JP2007103601A - Wiring board for multi-piece arrangement - Google Patents

Wiring board for multi-piece arrangement Download PDF

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JP2007103601A
JP2007103601A JP2005290308A JP2005290308A JP2007103601A JP 2007103601 A JP2007103601 A JP 2007103601A JP 2005290308 A JP2005290308 A JP 2005290308A JP 2005290308 A JP2005290308 A JP 2005290308A JP 2007103601 A JP2007103601 A JP 2007103601A
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mark
wiring board
insulating layer
marks
misalignment
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JP4309882B2 (en
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Hiroto Matsuda
裕土 松田
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Niterra Co Ltd
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NGK Spark Plug Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a wiring board for multi-piece arrangement capable of easily judging presence of dislocation in formation between upper and lower wiring layers, with an insulating layer in-between, as well as dislocation in stacking between a plurality of insulation layers forming the wiring layer, and capable of easily judging tolerable/untolerable for dislocation. <P>SOLUTION: In a wiring board K for multi-piece arrangement, a first mark C and second mark B as square in top view are separately formed on a front surface 4 and a rear surface 5 of an insulating layer s2 on the lower layer side. Relating to the length of exposure of the first mark C and the second mark B on the side surface of the wiring board K for multi-piece arrangement, length dC of the first mark C is longer than length dB of the second mark, with the first mark C and the second mark B overlapping each other in the thickness direction of the wiring board K for multi-piece arrangement. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、絶縁層の表面と裏面とに形成した導体パターン相互の印刷ずれ、あるいは積層すべき複数の絶縁層相互の積層ずれについて、検知および合否の判定が容易に行える多数個取り用配線基板に関する。   The present invention relates to a multi-cavity wiring board that can easily detect and determine pass / fail of printing misalignment between conductor patterns formed on the front and back surfaces of an insulating layer or misalignment between a plurality of insulating layers to be laminated. About.

近年の配線基板に対する配線の高密度化および高性能化に応じて、絶縁層を挟んだ上層と下層の配線層同士の印刷ずれなどや、積層すべき複数の絶縁層ごとに形成した配線層同士の積層ずれによる不具合を低減することが求められている。
例えば、積層すべき複数の絶縁層ごとに配線回路およびビア導体を形成した多数個取り用の多層配線基板において、当該多層配線基板の端面と直交する方向の幅が単調に変化するパターン(例えば、平面視が直角三角形のパターン)を絶縁層ごとに形成し、かかるパターンを積層後の端面に露出させた多層配線基板が提案されている(例えば、特許文献1参照)。
According to the recent trend toward higher density and higher performance of wiring on the wiring board, printing misalignment between the upper and lower wiring layers sandwiching the insulating layer, and the wiring layers formed for each of the multiple insulating layers to be stacked It is demanded to reduce the problems caused by the stacking deviation.
For example, in a multi-layer multi-layer wiring board in which wiring circuits and via conductors are formed for each of a plurality of insulating layers to be stacked, a pattern in which the width in a direction orthogonal to the end face of the multi-layer wiring board monotonously changes (for example, A multilayer wiring board has been proposed in which a right-angled triangle pattern in plan view) is formed for each insulating layer, and such a pattern is exposed on an end face after lamination (see, for example, Patent Document 1).

特開2005−101299号公報(第1〜12頁、図1,2)JP 2005-101299 A (pages 1 to 12, FIGS. 1 and 2)

前記特許文献1の多層配線基板によれば、その端面に露出した複数のパターン同士間の長さの相違を検出することで、積層ずれの有無を容易に判定することができる。しかしながら、かかる積層ずれが許容される範囲内にあるか否かは、上記端面に露出する複数のパターン同士間の長短差を多層配線基板ごとに計測する必要がある。このため、前記多層配線基板の検査工程に工数を要し且つコスト高を招く、という問題点があった。   According to the multilayer wiring board of Patent Document 1, it is possible to easily determine whether or not there is a stacking deviation by detecting a difference in length between a plurality of patterns exposed on the end face. However, it is necessary to measure, for each multilayer wiring board, the difference in length between the plurality of patterns exposed on the end face to determine whether or not such stacking deviation is within the allowable range. For this reason, there existed a problem that the inspection process of the said multilayer wiring board requires a man-hour and raises cost.

本発明は、背景技術において説明した問題点を解決し、絶縁層を挟んだ上層と下層の配線層相互の印刷ずれや、配線層を形成した複数の絶縁層相互の積層ずれの有無、および、ずれている場合の合格・不合格の判定が容易に行える多数個取り用配線基板を提供する、ことを課題とする。   The present invention solves the problems described in the background art, the presence or absence of printing misalignment between the upper and lower wiring layers sandwiching the insulating layer, the stacking misalignment between the plurality of insulating layers forming the wiring layer, and It is an object of the present invention to provide a wiring board for multi-cavity that can be easily judged whether it is shifted or not.

課題を解決するための手段および発明の効果Means for Solving the Problems and Effects of the Invention

本発明は、前記課題を解決するため、絶縁層の表面および裏面に、あるいは積層すべき複数の絶縁層に形成すべき配線層と同時に設ける複数のマークを、配線基板の厚み方向に沿った視角で互いに重複させ且つ許容できるずれ量の最大長さを複数のマーク間の長短差に適用する、ことに着想して成されたものである。
即ち、本発明による第1の多数個取り用配線基板(請求項1)は、絶縁層の表面および裏面に、平面視で矩形を呈する第1マークと第2マークとの何れか一方が形成され、上記第1マークと第2マークとの多数個取り用配線基板の側面に露出する長さは、第1マークが第2マークよりも長いと共に、上記第1マークと第2マークとは、上記多数個取り用配線基板の厚み方向において互いに重複している、ことを特徴とする。
In order to solve the above problems, the present invention provides a plurality of marks provided on the front and back surfaces of the insulating layer or simultaneously with the wiring layers to be formed on the plurality of insulating layers to be laminated, with a viewing angle along the thickness direction of the wiring board. The idea is to apply the maximum length of the allowable deviation amount to the difference in length between a plurality of marks.
That is, in the first multi-cavity wiring board according to the present invention (Claim 1), either one of the first mark and the second mark which are rectangular in a plan view is formed on the front surface and the back surface of the insulating layer. The length of the first mark and the second mark exposed on the side surface of the multi-piece wiring board is such that the first mark is longer than the second mark, and the first mark and the second mark are It is characterized in that they overlap each other in the thickness direction of the multi-piece wiring board.

これによれば、第1マークと第2マークとの長さの差を、後述するように許容される最大ずれ量の2倍とすると、第2マークの両端が重複する第1マークの両端の範囲内に納まっていれば、各マークと同時に印刷またはパターニングされた表面および裏面の導体層の印刷ずれが許容範囲にあることが容易に判定できる。一方、第2マークの何れか一端が重複する第2マークの何れか一端よりも外側にはみ出していれば、一目で印刷ずれが許容範囲から逸脱していることが判定できる。更に、絶縁層のX方向に沿った印刷ずれが第1,第2マークの幅方向に沿って存在しても、かかる印刷ずれは、絶縁層のY方向に沿って別途形成した両マークの重複程度を観察することで、容易に合否を判定可能となる。従って、印刷ずれの有無と同時に当該ずれが許容範囲にあるか否かも容易に判定できるため、多数個取り用配線基板の検査工程の工数を減らし、且つコスト低減も可能となる。
尚、本明細書では、フォトリソグラフィ技術によるパターニングのパターンずれも印刷ずれに含むものとする。
According to this, when the difference in length between the first mark and the second mark is set to be twice the maximum allowable deviation amount as will be described later, both ends of the first mark overlapped with each other. If it falls within the range, it can be easily determined that the printing misalignment of the front and back conductor layers printed or patterned simultaneously with each mark is within the allowable range. On the other hand, if one end of the second mark protrudes outside one end of the overlapping second mark, it can be determined that the printing deviation deviates from the allowable range at a glance. Furthermore, even if there is a printing misalignment along the X direction of the insulating layer along the width direction of the first and second marks, such a misprinting is caused by the overlap of both marks formed separately along the Y direction of the insulating layer. By observing the degree, pass / fail can be easily determined. Accordingly, since it can be easily determined whether or not the misalignment is within an allowable range at the same time as the presence or absence of the printing misalignment, the number of man-hours for the inspection process of the multi-chip wiring board can be reduced and the cost can be reduced.
In the present specification, pattern misalignment of patterning by photolithography technology is included in print misalignment.

尚、前記絶縁層は、例えばアルミナを主成分とするセラミック、例えばガラス−アルミナからなる低温焼成セラミックの一種であるガラス−セラミック、あるいはBT樹脂などの樹脂からなり、かかる絶縁層の表面と裏面との間には、ビア導体が貫通している。
また、前記第1の多数個取り用配線基板には、単一の絶縁層からなる配線基板、中継基板、あるいは、SAWフィルタ、水晶振動子、圧電振動子などの電子部品搭載用パッケージにおける搭載用基板などを複数個併有したものが含まれる。
更に、前記第1マークと第2マークとは、絶縁層の厚み方向に沿った平面視で等分配置、即ち、第2マークの長手方向の両端に第1マークの両端部が同じ長さで露出するにように重複して形成され、両マークの長さの差は、許容される最大ずれ量の2倍とされる。当該ずれとは、絶縁層の表面および裏面に形成すべき導体層(ランドや接続端子)の印刷ずれ(またはパターニングずれ)を指す。
加えて、多数個取り用配線基板の前記側面には、かかる基板の外側面のほか、当該基板を切断予定線に沿って切断した際に出現する切断面も含まれる。
The insulating layer is made of, for example, a ceramic mainly composed of alumina, for example, a glass-ceramic that is a kind of low-temperature fired ceramic made of glass-alumina, or a resin such as BT resin. Via conductors pass through between the two.
Further, the first multi-cavity wiring board includes a wiring board made of a single insulating layer, a relay board, or a mounting package for electronic parts such as a SAW filter, a crystal vibrator, and a piezoelectric vibrator. The one having a plurality of substrates is included.
Further, the first mark and the second mark are equally arranged in a plan view along the thickness direction of the insulating layer, that is, both ends of the first mark have the same length at both ends in the longitudinal direction of the second mark. The marks are overlapped so as to be exposed, and the difference between the lengths of both marks is twice the maximum allowable deviation. The deviation refers to printing deviation (or patterning deviation) of a conductor layer (land or connection terminal) to be formed on the front and back surfaces of the insulating layer.
In addition, the side surface of the multi-cavity wiring board includes not only the outer surface of the substrate but also a cut surface that appears when the substrate is cut along a planned cutting line.

また、本発明による第2の多数個取り用配線基板(請求項2)は、複数の絶縁層を積層してなる多数個取り用配線基板の上下に隣接する2層の絶縁層の表面および裏面に、平面視で矩形を呈する第3マークと第4マークとの何れか一方が形成され、上記多数個取り用配線基板の側面に露出する長さは、第3マークが第4マークよりも長いと共に、第3マークと第4マークとは、上記多数個取り用配線基板の厚み方向において互いに重複している、ことを特徴とする。   The second multi-cavity wiring board according to the present invention (Claim 2) is a front and back surfaces of two insulating layers adjacent to each other in the vertical direction of the multi-cavity wiring board formed by laminating a plurality of insulating layers. In addition, one of the third mark and the fourth mark that are rectangular in plan view is formed, and the length exposed on the side surface of the multi-cavity wiring board is longer than the fourth mark. At the same time, the third mark and the fourth mark overlap with each other in the thickness direction of the multi-cavity wiring board.

これによれば、第3マークと第4マークとの長さの差を、後述するように許容される最大ずれ量の2倍とすると、第4マークの両端が重複する第3マークの両端の範囲内にあれば、各マークと同時に印刷またはパターニングされた導体層を表面などに有する複数の絶縁層間の積層ずれが許容範囲であることを容易に判定できる。一方、第4マークの何れか一端が重複する第3マークの何れか一端よりも外側に出ていれば、一目で積層ずれが許容範囲から逸脱していることが判定できる。更に、複数の絶縁層相互のX方向に沿った積層ずれが第3,第4マークの幅方向に沿って存在しても、かかる積層ずれは、複数の絶縁層のY方向に沿って別途形成した第3,第4マークの重複程度を観察することで、容易に合否を判定可能となる。従って、複数の絶縁層相互の積層ずれの有無と同時に当該ずれが許容範囲にあるか否かも判定できるため、多数個取り用配線基板の検査工程の工数を減らし、且つコスト低減も可能となる。
尚、複数の絶縁層は、隣接する2層の絶縁層の場合のほか、順次隣接する絶縁層相互間の積層ずれの合否を判定することで、3層以上の多層の絶縁層も含む。
According to this, when the difference in length between the third mark and the fourth mark is set to twice the maximum allowable deviation amount as will be described later, the both ends of the third mark overlapped at both ends of the fourth mark. If it is within the range, it can be easily determined that the stacking deviation between a plurality of insulating layers having a conductor layer printed or patterned at the same time as each mark is within an allowable range. On the other hand, if any one end of the fourth mark is outside of any one end of the third mark that overlaps, it can be determined that the stacking deviation deviates from the allowable range at a glance. Further, even if a stacking shift along the X direction between the plurality of insulating layers exists along the width direction of the third and fourth marks, the stacking shift is separately formed along the Y direction of the plurality of insulating layers. By observing the degree of overlap between the third and fourth marks, it is possible to easily determine whether or not the mark is acceptable. Therefore, since it can be determined whether or not the misalignment is within an allowable range at the same time as the presence or absence of misalignment between the plurality of insulating layers, the number of steps in the inspection process for the multi-cavity wiring board can be reduced and the cost can be reduced.
In addition to the case of two adjacent insulating layers, the plurality of insulating layers include a multilayer insulating layer of three or more layers by determining the success or failure of stacking deviation between adjacent insulating layers.

更に、本発明には、前記第3マークと第4マークとの間に位置する絶縁層の表面または裏面に、平面視で矩形を呈する第5マークが形成され、前記多数個取り用配線基板の側面に露出する第5マークの長さは、第3マークよりも短く且つ第4マークよりも長いか、または、第3マークおよび第4マークよりも短いか、あるいは、第3マークおよび第4マークよりも長い、第3の多数個取り用配線基板(請求項3)も踏まれる。   Furthermore, in the present invention, a fifth mark having a rectangular shape in a plan view is formed on the front surface or the back surface of the insulating layer located between the third mark and the fourth mark. The length of the fifth mark exposed on the side surface is shorter than the third mark and longer than the fourth mark, or shorter than the third mark and the fourth mark, or the third mark and the fourth mark. A third multi-piece wiring board (claim 3), which is longer than the above, is also stepped on.

これによれば、例えば、積層すべき2層の絶縁層のうち下層側の絶縁層の表面と裏面とに第5マークと第4マークとを個別に重複して形成し、両マークの重複程度を観察することで、前記第1の多数個取り用配線基板と同様に、表面および裏面に印刷などした導体層相互の印刷ずれなどの合否を判定できる。同時に、上層側の絶縁層の表面に形成した第3マークと、下層側の絶縁層における第4マークまたは第5のマークとの重複程度を観察することで、一目で絶縁層間の積層ずれの合否を容易に判定することもできる。更に、各絶縁層のX方向に沿った印刷ずれや積層ずれが第3〜第5マークの幅方向に沿って存在しても、かかる印刷ずれなどは各絶縁層のY方向に沿って別途形成した第3〜第5マークの重複程度を観察することで、容易に合否の判定が可能となる。従って、複数の多層配線基板を併有する多数個取り用配線基板における印刷ずれと共に積層ずれの合否を一目で判定できるため、検査工程の工数とコストとを低減することができる。   According to this, for example, among the two insulating layers to be laminated, the fifth mark and the fourth mark are individually overlapped and formed on the front and back surfaces of the lower insulating layer, and the overlapping degree of both marks By observing the above, it is possible to determine whether or not the printing misalignment between the conductor layers printed on the front surface and the back surface is the same as in the first multi-chip wiring board. At the same time, by observing the degree of overlap between the third mark formed on the surface of the upper insulating layer and the fourth mark or the fifth mark in the lower insulating layer, the acceptance / rejection of the stacking deviation between the insulating layers at a glance. Can be easily determined. Furthermore, even if printing displacement or stacking displacement along the X direction of each insulating layer exists along the width direction of the third to fifth marks, such printing displacement is separately formed along the Y direction of each insulating layer. By observing the degree of overlap of the third to fifth marks, it is possible to easily determine whether or not the mark is acceptable. Therefore, since it is possible to determine at a glance whether the misalignment and the misalignment of the multi-wiring substrate having a plurality of multi-layer wiring substrates at the same time, it is possible to reduce the man-hour and cost of the inspection process.

尚、印刷ずれや積層ずれを狭い許容公差内に納めるため、例えば、最長の第3マークと対比するマークは、第4マークまたは第5マークのうち、何れか長い方を選択し、最短の第4マークまたは第5マークと対比するマークは、これらの一方よりも長く且つ第3マークよりも短い第5マークまたは第4マークを選択する。また、前記第1マークを第3マークとし、且つ前記第2マークを第4マークとしても良い。即ち、前記第1〜第5マークの呼称は、相対的且つ便宜上の名称である。   In order to keep printing deviation and stacking deviation within narrow tolerances, for example, the longest third mark is selected from the fourth mark or the fifth mark, whichever is longer, and the shortest second mark is selected. The fifth mark or the fourth mark that is longer than one of these and shorter than the third mark is selected as the mark to be compared with the fourth mark or the fifth mark. The first mark may be the third mark, and the second mark may be the fourth mark. That is, the names of the first to fifth marks are relative and convenient names.

加えて、本発明には、前記第1マークと第2マークとの重複、前記第3マークと第4マークとの重複、あるいは、前記第3マークまたは第4マークと第5マークとの重複は、各マークの矩形の幅方向に沿った中心線同士が平面視で一致する形態から、各マークの矩形の長手方向における同じ端部の短辺同士が前記絶縁層の厚み方向で一致する形態までの範囲にある、多数個取り用配線基板(請求項4)も含まれる。
これによれば、前述した印刷ずれや積層ずれの合否を一目で迅速且つ正確に判定できるため、検査工程の効率を確実に高めることが可能となる。
In addition, in the present invention, the overlap between the first mark and the second mark, the overlap between the third mark and the fourth mark, or the overlap between the third mark or the fourth mark and the fifth mark From the form in which the center lines along the width direction of the rectangle of each mark match in plan view, to the form in which the short sides of the same end in the longitudinal direction of the rectangle of each mark match in the thickness direction of the insulating layer A multi-piece wiring board in the range of (4) is also included.
According to this, it is possible to quickly and accurately determine whether or not the above-described printing misalignment or stacking misalignment is made, and it is possible to reliably increase the efficiency of the inspection process.

付言すれば、本発明には、前記第1,第2マーク、第3〜第5マークは、導体パターンからなり、平面視でそれぞれの長手方向と直交して一定以上の幅を有する長方形(矩形)を呈する、多数個取り用配線基板も含まれ得る。これによれば、第1〜第5マークは、絶縁層の表面や裏面に形成すべき接続端子や配線層などの導体層と同じマスクパターンで印刷またはパターニングによって同時に形成でき、且つこれらの印刷ずれや絶縁層間の積層ずれの判定に活用することが可能となる。   In other words, in the present invention, the first, second mark, and third to fifth marks are made of a conductor pattern, and are rectangular (rectangular) having a certain width or more perpendicular to each longitudinal direction in plan view. A multi-cavity wiring board exhibiting a) may also be included. According to this, the first to fifth marks can be simultaneously formed by printing or patterning with the same mask pattern as the conductor layer such as the connection terminal and the wiring layer to be formed on the front surface and the back surface of the insulating layer, and printing misalignment thereof. And can be used for determination of misalignment between insulating layers.

また、本発明には、前記絶縁層は、複数の配線基板となる製品領域を有し且つかかる製品領域の周囲に耳部を有する大版用の絶縁板であり、かかる耳部の外側面または耳部の切断面に、前記第1,第2マーク、第3〜第5マークの各断面が露出している、配線基板も含まれ得る。これによれば、製品領域を用いることなく、その周囲の耳部の外側面に露出した各マーク相互の重複程度を観察することで、製品領域を損なうことなく、前述した印刷ずれなどや積層ずれの有無および合否の判定を容易に行うことが可能となる。   Further, in the present invention, the insulating layer is a large plate insulating plate having a product region to be a plurality of wiring boards and having an ear portion around the product region, and the outer surface of the ear portion or A wiring board in which cross sections of the first, second mark, and third to fifth marks are exposed on the cut surface of the ear may be included. According to this, without using the product area, by observing the degree of overlap between the marks exposed on the outer surface of the surrounding ears, the above-described print misalignment or stacking misalignment can be performed without damaging the product area. It is possible to easily determine the presence / absence and acceptance / rejection.

更に、本発明には、前記絶縁層は、複数の配線基板となる製品領域を併有し、かかる製品領域同士の間および製品領域の外周に耳部を有すると共に、各耳部との付近に、あるいは、各耳部の中間に沿って、前記第1,第2マーク、第3〜第5マークが形成されている、多数個取り用配線基板も含まれ得る。これによれば、複数の各製品領域を用いず、それらを囲う耳部の外側面や、耳部の中間に沿って切断した切断面に露出する各マーク相互の重複程度を観察することで、製品領域を損なうことなく、前述した印刷ずれなどや積層ずれの有無および合否の判定を容易且つ効率良く行うことが可能となる。   Further, according to the present invention, the insulating layer has a plurality of product regions to be a plurality of wiring boards, and has an ear portion between the product regions and the outer periphery of the product region, and in the vicinity of each ear portion. Alternatively, a multi-piece wiring board in which the first, second, and third to fifth marks are formed along the middle of each ear may be included. According to this, without using each of the plurality of product regions, by observing the degree of overlap between the marks exposed on the outer surface of the ear portion surrounding them and the cut surface cut along the middle of the ear portion, Without damaging the product area, it is possible to easily and efficiently determine the presence / absence and pass / fail of the above-described printing misalignment and stacking misalignment.

以下において、本発明を実施するための最良の形態について説明する。
図1は、本発明における一形態の多数個取り用配線基板Kを示す平面図、図2は、かかる配線基板Kを示す斜視図、図3は、その部分側面図である。
多数個取り用配線基板Kは、図1,図2に示すように、上下2層の絶縁層s1,s2を積層した絶縁積層体Sと、絶縁層s1,s2ごとにX−Y方向に沿って破線で示す切断予定線cで区画された配線基板1を各方向に3個ずつ合計9個有する製品領域と、これらの周囲を囲う耳部mと、を備えている。絶縁層s1,s2は、平面視が長方形を呈し、例えばアルミナを含むグリーンシートを焼成したセラミックであり、予め絶縁積層体Sとした後で焼成されている。尚、絶縁層s1,s2は、低温焼成セラミックの一種であるガラス−セラミックとしても良い。
In the following, the best mode for carrying out the present invention will be described.
FIG. 1 is a plan view showing a multi-piece wiring board K according to an embodiment of the present invention, FIG. 2 is a perspective view showing the wiring board K, and FIG. 3 is a partial side view thereof.
As shown in FIG. 1 and FIG. 2, the multi-cavity wiring board K includes an insulating laminated body S in which two upper and lower insulating layers s1 and s2 are laminated, and the insulating layers s1 and s2 along the XY direction. A product region having a total of nine wiring boards 1 divided in each direction by three broken wiring lines c indicated by broken lines, and ears m surrounding these. The insulating layers s1 and s2 have a rectangular shape in a plan view, and are ceramics obtained by firing a green sheet containing alumina, for example, and are fired after the insulating laminate S is formed in advance. The insulating layers s1 and s2 may be glass-ceramic which is a kind of low-temperature fired ceramic.

図1,図2に示すように、絶縁層s1の表面2において、対向する一対の長辺と一対の短辺との各耳部mの中央付近には、平面視が長方形(矩形)で最長のマーク(第3マーク)Aが形成されている。また、絶縁層s1の裏面3と絶縁層s2の表面4との間における上記とほぼ同じ位置には、平面視が長方形(矩形)で長手方向が最短のマーク(第2マーク、第5マーク)Bが形成されている。更に、絶縁層s2の裏面5における上記とほぼ同じ位置には、平面視が長方形(矩形)で長手方向が上記マークAとマークBとの中間長さのマーク(第1マーク、第4マーク)Cが形成されている。マークA〜Cは、配線基板Kの外側面(側面)にも露出している。   As shown in FIGS. 1 and 2, the surface 2 of the insulating layer s <b> 1 has a longest rectangular shape (rectangular shape) in the vicinity of the center of each of the ears m of the pair of opposed long sides and the pair of short sides. Mark (third mark) A is formed. Further, at the same position between the back surface 3 of the insulating layer s1 and the front surface 4 of the insulating layer s2, the mark in the plan view is rectangular (rectangular) and has the shortest longitudinal direction (second mark, fifth mark). B is formed. Further, at substantially the same position as the above on the back surface 5 of the insulating layer s2, a mark (first mark, fourth mark) having a rectangular (rectangular) plan view and an intermediate length between the mark A and the mark B in the longitudinal direction. C is formed. The marks A to C are also exposed on the outer surface (side surface) of the wiring board K.

かかるマークA〜Cは、WまたはMoからなる厚みが数μm〜数10μmの導体パターンであり、絶縁層s1の表面2や、絶縁層s2の表面4と裏面5における製品領域(1,1,…)内に、ランド、内部配線パターン、または接続端子(何れも図示せず)などをスクリーン印刷などした際に、同時に耳部mの各辺の中央付近に印刷され、且つ焼成されたものである。図3に示すように、側面視における長手方向の長さは、例えば、マークA:1mm、マークB:0.6mm、マークC:0.8mmである。また、マークA〜Cの幅(w)は、例えば0.2〜0.4mmで且つ共通にすることが望ましい。尚、絶縁層s1,s2がガラス−セラミックからなる場合、マークA〜Cには、CuまたはAgが用いられる。   The marks A to C are conductor patterns made of W or Mo and having a thickness of several μm to several tens of μm, and the product areas (1, 1, 1) on the front surface 2 of the insulating layer s1 and the front surface 4 and the back surface 5 of the insulating layer s2. ...) when the land, the internal wiring pattern, or the connection terminal (none of which is shown) is screen-printed, etc., printed at the center of each side of the ear m and fired at the same time. is there. As shown in FIG. 3, the length in the longitudinal direction in the side view is, for example, mark A: 1 mm, mark B: 0.6 mm, and mark C: 0.8 mm. Further, it is desirable that the width (w) of the marks A to C is, for example, 0.2 to 0.4 mm and common. When the insulating layers s1 and s2 are made of glass-ceramic, Cu or Ag is used for the marks A to C.

図1,図2に示すように、マークA〜Cを絶縁層s1,s2の4辺に形成したのは、多数個取り用配線基板Kの絶縁層s2の表・裏面4,5におけるマークBとマークCとの印刷ずれが、例えばX(長辺)方向に沿っていても、一対の短辺におけるマークB,C相互の重複程度を目視することで、上記印刷ずれの有無とその合否判定とが可能となるためである。また、絶縁層s1,s2間の積層ずれが例えばY(短辺)方向に沿っていても、一対の長辺におけるマークA,C相互の重複程度を目視することで、上記積層ずれの有無とその合否判定とが可能となる。   As shown in FIGS. 1 and 2, the marks A to C are formed on the four sides of the insulating layers s1 and s2 because the marks B on the front and back surfaces 4 and 5 of the insulating layer s2 of the multi-layer wiring board K are formed. Even if the printing misalignment between the mark B and the mark C is, for example, along the X (long side) direction, the presence / absence of the printing misalignment and the pass / fail judgment are made by visually checking the degree of overlap between the marks B and C on the pair of short sides. This is because it becomes possible. Further, even if the stacking misalignment between the insulating layers s1 and s2 is, for example, along the Y (short side) direction, by checking the degree of overlap between the marks A and C on the pair of long sides, The pass / fail judgment can be made.

ここで、本発明における第1の多数個取り用配線基板について、図4〜図6に基づいて説明する。図4に示すように、絶縁層s2の表面4に形成したマーク(第2マーク)Bと、裏面5に形成したマークBよりも長いマーク(第1マーク)Cとは、同じ幅wの矩形で且つ両者の幅方向に沿った中心線n,nが平面視で一致している。尚、図4の中央は、左側の太い矢印で示す矢視に沿ったマークB,Cの平面図、図4の右側は、マークB,Cの透視的な斜視図であり、図5,図6についても同様である。
即ち、図4のマークB,Cは、平面視で等分配置の状態であり、両者が絶縁層s2の表・裏面4,5間において印刷ずれを生じていないことを示している。因みに、マークCの長さdCは、マークBの長さdBの両端の外側に、許容できる最大印刷ずれ量(長さ)z1をそれぞれ加えたものである(数式1参照)。
Here, the first multi-cavity wiring board according to the present invention will be described with reference to FIGS. As shown in FIG. 4, a mark (second mark) B formed on the front surface 4 of the insulating layer s2 and a mark (first mark) C longer than the mark B formed on the back surface 5 are rectangles having the same width w. In addition, the center lines n and n along the width direction of both coincide with each other in plan view. 4 is a plan view of the marks B and C along the arrow indicated by the thick arrow on the left side, and the right side of FIG. 4 is a perspective view of the marks B and C. The same applies to 6.
That is, the marks B and C in FIG. 4 are equally arranged in a plan view, indicating that there is no printing misalignment between the front and back surfaces 4 and 5 of the insulating layer s2. Incidentally, the length dC of the mark C is obtained by adding an allowable maximum printing deviation amount (length) z1 to the outside of both ends of the length B of the mark B (see Formula 1).

(数1)
dC=dB+(z1×2)
(Equation 1)
dC = dB + (z1 × 2)

絶縁層s2の各配線基板1内には、予め打ち抜き加工されたビアホール内に充填したWまたはMoを含む導電性ペーストを焼成したビア導体(何れも図示せず)が適所に形成されている。マークB,Cが絶縁層s2の側面で、図4の状態にある場合、かかる絶縁層s2の表面4と裏面5とに、マークB,Cと同時に印刷して形成された図示しない表面4側のランドや裏面5側の接続端子も、互いに印刷ずれのない所定の位置にある。このため、表面4側のランドと裏面5側の接続端子とは、上記ビア導体を介して、確実に導通するので、例えば、複数の前記配線基板1を中継基板として利用することが可能となる。   In each wiring board 1 of the insulating layer s2, via conductors (both not shown) are formed at appropriate positions by firing a conductive paste containing W or Mo filled in a via hole punched in advance. When the marks B and C are on the side surfaces of the insulating layer s2 and are in the state shown in FIG. 4, the front surface 4 side (not shown) formed by printing simultaneously with the marks B and C on the front surface 4 and the back surface 5 of the insulating layer s2. The lands and the connection terminals on the back surface 5 side are also in predetermined positions without printing misalignment. For this reason, since the land on the front surface 4 side and the connection terminal on the back surface 5 side are surely conducted via the via conductor, for example, a plurality of the wiring boards 1 can be used as relay boards. .

また、図5に示すように、絶縁層s2の表面4に形成したマーク(第2マーク)Bと、裏面5に形成したマーク(第1マーク)Cとの長手方向における同じ端部(右端)の短辺同士が、絶縁層s2の厚み方向で一致する場合は、両者が絶縁層s2の表・裏面4,5間において印刷ずれを生じていることを示す。しかし、かかるマークB,C間の印刷ずれは、許容される最大印刷ずれ量(z1)の範囲内であることが、一目で判定することもできる。
尚、マークB,Cにおける上記と反対側の端部(図5で左端)の短辺同士が、絶縁層s2の厚み方向で一致する場合も、印刷ずれが許容範囲内にあることが、一目で判定できる。更に、マークB,C間において、図4に示した両者間に印刷ずれがない状態と、図5に示した許容される最大印刷ずれ量(z1)の状態との中間である印刷ずれも、許容される範囲内にあることが一目で容易に判定できる。
Further, as shown in FIG. 5, the same end (right end) in the longitudinal direction of the mark (second mark) B formed on the front surface 4 of the insulating layer s2 and the mark (first mark) C formed on the back surface 5 When the short sides coincide with each other in the thickness direction of the insulating layer s2, it indicates that printing misalignment occurs between the front and back surfaces 4 and 5 of the insulating layer s2. However, it can be determined at a glance that the printing misalignment between the marks B and C is within the allowable maximum printing misalignment amount (z1).
It should be noted that even when the short sides of the opposite ends (left end in FIG. 5) of the marks B and C coincide with each other in the thickness direction of the insulating layer s2, it is at a glance that the printing misalignment is within an allowable range. Can be determined. Further, between the marks B and C, a print misalignment between the state shown in FIG. 4 where there is no print misalignment and the allowable maximum print misalignment amount (z1) shown in FIG. It can be easily determined at a glance that it is within the allowable range.

一方、図6に示すように、絶縁層s2の表面4に形成したマーク(第2マーク)Bの長手方向における端部(右端)の短辺が、裏面5に形成したマーク(第1マーク)Cとの長手方向における同じ端部(右端)の短辺よりも、外側(右側)にはみ出る場合がある。かかる場合は、マークB,Cが絶縁層s2の表・裏面4,5間において、許容される最大印刷ずれ量(z1)を越えた印刷ずれを生じていることを示している。従って、絶縁層s2における前記配線基板1ごとに形成された図示しない表面4側のランドと裏面5側の接続端子とは、互いの印刷ずれにより導通が不安定になるか、不能となり得るので、不合格であることが一目で判定できる。   On the other hand, as shown in FIG. 6, the short side of the end (right end) in the longitudinal direction of the mark (second mark) B formed on the surface 4 of the insulating layer s2 is the mark formed on the back surface 5 (first mark). In some cases, the outer side (right side) may protrude beyond the short side of the same end (right end) in the longitudinal direction with C. In this case, the marks B and C indicate that a printing deviation exceeding the maximum allowable printing deviation amount (z1) occurs between the front and back surfaces 4 and 5 of the insulating layer s2. Therefore, the lands on the front surface 4 side (not shown) and the connection terminals on the rear surface 5 side that are formed for each of the wiring boards 1 in the insulating layer s2 may become unstable or impossible due to mutual printing misalignment. It can be judged at a glance that it is a failure.

以上のように、本発明による第1の多数個取り用配線基板によれば、絶縁層s2の表面4に形成したマーク(第2マーク)Bと、裏面5に形成したマーク(第1マーク)Cとの重複程度によって、図4の印刷ずれがないか、図5の許容範囲内の印刷ずれであることが目視で容易に判定できる。また、図6のように、印刷ずれが許容範囲を外れていることも、容易に判定することもできる。
更に、前述したように、絶縁層s2におけるマークBとマークCとの印刷ずれが、例えば、前記X(長辺)方向またはY(短辺)方向に沿っていても、一対の短辺または長辺における別のマークB,C相互の重複程度を目視することで、上記印刷ずれの有無とその合否判定とが可能となる。この場合、絶縁層s2の前記X(長辺)方向とY(短辺)方向との双方に沿って、印刷ずれが複合して生じた場合でも、図4,図5で示した重複程度か、図6で示した重複程度かによって、容易に印刷ずれの合否を判定することができる。
従って、第1の多数個取り用配線基板によれば、印刷ずれの有無とその合否判定とが容易且つ迅速にできるため、検査工数とコスト低減を図ることができる。
As described above, according to the first multi-cavity wiring board according to the present invention, the mark (second mark) B formed on the front surface 4 of the insulating layer s2 and the mark (first mark) formed on the back surface 5 are provided. Depending on the degree of overlap with C, it can be easily determined visually that there is no print misalignment in FIG. 4 or a print misalignment within the allowable range in FIG. Further, as shown in FIG. 6, it can be easily determined that the printing deviation is out of the allowable range.
Furthermore, as described above, even if the printing deviation between the mark B and the mark C in the insulating layer s2 is along the X (long side) direction or the Y (short side) direction, for example, a pair of short sides or long sides By visually observing the degree of overlap between the other marks B and C on the side, it is possible to determine the presence / absence of the printing deviation and the pass / fail judgment. In this case, even if printing misalignment occurs along both the X (long side) direction and the Y (short side) direction of the insulating layer s2, it is the degree of overlap shown in FIGS. The pass / fail of printing misalignment can be easily determined depending on the degree of overlap shown in FIG.
Therefore, according to the first multi-cavity wiring board, it is possible to easily and quickly determine whether or not there is a printing misalignment, and whether or not to pass the print misalignment, so that the number of inspection steps and cost can be reduced.

図7は、前記多数個取り用配線基板Kを得るための積層工程を示す側面図、図8は、積層後で且つ焼成した上記配線基板Kの部分側面図などである。
図7,図8に示すように、上層側の絶縁層s1の表面2には、マーク(第3マーク)Aが形成され、下層側の絶縁層s2の表面4には、マーク(第5マーク)Bが形成され、その裏面5には、マーク(第4マーク)Cが形成されている。マークAの長手方向の長さdAは、マークCの長さdCよりも長く、両者の間に位置するマークBの長さdBは、マークA,Cよりも短い。尚、下層側の絶縁層s2における表面4のマーク(第5マーク)Bと、裏面5のマーク(第4)とは、前記図4で示したように、絶縁層s2の厚み(平面)方向で適正な等分配置にあるものとする。
FIG. 7 is a side view showing a lamination process for obtaining the multi-piece wiring board K, and FIG. 8 is a partial side view of the wiring board K after being laminated and fired.
As shown in FIGS. 7 and 8, a mark (third mark) A is formed on the surface 2 of the upper insulating layer s1, and a mark (fifth mark) is formed on the surface 4 of the lower insulating layer s2. ) B is formed, and a mark (fourth mark) C is formed on the back surface 5 thereof. The length dA in the longitudinal direction of the mark A is longer than the length dC of the mark C, and the length dB of the mark B located between the two is shorter than the marks A and C. In addition, the mark (fifth mark) B on the front surface 4 and the mark (fourth) on the back surface 5 in the lower insulating layer s2 are in the thickness (planar) direction of the insulating layer s2, as shown in FIG. It is assumed that it is in an appropriate equal distribution.

図7,図8に示すように、絶縁層s1の表面2に形成したマーク(第3マーク)Aと、絶縁層s2の裏面5に形成したマークAよりも短いマーク(第4マーク)Cとは、前記と同じ幅wの矩形で且つ両者の幅方向に沿った中心線n,nが平面視で一致している。因みに、マークAの長さdAは、マークCの長さdCの両端の外側に、許容できる最大積層ずれ量(長さ)z2をそれぞれ加えたものである(数式2参照)。尚、図8の中央は、左側の太い矢印で示す矢視に沿ったマークA,Cの底面(平面)図、図8の右側は、マークA,Cの透視的な斜視図であり、図9,図10についても同様である。   As shown in FIGS. 7 and 8, a mark (third mark) A formed on the front surface 2 of the insulating layer s1, and a mark (fourth mark) C shorter than the mark A formed on the back surface 5 of the insulating layer s2. Is a rectangle having the same width w as described above, and the center lines n and n along the width direction of the two coincide in plan view. Incidentally, the length dA of the mark A is obtained by adding an allowable maximum stacking deviation amount (length) z2 to the outside of both ends of the length dC of the mark C (see Formula 2). 8 is a bottom (plan) view of the marks A and C along the arrow indicated by the thick arrow on the left side, and the right side of FIG. 8 is a perspective view of the marks A and C. 9 and 10 are the same.

(数2)
dA=dC+(z2×2)
(Equation 2)
dA = dC + (z2 × 2)

絶縁層s1,s2の各配線基板1内には、前記同様にビアホール内にWなどを含む導電性ペーストを焼成したビア導体が、それぞれ適所に形成され、且つ絶縁層s2の表面4に形成したマークBと同時に、内部配線パターン(何れも図示せず)が配線基板1ごとに印刷・形成されている。
マークA,Cが絶縁層s1,s2の側面で、図8の状態にある場合、絶縁層s1の表面2と絶縁層s2の裏面5とに、マークA,Cと同時に印刷して形成された図示しない表面2側のランドや裏面5側の接続端子も、互いに絶縁層s1,s2間の積層ずれのない所定の位置にある。このため、表面2側のランドと裏面5側の接続端子とは、上記ビア導体や内部配線パターンを介して、確実に導通されるので、例えば、複数の前記配線基板1を多層構造の配線基板として利用できる。
In each of the wiring substrates 1 of the insulating layers s1 and s2, via conductors obtained by firing a conductive paste containing W or the like in the via holes are formed at appropriate positions and formed on the surface 4 of the insulating layer s2. Simultaneously with the mark B, an internal wiring pattern (none of which is shown) is printed and formed for each wiring board 1.
When the marks A and C are on the side surfaces of the insulating layers s1 and s2 and are in the state shown in FIG. 8, they are formed on the front surface 2 of the insulating layer s1 and the back surface 5 of the insulating layer s2 by printing simultaneously with the marks A and C. The land on the front surface 2 side and the connection terminal on the back surface 5 side, not shown, are also in predetermined positions without any misalignment between the insulating layers s1 and s2. For this reason, since the land on the front surface 2 side and the connection terminal on the back surface 5 side are reliably conducted through the via conductors and the internal wiring pattern, for example, a plurality of wiring boards 1 are connected to a wiring board having a multilayer structure. Available as

また、図9に示すように、絶縁層s1の表面2に形成したマーク(第3マーク)Aと、絶縁層s2の裏面5に形成したマーク(第4マーク)Cとの長手方向における同じ端部(左端)の短辺同士が、絶縁層s1,s2の厚み方向で一致する場合は、両者が絶縁層s1,s2間において積層ずれを生じていることを示す。しかし、かかるマークA,C間の積層ずれは、許容される最大積層ずれ量(z2)の範囲内であることも、一目で容易に判定することができる。
尚、マークA,Cにおける上記と反対側の端部(図5で右端)の短辺同士が、絶縁層s1,s2の厚み方向で一致する場合も、積層ずれが許容範囲内にあることが容易に判定できる。更に、マークA,C間において、図8に示した積層ずれ量がない状態と、図9に示した許容される最大積層ずれ量(z2)の状態との中間である積層ずれも、許容される範囲内にあることが一目で容易に判定できる。
Further, as shown in FIG. 9, the same end in the longitudinal direction of the mark (third mark) A formed on the front surface 2 of the insulating layer s1 and the mark (fourth mark) C formed on the back surface 5 of the insulating layer s2 When the short sides of the portion (left end) coincide with each other in the thickness direction of the insulating layers s1 and s2, it indicates that they are misaligned between the insulating layers s1 and s2. However, it can be easily determined at a glance that the stacking misalignment between the marks A and C is within the allowable stacking misalignment amount (z2).
Note that even when the short sides of the opposite ends (the right end in FIG. 5) of the marks A and C coincide with each other in the thickness direction of the insulating layers s1 and s2, the stacking deviation may be within an allowable range. Easy to judge. Further, a misalignment between the marks A and C, which is intermediate between the state where there is no misalignment shown in FIG. 8 and the maximum allowable misalignment (z2) shown in FIG. 9, is also allowed. Can be easily determined at a glance.

一方、図10に示すように、絶縁層s2の裏面5に形成したマーク(第4マーク)Cの長手方向における端部(左端)の短辺が、絶縁層s1の表面2に形成したマーク(第3マーク)Aとの長手方向における同じ端部(左端)の短辺よりも、外側(左側)にはみ出る場合がある。かかる場合は、マークA,Cを印刷・形成している絶縁層s1,s2間において、許容される最大積層ずれ量(z2)を越えた積層ずれを生じていることを示している。従って、絶縁層s1,s2における前記配線基板1に形成された図示しない表面2側のランドと裏面5側の接続端子とは、互いの印刷ずれにより導通が不安定になるか、不能となり得るため、不合格であることが一目で判定できる。   On the other hand, as shown in FIG. 10, the mark (fourth mark) C formed on the back surface 5 of the insulating layer s2 has a short side at the end (left end) in the longitudinal direction. The third mark (A) may protrude outward (left side) from the short side of the same end (left end) in the longitudinal direction. In such a case, it is indicated that a stacking shift exceeding the allowable stacking shift amount (z2) is generated between the insulating layers s1 and s2 on which the marks A and C are printed / formed. Accordingly, the lands on the front surface 2 and the connection terminals on the rear surface 5 side (not shown) formed on the wiring board 1 in the insulating layers s1 and s2 may become unstable or impossible to conduct due to mutual printing misalignment. , It can be determined at a glance that it is a failure.

以上のように、本発明による第2の多数個取り用配線基板Kによれば、絶縁層s1の表面2に形成したマーク(第3マーク)Aと、絶縁層s2の裏面5に形成したマーク(第4マーク)Cとの重複程度によって、図8の積層ずれがないか、図9の許容範囲内の積層ずれであることが目視で容易に判定できる。また、図10のように、積層ずれが許容範囲を外れていることも、容易に判定できる。
更に、前述したように、絶縁層s1,s2間における積層ずれが、例えば、前記X(長辺)方向またはY(短辺)方向に沿っていても、一対の短辺または長辺におけるマークA,C相互の重複程度を目視することで、上記印刷ずれの有無と合否の判定とが可能となる。この場合、絶縁層s1,s2の前記X(長辺)方向とY(短辺)方向との双方に沿って、積層ずれが複合して生じた場合でも、図8,図9で示したマークAとマークCとの重複程度か、図10で示した重複程度かによって、積層ずれの合否を容易に判定することができる。
従って、第2の多数個取り用配線基板によれば、積層ずれの有無とその合否判定とが容易且つ迅速にできるため、検査工数とコスト低減を図ることができる。
As described above, according to the second multi-cavity wiring board K according to the present invention, the mark (third mark) A formed on the front surface 2 of the insulating layer s1 and the mark formed on the back surface 5 of the insulating layer s2. Depending on the degree of overlap with (fourth mark) C, it can be easily determined visually that there is no stacking deviation in FIG. 8 or a stacking deviation within the allowable range in FIG. Further, as shown in FIG. 10, it can be easily determined that the stacking deviation is out of the allowable range.
Further, as described above, even if the stacking deviation between the insulating layers s1 and s2 is, for example, along the X (long side) direction or the Y (short side) direction, the mark A on the pair of short sides or long sides. , C makes it possible to determine the presence / absence of print misalignment and pass / fail judgment by visually checking the degree of mutual overlap. In this case, the marks shown in FIGS. 8 and 9 can be obtained even when the stacking misalignment occurs along both the X (long side) direction and the Y (short side) direction of the insulating layers s1 and s2. The success or failure of the stacking deviation can be easily determined based on the degree of overlap between A and the mark C or the degree of overlap shown in FIG.
Therefore, according to the second multi-cavity wiring board, since it is possible to easily and quickly determine whether or not there is a stacking deviation, it is possible to reduce the number of inspection steps and cost.

また、図8,図9において、絶縁層s2の表面4に形成したマーク(第5マーク)Bと、裏面5に形成したマーク(第4マーク)Cとが、前記図4と図5との範囲ないの印刷ずれであれば、絶縁層s2の表面4に形成される内部配線パターンと、裏面5に形成される接続端子との印刷ずれがないか、許容範囲内にあることも、多数個取り用配線基板Kの側面を目視することで、容易に判定できる。
かかる本発明による第3の多数個取り用配線基板Kによれば、絶縁層s2を挟んだマークB,C間の印刷ずれの有無およびその合否と共に、マークA,Cの重複程度によって絶縁層s1,s2の積層ずれの有無およびその合否も、それぞれ容易に判定することができる。
8 and 9, the mark (fifth mark) B formed on the front surface 4 of the insulating layer s2 and the mark (fourth mark) C formed on the back surface 5 are the same as those shown in FIGS. If the printing deviation is not within the range, there may be no printing deviation between the internal wiring pattern formed on the front surface 4 of the insulating layer s2 and the connection terminal formed on the back surface 5, or it may be within an allowable range. This can be easily determined by visually observing the side surface of the wiring board K for collection.
According to the third multi-cavity wiring board K of the present invention, the insulating layer s1 depends on whether or not there is a printing deviation between the marks B and C across the insulating layer s2 and whether or not the marks A and C overlap. , S2 and the presence / absence of the misalignment and the pass / fail status can be easily determined.

図11は、第1〜第3の前記多数個取り用配線基板Kの異なる形態を示す。
図11の左側に示すように、絶縁層s1の表面2にマーク(第1マーク)Aを、裏面3にマークAよりも短いマーク(第2マーク)Bを形成し、両者の長手方向に沿った長さdA,dBの差を、前記数式1と同様に最大印刷ずれ量z3の2倍としている。尚、かかるマークA,Bは、絶縁層s1の側面にも露出するように形成されている。
上記マークA,B間の平面視における重複程度を、前記図4〜図5と同様に、印刷ずれがないか、許容範囲内とすることで、絶縁層s1の表・裏面2,3に印刷・形成されるランドと接続端子とが、絶縁層s1を貫通するビア導体(図示せず)を介して、確実に導通する中継基板を複数個得る第1の多数個取り用配線基板とすることができる。
FIG. 11 shows different forms of the first to third multi-chip wiring boards K.
As shown on the left side of FIG. 11, a mark (first mark) A is formed on the front surface 2 of the insulating layer s1, and a mark (second mark) B shorter than the mark A is formed on the back surface 3, along the longitudinal direction of both. The difference between the lengths dA and dB is set to be twice the maximum printing deviation amount z3 as in the equation 1. The marks A and B are formed so as to be exposed also on the side surface of the insulating layer s1.
The degree of overlap between the marks A and B in a plan view is printed on the front and back surfaces 2 and 3 of the insulating layer s1 by making sure that there is no printing misalignment or within an allowable range, as in FIGS. A first multi-cavity wiring board that obtains a plurality of relay boards in which the formed lands and connection terminals are surely conducted through via conductors (not shown) penetrating the insulating layer s1. Can do.

また、図11の右側に示すように、表・裏面2,3にマーク(第3マーク)Aとマーク(第5マーク)Bを形成した絶縁層s1の下層側に、裏面5にマークAとマークBとの中間長さのマーク(第4マーク)Cを形成した絶縁層s2を積層・焼成し、前記同様の第2,第3の多数個取り用配線基板Kを形成しても良い。尚、マークA〜Cは、当該配線基板Kの側面にも露出するように形成されている。
かかる多数個取り用配線基板Kでも、絶縁層s1の表面2に形成したマークAと、絶縁層s2の裏面5に形成したマークCとの重複が、図11に示す適正な等分配置の状態から、前記図9で示した絶縁層s1,s2の最大積層ずれ量(z2)までの範囲内にあれば、印刷ずれおよび積層ずれがないか、これらの双方が許容範囲内であるかが、容易に判定できる。尚、マークB,Cの重複程度によって、絶縁層s1,s2間の積層ずれを検査しても良い。
Further, as shown on the right side of FIG. 11, the mark A on the back surface 5 is formed on the lower surface side of the insulating layer s1 in which the mark (third mark) A and the mark (fifth mark) B are formed on the front and back surfaces 2 and 3. The insulating layer s2 on which the mark (fourth mark) C having an intermediate length with the mark B is formed may be laminated and fired to form the second and third multi-cavity wiring boards K similar to the above. The marks A to C are formed so as to be exposed also on the side surface of the wiring board K.
Even in such a multi-cavity wiring board K, the overlap between the mark A formed on the front surface 2 of the insulating layer s1 and the mark C formed on the back surface 5 of the insulating layer s2 is in an appropriate equally divided state shown in FIG. From the above, if there is a range up to the maximum stacking deviation amount (z2) of the insulating layers s1 and s2 shown in FIG. 9, whether there is no printing misalignment and stacking misalignment, or both of these are within the allowable range. Easy to judge. Note that the stacking deviation between the insulating layers s1 and s2 may be inspected according to the overlapping degree of the marks B and C.

図12は、第1〜第3の前記配線基板Kの更に異なる形態の多数個取り用配線基板K1などを示す。
図12の左側に示すように、絶縁層s2の表面4にマーク(第2マーク)Cを、裏面3にマークCよりも長いマーク(第1マーク)Aを形成し、両者の長手方向に沿った長さdA,dCの差を、前記数式2と同様に最大印刷ずれ量z2の2倍としている。尚、かかるマークA,Cも、絶縁層s2の側面にも露出するように形成されている。
上記マークA,C間の平面視における重複程度を、前記図4〜図5と同様に、印刷ずれがないか、許容範囲内とすることで、絶縁層s2の表・裏面4,5に印刷・形成されるランドと接続端子とが、絶縁層s2を貫通するビア導体(図示せず)を介して、確実に導通する中継基板を複数個有する第1の多数個取り用配線基板とすることができる。
FIG. 12 shows a multi-piece wiring board K1 and the like of still another form of the first to third wiring boards K.
As shown on the left side of FIG. 12, a mark (second mark) C is formed on the front surface 4 of the insulating layer s2, and a mark (first mark) A longer than the mark C is formed on the back surface 3, along the longitudinal direction of both. The difference between the lengths dA and dC is set to twice the maximum printing misalignment amount z2 in the same manner as the above formula 2. The marks A and C are also formed so as to be exposed also on the side surface of the insulating layer s2.
The degree of overlap between the marks A and C in a plan view is printed on the front and back surfaces 4 and 5 of the insulating layer s2 so that there is no printing misalignment or within an allowable range, as in FIGS. A first multi-cavity wiring board having a plurality of relay boards in which the formed lands and connection terminals are surely conducted via via conductors (not shown) penetrating the insulating layer s2. Can do.

また、図12の右側に示すように、表・裏面4,5にマーク(第5マーク)Cとマーク(第3マーク)Aとを形成した絶縁層s2の上層側に、表面2にマークCよりも短い最短のマーク(第4マーク)Bを形成した絶縁層s1を積層・焼成して、前記同様の第2,第3の多数個取り用配線基板K1を形成しても良い。即ち、マーク(第5マーク)Cは、マーク(第3マーク)Aよりも短く且つマーク(第4マーク)Bよりも長い。尚、マークA〜Cは、かかる配線基板K1の側面にも露出するように形成されている。
図1,2の前記配線基板Kとは、マークA〜Cが厚み方向に沿った配置が異なる多数個取り用配線基板K1でも、絶縁層s1の表面2に形成したマークBと、絶縁層s2の表面4に形成したマークCとの重複が、図12に示す適正な等分配置の状態から、絶縁層s1,s2間の最大積層ずれ量(z1)までの範囲内にあれば、印刷ずれおよび積層ずれがないか、これらの双方が許容範囲内であるかが、容易に判定できる。尚、マークA,Cの重複程度によって、絶縁層s1,s2間の積層ずれを検査しても良い。
Further, as shown on the right side of FIG. 12, the mark C on the surface 2 is formed on the upper layer side of the insulating layer s2 in which the mark (fifth mark) C and the mark (third mark) A are formed on the front and back surfaces 4 and 5. The insulating layer s1 in which the shorter shortest mark (fourth mark) B is formed may be laminated and fired to form the second and third multi-cavity wiring boards K1 similar to the above. That is, the mark (fifth mark) C is shorter than the mark (third mark) A and longer than the mark (fourth mark) B. The marks A to C are formed so as to be exposed also on the side surface of the wiring board K1.
The wiring board K in FIGS. 1 and 2 is different from the wiring board K1 in which the marks A to C are arranged in the thickness direction, and the mark B formed on the surface 2 of the insulating layer s1 and the insulating layer s2 If the overlap with the mark C formed on the front surface 4 is within the range from the proper equally arranged state shown in FIG. 12 to the maximum stacking misalignment amount (z1) between the insulating layers s1 and s2, the printing misalignment occurs. It can be easily determined whether there is no stacking deviation or both are within the allowable range. Note that the stacking deviation between the insulating layers s1 and s2 may be inspected according to the overlapping degree of the marks A and C.

図13は、第1〜第3の前記配線基板Kの別異なる形態の多数個取り用配線基板K2などを示す。
図13の左側に示すように、絶縁層s2の表面4にマーク(第1マーク)Aを、裏面3にマークAよりも短いマーク(第2マーク)Cを形成し、両者の長手方向に沿った長さdA,dCの差を、前記数式2と同様に最大印刷ずれ量z2の2倍としている。尚、かかるマークA,Cも、絶縁層s2の側面にも露出するように形成されている。
上記マークA,C間の平面視における重複程度を、前記図4〜図5と同様に、印刷ずれがないか、許容範囲内とすることで、絶縁層s2の表・裏面4,5に印刷・形成されるランドと接続端子とが、絶縁層s2を貫通するビア導体(図示せず)を介して、確実に導通する中継基板を複数個有する第1の多数個取り用配線基板とすることができる。
FIG. 13 shows a multi-piece wiring board K2 having different forms of the first to third wiring boards K.
As shown on the left side of FIG. 13, a mark (first mark) A is formed on the front surface 4 of the insulating layer s2, and a mark (second mark) C shorter than the mark A is formed on the back surface 3, along the longitudinal direction of both. The difference between the lengths dA and dC is set to twice the maximum printing misalignment amount z2 in the same manner as the above formula 2. The marks A and C are also formed so as to be exposed also on the side surface of the insulating layer s2.
The degree of overlap between the marks A and C in a plan view is printed on the front and back surfaces 4 and 5 of the insulating layer s2 so that there is no printing misalignment or within an allowable range, as in FIGS. A first multi-cavity wiring board having a plurality of relay boards in which the formed lands and connection terminals are surely conducted via via conductors (not shown) penetrating the insulating layer s2. Can do.

また、図13の右側に示すように、表・裏面4,5にマーク(第5マーク)Aとマーク(第3マーク)Cとを形成した絶縁層s2の上層側に、表面2にマークCよりも短い最短のマーク(第4マーク)Bを形成した絶縁層s1を積層・焼成して、前記同様の第2,第3の多数個取り用配線基板K2を形成しても良い。即ち、マーク(第5マーク)Aは、マーク(第3マーク)Cおよびマーク(第4マーク)Bよりも長い。尚、マークA〜Cは、かかる配線基板K2の側面にも露出するように形成されている。
以上のような多数個取り用配線基板K2によっても、絶縁層s1の表面2に形成したマークBと、絶縁層s2の表面4に形成したマークCとの重複が、図13に示す適正な等分配置の状態から、絶縁層s1,s2間の最大積層ずれ量(z1)までの範囲内にあれば、印刷ずれおよび積層ずれがないか、これらの双方が許容範囲内であるかが、容易に判定できる。尚、マークA,Bの重複程度によって、絶縁層s1,s2間の積層ずれを検査しても良い。
Further, as shown on the right side of FIG. 13, the mark C on the front surface 2 is formed on the upper layer side of the insulating layer s2 in which the mark (fifth mark) A and the mark (third mark) C are formed on the front and back surfaces 4 and 5. The second and third multi-cavity wiring boards K2 may be formed by laminating and firing the insulating layer s1 on which the shorter shortest mark (fourth mark) B is formed. That is, the mark (fifth mark) A is longer than the mark (third mark) C and the mark (fourth mark) B. The marks A to C are formed so as to be exposed also on the side surface of the wiring board K2.
Even with the multi-piece wiring board K2 as described above, the overlap between the mark B formed on the surface 2 of the insulating layer s1 and the mark C formed on the surface 4 of the insulating layer s2 is appropriate as shown in FIG. If it is within the range from the partial arrangement state to the maximum stacking misalignment amount (z1) between the insulating layers s1 and s2, it is easy to determine whether there is no printing misalignment and misalignment or both are within the allowable range. Can be determined. Note that the stacking deviation between the insulating layers s1 and s2 may be inspected according to the overlapping degree of the marks A and B.

図14は、前記配線基板Kの応用形態である多数個取り用配線基板K3の平面図である。かかる配線基板K3は、図14に示すように、前記絶縁層s1,s2からなる絶縁積層体Sにおいて、破線で示す切断予定線cで区画された縦・横それぞれ3個ずつ合計9個の配線基板1と、これらの周囲を囲む耳部mとからなる製品エリアaを、縦・横それぞれ2個ずつ合計4個併有している。4個の製品エリアaは、図14の太い破線で示す切断予定線c1に沿って追って切断される。
図14に示すように、製品エリアaごとの外側面に露出する長辺と短辺との中央付近には、前記配線基板Kと同様に、マーク(第3マーク)Aと図示しないマーク(第4,第5マーク)B,Cとが、前記図4,図8の印刷ずれおよび積層ずれのない適正な配置から、前記図5,図9の最大印刷ずれおよび最大積層ずれが許容可能な範囲までの間で形成されている。
FIG. 14 is a plan view of a multi-cavity wiring board K3 which is an applied form of the wiring board K. FIG. As shown in FIG. 14, the wiring board K3 has a total of nine wirings in the insulating laminate S composed of the insulating layers s1 and s2, each having three vertical and horizontal sections separated by the predetermined cutting line c indicated by a broken line. A total of four product areas a each consisting of the substrate 1 and the ears m surrounding the substrate 1 are provided in both vertical and horizontal directions. The four product areas a are cut along the planned cutting line c1 indicated by the thick broken line in FIG.
As shown in FIG. 14, in the vicinity of the center of the long side and the short side exposed on the outer surface of each product area a, as in the case of the wiring board K, a mark (third mark) A and a mark (not shown) 4, fifth mark) B and C are within a range in which the maximum printing shift and the maximum stacking shift of FIG. 5 and FIG. 9 are allowable from the proper arrangement without the printing shift and the stacking shift of FIG. Is formed between.

また、隣接する製品エリアa,a間の耳部mにおいて、その中間を通る切断予定線c1における中央付近には、当該切断予定線c1にまたがって、平面視がほぼ正方形(矩形)に近い前記同様のマーク(第3マーク)Aと、図示しないマーク(第4,第5マーク)B,Cとが、前記と同様な重複範囲で形成されている。
以上のような多数個取り用配線基板K3によれば、外側面に露出するマーク(第4,第5マーク)B,Cにより、前記絶縁層s2の表面4と裏面5との印刷ずれの有無および合否が判定できると共に、絶縁層s1の表面2に形成したマークAと絶縁層s2の裏面5に形成したマークCとの重複程度により、絶縁層s1,s2間の積層ずれの有無およびその合否が判定できる。更に、切断予定線c1に沿って、切断した際に得られる製品エリアaごとの切断面(側面)に露出するマークA〜Cによっても、上記と同様の印刷ずれおよび積層ずれの有無とその合否とが容易に判定できる。
尚、多数個取り用配線基板K3におけるマークA〜Cの配置は、前記図11〜図13のそれぞれ右側に示した形態としても良い。
Moreover, in the ear | edge part m between adjacent product areas a and a, the planar view is nearly square (rectangular) near the center of the planned cutting line c1 passing through the middle across the planned cutting line c1. A similar mark (third mark) A and unillustrated marks (fourth and fifth marks) B and C are formed in the same overlapping range as described above.
According to the multi-cavity wiring board K3 as described above, the presence or absence of printing misalignment between the front surface 4 and the rear surface 5 of the insulating layer s2 due to the marks (fourth and fifth marks) B and C exposed on the outer surface. In addition, the presence or absence of misalignment between the insulating layers s1 and s2 and the acceptance or non-existence can be determined by the degree of overlap between the mark A formed on the front surface 2 of the insulating layer s1 and the mark C formed on the back surface 5 of the insulating layer s2. Can be determined. Further, whether or not there is the same printing misalignment and stacking misalignment as well as the pass / fail due to the marks A to C exposed on the cut surface (side surface) for each product area a obtained by cutting along the planned cutting line c1. Can be easily determined.
The arrangement of the marks A to C on the multi-cavity wiring board K3 may be in the form shown on the right side of FIGS.

前記多数個取り用配線基板K,K1〜K3は、絶縁層を3層以上積層した絶縁積層体Sとした形態としても良い。
また、前記マークA〜Cは、多数個取り用配線基板K,K1〜K3の外側面における任意の位置に、1組または2組以上を形成しても良い。
更に、前記マークは、長手方向の長さが互いに異なる4種類またはそれ以上を複数の絶縁層からなる多数個取り用配線基板に適用しても良い。
加えて、前記絶縁層を例えばBT樹脂からなるコア基板や、樹脂フィルムまたは樹脂層からなり、これらを積層した多数個取り用配線基板とし、これらの表・裏面に、フォトグラフィー技術によって、マークA〜Cを、内部配線パターン、ビア導体、ランド、および接続端子と同じくCuメッキによって形成することも可能である。
The multi-cavity wiring boards K, K1 to K3 may be configured as an insulating laminate S in which three or more insulating layers are laminated.
Further, the marks A to C may be formed in one set or two or more sets at arbitrary positions on the outer surface of the multi-cavity wiring boards K and K1 to K3.
Furthermore, the mark may be applied to a multi-piece wiring board composed of a plurality of insulating layers of four or more different lengths in the longitudinal direction.
In addition, the insulating layer is made of, for example, a core substrate made of a BT resin, a resin film or a resin layer, and a multi-piece wiring substrate made by laminating them, and the mark A ˜C can be formed by Cu plating as well as the internal wiring pattern, via conductor, land, and connection terminal.

本発明による第2,3の多数個取り用配線基板の一形態を示す平面図。The top view which shows one form of the wiring board for the 2nd and 3rd multiple picking by this invention. 図1の多数個取り用配線基板を示す斜視図。The perspective view which shows the wiring board for multi-piece taking of FIG. 図1の多数個取り用配線基板の部分側面図。FIG. 2 is a partial side view of the multi-cavity wiring board of FIG. 1. 本発明における第1の多数個取り用配線基板を示す概略図。Schematic which shows the 1st multi-cavity wiring board in this invention. 上記とマークの位置が異なる多数個取り用配線基板を示す概略図。Schematic which shows the wiring board for multi-pieces from which the position of a mark differs from the above. 上記とマークの位置が更に異なる多数個取り用配線基板を示す概略図。Schematic which shows the wiring board for multi-piece picking from which the position of the mark differs further from the above. 本発明による第2,第3の多数個取り用配線基板を示す概略図。Schematic which shows the 2nd, 3rd multi-cavity wiring board by this invention. 図7の多数個取り用配線基板を示す概略図。Schematic which shows the wiring board for multi-cavity of FIG. 上記とマークの位置が異なる多数個取り用配線基板を示す概略図。Schematic which shows the wiring board for multi-pieces from which the position of a mark differs from the above. マークの位置が更に異なる多数個取り用配線基板を示す概略図。Schematic which shows the wiring board for multi-piece picking from which the position of a mark differs further. マークの配置が異なる多数個取り用配線基板を示す概略図。Schematic which shows the wiring board for multi-piece taking from which arrangement | positioning of a mark differs. マークの配置が更に異なる多数個取り用配線基板を示す概略図。Schematic which shows the wiring board for multi-piece taking from which arrangement | positioning of a mark differs further. マークの配置が別異なる多数個取り用配線基板を示す概略図。Schematic which shows the wiring board for multi-piece picking from which arrangement | positioning of a mark differs. 前記多数個取り用配線基板の応用形態を示す平面図。The top view which shows the application form of the said multi-cavity wiring board.

符号の説明Explanation of symbols

A…………………マーク(第1マーク/第3マーク/第5マーク)
B…………………マーク(第2マーク/第4マーク/第5マーク)
C…………………マーク(第1マーク/第3マーク/第4マーク/第5マーク)
K,K1〜K3…多数個取り用配線基板
s1,s2………絶縁層
2,4……………表面
3,5……………裏面
dA〜dC………長さ
n…………………中心線
A ……………… Mark (1st mark / 3rd mark / 5th mark)
B ………………… Mark (2nd mark / 4th mark / 5th mark)
C …………… Mark (1st mark / 3rd mark / 4th mark / 5th mark)
K, K1 to K3 ... Multi-use wiring board s1, s2 ... Insulating layer 2, 4 ... ... Front surface 3, 5 ... ... Back side dA to dC ... ... Length n ... ………… Center line

Claims (4)

絶縁層の表面および裏面に、平面視で矩形を呈する第1マークと第2マークとの何れか一方が形成され、
上記第1マークと第2マークとの多数個取り用配線基板の側面に露出する長さは、第1マークが第2マークよりも長いと共に、
上記第1マークと第2マークとは、上記多数個取り用配線基板の厚み方向において互いに重複している、
ことを特徴とする多数個取り用配線基板。
On the front surface and the back surface of the insulating layer, either one of the first mark and the second mark having a rectangular shape in plan view is formed,
The length of the first mark and the second mark exposed on the side surface of the multi-cavity wiring board is such that the first mark is longer than the second mark,
The first mark and the second mark overlap each other in the thickness direction of the multi-cavity wiring board,
A wiring board for multi-piece production characterized by the above.
複数の絶縁層を積層してなる多数個取り用配線基板の上下に隣接する2層の絶縁層の表面および裏面に、平面視で矩形を呈する第3マークと第4マークとの何れか一方が形成され、
上記多数個取り用配線基板の側面に露出する長さは、第3マークが第4マークよりも長いと共に、
上記第3マークと第4マークとは、上記多数個取り用配線基板の厚み方向において互いに重複している、
ことを特徴とする多数個取り用配線基板。
On the front and back surfaces of two insulating layers adjacent to each other on the upper and lower sides of a multi-piece wiring board formed by laminating a plurality of insulating layers, either one of a third mark and a fourth mark that are rectangular in a plan view is provided. Formed,
The length exposed on the side surface of the multi-cavity wiring board is such that the third mark is longer than the fourth mark,
The third mark and the fourth mark overlap each other in the thickness direction of the multi-cavity wiring board,
A wiring board for multi-piece production characterized by the above.
前記第3マークと第4マークとの間に位置する絶縁層の表面または裏面に、平面視で矩形を呈する第5マークが形成され、
前記多数個取り用配線基板の側面に露出する第5マークの長さは、第3マークよりも短く且つ第4マークよりも長いか、または、第3マークおよび第4マークよりも短いか、あるいは、第3マークおよび第4マークよりも長い、
ことを特徴とする請求項2に記載の多数個取り用配線基板。
A fifth mark having a rectangular shape in plan view is formed on the front or back surface of the insulating layer located between the third mark and the fourth mark,
The length of the fifth mark exposed on the side surface of the multi-cavity wiring board is shorter than the third mark and longer than the fourth mark, or shorter than the third mark and the fourth mark, or , Longer than the third and fourth marks,
The multi-cavity wiring board according to claim 2, wherein:
前記第1マークと第2マークとの重複、前記第3マークと第4マークとの重複、あるいは、前記第3マークまたは第4マークと第5マークとの重複は、各マークの矩形の幅方向に沿った中心線同士が平面視で一致する形態から、各マークの矩形の長手方向における同じ端部の短辺同士が前記絶縁層の厚み方向で一致する形態までの範囲にある、
ことを特徴とする請求項1乃至3の何れか一項に記載の多数個取り用配線基板。
The overlap between the first mark and the second mark, the overlap between the third mark and the fourth mark, or the overlap between the third mark or the fourth mark and the fifth mark is the width direction of the rectangle of each mark. In the range from the form in which the center lines along the line coincide with each other in a plan view, the form in which the short sides of the same end in the longitudinal direction of the rectangle of each mark coincide in the thickness direction of the insulating layer,
The multi-cavity wiring board according to any one of claims 1 to 3, wherein:
JP2005290308A 2005-10-03 2005-10-03 Wiring board for multi-cavity Expired - Fee Related JP4309882B2 (en)

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