JP2009147397A - Inspection mark structure, substrate sheet laminate, multilayer circuit board, method of inspecting lamination matching precision of multilayer circuit board, and method of designing substrate sheet laminate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection mark structure for objectively inspecting lamination matching precision. <P>SOLUTION: The inspection mark structure 90 includes: a via hole 1a for inspection provided in one of substrate sheets for composing at least two layers of substrate sheet laminates; a land pattern electrode 1b that is formed at one side of the substrate sheet in which the via hole 1a is provided and is provided on the periphery of an end face 1f of the via hole 1a for inspection in contact with the end face 1f; and an electrode 1c for continuity formed at the other side of the substrate sheet where the via hole 1a for inspection is provided and electrically connected to the end face 1f of the via hole 1a for inspection. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an inspection mark structure, a substrate sheet laminate, a multilayer circuit substrate, a method for inspecting the lamination match accuracy of a multilayer circuit substrate, and a method for designing a substrate sheet laminate.

  With the downsizing and higher density of electronic devices, the demand for multilayer circuit boards is increasing not only for industrial use but also for consumer use.

  Multi-layer circuit boards are constructed by laminating a plurality of substrates with conductive via holes and electrode patterns on the surface of a substrate material made of ceramic, prepreg, etc. Densification can be achieved.

  In such a multilayer circuit board, securing a high yield becomes a problem. A multilayer circuit board is completed by laminating a plurality of substrates and performing heat treatment and pressure bonding (hereinafter referred to as hot press processing). However, if a deviation occurs in the lamination position of each substrate, Connection failures such as via holes and short-circuiting between electrodes occur, resulting in defective products. In particular, in the case of a multilayer circuit board having a structure in which interlayer connection is performed using a conductive paste, such as ALIVH (registered trademark), the displacement of each board is more likely to occur due to the extension of the material that occurs during hot pressing.

  Since it is impossible to correct the misalignment of the stacked positions in the completed multilayer circuit board, it is important to improve the stacking matching accuracy of each board in improving the yield of the multilayer circuit board. In addition, with the demand for higher density of multilayer circuit boards, the number of stacked boards and circuit pattern miniaturization have progressed. It is desired to increase the matching accuracy.

  Therefore, various preliminary inspections are performed in order to ensure the stacking matching accuracy of the multilayer circuit board. As an example, when inspecting the stacking match accuracy, an inspection is performed by an X-ray transmission device using a mark structure for recognizing a positional deviation of a via hole or a circuit pattern layer in each layer constituting a multilayer circuit board ( For example, see Patent Document 1).

  Hereinafter, a conventional inspection mark structure of a multilayer circuit board and an inspection of stacking match accuracy using the same will be described.

  FIG. 18A is a view showing a multilayer circuit board formed by hot pressing a substrate sheet laminate provided with a conventional inspection mark structure, and is drawn as a perspective view so that the arrangement of the inspection mark structure can be understood. . FIG. 18B is a plan view schematically showing the inspection mark structure of FIG.

  As shown in each figure, the multilayer circuit board 100 is configured by laminating a plurality of layers having via holes 101 formed by filling through-holes in the thickness direction with a conductive material via circuit electrodes 102. . By connecting the via hole 101 of each substrate to the circuit electrode 102, an electric circuit is formed inside.

  Further, in addition to the via hole 101, each substrate has inspection via holes 103, 104, 105, 106, and 107 as inspection marks for inspecting the alignment accuracy of the stack from the stacking direction shown in FIG. The inspection mark structure 110 is configured by these inspection via holes arranged at positions that do not overlap each other.

In the stacking alignment accuracy inspection, the inspection mark structure 110 on the multilayer circuit board 100 is observed from the stacking direction of FIG. 18B using an X-ray transmission device. If the shape of the inspection mark structure appears to be distorted from the shape at the time of lamination, it is determined that a positional shift has occurred. In addition, by observing the shape of the distortion of the inspection mark structure, the direction of the substrate where the positional deviation has occurred and the amount of the positional deviation are discriminated, and the quality of the multilayer circuit board 100 is selected.
JP 2000-340950 A

  However, the stacking alignment accuracy inspection using the above-described conventional inspection mark structure has the following problems.

  The conventional stacking alignment accuracy inspection uses an X-ray transmission device, but the determination of misalignment is ultimately made by visual inspection by the inspector, so there is a possibility that misalignment occurs and the location is erroneously recognized. In addition, there is a possibility of misrecognition in the determination of the amount of positional deviation.

  The present invention has been made in view of the above problems, and can be used for objectively inspecting the stacking match accuracy, and the stacking match accuracy of the inspection mark structure, the substrate sheet laminate, the multilayer circuit board, and the multilayer circuit board. It is an object of the present invention to provide an inspection method and a design method for a substrate sheet laminate.

In order to achieve the above object, the first aspect of the present invention includes an inspection via hole provided in any of the substrate sheets constituting the substrate sheet laminate of at least two layers,
A land pattern electrode formed on one surface side of the substrate sheet provided with the inspection via hole, and provided around the end surface of the inspection via hole with a predetermined distance not in contact with the end surface;
An inspection mark structure comprising a conduction electrode formed on the other surface side of the substrate sheet provided with the inspection via hole and provided to be electrically connected to an end surface of the inspection via hole; is there.

  A second aspect of the present invention is the inspection mark structure according to the first aspect of the present invention, wherein the land pattern electrode has a shape surrounding the end face of the inspection via hole without a break.

  According to a third aspect of the present invention, the shape of the land pattern electrode surrounding the end face of the inspection via hole without a break is similar to the shape of the end face of the inspection via hole. It is an inspection mark structure of the present invention.

  According to a fourth aspect of the present invention, the shape of the land pattern electrode surrounding the end face of the inspection via hole seamlessly has a shape that is not similar to the shape of the end face of the inspection via hole. This is an inspection mark structure of the present invention.

  A fifth aspect of the present invention is the inspection mark structure according to the first aspect of the present invention, wherein the land pattern electrode has a shape surrounding the end surface of the inspection via hole with a cut.

  According to a sixth aspect of the present invention, there is provided the inspection mark structure according to the fifth aspect, wherein the land pattern electrode is composed of a plurality of sub-pattern electrodes provided around the end face of the inspection via hole. .

  A seventh aspect of the present invention is the inspection mark structure according to the sixth aspect of the present invention, wherein the sub-pattern electrode is arranged point-symmetrically with respect to the end face of the inspection via hole.

  The eighth aspect of the present invention is the inspection mark structure according to the seventh aspect of the present invention, wherein two or four sub-pattern electrodes having the same shape are provided at equal intervals around the end face of the inspection via hole. It is.

The ninth aspect of the present invention is an inspection mark structure group comprising a plurality of inspection mark structures of the first aspect of the present invention,
The predetermined distance between the land pattern electrode and the periphery of the end face of the inspection via hole is an inspection mark structure group that is different for all or a part of the inspection mark structures.

A tenth aspect of the present invention is an inspection mark structure group including a plurality of inspection mark structures of the fourth aspect of the present invention,
The land pattern electrode of each inspection mark structure has the same shape that surrounds the periphery of the end face of the inspection via hole seamlessly,
The arrangement of the shapes is a group of inspection mark structures that do not match each other.

Further, an eleventh aspect of the present invention is the above-described inspection mark structure,
The shape of the end face of the inspection via hole is circular,
The shape of the land pattern electrode surrounding the end face of the inspection via hole without interruption is an ellipse or an ellipse,
The ellipse or ellipse of each shape is a group of inspection mark structures according to the tenth aspect of the present invention, which are orthogonal to each other.

A twelfth aspect of the present invention includes a plurality of substrate sheets having via holes,
Circuit electrodes provided in layers of the plurality of substrate sheets;
It is a board | substrate sheet laminated body provided with the inspection mark structure of 1st this invention formed in the layer of the said some board | substrate sheet | seat.

Further, in the thirteenth aspect of the present invention, there are a plurality of the inspection mark structures,
The shape of the land pattern electrode in the inspection mark structure surrounding the end surface of the inspection via hole without a break has a shape that is not similar to the shape of the end surface of the inspection via hole,
The land pattern electrode of each inspection mark structure has the same shape that surrounds the periphery of the end face of the inspection via hole seamlessly,
The arrangement of the shapes is the substrate sheet laminate of the twelfth aspect of the present invention, which does not match each other.

  The fourteenth aspect of the present invention is a multilayer circuit board formed by hot pressing the substrate sheet laminate of the twelfth aspect of the present invention.

According to a fifteenth aspect of the present invention, there is provided an inspection via hole provided in any one of the substrate sheets constituting the substrate sheet laminate of at least two layers;
A land pattern electrode formed on one surface side of the substrate sheet provided with the inspection via hole, provided around the end surface of the inspection via hole so as to be in contact with the end surface;
An inspection mark structure comprising a conduction electrode formed on the other surface side of the substrate sheet provided with the inspection via hole and provided to be electrically connected to an end surface of the inspection via hole; is there.

  According to a sixteenth aspect of the present invention, the land pattern electrode includes a plurality of sub-pattern electrodes that are provided around the end face of the inspection via hole and each contact the end face. This is an inspection mark structure.

  A seventeenth aspect of the present invention is the inspection mark structure according to the sixteenth aspect of the present invention, wherein the sub-pattern electrode is arranged point-symmetrically with respect to the end face of the inspection via hole.

An eighteenth aspect of the present invention is an inspection mark structure group including a plurality of inspection mark structures of the fifteenth aspect of the present invention,
In the inspection mark structure group, the outer diameter of the end face of the inspection via hole is different for all or part of the inspection mark structures.

The nineteenth aspect of the present invention provides a plurality of substrate sheets having via holes,
Circuit electrodes provided in layers of the plurality of substrate sheets;
It is a board | substrate sheet | seat laminated body provided with the inspection mark structure of 15th this invention formed in the layer of the said some board | substrate sheet | seat.

The twentieth aspect of the present invention is a plurality of the inspection mark structures,
The size of the contact portion between the end face of the inspection via hole in the inspection mark structure and the land pattern electrode differs for all or a part of the plurality of inspection mark structures. It is a laminate.

  The 21st aspect of the present invention is a multilayer circuit board formed by hot pressing the substrate sheet laminate of the 18th aspect of the present invention.

A twenty-second aspect of the present invention includes a plurality of substrate sheets having via holes,
Circuit electrodes provided in layers of the plurality of substrate sheets;
One of the inspection via holes provided in any of the substrate sheets constituting the substrate sheet laminate of at least two layers formed in the plurality of substrate sheet layers, and one of the substrate sheets provided with the inspection via holes A land pattern electrode formed on the surface side of the inspection via hole and provided around the end face of the inspection via hole at a predetermined distance not in contact with the end face or in contact with the end face; and the inspection via hole An inspection mark structure including a conduction electrode formed on the other surface side of the substrate sheet provided with a conductive electrode provided to be electrically connected to an end surface of the inspection via hole;
A method for inspecting the multilayer conformity of a multilayer circuit board having
Electrically connecting the conductive electrode of the inspection mark structure and the land pattern electrode;
(A) In the case of the inspection mark structure having the land pattern electrode at a predetermined distance not in contact with the end face around the end face of the inspection via hole, when there is no conduction due to the connection, (B In the case of the inspection mark structure having the land pattern electrode provided in contact with the end surface around the end surface of the inspection via hole,
A method of inspecting the multilayer matching accuracy of a multilayer circuit board, comprising the step of determining that the multilayer matching accuracy is maintained.

  In the twenty-third aspect of the invention, the stacking matching accuracy is at least one of the presence / absence of a positional deviation, the direction of the positional deviation, and the magnitude of the positional deviation between the substrates constituting the multilayer circuit board. This is a method for inspecting the multilayer matching accuracy of the multilayer circuit board of the present invention.

According to a twenty-fourth aspect of the present invention, there is provided an inspection provided on any of the substrate sheets constituting at least two layers of the substrate sheet laminate formed on the plurality of substrate sheet layers having via holes under predetermined design conditions. A predetermined distance not in contact with the end surface, or around the end surface of the inspection via hole formed on one surface side of the substrate sheet provided with the inspection via hole and the end surface Provided to be in electrical contact with an end face of the inspection via hole formed on the other surface side of the substrate sheet provided with the land pattern electrode and the inspection via hole provided in contact with each other. And stacking the plurality of substrate sheets having the inspection mark structure formed thereon so that the circuit electrodes are positioned between the plurality of substrate sheets. A step of forming,
A step of hot pressing the test substrate sheet laminate to create a test multilayer circuit board;
The step of acquiring the direction of misalignment or the magnitude of misalignment of the substrate as the laminating match accuracy of the test multilayer circuit board using the inspection method of the multilayer match accuracy of the multilayer circuit board according to the twenty-second aspect of the present invention. When,
It is a design method for a substrate sheet laminate, which includes a step of correcting the predetermined design condition using the acquired direction of displacement of the substrate or the magnitude of displacement.

  The twenty-fifth aspect of the present invention is the method for designing a substrate sheet laminate according to the twenty-fourth aspect of the present invention, wherein the predetermined design condition is a lamination position of each of the plurality of substrate sheets.

  According to the present invention, an inspection mark structure, a substrate sheet laminate, a multilayer circuit board, a multilayer circuit board inspection method for multilayer match accuracy, and a substrate sheet laminate can be objectively inspected. A design method can be provided.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
FIG. 1A is a diagram schematically showing a configuration of an inspection mark structure of a multilayer circuit board according to Embodiment 1 of the present invention, and FIG. 1B is a schematic view of the main part of FIG. FIG. However, the same or corresponding parts as those in FIG.

  As shown in FIG. 1, the inspection mark structure of the multilayer circuit board according to the present embodiment is provided in the board sheet laminate 10 before being completed by hot pressing.

  The substrate sheet laminate 10 is formed by laminating substrate sheets 11a to 11e, each substrate sheet is provided with a via hole 101, and circuit electrodes 102 constituting an internal circuit are arranged between the substrate sheet layers. By connecting the via hole 101 of each substrate to the circuit electrode 102, an electric circuit 12 is formed inside.

  Next, the inspection mark structure will be described taking the inspection mark structure 1 formed between the substrate sheets 11c and 11d shown in FIG. 1A as an example. As shown in FIG. 1A, an inspection mark structure 1 includes an inspection via hole 1a provided in a substrate sheet 11d, land pattern electrodes 1b and conductive electrodes provided on both main surfaces of the substrate sheet 11d. 1c. In addition, each electrode which comprises the test mark structure 1 and each electrode which comprises the electric circuit 12 are formed by the same patterning in each surface of the board | substrate sheets 11a-11e.

  The conducting electrode 1c has a flat plate shape with a rectangular outer shape, and is in contact with the end face 1f of the inspection via hole 1a.

  On the other hand, as shown in FIG. 1B, the land pattern electrode 1b has a flat plate shape similar to that of the conductive electrode, and on the main surface of the substrate sheet 11d on the side where the conductive electrode 1c is not formed. In addition, an opening 1e is provided in the center, and the end face 1f of the inspection via hole 1a is located in the opening 1e and is disposed so as not to contact the electrode portion.

  Next, FIG. 2A shows a schematic plan view of the inspection mark structure 1, and FIG. 2B shows a schematic cross-sectional view taken along the line AA 'of FIG. 2A. As shown in FIG. 2A, the shape of the end face 1f of the inspection via hole 1a and the shape of the opening 1e of the land pattern electrode 1b are located concentrically, and the inspection via hole 1a and the land pattern electrode 1b There is an equidistant distance D between them. Here, in general, as the shape of the opening 1e, an inverted shape of a land electrode used for the circuit electrode 102 is used.

  On the other hand, as shown in FIG. 1B, the land pattern electrode 1 b and the conductive electrode 1 c are provided with wirings 2 a that are led out to the outside of the substrate sheet laminate 10. The wiring 2a is used to connect to a galvanometer in the board sheet laminate 10 in a state completed as a multilayer circuit board after hot pressing.

  With reference to FIGS. 3 (a) and 3 (b), the principle of the method for inspecting the stacking alignment accuracy of the multilayer circuit board using the multilayer circuit board inspection mark structure of the present embodiment having the above-described configuration will be described below. Explained.

  As described in the section of the prior art, a multilayer circuit board is formed by laminating a plurality of board sheets in which circuit electrodes 102 are arranged at predetermined positions between layers to form a board sheet laminate, which is subjected to hot pressing. Although it is completed by processing, if a deviation occurs between the substrate sheets during hot press processing, a contact failure between the circuit electrodes 102 is caused, causing a failure of the electric circuit 12.

  In the inspection mark structure of the multilayer circuit board according to the present embodiment, as shown in FIG. 3A, in the state where the substrate sheet laminate 10 is formed, the inspection is performed between the substrate sheet 11c and the substrate sheet 11d. The end face 1f of the via hole 1a for use and the land pattern electrode 1b are arranged so as not to contact each other at a distance D.

  Next, when a multilayer circuit board is completed by hot pressing, if a positional shift occurs between the board sheets, the inspection via hole 1a embedded in the board sheet 11d moves with the movement of the board sheet 11d ( The land pattern electrode 1b located between the substrate sheet 11c and the substrate sheet 11d is dragged by the displacement of the substrate sheet 11c or the substrate sheet 11d when the displacement occurs. To do.

  At this time, when the moving distance becomes larger than the distance D between the opening 1e and the end face 1f of the inspection via hole 1a, as shown in FIG. 3B, the end face 1f of the inspection via hole 1a and the land pattern electrode 1b come into contact with each other. . In FIG. 3B, the substrate sheet 11c is displaced from the original position.

  Therefore, it is possible to determine the presence or absence of positional deviation by connecting the wiring 2a of the completed multilayer circuit board to the galvanometer 2b and inspecting the presence or absence of conduction. That is, as shown in FIG. 3A, when there is no misalignment, the conduction circuit formed by the wiring 2a, the land pattern electrode 1b, the inspection via hole 1a, and the conduction electrode 1c is connected to the end face 1f of the inspection via hole 1a and the land. Since the pattern electrode 1b is not in contact with the galvanometer 2b, no conduction occurs even if the galvanometer 2b is connected.

  On the other hand, when the end face 1f of the inspection via hole 1a comes into contact with the land pattern electrode 1b due to the displacement between the substrate sheets, the conduction circuit is completed, and conduction can be confirmed when the galvanometer 2b is connected.

  As described above, when the inspection mark structure according to the present embodiment is used, an inspection method of the multilayer matching accuracy of the multilayer circuit board that can objectively determine the presence / absence of a positional deviation is performed by eliminating erroneous recognition based on visual observation or the like. It becomes possible.

  Here, the tolerance of displacement is determined by the distance D between the opening 1e and the end face 1f of the inspection via hole 1a. By determining the shape of the opening 1e as the inverted shape of the land electrode of the circuit electrode 102, the presence or absence of misalignment due to the galvanometer 2b is a deviation from the allowable limit of the design error of the electric circuit 12 in the completed multilayer circuit board. It will be detected as the presence or absence of.

  Therefore, if the distance D is adjusted by changing the size of the opening 1e or the size of the inspection via hole 1a, the number of stacked layers in the required multilayer circuit board, the number of layers depending on the miniaturization of the circuit pattern, etc. An inspection based on the matching accuracy can be executed based on an objective judgment.

  Next, the arrangement of the inspection mark structure on the substrate sheet laminate 10 will be described.

  FIG. 4 is a plan view showing an example of the substrate sheet laminate 10. In FIG. 4, the substrate sheet laminate 10 is designed so that substrate units 44 each having eight multilayer circuit boards as a unit are arranged in a matrix within a rectangular boundary 40 that defines a surplus area after hot pressing. The The electric circuit 12 is formed in the substrate sheet laminate 10 according to each multilayer circuit board. The inspection mark structure is formed so as to be positioned at least at positions 42 a and 42 b on the diagonal line within the boundary 40. The positional deviation of the substrate sheet laminated body 10 is likely to occur at the edge, and the inspection accuracy can be increased by providing the substrate sheet laminated body 10 at positions close to each other.

  The positions where the inspection mark structure is provided may be provided as positions 43a and 43b on a diagonal line in the boundary 41 inside the boundary 40 in the drawing. When there is a change in the expansion coefficient or the like at a position on the plane of the substrate sheet by hot pressing between the boundary 40 near the edge and the boundary 41 near the center in the entire substrate sheet laminate 10, the position 42a (42b) In some cases, the inspection result at and the inspection result at the position 43a (43b) may be easily detected.

  Further, the inspection mark structure may be provided for each board unit 44, or may be provided on each multilayer circuit board cut out from the board unit 44. In this case, the inspection can be performed in units of board units or in units of multilayer circuit boards. Further, the inspection mark structure itself can be used as a product identifier.

  In the example shown in FIG. 1A, the inspection via hole 1a and the land pattern electrode 1b in the inspection mark structure are provided on the same substrate sheet in each substrate sheet before lamination in order to correspond to the patterning of the circuit electrode 102. It is divided into what was provided, and what was each provided in the opposing board | substrate sheet | seat.

  However, the land pattern electrodes are necessarily arranged between the layers in the laminated substrate sheet, and the influence of misalignment due to hot press processing is caused by the inspection via holes 1a and the land pattern electrodes 1b in each substrate sheet before lamination. It can be considered that this occurs regardless of the arrangement relationship. In the present embodiment, the inspection via hole 1a in the inspection mark structure 1 is formed on the substrate sheet 11d and the land pattern electrode 1b is formed on the substrate sheet 11c. However, the inspection via hole 1a adjacent thereto is formed. Even in the configuration in which the land pattern electrode 1b is formed on the same substrate sheet 11c, the effects of the present invention can be obtained in the same manner.

(Embodiment 2)
FIG. 5A is a schematic plan view of the inspection mark structure group of the multilayer circuit board according to the second embodiment of the present invention, and FIG. 5B is the AA ′ line of FIG. 5A, respectively. It is typical sectional drawing by.

  As shown in each drawing, in the present embodiment, a pair of inspection mark structures 50a and 50b having an elliptical shape orthogonal to each other as the shape of the opening 1e of the land pattern electrode 1b are provided on the same substrate sheet 11d. It is a mark structure group. Detailed description will be given below.

  As shown in FIG. 5A, in the inspection mark structure 50a, the opening 1e of the land pattern electrode 1b has an elliptical shape having the major axis in the Y-axis direction in the figure, and the end face 1f of the inspection via hole 1a. The distance from the land pattern electrode 1b was set to the same distance D as that of the first embodiment on the long axis side, and the distance D ′ larger than the distance D on the short axis side.

  Further, in the inspection mark structure 50b, the opening 1e 'of the land pattern electrode 1b' has an elliptical shape having the minor axis in the Y-axis direction in the figure, and the end face 1f 'of the inspection via hole 1a' and the land pattern electrode 1b. The distance between the first axis and the second axis is a distance D similar to that of the first embodiment on the short axis side, and a distance d on the long axis side.

  The openings 1e and 1e 'have the same dimensions except for the arrangement in the land pattern electrode. The land pattern electrodes 1b and 1b 'and the conducting electrodes 1c and 1c' have the same dimensions. In addition, each inspection mark structure is such that wiring is drawn out independently (not shown), and continuity can be checked.

  Thereby, the following effects are acquired. That is, when a positional deviation occurs between the substrate sheets, the X-axis direction in the drawing and the Y-axis in the drawing corresponding to the elliptical long axis or short axis side of each opening with respect to the movement of the land pattern electrodes 1b and 1b ′. Since the distance between the end faces is different depending on the direction, the accuracy of detecting the displacement is also different in both the X and Y directions.

  Therefore, after preparing the substrate sheet laminate 10 including the pair of inspection mark structures 50a and 50b of FIG. 5 as the inspection mark structure group and heat-pressing this to complete the multilayer circuit board, the inspection mark structure 50a, By individually checking the continuity for 50b, it is possible to objectively determine the direction of positional deviation.

  As a result of the check, (1) conduction is not confirmed in either of the inspection mark structures 50a and 50b, (2) conduction is confirmed only in the inspection mark structure 50a, (3) conduction is confirmed only in the inspection mark structure 50b, (4 4) There are four ways in which conduction is confirmed in both the inspection mark structures 50a and 50b.

  Of these, from the check result of (2), it is possible to determine that the positional deviation of the substrate sheet 11d has occurred in the X-axis direction in the figure. Further, from the check result of (3), it can be determined that the positional deviation of the substrate sheet 11d has occurred in the Y-axis direction in the figure. The check result in (1) indicates that no misalignment occurs, and the check result in (4) shows that a misalignment far exceeding the allowable limit occurs on both the X axis and Y axis in the figure. Indicates that

  As described above, according to the inspection mark structure group of the present embodiment, it is possible to objectively determine the direction of misalignment in addition to the presence or absence of misalignment.

  In the above configuration, the shape of the opening 1e (1e ') is an ellipse, but it may be an ellipse, that is, a shape in which opposing semicircles are connected by a straight line, or an oval shape. Furthermore, a rectangle may be sufficient. In short, in the shape of the opening, in the pair of inspection mark structures, the distance between the inspection via hole and the land pattern electrode is different from each other in two directions orthogonal to each other, and the directions of the distances are different from each other. If it is a thing, the effect similar to the structure of FIG. 5 is acquired.

  Further, the difference in distance between the end face 1f (1f ') of the inspection via hole 1a (1a') and the land pattern electrode 1b (1b ') in the opening 1e (1e') is limited to two orthogonal directions. Not.

  6A and 6B are diagrams showing another configuration of the inspection mark structure group according to the present embodiment. As shown in FIG. 6A, a pair of inspection mark structures 51a and 51b each having land pattern electrodes 1b and 1b 'provided with equilateral triangular openings 1e and 1e' having different orientations as the shapes of the openings. As a result, the positional deviation between the substrate sheets has occurred in the three-axis directions described by the coordinates (α, β, γ) in FIG. 6A, or coordinates obtained by rotating these coordinates by 60 °. It is possible to determine whether it has occurred in the three-axis directions described by (α ′, β ′, γ ′).

(Embodiment 3)
FIG. 7A is a schematic plan view of the inspection mark structure of the multilayer circuit board according to the third embodiment of the present invention, and FIG. 7B is a schematic view taken along the line AA ′ in FIG. FIG.

  FIG. 8 is a perspective view schematically showing the main part of FIG. In each figure, the same or corresponding parts as those in FIGS. 1 and 2 are denoted by the same reference numerals.

  The inspection mark structure 70 according to the third embodiment is characterized in that four sub-pattern electrodes 3a to 3d are provided around the end face 1f of the inspection via hole 1a in place of the land pattern electrode 1b of the first embodiment. To do.

  As shown in FIG. 7A, the sub-pattern electrodes 3a to 3d are substantially the same in outline as the land pattern electrode 1b, but are divided along a diagonal of the square shape. An independent electrode is formed. Further, the distance between the end portion of each of the sub-pattern electrodes 3a to 3d and the end face 1f of the inspection via hole 1a is equal distance D.

  As shown in FIG. 8, in the inspection mark structure according to the third embodiment, the sub-pattern electrodes 3a to 3d are connected to independent wirings 4a to 4d, respectively. On the other hand, the inspection via hole 1a and the conducting electrode 1c have the same structure as that of the first embodiment, and one wiring 5 is connected from the conducting electrode 1c. The wirings 4a to 4d and the wiring 5 can be connected to the external galvanometer 2b in the multilayer circuit board after hot pressing the board sheet laminate.

  By using the inspection mark structure 70 according to the third embodiment having the above-described configuration, the following effects can be obtained in the inspection method of the multilayer matching accuracy of the multilayer circuit board.

  That is, if a displacement occurs between the substrate sheets in the multilayer substrate circuit and the end face 1f of the inspection via hole 1a comes into contact with any one of the sub-pattern electrodes 3a to 3d constituting the land pattern electrode, the galvanometer 2b detects that there is continuity, but the sub-pattern electrodes 3a to 3d are independent of each other and are connected to the galvanometer 2b by independent wirings 4a to 4d. A continuity check can be performed every time.

  Therefore, by determining the arrangement positions of the sub-pattern electrodes 3a to 3d in advance, the direction of displacement between the substrate sheets can be objectively determined from the result of checking the conduction for each of the sub-pattern electrodes 3a to 3d. Is possible.

  In the case of the present embodiment, the check results are as follows: (1) conduction is not confirmed in any of the sub-pattern electrodes 3a to 3d, and (2) conduction is confirmed in any one of the sub-pattern electrodes 3a to 3d. (3) Any one of a pair of adjacent sub-pattern electrodes (3a, 3b), (3b, 3c), (3c, 3d), (3d, 3a) among the sub-pattern electrodes 3a to 3d There are three ways in which conduction is confirmed.

  Among these, from the check result of (2), it is possible to determine that the positional deviation of the substrate sheet 11d has occurred in either the X or Y axis direction in the figure. As an example, when conduction with the sub-pattern electrode 3a is confirmed, it can be determined that the substrate sheet 11c is moving in the downward direction on the X axis in the drawing.

  Further, from the check result of (3), it is found that the positional deviation of the substrate sheet 11d is caused in either the X ′ or Y ′ axis direction in the drawing, which is rotated by 45 ° in the X or Y axis direction in the drawing. It becomes possible to judge. As an example, when continuity with the sub-pattern electrodes (3a, 3b) is confirmed, it can be determined that the substrate sheet 11c is moving in the downward direction of the X 'axis in the drawing (slightly lower left in the drawing). .

  As described above, in the present embodiment, the land pattern electrode is arranged as an independent sub-pattern electrode around the end face of the inspection via hole, so that in addition to the occurrence of misalignment, misalignment occurs. It is possible to objectively determine the direction of the.

  In the above configuration, the sub-pattern electrodes 3a to 3d are formed by dividing the square shape of the land pattern electrode into four along the diagonal line, but may be divided into two. 9A and 9B show an inspection mark structure 71 in which sub-pattern electrodes 6a and 6b are arranged in a direction parallel to the X axis in the drawing. In this case, it is possible to determine that the positional deviation of the substrate sheet 11d has occurred in the Y-axis direction in the drawing by confirming conduction in either of the sub-pattern electrodes 6a or 6b.

  10 (a) and 10 (b) show inspection marks in which the sub-pattern electrodes 7a and 7b are arranged in a direction parallel to the Y axis in the drawing by rotating the dividing position by 90 ° from the inspection mark structure 71 of FIG. Structure 72. In this case, it is possible to determine that the displacement of the substrate sheet 11d has occurred in the X-axis direction in the figure by confirming conduction in either of the sub-pattern electrodes 7a or 7b.

  Further, by arranging the inspection mark structures 71 and 72 of FIGS. 9 and 10 in parallel between the same layers of the substrate sheet as in the second embodiment, based on the combination of the continuity check results of the sub-pattern electrodes. As in the configuration of FIG. 7, the direction of misalignment can be determined more finely.

  In the above description, four or two sub-pattern electrodes having the same shape are formed around the inspection via hole 1a. However, the number of sub-pattern electrodes is not limited to this. Depending on the direction of misalignment to be determined, the number may be an odd number or may be an arbitrary number of 5 or more. Further, although the sub-pattern electrodes have the same shape, they may have different shapes. Further, although the sub-pattern electrode is provided point-symmetrically around the inspection via hole 1a, the sub-pattern electrode may be provided asymmetrically. These variations can be used when creating the substrate sheet laminate or depending on the arrangement of the inspection mark structure.

(Embodiment 4)
FIGS. 11A and 11B are diagrams showing the inspection mark structure group according to the fourth embodiment of the present invention. In each figure, the same or corresponding parts as those in FIGS. 1 and 2 are denoted by the same reference numerals.

  The inspection mark structure group has a configuration in which a plurality of inspection mark structures 80 to 83 are arranged in parallel between the same layers of the substrate sheet. In the drawing, it is provided between the substrate sheets 11d and 11c. In addition, each inspection mark structure is such that wiring is drawn out independently (not shown), and continuity can be checked.

  Further, in each of the inspection mark structures 80 to 83, each part except for the dimension of the opening has the same shape. The openings 80e, 81e, 82e, and 83e have a relationship of L1 <L2 <L3 <L4 among the diameters L1, L2, L3, and L4.

  The difference between the diameter L1 of the smallest opening 80e and the outer shape V of the inspection via hole 1a is twice the predetermined distance D1 defined in the first embodiment. Accordingly, the opening 80e is defined as the same size as the opening 1e of the inspection mark structure of the first embodiment, and the other openings 81e, 82e, and 83e are larger than this. As specific examples, V = 130 μm, L1 = 300 μm, L2 = 350 μm, L3 = 400 μm, L4 = 450 μm, and D = 20 μm.

  By using the inspection mark structure group according to the fourth embodiment having the above-described configuration, the following effects can be obtained in the inspection method of the stacking match accuracy of the multilayer circuit board.

  That is, by determining the dimensions of the openings of the respective inspection mark structures 80 to 83, the predetermined distance D indicating the allowable limit of misalignment and the known distance from the result of checking the conduction of the respective inspection mark structures 80 to 83 are known. It is possible to objectively determine the size of the positional deviation between the substrate sheets using the difference in dimension of a certain opening.

  In the case of the present embodiment, the check results are as follows: (1) conduction is not confirmed in any of the inspection mark structures 80 to 83, (2) conduction is confirmed only in the inspection mark structure 80, (3) the inspection mark structure 80 and 81 is confirmed, (4) conduction of the inspection mark structures 80 to 82 is confirmed, and (5) conduction of all the inspection mark structures 80 to 83 is confirmed. Here, the check result of (3) corresponds to the example shown in FIG.

  Among these, from the check result of (2), the size of the positional deviation of the substrate sheet 11d is D = 20 μm or more, and the diameter L2 of the opening 81e of the inspection mark structure 81 and the opening 80e of the inspection mark structure 80 are. It can be seen that the difference from the diameter L1 (L2−L1) = within a range of values smaller than 50 μm.

  Also, from the check result of (3), the size of the positional deviation of the substrate sheet 11d is 50 μm or more based on the check result of (2), and the diameter L3 of the opening 82e of the inspection mark structure 82 is It can be seen that the difference (L3−L1) from the diameter L1 of the opening 80e of the inspection mark structure 80 is within a range of values smaller than 100 μm.

  Similarly, from the check result of (4), the size of the positional deviation of the substrate sheet 11d is 100 μm or more based on the check result of (3) above, and the diameter L4 of the opening 83e of the inspection mark structure 83. It can be seen that the difference between the diameter L1 of the opening 80e of the inspection mark structure 80 and the diameter L1 (L4−L1) is within a range of values smaller than 150 μm.

  As described above, in the present embodiment, the inspection mark structure group including a plurality of inspection mark structures each having a plurality of land pattern electrodes having different diameters of the openings is used to determine whether or not misalignment has occurred. In addition, it is possible to objectively and quantitatively determine the magnitude of the positional deviation. Since the accuracy of the completed multilayer circuit board can be known quantitatively, it is possible to make a finer determination of good or bad. For example, it can be used to determine the quality of a product when manufacturing conditions are different between a high-density multilayer circuit board that requires higher accuracy and a low-density multilayer circuit board. Moreover, since the shape of the opening can be used as it is as the shape of the land electrode, the appropriate size of the land electrode of the circuit electrode 102 can be quantitatively known.

  In the above description, the substrate sheet is described as being isotropically displaced. However, if the distance is between adjacent via holes, the substrate sheet expands or contracts causing the displacement. May be considered to occur in an isotropic and uniform size.

  In the above description, the inspection mark structure group has been described as having a plurality of inspection mark structures according to the first embodiment. However, the size of the openings may be different. For example, a plurality of inspection mark structures according to the second or third embodiment may be provided. In this case, it is possible to objectively determine both the direction and size of the positional deviation.

  In the above description, all the inspection mark structures constituting the inspection mark structure group have been described as having different opening sizes. However, only a part of the inspection mark structures may be different. By providing a plurality of ones having the same dimensions, there is an effect of improving the inspection accuracy.

(Embodiment 5)
FIG. 12A is a schematic plan view of the inspection mark structure of the multilayer circuit board according to the fifth embodiment of the present invention, and FIG. 12B is a schematic view taken along the line AA ′ in FIG. FIG.

  FIG. 13 is a perspective view schematically showing the main part of FIG. In each figure, the same or corresponding parts as those in FIGS. 1 and 2 are denoted by the same reference numerals.

  In the inspection mark structure 70 according to the fifth embodiment, four independent rectangular sub-pattern electrodes 8a to 8d are provided around the end face 1f of the inspection via hole 1a. The sub-pattern electrodes 8a to 8d of the fifth embodiment are different from those of the first to fourth embodiments in that each end thereof is positioned so as to overlap and contact the end surface 1f of the inspection via hole 1a. Is different.

  As shown in FIG. 13, in the inspection mark structure according to the fifth embodiment, the sub-pattern electrodes 8a to 8d are connected to independent wirings 4a to 4d, respectively. On the other hand, the inspection via hole 1a and the conducting electrode 1c have the same structure as that of the first embodiment, and one wiring 5 is connected from the conducting electrode 1c. The wirings 8a to 8d and the wiring 5 can be connected to the external galvanometer 2b in the multilayer circuit board after hot pressing the board sheet laminate.

  A method for inspecting the stacking alignment accuracy of a multilayer circuit board by using the inspection mark structure 70 according to the fifth embodiment having the above-described configuration is as follows.

  That is, in the inspection mark structure of the multilayer circuit board according to the present embodiment, as shown in FIGS. 12 and 14 (a), in the state where the board sheet laminate 10 is formed, it is between two board sheets. The end face 1f of the inspection via hole 1a and the end portions of the sub-pattern electrodes 8a to 8d are in contact with each other with an overlap length L. However, the positional deviation between the substrate sheets is caused by the hot press processing. When the amount of deviation becomes larger than the overlap length L, the contact between any part or all of the sub-pattern electrodes 8a to 8d and the end face 1f of the inspection via hole 1a is released.

  In this case, it is possible to determine the presence or absence of misalignment by connecting the wiring 2d of the completed multilayer circuit board and the galvanometer 2b and inspecting the presence or absence of conduction. That is, as shown in FIG. 14A, in the case where no positional deviation occurs, in the conduction circuit formed by the wirings 4a to 4d, the sub-pattern electrodes 8a to 8d, the inspection via hole 1a and the conduction electrode 1c, Since the end face 1f of 1a and all the sub-pattern electrodes 8a to 8d are in contact with each other, conduction is confirmed by connection of the galvanometer 2b.

  On the other hand, when the contact between the end face 1f of the inspection via hole 1a and the sub-pattern electrodes 8a to 8d is released due to the positional deviation between the substrate sheets, the conduction circuit related to the sub-pattern electrode whose contact is released becomes open, and the galvanometer It is confirmed that there is no conduction when 2b is connected. In the case shown in FIG. 14 (b), since the positional deviation has occurred in the X-axis direction in the drawing, the contact between the end face 1f of the inspection via hole 1a and the sub-pattern electrode 8d is released, so that the galvanometer 2b becomes conductive. It is confirmed that there is no.

  As described above, even when the inspection mark structure of the fifth embodiment is used, a method of inspecting the multilayer matching accuracy of the multilayer circuit board that can objectively determine the presence or absence of misalignment by eliminating erroneous recognition based on visual observation or the like Can be carried out.

  Further, in the present embodiment, as in the third embodiment, each of the sub-pattern electrodes 8a to 8d is independent and is connected to the galvanometer 2b by the independent wirings 4a to 4d. A continuity check can be performed for each of the pattern electrodes 8a to 8d. Therefore, by determining the arrangement positions of the sub-pattern electrodes 8a to 8d in advance, it is possible to objectively determine the direction of positional deviation between the substrate sheets from the result of checking the conduction for each of the sub-pattern electrodes 3a to 3d. It becomes possible.

  In the case of the present embodiment, the check results are as follows: (1) conduction is confirmed in all the sub-pattern electrodes 8a to 8d, and (2) in three electrodes other than any one of the sub-pattern electrodes 8a to 8d. Conductivity is confirmed. (3) Of the sub-pattern electrodes 8a to 8d, the adjacent sub-pattern electrodes (8a, 8b), (8b, 8c), (8c, 8d), (8d, 8a) Conduction is confirmed in any one of the sets, and (4) conduction is confirmed in any one of the sub-pattern electrodes 8a to 8d.

  Among these, from the check result of (2), it is possible to determine that the positional deviation of the substrate sheet 11d has occurred in either the X or Y axis direction in the figure. As described above, the example shown in FIG. 14B is a case where it is confirmed that the conduction with the sub-pattern electrode 8d has been cut off, and the substrate sheet has moved in the X-axis direction in the figure. Judgment can be made.

  Further, from the check result of (3), it is found that the positional deviation of the substrate sheet 11d is caused in either the X ′ or Y ′ axis direction in the drawing, which is rotated by 45 ° in the X or Y axis direction in the drawing. It becomes possible to judge. The example shown in FIG. 14C is a case where it is confirmed that the conduction with the sub-pattern electrodes 8a and 8d is cut off, and it is determined that the substrate sheet 11 is moving in the direction of the X ′ axis in the figure. can do.

  Further, from the check result of (4), it is determined that the positional deviation of the substrate sheet has occurred in either the X-axis or Y-axis direction in the figure, and the deviation amount is larger than in the case of (2) above. It becomes possible to do. The example shown in FIG. 14 (d) is a case where it was confirmed that the conduction with the sub-pattern electrodes 8a, 8c, 8d was cut off, and the movement of the substrate sheet occurred in the X-axis direction in the figure, In addition, it can be determined that the shift amount of the substrate sheet is large.

  As described above, in the present embodiment, the inspection mark structure 90 is configured such that the respective end portions of the sub-pattern electrodes constituting the independent conduction circuit are in contact with each other so as to overlap the periphery of the end surface of the inspection via hole. By doing so, it is possible to objectively determine the direction of misalignment and the degree of misalignment in addition to the occurrence of misalignment.

  Further, in the present embodiment, the configuration in which the state in which the sub-pattern electrodes 8a to 8d are electrically connected to the inspection via hole is in a normal state has the following advantages. That is, in the continuity inspection using the inspection mark structure 90, since the state where the continuity can be confirmed is a normal state, the continuity itself cannot be detected even though the continuity circuit is in contact with the measuring device such as the galvanometer 2d. It is possible to remove a factor of anxiety of determination such as malfunction and perform a more reliable inspection. Further, the inspection via hole 1a and the sub-pattern electrodes 8a to 8d can be used as a part of the circuit electrode shown in FIG. 1 by utilizing the normal state of the conduction state.

  In the above configuration, the sub-pattern electrodes 8a to 8d have a shape provided at every crossing angle (90 degrees) that is uniform in the four directions around the end surface 1f of the inspection via hole 1a. The arrangement position and the number are not limited to this. The example shown in FIG. 15 has a configuration in which sub-pattern electrodes 8e to 8h are added in addition to the sub-pattern electrodes 8a to 8d. The sub-pattern electrodes 8e to 8h are a set of four electrodes having a crossing angle of 90 degrees rotated by 45 degrees with respect to the entire sub-pattern electrodes 8a to 8d, and each end portion overlaps the sub-pattern electrodes 8a to 8d. The overlap width LL is deeper than the width L and is connected so as to overlap with the end face 1f of the inspection via hole 1a. By using a plurality of sub-pattern electrodes having different overlapping widths and overlapping angles, it is possible to improve the accuracy of detection of displacement. Further, the sub-pattern electrode is not limited by the shape, and may have any shape.

  In the above description, four sub-pattern electrodes having the same shape are formed around the inspection via hole 1a. However, the number of sub-pattern electrodes is not limited to this. Depending on the direction of misalignment to be determined, the number may be an odd number or may be an arbitrary number of 5 or more. Further, although the sub-pattern electrodes have the same shape, they may have different shapes. Further, although the sub-pattern electrode is provided point-symmetrically around the inspection via hole 1a, the sub-pattern electrode may be provided asymmetrically. These variations can be used when creating the substrate sheet laminate or depending on the arrangement of the inspection mark structure. Further, as in the configuration shown in FIG. 9 of the third embodiment, the inspection mark structure group may be implemented as a combination of inspection mark structures having sub-pattern electrodes arranged at different angles. Further, similarly to the configuration shown in FIG. 11, the inspection mark structure group may be implemented by a combination of inspection mark structures in which the end face 1f of the inspection via hole 1a and the sub-pattern electrode have different overlapping lengths.

(Embodiment 6)
As a sixth embodiment of the present invention, a method of manufacturing a multilayer circuit board using the above-described inspection method using the inspection mark structure or inspection mark structure group according to each embodiment of the present invention is shown in FIG. An example of the manufacture of a 5-layer multilayer circuit board having the above will be described with reference to the flowchart of FIG.

  As step S1, via holes 101 corresponding to the electric circuit 12 are provided in the substrate sheets 11a to 11e. Specifically, a prepreg or ceramic is used as a substrate sheet, a through hole is processed by a laser or the like, and the via hole 101 is formed by filling the through hole with a conductive paste made of Cu powder and a thermosetting epoxy resin.

  Next, as step S <b> 2, an inspection via hole 1 a is created in the same procedure as the via hole 101. Steps S1 and S2 may be performed in parallel.

  Next, as step S3, first, the circuit electrodes 102 and the conductive electrodes 1c are provided on the main surfaces of the substrate sheets 11a to 11e, and the double-sided circuit boards are individually completed.

Details of step S3 are as follows. A 12 μm copper foil is placed on each main surface of each of the substrate sheets 11a to 11e provided with via holes, and heated and pressurized by a hot press (200 ° C., 50 kg /
cm ² ), and then a circuit pattern is formed by etching. Second, a double-sided circuit board is laminated to complete a board sheet laminate. Specifically, the metal foil having a thickness of 12 μm, the prepreg, the double-sided circuit board, the prepreg, and the metal foil are laminated in this order on the work stage. Each positioning is performed by positioning by image recognition or the like using a positioning pattern.

  Next, by heating and pressing with a heater chip or the like heated from above the outermost metal foil, the resin component of each of the substrate sheets 11a to 11e is melted, and then the double-sided circuit board and the metal foil are bonded by curing the resin component, The board sheet laminate 10 is completed. At this stage, the electric circuit 12 and the inspection mark structure 1 are formed in the substrate sheet laminate 10. Further, by this stage, the inspection mark structure 1 is provided with the wiring 2a.

Next, as step S4, the substrate sheet laminate 10 is hot-pressed to complete a multilayer circuit board. Specifically, the entire surface of the substrate sheet laminate 10 is heated and pressurized (200 ° C., 50 kg / c
m ² ), each layer of the substrate sheets 11a to 11e is bonded to the metal foil, and the conductive pattern filled in the through-holes sandwiched between the circuit pattern of the double-sided circuit board and the copper foil is provided. Internal via connection with paste. Furthermore, a multilayer circuit board is created by selectively etching the outermost metal foil to form a circuit pattern.

  Next, as step S5, the galvanometer 2b is connected to the wiring 2a of the completed multilayer circuit board, and the continuity of the inspection mark structure 1 is checked. Based on this, as step S6, the stacking matching accuracy of the multilayer circuit board is determined.

  At this time, when the inspection mark structure of the first embodiment is used, the presence / absence of misalignment is determined as the stacking alignment accuracy. When the inspection mark structure according to the second, third, or fifth embodiment is used, the presence / absence of misalignment and the direction of misalignment are determined as the stacking alignment accuracy. Further, when the inspection mark structure of the fourth embodiment is used, the presence / absence of misalignment and the size of misalignment are determined as the stacking matching accuracy.

  If it is determined that the stacking matching accuracy is suitable, the completed multilayer circuit board is a non-defective product. Therefore, as step S7, the production of the multilayer circuit board is continued by repeating the above steps. The stacking alignment accuracy here is the presence / absence of misalignment, and the individual inspection of the multilayer circuit board can be easily realized.

  On the other hand, when it is determined that the stacking matching accuracy is not suitable, the completed multilayer circuit board is discarded because it is a defective product.

  Here, when the stacking alignment accuracy is determined using the inspection mark structures of Embodiments 2 to 5 as the inspection mark structure, the direction of displacement or the size of displacement is known based on the determination result. Therefore, as step S8, the position of each of the substrate sheets 11a to 11e, which are double-sided circuit boards, is corrected using the direction of displacement or the magnitude of the displacement that has been found, and the substrate sheet laminated body 10 is formed. create.

  Thereafter, the operation after step S4 is continued, and the multilayer circuit board is completed based on the board sheet laminate 10 after the lamination position is corrected.

  In each of the above steps, steps S4 and S5 correspond to the inspection method of the multilayer matching accuracy of the multilayer circuit board of the present invention, and step S8 corresponds to the design method of the substrate sheet laminate of the present invention.

  As described above, according to the method for manufacturing a multilayer circuit board of the present embodiment, the multilayer matching accuracy inspection method using the inspection mark structure of Embodiments 1 to 5 is included in a series of manufacturing steps, thereby providing a multilayer The quality of the circuit board can be judged objectively.

  Further, the yield and the yield of the multilayer circuit board can be improved by feeding back the direction and size of the positional deviation obtained from the inspection result of the stacking match accuracy to the manufacturing conditions of the multilayer circuit board to be manufactured next time.

  In the above description, the correction target as the predetermined design condition of the present invention is the stacking position of each of the substrate sheets 11a to 11e, but the design condition is that of the via hole or the circuit electrode in each substrate sheet. Arrangement, size, etc. may be sufficient. It may be the number of layers of the substrate sheet to be laminated. In short, any numerical value may be used as a design condition as long as it is a parameter necessary for manufacturing a multilayer circuit board.

  In each of the above embodiments, inspection mark structures 1, 50a, 50b, 51a, 51b, 70 to 72, 80 to 83, and 90 correspond to the inspection mark structure of the present invention.

  The inspection via hole 1a corresponds to the inspection via hole of the present invention.

  The land pattern electrodes 1b and 1b 'correspond to the land pattern electrodes of the present invention.

  The sub-pattern electrodes 3a to 3d, 6a, 6b, 7a, 7b, 8a to 8d, and 8e to 8h correspond to the sub-pattern electrodes of the present invention.

  Conductive electrodes 1c and 1c 'correspond to the conductive electrodes of the present invention.

  Further, the openings 1e and 1e'80e to 83e in the land pattern electrodes of the inspection mark structure or the inspection mark structure group according to the first, second, and fourth embodiments have a shape that seamlessly surrounds the end face of the inspection via hole according to the present invention. Equivalent to.

  In the land pattern electrode having the inspection mark structure of the third embodiment, the region formed between the sub-pattern electrodes 3a to 3d, 6a, 6b, 7a, 7b and the inspection via hole 1a is formed according to the present invention. This corresponds to a shape surrounding the end face of the inspection via hole with a cut.

  However, the present invention is not limited to the above embodiments.

  In the first embodiment, the shape of the opening 1e is a shape that surrounds the end face of the inspection via hole without a break. For example, as shown in FIG. 17, a notch may be provided in a part of the end portion of the land pattern electrode 1b. In this case, the opening corresponds to a shape surrounding the end face of the inspection via hole with a cut.

  Moreover, although the shape of the end face 1f of the inspection via hole 1a is all circular, it may be any shape such as a square or a rectangle. If the shape of the opening of the corresponding land pattern electrode is similar to the end face shape, the inspection mark structure or the inspection mark structure group of the first and fourth embodiments can be realized.

  In addition, even if the shape of the opening of the corresponding land pattern electrode is not similar to the shape of the end face of the inspection via hole, the shape of the opening itself is the same, and the arrangement in the land pattern electrode is If there is a relationship that does not match each other, the inspection mark structure group of the second embodiment can be realized.

  Also, in each of the above embodiments, the description is given on the assumption that the present invention is implemented by taking, as an example, a substrate sheet laminate in which a plurality of substrate sheets 11a to 11e are laminated and a multilayer circuit board formed by hot pressing the same. However, the present invention is not limited to this, and may be carried out in the manufacture of a module formed by stacking a plurality of completed multilayer circuit boards.

  This is because it is possible to inspect the stacking match accuracy between the multilayer circuit boards. At this time, each multilayer circuit board to be laminated may be provided with electric parts and electronic parts such as semiconductor elements on the surface or between layers. The invention is effective.

  Moreover, it is good also as what implements in the test | inspection of the baked material of the board | substrate sheet | seat laminated body which consists only of a board | substrate sheet | seat which does not have the electric circuit 12. FIG. In this case, it can be used for inspecting physical properties such as extensibility and shrinkage at the time of hot pressing of a prepreg or ceramic used for a substrate sheet.

  The inspection mark structure according to the present invention has an effect that it is possible to objectively perform the inspection of the lamination matching accuracy. For example, the inspection mark structure, the substrate sheet laminate, the multilayer circuit board, the multilayer matching accuracy of the multilayer circuit board can be improved. This is effective as an inspection method, a design method for a substrate sheet laminate, and the like.

(A) The figure which shows typically the structure of the test | inspection mark structure of the multilayer circuit board based on Embodiment 1 of this invention, (b) The enlarged view which shows typically the principal part of Fig.1 (a). (A) Schematic plan view of inspection mark structure 1 (b) Schematic cross-sectional view taken along line AA ′ in FIG. (A) The figure for demonstrating the principle of the inspection method of the lamination | stacking matching precision of the multilayer circuit board concerning Embodiment 1 of this invention, (b) The lamination | stacking matching precision of the multilayer circuit board concerning Embodiment 1 of this invention For explaining the principle of the inspection method The top view which shows an example of the substrate sheet laminated body 10 (A) The figure which shows typically the structure of the test mark structure group of the multilayer circuit board concerning Embodiment 2 of this invention, (b) Typical sectional drawing by the AA 'straight line of Fig.5 (a) (A) The figure which shows typically the other structural example of the test mark structure group of the multilayer circuit board based on Embodiment 2 of this invention, (b) The typical cross section by the AA 'line of Fig.6 (a) Figure (A) The figure which shows typically the structure of the test | inspection mark structure of the multilayer circuit board concerning Embodiment 3 of this invention, (b) The typical sectional drawing by the AA 'line of Fig.7 (a) The enlarged view which shows typically the principal part of the inspection mark structure of the multilayer circuit board which concerns on Embodiment 3 of this invention. (A) The figure which shows typically the other structural example of the test | inspection mark structure of the multilayer circuit board based on Embodiment 3 of this invention, (b) Typical sectional drawing by the AA 'straight line of Fig.9 (a) (A) The figure which shows typically the other structural example of the test | inspection mark structure of the multilayer circuit board concerning Embodiment 3 of this invention, (b) The typical sectional drawing by the AA 'line of Fig.10 (a) (A) The figure which shows typically the structure of the test mark structure group of the multilayer circuit board based on Embodiment 4 of this invention, (b) The typical sectional drawing by the AA 'straight line of Fig.7 (a) (A) The figure which shows typically the structure of the test | inspection mark structure of the multilayer circuit board concerning Embodiment 5 of this invention, (b) The typical sectional drawing by the AA 'straight line of Fig.12 (a) The enlarged view which shows typically the principal part of the inspection mark structure of the multilayer circuit board which concerns on Embodiment 5 of this invention. (A) The figure which shows typically description of the test | inspection by the test mark structure of the multilayer circuit board concerning Embodiment 5 of this invention, (b) By the test mark structure of the multilayer circuit board concerning Embodiment 5 of this invention The figure which shows description of a test | inspection typically, (c) The figure which shows typically description of the test | inspection by the test mark structure of the multilayer circuit board based on Embodiment 5 of this invention, (d) Embodiment 5 of this invention The figure which shows typically description of the test | inspection by the test mark structure of the multilayer circuit board which concerns on The figure which shows typically the other structural example of the test mark structure of the multilayer circuit board concerning Embodiment 5 of this invention. The figure which shows the flowchart for demonstrating the manufacturing method of the multilayer circuit board based on Embodiment 6 of this invention. The figure which shows the other structural example of the land pattern electrode 1b of the inspection mark structure of the multilayer circuit board which concerns on Embodiment 1 of this invention. (A) is a figure which shows the multilayer circuit board formed by heat-pressing the board | substrate sheet | seat laminated body which provided the conventional inspection mark structure, (b) The top view which shows typically the conventional inspection mark structure.

1, 50a, 50b, 51a, 51b, 70-72, 80-83, 90 Inspection mark structure 1a Inspection via hole 1b, 1b 'Land pattern electrode 1c, 1c' Conduction electrode 1e, 1e 'Opening
1f End face 2a, 4a, 5 Wiring 2b Galvanometer 3a-3d, 6a, 6b, 7a, 7b, 8a-8d, 8e-8h Sub-pattern electrode 10 Substrate sheet laminate 11a-11e Substrate sheet 12 Electric circuit 40, 41 Boundary 42a, 42b, 43a, 43b Position 101 Via hole 102 Circuit electrode

Claims (11)

An inspection via hole provided in any of the substrate sheets constituting at least two layers of the substrate sheet laminate,
Around the end face of the inspection via hole formed on one surface side of the substrate sheet provided with the inspection via hole, a land pattern electrode provided so as to be in contact with the end face;
An inspection mark structure comprising: a conduction electrode formed on the other surface side of the substrate sheet provided with the inspection via hole and provided to be electrically connected to an end surface of the inspection via hole.   2. The inspection mark structure according to claim 1, wherein the land pattern electrode is formed around a plurality of sub-pattern electrodes that are provided around an end face of the inspection via hole and each contact with the end face.   The inspection mark structure according to claim 2, wherein the sub-pattern electrode is arranged point-symmetrically with respect to an end face of the inspection via hole. An inspection mark structure group comprising a plurality of inspection mark structures according to claim 1,
An inspection mark structure group in which an outer diameter of an end face of the inspection via hole is different for all or a part of the inspection mark structures. A plurality of substrate sheets having via holes;
Circuit electrodes provided in layers of the plurality of substrate sheets;
The board | substrate sheet laminated body provided with the test | inspection mark structure of Claim 1 formed in the layer of these board | substrate sheets. The inspection mark structure is plural,
6. The substrate sheet according to claim 5, wherein a size of a contact portion between an end face of the inspection via hole and the land pattern electrode in the inspection mark structure is different for all or a part of the plurality of the inspection mark structures. Laminated body.   A multilayer circuit board formed by hot pressing the board sheet laminate according to claim 5. A plurality of substrate sheets having via holes;
Circuit electrodes provided in layers of the plurality of substrate sheets;
The inspection mark structure according to claim 1, wherein the inspection mark structure is formed in a layer of the plurality of substrate sheets.
A method for inspecting the multilayer conformity of a multilayer circuit board having
Electrically connecting the conductive electrode of the inspection mark structure and the land pattern electrode;
And a step of determining that the stacking match accuracy is maintained when the connection is conductive.   The multilayer circuit board stacking according to claim 8, wherein the stacking matching accuracy is at least one of the presence / absence of a positional deviation, a direction of the positional deviation, and a magnitude of the positional deviation between the substrates constituting the multilayer circuit board. Inspection method for conformity accuracy. The plurality of substrate sheets having the inspection mark structure according to claim 1, wherein the plurality of substrate sheets are formed on a plurality of substrate sheet layers having via holes under predetermined design conditions, so that circuit electrodes are positioned between the layers. A step of creating a test substrate sheet laminate,
A step of hot pressing the test substrate sheet laminate to create a test multilayer circuit board;
A step of acquiring a direction of misalignment or a magnitude of misalignment of the board as the laminating match accuracy of the test multilayer circuit board using the multilayer circuit board stacking precision testing method according to claim 8. When,
A method for designing a substrate sheet laminate, comprising a step of correcting the predetermined design condition using the obtained direction of displacement of the substrate or the magnitude of displacement.   The method for designing a substrate sheet laminate according to claim 10, wherein the predetermined design condition is a lamination position of each of the plurality of substrate sheets.

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