JP4348480B2 - ケーブル状圧電センサ - Google Patents
ケーブル状圧電センサ Download PDFInfo
- Publication number
- JP4348480B2 JP4348480B2 JP2004170084A JP2004170084A JP4348480B2 JP 4348480 B2 JP4348480 B2 JP 4348480B2 JP 2004170084 A JP2004170084 A JP 2004170084A JP 2004170084 A JP2004170084 A JP 2004170084A JP 4348480 B2 JP4348480 B2 JP 4348480B2
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- JP
- Japan
- Prior art keywords
- piezoelectric
- cable
- piezoelectric sensor
- flexible
- sensor according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004020 conductor Substances 0.000 claims description 75
- 229910052751 metal Inorganic materials 0.000 claims description 50
- 239000002184 metal Substances 0.000 claims description 50
- 239000012212 insulator Substances 0.000 claims description 35
- 239000000463 material Substances 0.000 claims description 25
- 239000000919 ceramic Substances 0.000 claims description 18
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 14
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical group Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 10
- 239000011787 zinc oxide Substances 0.000 claims description 7
- 229920000642 polymer Polymers 0.000 claims description 5
- 229910052984 zinc sulfide Inorganic materials 0.000 claims description 3
- 238000000034 method Methods 0.000 description 24
- 238000004519 manufacturing process Methods 0.000 description 14
- 239000013078 crystal Substances 0.000 description 12
- 239000002131 composite material Substances 0.000 description 10
- 230000000694 effects Effects 0.000 description 10
- 238000004544 sputter deposition Methods 0.000 description 10
- 239000010409 thin film Substances 0.000 description 10
- 229910052782 aluminium Inorganic materials 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 9
- 229920003051 synthetic elastomer Polymers 0.000 description 9
- 239000005061 synthetic rubber Substances 0.000 description 9
- 229920003002 synthetic resin Polymers 0.000 description 8
- 239000000057 synthetic resin Substances 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000010419 fine particle Substances 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 239000011888 foil Substances 0.000 description 5
- 230000035882 stress Effects 0.000 description 5
- 238000004804 winding Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 229920001971 elastomer Polymers 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 239000005060 rubber Substances 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 239000002033 PVDF binder Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 3
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- -1 polyethylene terephthalate Polymers 0.000 description 3
- 239000002861 polymer material Substances 0.000 description 3
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 3
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 3
- 229920002554 vinyl polymer Polymers 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000002759 woven fabric Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000000313 electron-beam-induced deposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 229920001973 fluoroelastomer Polymers 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000009958 sewing Methods 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 238000005478 sputtering type Methods 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
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- Transducers For Ultrasonic Waves (AREA)
Description
2 可撓性絶縁体
3 外部導体
31 圧電体層
32 金属層
4 シース
100 ケーブル状圧電センサ
Claims (10)
- 同軸ケーブル状の圧電センサであって、内部導体、内部導体の周囲に成形した可撓性絶縁体、該可撓性絶縁体の周囲を覆う外部導体、および該外部導体の周囲を覆う可撓性のシースからなり、該外部導体は、金属層と該金属層上に形成した圧電体層とを含み、該圧電体層が該可撓性絶縁体を覆っていることを特徴とする圧電センサ。
- 上記外部導体が、上記金属層の外側を覆う可撓性支持体層をさらに含んでいることを特徴とする請求項1に記載の圧電センサ。
- 上記外部導体において、上記圧電体層および上記金属層が一体形成されていることを特徴とする請求項1に記載の圧電センサ。
- 上記外部導体において、上記圧電体層、上記金属層および上記可撓性支持体層が一体形成されていることを特徴とする請求項2に記載の圧電センサ。
- 上記外部導体において、上記金属層の周囲をさらなる金属層が覆うことを特徴とする請求項3または4に記載の圧電センサ。
- 上記外部導体がフィルム状であることを特徴とする請求項1に記載の圧電センサ。
- 上記圧電体がセラミックス圧電体または高分子圧電体材料であることを特徴とする請求項1に記載の圧電センサ。
- 上記圧電体が、双極子配向度55%以上のウルツ鉱構造を有するセラミックス圧電体であることを特徴とする請求項1に記載の圧電センサ。
- 直径が1.5mm以下であることを特徴とする請求項1に記載の圧電センサ。
- 上記圧電体が、窒化アルミニウムまたは酸化亜鉛であることを特徴とする請求項1に記載の圧電センサ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004170084A JP4348480B2 (ja) | 2004-06-08 | 2004-06-08 | ケーブル状圧電センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004170084A JP4348480B2 (ja) | 2004-06-08 | 2004-06-08 | ケーブル状圧電センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005351664A JP2005351664A (ja) | 2005-12-22 |
JP4348480B2 true JP4348480B2 (ja) | 2009-10-21 |
Family
ID=35586282
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004170084A Expired - Fee Related JP4348480B2 (ja) | 2004-06-08 | 2004-06-08 | ケーブル状圧電センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4348480B2 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101260630B1 (ko) | 2012-08-07 | 2013-05-03 | 김한구 | 로드 센서 및 그 제조 방법 |
JP6725290B2 (ja) | 2016-03-31 | 2020-07-15 | 東邦化成株式会社 | 圧電ワイヤー及びその製造方法、並びにその圧電ワイヤーを備えた圧電装置 |
KR101998983B1 (ko) * | 2017-12-11 | 2019-10-01 | 한국건설기술연구원 | 진동, 압력 측정을 위한 피에조 센서 및 그 피에조센서의 제조방법 |
JP7416376B2 (ja) * | 2019-11-27 | 2024-01-17 | ダイキンファインテック株式会社 | 圧電素子および圧電装置 |
WO2022210563A1 (ja) * | 2021-03-30 | 2022-10-06 | 日東電工株式会社 | 圧電体膜、圧電体膜の製造方法、圧電素子及び圧電デバイス |
JPWO2022210438A1 (ja) * | 2021-03-30 | 2022-10-06 | ||
JPWO2022210182A1 (ja) * | 2021-03-30 | 2022-10-06 |
-
2004
- 2004-06-08 JP JP2004170084A patent/JP4348480B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2005351664A (ja) | 2005-12-22 |
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