JP4327286B2 - 水晶振動子の製造方法 - Google Patents
水晶振動子の製造方法 Download PDFInfo
- Publication number
- JP4327286B2 JP4327286B2 JP02307999A JP2307999A JP4327286B2 JP 4327286 B2 JP4327286 B2 JP 4327286B2 JP 02307999 A JP02307999 A JP 02307999A JP 2307999 A JP2307999 A JP 2307999A JP 4327286 B2 JP4327286 B2 JP 4327286B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode film
- film
- vibrating piece
- manufacturing
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 239000013078 crystal Substances 0.000 title description 40
- 230000005284 excitation Effects 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 9
- 238000004544 sputter deposition Methods 0.000 claims description 8
- 230000001681 protective effect Effects 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims 1
- 239000011651 chromium Substances 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 239000010453 quartz Substances 0.000 description 7
- 239000012790 adhesive layer Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 229910052804 chromium Inorganic materials 0.000 description 3
- 230000000873 masking effect Effects 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02307999A JP4327286B2 (ja) | 1999-01-29 | 1999-01-29 | 水晶振動子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02307999A JP4327286B2 (ja) | 1999-01-29 | 1999-01-29 | 水晶振動子の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000223981A JP2000223981A (ja) | 2000-08-11 |
| JP2000223981A5 JP2000223981A5 (enExample) | 2006-03-16 |
| JP4327286B2 true JP4327286B2 (ja) | 2009-09-09 |
Family
ID=12100422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP02307999A Expired - Fee Related JP4327286B2 (ja) | 1999-01-29 | 1999-01-29 | 水晶振動子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4327286B2 (enExample) |
-
1999
- 1999-01-29 JP JP02307999A patent/JP4327286B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2000223981A (ja) | 2000-08-11 |
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