JP4309882B2 - Wiring board for multi-cavity - Google Patents

Wiring board for multi-cavity Download PDF

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JP4309882B2
JP4309882B2 JP2005290308A JP2005290308A JP4309882B2 JP 4309882 B2 JP4309882 B2 JP 4309882B2 JP 2005290308 A JP2005290308 A JP 2005290308A JP 2005290308 A JP2005290308 A JP 2005290308A JP 4309882 B2 JP4309882 B2 JP 4309882B2
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insulating layer
marks
wiring board
length
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JP2007103601A (en
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裕土 松田
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NGK Spark Plug Co Ltd
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本発明は、絶縁層の表面と裏面とに形成した導体パターン相互の印刷ずれ、あるいは積層すべき複数の絶縁層相互の積層ずれについて、検知および合否の判定が容易に行える多数個取り用配線基板に関する。   The present invention provides a multi-wiring circuit board that can easily detect and determine pass / fail of printing misalignment between conductor patterns formed on the front and back surfaces of an insulating layer or misalignment between a plurality of insulating layers to be laminated. About.

近年の配線基板に対する配線の高密度化および高性能化に応じて、絶縁層を挟んだ上層と下層の配線層同士の印刷ずれなどや、積層すべき複数の絶縁層ごとに形成した配線層同士の積層ずれによる不具合を低減することが求められている。
例えば、積層すべき複数の絶縁層ごとに配線回路およびビア導体を形成した多数個取り用の多層配線基板において、当該多層配線基板の端面と直交する方向の幅が単調に変化するパターン(例えば、平面視が直角三角形のパターン)を絶縁層ごとに形成し、かかるパターンを積層後の端面に露出させた多層配線基板が提案されている(例えば、特許文献1参照)。
According to the recent trend toward higher density and higher performance of wiring on the wiring board, printing misalignment between the upper and lower wiring layers sandwiching the insulating layer, and the wiring layers formed for each of the multiple insulating layers to be stacked It is demanded to reduce the problems caused by the stacking deviation.
For example, in a multi-layer multi-layer wiring board in which wiring circuits and via conductors are formed for each of a plurality of insulating layers to be stacked, a pattern in which the width in a direction orthogonal to the end face of the multi-layer wiring board monotonously changes (for example, A multilayer wiring board has been proposed in which a right-angled triangle pattern in plan view) is formed for each insulating layer, and such a pattern is exposed on an end face after lamination (see, for example, Patent Document 1).

特開2005−101299号公報(第1〜12頁、図1,2)JP 2005-101299 A (pages 1 to 12, FIGS. 1 and 2)

前記特許文献1の多層配線基板によれば、その端面に露出した複数のパターン同士間の長さの相違を検出することで、積層ずれの有無を容易に判定することができる。しかしながら、かかる積層ずれが許容される範囲内にあるか否かは、上記端面に露出する複数のパターン同士間の長短差を多層配線基板ごとに計測する必要がある。このため、前記多層配線基板の検査工程に工数を要し且つコスト高を招く、という問題点があった。   According to the multilayer wiring board of Patent Document 1, it is possible to easily determine the presence or absence of misalignment by detecting a difference in length between a plurality of patterns exposed on the end face. However, it is necessary to measure, for each multilayer wiring board, the difference in length between the plurality of patterns exposed on the end face to determine whether or not such stacking deviation is within the allowable range. For this reason, there existed a problem that the inspection process of the said multilayer wiring board requires a man-hour and raises cost.

本発明は、背景技術において説明した問題点を解決し、絶縁層を挟んだ上層と下層の配線層相互の印刷ずれや、配線層を形成した複数の絶縁層相互の積層ずれの有無、および、ずれている場合の合格・不合格の判定が容易に行える多数個取り用配線基板を提供する、ことを課題とする。   The present invention solves the problems described in the background art, the presence or absence of misprinting between the upper and lower wiring layers sandwiching the insulating layer, the misalignment between the plurality of insulating layers forming the wiring layer, and It is an object of the present invention to provide a wiring board for multi-cavity that can be easily judged whether it is shifted or not.

課題を解決するための手段および発明の効果Means for Solving the Problems and Effects of the Invention

本発明は、前記課題を解決するため、絶縁層の表面および裏面に、あるいは積層すべき複数の絶縁層に形成すべき配線層と同時に設ける複数のマークを、配線基板の厚み方向に沿った視角で互いに重複させ且つ許容できるずれ量の最大長さを複数のマーク間の長短差に適用する、ことに着想して成されたものである。
即ち、本発明の多数個取り用配線基板(請求項1)は、表面または裏面の何れか一方に平面視で矩形を呈するマークA,B,Cの何れか1つのマークが形成された絶縁層と、かかる絶縁層の裏面側または表面側に隣接して積層され、平面視で矩形を呈し上記1つのマーク以外のマークA,B,Cのうち残り2つのマークが上記1つのマークを含めた厚み方向において重複し、該2つのマークの一方が表面に形成され、且つ他方が裏面に形成された別の絶縁層と、 を含み平面視が矩形の表面、裏面、およびこれらの間に位置する四つの外側面を有する多数個取り用配線基板であって、かかる多数個取り用配線基板の側面に露出するマークAの長さは、マークB,Cの長さよりも長く、マークCの長さは、マークA,Bの長さの中間であると共に、上記1つのマークと、上記残り2つのマークの何れか一方との長さの差は、許容可能な最大積層ずれ量に一致しており、上記残り2つのマーク相互間の長さの差は、許容可能な最大印刷ずれ量に一致している、ことを特徴とする。
In order to solve the above problems, the present invention provides a plurality of marks provided on the front and back surfaces of the insulating layer or simultaneously with the wiring layers to be formed on the plurality of insulating layers to be laminated, with a viewing angle along the thickness direction of the wiring board. The idea is to apply the maximum length of the allowable deviation amount to the difference in length between a plurality of marks.
That is, the multi-cavity wiring board according to the present invention (Claim 1) has an insulating layer in which any one of the marks A, B, and C having a rectangular shape in plan view is formed on either the front surface or the back surface. And the insulating layer is laminated adjacent to the back side or the front side, has a rectangular shape in plan view, and the remaining two marks of the marks A, B, and C other than the one mark include the one mark. overlap in the thickness direction, one of the two marks are formed on the surface, and the other is a separate insulating layer formed on the back surface, the unrealized plan view a rectangular surface, back surface, and positioned between the a multi-piece wiring board having four outer surfaces of the length of the mark a exposed to the outside side surface of such a multi-piece wiring substrate, the mark B, longer than the length of C, the mark C The length is between the lengths of marks A and B. In addition, the difference in length between the one mark and one of the remaining two marks is equal to the maximum allowable stacking deviation, and the difference in length between the remaining two marks. Corresponds to the maximum allowable printing deviation amount.

これによれば、前記別の絶縁層の表面と裏面とに(残り)2つのマークを個別に重複して形成し、両マークの重複程度を観察することで、別の絶縁層の表面および裏面に印刷などした導体層相互の印刷ずれの合否を容易に判定できる同時に、前記絶縁層の表面または裏面に形成した1つのマークと、別の絶縁層における残り2つのマークの一方との重複程度を観察することで、一目で絶縁層間の積層ずれの合否を容易に判定することもできる更に、絶縁層および別の絶縁層のX方向に沿った印刷ずれや積層ずれがマークA,B,Cの幅方向に沿って存在しても、かかる印刷ずれなどは各絶縁層のY方向に沿って別途形成したマークA,B,Cの重複程度を観察することで、容易に合否の判定も可能となる従って、複数の多層配線基板を併有する多数個取り用配線基板における印刷ずれと共に積層ずれの合否を一目で判定できるため、検査工程の工数とコストとを低減することができるAccording to this, the (remaining) two marks are separately formed on the surface and the back surface of the other insulating layer, and the surface and the back surface of the other insulating layer are observed by observing the degree of overlap between both marks. It is possible to easily determine whether or not the printing misalignment between the conductor layers printed on the sheet is acceptable . At the same time, by observing the degree of overlap between one mark formed on the front surface or the back surface of the insulating layer and one of the remaining two marks in another insulating layer, it is possible to easily determine whether the stacking deviation between the insulating layers is acceptable or not at a glance. It can also be determined . Further, even if there is a printing misalignment or stacking misalignment along the X direction of the insulating layer and another insulating layer along the width direction of the marks A, B, C, such a misprinting is caused in the Y direction of each insulating layer. By observing the degree of overlap of the marks A, B, and C separately formed along the same, it is possible to easily determine whether or not the product is acceptable . Therefore, since it is possible to determine at a glance whether the misalignment and the misalignment of the multi-wiring substrate having a plurality of multi-layer wiring substrates at the same time, it is possible to reduce the man-hour and cost of the inspection process .

前記印刷ずれや積層ずれを狭い許容公差内に納めるには、例えば、最長のマークAと対比するマークは、中間長さのマークCを選択し、最短のマークBと対比するマークは、これよりもやや長いマークCを選択する In order to keep the printing misalignment and stacking misalignment within narrow tolerances, for example, the mark C to be compared with the longest mark A is selected as the mark C having an intermediate length, and the mark to be compared with the shortest mark B is A slightly longer mark C is selected .

尚、前記絶縁層および別の絶縁層は、例えばアルミナを主成分とするセラミック、例えばガラス−アルミナからなる低温焼成セラミックの一種であるガラス−セラミック、あるいはBT樹脂などの樹脂からなり、かかる絶縁層の表面と裏面との間には、ビア導体が貫通している。このうち、前記絶縁層は、その表面または裏面に前記マークA,B,Cのうちの1つのマークが形成され、別の絶縁層は、その表面および裏面に上記1つのマークを除いた残り2つのマークが個別に形成されている。
また、前記多数個取り用配線基板には、単層である別の絶縁層と、単層または複層の絶縁層とからなる配線基板、中継基板、あるいは、SAWフィルタ、水晶振動子、圧電振動子などの電子部品搭載用パッケージにおける搭載用基板などを複数個併有したものが含まれる。
更に、前記別の絶縁層の表・裏面に形成される残り2つのマークは、該別の絶縁層の厚み方向に沿った平面視で等分配置、即ち、比較的短いマークの長手方向の両端に比較的長いマークの両端部が同じ長さで露出するにように重複して形成され、両マークの長さの差は、許容される最大ずれ量の2倍とされる。当該ずれとは、絶縁層の表面および裏面に形成すべき導体層(ランドや接続端子)の印刷ずれ(またはパターニングずれ)を指す。
加えて、多数個取り用配線基板の前記側面には、かかる基板の外側面のほか、当該基板を切断予定線に沿って切断した際に出現する切断面も含まれる。
The insulating layer and the other insulating layer are made of, for example, a ceramic mainly composed of alumina, for example, a glass-ceramic which is a kind of low-temperature fired ceramic made of glass-alumina, or a resin such as BT resin. Via conductors penetrate between the front surface and the back surface. Of these, one of the marks A, B, and C is formed on the front surface or the back surface of the insulating layer, and another insulating layer is the remaining 2 except for the one mark on the front and back surfaces. Two marks are formed individually.
In addition, the multi-piece wiring board includes a wiring board composed of another insulating layer that is a single layer and a single layer or a multi-layer insulating layer, a relay board, a SAW filter, a crystal resonator, or a piezoelectric vibration. This includes a plurality of mounting boards in an electronic component mounting package such as a child.
Furthermore, the remaining two marks formed on the front and back surfaces of the other insulating layer are equally arranged in plan view along the thickness direction of the other insulating layer, that is, both ends of the relatively short mark in the longitudinal direction. Are formed so that both ends of the relatively long mark are exposed with the same length, and the difference between the lengths of both marks is twice the maximum allowable deviation. The deviation refers to printing deviation (or patterning deviation) of a conductor layer (land or connection terminal) to be formed on the front and back surfaces of the insulating layer.
In addition, the outer surface of the multi-cavity wiring board includes not only the outer surface of the substrate but also a cut surface that appears when the substrate is cut along a planned cutting line.

また、本発明には、前記多数個取り用配線基板は、平面視で矩形を呈し、前記マークA,B,Cは、かかる多数個取り用配線基板において隣接する側面ごとに形成されている、多数個取り用配線基板(請求項2)も含まれる。
これによれば、前記各絶縁層のX方向に沿った印刷ずれや積層ずれがマークA,B,Cの幅方向に沿って存在しても、かかる印刷ずれなどは各絶縁層のY方向に沿って別途形成したマークA,B,Cの重複程度を観察することによって、容易且つ正確に合否の判定することが可能となる。
Further, the present invention is the wiring board multi-piece is a rectangular in plan view, the mark A, B, C are formed in each adjacent outer sides in such a multi-piece wiring substrate Also included is a multi-cavity wiring board (claim 2).
According to this, even if printing deviation or stacking deviation along the X direction of each insulating layer exists along the width direction of the marks A, B, and C, such printing deviation is caused in the Y direction of each insulating layer. By observing the degree of overlap of the marks A, B, and C separately formed along the lines, it is possible to easily and accurately determine whether or not it is acceptable.

更に、本発明には、前記絶縁層および別の絶縁層は、複数の配線基板となる製品領域を有し且つかかる製品領域の周囲に耳部を有する大版用の絶縁板であり、かかる耳部の外側面または耳部の切断面に、前記マークA,B,Cの各断面が露出している数個取り用配線基板(請求項3)も含まれる。 Further, according to the present invention, the insulating layer and the other insulating layer are large plate insulating plates having a product region to be a plurality of wiring boards and having an ear around the product region. on the outer surface or the cut surface of the ear portion of part, the mark a, B, each cross-section of C is exposed, multi several up wiring board (claim 3) are also included.

これによれば、製品領域を用いることなく、その周囲の耳部の外側面に露出した各マーク相互の重複程度を観察することで、製品領域を損なうことなく、前述した印刷ずれなどや積層ずれの有無および合否の判定を容易に行うことが可能となる。   According to this, without using the product area, by observing the degree of overlap between the marks exposed on the outer surface of the surrounding ears, the above-described print misalignment or stacking misalignment can be performed without damaging the product area. It is possible to easily determine the presence / absence and acceptance / rejection.

付言すれば、本発明には、前記マークA,B,Cは、導体パターンからなり、平面視でそれぞれの長手方向と直交して一定以上の幅を有する長方形(矩形)を呈する、多数個取り用配線基板も含まれ得る。これによれば、マークA,B,Cは、絶縁層の表面や裏面に形成すべき接続端子や配線層などの導体層と同じマスクパターンで印刷またはパターニングによって同時に形成でき、且つこれらの印刷ずれや絶縁層間の積層ずれの判定に活用することが可能となる。 In other words, according to the present invention, the marks A, B, and C are made of a conductor pattern, and have a large number of rectangular shapes (rectangular shapes) perpendicular to each longitudinal direction and having a certain width or more in plan view. A wiring board for use may also be included. According to this, the marks A, B, and C can be simultaneously formed by printing or patterning with the same mask pattern as that of the conductor layer such as the connection terminal and the wiring layer to be formed on the front surface and the back surface of the insulating layer, and printing misalignment of these can be achieved. And can be used for determination of misalignment between insulating layers.

加えて、本発明には、前記残り2つのマーク相互間の重複は、前記外側面と直交する各マークの矩形の幅方向に沿った中心線同士が平面視で一致する形態から、上記外側面と平行となる各マークの矩形の長手方向における同じ端部の短辺同士が多数個取り用配線基板の厚み方向で一致する形態までの範囲にある、多数個取り用配線基板(請求項4)も含まれる。
In addition, the present invention, the overlapping between the remaining two marks mutually Modes of center lines along the width direction of the rectangles of the mark that is perpendicular to the outer surface are matched in a plan view, the outer surface A multi-cavity wiring board in which the short sides of the same end in the longitudinal direction of the rectangles of the marks parallel to each other are in a range up to a form in which the multi-cavity wiring board is aligned in the thickness direction (Claim 4). Is also included.

これによれば、前述した印刷ずれや積層ずれの合否を一目で迅速且つ正確に判定できるため、検査工程の効率を確実に高めることが可能となるAccording to this, it is possible to quickly and accurately determine whether or not the above-described printing misalignment or stacking misalignment is made, and it is possible to reliably increase the efficiency of the inspection process .

また、本発明には、前記絶縁層および別の絶縁層は、複数の配線基板となる製品領域を併有し、かかる製品領域同士間および製品領域の外周に耳部を有すると共に、各耳部との付近、あるいは各耳部の中間に沿って、前記マークA,B,Cが形成されている、多数個取り用配線基板も含まれ得る。 Further, in the present invention, the insulating layer and the other insulating layer have product regions to be a plurality of wiring boards, have ears between the product regions and on the outer periphery of the product region, and each ear portion. A multi-piece wiring board in which the marks A, B, and C are formed in the vicinity of or along the middle of each ear may be included.

これによる場合、複数の各製品領域を用いず、それらを囲う耳部の外側面や、耳部の中間に沿って切断した切断面に露出する各マーク相互の重複程度を観察することで、製品領域を損なうことなく、前述した印刷ずれなどや積層ずれの有無および合否の判定を容易且つ効率良く行うことが可能となる。 In this case , without using each of the plurality of product areas, by observing the degree of overlap between the marks exposed on the outer surface of the ear portion surrounding them and the cut surface cut along the middle of the ear portion, It is possible to easily and efficiently determine the presence / absence and pass / fail of the above-described printing misalignment or stacking misalignment without damaging the area.

以下において、本発明を実施するための最良の形態について説明する。
図1は、本発明における一形態の多数個取り用配線基板Kを示す平面図、図2は、かかる配線基板Kを示す斜視図、図3は、その部分側面図である。
多数個取り用配線基板Kは、図1,図2に示すように、上下2層の絶縁層s1と別の絶縁層s2とを積層した絶縁積層体Sと、絶縁層s1,s2ごとにX−Y方向に沿って破線で示す切断予定線cで区画された配線基板1を各方向に3個ずつ合計9個有する製品領域と、これらの周囲を囲う耳部mと、を備えている。
絶縁層s1および別の絶縁層s2は、平面視が長方形を呈し、例えばアルミナを含むグリーンシートを焼成したセラミックであり、予め絶縁積層体Sとした後で焼成されている。尚、絶縁層s1,s2は、低温焼成セラミックの一種であるガラス−セラミックとしても良い。
In the following, the best mode for carrying out the present invention will be described.
FIG. 1 is a plan view showing a multi-piece wiring board K according to an embodiment of the present invention, FIG. 2 is a perspective view showing the wiring board K, and FIG. 3 is a partial side view thereof.
As shown in FIGS. 1 and 2, the multi-cavity wiring board K includes an insulating laminate S in which two upper and lower insulating layers s1 and another insulating layer s2 are stacked, and X for each of the insulating layers s1 and s2. A product area having a total of nine wiring boards 1 divided in each direction by three broken wiring lines c indicated by broken lines along the −Y direction, and ears m surrounding these are provided.
The insulating layer s1 and the other insulating layer s2 have a rectangular shape in plan view, and are, for example, a ceramic obtained by firing a green sheet containing alumina. The insulating layers s1 and s2 may be glass-ceramic which is a kind of low-temperature fired ceramic.

図1,図2に示すように、絶縁層s1の表面2において、対向する一対の長辺と一対の短辺との各耳部mの中央付近には、平面視が長方形(矩形)で最長な1つのマークAが形成されている。また、絶縁層s1の裏面3と別の絶縁層s2の表面4との間における上記とほぼ同じ位置には、平面視が長方形(矩形)で長手方向が最短のマークBが形成されている。更に、別の絶縁層s2の裏面5における上記とほぼ同じ位置には、平面視が長方形(矩形)で長手方向が上記マークAとマークBとの中間長さのマークCが形成されている。マークA〜Cは、配線基板Kの外側面(側面)にも露出している。 As shown in FIGS. 1 and 2, the surface 2 of the insulating layer s <b> 1 has a longest rectangular shape (rectangular shape) in the vicinity of the center of each of the ears m of the pair of opposed long sides and the pair of short sides. one mark a is formed such. Also, at substantially the same position as above between the back surface 3 and the surface 4 of another insulating layer s2 insulating layer s1 is plan view in the longitudinal direction a rectangular (rectangle) are formed shortest mark B . Furthermore, almost the same position as the the back surface 5 of another insulating layer s2, plan view in the longitudinal direction a rectangular (rectangle) is intermediate the length of the mark C is formed between the marks A and mark B . The marks A to C are also exposed on the outer surface (side surface) of the wiring board K.

かかるマークA〜Cは、WまたはMoからなる厚みが数μm〜数10μmの導体パターンであり、絶縁層s1の表面2や、別の絶縁層s2の表面4と裏面5における製品領域(1,1,…)内に、ランド、内部配線パターン、または接続端子(何れも図示せず)などをスクリーン印刷などした際に、同時に耳部mの各辺の中央付近に印刷され、且つ焼成されたものである。
図3に示すように、側面視における長手方向の長さは、例えば、マークA:1mm、マークB:0.6mm、マークC:0.8mmである。また、マークA〜Cの幅(w)は、例えば0.2〜0.4mmで且つ共通にすることが望ましい。尚、絶縁層s1,s2がガラス−セラミックからなる場合、マークA〜Cには、CuまたはAgが用いられる。
The marks A to C are conductor patterns made of W or Mo and having a thickness of several μm to several tens of μm, and the product areas (1, 1, 2) on the surface 2 of the insulating layer s1 and the surface 4 and the back surface 5 of another insulating layer s2. 1,...), When a land, an internal wiring pattern, or a connection terminal (none of which is shown) is screen-printed, it is simultaneously printed and baked near the center of each side of the ear m. Is.
As shown in FIG. 3, the length in the longitudinal direction in the side view is, for example, mark A: 1 mm, mark B: 0.6 mm, and mark C: 0.8 mm. Further, it is desirable that the width (w) of the marks A to C is, for example, 0.2 to 0.4 mm and common. When the insulating layers s1 and s2 are made of glass-ceramic, Cu or Ag is used for the marks A to C.

図1,図2に示すように、マークA〜Cを絶縁層s1,s2の4辺に形成したのは、多数個取り用配線基板Kにおける別の絶縁層s2の表・裏面4,5における(残り)2つのマークBとマークCとの印刷ずれが、例えばX(長辺)方向に沿っていても、一対の短辺におけるマークB,C相互の重複程度を目視することで、上記印刷ずれの有無とその合否判定とが可能となるためである。また、絶縁層s1と別の絶縁層s2との間の積層ずれが例えばY(短辺)方向に沿っていても、一対の長辺におけるマークA,C相互の重複程度を目視することで、上記積層ずれの有無とその合否判定とが可能となる。 As shown in FIGS. 1 and 2, the marks A to C are formed on the four sides of the insulating layers s1 and s2 on the front and back surfaces 4 and 5 of another insulating layer s2 in the multi-piece wiring board K. (Remaining) Even if the printing deviation between the two marks B and C is, for example, along the X (long side) direction, the above-mentioned printing can be performed by visually checking the degree of overlap between the marks B and C on the pair of short sides. This is because it is possible to determine whether or not there is a deviation and to determine whether it is acceptable or not. Further, even if the stacking deviation between the insulating layer s1 and another insulating layer s2 is along, for example, the Y (short side) direction, by visually observing the degree of overlap between the marks A and C on the pair of long sides, The presence / absence of the stacking deviation and the pass / fail judgment can be made.

ここで、本発明の多数個取り用配線基板Kに用いる印刷ずれの検知方法について、図4〜図6に基づいて説明する。
図4に示すように、多数個取り用配線基板Kを構成する別の絶縁層s2の表面4に形成したマークBと、裏面5に形成したマークBよりも長いマークCの2つは、同じ幅wの矩形で且つ両者の幅方向に沿った中心線n,nが平面視で一致している。尚、図4の中央は、左側の太い矢印で示す矢視に沿ったマークB,Cの平面図、図4の右側は、マークB,Cの透視的な斜視図であり、図5,図6についても同様である。
即ち、図4のマークB,Cは、平面視で等分配置の状態であり、両者が別の絶縁層s2の表・裏面4,5間において印刷ずれを生じていないことを示している。因みに、マークCの長さdCは、マークBの長さdBの両端の外側に、許容できる最大印刷ずれ量(長さ:z1×2の半分z1をそれぞれ加えたものである(数式1参照)。
Here, the method of detecting misregistration used in many of the onset bright-piece wiring substrate K, will be described with reference to FIGS. 4-6.
As shown in FIG. 4, two of the marked B formed on the surface 4 of another insulating layer s2 constituting the multi-chip wiring board K, the long mark C than mark B formed on the back surface 5 Are rectangles having the same width w, and the center lines n and n along the width direction of the two coincide in plan view. 4 is a plan view of the marks B and C along the arrow indicated by the thick arrow on the left side, and the right side of FIG. 4 is a perspective view of the marks B and C. The same applies to 6.
That is, the marks B and C in FIG. 4 are equally arranged in a plan view, indicating that there is no printing misalignment between the front and back surfaces 4 and 5 of another insulating layer s2. Incidentally, the length dC of the mark C is obtained by adding a half z1 of an allowable maximum printing deviation amount (length: z1 × 2 ) to the outside of both ends of the length dB of the mark B (see Formula 1). ).

(数1)
dC=dB+(z1×2)
(Equation 1)
dC = dB + (z1 × 2)

別の絶縁層s2の各配線基板1内には、予め打ち抜き加工されたビアホール内に充填したWまたはMoを含む導電性ペーストを焼成したビア導体(何れも図示せず)が適所に形成されている。マークB,Cが絶縁層s2の側面で、図4の状態にある場合、かかる絶縁層s2の表面4と裏面5とに、マークB,Cと同時に印刷して形成された図示しない表面4側のランドや裏面5側の接続端子も、互いに印刷ずれのない所定の位置にある。このため、表面4側のランドと裏面5側の接続端子とは、上記ビア導体を介して、確実に導通するので、例えば、複数の前記配線基板1を中継基板として利用することが可能となる。 In each wiring board 1 of another insulating layer s2, via conductors (both not shown) are formed at appropriate positions by firing a conductive paste containing W or Mo filled in a via hole that has been punched in advance. Yes. When the marks B and C are on the side surfaces of the insulating layer s2 and are in the state shown in FIG. 4, the front surface 4 side (not shown) formed by printing simultaneously with the marks B and C on the front surface 4 and the back surface 5 of the insulating layer s2. The lands and the connection terminals on the back surface 5 side are also in predetermined positions without printing misalignment. For this reason, since the land on the front surface 4 side and the connection terminal on the back surface 5 side are surely conducted via the via conductor, for example, a plurality of the wiring boards 1 can be used as relay boards. .

また、図5に示すように、別の絶縁層s2の表面4に形成したマークBと、裏面5に形成したマークCとの長手方向における同じ端部(右端)の短辺同士が、絶縁層s2の厚み方向で一致する場合は、両者が絶縁層s2の表・裏面4,5間において印刷ずれを生じていることを示す。しかし、かかるマークB,C間の印刷ずれは、許容される最大印刷ずれ量(z1×2)の範囲内であることが、一目で判定することもできる。
尚、マークB,Cにおける上記と反対側の端部(図5で左端)の短辺同士が、絶縁層s2の厚み方向で一致する場合も、印刷ずれが許容範囲内にあることが、一目で判定できる。更に、マークB,C間において、図4に示した両者間に印刷ずれがない状態と、図5に示した許容される最大印刷ずれ量(z1×2)の状態との中間である印刷ずれも、許容される範囲内にあることが一目で容易に判定できる。
Further, as shown in FIG. 5, the mark B formed on the surface 4 of another insulating layer s2, the same end in the longitudinal direction of the mark C formed on the back surface 5 is short sides each other (far right), When they coincide with each other in the thickness direction of the insulating layer s2, it indicates that the printing deviation occurs between the front and back surfaces 4 and 5 of the insulating layer s2. However, it can also be determined at a glance that the printing deviation between the marks B and C is within the allowable maximum printing deviation amount (z1 × 2 ).
It should be noted that even when the short sides of the opposite ends (left end in FIG. 5) of the marks B and C coincide with each other in the thickness direction of the insulating layer s2, it is at a glance that the printing misalignment is within an allowable range. Can be determined. Further, between the marks B and C, the print misalignment that is intermediate between the state shown in FIG. 4 where there is no print misalignment and the allowable maximum print misalignment amount (z1 × 2 ) shown in FIG. Also, it can be easily determined at a glance that it is within the allowable range.

一方、図6に示すように、別の絶縁層s2の表面4に形成したマークBの長手方向における端部(右端)の短辺が、裏面5に形成したマークCとの長手方向における同じ端部(右端)の短辺よりも、外側(右側)にはみ出る場合がある。かかる場合は、マークB,Cが絶縁層s2の表・裏面4,5間において、許容される最大印刷ずれ量(z1×2)を越えた印刷ずれを生じていることを示している。従って、別の絶縁層s2における前記配線基板1ごとに形成された図示しない表面4側のランドと裏面5側の接続端子とは、互いの印刷ずれにより導通が不安定になるか、不能となり得るので、不合格であることが一目で判定できる。 On the other hand, as shown in FIG. 6, the end portion in the longitudinal direction of the mark B formed on the surface 4 of another insulating layer s2 short side of (right end) is, in the longitudinal direction of the mark C formed on the back surface 5 There is a case that it protrudes outside (right side) from the short side of the same end (right end). In this case, the marks B and C indicate that a printing deviation exceeding the maximum allowable printing deviation amount (z1 × 2 ) occurs between the front and back surfaces 4 and 5 of the insulating layer s2. Therefore, the lands on the front surface 4 side and the connection terminals on the rear surface 5 side, which are not shown, formed for each wiring board 1 in another insulating layer s2 may become unstable or impossible due to mutual printing misalignment. Therefore, it can be judged at a glance that it is a failure.

以上のように、本発明多数個取り用配線基板によれば、別の絶縁層s2の表面4に形成したマークBと、裏面5に形成したマークCとの重複程度によって、図4の印刷ずれがないか、図5の許容範囲内の印刷ずれであることが目視で容易に判定できる。また、図6のように、印刷ずれが許容範囲を外れていることも、容易に判定することもできる。
更に、前述したように、絶縁層s2におけるマークBとマークCとの印刷ずれが、例えば、前記X(長辺)方向またはY(短辺)方向に沿っていても、一対の短辺または長辺における別のマークB,C相互の重複程度を目視することで、上記印刷ずれの有無とその合否判定とが可能となる。この場合、別の絶縁層s2の前記X(長辺)方向とY(短辺)方向との双方に沿って、印刷ずれが複合して生じた場合でも、図4,図5で示した重複程度か、図6で示した重複程度かによって、容易に印刷ずれの合否を判定することができる。
従って、多数個取り用配線基板によれば、印刷ずれの有無とその合否判定とが容易且つ迅速にできるため、検査工数とコスト低減を図ることができる。
As described above, according to the multi-piece wiring substrate K of the present invention, the mark B formed on the surface 4 of another insulating layer s2, the overlap degree between the mark C formed on the back surface 5, FIG. It can easily be visually determined that there is no print misalignment 4 or a print misalignment within the allowable range of FIG. Further, as shown in FIG. 6, it can be easily determined that the printing deviation is out of the allowable range.
Furthermore, as described above, even if the printing deviation between the mark B and the mark C in the insulating layer s2 is along the X (long side) direction or the Y (short side) direction, for example, a pair of short sides or long sides By visually observing the degree of overlap between the other marks B and C on the side, it is possible to determine the presence / absence of the printing deviation and the pass / fail judgment. In this case, even when printing misalignment occurs along both the X (long side) direction and the Y (short side) direction of another insulating layer s2, the overlap shown in FIGS. The degree of printing misalignment can be easily determined based on the degree or the degree of overlap shown in FIG.
Therefore, according to the multi-cavity wiring board K , the presence / absence of printing misalignment and the pass / fail judgment can be easily and quickly performed, so that the number of inspection steps and cost can be reduced.

図7は、前記多数個取り用配線基板Kを得るための積層工程を示す側面図、図8は、積層後で且つ焼成した上記配線基板Kの部分側面図などである。
図7,図8に示すように、上層側の絶縁層s1の表面2には、最長のマークA1つ形成され、下層側の別の絶縁層s2の表面4には、最短のマークBが形成され、その裏面5には、中間長さのマークCが形成されている。マークAの長手方向の長さdAは、マークCの長さdCよりも長く、両者の間に位置するマークBの長さdBは、マークA,Cよりも短い。尚、下層側の別の絶縁層s2における表面4のマークBと、裏面5のマークCとは、前記図4で示したように、絶縁層s2の厚み(平面)方向で適正な等分配置にあるものとする。
FIG. 7 is a side view showing a lamination process for obtaining the multi-piece wiring board K, and FIG. 8 is a partial side view of the wiring board K after being laminated and fired.
As shown in FIG. 7, FIG. 8, on the surface 2 of the upper layer of the insulating layer s1, the longest mark A is formed one, the surface 4 of another insulating layer s2 of the lower layer side, the shortest mer click B is formed, on its rear surface 5, mark C of the intermediate length are formed. The length dA in the longitudinal direction of the mark A is longer than the length dC of the mark C, and the length dB of the mark B located between the two is shorter than the marks A and C. Incidentally, the mark B of the surface 4 in another insulating layer s2 of the lower layer side, the mark C of the back surface 5, as shown in FIG. 4, proper like in thickness (plane) direction of the insulating layer s2 It is assumed to be in a minute arrangement.

図7,図8に示すように、絶縁層s1の表面2に形成したマークAと、別の絶縁層s2の裏面5に形成したマークAよりも短いマークCとは、前記と同じ幅wの矩形で且つ両者の幅方向に沿った中心線n,nが平面視で一致している。因みに、マークAの長さdAは、マークCの長さdCの両端の外側に、許容できる最大積層ずれ量(長さ:z2×2の半分z2をそれぞれ加えたものである(数式2参照)。尚、図8の中央は、左側の太い矢印で示す矢視に沿ったマークA,Cの底面(平面)図、図8の右側は、マークA,Cの透視的な斜視図であり、図9,図10についても同様である。 7, as shown in FIG. 8, a mark A formed on the surface 2 of the insulating layer s1, the short mark C than mark A formed on the back surface 5 of another insulating layer s2, the same width as the The center lines n and n, which are rectangles of w and along the width direction of the two, coincide in plan view. Incidentally, the length dA of the mark A is obtained by adding a half z2 of an allowable maximum stacking deviation amount (length: z2 × 2 ) to the outside of both ends of the length dC of the mark C (see Formula 2). ). 8 is a bottom (plan) view of the marks A and C along the arrow indicated by the thick arrow on the left side, and the right side of FIG. 8 is a perspective view of the marks A and C. 9 and 10 are the same.

(数2)
dA=dC+(z2×2)
(Equation 2)
dA = dC + (z2 × 2)

絶縁層s1,s2の各配線基板1内には、前記同様にビアホール内にWなどを含む導電性ペーストを焼成したビア導体が、それぞれ適所に形成され、且つ絶縁層s2の表面4に形成したマークBと同時に、内部配線パターン(何れも図示せず)が配線基板1ごとに印刷・形成されている。
マークA,Cが絶縁層s1,s2の側面で、図8の状態にある場合、絶縁層s1の表面2と別の絶縁層s2の裏面5とに、マークA,Cと同時に印刷して形成された図示しない表面2側のランドや裏面5側の接続端子も、互いに絶縁層s1,s2間の積層ずれのない所定の位置にある。このため、表面2側のランドと裏面5側の接続端子とは、上記ビア導体や内部配線パターンを介して、確実に導通されるので、例えば、複数の前記配線基板1を多層構造の配線基板として利用できる。
In each of the wiring substrates 1 of the insulating layers s1 and s2, via conductors obtained by firing a conductive paste containing W or the like in the via holes are formed at appropriate positions and formed on the surface 4 of the insulating layer s2. Simultaneously with the mark B, an internal wiring pattern (none of which is shown) is printed and formed for each wiring board 1.
When the marks A and C are on the side surfaces of the insulating layers s1 and s2 and are in the state shown in FIG. 8, they are printed on the front surface 2 of the insulating layer s1 and the back surface 5 of another insulating layer s2 at the same time as the marks A and C. The land 2 on the front surface 2 side and the connection terminal on the back surface 5 side, not shown, are also at predetermined positions where there is no misalignment between the insulating layers s1 and s2. For this reason, since the land on the front surface 2 side and the connection terminal on the back surface 5 side are reliably conducted through the via conductors and the internal wiring pattern, for example, a plurality of wiring boards 1 are connected to a wiring board having a multilayer structure. Available as

また、図9に示すように、絶縁層s1の表面2に形成したマークAと、別の絶縁層s2の裏面5に形成したマークCとの長手方向における同じ端部(左端)の短辺同士が、絶縁層s1,s2の厚み方向で一致する場合は、両者が絶縁層s1,s2間において積層ずれを生じていることを示す。しかし、かかるマークA,C間の積層ずれは、許容される最大積層ずれ量(z2×2)の範囲内であることも、一目で容易に判定することができる。
尚、マークA,Cにおける上記と反対側の端部(図5で右端)の短辺同士が、絶縁層s1,s2の厚み方向で一致する場合も、積層ずれが許容範囲内にあることが容易に判定できる。更に、マークA,C間において、図8に示した積層ずれ量がない状態と、図9に示した許容される最大積層ずれ量(z2×2)の状態との中間である積層ずれも、許容される範囲内にあることが一目で容易に判定できる。
Further, as shown in FIG. 9, the mark A formed on the surface 2 of the insulating layer s1, the same end in the longitudinal direction of the mark C formed on the back surface 5 of another insulating layer s2 (leftmost) Short When the sides coincide with each other in the thickness direction of the insulating layers s1 and s2, it indicates that they are misaligned between the insulating layers s1 and s2. However, it can also be easily determined at a glance that the stacking misalignment between the marks A and C is within the allowable maximum stacking misalignment amount (z2 × 2 ).
Note that even when the short sides of the opposite ends (the right end in FIG. 5) of the marks A and C coincide with each other in the thickness direction of the insulating layers s1 and s2, the stacking deviation may be within an allowable range. Easy to judge. Further, between the marks A and C, the stacking shift that is intermediate between the state where there is no stacking shift amount shown in FIG. 8 and the allowable maximum stacking shift amount (z2 × 2 ) shown in FIG. It can be easily determined at a glance that it is within the allowable range.

一方、図10に示すように、別の絶縁層s2の裏面5に形成したマークCの長手方向における端部(左端)の短辺が、絶縁層s1の表面2に形成したマークAとの長手方向における同じ端部(左端)の短辺よりも、外側(左側)にはみ出る場合がある。かかる場合は、マークA,Cを印刷・形成している絶縁層s1,s2間において、許容される最大積層ずれ量(z2×2)を越えた積層ずれを生じていることを示している。従って、絶縁層s1,s2における前記配線基板1に形成された図示しない表面2側のランドと裏面5側の接続端子とは、互いの印刷ずれにより導通が不安定になるか、不能となり得るため、不合格であることが一目で判定できる。 On the other hand, as shown in FIG. 10, the end portion in the longitudinal direction of the mark C formed on the back surface 5 of another insulating layer s2 short side (leftmost) is a mark A formed on the surface 2 of the insulating layer s1 May protrude outside (left side) from the short side of the same end (left end) in the longitudinal direction. In such a case, it is indicated that a stacking shift exceeding the allowable stacking shift amount (z2 × 2 ) occurs between the insulating layers s1 and s2 on which the marks A and C are printed / formed. Accordingly, the lands on the front surface 2 and the connection terminals on the rear surface 5 side (not shown) formed on the wiring board 1 in the insulating layers s1 and s2 may become unstable or impossible to conduct due to mutual printing misalignment. , It can be determined at a glance that it is a failure.

以上のように、本発明の多数個取り用配線基板Kによれば、絶縁層s1の表面2に形成したマークAと、別の絶縁層s2の裏面5に形成したマークCとの重複程度によって、図8の積層ずれがないか、図9の許容範囲内の積層ずれであることが目視で容易に判定できる。また、図10のように、積層ずれが許容範囲を外れていることも、容易に判定できる。
更に、前述したように、絶縁層s1,s2間における積層ずれが、例えば、前記X(長辺)方向またはY(短辺)方向に沿っていても、一対の短辺または長辺におけるマークA,C相互の重複程度を目視することで、上記印刷ずれの有無と合否の判定とが可能となる。この場合、絶縁層s1,s2の前記X(長辺)方向とY(短辺)方向との双方に沿って、積層ずれが複合して生じた場合でも、図8,図9で示したマークAとマークCとの重複程度か、図10で示した重複程度かによって、積層ずれの合否を容易に判定することができる。
このため、多数個取り用配線基板Kによれば、積層ずれの有無とその合否判定とが容易且つ迅速にできるため、検査工数とコスト低減を図ることができる。
As described above, according to the multi several up wiring board K of the present invention, between the mark A formed on the surface 2 of the insulating layer s1, a mark C which is formed on the back surface 5 of another insulating layer s2 Depending on the degree of overlap, it can be easily determined visually that there is no misalignment in FIG. 8 or a misalignment within the allowable range in FIG. Further, as shown in FIG. 10, it can be easily determined that the stacking deviation is out of the allowable range.
Further, as described above, even if the stacking deviation between the insulating layers s1 and s2 is, for example, along the X (long side) direction or the Y (short side) direction, the mark A on the pair of short sides or long sides. , C makes it possible to determine the presence / absence of print misalignment and pass / fail judgment by visually checking the degree of mutual overlap. In this case, the marks shown in FIGS. 8 and 9 can be obtained even when the stacking misalignment occurs along both the X (long side) direction and the Y (short side) direction of the insulating layers s1 and s2. The success or failure of the stacking deviation can be easily determined based on the degree of overlap between A and the mark C or the degree of overlap shown in FIG.
For this reason , according to the multi-cavity wiring board K, it is possible to easily and quickly determine whether or not there is a stacking deviation, and therefore, it is possible to reduce the number of inspection steps and costs.

また、図8,図9において別の絶縁層s2の表面4に形成したマークBと、裏面5に形成したマークCの(残り)2つが、前記図4と図5との範囲の印刷ずれであれば、絶縁層s2の表面4に形成される内部配線パターンと、裏面5に形成される接続端子との印刷ずれがないか、許容範囲内にあることも、多数個取り用配線基板Kの側面を目視することで、容易に判定できる。
従って、本発明多数個取り用配線基板Kによれば、別の絶縁層s2を挟んだ(残り)2つのマークB,C間の印刷ずれの有無およびその合否と共に、マークA,Cの重複程度によって絶縁層s1,s2の積層ずれの有無およびその合否も、それぞれ容易に判定することができる。
Further, FIG. 8, also in FIG. 9, the mark B formed on the surface 4 of another insulating layer s2, Two (left) and mark C formed on the back surface 5, and FIG. 4 and FIG. 5 If there is a printing deviation within the range , there is no printing deviation between the internal wiring pattern formed on the front surface 4 of the insulating layer s2 and the connection terminal formed on the back surface 5 or it is within an allowable range. This can be easily determined by visually observing the side surface of the wiring board K for individual pieces.
Therefore, according to the multi-cavity wiring board K of the present invention, the overlap of the marks A and C is accompanied with the presence / absence of the printing deviation between the two marks B and C sandwiching another insulating layer s2 (the remaining) and the pass / fail. The presence / absence of the misalignment of the insulating layers s1 and s2 and the pass / fail can be easily determined depending on the degree.

図11は、前記多数個取り用配線基板Kとは異なる形態を示す。
図11の左側に示すように、別の絶縁層s1の表面2に最長のマークAを、裏面3にマークAよりも短い最短のマークBを形成し、両者の長手方向に沿った長さdA,dBの差を、前記数式1と同様に最大印刷ずれ量(z1×2)としている。尚、かかるマークA,Bは、別の絶縁層s1の側面にも露出するように形成されている。
上記マークA,B間の平面視における重複程度を、前記図4〜図5と同様に、印刷ずれがないか、許容範囲内とすることで、別の絶縁層s1の表・裏面2,3に印刷・形成されるランドと接続端子とが、絶縁層s1を貫通するビア導体(図示せず)を介して、確実に導通する中継基板を複数個得る多数個取り用配線基板とすることができる。
Figure 11 shows a different morphology than the previous SL multi-piece wiring substrate K.
As shown on the left side of FIG. 11, the longest mark A on the surface 2 of another insulating layer s1, to form a short shortest mark B than the mark A on the back surface 3, the length along the longitudinal direction of both The difference between the lengths dA and dB is set to the maximum printing deviation amount (z1 × 2) , as in the case of Equation 1. The marks A and B are formed so as to be exposed also on the side surface of another insulating layer s1.
The mark A, an overlap of about in a plan view between B, similarly to FIG. 4 to FIG. 5, there are no printing misalignment, by a within the allowable range, the front and rear surface 2 of another insulating layer s1 the land and the connection terminal to be printed, formed, through a via conductor extending through the insulating layer s1 (not shown), ensure that the relay substrate and the multi-several-up wiring board Ru plurality obtained to conduct the be able to.

また、図11の右側に示すように、表・裏面2,3にマークAとマークBを形成した別の絶縁層s1の下層側に、裏面5にマークAとマークBとの中間長さのマークCを形成した絶縁層s2を積層・焼成し、前記同様の多数個取り用配線基板Kを形成しても良い。尚、マークA〜Cは、当該配線基板Kの側面にも露出するように形成されている。
かかる多数個取り用配線基板Kでも、別の絶縁層s1の表面2に形成したマークAと、絶縁層s2の裏面5に形成したマークCとの重複が、図11に示す適正な等分配置の状態から、前記図9で示した絶縁層s1,s2の最大積層ずれ量(z2×2)までの範囲内にあれば、印刷ずれおよび積層ずれがないか、これらの双方が許容範囲内であるかが、容易に判定できる。尚、マークB,Cの重複程度によって、絶縁層s1,s2間の積層ずれを検査しても良い。
Further, as shown on the right side of FIG. 11, the lower layer side of another insulating layer s1 forming the mark A and mark B in Table-back surface 2, an intermediate length of the mark A and mark B on the back surface 5 laminating and baking the insulating layer s2 forming the difference mark C, may be formed the same multi several up wiring board K. The marks A to C are formed so as to be exposed also on the side surface of the wiring board K.
Even in such a multi-cavity wiring board K, the overlap between the mark A formed on the front surface 2 of another insulating layer s1 and the mark C formed on the back surface 5 of the insulating layer s2 is appropriately divided as shown in FIG. 9 to the maximum stacking misalignment amount (z2 × 2 ) of the insulating layers s1 and s2 shown in FIG. 9, there is no printing misalignment or misalignment, and both of these are within the allowable range. It can be easily determined whether there is any. Note that the stacking deviation between the insulating layers s1 and s2 may be inspected according to the overlapping degree of the marks B and C.

図12は、前記配線基板Kの更に異なる形態の多数個取り用配線基板K1などを示す。
図12の左側に示すように、別の絶縁層s2の表面4にマークCを、裏面にマークCよりも長いマークAを形成し、両者の長手方向に沿った長さdA,dCの差を、前記数式2と同様に最大印刷ずれ量(z1×2)としている。尚、かかるマークA,Cも、絶縁層s2の側面にも露出するように形成されている。
上記マークA,C間の平面視における重複程度を、前記図4〜図5と同様に、印刷ずれがないか、許容範囲内とすることで、別の絶縁層s2の表・裏面4,5に印刷・形成されるランドと接続端子とが、絶縁層s2を貫通するビア導体(図示せず)を介して、確実に導通する中継基板を複数個有する多数個取り用配線基板とすることができる。
FIG. 12 shows a multi-cavity wiring board K1 having a different form of the wiring board K and the like.
FIG as shown on the left side of 12, the mark C on the surface 4 of another insulating layer s2, form long mark A than mark C on the back surface 5, the length dA along the longitudinal direction of both, dC Is the maximum printing deviation amount (z1 × 2) as in the case of Equation 2. The marks A and C are also formed so as to be exposed also on the side surface of the insulating layer s2.
The mark A, an overlap of about in a plan view between C, similarly to FIG. 4 to FIG. 5, there are no printing misalignment, by a within the allowable range, the front and rear surface 4, 5 of another insulating layer s2 the land and the connection terminal to be printed, formed, through a via conductor extending through the insulating layer s2 (not shown), and a multi several up wiring board that Yusuke plurality of relay substrate to reliably conduct the can do.

また、図12の右側に示すように、表・裏面4,5に中間長さのマークC最長のマークAとを形成した別の絶縁層s2の上層側に、表面2にマークCよりも短い最短のマークBを形成した絶縁層s1を積層・焼成して、前記同様の多数個取り用配線基板K1を形成しても良い。即ち、マークCは、マークAよりも短く且つマークBよりも長い。尚、マークA〜Cは、かかる配線基板K1の側面にも露出するように形成されている。
図1,2の前記配線基板Kとは、マークA〜Cが厚み方向に沿った配置が異なる多数個取り用配線基板K1でも、絶縁層s1の表面2に形成したマークBと、絶縁層s2の表面4に形成したマークCとの重複が、図12に示す適正な等分配置の状態から、絶縁層s1,s2間の最大積層ずれ量(z2×2)までの範囲内にあれば、印刷ずれおよび積層ずれがないか、これらの双方が許容範囲内であるかが、容易に判定できる。尚、マークA,Cの重複程度によって、絶縁層s1,s2間の積層ずれを検査しても良い。
Further, as shown on the right side of FIG. 12, the upper layer side of another insulating layer s2 forming an intermediate length of the mark C and the longest mark A in front surface 4 and the back surface 5, the mark on the surface 2 C by laminating and baking the insulating layer s1 formed a short shortest mark B than may be formed the same multi several up wiring board K1. That is, mark C is longer than the short and mark B than mark A. The marks A to C are formed so as to be exposed also on the side surface of the wiring board K1.
The wiring board K in FIGS. 1 and 2 is different from the wiring board K1 in which the marks A to C are arranged in the thickness direction, and the mark B formed on the surface 2 of the insulating layer s1 and the insulating layer s2 If the overlap with the mark C formed on the front surface 4 is within the range from the proper equally-arranged state shown in FIG. 12 to the maximum stacking deviation (z 2 × 2 ) between the insulating layers s1 and s2. It can be easily determined whether there is no printing misalignment or stacking misalignment, or whether both of these are within the allowable range. Note that the stacking deviation between the insulating layers s1 and s2 may be inspected according to the overlapping degree of the marks A and C.

図13は、前記配線基板Kの別異なる形態の多数個取り用配線基板K2などを示す。
図13の左側に示すように、別の絶縁層s2の表面4にマークAを、裏面にマークAよりも短いマークCを形成し、両者の長手方向に沿った長さdA,dCの差を、前記数式2と同様に最大印刷ずれ量(z1×2)としている。尚、かかるマークA,Cも、絶縁層s2の側面にも露出するように形成されている。
上記マークA,C間の平面視における重複程度を、前記図4〜図5と同様に、印刷ずれがないか、許容範囲内とすることで、別の絶縁層s2の表・裏面4,5に印刷・形成されるランドと接続端子とが、絶縁層s2を貫通するビア導体(図示せず)を介して、確実に導通する中継基板を複数個有する多数個取り用配線基板とすることができる。
Figure 13 shows another different embodiment of the like multi-piece wiring substrate K2 before Symbol wiring board K.
As shown on the left side of FIG. 13, the mark A on the surface 4 of another insulating layer s2, forming a short mark C than mark A on the back surface 5, the length dA along both longitudinal, dC Is the maximum printing deviation amount (z1 × 2) as in the case of Equation 2. The marks A and C are also formed so as to be exposed also on the side surface of the insulating layer s2.
The mark A, an overlap of about in a plan view between C, similarly to FIG. 4 to FIG. 5, there are no printing misalignment, by a within the allowable range, the front and rear surface 4, 5 of another insulating layer s2 the land and the connection terminal to be printed, formed, through a via conductor extending through the insulating layer s2 (not shown), and a multi several up wiring board that Yusuke plurality of relay substrate to reliably conduct the can do.

また、図13の右側に示すように、表・裏面4,5にマークAとマークCとを形成した別の絶縁層s2の上層側に、表面2にマークCよりも短い最短のマークBを形成した絶縁層s1を積層・焼成して、前記同様の多数個取り用配線基板K2を形成しても良い。即ち、マークAは、マークCおよびマークBよりも長い。尚、マークA〜Cは、かかる配線基板K2の側面にも露出するように形成されている。
以上のような多数個取り用配線基板K2によっても、絶縁層s1の表面2に形成したマークBと、別の絶縁層s2の表面4に形成したマークCとの重複が、図13に示す適正な等分配置の状態から、絶縁層s1,s2間の最大積層ずれ量(z2×2)までの範囲内にあれば、印刷ずれおよび積層ずれがないか、これらの双方が許容範囲内であるかが、容易に判定できる。尚、マークA,Bの重複程度によって、絶縁層s1,s2間の積層ずれを検査しても良い。
Further, as shown on the right side of FIG. 13, the upper layer side of another insulating layer s2 forming the mark A and mark C in front surface 4 and the back surface 5, on the surface 2 shorter than mark C shortest mer by laminating and baking the insulating layer s1 formed with click B, the may be formed a number of same way-piece wiring substrate K2. That is, mark A is longer than mark C and mark B. The marks A to C are formed so as to be exposed also on the side surface of the wiring board K2.
Even with the multi-piece wiring board K2 as described above, the overlap between the mark B formed on the surface 2 of the insulating layer s1 and the mark C formed on the surface 4 of another insulating layer s2 is appropriate as shown in FIG. As long as it is within the range from the state of equally divided arrangement to the maximum stacking misalignment amount (z 2 × 2 ) between the insulating layers s1 and s2, there is no print misalignment or misalignment, and both of these are within the allowable range. It can be easily determined whether there is any. Note that the stacking deviation between the insulating layers s1 and s2 may be inspected according to the overlapping degree of the marks A and B.

図14は、前記配線基板Kの応用形態である多数個取り用配線基板K3の平面図である。かかる配線基板K3は、図14に示すように、前記絶縁層s1,s2からなる絶縁積層体Sにおいて、破線で示す切断予定線cで区画された縦・横それぞれ3個ずつ合計9個の配線基板1と、これらの周囲を囲む耳部mとからなる製品エリアaを、縦・横それぞれ2個ずつ合計4個併有している。4個の製品エリアaは、図14の太い破線で示す切断予定線c1に沿って追って切断される。
図14に示すように、製品エリアaごとの外側面に露出する長辺と短辺との中央付近には、前記配線基板Kと同様に、マークAと図示しないマークB,Cとが、前記図4,図8の印刷ずれおよび積層ずれのない適正な配置から、前記図5,図9の最大印刷ずれ最大積層ずれが許容可能な範囲で形成されている。
FIG. 14 is a plan view of a multi-cavity wiring board K3 which is an applied form of the wiring board K. FIG. As shown in FIG. 14, the wiring board K3 has a total of nine wirings in the insulating laminate S composed of the insulating layers s1 and s2, each having three vertical and horizontal sections separated by the predetermined cutting line c indicated by a broken line. A total of four product areas a each consisting of the substrate 1 and the ears m surrounding the substrate 1 are provided in both vertical and horizontal directions. The four product areas a are cut along the planned cutting line c1 indicated by the thick broken line in FIG.
As shown in FIG. 14, near the center of the long side and the short side exposed to the outside surface of each product area a, as with the wiring board K, mark B (not shown) with the mark A, and the C , FIG. 4, the proper placement without misregistration and laminating misalignment in FIG 8, FIG. 5, and the maximum print misalignment and maximum stacking deviation of FIG. 9 is formed within an acceptable range.

また、隣接する製品エリアa,a間の耳部mにおいて、その中間を通る切断予定線c1における中央付近には、当該切断予定線c1にまたがって、平面視がほぼ正方形(矩形)に近い前記同様のマークAと、図示しないマークB,Cとが、前記と同様な重複範囲で形成されている。
以上のような多数個取り用配線基板K3によれば、外側面に露出するB,Cにより、前記別の絶縁層s2の表面4と裏面5との印刷ずれの有無および合否が判定できると共に、絶縁層s1の表面2に形成したマークAと別の絶縁層s2の裏面5に形成したマークCとの重複程度により、絶縁層s1,s2間の積層ずれの有無およびその合否が判定できる。更に、切断予定線c1に沿って、切断した際に得られる製品エリアaごとの切断面(側面)に露出するマークA〜Cによっても、上記と同様の印刷ずれおよび積層ずれ双方の有無と、それらの合否とが容易に判定できる。
尚、多数個取り用配線基板K3におけるマークA〜Cの配置は、前記図11〜図13のそれぞれ右側に示した形態としても良い。
Moreover, in the ear | edge part m between adjacent product areas a and a, the planar view is nearly square (rectangular) near the center of the planned cutting line c1 passing through the middle across the planned cutting line c1. similar to the mark a, mark B, not shown, it is a C, and is formed by the similar overlapping range.
According to a multi-piece wiring substrate K3 as described above, you exposed on the outer surface B, the C, presence and acceptability of the print deviation between the surface 4 and the back surface 5 of the further insulating layer s2 together with possible determination Whether or not there is a misalignment between the insulating layers s1 and s2 can be determined by the degree of overlap between the mark A formed on the front surface 2 of the insulating layer s1 and the mark C formed on the back surface 5 of another insulating layer s2. Furthermore, along the cutting line c1, by marks A~C exposed on the cut surface of each product area a obtained when cut (side), similar to the above misregistration, and the presence or absence of laminating misalignment both and and their acceptability can be easily determined.
The arrangement of the marks A to C on the multi-cavity wiring board K3 may be in the form shown on the right side of FIGS.

前記多数個取り用配線基板K,K1〜K3は、別の絶縁層を除いた絶縁層を2層以上積層した絶縁積層体Sとした形態としても良い。
また、前記マークA〜Cは、多数個取り用配線基板K,K1〜K3の外側面における任意の位置に、1組または2組以上を形成しても良い。
更に、前記マークは、長手方向の長さが互いに異なる4種類またはそれ以上を複数の絶縁層からなる多数個取り用配線基板に適用しても良い。
加えて、前記絶縁層を例えばBT樹脂からなるコア基板や、樹脂フィルムまたは樹脂層からなり、これらを積層した多数個取り用配線基板とし、これらの表・裏面に、フォトグラフィー技術によって、マークA〜Cを、内部配線パターン、ビア導体、ランド、および接続端子と同じくCuメッキによって形成することも可能である。
The multi-cavity wiring boards K, K1 to K3 may be configured as an insulating laminate S in which two or more insulating layers excluding another insulating layer are stacked.
Further, the marks A to C may be formed in one set or two or more sets at arbitrary positions on the outer surface of the multi-cavity wiring boards K and K1 to K3.
Furthermore, the mark may be applied to a multi-piece wiring board composed of a plurality of insulating layers of four or more different lengths in the longitudinal direction.
In addition, the insulating layer is made of, for example, a core substrate made of a BT resin, a resin film or a resin layer, and a multi-piece wiring substrate made by laminating them, and the mark A ˜C can be formed by Cu plating as well as the internal wiring pattern, via conductor, land, and connection terminal.

本発明による多数個取り用配線基板の一形態を示す平面図。Plan view of an embodiment of a multi-several-up wiring board that by the present invention. 図1の多数個取り用配線基板を示す斜視図。The perspective view which shows the wiring board for multi-piece taking of FIG. 図1の多数個取り用配線基板の部分側面図。FIG. 2 is a partial side view of the multi-cavity wiring board of FIG. 1. 上記多数個取り用配線基板の一部を示す概略図。Schematic which shows a part of said multi-cavity wiring board. マークの位置が異なる多数個取り用配線基板の一部を示す概略図。Schematic which shows a part of wiring board for multi-piece picking from which the position of a mark differs. マークの位置が更に異なる多数個取り用配線基板の一部を示す概略図。Schematic which shows a part of wiring board for multi-piece picking from which the position of a mark differs further. 前記多数個取り用配線基板の一部を示す概略図。Schematic which shows a part of said wiring board for multi-piece picking. 図7の多数個取り用配線基板を示す概略図。Schematic which shows the wiring board for multi-cavity of FIG. 上記とマークの位置が異なる多数個取り用配線基板を示す概略図。Schematic which shows the wiring board for multi-pieces from which the position of a mark differs from the above. マークの位置が更に異なる多数個取り用配線基板を示す概略図。Schematic which shows the wiring board for multi-piece picking from which the position of a mark differs further. 異なる形態の多数個取り用配線基板を示す概略図。Schematic which shows the wiring board for multi-pieces of a different form . 更に異なる形態の多数個取り用配線基板を示す概略図。 Furthermore, the schematic which shows the wiring board for multi-piece taking of a different form . 別異なる形態の多数個取り用配線基板を示す概略図。The schematic diagram which shows the wiring board for multi-piece taking of another form . 前記多数個取り用配線基板の応用形態を示す平面図。The top view which shows the application form of the said multi-cavity wiring board.

符号の説明Explanation of symbols

A………………………最長のマーク
B………………………最短のマーク
C………………………中間長さのマーク
K,K1〜K3………多数個取り用配線基板
s1,s2……………絶縁層/別の絶縁層
2,4…………………表面
3,5…………………裏面
dA〜dC……………長さ
z1×2………………許容最大印刷ずれ量
z2×2………………許容最大積層ずれ量
n………………………中心線
A ……………………… Longest mark B ……………………… Shortest mark C ……………………… Medium length marks K, K1 to K3 ……… Many Wiring boards for individual production s1, s2 ......... Insulating layer / separate insulating layers 2, 4 ............... Front side 3, 5 ............... Back side dA to dC ............... length
z1 × 2 ............ Maximum allowable printing deviation
z2 × 2 ...... …… Maximum allowable stacking displacement n …………………… Center line

Claims (4)

表面または裏面の何れか一方に平面視で矩形を呈するマークA,B,Cの何れか1つのマークが形成された絶縁層と、
上記絶縁層の裏面側または表面側に隣接して積層され、平面視で矩形を呈し上記1つのマーク以外のマークA,B,Cのうち残り2つのマークが上記1つのマークを含めた厚み方向において重複し、該2つのマークの一方が表面に形成され、且つ他方が裏面に形成された別の絶縁層と、
を含み平面視が矩形の表面、裏面、およびこれらの間に位置する四つの外側面を有する多数個取り用配線基板であって、
上記多数個取り用配線基板の側面に露出するマークAの長さは、マークB,Cの長さよりも長く、マークCの長さは、マークA,Bの長さの中間であると共に、
上記1つのマークと、上記残り2つのマークの何れか一方との長さの差は、許容可能な最大積層ずれ量に一致しており、
上記残り2つのマーク相互間の長さの差は、許容可能な最大印刷ずれ量に一致している、
ことを特徴とする多数個取り用配線基板。
An insulating layer on which either one of the marks A, B, and C having a rectangular shape in plan view is formed on either the front surface or the back surface;
Thickness direction that is laminated adjacent to the back side or the front side of the insulating layer, has a rectangular shape in plan view, and the remaining two marks of the marks A, B, and C other than the one mark include the one mark Another insulating layer that overlaps with each other and one of the two marks is formed on the front surface and the other is formed on the back surface;
The unrealized plan view a rectangular surface, back surface, and a multi-piece wiring board having four outer surfaces located therebetween,
The length of the mark A exposed to the outside side face of the multi-piece wiring substrate, the mark B, longer than the length of C, the length of the mark C are marked A, with an intermediate of the length of B,
The difference in length between the one mark and one of the remaining two marks coincides with the maximum allowable stacking deviation amount,
The difference in length between the remaining two marks coincides with the maximum allowable printing deviation amount.
A wiring board for multi-piece production characterized by the above.
前記多数個取り用配線基板は、平面視で矩形を呈し、前記マークA,B,Cは、かかる多数個取り用配線基板において隣接する側面ごとに形成されている、
ことを特徴とする請求項1に記載の多数個取り用配線基板。
The multi-piece wiring substrate, a rectangular in plan view, the mark A, B, C are formed on each outer side surface adjacent in such a multi-piece wiring substrate,
The multi-cavity wiring board according to claim 1, wherein:
前記絶縁層および別の絶縁層は、複数の配線基板となる製品領域を有し且つかかる製品領域の周囲に耳部を有する大版用の絶縁板であり、かかる耳部の外側面または耳部の切断面に、前記マークA,B,Cの各断面が露出している、
ことを特徴とする請求項1または2に記載の多数個取り用配線基板。
The insulating layer and the other insulating layer are large plate insulating plates having a product region to be a plurality of wiring boards and having an ear around the product region, and the outer surface or the ear of the ear The cross sections of the marks A, B, C are exposed on the cut surface of
The multi-cavity wiring board according to claim 1 or 2, characterized in that
前記残り2つのマーク相互間の重複は、前記外側面と直交する各マークの矩形の幅方向に沿った中心線同士が平面視で一致する形態から、上記外側面と平行となる各マークの矩形の長手方向における同じ端部の短辺同士が多数個取り用配線基板の厚み方向で一致する形態までの範囲にある、
ことを特徴とする請求項1乃至3の何れか一項に記載の多数個取り用配線基板。
The overlap between the two remaining marks is that each of the mark rectangles parallel to the outer surface has a shape in which the center lines along the width direction of the rectangles orthogonal to the outer surface coincide in plan view. In the range to the form in which the short sides of the same end portion in the longitudinal direction of the same coincide with each other in the thickness direction of the wiring board for multi-cavity,
The multi-cavity wiring board according to any one of claims 1 to 3, wherein:
JP2005290308A 2005-10-03 2005-10-03 Wiring board for multi-cavity Expired - Fee Related JP4309882B2 (en)

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