JP4322939B2 - 磁区制御用反強磁性層を備えた磁気抵抗効果薄膜磁気ヘッド - Google Patents
磁区制御用反強磁性層を備えた磁気抵抗効果薄膜磁気ヘッド Download PDFInfo
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- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 1
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- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- FQMNUIZEFUVPNU-UHFFFAOYSA-N cobalt iron Chemical compound [Fe].[Co].[Co] FQMNUIZEFUVPNU-UHFFFAOYSA-N 0.000 description 1
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- 238000010586 diagram Methods 0.000 description 1
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- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
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- UGKDIUIOSMUOAW-UHFFFAOYSA-N iron nickel Chemical compound [Fe].[Ni] UGKDIUIOSMUOAW-UHFFFAOYSA-N 0.000 description 1
- RNRAZTYOQURAEF-UHFFFAOYSA-N iron tantalum Chemical compound [Fe].[Fe].[Fe].[Fe].[Fe].[Fe].[Fe].[Ta].[Ta].[Ta] RNRAZTYOQURAEF-UHFFFAOYSA-N 0.000 description 1
- HZGFMPXURINDAW-UHFFFAOYSA-N iron zirconium Chemical compound [Fe].[Zr].[Zr] HZGFMPXURINDAW-UHFFFAOYSA-N 0.000 description 1
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- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
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- 229910052703 rhodium Inorganic materials 0.000 description 1
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- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
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- 239000010937 tungsten Substances 0.000 description 1
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3909—Arrangements using a magnetic tunnel junction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3929—Disposition of magnetic thin films not used for directly coupling magnetic flux from the track to the MR film or for shielding
- G11B5/3932—Magnetic biasing films
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B2005/3996—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3967—Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read
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- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Hall/Mr Elements (AREA)
- Magnetic Heads (AREA)
Description
In Plane)−GMRヘッドと呼び、TMRヘッドと同様に膜面に対して垂直方向にセンス電流を流すGMRヘッドをCPP(Current Perpendicular
to Plane)−GMRヘッドと呼んでいる。
まず、下地絶縁層51(図5参照)上に、下部シールド層を兼用する下部電極層52を形成する(ステップS110)。下部電極層52は、例えばフレームめっき法等によって、例えばNiFe、CoFe、FeNiCo、FeAlSi、FeN、FeZrN、FeTaN、CoZrNb、CoZrTa等の金属磁性材料を厚さ0.1〜3μm程度に積層することによって形成される。望ましい実施形態においては、この下部電極層52として、NiFeが約2μmの厚さで積層される。
11 スピンドルモータ
12 アセンブリキャリッジ装置
13 記録再生制御回路
14 駆動アーム
15 ボイスコイルモータ(VCM)
16 ピボットベアリング軸
17 HGA
20 サスペンション
21 磁気ヘッドスライダ
22 ロードビーム
23 フレクシャ
24 ベースプレート
25 配線部材
30 TMR読出しヘッド素子
31 インダクティブ書込みヘッド素子
32 複合型薄膜磁気ヘッド
33、34 信号端子電極
36 浮上面(ABS)
37 素子形成面
50 基板
51 下地絶縁層
52 下部電極層
53 TMR積層体
53a 下部金属層
53a′ 下部金属層用の膜
53b 磁化固定層
53b′ 磁化固定層用の膜
53c トンネルバリア層
53c′ トンネルバリア層用の膜
53d 磁化自由層(フリー層)
53d′ 磁化自由層用の膜
53e 第1の上部金属層
53e′ 第1の上部金属層用の膜
54、56a、57、66 絶縁層
55 上部電極層
56b 軟磁性層
58 バッキングコイル層
59 バッキングコイル絶縁層
60 主磁極層
61 絶縁ギャップ層
62 書込みコイル層
63 書込みコイル絶縁層
64 補助磁極層
65 保護層
67 磁区制御用軟磁性層
68 磁区制御用反強磁性層
69 第2の上部金属層
70 磁区制御保護層
Claims (20)
- 下部電極層と、該下部電極層上に積層されており積層面に垂直方向に電流が流れる磁気抵抗効果積層体と、該磁気抵抗効果積層体のトラック幅方向の両側に形成された磁区制御用軟磁性層と、前記磁気抵抗効果積層体及び前記磁区制御用軟磁性層上に連続して積層されており、該磁区制御用軟磁性層と相互に交換結合している磁区制御用反強磁性層と、該磁区制御用反強磁性層上に積層されている上部電極層とを備えていることを特徴とする薄膜磁気ヘッド。
- 前記磁気抵抗効果積層体が、磁化固定層と、磁化自由層と、該磁化固定層及び該磁化自由層間に積層された非磁性導電層又はトンネルバリア層とを備えていることを特徴とする請求項1に記載の薄膜磁気ヘッド。
- 前記磁化固定層が、磁化固定用軟磁性層と、該磁化固定用軟磁性層と交換結合している磁化固定用反強磁性層とを備えていることを特徴とする請求項2に記載の薄膜磁気ヘッド。
- 前記磁化固定層が、磁化固定用硬磁性層を備えていることを特徴とする請求項2に記載の薄膜磁気ヘッド。
- 前記磁区制御用反強磁性層の層厚が5nm以上であることを特徴とする請求項1から4のいずれか1項に記載の薄膜磁気ヘッド。
- 磁気抵抗効果読出しヘッド素子の前記上部電極層上にインダクティブ書込みヘッド素子が形成されていることを特徴とする請求項1から5のいずれか1項に記載の薄膜磁気ヘッド。
- 磁気ディスクと、少なくとも1つの薄膜磁気ヘッドと、該少なくとも1つの薄膜磁気ヘッドを前記磁気ディスクの表面に対向させて支持する支持機構とを含んでおり、
前記少なくとも1つの薄膜磁気ヘッドが、下部電極層と、該下部電極層上に積層されており積層面に垂直方向に電流が流れる磁気抵抗効果積層体と、該磁気抵抗効果積層体のトラック幅方向の両側に形成された磁区制御用軟磁性層と、前記磁気抵抗効果積層体及び前記磁区制御用軟磁性層上に連続して積層されており、該磁区制御用軟磁性層と相互に交換結合している磁区制御用反強磁性層と、該磁区制御用反強磁性層上に積層されている上部電極層とを備えていることを特徴とする磁気ディスクドライブ装置。 - 前記磁気抵抗効果積層体が、磁化固定層と、磁化自由層と、該磁化固定層及び該磁化自由層間に積層された非磁性導電層又はトンネルバリア層とを備えていることを特徴とする請求項7に記載の磁気ディスクドライブ装置。
- 前記磁化固定層が、磁化固定用軟磁性層と、該磁化固定用軟磁性層と交換結合している磁化固定用反強磁性層とを備えていることを特徴とする請求項8に記載の磁気ディスクドライブ装置。
- 前記磁化固定層が、磁化固定用硬磁性層を備えていることを特徴とする請求項8に記載の磁気ディスクドライブ装置。
- 前記磁区制御用反強磁性層の層厚が5nm以上であることを特徴とする請求項7から10のいずれか1項に記載の磁気ディスクドライブ装置。
- 下部電極層上に磁気抵抗効果積層膜を成膜するステップと、該成膜した磁気抵抗効果積層膜に対してトラック幅を規定するパターニングを行って磁気抵抗効果積層体を形成するパターニングステップと、該パターニングステップで用いたマスクを残した状態で少なくとも絶縁膜及び磁区制御用軟磁性膜を成膜してリフトオフすることにより絶縁層及び磁区制御用軟磁性層を形成するリフトオフステップと、前記磁気抵抗効果積層体及び前記磁区制御用軟磁性層上に磁区制御用反強磁性層を積層するステップと、該磁区制御用反強磁性層上に上部電極層を積層するステップとを備えたことを特徴とする薄膜磁気ヘッドの製造方法。
- 前記リフトオフステップが、前記パターニングステップで用いたマスクを残した状態で絶縁膜、磁区制御用軟磁性膜及び磁区制御保護膜を順次成膜してリフトオフすることにより絶縁層、磁区制御用軟磁性層及び磁区制御保護層を形成するステップであることを特徴とする請求項12に記載の製造方法。
- 前記リフトオフステップが、前記パターニングステップで用いたマスクを残した状態で絶縁膜及び磁区制御用軟磁性膜のみを順次成膜してリフトオフすることにより絶縁層及び磁区制御用軟磁性層を形成するステップであることを特徴とする請求項12に記載の製造方法。
- 前記磁気抵抗効果積層膜を成膜するステップが、少なくとも磁化固定膜、非磁性導電膜又はトンネルバリア膜、及び磁化自由層膜を順次成膜するステップであることを特徴とする請求項12から14のいずれか1項に記載の製造方法。
- 前記磁化固定膜を成膜するステップが、磁化固定用軟磁性膜と、該磁化固定用軟磁性層と相互に交換結合する磁化固定用反強磁性膜を成膜するステップであることを特徴とする請求項15に記載の製造方法。
- 前記磁化固定膜を成膜するステップが、磁化固定用硬磁性膜を成膜するステップであることを特徴とする請求項15に記載の製造方法。
- 前記磁区制御用反強磁性層を積層するステップが、膜厚が5nm以上の磁区制御用反強磁性層を積層するステップであることを特徴とする請求項12から17のいずれか1項に記載の製造方法。
- 磁気抵抗効果読出しヘッド素子の前記上部電極層上にインダクティブ書込みヘッド素子を形成するステップをさらに備えたことを特徴とする請求項12から18のいずれか1項に記載の製造方法。
- 多数の薄膜磁気ヘッドが形成されたウエハを、複数の薄膜磁気ヘッドが列状にそれぞれ並ぶ複数のバーに分離するステップと、該各バーを研磨した後、複数の個々の薄膜磁気ヘッドに分離するステップとをさらに備えたことを特徴とする請求項12から19のいずれか1項に記載の製造方法。
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