JP4355672B2 - 薄膜形成方法 - Google Patents
薄膜形成方法 Download PDFInfo
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- JP4355672B2 JP4355672B2 JP2005072476A JP2005072476A JP4355672B2 JP 4355672 B2 JP4355672 B2 JP 4355672B2 JP 2005072476 A JP2005072476 A JP 2005072476A JP 2005072476 A JP2005072476 A JP 2005072476A JP 4355672 B2 JP4355672 B2 JP 4355672B2
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- Prior art keywords
- substrate
- gas
- raw material
- source gas
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000000034 method Methods 0.000 title claims description 28
- 239000010409 thin film Substances 0.000 title claims description 23
- 230000015572 biosynthetic process Effects 0.000 title description 15
- 239000007789 gas Substances 0.000 claims description 76
- 239000000758 substrate Substances 0.000 claims description 57
- 239000010408 film Substances 0.000 claims description 50
- 238000001179 sorption measurement Methods 0.000 claims description 21
- 239000011261 inert gas Substances 0.000 claims description 13
- 230000001590 oxidative effect Effects 0.000 claims description 10
- 230000008021 deposition Effects 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 2
- 239000007800 oxidant agent Substances 0.000 claims description 2
- 239000002994 raw material Substances 0.000 description 50
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 21
- 238000006243 chemical reaction Methods 0.000 description 21
- 229910052710 silicon Inorganic materials 0.000 description 21
- 239000010703 silicon Substances 0.000 description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 239000002052 molecular layer Substances 0.000 description 9
- 229910052814 silicon oxide Inorganic materials 0.000 description 9
- 238000010926 purge Methods 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 238000000151 deposition Methods 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910003902 SiCl 4 Inorganic materials 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- ZYLGGWPMIDHSEZ-UHFFFAOYSA-N dimethylazanide;hafnium(4+) Chemical compound [Hf+4].C[N-]C.C[N-]C.C[N-]C.C[N-]C ZYLGGWPMIDHSEZ-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- VOITXYVAKOUIBA-UHFFFAOYSA-N triethylaluminium Chemical compound CC[Al](CC)CC VOITXYVAKOUIBA-UHFFFAOYSA-N 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Chemical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
Description
なお、出願人は、本明細書に記載した先行技術文献情報で特定される先行技術文献以外には、本発明に関連する先行技術文献を出願時までに発見するには至らなかった。
Claims (2)
- 成膜対象の基板が載置された成膜チャンバーの内部が排気されて所定の圧力とされた状態にする第1工程と、
前記成膜チャンバーの内部に所定量の第1原料ガスを導入して前記第1原料ガスが前記基板の表面に供給された状態とし、前記基板の表面に前記第1原料ガスからなる吸着層が形成された状態とする第2工程と、
前記第1原料ガスの供給が停止され、前記成膜チャンバーの内部が排気された状態とし、前記成膜チャンバーの内部がパージされた状態とする第3工程と、
前記成膜チャンバーの内部に所定量の第2原料ガスを導入して前記第2原料ガスが前記基板の表面に供給された状態とし、前記吸着層と前記第2原料ガスを構成する材料とから構成された薄膜が、前記基板の表面に形成された状態とする第4工程と
を少なくとも備え、
前記第2工程では、前記成膜チャンバーの内部に不活性ガスのプラズマが生成された状態とすることで、前記成膜チャンバーの内部に供給された前記第1原料ガスが前記プラズマによる作用を受けた状態とする
ことを特徴とする薄膜形成方法。 - 請求項1記載の薄膜形成方法において、
前記第2原料ガスは、前記吸着層を酸化する酸化剤ガスであることを特徴とする薄膜形成方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005072476A JP4355672B2 (ja) | 2005-03-15 | 2005-03-15 | 薄膜形成方法 |
Applications Claiming Priority (1)
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---|---|---|---|
JP2005072476A JP4355672B2 (ja) | 2005-03-15 | 2005-03-15 | 薄膜形成方法 |
Publications (2)
Publication Number | Publication Date |
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JP2006261165A JP2006261165A (ja) | 2006-09-28 |
JP4355672B2 true JP4355672B2 (ja) | 2009-11-04 |
Family
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JP2005072476A Active JP4355672B2 (ja) | 2005-03-15 | 2005-03-15 | 薄膜形成方法 |
Country Status (1)
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JP (1) | JP4355672B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100549387B1 (ko) * | 1997-10-06 | 2006-05-09 | 혼다 기켄 고교 가부시키가이샤 | 휴대용전원장치 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1292970B1 (en) * | 2000-06-08 | 2011-09-28 | Genitech Inc. | Thin film forming method |
US6828218B2 (en) * | 2001-05-31 | 2004-12-07 | Samsung Electronics Co., Ltd. | Method of forming a thin film using atomic layer deposition |
US6720259B2 (en) * | 2001-10-02 | 2004-04-13 | Genus, Inc. | Passivation method for improved uniformity and repeatability for atomic layer deposition and chemical vapor deposition |
US7150789B2 (en) * | 2002-07-29 | 2006-12-19 | Micron Technology, Inc. | Atomic layer deposition methods |
JP2005175408A (ja) * | 2003-12-05 | 2005-06-30 | Semiconductor Res Found | 酸化・窒化絶縁薄膜の形成方法 |
JP4718141B2 (ja) * | 2004-08-06 | 2011-07-06 | 東京エレクトロン株式会社 | 薄膜形成方法及び薄膜形成装置 |
JP5054890B2 (ja) * | 2004-12-15 | 2012-10-24 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
-
2005
- 2005-03-15 JP JP2005072476A patent/JP4355672B2/ja active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100549387B1 (ko) * | 1997-10-06 | 2006-05-09 | 혼다 기켄 고교 가부시키가이샤 | 휴대용전원장치 |
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JP2006261165A (ja) | 2006-09-28 |
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