to identify the pin number of the inner leads A semiconductor package characterized by that.

なお、前記半導体チップの主表面の周縁側にも、封止樹脂を充填しても良い。   Note that the peripheral side of the main surface of the semiconductor chip may be filled with a sealing resin.

本発明の半導体パッケージの製造方法では、前記発明の半導体パッケージの製造方法において、前記ベースフィルム上における前記半導体チップ搭載予定箇所の周縁に前記複数のインナリードを選択的に形成すると共に、同時に前記半導体チップ搭載予定箇所内であって特定の機能を持った前記インナリードの前に前記ダミーパターンを選択的に形成する工程と、前記半導体チップの主表面に突設された前記複数のバンプ電極を、位置合わせをして前記インナリードに接合する工程と、前記半導体チップの主表面の周縁側から、前記半導体チップ搭載予定箇所と前記半導体チップの主表面との間へ、溶融された前記封止樹脂を注入して、前記半導体チップ搭載予定箇所と前記半導体チップの主表面との間を封止する工程と、前記溶融された封止樹脂を固化する工程とを有することを特徴とする。 In the semiconductor package manufacturing method of the present invention, in the semiconductor package manufacturing method of the present invention, the plurality of inner leads are selectively formed on the periphery of the semiconductor chip mounting planned portion on the base film, and at the same time, the semiconductor A step of selectively forming the dummy pattern before the inner lead having a specific function within a chip mounting planned location, and the plurality of bump electrodes protruding from the main surface of the semiconductor chip, The step of aligning and bonding to the inner lead, and the sealing resin melted from the peripheral side of the main surface of the semiconductor chip to between the planned mounting position of the semiconductor chip and the main surface of the semiconductor chip Sealing the gap between the planned mounting location of the semiconductor chip and the main surface of the semiconductor chip, and the molten sealing Characterized by a step of solidifying the resin.

なお、前記封止する工程では、半導体チップの主表面の周縁側も封止しても良い。   In the sealing step, the peripheral side of the main surface of the semiconductor chip may be sealed.

本発明の半導体パッケージ及びその製造方法によれば、次の（ｉ）、（ｉｉ）のような効果がある。   The semiconductor package and the manufacturing method thereof according to the present invention have the following effects (i) and (ii).

（ｉ） ベースフィルムにおける半導体チップ搭載予定箇所内の所定の位置に、半導体チップ側の厚さｄ３のバンプ電極よりも薄い、厚さｄ２のダミーパターンを形成したので、材料ロットや製造条件のばらつき等により、ベースフィルムが撓んでも、ダミーパターンが支え棒のような役割を果たし、ベースフィルムが半導体チップ主表面に貼り付かない。そのため、ベースフィルムの弾性復元力により、このベースフィルムが元の平らな状態に戻りやすくなる。その結果、樹脂未充填不良が発生することが無くなり、高い歩留まりで、半導体パッケージを製造することが可能となる。
特に、ダミーパターンが特定の機能を持ったインナリードの前に配置されているので、ベースフィルムと半導体チップの貼り付き防止や樹脂の未充填不良防止の効果に加えて、外観上ピンの機能を特定でき、これにより、不良解析時等に速やかに該当ピンを見つけることができる。しかも、ピンの形状を選択することにより、更にインナリードを機能別やピン毎別に細かく分類することができる。 (I) Since a dummy pattern having a thickness d2 that is thinner than the bump electrode having a thickness d3 on the semiconductor chip side is formed at a predetermined position in the base film where the semiconductor chip is to be mounted, variation in material lots and manufacturing conditions For example, even if the base film is bent, the dummy pattern serves as a support rod, and the base film does not stick to the main surface of the semiconductor chip. Therefore, the base film easily returns to the original flat state due to the elastic restoring force of the base film. As a result, a resin unfilled defect does not occur, and a semiconductor package can be manufactured with a high yield.
In particular, since the dummy pattern is placed in front of the inner lead having a specific function, in addition to preventing the base film and the semiconductor chip from sticking and preventing the resin from being unfilled, the appearance of the pin functions As a result, it is possible to quickly find the corresponding pin at the time of failure analysis. In addition, by selecting the pin shape, the inner leads can be further finely classified by function or by pin.

（ｉｉ） ベースフィルムの半導体チップ搭載予定箇所において、半導体チップ側の厚さｄ３のバンプ電極よりも薄い、厚さｄ２のダミーパターンを形成したので、樹脂封止工程において、注入された溶融樹脂が、ダミーパターン上端と半導体チップ主表面との間を通過でき、半導体チップ搭載予定箇所と半導体チップ主表面との間に円滑に充填される。その結果、樹脂封止工程において、封止時間を短縮できると共に、樹脂未充填不良の発生を防止できる。なお、半導体チップの主表面の周縁側も封止すれば、封止状態がより完全になる。   (Ii) Since a dummy pattern having a thickness d2 which is thinner than a bump electrode having a thickness d3 on the semiconductor chip side is formed at a portion of the base film where the semiconductor chip is to be mounted, in the resin sealing step, the injected molten resin is The semiconductor chip can pass between the upper end of the dummy pattern and the main surface of the semiconductor chip, and is smoothly filled between the planned mounting position of the semiconductor chip and the main surface of the semiconductor chip. As a result, in the resin sealing step, the sealing time can be shortened, and the occurrence of unfilled resin can be prevented. If the peripheral side of the main surface of the semiconductor chip is also sealed, the sealed state becomes more complete.

ＣＯＦパッケージは、絶縁性のフレキシブルなベースフィルムと、前記ベースフィルム上における半導体チップ搭載予定箇所の周縁に配置され、前記半導体チップ搭載予定箇所内へ突設された金属製の厚さｄ１の複数のインナリードと、前記半導体チップ搭載予定箇所内に配設され、前記インナリードに対して電気的に分離された金属製の厚さｄ２（＜（ｄ１＋ｄ３、但し、ｄ３；バンプ電極の厚さ）のダミーパターンと、半導体チップと、封止樹脂とを備えている。   The COF package is provided with a plurality of insulating flexible base films and a metal thickness d1 that is disposed on the periphery of the semiconductor chip mounting location on the base film and protrudes into the semiconductor chip mounting location. An inner lead and a metal thickness d2 (<(d1 + d3, where d3 is the thickness of the bump electrode)) disposed in the planned mounting position of the semiconductor chip and electrically separated from the inner lead. A dummy pattern, a semiconductor chip, and a sealing resin are provided.

前記半導体チップは、主表面に突設された厚さｄ３の複数のバンプ電極を有し、前記半導体チップ搭載予定箇所上に配置され、前記バンプ電極が前記インナリードに接合されている。更に、前記封止樹脂は、前記半導体チップ搭載予定箇所と前記半導体チップの主表面との間に充填されている。   The semiconductor chip has a plurality of bump electrodes having a thickness d3 projecting from the main surface, arranged on the semiconductor chip mounting planned portion, and the bump electrodes are bonded to the inner leads. Furthermore, the sealing resin is filled between the planned mounting position of the semiconductor chip and the main surface of the semiconductor chip.

（実施例１の構成）
図１（ａ）、（ｂ）は、本発明の実施例１における半導体パッケージ（例えば、ＣＯＦパッケージ）の構造を示す概略の構成図であり、同図（ａ）は縦断面図、及び同図（ｂ）は一部を透視した平面図である。 (Configuration of Example 1)
FIGS. 1A and 1B are schematic configuration diagrams showing the structure of a semiconductor package (for example, a COF package) in Example 1 of the present invention. FIG. 1A is a longitudinal sectional view and FIG. (B) is the top view which saw through a part.

このＣＯＦパッケージは、耐熱性・耐薬品性等に優れた機械的強度の大きな絶縁性のポリイミド樹脂（例えば、ポリイミド・ガラエポ）等により形成された帯状のフレキシブルなベースフィルム２０を有し、このベースフィルム２０の両側に、フィルム送り用のスプロケット２０ａ，２０ｂが所定間隔で形成されている。なお、図１では、帯状のベースフィルム２０の内の１個のＣＯＦパッケージ分のみが示されている。   This COF package has a strip-like flexible base film 20 formed of an insulating polyimide resin (for example, polyimide / glass epoxy) having excellent mechanical properties such as heat resistance and chemical resistance, and a large mechanical strength. On both sides of the film 20, film-feeding sprockets 20a and 20b are formed at predetermined intervals. In FIG. 1, only one COF package of the band-shaped base film 20 is shown.

両側のスプロケット２０ａ，２０ｂ間のほぼ中央部には、ほぼ方形の半導体チップ搭載予定箇所２１が設けられている。半導体チップ搭載予定箇所２１の周縁には、金属製（例えば、銅箔、アルミニュウム箔、金箔等）の厚さｄ１（例えば、８〜１０μｍ程度）の複数のインナリード２２が配置され、これらのインナリード２２の先端部が、半導体チップ搭載予定箇所２１内へ突設されている。各インナリード２２の後端部には、例えばこのインナリード２２と同一金属製の導体リード２３がそれぞれ延設され、これらの導体リード２３を介して、入力側基板と接続するために一辺側に配置された複数の入力端子２４が接続されると共に、出力側基板と接続するために他辺側に配置された複数の出力端子２５に接続されている。   A substantially rectangular semiconductor chip mounting planned portion 21 is provided at a substantially central portion between the sprockets 20a and 20b on both sides. A plurality of inner leads 22 having a thickness d1 (for example, about 8 to 10 μm) made of metal (for example, a copper foil, an aluminum foil, a gold foil, etc.) are arranged on the periphery of the semiconductor chip mounting place 21. The leading end portion of the lead 22 protrudes into the semiconductor chip mounting planned portion 21. For example, conductor leads 23 made of the same metal as the inner leads 22 are respectively extended at the rear end portions of the inner leads 22, and are connected to the input side substrate via the conductor leads 23 on one side. A plurality of input terminals 24 arranged are connected and connected to a plurality of output terminals 25 arranged on the other side in order to connect to the output side substrate.

半導体チップ搭載予定箇所２１内に突出した複数のインナリード先端部の内側には、このインナリード２２に対して電気的に分離された金属製（例えば、インナリード２２と同一金属製の銅箔、アルミニュウム箔、金箔等）の厚さｄ２（＜（ｄ１＋ｄ３、但し、ｄ３；バンプ電極の厚さ）の複数のダミーパターン２６が配設されている。複数のダミーパターン２６は、半導体チップ搭載予定箇所２１において撓みの大きな位置（例えば、中央部付近）に形成されるか、或いは、後述するような注入される溶融樹脂の流入を阻害しない位置に配置され、且つ、その溶融樹脂の流入を阻害しない所定の形状に形成されることが望ましい。図１では、複数のダミーパターン２６は、半導体チップ搭載予定箇所２１のほぼ中央部に所定間隔隔てて直線上に配設され、且つ、各ダミーパターン２６の平面がほぼ方形の形状をしている。   Inside the plurality of inner lead tips protruding into the semiconductor chip mounting location 21, a metal (for example, a copper foil made of the same metal as the inner lead 22) is electrically separated from the inner lead 22. A plurality of dummy patterns 26 having a thickness d2 (<(d1 + d3, where d3 is the thickness of the bump electrode)) of an aluminum foil, a gold foil, etc. are provided. 21 is formed at a position where the deflection is large (for example, near the center), or is arranged at a position that does not hinder the inflow of the molten resin to be injected as described later, and does not hinder the inflow of the molten resin. 1, the plurality of dummy patterns 26 are linearly spaced at a predetermined interval in the substantially central portion of the semiconductor chip mounting planned location 21. It is disposed, and the plane of each of the dummy pattern 26 is a substantially rectangular shape.

半導体チップ搭載予定箇所２１と複数の入力端子２４及び複数の出力端子２５との間に配置された複数の導体リード２３には、これらを保護するために、絶縁性の保護膜（例えば、ソルダレジスト）２７が被覆されている。   An insulating protective film (for example, a solder resist) is provided on the plurality of conductor leads 23 arranged between the semiconductor chip mounting place 21 and the plurality of input terminals 24 and the plurality of output terminals 25. 27) is coated.

半導体チップ搭載予定箇所２１上には、平面がほぼ方形のＩＣチップ等の半導体チップ３０がＦ／Ｃ技術により実装されている。即ち、半導体チップ３０は、この主表面に厚さｄ３の複数のバンプ電極３１が突設され、これらのバンプ電極３１が位置合わせされ、例えば、Ｆ／Ｃ技術により、熱、荷重等が加えられてインナリード２２に接合されている。半導体チップ３０の側面側から、半導体チップ搭載予定箇所２１と半導体チップ主表面との間へ、溶融された封止樹脂３２が注入され、半導体チップ搭載予定箇所２１と半導体チップ主表面との間が封止されて保護されている。なお、封止樹脂３２により、半導体チッ３０の側面にも被覆して保護しても良い。その後、溶融された封止樹脂３２が固化される。   A semiconductor chip 30 such as an IC chip having a substantially rectangular plane is mounted on the planned semiconductor chip mounting portion 21 by F / C technology. That is, the semiconductor chip 30 has a plurality of bump electrodes 31 having a thickness d3 protruding from the main surface, and the bump electrodes 31 are aligned. For example, heat, load, etc. are applied by F / C technology. Are joined to the inner leads 22. The molten sealing resin 32 is injected from the side surface side of the semiconductor chip 30 between the planned semiconductor chip mounting location 21 and the semiconductor chip main surface, and the gap between the semiconductor chip mounting planned location 21 and the semiconductor chip main surface is between. Sealed and protected. The side surface of the semiconductor chip 30 may be covered and protected by the sealing resin 32. Thereafter, the molten sealing resin 32 is solidified.

（実施例１の動作）
入力端子２４から信号を入力すると、この入力信号が導体リード２３、インナリード２２、及びバンプ電極３１を介して半導体チップ３０へ与えられる。すると、半導体チップ３０にて所定の電気的な処理が行われ、この処理結果が、バンプ電極３１、インナリード２２、及び導体リード２３を介して出力端子２５へ出力される。 (Operation of Example 1)
When a signal is input from the input terminal 24, the input signal is given to the semiconductor chip 30 through the conductor lead 23, the inner lead 22, and the bump electrode 31. Then, predetermined electrical processing is performed in the semiconductor chip 30, and the processing result is output to the output terminal 25 via the bump electrode 31, the inner lead 22, and the conductor lead 23.

（実施例１の製造方法）
図１のＣＯＦパッケージは、例えば、次の（１）〜（５）のような工程１〜５により製造される。 (Manufacturing method of Example 1)
The COF package of FIG. 1 is manufactured by, for example, steps 1 to 5 such as the following (1) to (5).

（１） 工程１
所定幅の両端にスプロケット１ａ，１ｂが形成された帯状のベースフィルム２０を用意する。ベースフィルム２０上の所定間隔毎に、全面に金属膜を被着し、ホトリソグラフィ技術を用いて、その金属膜を選択的にエッチングする。これにより、半導体チップ搭載予定箇所２１の周縁に厚さｄ１の複数のインナリード２２が選択的に形成されると共に、同時に半導体チップ搭載予定箇所内に厚さｄ２（＜（ｄ１＋ｄ３、但し、ｄ３；バンプ電極の厚さ）の複数のダミーパターン２６が選択的に形成される。更に、複数のインナリード２２に接続された複数の導体リード２３と、これらの導体リード２３に接続された複数の入力端子２４、及び複数の出力端子２５も、同時に選択的に形成される。 (1) Process 1
A band-shaped base film 20 having sprockets 1a and 1b formed at both ends of a predetermined width is prepared. A metal film is deposited on the entire surface at predetermined intervals on the base film 20, and the metal film is selectively etched using a photolithography technique. As a result, a plurality of inner leads 22 having a thickness d1 are selectively formed on the periphery of the planned semiconductor chip mounting location 21, and at the same time, the thickness d2 (<(d1 + d3, where d3; A plurality of dummy patterns 26 (thicknesses of bump electrodes) are selectively formed, a plurality of conductor leads 23 connected to the plurality of inner leads 22, and a plurality of inputs connected to these conductor leads 23. The terminal 24 and the plurality of output terminals 25 are also selectively formed at the same time.

（２） 工程２
半導体チップ搭載予定箇所２１の周辺に露出する複数の導体リード２３の部分に、選択的にソルダレジスタ２７を被覆し、複数の導体リード２３を保護する。 (2) Process 2
A portion of the plurality of conductor leads 23 exposed around the semiconductor chip mounting place 21 is selectively covered with a solder register 27 to protect the plurality of conductor leads 23.

（３） 工程３
予め、主表面に厚さｄ３の複数のバンプ電極３１が形成された半導体チップ３０を用意しておく。ベースフィルム２０の半導体チップ搭載予定箇所２１に対して半導体チップ３０を位置合わせし、この半導体チップ３０の複数のバンプ電極３１を複数のインナリード先端部に載置し、Ｆ／Ｃ技術により、例えば、熱と荷重等を加えて、バンプ電極３１をインナリード２２に接合する。 (3) Process 3
A semiconductor chip 30 having a plurality of bump electrodes 31 having a thickness d3 formed on the main surface is prepared in advance. The semiconductor chip 30 is aligned with the semiconductor chip mounting planned location 21 of the base film 20, and a plurality of bump electrodes 31 of the semiconductor chip 30 are placed on a plurality of inner lead tips. The bump electrode 31 is joined to the inner lead 22 by applying heat and load.

（４） 工程４
半導体チップ３０の主表面の周縁側から、ソルダレジスタ２７により囲まれた半導体チップ搭載予定箇所２１と半導体チップ主表面との間へ、溶融された封止樹脂３２を注入する。すると、注入された溶融樹脂が、各インナリード２２間、各ダミーパターン２６間、及び、各ダミーパターン２６の上端と半導体チップ主表面との間を通り、半導体チップ搭載予定箇所２１と半導体チップ主表面との間に充填され、これらの半導体チップ搭載予定箇所２１と半導体チップ主表面との間が封止される。この際、溶融樹脂の注入量を多くすれば、半導体チップ３２の側面も封止され、より完全に封止できる。 (4) Process 4
The molten sealing resin 32 is injected from the peripheral side of the main surface of the semiconductor chip 30 into between the semiconductor chip mounting planned portion 21 surrounded by the solder register 27 and the semiconductor chip main surface. Then, the injected molten resin passes between the inner leads 22, between the dummy patterns 26, and between the upper end of each dummy pattern 26 and the main surface of the semiconductor chip, and the semiconductor chip mounting planned location 21 and the semiconductor chip main surface. The space between the semiconductor chip and the semiconductor chip main surface is sealed between the surface and the semiconductor chip. At this time, if the injection amount of the molten resin is increased, the side surface of the semiconductor chip 32 is also sealed, and can be sealed more completely.

（５） 工程５
溶融樹脂が固化した後、複数の半導体チップ３０が所定間隔で搭載された帯状のベースフィルム２０を、各半導体チップ箇所毎に切断等すれば、複数のＣＯＦパッケージの製造工程が終了する。 (5) Process 5
After the molten resin is solidified, if the strip-shaped base film 20 on which the plurality of semiconductor chips 30 are mounted at a predetermined interval is cut at each semiconductor chip location, the manufacturing process of the plurality of COF packages is completed.

（実施例１の効果）
本実施例１によれば、次の（ａ）〜（ｃ）のような効果がある。 (Effect of Example 1)
According to the first embodiment, there are the following effects (a) to (c).

（ａ） 図２は、図１（ａ）においてベースフィルム２０に歪みが生じた時の縦断面図である。   (A) FIG. 2 is a longitudinal sectional view when distortion occurs in the base film 20 in FIG.

ベースフィルム２０の半導体チップ搭載予定箇所２１において、この歪みの大きな位置（例えば、中央部）に、（インナリード２２の厚さｄ１＋バンプ電極３１の厚さｄ３）よりも薄い、厚さｄ２の複数のダミーパターン２６を形成したので、材料ロットや製造条件のばらつき等により、例えば、図２に示すように、ベースフィルム２０の中央部が上方へ撓んでも、ダミーパターン２６が支え棒のような役割を果たし、ベースフィルム２０が半導体チップ主表面に貼り付かない。そのため、フレキシブルなベースフィルム２０の弾性復元力により、このベースフィルム２０が元の平らな状態に戻りやすくなる。その結果、次の樹脂封止工程で樹脂未充填不良が発生することが無くなり、高い歩留まりで、ＣＯＦパッケージを製造することが可能となる。   A plurality of thicknesses d2 which are thinner than (thickness d1 of inner lead 22 + thickness d3 of bump electrode 31) at a position (for example, the central portion) where the distortion is large in a semiconductor chip mounting place 21 of base film 20. As shown in FIG. 2, for example, even if the central portion of the base film 20 bends upward due to variations in material lots and manufacturing conditions, the dummy pattern 26 is like a support rod. It plays a role and the base film 20 does not stick to the main surface of the semiconductor chip. Therefore, the elastic restoring force of the flexible base film 20 makes it easy for the base film 20 to return to the original flat state. As a result, no unfilled resin does not occur in the next resin sealing step, and a COF package can be manufactured with a high yield.

（ｂ） ベースフィルム２０の半導体チップ搭載予定箇所２１において、（インナリード２２の厚さｄ１＋バンプ電極３１の厚さｄ３）よりも薄い、厚さｄ２の複数のダミーパターン２６を形成したので、樹脂封止工程において、注入された溶融樹脂が、ダミーパターン２６の上端と半導体チップ主表面との間を通過でき、半導体チップ搭載予定箇所２１と半導体チップ主表面との間に円滑に充填される。その結果、樹脂封止工程において、封止時間を短縮できると共に、樹脂未充填不良の発生を防止できる。   (B) Since a plurality of dummy patterns 26 having a thickness d2 smaller than (thickness d1 of the inner lead 22 + thickness d3 of the bump electrode 31) are formed in the semiconductor chip mounting place 21 of the base film 20, the resin In the sealing step, the injected molten resin can pass between the upper end of the dummy pattern 26 and the semiconductor chip main surface, and is smoothly filled between the semiconductor chip mounting planned portion 21 and the semiconductor chip main surface. As a result, in the resin sealing step, the sealing time can be shortened, and the occurrence of unfilled resin can be prevented.

（ｃ） 図３は、図１（ｂ）の部分的な他の実装例を示す一部を透視した平面図である。   (C) FIG. 3 is a partially transparent plan view showing another partial mounting example of FIG.

図３に示すＣＯＦパッケージでは、平面が円形の複数のダミーパターン２６Ａが、樹脂封止工程において、注入される溶融樹脂の流入を阻害しない位置に配置され、且つ、その溶融樹脂の流入を阻害しない所定の形状に形成されている（例えば、各ダミーパターン２６Ａは、平面が直径０．３ｍｍ程度の円形で、各ダミーパターン２６Ａ間の平面的なピッチが０．５〜０．６ｍｍ程度で、且つ、均等に多数配置されている。）。   In the COF package shown in FIG. 3, a plurality of dummy patterns 26A having a circular plane are arranged at positions that do not hinder the inflow of the molten resin to be injected in the resin sealing step, and do not hinder the inflow of the molten resin. (For example, each dummy pattern 26A has a circular plane with a diameter of about 0.3 mm, a planar pitch between the dummy patterns 26A is about 0.5 to 0.6 mm, and , Evenly distributed in large numbers.)

このような構成にすれば、封止時間を短縮できると共に、樹脂未充填不良の発生をより完全に防止できる。更に、多数のダミーパターン２６Ａが均等に配置されているので、半導体チップ３０にて発生した熱が、それらの多数のダミーパターン２６Ａを介してベースフィルム２０側へ放熱されるので、放熱性が良くなる。   With such a configuration, the sealing time can be shortened and the occurrence of unfilled resin defects can be more completely prevented. Furthermore, since a large number of dummy patterns 26A are arranged uniformly, the heat generated in the semiconductor chip 30 is radiated to the base film 20 side through the large number of dummy patterns 26A, so that heat dissipation is good. Become.

（実施例２の構成、製造方法）
図４は、本発明の実施例２における半導体パッケージ（例えば、ＣＯＦパッケージ）の構造の一部を示す透視した概略の平面図であり、実施例１を示す図１（ｂ）中の要素と共通の要素には共通の記号が付されている。 (Configuration and production method of Example 2)
4 is a perspective schematic plan view showing a part of the structure of a semiconductor package (for example, a COF package) in the second embodiment of the present invention, and is common to the elements in FIG. 1B showing the first embodiment. The common symbols are attached to the elements of.

本実施例２のＣＯＦパッケージでは、半導体チップ搭載予定箇所２１内に突出した複数のインナリード先端部の内側には、複数の特定のインナリード２２の前にだけ、平面がほぼ方形の複数のダミーパターン２６が形成されている。 In the COF package of the second embodiment, a plurality of dummy having a substantially rectangular plane is provided on the inner side of the plurality of inner lead tips protruding into the semiconductor chip mounting location 21 only in front of the plurality of specific inner leads 22. A pattern 26 is formed.

例えば、ＣＯＦパッケージは、数１００〜１０００ピン程度のインナリード２２を有し、どのインナリード２２が何の機能を持ったリードか一目で分からない。そこで、特定の機能を持ったインナリード２２（例えば、出力１ピン、１１ピン、２１ピン等の１０ピン毎や、電源ピン等）の前に、ダミーパターン２２を設けることで、外観上ピンの機能を特定する構成にしている。その他の構成や製造方法は、実施例１と同様である。 For example, the COF package has inner leads 22 of about several hundred to 1000 pins, and it is not known at a glance which inner lead 22 has what function. Therefore, the dummy pattern 22 is provided in front of the inner lead 22 having a specific function (for example, every 10 pins such as the output 1 pin, 11 pin, 21 pin, or the power supply pin). It is configured to specify the function. Other configurations and manufacturing methods are the same as those in the first embodiment.

（実施例２の効果）
本実施例２によれば、ダミーパターン２６を特定の機能を持ったインナリード２２の前に配置して形成しているので、ベースフィルム２０と半導体チップ主表面との貼り付きによる未充填不良が無くなるだけでなく、インナリード２２のピン番号（Ｎｏ．）を特定することが可能となり、不良解析時等に速やかに該当ピンを見つけることができる。 (Effect of Example 2)
According to the second embodiment, since the dummy pattern 26 is disposed and formed in front of the inner lead 22 having a specific function, unfilled defects due to adhesion between the base film 20 and the main surface of the semiconductor chip are eliminated. In addition to being eliminated, the pin number (No.) of the inner lead 22 can be specified, and the corresponding pin can be quickly found at the time of failure analysis or the like.

（実施例３の構成、製造方法）
図５は、本発明の実施例３における半導体パッケージ（例えば、ＣＯＦパッケージ）の構造の一部を示す透視した概略の平面図であり、実施例２を示す図４中の要素と共通の要素には共通の記号が付されている。 (Configuration of Example 3, Manufacturing Method)
FIG. 5 is a perspective schematic plan view showing a part of the structure of a semiconductor package (for example, a COF package) according to the third embodiment of the present invention. In FIG. 5, the elements common to the elements in FIG. Are marked with a common symbol.

本実施例３のＣＯＦパッケージでは、半導体チップ搭載予定箇所２１内に突出した複数のインナリード先端部の内側には、複数の特定のインナリード２６の前にだけ、複数の特定の平面形状のダミーパターン（例えば、方形（□）のダミーパターン２６、及び三角形（△）のダミーパターン２６Ｂ）が配置されて形成されている。   In the COF package of the third embodiment, a plurality of dummy having a plurality of specific planar shapes is provided only inside the front ends of the plurality of inner leads protruding in the semiconductor chip mounting location 21 in front of the plurality of specific inner leads 26. Patterns (for example, a square (□) dummy pattern 26 and a triangle (Δ) dummy pattern 26B) are arranged and formed.

例えば、ＣＯＦパッケージは、数１００〜１０００ピン程度のインナリード２２を有し、どのインナリード２２が何の機能を持ったリードか一目でわからない。特定のインナリード２２の前に、平面形状の異なった特定のダミーパターン２２（例えば、出力１ピン、１１ピン、２１ピン等の１０ピン毎に方形（□）のダミーパターン２６、１００ピン、２００ピン、３００ピン等の１００ピン毎に三角形（△）のダミーパターン２６Ｂ）を設けることで、外観上ピンの機能を特定する構成にしている。その他の構成や製造方法は、実施例１と同様である。   For example, the COF package has inner leads 22 of about several hundred to 1000 pins, and it is not known at a glance which inner lead 22 has what function. Before a specific inner lead 22, a specific dummy pattern 22 having a different planar shape (for example, a square (□) dummy pattern 26, 100 pin, 200 for every 10 pins such as output 1 pin, 11 pin, 21 pin, etc. A triangular (Δ) dummy pattern 26B) is provided for every 100 pins such as pins and 300 pins, so that the function of the pin is specified in terms of appearance. Other configurations and manufacturing methods are the same as those in the first embodiment.

（実施例３の効果）
本実施例３によれば、平面形状の異なる方形（□）のダミーパターン２６や三角形（△）のダミーパターン２６Ｂ等を、特定のインナリード２２の前に配置しているので、ベースフィルム２０と半導体チップ主表面との貼り付による未充填不良がなくなるだけでなく、インナリード２２のピンを実施例２より更に特定し易くすることが可能となり、不良解析時等に速やかに該当ピンを見つけることができる。 (Effect of Example 3)
According to the third embodiment, the square (□) dummy pattern 26 and the triangular (Δ) dummy pattern 26B having different planar shapes are arranged in front of the specific inner lead 22, so that the base film 20 and Not only will there be no unfilled defects due to sticking to the main surface of the semiconductor chip, but the pin of the inner lead 22 can be more easily specified than in the second embodiment, and the corresponding pin can be found quickly at the time of defect analysis or the like. Can do.

図６（ａ）〜（ｆ）は、異なる平面形状のダミーパターン例を示す平面図であり、同図（ａ）は方形（□）のダミーパターン２６、同図（ｂ）は円形（○）のダミーパターン２６Ａ、同図（ｃ）は矢印形（↑）のダミーパターン２６Ｃ、同図（ｄ）は菱形（◇）のダミーパターン２６Ｄ、同図（ｅ）は三角形（△）のダミーパターン２６Ｂ、及び、同図（ｆ）は直線形（−）のダミーパターン２６Ｅを示す図である。   FIGS. 6A to 6F are plan views showing examples of dummy patterns having different planar shapes, where FIG. 6A is a square (□) dummy pattern 26, and FIG. 6B is a circle (◯). (C) is an arrow-shaped (↑) dummy pattern 26C, (d) is a rhombus (◇) dummy pattern 26D, and (e) is a triangular (Δ) dummy pattern 26B. FIG. 6F is a diagram showing a straight (−) dummy pattern 26E.

本実施例４では、実施例３に示す方形（□）のダミーパターン２６、及び三角形（△）のダミーパターン２６Ｂの他に、円形（○）のダミーパターン２６Ａ、菱形（◇）のダミーパターン２６Ｄ、矢印形（↑）のダミーパターン２６Ｃ、及び、直線形（−）のダミーパターン２６Ｅ等を用いることにより、更にインナリード２２を機能別やピン毎別に細かく分類することが可能となる。   In the fourth embodiment, in addition to the square (□) dummy pattern 26 and the triangular (Δ) dummy pattern 26B shown in the third embodiment, a circular (◯) dummy pattern 26A and a rhombus (◇) dummy pattern 26D. By using the arrow-shaped (↑) dummy pattern 26C, the linear (-) dummy pattern 26E, and the like, the inner leads 22 can be further classified by function and by pin.

図７は、図６のダミーパターン等を用いたＣＯＦパッケージにおける部分的な実装例を示す一部を透視した平面図であり、実施例３、４を示す図５、図６中の要素と共通の要素には共通の記号が付されている。   7 is a partially transparent plan view showing a partial mounting example in the COF package using the dummy pattern or the like of FIG. 6, and is common to the elements in FIGS. 5 and 6 showing the third and fourth embodiments. The common symbols are attached to the elements of.

図７に示すＣＯＦパッケージでは、例えば、入力端子側のインナリード２２の前にはダミーパターンが配置されていないが、他の特定の複数のインナリード２２の前には、平面が矢印形のダミーパターン２６Ｆ、及び、鋲形のダミーパターン２６Ｇ等が配置されて形成されている。   In the COF package shown in FIG. 7, for example, a dummy pattern is not arranged in front of the inner lead 22 on the input terminal side, but the plane is an arrow-shaped dummy in front of a plurality of other specific inner leads 22. A pattern 26F, a bowl-shaped dummy pattern 26G, and the like are arranged and formed.

（変形例）
本発明は、上記実施例に限定されず、ＣＯＦパッケージを図示以外の他の形状や構造等に変更したり、或いは、製造方法を図示以外の他の材料や製造工程等に変更する等、種々の利用形態や変形が可能である。 (Modification)
The present invention is not limited to the above-described embodiments, and various modifications such as changing the COF package to a shape or structure other than those shown in the drawing, or changing the manufacturing method to other materials or manufacturing steps other than the drawing, etc. Can be used and modified.

本発明の実施例１における半導体パッケージ（例えば、ＣＯＦパッケージ）の構造を示す概略の構成図である。It is a schematic block diagram which shows the structure of the semiconductor package (for example, COF package) in Example 1 of this invention. 図１（ａ）においてベースフィルム２０に歪みが生じた時の縦断面図である。It is a longitudinal cross-sectional view when distortion arises in the base film 20 in Fig.1 (a). 図１（ｂ）の部分的な他の実装例を示す一部を透視した平面図である。It is the top view which saw through a part which shows other partial mounting examples of FIG.1 (b). 本発明の実施例２における半導体パッケージ（例えば、ＣＯＦパッケージ）の構造の一部を示す透視した概略の平面図である。It is the see-through | perspective schematic plan view which shows a part of structure of the semiconductor package (for example, COF package) in Example 2 of this invention. 本発明の実施例３における半導体パッケージ（例えば、ＣＯＦパッケージ）の構造の一部を示す透視した概略の平面図である。It is the see-through | perspective schematic plan view which shows a part of structure of the semiconductor package (for example, COF package) in Example 3 of this invention. 異なる平面形状のダミーパターン例を示す平面図である。It is a top view which shows the example of a dummy pattern of a different planar shape. 図６のダミーパターン等を用いたＣＯＦパッケージにおける部分的な実装例を示す一部を透視した平面図である。FIG. 7 is a partially transparent plan view showing a partial mounting example in a COF package using the dummy pattern and the like of FIG. 6. 従来の半導体パッケージ（例えば、ＣＯＦパッケージ）の構造を示す概略の構成図である。It is a schematic block diagram which shows the structure of the conventional semiconductor package (for example, COF package). 図８（ａ）においてベースフィルム１に歪みが生じた時の縦断面図である。It is a longitudinal cross-sectional view when distortion arises in the base film 1 in Fig.8 (a).

符号の説明Explanation of symbols

２０ ベースフィルム
２１ 半導体チップ搭載予定箇所
２２ インナリード
２３ 導体リード
２６，２６Ａ〜２６Ｇ ダミーパターン
２７ ソルダレジスタ
３０ 半導体チップ
３１ バンプ電極
３２ 封止樹脂 20 Base film 21 Location where semiconductor chip is to be mounted 22 Inner lead 23 Conductor lead 26, 26A to 26G Dummy pattern 27 Solder register 30 Semiconductor chip 31 Bump electrode 32 Sealing resin

Claims (9)

ベースフィルムと、
前記ベースフィルム上における半導体チップ搭載予定箇所の周縁に配置され、前記半導体チップ搭載予定箇所内へ突設された金属製の厚さｄ１の複数のインナリードと、
前記厚さｄ１とバンプ電極の厚さｄ３とを加算した厚さｄ１＋ｄ３よりも薄い、前記インナリードに対して電気的に分離された金属製の厚さｄ２を有し、前記半導体チップ搭載予定箇所内の所定の位置に配設されたダミーパターンと、
主表面に突設された複数の前記バンプ電極を有し、前記半導体チップ搭載予定箇所上に配置され、前記バンプ電極が前記インナリードに接合された半導体チップと、
前記半導体チップ搭載予定箇所と前記半導体チップの主表面との間に充填された封止樹脂とを備え、
前記ダミーパターンは、前記半導体チップ搭載予定箇所内に突出した前記複数のインナリード先端部の内側において、特定の機能を持った前記インナリードの前に、前記インナリードのピン番号を特定できるように配置されて形成されていることを特徴とする半導体パッケージ。 A base film,
A plurality of inner leads of metal thickness d1 disposed on the periphery of the semiconductor chip mounting planned location on the base film and projecting into the semiconductor chip mounting planned location;
The metal chip has a thickness d2 that is thinner than the thickness d1 + d3, which is the sum of the thickness d1 and the bump electrode thickness d3, and is electrically separated from the inner lead. A dummy pattern disposed at a predetermined position inside ,
A plurality of the bump electrodes projecting from the main surface, disposed on the semiconductor chip mounting planned location, the semiconductor chip in which the bump electrodes are bonded to the inner leads;
A sealing resin filled between the semiconductor chip mounting planned location and the main surface of the semiconductor chip;
The dummy pattern can identify the pin number of the inner lead before the inner lead having a specific function inside the plurality of inner lead tip portions protruding into the semiconductor chip mounting planned portion. A semiconductor package characterized by being arranged. 請求項１記載の半導体パッケージは、更に、
前記封止樹脂により、前記半導体チップの主表面の周縁側も封止されていることを特徴とする半導体パッケージ。 The semiconductor package according to claim 1, further comprising:
The semiconductor package, wherein the peripheral side of the main surface of the semiconductor chip is also sealed by the sealing resin. 前記ダミーパターンは、前記半導体チップ搭載予定箇所において撓みの大きな位置に形成されていることを特徴とする請求項１又は２記載の半導体パッケージ。   The semiconductor package according to claim 1, wherein the dummy pattern is formed at a position where the bending is large at the semiconductor chip mounting planned portion. 前記ダミーパターンは、前記半導体チップ搭載予定箇所と前記半導体チップの主表面との間に充填される前記封止樹脂の流入を阻害しない位置に配置され、且つ、前記封止樹脂の流入を阻害しない所定の形状に形成されていることを特徴とする請求項３記載の半導体パッケージ。   The dummy pattern is disposed at a position that does not hinder the inflow of the sealing resin that is filled between the planned mounting position of the semiconductor chip and the main surface of the semiconductor chip, and does not hinder the inflow of the sealing resin. 4. The semiconductor package according to claim 3, wherein the semiconductor package is formed in a predetermined shape. 前記ダミーパターンは、前記インナリードを識別するための１種類又は複数種類の平面形状に形成されていることを特徴とする請求項１〜４のいずれか１項に記載の半導体パッケージ。   The semiconductor package according to claim 1, wherein the dummy pattern is formed in one or more types of planar shapes for identifying the inner lead. １つの前記特定の機能を持った前記インナリードの前に配置する前記ダミーパターンの形状と、他の前記特定の機能を持った前記インナリードの前に配置する他の前記ダミーパターンの形状と、を異ならせたことを特徴とする請求項１〜５のいずれか１項に記載の半導体パッケージ。The shape of the dummy pattern disposed before the inner lead having one specific function, and the shape of the other dummy pattern disposed before the inner lead having the other specific function, The semiconductor package according to claim 1, wherein the semiconductor packages are made different from each other. 入力端子側の前記インナリードの前には前記ダミーパターンが配置されないが、他の複数の前記インナリードの前には前記ダミーパターンが配置されることを特徴とする請求項１〜６のいずれか１項に記載の半導体パッケージ。The dummy pattern is not disposed in front of the inner lead on the input terminal side, but the dummy pattern is disposed in front of the plurality of other inner leads. 2. A semiconductor package according to item 1. 請求項１、３、４又は５のいずれか１項に記載の半導体パッケージを製造する半導体パッケージの製造方法において、In the manufacturing method of the semiconductor package which manufactures the semiconductor package of any one of Claim 1, 3, 4 or 5,
前記ベースフィルム上における前記半導体チップ搭載予定箇所の周縁に前記複数のインナリードを選択的に形成すると共に、同時に前記半導体チップ搭載予定箇所内であって特定の機能を持った前記インナリードの前に前記ダミーパターンを選択的に形成する工程と、A plurality of inner leads are selectively formed on the periphery of the semiconductor chip mounting planned location on the base film, and at the same time, in the semiconductor chip mounting planned location and before the inner lead having a specific function Selectively forming the dummy pattern;
前記半導体チップの主表面に突設された前記複数のバンプ電極を、位置合わせをして前記インナリードに接合する工程と、A step of aligning and bonding the plurality of bump electrodes projecting from the main surface of the semiconductor chip to the inner lead;
前記半導体チップの主表面の周縁側から、前記半導体チップ搭載予定箇所と前記半導体チップの主表面との間へ、溶融された前記封止樹脂を注入して、前記半導体チップ搭載予定箇所と前記半導体チップの主表面との間を封止する工程と、The molten sealing resin is injected from the peripheral side of the main surface of the semiconductor chip between the planned mounting position of the semiconductor chip and the main surface of the semiconductor chip, and the planned mounting position of the semiconductor chip and the semiconductor Sealing between the main surface of the chip;
前記溶融された封止樹脂を固化する工程と、Solidifying the molten sealing resin;
を有することを特徴とする半導体パッケージの製造方法。A method for manufacturing a semiconductor package, comprising: 請求項８記載の半導体パッケージの製造方法において、更に、9. The method of manufacturing a semiconductor package according to claim 8, further comprising:
前記封止する工程では、前記封止樹脂により、前記半導体チップの主表面の周縁側も封止されることを特徴とする半導体パッケージの製造方法。In the sealing step, the peripheral side of the main surface of the semiconductor chip is also sealed with the sealing resin.
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